Substrate vacuum coating equipment integrated with annealing function

Abstract

The application discloses a substrate vacuum coating equipment integrated with annealing treatment function and belongs to the technical field of substrate vacuum coating. The equipment comprises a main frame, and a closed bin is fixedly installed above the main frame. The positive and negative rotation of a driving motor is controlled to make a movable beam arm stay at a preset height station, sequentially correspond to the directional port positions of an annealing working cavity and a coating working cavity, and automatically transfer and switch the substrate between different processing stations. A working motor can drive a connecting shaft and a rotating block to rotate. In the process, the rotating block synchronously drives a placing plate and a connecting strip to rotate at a constant speed, so that the inclined annular guide groove wall of the fixed column pushes and extrudes the protruding block, the two connecting strips drive two bottom supporting plates to alternately move above and below the placing plate, and then the two sides of the substrate are supported by the two alternately moving bottom supporting plates after the rotation of the placing plate, so that the substrate is turned over, manual secondary turning over and disassembly are not needed, and the processing efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of substrate vacuum coating technology, specifically to a substrate vacuum coating equipment with integrated annealing function. Background Technology

[0002] Vacuum coating technology is a core surface treatment process in modern high-end manufacturing. It is widely used in industries such as optical devices, semiconductor chips, new energy photovoltaics, precision molds, aerospace components and consumer electronics. Through processes such as physical vapor deposition and chemical vapor deposition, thin film layers with functions such as wear resistance, corrosion resistance, conductivity, insulation, optical control and oxidation resistance are prepared on the surface of the substrate, which greatly improves the performance and service life of the substrate.

[0003] Traditional substrate coating processes typically rely on manual assistance to transfer the substrate between the annealing and coating stations. However, during this process, the substrate is easily contaminated by dust and impurities, which affects the coating and annealing effects. Furthermore, after processing one side of the substrate, the equipment must be stopped, the vacuum processing environment must be disrupted, the equipment cavity cover must be opened, and the substrate must be manually removed, flipped, and reinstalled. Only after closing the cavity and restoring the vacuum environment can the other side be processed. The entire process is cumbersome and extremely time-consuming.

[0004] Based on this, the present invention designs a substrate vacuum coating equipment with integrated annealing function to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a substrate vacuum coating equipment with integrated annealing function, so as to solve the problems mentioned in the background art, such as the substrate being easily contaminated by dust and impurities due to manual assistance in transferring the substrate between the annealing station and the coating station, and the cumbersome and inefficient manual flipping process.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A substrate vacuum coating equipment with integrated annealing function includes a main frame, a closed chamber fixedly installed above the main frame, an annealing working chamber fixedly installed on one side of the closed chamber, a coating working chamber fixedly installed above the annealing working chamber in the closed chamber, a hollow column fixedly connected to the other side of the closed chamber, a pump body fixedly installed above the closed chamber, and a hinge seat fixedly connected to the closed chamber.

[0008] The enclosed chamber is rotatably mounted with a sealing door via a hinged seat. A main electric push rod is fixedly mounted on one side of the enclosed chamber near the sealing door. A sliding groove is provided on one side of the hollow column. A drive motor is fixedly mounted on the top of the hollow column. The output shaft of the drive motor is connected to a threaded rod. A movable seat is slidably mounted through the threaded rod. A mating sleeve is fixedly mounted inside the movable seat.

[0009] A movable beam arm is fixedly connected to one side of the movable seat, and connecting frames are fixedly connected to both sides of the movable beam arm. A guide groove is opened at one end of the movable beam arm, and an inclined push groove is opened on the upper wall of the movable beam arm. Limiting grooves are opened at both ends of the inclined push groove on the upper wall of the movable beam arm. An auxiliary electric push rod is fixedly installed inside the movable beam arm, and a slider is fixedly connected to the movable end of the auxiliary electric push rod. A fixed rod is fixedly connected above the slider.

[0010] A connecting seat is rotatably mounted above the fixed rod. An eccentric block is fixedly connected to one side of the connecting seat. A fixed plate is fixedly connected to one side above the connecting seat. A fixed sleeve is fixedly connected to the other side above the connecting seat. A connecting cover is fixedly connected between the fixed plate and the fixed sleeve. A fixed column is fixedly connected to the fixed plate. An annular guide groove is inclinedly opened on the fixed column.

[0011] A working motor is fixedly installed on the fixed plate. The output shaft of the working motor is connected to a connecting shaft. A rotary block is fixedly connected to one end of the connecting shaft. A shelf is fixedly connected to one side of the rotary block. A through hole is opened on the shelf. Two connecting strips are slidably connected through the rotary block. A base plate is fixedly connected to one end of the connecting strip. An arc-shaped plate is fixedly connected to the other end of the connecting strip.

[0012] A protrusion is fixedly connected to the inner side of the arc-shaped plate. A sealing plate is fixedly connected to the sealing door. A sealing ring is fixedly connected to the edge of the sealing plate. Connecting rods are fixedly connected to both sides of the sealing door. A traction plate is fixedly connected to one end of the connecting rod. A sliding rod is fixedly connected to the traction plate. A movable plate is fixedly connected to the movable end of the main electric push rod. Two connecting plates are fixedly connected below the movable plate. An oblique groove is provided on the connecting plate.

[0013] As a further embodiment of the present invention, a main connecting pipe is fixedly connected to the pump body, and a secondary connecting pipe and a secondary connecting pipe are connected to the main connecting pipe. A main solenoid valve is fixedly installed on the main connecting pipe, a secondary solenoid valve is fixedly installed on the secondary connecting pipe, and a secondary solenoid valve is fixedly installed on the secondary connecting pipe. The main connecting pipe is connected to the coating working chamber, the secondary connecting pipe is connected to the sealed chamber, and the secondary connecting pipe is connected to the annealing working chamber.

[0014] As a further embodiment of the present invention, the movable beam arm slides in the chute and contacts the chute wall, and a plurality of support rods are fixedly connected to the inner side of the enclosed chamber, the support rods passing through the connecting frame and slidably connected to the connecting frame.

[0015] As a further embodiment of the present invention, the slider slides in the guide groove and contacts the groove wall, the limiting groove is designed horizontally, and the two ends of the inclined push groove are connected to the limiting groove, and the eccentric block slides in the inclined push groove and the limiting groove.

[0016] As a further embodiment of the present invention, the coating working chamber is located directly above the annealing working chamber, a partition is fixedly connected between the annealing working chamber and the coating working chamber, and an orientation port is provided on one side of both the annealing working chamber and the coating working chamber.

[0017] As a further embodiment of the present invention, the connecting shaft passes through the fixing plate and the fixing column, and the connecting shaft is rotatably connected to the fixing plate and the fixing column through a bearing. The connecting cover is sleeved on the fixing column. The arc-shaped plate slides on the fixing column and is in close contact with the wall of the fixing column. The protrusion slides in the annular guide groove. A connecting groove is provided on the torsion block. The torsion block is rotatably disposed inside the fixing sleeve. A fitting groove is provided on the fixing sleeve. The directional port is inserted into the fitting groove. The connecting strip slides in conjunction with the connecting groove.

[0018] As a further embodiment of the present invention, the sealing door is disposed between two connecting plates, the connecting rod is rotatably connected to the hinge seat through a bearing, a fixing block is fixedly connected to the closed chamber, a guide rod is fixedly connected to one side of the movable plate, the guide rod passes through the fixing block and is slidably connected to the fixing block, and the slide rod slides in the deflection groove.

[0019] As a further embodiment of the present invention, the threaded rod is rotatably connected to the hollow column through a bearing, the threaded rod is threadedly engaged with the mating sleeve, the movable seat slides inside the hollow column, and telescopic covers are fixedly connected above and below the movable seat. The telescopic covers are sleeved on the threaded rod, and the end of the telescopic cover away from the movable seat is fixedly connected to the inner wall of the hollow column.

[0020] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention uses a drive motor to rotate a threaded rod inside a hollow column. The threaded engagement between the fitting sleeve and the threaded rod allows the movable seat to move the movable beam along a sliding groove. By controlling the forward and reverse rotation of the drive motor, the movable beam is precisely positioned at a preset height, corresponding sequentially to the orientation openings of the annealing and coating chambers. This automates the transfer and switching of the substrate workpiece between different processing positions. Then, the auxiliary electric push rod is activated to push the slider in the guide groove. During this process, the eccentric block slides from the limiting groove at one end of the inclined push groove into the inclined push groove itself. The inclined groove wall pushes the eccentric block, causing it to rotate the connecting seat around the fixed rod, aligning the fixed sleeve with the orientation opening. At this point, the eccentric block slides from the inclined push groove into the limiting groove at the other end for positioning and fixation. The slider is then pushed further, causing the connecting seat to move smoothly forward along the extension direction of the guide groove. This allows the placement plate to be inserted into the annealing or coating working chamber through the directional port. At this time, the working motor is started, which drives the connecting shaft and the torsion block to rotate. During the process, the torsion block synchronously drives the placement plate and the connecting strip to rotate at a uniform speed. The rotating connecting strip can drive the bottom plate and the arc plate, causing the arc plate to rotate around the fixed column. This causes the inclined annular guide groove wall on the fixed column to push the protrusion, causing the two connecting strips to drive the two bottom plates to move alternately above and below the placement plate. After the placement plate rotates, the two alternately moving bottom plates support both sides of the substrate to complete the substrate flipping. This achieves uninterrupted integrated processing of both sides of the substrate without the need for manual secondary flipping and disassembly, improving processing efficiency. It breaks through the process limitations of traditional coating and annealing equipment that requires stopping the machine to open the cover and manually flipping the substrate. It optimizes the coating and annealing transfer process and completes the entire process in a closed chamber to prevent dust and impurity contamination. 2. This invention enables the movable plate to move up and down by activating the main electric push rod. During this process, the movable plate synchronously drives the connecting plate to move. When the connecting plate moves down, the inner wall of the deflection groove on the connecting plate pushes the slide rod on the traction plate, forcing the slide rod to slide along the inclined trajectory of the deflection groove. The linkage between the slide rod and the traction plate drives the sealing door to rotate around the connecting rod on the hinge seat, thereby achieving the deflection and unfolding of the sealing door. This facilitates the placement of the substrate into the through hole on the placement plate. When the connecting plate moves up, the deflection groove pushes the slide rod back to its original trajectory. The traction plate synchronously drives the connecting rod and the sealing door to rotate in opposite directions, causing the sealing door to gradually close until the sealing ring on the sealing plate tightly presses against the opening edge of the sealed chamber, completing the sealing and locking. This achieves the sealing and protection of the sealed chamber cavity, reduces dust entry, and facilitates subsequent evacuation. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0023] Figure 2 This is a schematic diagram of the cross-sectional structure of the closed chamber of the present invention;

[0024] Figure 3 This is a schematic diagram of the three-dimensional structure of the movable beam arm of the present invention;

[0025] Figure 4 This is a schematic diagram of the cross-sectional structure of the movable beam arm of the present invention;

[0026] Figure 5 This is a schematic cross-sectional view of the connector structure of the present invention;

[0027] Figure 6 This is a schematic diagram of the cross-sectional structure of the connecting cover of the present invention;

[0028] Figure 7 This is a schematic diagram of the cross-sectional structure of the torsion block of the present invention;

[0029] Figure 8 This is a schematic diagram of the three-dimensional structure of the sealing door of the present invention.

[0030] The attached diagram lists the components represented by each number as follows: 1. Main frame; 2. Enclosed chamber; 3. Annealing working chamber; 4. Coating working chamber; 5. Hollow column; 6. Pump body; 7. Hinge seat; 8. Sealing door; 9. Main electric push rod; 10. Slide groove; 11. Drive motor; 12. Threaded rod; 13. Movable seat; 14. Mating sleeve; 15. Movable beam arm; 16. Connecting frame; 17. Guide groove; 18. Inclined push groove; 19. Limiting groove; 20. Auxiliary electric push rod; 21. Slider; 22. Fixed rod; 23. Connecting seat; 24. Eccentric block; 25. Fixed plate; 26. Fixed sleeve; 27. Connecting cover; 28. Fixed column; 29. ​​Annular guide groove; 30. Working motor; 3 1. Connecting shaft; 32. Twist block; 33. Shelf plate; 34. Through hole; 35. Connecting strip; 36. Base plate; 37. Arc plate; 38. Protrusion; 39. Sealing plate; 40. Sealing ring; 41. Connecting rod; 42. Traction plate; 43. Slide rod; 44. Movable plate; 45. Connecting plate; 46. Skew groove; 47. Main connecting pipe; 48. Auxiliary connecting pipe; 49. Secondary connecting pipe; 50. Main solenoid valve; 51. Auxiliary solenoid valve; 52. Secondary solenoid valve; 53. Support rod; 54. Partition plate; 55. Orientation port; 56. Fitting groove; 57. Connecting groove; 58. Fixing block; 59. Guide rod; 60. Telescopic cover. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Please see Figures 1-8 The present invention provides a technical solution:

[0033] A substrate vacuum coating equipment with integrated annealing function includes a main frame 1, a closed chamber 2 fixedly installed above the main frame 1, an annealing working chamber 3 fixedly installed on one side of the closed chamber 2, a coating working chamber 4 fixedly installed above the annealing working chamber 3 in the closed chamber 2, a pump body 6 fixedly installed above the closed chamber 2, a main connecting pipe 47 fixedly connected to the pump body 6, a secondary connecting pipe 48 and a secondary connecting pipe 49 connected to the main connecting pipe 47, a main solenoid valve 50 fixedly installed on the main connecting pipe 47, a secondary solenoid valve 51 fixedly installed on the secondary connecting pipe 48, and a secondary solenoid valve 52 fixedly installed on the secondary connecting pipe 49. The main connecting pipe 47 is connected to the coating working chamber 4, the secondary connecting pipe 48 is connected to the closed chamber 2, and the secondary connecting pipe 49 is connected to the annealing working chamber 3.

[0034] During operation, by activating pump body 6, air, moisture, and impurities are extracted from the coating working chamber 4, sealed chamber 2, and annealing working chamber 3 through main connecting pipe 47, auxiliary connecting pipe 48, and secondary connecting pipe 49, respectively. This prevents oxidation and surface contamination of the substrate workpiece during subsequent high-temperature annealing and vacuum coating processes. During the process, the vacuum level inside the coating working chamber 4, sealed chamber 2, and annealing working chamber 3 can be independently controlled by opening and closing the main solenoid valve 50, auxiliary solenoid valve 51, and secondary solenoid valve 52, thereby enabling the step-by-step and orderly execution of the coating and annealing processes and meeting the different working requirements of the coating and annealing processes.

[0035] A hinge seat 7 is fixedly connected to the sealed chamber 2. A sealing door 8 is rotatably installed on the sealed chamber 2 via the hinge seat 7. Specifically, a sealing plate 39 is fixedly connected to the sealing door 8, and a sealing ring 40 is fixedly connected to the edge of the sealing plate 39. Connecting rods 41 are fixedly connected to both sides of the sealing door 8. The connecting rods 41 are rotatably connected to the hinge seat 7 via bearings. A traction plate 42 is fixedly connected to one end of the connecting rod 41, and a sliding rod 43 is fixedly connected to the traction plate 42. A main electric push rod 9 is fixedly installed on one side of the sealed chamber 2 near the sealing door 8. A movable plate 44 is fixedly connected to the movable end of the main electric push rod 9. A guide rod 59 is fixedly connected to one side of the movable plate 44. A fixing block 58 is fixedly connected to the sealed chamber 2. The guide rod 59 passes through the fixing block 58 and is slidably connected to the fixing block 58. Two connecting plates 45 are fixedly connected below the movable plate 44. The sealing door 8 is located between the two connecting plates 45. An oblique groove 46 is opened on the connecting plate 45, and the sliding rod 43 slides in the oblique groove 46.

[0036] During operation, the main electric push rod 9 is activated first to pull down the movable plate 44, causing the movable plate 44 to synchronously move the connecting plate 45 downward. During this process, the connecting plate 45 can push the sliding rod 43 on the traction plate 42 through the deflection groove 46, causing the sliding rod 43 to slide along the trajectory of the deflection groove 46. This causes the sliding rod 43 to drive the connecting rod 41 to rotate through the traction plate 42, causing the sealing door 8 to smoothly deflect and unfold outward around the connecting rod 41 on the hinge seat 7, completely opening the feeding and discharging channels of the closed chamber 2. This facilitates the placement of processed substrates or the smooth removal of finished substrates after the coating and annealing process. The electric push rod 45 then moves downward. The push rod pushes the movable plate 44 and the connecting plate 45 to move. During this process, the deflection groove 46 can pull the slide rod 43 back to its original position, thereby driving the traction plate 42 and the connecting rod 41 to rotate synchronously in the opposite direction, thus pulling the sealing door 8 to close and reset smoothly until the sealing plate 39 and the sealing ring 40 on the edge of the sealing plate 39 are completely fitted and sealed with the opening of the sealed chamber 2, thereby achieving the airtight locking of the sealed chamber 2. While the movable plate 44 moves up and down, the guide rod 59 can slide through the fixed block 58, thereby forming a directional limit on the movable plate 44 and preventing the movable plate 44 from deviating or tilting during the lifting and lowering process.

[0037] A hollow column 5 is fixedly connected to the other side of the enclosed chamber 2. A sliding groove 10 is opened on one side of the hollow column 5. A drive motor 11 is fixedly installed on the top of the hollow column 5. The output shaft of the drive motor 11 is connected to a threaded rod 12. The threaded rod 12 is rotatably connected to the hollow column 5 through a bearing. A movable seat 13 is slidably installed through the threaded rod 12. The movable seat 13 slides inside the hollow column 5. Telescopic covers 60 are fixedly connected to the top and bottom of the movable seat 13. The telescopic covers 60 are sleeved on the threaded rod 12, and the end of the telescopic covers 60 away from the movable seat 13 is fixedly connected to the inner wall of the hollow column 5. A mating sleeve 14 is fixedly installed inside the movable seat 13. The threaded rod 12 and the mating sleeve 14 are threadedly engaged. A movable beam arm 15 is fixedly connected to one side of the movable seat 13. Connecting frames 16 are fixedly connected to the front and rear sides of the movable beam arm 15. The movable beam arm 15 slides in the sliding groove 10 and contacts the groove wall. Multiple support rods 53 are fixedly connected to the inside of the enclosed chamber 2. The support rods 53 slide through the connecting frames 16 and are slidably connected to the connecting frames 16.

[0038] During operation, the drive motor 11 is started to drive the threaded rod 12 to rotate. Then, the threaded engagement between the mating sleeve 14 and the threaded rod 12 causes the movable seat 13 to drive the movable beam arm 15 to move up and down. During the process, the movable beam arm 15 can be closely attached to the inner wall of the slide groove 10 on the side wall of the hollow column 5. The slide groove 10 wall guides and restricts the movable beam arm 15, preventing the movable seat 13 and the movable beam arm 15 from shifting when the threaded rod 12 rotates. At the same time, the connecting brackets 16 connected to both sides of the movable beam arm 15 can slide synchronously along the support rod 53 inside the closed chamber 2, thus forming a double-sided auxiliary guide structure, further enhancing the stability of the overall lifting process of the movable beam arm 15. Meanwhile, the telescopic covers 60 at the upper and lower ends of the movable seat 13 can synchronously and adaptively extend and retract with the lifting and moving of the movable seat 13, always covering the exposed part of the threaded rod 12, forming a protective barrier, effectively preventing dust and coating impurities from entering the thread gap during the processing, and preventing thread corrosion and jamming.

[0039] A guide groove 17 is provided at one end of the movable beam arm 15, and an inclined push groove 18 is provided on the upper wall of the movable beam arm 15. Limiting grooves 19 are provided at both ends of the inclined push groove 18 on the upper wall of the movable beam arm 15. The limiting grooves 19 are designed horizontally, and the two ends of the inclined push groove 18 are connected to the limiting grooves 19. An auxiliary electric push rod 20 is fixedly installed inside the movable beam arm 15. A slider 21 is fixedly connected to the movable end of the auxiliary electric push rod 20. The slider 21 slides in the guide groove 17 and contacts the groove wall of the guide groove 17. A fixed rod 22 is fixedly connected above the slider 21. A connecting seat 23 is rotatably installed above the fixed rod 22. An eccentric block 24 is fixedly connected to one side of the connecting seat 23. The eccentric block 24 slides in the inclined push groove 18 and the limiting groove 19.

[0040] After the movable beam arm 15 stops in the coating working chamber 4 or annealing working chamber 3 of the corresponding station, the auxiliary electric push rod 20 is activated to push the slider 21 to move along the guide groove 17. The slider 21 is in close contact with the groove wall of the guide groove 17, so that the guide groove 17 can guide the slider 21 to avoid the slider 21 from tilting during movement. During the movement of the slider 21, the fixed rod 22 and the connecting seat 23 can be driven to move synchronously. At this time, the eccentric block 24 on one side of the connecting seat 23 moves accordingly and slides smoothly from the transverse limiting groove 19 at one end of the inclined push groove 18 into the tilted inclined push groove 18. Then, the eccentric block 24 is pushed by the groove wall of the inclined push groove 18. 4. The eccentric block 24 causes the connecting seat 23 to rotate around the fixed rod 22 until the eccentric block 24 slides from the inclined push groove 18 into the limiting groove 19 at the other end. At this time, the connecting seat 23 is aligned with the annealing working chamber 3 and the coating working chamber 4. The limiting groove 19 can limit the eccentric block 24 to prevent the connecting seat 23 from being accidentally tilted. When the auxiliary electric push rod 20 pulls the connecting seat 23 back to move, the eccentric block 24 can be pushed again through the inclined push groove 18, so that the eccentric block 24 causes the connecting seat 23 to rotate and reset around the fixed rod 22, so that the connecting seat 23 is oriented towards the sealing door 8, which facilitates material picking and unloading.

[0041] The coating working chamber 4 is located directly above the annealing working chamber 3. A partition 54 is fixedly connected between the annealing working chamber 3 and the coating working chamber 4. An orienting port 55 is provided on one side of both the annealing working chamber 3 and the coating working chamber 4. A fixing plate 25 is fixedly connected to one side above the connecting seat 23, and a fixing sleeve 26 is fixedly connected to the other side above the connecting seat 23. A fitting groove 56 is provided on the fixing sleeve 26, and the orienting port 55 is inserted into the fitting groove 56. A connecting cover 27 is fixedly connected between the fixing plate 25 and the fixing sleeve 26. A fixing post 28 is fixedly connected to the fixing plate 25, and the connecting cover 27 is sleeved on the fixing post 28.

[0042] During operation, the physical isolation of the partition 54 prevents process interference between the annealing working chamber 3 and the coating working chamber 4, effectively isolating the mutual influence between the high temperature of annealing and the coating medium, ensuring the independent and stable operation of the two core processes. Based on the vertical layout of the annealing working chamber 3 and the coating working chamber 4, the drive motor 11 can precisely control the lifting and lowering of the movable beam arm 15, directly driving the connecting seat 23 and the fixing sleeve 26 to align with the orientation port 55 of the lower annealing working chamber 3 or the upper coating working chamber 4, thus completing the initial positioning. The movable beam arm 15 then... After the arm 15 is smoothly docked, the auxiliary electric push rod 20 is activated to push the slider 21 to move along the guide groove 17, causing the connecting seat 23 to gradually move towards the directional opening 55, so that the fixed sleeve 26 is inserted into the directional opening 55, and the directional opening 55 can fit into the fitting groove 56 on the fixed sleeve 26, thereby forming a nested sealing and positioning structure, eliminating the docking gap, ensuring the internal environment of the annealing working chamber 3 and the coating working chamber 4, preventing heat leakage in the annealing process and dust leakage in the coating process, and at the same time blocking external dust and impurities from entering and contaminating the substrate.

[0043] An annular guide groove 29 is inclinedly formed on the fixed column 28. A working motor 30 is fixedly installed on the fixed plate 25. The output shaft of the working motor 30 is connected to a connecting shaft 31. The connecting shaft 31 passes through the fixed plate 25 and the fixed column 28, and is rotatably connected to the fixed plate 25 and the fixed column 28 through bearings. A torsion block 32 is fixedly connected to one end of the connecting shaft 31. The torsion block 32 is rotatably set inside the fixed sleeve 26. A connecting groove 57 is formed on the torsion block 32. A shelf 33 is fixedly connected to the side, and a through hole 34 is provided on the shelf 33. Two connecting strips 35 are slidably connected through the twist block 32. The connecting strips 35 are slidably engaged with the connecting groove 57. A base plate 36 is fixedly connected to one end of the connecting strip 35, and an arc plate 37 is fixedly connected to the other end of the connecting strip 35. A protrusion 38 is fixedly connected to the inner side of the arc plate 37. The arc plate 37 slides on the fixed column 28 and is in contact with the wall of the fixed column 28. The protrusion 38 slides in the annular guide groove 29.

[0044] After the placement plate 33 and the substrate are fully inserted into the annealing working chamber 3 or the coating working chamber 4, the working motor 30 is started. The working motor 30 drives the torsion block 32 to rotate smoothly inside the fixed sleeve 26 through the connecting shaft 31. The torsion block 32 can synchronously drive the placement plate 33 and the two connecting strips 35 to rotate, thereby causing the arc plate 37 to rotate around the fixed column 28. The arc plate 37 always slides in close contact with the outer wall of the fixed column 28, thus avoiding shaking and displacement. The protrusion 38 on the inner side of the arc plate 37 can slide along the annular guide groove 29 on the fixed column 28. The inclined groove wall of the annular guide groove 29 pushes the protrusion 38, causing the two connecting strips 35 to drive the two support plates 36 to perform synchronous and opposite alternating movements. Thus, during the rotation of the placement plate 33, the two alternately moving support plates 36 support both sides of the substrate to complete the flipping of the substrate.

[0045] Working principle of this invention:

[0046] When feeding, the main electric push rod 9 is started first to pull down the movable plate 44, so that the movable plate 44 drives the connecting plate 45 to move downward. During the downward movement of the connecting plate 45, the wall of the skew groove 46 can push the slide rod 43 on the traction plate 42, forcing the slide rod 43 to slide smoothly along the inclined trajectory of the skew groove 46. The slide rod 43 can rotate through the linkage connecting rod 41 via the traction plate 42, thereby driving the sealing door 8 to smoothly unfold outward around the connecting rod 41 on the hinge seat 7, opening the feeding channel of the closed chamber 2.

[0047] At this point, the substrate workpiece to be processed can be placed stably in the through hole 34 of the placement plate 33 and contact the bottom plate 36 located below the placement plate 33, thereby completing the substrate loading. After loading is completed, the main electric push rod 9 reverses and pushes the movable plate 44 and the connecting plate 45 upward. When the connecting plate 45 moves upward, the deflection groove 46 pushes the slide rod 43 back along the original trajectory to reset. The traction plate 42 simultaneously drives the connecting rod 41 and the sealing door 8 to rotate in the opposite direction, causing the sealing door 8 to gradually close and reset until the sealing ring 40 at the edge of the sealing plate 39 tightly presses against the edge of the opening of the sealed chamber 2, completing the sealing and locking.

[0048] After the sealed chamber 2 is completely sealed, the pump body 6 is started. Through the main connecting pipe 47, the auxiliary connecting pipe 48 and the secondary connecting pipe 49, the air and impurities inside the coating working chamber 4, the sealed chamber 2 and the annealing working chamber 3 are extracted respectively. Then, the drive motor 11 is started to drive the threaded rod 12 to rotate in the hollow column 5. By using the threaded engagement between the mating sleeve 14 and the threaded rod 12, the movable seat 13 is driven to move the movable beam arm 15 up and down along the slide groove 10. By controlling the drive motor 11, the movable beam arm 15 is moved to the directional opening 55 position of the coating working chamber 4.

[0049] Then, the auxiliary electric push rod 20 is activated to push the slider 21 to slide along the guide groove 17. When the slider 21 moves, it simultaneously drives the fixed rod 22 and the connecting seat 23 to move forward as a whole. The eccentric block 24 on one side of the connecting seat 23 moves synchronously. It first slides smoothly from the transverse limiting groove 19 at one end of the inclined push groove 18 into the inclined push groove 18. At this time, the inclined groove wall of the inclined push groove 18 can push the eccentric block 24, causing the eccentric block 24 to drive the connecting seat 23 to deflect around the fixed rod 22 until the eccentric block 24 slides from the inclined push groove 18 into the limiting groove 19 at the other end.

[0050] At this time, the connecting seat 23 and the fixing sleeve 26 are aligned with the orienting opening 55. Then, the auxiliary electric push rod 20 continues to push the slider 21 forward, so that the connecting seat 23 and the fixing sleeve 26 gradually approach the orienting opening 55. Finally, the fixing sleeve 26 is inserted into the orienting opening 55, and the orienting opening 55 can fit into the fitting groove 56 of the fixing sleeve 26 to form a nested sealing docking structure. After the placement plate 33 drives the substrate to fully extend into the coating working chamber 4, the coating process can be carried out.

[0051] After single-sided coating is completed, the working motor 30 is started, which drives the torsion block 32 to rotate inside the fixed sleeve 26 through the connecting shaft 31. The torsion block 32 can synchronously drive the placement plate 33 and the connecting strips 35 on both sides to rotate. When the connecting strips 35 rotate, the arc plate 37 can rotate around the fixed column 28. The protrusion 38 on the inner side of the arc plate 37 can slide along the annular guide groove 29 on the fixed column 28. Then, the inclined groove wall of the annular guide groove 29 pushes the protrusion 38, so that the two connecting strips 35 drive the two support plates 36 to perform synchronous and opposite alternating movements. Thus, during the rotation of the placement plate 33, the two alternately moving support plates 36 support both sides of the substrate. By starting and stopping the working motor 30, the substrate is flipped over, and the double-sided coating of the substrate is achieved.

[0052] After the substrate is coated, the auxiliary electric push rod 20 pulls the slider 21 in the opposite direction, causing the placement plate 33 to detach from the coating working chamber 4. Then, the drive motor 11 is started to drive the movable beam arm 15 to move downward, causing the movable beam arm 15 to move to the position of the orientation port 55 of the annealing working chamber 3. After that, the auxiliary electric push rod 20 pushes the slider 21 again to move the connecting seat 23, causing the fixed sleeve 26 to dock with the orientation port 55, so that the placement plate 33 and the substrate enter the annealing working chamber 3, and the annealing operation is completed. During the process, the working motor 30 can be started according to the processing requirements to complete the substrate flipping operation of the annealing process. During the coating and annealing process, the main electric control valve 50, the auxiliary electric control valve 51 and the secondary electric control valve 52 can be opened and closed independently to realize the control of the vacuum degree inside the coating working chamber 4, the sealed chamber 2 and the annealing working chamber 3, so as to meet the process requirements of the annealing process and the coating process respectively.

Claims

1. A substrate vacuum coating equipment with integrated annealing function, comprising a main frame (1), characterized in that: A closed chamber (2) is fixedly installed above the main frame (1). An annealing working chamber (3) is fixedly installed on one side of the closed chamber (2). A coating working chamber (4) is fixedly installed above the annealing working chamber (3) in the closed chamber (2). A hollow column (5) is fixedly connected to the other side of the closed chamber (2). A pump body (6) is fixedly installed above the closed chamber (2). A hinge seat (7) is fixedly connected to the closed chamber (2). The closed chamber (2) is rotatably mounted with a sealing door (8) via a hinge seat (7). The closed chamber (2) is fixedly mounted with a main electric push rod (9) on one side of the sealing door (8). A sliding groove (10) is provided on one side of the hollow column (5). A drive motor (11) is fixedly mounted on the top of the hollow column (5). The output shaft of the drive motor (11) is connected to a threaded rod (12). The threaded rod (12) is slidably mounted through a movable seat (13). A mating sleeve (14) is fixedly mounted inside the movable seat (13). A movable beam arm (15) is fixedly connected to one side of the movable seat (13), and a connecting frame (16) is fixedly connected to both sides of the movable beam arm (15). A guide groove (17) is provided at one end of the movable beam arm (15), and an inclined push groove (18) is provided on the upper wall of the movable beam arm (15). Limiting grooves (19) are provided at both ends of the inclined push groove (18) on the upper wall of the movable beam arm (15). An auxiliary electric push rod (20) is fixedly installed inside the movable beam arm (15). A slider (21) is fixedly connected to the movable end of the auxiliary electric push rod (20), and a fixing rod (22) is fixedly connected above the slider (21). A connecting seat (23) is rotatably mounted above the fixing rod (22). An eccentric block (24) is fixedly connected to one side of the connecting seat (23). A fixing plate (25) is fixedly connected to one side above the connecting seat (23). A fixing sleeve (26) is fixedly connected to the other side above the connecting seat (23). A connecting cover (27) is fixedly connected between the fixing plate (25) and the fixing sleeve (26). A fixing post (28) is fixedly connected to the fixing plate (25). An annular guide groove (29) is obliquely opened on the fixing post (28). A working motor (30) is fixedly installed on the fixed plate (25). The output shaft of the working motor (30) is connected to a connecting shaft (31). A rotary block (32) is fixedly connected to one end of the connecting shaft (31). A shelf (33) is fixedly connected to one side of the rotary block (32). A through hole (34) is provided on the shelf (33). Two connecting strips (35) are slidably connected through the rotary block (32). A base plate (36) is fixedly connected to one end of the connecting strip (35). An arc plate (37) is fixedly connected to the other end of the connecting strip (35). A protrusion (38) is fixedly connected to the inner side of the arc plate (37). A sealing plate (39) is fixedly connected to the sealing door (8). A sealing ring (40) is fixedly connected to the edge of the sealing plate (39). A connecting rod (41) is fixedly connected to both sides of the sealing door (8). A traction plate (42) is fixedly connected to one end of the connecting rod (41). A sliding rod (43) is fixedly connected to the traction plate (42). A movable plate (44) is fixedly connected to the movable end of the main electric push rod (9). Two connecting plates (45) are fixedly connected below the movable plate (44). An oblique groove (46) is provided on the connecting plate (45).

2. The substrate vacuum coating equipment with integrated annealing function according to claim 1, characterized in that: A main connecting pipe (47) is fixedly connected to the pump body (6). A secondary connecting pipe (48) and a secondary connecting pipe (49) are connected to the main connecting pipe (47). A main solenoid valve (50) is fixedly installed on the main connecting pipe (47). A secondary solenoid valve (51) is fixedly installed on the secondary connecting pipe (48). A secondary solenoid valve (52) is fixedly installed on the secondary connecting pipe (49). The main connecting pipe (47) is connected to the coating working chamber (4). The secondary connecting pipe (48) is connected to the closed chamber (2). The secondary connecting pipe (49) is connected to the annealing working chamber (3).

3. The substrate vacuum coating equipment with integrated annealing function according to claim 1, characterized in that: The movable beam arm (15) slides in the groove (10) and contacts the groove wall. Multiple support rods (53) are fixedly connected to the inner side of the closed chamber (2). The support rods (53) pass through the connecting frame (16) and are slidably connected to the connecting frame (16).

4. The substrate vacuum coating equipment with integrated annealing function according to claim 1, characterized in that: The slider (21) slides in the guide groove (17) and contacts the groove wall of the guide groove (17). The limiting groove (19) is designed horizontally, and the two ends of the inclined push groove (18) are connected to the limiting groove (19). The eccentric block (24) slides in the inclined push groove (18) and the limiting groove (19).

5. The substrate vacuum coating equipment with integrated annealing function according to claim 1, characterized in that: The coating working chamber (4) is located directly above the annealing working chamber (3). A partition (54) is fixedly connected between the annealing working chamber (3) and the coating working chamber (4). An orientation port (55) is provided on one side of both the annealing working chamber (3) and the coating working chamber (4).

6. The substrate vacuum coating equipment with integrated annealing function according to claim 5, characterized in that: The connecting shaft (31) passes through the fixed plate (25) and the fixed column (28), and the connecting shaft (31) is rotatably connected to the fixed plate (25) and the fixed column (28) through the bearing. The connecting cover (27) is sleeved on the fixed column (28). The arc plate (37) slides on the fixed column (28) and is in contact with the wall of the fixed column (28). The protrusion (38) slides in the annular guide groove (29). The torsion block (32) has a connecting groove (57). The torsion block (32) is rotatably set inside the fixed sleeve (26). The fixed sleeve (26) has a fitting groove (56). The directional port (55) is inserted into the fitting groove (56). The connecting strip (35) slides in cooperation with the connecting groove (57).

7. The substrate vacuum coating equipment with integrated annealing function according to claim 1, characterized in that: The sealing door (8) is set between two connecting plates (45). The connecting rod (41) is rotatably connected to the hinge seat (7) through a bearing. A fixing block (58) is fixedly connected to the closed chamber (2). A guide rod (59) is fixedly connected to one side of the movable plate (44). The guide rod (59) passes through the fixing block (58) and is slidably connected to the fixing block (58). The slide rod (43) slides in the deflection groove (46).

8. The substrate vacuum coating equipment with integrated annealing function according to claim 1, characterized in that: The threaded rod (12) is rotatably connected to the hollow column (5) through a bearing. The threaded rod (12) is threadedly engaged with the mating sleeve (14). The movable seat (13) slides inside the hollow column (5). Telescopic covers (60) are fixedly connected above and below the movable seat (13). The telescopic covers (60) are sleeved on the threaded rod (12), and the end of the telescopic cover (60) away from the movable seat (13) is fixedly connected to the inner wall of the hollow column (5).

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