Integrated cleaning equipment

Abstract

This application discloses an integrated cleaning device, relating to the field of cleaning equipment, comprising a frame; a loading rack installed at one end of the frame; a unloading rack installed at the other end of the frame; a transfer mechanism installed on the frame and used for transferring optical components; a hydrocarbon cleaning unit installed on the frame and adjacent to the loading rack, the hydrocarbon cleaning unit being used to clean optical components using hydrocarbon solvents; and an HFE cleaning unit installed on the frame and adjacent to the unloading rack. This application reduces the footprint by integrating the hydrocarbon cleaning unit and the HFE cleaning unit onto the frame; it reduces mutual interference and improves safety by physically isolating the hydrocarbon cleaning unit and the HFE cleaning unit with partitions; and it prevents large amounts of hydrocarbon solvent from entering the next process by using air knife purging, greatly reducing the contamination load of subsequent HFE solvents and minimizing cross-contamination.

Description

Technical Field

[0001] This application relates to the field of cleaning equipment technology, and in particular to integrated cleaning equipment. Background Technology

[0002] Currently, water-based cleaning processes are widely used in the cleaning of precision parts and optical components. A common method involves using alkaline or neutral water-based cleaning agents in conjunction with ultrasonic cleaning, followed by rinsing with pure water and then hot air or vacuum drying. However, water-based cleaning processes suffer from problems in practical applications, such as watermark residue, ion contamination, oxidation risk, long drying times, and high energy consumption. Furthermore, they have poor adaptability to water-sensitive materials or coated parts. To overcome these issues, the industry is gradually adopting hydrocarbon solvent cleaning or HFE vapor phase cleaning technologies.

[0003] However, in existing technologies, the two systems are usually set up independently, occupy a large area, and lack an effective isolation structure, which can easily lead to cross-contamination. Summary of the Invention

[0004] To address the issue of large footprint caused by separate setups of the two systems, this application provides an integrated cleaning device.

[0005] The integrated cleaning equipment provided in this application, used for cleaning optical components, adopts the following technical solution: including:

[0006] frame;

[0007] A feeding rack, which is installed at one end of the machine frame;

[0008] A feeding rack is installed at the other end of the machine frame;

[0009] A transfer mechanism, which is mounted on a frame and used to transfer optical elements;

[0010] A hydrocarbon cleaning unit is mounted on a frame and adjacent to a loading rack. The hydrocarbon cleaning unit is used to clean optical components using hydrocarbon solvents.

[0011] HFE cleaning unit, which is mounted on the frame and adjacent to the unloading rack, is used to clean optical components using HFE solvent;

[0012] A partition is installed on the frame and positioned between the hydrocarbon cleaning unit and the HFE cleaning unit to achieve physical isolation.

[0013] By adopting the above technical solution, the hydrocarbon cleaning unit and the HFE cleaning unit are integrated into one unit, reducing the equipment footprint; the physical isolation between the two by the partition reduces mutual interference and improves safety.

[0014] Optionally, the transfer mechanism is one of a gantry robot, a rotary turntable structure, a linear slide rail transport structure, or a fully enclosed automatic loading and unloading system.

[0015] By adopting the above technical solutions, the transfer mechanism can be selected from one of the following: gantry robot, rotary table structure, linear slide rail transport structure, or fully enclosed automatic loading and unloading system, which can realize the effective transfer of optical components.

[0016] Optionally, the hydrocarbon cleaning unit includes:

[0017] A first housing is mounted on a frame and has a first opening. At least one hydrocarbon tank is provided inside the first housing for containing hydrocarbon solvents.

[0018] A first ultrasonic transducer is mounted on a first housing and at least one is provided. The first ultrasonic transducer is used to generate cavitation bubbles in a hydrocarbon solvent to remove particles from the surface of the optical element.

[0019] The first filter is installed on the first housing and connected to the interior of the hydrocarbon tank. The first filter is used to circulate and filter the hydrocarbon solvent to reduce secondary adhesion of particles to the optical components.

[0020] By adopting the above technical solution, the hydrocarbon tank is used to contain hydrocarbon solvent, the first ultrasonic transducer generates cavitation bubbles to remove particles from the surface of the optical element, and the first filter circulates and filters the hydrocarbon solvent, which can effectively clean the optical element and reduce secondary adhesion of particles.

[0021] Optionally, an air knife is installed inside the first chamber. The air knife is located at the top of the hydrocarbon tank and is used to blow off the hydrocarbon solvent adhering to the surface of the optical components, thereby reducing the contamination of the HFE cleaning unit by the hydrocarbon solvent.

[0022] By adopting the above technical solution, the hydrocarbon solvent on the surface of optical components can be blown off by an air knife, which can reduce the contamination of the HFE cleaning unit by the hydrocarbon solvent.

[0023] Optionally, two hydrocarbon tanks are provided, and the ultrasonic frequencies inside the two hydrocarbon tanks are set to low frequency and high frequency, respectively.

[0024] By adopting the above technical solution, two hydrocarbon tanks are set up, and low-frequency and high-frequency ultrasonic cleaning is used respectively to remove particles with larger and smaller diameters, thereby improving the cleaning effect.

[0025] Optionally, the first housing is equipped with an opening and closing structure, which is used to open and close the first opening of the first housing, thereby reducing external contamination of the interior of the first housing.

[0026] By adopting the above technical solution, the opening and closing structure can open and close the first opening of the first box, reducing external contamination inside the first box.

[0027] Optionally, the HFE cleaning unit includes:

[0028] The second chamber is mounted on the frame and has a second opening. The second chamber has an integrally formed boiling tank and a recovery tank. The boiling tank is used to contain HFE solvent.

[0029] A heating element is disposed in a boiling tank and is used to heat and evaporate HFE solvent.

[0030] The first condenser tube is arranged along the contour edge of the second chamber and is located at the top of the boiling tank. The bottom of the first condenser tube is provided with a first guide groove, which is integrally formed on the second chamber and is connected to the inside of the recovery tank.

[0031] By adopting the above technical solution, the heating element heats and evaporates the HFE solvent in the boiling tank. The pure vapor generated by the low boiling point of HFE is condensed on the relatively cold surface of the optical element. The condensate washes the optical element to remove residual trace amounts of hydrocarbon solvent and suspended particles. At the same time, the first condenser tube condenses and recovers the HFE solvent to the recovery tank, realizing solvent recovery and reuse.

[0032] Optionally, the second chamber also has an integrally formed rinsing tank, which is located between the boiling tank and the recovery tank and is used to contain HFE solvent. The second chamber is also equipped with a second ultrasonic transducer, which is used to generate cavitation bubbles in the HFE solvent to remove particles from the surface of the optical element. The second chamber is also equipped with a second filter, which is connected to the inside of the rinsing tank. The second filter is used to circulate and filter the HFE solvent to reduce the secondary adhesion of particles to the optical element.

[0033] By adopting the above technical solution, the rinsing tank can hold HFE solvent, the second ultrasonic transducer can generate cavitation bubbles to remove particles from the surface of optical components, and the second filter circulates and filters HFE solvent to reduce secondary adhesion of particles and improve the cleanliness of optical components.

[0034] Optionally, a second condenser pipe is also provided at the contour edge of the second housing. The second condenser pipe is located at the second opening. The temperature of the second condenser pipe is lower than that of the first condenser pipe. A second guide groove is provided at the bottom of the second condenser pipe. The second guide groove is integrally formed on the second housing and is connected to the outside.

[0035] By adopting the above technical solution, the second condenser can condense and discharge the external air entering the second chamber, reducing the interference of external air on the internal cleaning. It can also take advantage of the volatile properties of HFE solvent, combined with the low temperature environment, to make the thin film on the surface of the optical element evaporate and condense rapidly, achieving a dry state without watermarks or residues.

[0036] Optionally, a switch structure is installed on the second housing, which is used to open and close the second opening of the second housing to reduce external contamination of the interior of the second housing.

[0037] By adopting the above technical solution, the switch structure can open and close the second opening of the second housing, reducing external contamination of the interior of the second housing.

[0038] In summary, this application includes at least one of the following beneficial technical effects:

[0039] By integrating the hydrocarbon cleaning unit and the HFE cleaning unit onto the rack, the footprint is reduced. Since hydrocarbon solvents are flammable and explosive organic liquids, the hydrocarbon cleaning unit and the HFE cleaning unit are physically isolated by a partition, reducing their mutual influence and improving safety. Air knife purging can cut off most of the liquid film, preventing a large amount of hydrocarbon solvent from entering the next process, greatly reducing the contamination load of the subsequent HFE solvent, extending the replacement cycle of expensive solvents, and preventing drying marks caused by the mixing of the two solvents, thus reducing cross-contamination. Attached Figure Description

[0040] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0041] Figure 1 This is a perspective view of the present application;

[0042] Figure 2 This is a front view of this application;

[0043] Figure 3 This is a schematic diagram of the hydrocarbon cleaning unit structure of this application;

[0044] Figure 4 This is a schematic diagram of the HFE cleaning unit structure of this application.

[0045] Reference numerals: 1. Frame; 2. Loading rack; 3. Unloading rack; 4. Transfer mechanism; 5. Hydrocarbon cleaning unit; 51. First housing; 511. First opening; 512. Hydrocarbon tank; 52. First ultrasonic transducer; 53. First filter; 54. Air knife; 55. Opening and closing structure; 6. HFE cleaning unit; 61. Second housing; 611. Second opening; 612. Boiling tank; 613. Recovery tank; 614. First guide tank; 615. Rinsing tank; 616. Second guide tank; 62. Heating element; 63. First condenser; 64. Second ultrasonic transducer; 65. Second filter; 66. Second condenser; 67. Switching structure; 7. Partition. Detailed Implementation

[0046] The following is in conjunction with the appendix Figures 1-4 This application will be described in further detail.

[0047] This application discloses an integrated cleaning device for cleaning optical components.

[0048] Reference Figure 1 The integrated cleaning equipment includes: a frame 1, a loading rack 2, a unloading rack 3, a transfer mechanism 4, a hydrocarbon cleaning unit 5, an HFE cleaning unit 6, and a partition 7. By integrating the hydrocarbon cleaning unit 5 and the HFE cleaning unit 6, the footprint is reduced. Since hydrocarbon solvents are flammable and explosive organic liquids, the partition 7 physically isolates the two, reducing their mutual influence and improving safety.

[0049] like Figure 1 As shown, frame 1 is a rectangular frame, and a control system is installed on frame 1 to achieve unified operation; loading rack 2 is a mesh structure, fixedly installed at one end of frame 1, used to place optical components to be cleaned; unloading rack 3 is a mesh structure, fixedly installed at the other end of frame 1, used to place cleaned optical components; transfer mechanism 4 is a conventional technical means, fixedly installed on frame 1 and used to transfer optical components, and can be one of a gantry robot, a rotary table structure, a linear slide rail transport structure or a fully enclosed automatic loading and unloading system.

[0050] like Figure 1 As shown, the hydrocarbon cleaning unit 5 is mounted on the frame 1 and adjacent to the loading rack 2. The hydrocarbon cleaning unit 5 is used to clean optical components using hydrocarbon solvents. Specifically, as shown... Figure 2 , Figure 3 As shown, the hydrocarbon cleaning unit 5 includes: a first housing 51, a first ultrasonic transducer 52, and a first filter 53.

[0051] like Figure 3As shown, the first box 51 is rectangular and is fixedly installed on the frame 1 and has a rectangular first opening 511. The bottom of the first box 51 has two hydrocarbon tanks 512 integrally formed inside, which are used to contain hydrocarbon solvents.

[0052] like Figure 3 As shown, the first ultrasonic transducer 52 is a conventional technology. The first ultrasonic transducer 52 is fixedly installed at the bottom of the first housing 51 and there are two of them. They are respectively set at the bottom of the two hydrocarbon tanks 512. The first ultrasonic transducer 52 is used to generate cavitation bubbles in the hydrocarbon solvent to remove particles from the surface of the optical element. The ultrasonic frequencies inside the two hydrocarbon tanks 512 are set to low frequency and high frequency, respectively. The low frequency is used to remove particles with larger diameters and the high frequency is used to remove particles with smaller diameters.

[0053] More specifically, one hydrocarbon bath 512 uses 40kHz, which is the "rough cleaning" stage. 40kHz is a relatively low frequency, producing larger cavitation bubbles with strong bursting force. It is mainly responsible for removing larger particles with strong adhesion, processing oil, or fingerprints from the surface of optical components. This stage is the core of efficiency, aiming to remove most contaminants in a short time, reducing the burden on subsequent fine cleaning. The other hydrocarbon bath 512 uses 120kHz, which is the "fine cleaning" stage. The higher the frequency, the stronger the penetration of the ultrasonic waves, and the smaller and denser the cavitation bubbles produced. The high frequency of 120kHz can penetrate into the tiny pores or edge gaps on the surface of optical components, physically removing weak but extremely fine particles. The high-frequency cleaning is gentler and can effectively avoid the microscopic damage (cavitation corrosion) that low-frequency cavitation may cause to the surface of precision optical components.

[0054] like Figure 2 As shown, the first filter 53 is a conventional technical means, and there are two of them. The first filter 53 is fixedly installed at the bottom of the first housing 51 and connected to the inside of the two hydrocarbon tanks 512 respectively. The first filter 53 is used to circulate and filter the hydrocarbon solvent to reduce the secondary adhesion of particles to the optical element.

[0055] like Figure 2 As shown, since hydrocarbon solvents typically evaporate slowly, a significant amount of hydrocarbon solvent remains on the surface of optical components after cleaning. To reduce cross-contamination, a further solution involves a fixed air knife 54 installed inside the first housing 51. The air knife 54 is positioned at the top of the hydrocarbon tank 512 and is used to blow off the hydrocarbon solvent adhering to the surface of the optical components, thereby reducing the contamination of the HFE cleaning unit 6 by the hydrocarbon solvent. More specifically, by purging with clean high-pressure air (or nitrogen), most of the liquid film can be cut off, preventing a large amount of hydrocarbon solvent from entering the next process. This greatly reduces the contamination load of the subsequent HFE solvent, extends the replacement cycle of expensive solvents, and prevents drying marks caused by the mixing of the two solvents. This is the "physical pretreatment" isolation section.

[0056] like Figure 2 As shown, the top of the first housing 51 is equipped with an opening and closing structure 55, which is a conventional technical means. The opening and closing structure 55 is used to open and close the first opening 511 of the first housing 51, thereby reducing external contamination of the interior of the first housing 51.

[0057] like Figure 1 As shown, the HFE cleaning unit 6 is mounted on the frame 1 and adjacent to the unloading rack 3. The HFE cleaning unit 6 is used to clean optical components using HFE solvent; specifically, as shown... Figure 2 , Figure 4 As shown, the HFE cleaning unit 6 includes: a second housing 61, a heating element 62, and a first condenser tube 63.

[0058] Among them, such as Figure 4 As shown, the second box 61 is approximately rectangular with a stepped outer contour. The second box 61 is fixedly mounted on the frame 1 and has a rectangular second opening 611. The bottom of the second box 61 has an integrally formed boiling tank 612 and a recovery tank 613. The boiling tank 612 is used to contain HFE solvent.

[0059] like Figure 4 As shown, the heating element 62 is a conventional technique, located at the bottom inside the boiling tank 612, used to heat and evaporate the HFE solvent; the pure vapor generated by the low boiling point of HFE condenses on the relatively cool surface of the optical element. The condensate washes over the optical element like "rain," carrying away residual trace amounts of hydrocarbon solvent and suspended particles; the steam cleaning always uses pure solvent that has been distilled and circulated, ensuring the upper limit of the cleanliness level; this is "displacement and preliminary purification".

[0060] like Figure 4 As shown, the first condenser 63 is a conventional technique. The first condenser 63 is arranged along the inner contour edge of the second housing 61 and is set at the top of the boiling tank 612. The bottom of the first condenser 63 is provided with a first guide groove 614, which is integrally formed on the second housing 61 and forms a step-like shape around the outer contour of the second housing 61. The first guide groove 614 is connected to the inside of the recovery tank 613. The HFE solvent vapor is condensed and recovered into the recovery tank 613 through the first condenser 63. In the recovered liquid, the proportion of HFE solvent is 90% and the proportion of water is 10%, which can be separated and reused separately in the future.

[0061] like Figure 4As shown, to further enhance the cleaning effect, in a further embodiment, a rinsing tank 615 is integrally formed inside the second housing 61. The rinsing tank 615 is positioned between the boiling tank 612 and the recovery tank 613 and is used to contain the HFE solvent. A conventional second ultrasonic transducer 64 is also installed on the second housing 61. The second ultrasonic transducer 64 is used to generate cavitation bubbles in the HFE solvent to remove particles from the surface of the optical components, such as... Figure 2 As shown, a conventional second filter 65 is also installed on the second housing 61. The second filter 65 is internally connected to the rinsing tank 615. The second filter 65 is used to circulate and filter the HFE solvent to reduce secondary adhesion of particles to the optical components. The final ultrasonic treatment is performed in the pure HFE solvent. Due to the extremely low surface tension of the HFE solvent, it can effectively wet the surface of the optical components. Combined with the ultrasonic waves, the remaining tiny charged particles are adsorbed and removed. After this step, the surface of the optical components has achieved an extremely high level of physical cleanliness, which is the "final cleanliness guarantee".

[0062] like Figure 4 As shown, to reduce the interference of external air on the internal cleaning process, a further design includes a second condenser pipe 66 located at the contour edge of the second housing 61. The second condenser pipe 66 is positioned at the second opening 611. The temperature of the second condenser pipe 66 is lower than that of the first condenser pipe 63. A second guide groove 616 is integrally formed on the second housing 61, creating a stepped shape around the outer contour of the second housing 61. The second guide groove 616 is connected to the outside, allowing external air to enter and be immediately condensed and discharged by the second condenser pipe 66. Simultaneously, utilizing the highly volatile nature of HFE solvent, combined with the low-temperature environment of the second condenser pipe 66 in the cooling zone, the thin film on the surface of the optical components rapidly evaporates and condenses when they leave the liquid surface, ultimately achieving a watermark-free and residue-free dry state – a "trace-free finish."

[0063] like Figure 2 As shown, a conventional switch structure 67 is installed on the second housing 61. The switch structure 67 is used to open and close the second opening 611 of the second housing 61, thereby reducing external contamination of the interior of the second housing 61.

[0064] like Figure 1 As shown, the partition 7 is rectangular. The partition 7 is fixedly installed on the frame 1 and is placed between the hydrocarbon cleaning unit 5 and the HFE cleaning unit 6 to achieve physical isolation.

[0065] The implementation principle of the integrated cleaning equipment of this application is as follows: the optical element to be cleaned is placed on the loading rack 2, and the optical element is transferred to the 40kHz hydrocarbon tank 512 in the first box 51 by the transfer mechanism 4 to complete the rough cleaning; then the optical element is transferred to the 120kHz hydrocarbon tank 512 in the first box 51 by the transfer mechanism 4 to complete the fine cleaning; then the optical element is transferred to the air knife 54 by the transfer mechanism 4 to blow away most of the hydrocarbon solvent; throughout the process, except when the transfer mechanism 4 transfers the optical element, the first opening 511 of the first box 51 is closed by the opening and closing structure 55.

[0066] After purging, the optical element is transferred to the top of the boiling tank 612 of the second housing 61 by the transfer mechanism 4 to complete steam rinsing; then the optical element is transferred to the rinsing tank 615 by the transfer mechanism 4 to complete ultrasonic rinsing; then the optical element is transferred to the vicinity of the second condenser tube 66 by the transfer mechanism 4 to complete the traceless finishing process; throughout the process, except when the transfer mechanism 4 is transferring the optical element, the second opening 611 of the second housing 61 is closed by the switch structure 67; finally, the optical element is transferred to the unloading rack 3 by the transfer mechanism 4 to achieve unloading.

[0067] Finally, it needs to be emphasized that:

[0068] In addition to ultrasonic cleaning, the above cleaning methods can also include: spray cleaning, bubbling and agitation, and mechanical oscillation-assisted cleaning.

[0069] Hydrocarbon solvents can be replaced with: modified alcohol solvents, other low-polarity organic solvents, and mixed solvent systems;

[0070] HFE cleaning unit 6 can adopt: atmospheric pressure gas phase cleaning structure, vacuum gas phase cleaning structure, multi-stage steam zone structure;

[0071] Drying methods can include: steam condensation drying, vacuum drying, and vacuum combined with heating drying;

[0072] HFE solvent can be replaced with: other fluoroether solvents, low surface tension fluorinated solvents, and environmentally friendly vapor phase cleaning solvents.

[0073] Unless otherwise defined, the terms or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," "third," and similar words used in this application description do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms "a" or "one," and similar words do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising," "including," and similar words mean that the elements or objects preceding "comprising" or "including" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. "Above," "below," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0074] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An integrated cleaning device for cleaning optical components, characterized in that: include: Rack (1); A feeding rack (2) is installed at one end of the frame (1); The unloading rack (3) is installed at the other end of the frame (1); A transfer mechanism (4) is mounted on a frame (1) and used to transfer optical elements; Hydrocarbon cleaning unit (5), which is mounted on the frame (1) and adjacent to the loading rack (2), is used to clean optical components with the aid of hydrocarbon solvents; HFE cleaning unit (6), which is mounted on frame (1) and adjacent to unloading rack (3), is used to clean optical components with HFE solvent; A partition (7) is installed on the frame (1) and positioned between the hydrocarbon cleaning unit (5) and the HFE cleaning unit (6) to achieve physical isolation.

2. The integrated cleaning equipment according to claim 1, characterized in that: The transfer mechanism (4) is one of the following: gantry robot, rotary turntable structure, linear slide rail transport structure, or fully enclosed automatic loading and unloading system.

3. The integrated cleaning equipment according to claim 1, characterized in that: The hydrocarbon cleaning unit (5) includes: A first housing (51) is mounted on a frame (1) and has a first opening (511). At least one hydrocarbon tank (512) is provided inside the first housing (51), which is used to contain hydrocarbon solvents. A first ultrasonic transducer (52) is mounted on a first housing (51) and at least one is provided. The first ultrasonic transducer (52) is used to generate cavitation bubbles in a hydrocarbon solvent to remove particles from the surface of the optical element. The first filter (53) is installed on the first housing (51) and connected to the inside of the hydrocarbon tank (512). The first filter (53) is used to circulate and filter the hydrocarbon solvent to reduce the secondary adhesion of particles to the optical element.

4. The integrated cleaning equipment according to claim 3, characterized in that: An air knife (54) is installed inside the first housing (51). The air knife (54) is located at the top of the hydrocarbon tank (512) and is used to blow off the hydrocarbon solvent adhering to the surface of the optical components, thereby reducing the contamination of the HFE cleaning unit (6) by the hydrocarbon solvent.

5. The integrated cleaning equipment according to claim 3, characterized in that: Two hydrocarbon tanks (512) are provided, and the ultrasonic frequencies inside the two hydrocarbon tanks (512) are set to low frequency and high frequency, respectively.

6. The integrated cleaning equipment according to claim 3, characterized in that: The first box (51) is equipped with an opening and closing structure (55), which is used to open and close the first opening (511) of the first box (51) to reduce external contamination of the inside of the first box (51).

7. The integrated cleaning equipment according to claim 1, characterized in that: The HFE cleaning unit (6) includes: The second housing (61) is mounted on the frame (1) and has a second opening (611). The second housing (61) has an integrally formed boiling tank (612) and a recovery tank (613). The boiling tank (612) is used to contain HFE solvent. A heating element (62) is disposed in a boiling tank (612) and is used to heat and evaporate HFE solvent; The first condenser tube (63) is arranged along the contour edge inside the second housing (61) and set on the top of the boiling tank (612). The bottom of the first condenser tube (63) is provided with a first guide groove (614). The first guide groove (614) is integrally formed on the second housing (61) and is connected to the inside of the recovery tank (613).

8. The integrated cleaning equipment according to claim 7, characterized in that: The second housing (61) also has an integrally formed rinsing tank (615), which is located between the boiling tank (612) and the recovery tank (613) and is used to contain HFE solvent. The second housing (61) is also equipped with a second ultrasonic transducer (64), which is used to generate cavitation bubbles in the HFE solvent to remove particles from the surface of the optical element. The second housing (61) is also equipped with a second filter (65), which is connected to the inside of the rinsing tank (615). The second filter (65) is used to circulate and filter the HFE solvent to reduce the secondary adhesion of particles to the optical element.

9. The integrated cleaning equipment according to claim 7, characterized in that: A second condenser (66) is also provided at the outline edge inside the second housing (61). The second condenser (66) is located at the second opening (611). The temperature of the second condenser (66) is lower than that of the first condenser (63). A second guide groove (616) is provided at the bottom of the second condenser (66). The second guide groove (616) is integrally formed on the second housing (61) and is connected to the outside.

10. The integrated cleaning equipment according to claim 7, characterized in that: The second housing (61) is equipped with a switch structure (67), which is used to open and close the second opening (611) of the second housing (61) to reduce external contamination of the interior of the second housing (61).

Images