Gas inlet device and reaction apparatus
By setting a tortuous flow channel and an exhaust port in the gas inlet device, the problem of uneven distribution of process gas in semiconductor processing is solved, and uniform diffusion of process gas in the reaction chamber is achieved, thereby improving the reaction effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- JIANGSU MICROVIA NANO EQUIP TECH CO LTD
- Filing Date
- 2026-03-12
- Publication Date
- 2026-05-29
AI Technical Summary
In semiconductor processing, uneven distribution of process gases within the reaction chamber leads to poor reaction results.
Design an air intake device comprising a tortuous flow channel and multiple air outlets. Fluid enters the flow channel through the air intake channel, diffuses within the flow channel, and is evenly distributed through the air outlets.
This achieves uniform distribution of process gases within the reaction chamber, improving the reaction efficiency.
Smart Images
Figure CN122105370A_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the field of semiconductor processing technology, and in particular relates to gas inlet devices and reaction equipment. Background Technology
[0002] In the field of semiconductor processing technology, reaction equipment is often used to process workpieces. When process gases enter the reaction chamber, the concentration of process gases is higher around the inlet on the inlet side, while the concentration is relatively lower in areas farther away from the inlet, resulting in uneven distribution of process gases within the reaction chamber. Therefore, achieving uniform gas intake is a pressing technical problem that needs to be solved. Summary of the Invention
[0003] In view of this, this application provides an air intake device and a reaction device to solve the problem of uniform air intake.
[0004] To solve the above-mentioned technical problems, one technical solution adopted in this application is: to provide an air intake device, comprising: an air intake portion having a first side and a second side disposed opposite to each other; at least one flow channel formed in the air intake portion, the at least one flow channel extending in a tortuous manner within the air intake portion, the air intake portion further having an air intake passage extending from the first side of the air intake portion to communicate with the flow channel, fluid flowing from the first side into the flow channel through the air intake passage and diffusing along the extension direction of the flow channel; the air intake portion further having a plurality of air outlets spaced apart along the extension direction of the flow channel, the air outlets extending from the flow channel to the second side, fluid in the flow channel diffusing to the second side through the air outlets.
[0005] According to one embodiment of this application, the air intake includes: a spray plate, the flow channel being formed on the side of the spray plate facing the first side, and the air outlet being formed on the spray plate; extending from the flow channel to the side of the spray plate facing the second side; a cover plate covering the surface of the spray plate facing the first side, the cover plate having the air intake channel, the air intake channel being arranged in a one-to-one correspondence with the flow channel, and each air intake channel forming an air inlet at the connection between itself and the corresponding flow channel.
[0006] According to one embodiment of this application, the cover plate is further provided with an air extraction channel communicating with the flow channel. The air extraction channel is provided in a one-to-one correspondence with the flow channel. Each air extraction channel forms an air extraction port at the connection point with the corresponding flow channel. The air extraction port and the air inlet are distributed at both ends of the flow channel.
[0007] According to one embodiment of this application, the air inlet is circular or elongated, and the air outlet is circular or elongated.
[0008] According to one embodiment of this application, the spray plate is flat, and the depth of the flow channel gradually increases in the direction from the air inlet to away from the air inlet; or, the spray plate is an arc-shaped plate, and the spray plate arches away from the second side corresponding to the position of the air inlet.
[0009] According to one embodiment of this application, multiple flow channels are arranged side by side on the spray plate, and the multiple flow channels extend spirally from the middle of the spray plate to the edge of the spray plate.
[0010] According to one embodiment of this application, the plurality of flow channels are arranged in a centrally symmetrical manner on the spray plate with the center of the spray plate as the midpoint of symmetry.
[0011] According to one embodiment of this application, the air intake includes a plurality of spirally arranged and spaced-apart convex baffles, the convex baffles being disposed on the side of the spray plate facing the first side, the convex baffles enclosing to form a plurality of flow channels; or, the side of the spray plate facing the first side is recessed to form a plurality of flow channels.
[0012] According to one embodiment of this application, the end face of the sidewall of the flow channel away from the second side is taken as the channel end face, and the air intake part further includes a sealing member, which is disposed between the channel end face and the cover plate.
[0013] According to one embodiment of this application, two flow channels are arranged side by side, and each flow channel is provided with double exhaust holes along its extension direction. When each row of exhaust holes extends from the flow channel to the second side, they are respectively inclined toward the direction of the corresponding adjacent flow channel.
[0014] According to one embodiment of this application, the adjacent exhaust vents of the two flow channels are arranged alternately at intervals, and the adjacent exhaust vents of the two flow channels are alternately arranged on the same curve at the exhaust end on the second side.
[0015] According to one embodiment of this application, the angle between the extending direction of the air outlet and the thickness direction of the air inlet is 5°-20°; and / or, the spacing between two adjacent air outlets in each row is 3mm-15mm.
[0016] According to one embodiment of this application, the spacing between adjacent flow channels is 1mm-5mm; and / or, the coverage ratio of the flow channels on the air intake is 60%-90%; and / or, the outer diameter of the second side of the air intake is 300mm-400mm, and the outer diameter of the area on the second side of the air intake where the air outlets are distributed is 300mm-350mm; and / or, the width of the flow channels is 5mm-10mm; and / or, the depth of the flow channels is 15mm-25mm.
[0017] According to one embodiment of this application, in the extension direction of the air outlet from the flow channel to the second side, the diameter of the air outlet is consistent or gradually increases.
[0018] According to one embodiment of this application, when the diameters of the air outlets are consistent, the diameter of the air outlet is 0.8mm-2mm; when the diameters of the air outlets gradually increase, the air outlet includes a first segment and a second segment connected in sequence, the diameter of the first segment being smaller than the diameter of the second segment; the ratio of the length of the first segment to the length of the second segment is 1:1-1:15; and / or, the diameter of the first segment is 0.2mm-0.6mm; and / or, the diameter of the second segment is 0.8mm-2mm; and / or, the connection angle between the first segment and the second segment is 90°-150°.
[0019] According to one embodiment of this application, a heating element is provided on the cover plate to regulate the temperature of the fluid flowing through the spray plate.
[0020] To solve the above-mentioned technical problems, another technical solution adopted in this application is: a reaction device, comprising: a reaction chamber, the interior of which forms a reaction cavity; and an air intake device as described above, disposed on the air intake side of the reaction chamber.
[0021] The beneficial effects of this application are as follows: by providing a tortuous and extended flow channel in the air inlet, the flow channel can cover a larger area on the air inlet. Fluid located on the first side of the air inlet first enters the flow channel through the air inlet channel. The fluid entering the flow channel diffuses more easily within the flow channel than flowing from the air outlet to the second side. Therefore, the gas entering the flow channel from the air inlet channel generally diffuses evenly within the flow channel first, and then flows to the second side through the air outlet, resulting in a more uniform fluid distribution on the second side. By providing the air inlet device in this embodiment, the fluid can diffuse evenly from the first side of the air inlet to the second side. When the air inlet device is applied to a reaction device, the process gas can be evenly distributed on the air inlet side, thereby ensuring uniform diffusion of the process gas within the reaction chamber and improving the reaction efficiency. Attached Figure Description
[0022] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein: Figure 1 This is a three-dimensional structural schematic diagram of an air intake device according to an embodiment of this application; Figure 2 This is a cross-sectional structural schematic diagram of an air intake device according to an embodiment of this application; Figure 3 yes Figure 2 An enlarged view of part A in the image; Figure 4 This is a schematic diagram of the back structure of the cover plate of the air intake device according to an embodiment of this application; Figure 5 This is a three-dimensional structural schematic diagram of the spray plate of an air intake device according to an embodiment of this application; Figure 6 This is a schematic diagram of the back structure of the spray plate of an air intake device according to an embodiment of this application; Figure 7 This is a partial perspective structural diagram of the spray plate of the air intake device according to an embodiment of this application from the rear view. Figure 8 This is a partial cross-sectional structural schematic diagram of an air intake device according to an embodiment of this application, used to show the air outlet; Figure 9 This is a partial cross-sectional structural schematic diagram of the air intake device according to another embodiment of this application, used to show the air outlet. Detailed Implementation
[0023] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.
[0024] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
[0025] Please see Figure 1 and Figure 2 , Figure 1 This is a three-dimensional structural schematic diagram of an air intake device according to an embodiment of this application. Figure 2 This is a cross-sectional structural schematic diagram of an air intake device according to an embodiment of this application.
[0026] One embodiment of this application provides an air intake device 100. The air intake device 100 includes an air intake portion 110 and at least one flow channel 120. The air intake portion 110 has a first side 101 and a second side 102 disposed opposite to each other. The flow channel 120 is formed in the air intake portion 110. The flow channel 120 extends in a tortuous manner within the air intake portion 110. The air intake portion 110 also has an air intake passage 141. The air intake passage 141 extends from the first side 101 of the air intake portion 110 to communicate with the flow channel 120. Fluid flows from the first side 101 of the air intake portion 110 into the flow channel 120 via the air intake passage 141 and diffuses along the extension direction of the flow channel 120. The air intake portion 110 also has a plurality of air outlets 130 spaced apart along the extension direction of the flow channel 120. The air outlets 130 extend from the flow channel 120 to the second side 102. The fluid in the flow channel 120 diffuses through the air outlet 130 to the second side 102 of the air inlet 110.
[0027] By providing a tortuous and extending flow channel 120 in the air intake 110, the flow channel 120 can cover a larger area on the air intake 110. Fluid located on the first side 101 of the air intake 110 first enters the flow channel 120 through the air intake channel 141. The fluid entering the flow channel 120 diffuses more easily within the flow channel 120 than flowing from the air outlet 130 to the second side 102. Therefore, the gas entering the flow channel 120 from the air intake channel 141 generally diffuses evenly within the flow channel 120 first, and then flows to the second side 102 through the air outlet 130, resulting in a more uniform fluid distribution on the second side 102. By providing the air intake device 100 in this embodiment, fluid can diffuse evenly from the first side 101 of the air intake 110 to the second side 102. When the air intake device 100 is applied to a reaction apparatus, the process gas can be evenly distributed on the air intake side, thereby ensuring uniform diffusion of the process gas within the reaction chamber and improving the reaction efficiency.
[0028] Specifically, the flow channel 120 can be configured with one, two, three or more channels.
[0029] When there are multiple flow channels 120, the same or different fluids can be introduced. When the same fluid is introduced into multiple flow channels 120, the fluid can be introduced into multiple flow channels 120 simultaneously, improving the diffusion efficiency of the fluid from the first side 101 to the second side 102 of the air inlet 110. When different fluids are introduced into multiple flow channels 120, since the different flow channels 120 are independent of each other, the paths of different fluids diffusing from the first side 101 to the second side 102 of the air inlet 110 are independent of each other. This not only improves the diffusion uniformity of each fluid, but also shifts the possible premature mixing of different fluids from the side of the spray plate 111 facing the first side 101 to the side of the spray plate 111 facing the second side 101. This avoids premature mixing of different fluids before they reach the second side 102 of the air inlet 110, i.e., before entering the reaction chamber, and can reduce or even avoid the risk of premature chemical reaction between different fluids.
[0030] It should be noted that the flow channel 120 extends in a tortuous manner within the air intake 110, including regular extension methods such as spiral extension and meandering extension, or it can also be other irregular extension methods. Compared with the flow channel 120 that extends in a straight line, the tortuous flow channel 120 can cover more area on the air intake 110, thereby increasing the distribution area of the flow channel 120 and improving the effect of uniform air intake achieved by the air intake device 100.
[0031] Please continue reading Figure 3 and Figure 4 , Figure 3 yes Figure 2 An enlarged view of part A in the image; Figure 4 This is a schematic diagram of the back structure of the cover plate of the air intake device according to an embodiment of this application.
[0032] In some embodiments, the air intake 110 includes a spray plate 111 and a cover plate 140. A flow channel 120 is formed on the side of the spray plate 111 facing the first side 101. An air outlet 130 is formed on the spray plate 111, extending from the flow channel 120 to the side of the spray plate 111 facing the second side 102. The cover plate 140 covers the surface of the spray plate 111 facing the first side 101. The cover plate 140 has an air intake passage 141. The air intake passage 141 is provided in a one-to-one correspondence with the flow channel 120. Each air intake passage 141 forms an air inlet 121 at its connection with the corresponding flow channel 120. The air intake passage 141 on the cover plate 140 is used to communicate with a fluid source, through which fluid enters the corresponding flow channel 120 and diffuses to the second side 102 of the air intake 110.
[0033] Furthermore, the cover plate 140 is also provided with an extraction channel 142 communicating with the flow channel 120. The extraction channels 142 are arranged one-to-one with the flow channels 120. Each extraction channel 142 forms an extraction port 122 at its connection with the corresponding flow channel 120. The extraction ports 122 and the inlets 121 are distributed at both ends of the flow channel 120. When the air intake device 100 is used in the reaction equipment, the corresponding process gas can be introduced first through the inlet channel 141. Each process gas enters the corresponding flow channel 120 through its respective inlet 121 and diffuses to the second side 102 of the air intake section 110. After the reaction, purging is performed. After purging, the extraction channel 142 can extract the residual gas in the flow channel 120 through the extraction port 122 and quickly discharge the gas in the air intake section 110, preventing the process gas from stagnating inside the spray plate 111. Multiple cycles can be performed to carry out reaction processes such as thin film deposition.
[0034] Specifically, the air inlet 121 can be circular, elongated, or other shapes; the air outlet 122 can be circular, elongated, or other shapes. Due to the width limitation of the flow channel 120, the cross-section of an elongated orifice is generally larger than that of a circular orifice. With a constant gas flow rate, the flow velocity of the elongated orifice is lower. When the air inlet 121 is elongated, the fluid concentration in the region corresponding to the air inlet 121 in the flow channel 120 is not too high, resulting in a more uniform fluid distribution on the second side 102 of the intake section 110, and better uniformity of the reaction film layer within the reaction chamber. Conversely, when the air outlet 122 is elongated, the fluid discharge velocity can be increased.
[0035] Of course, in other embodiments, the air inlet 121 and the air outlet 122 can also be of other shapes, and the cross-sectional area of the air inlet 121 and the air outlet 122 can be adjusted according to the actual flow rate requirements.
[0036] It should be noted that, in this embodiment, the spray plate 111 refers to the plate-like structure in the air inlet 110 that can be used to form the flow channel 120. The air inlet 110 may also include a mounting frame 112, which is formed on the outer periphery of the spray plate 111. The mounting frame 112 can be fixedly mounted to the spray plate 111 or integrally formed with it. The mounting frame 112 protrudes from the surface of the spray plate 111 facing the first side 101 and is used to enclose and form an accommodating space for mounting the cover plate 140. The cover plate 140 covers the spray plate 111 and is fixed relative to the mounting frame 112, which can improve the installation stability and sealing of the cover plate 140 and the spray plate 111.
[0037] In some embodiments, the air intake 110 further includes a seal 150. The end face of the sidewall of the flow channel 120 away from the second side 102 is designated as the channel end face 123. The seal 150 is disposed between the channel end face 123 and the cover plate 140 to form a seal between the spray plate 111 and the cover plate 140, preventing fluid in the flow channel 120 from leaking from the mating gap between the cover plate 140 and the spray plate 111, and ensuring that the fluid diffuses along the extension direction of the corresponding flow channel 120.
[0038] Please continue reading Figure 5 , Figure 5 This is a three-dimensional structural schematic diagram of the spray plate of an air intake device according to an embodiment of this application.
[0039] In some embodiments, multiple flow channels 120 are arranged side-by-side on the spray plate 111. These multiple flow channels 120 extend spirally from the center of the spray plate 111 to its edge. First, the spiral extension of the multiple flow channels 120 from the center to the edge of the spray plate 111 provides a large coverage area, ensuring sufficient diffusion of the fluid within the flow channels 120. Second, the spiral extension of the flow channels 120 results in a smooth flow path, minimizing fluid flow resistance and facilitating rapid and smooth fluid diffusion.
[0040] Furthermore, multiple flow channels 120 extend in a parallel spiral pattern, and these channels can be accommodating the same or different fluids. When the same fluid is introduced into the multiple flow channels 120, the fluid can be introduced simultaneously, improving the diffusion efficiency of the fluid from the first side 101 to the second side 102 of the air inlet 110. When different fluids are introduced into the multiple flow channels 120, since the different flow channels 120 are independent of each other, the paths of the different fluids diffusing from the first side 101 to the second side 102 of the air inlet 110 are independent. This not only improves the diffusion uniformity of each fluid, but also shifts the potential premature mixing of different fluids from the front side of the spray plate 111 to the rear side of the spray plate 111, preventing the different fluids from mixing prematurely before reaching the second side 102 of the air inlet 110, i.e., before entering the reaction chamber. This reduces or even eliminates the risk of premature chemical reactions between different fluids. Furthermore, multiple flow channels 120 extend side by side, and the fluids in different flow channels 120 are arranged adjacent to each other. When each fluid diffuses to the second side 102 of the air inlet 110, the different fluids are evenly distributed, which can also improve the uniformity of the distribution of different fluids in the reaction chamber and achieve the purpose of process improvement.
[0041] The air inlet 121 can be located at one end of the flow channel 120 located in the middle of the spray plate 111, or the air inlet 121 can be located at one end of the flow channel 120 located at the edge of the spray plate 111.
[0042] Specifically, when the flow channel 120 spirals from the middle of the spray plate 111 to the edge of the spray plate 111, the air inlet 121 can be provided at one end of the flow channel 120 located in the middle of the spray plate 111, and the air outlet 122 can be provided at one end of the flow channel 120 located at the edge of the spray plate 111.
[0043] To ensure more uniform fluid diffusion to the second side 102 of the air intake 110, in some embodiments, multiple flow channels 120 are arranged symmetrically with the center of the spray plate 111 as the center of symmetry. Since the flow channels 120 are symmetrically arranged on the spray plate 111 with the center of symmetry as the center of symmetry, the flow channels 120 are evenly distributed along the extension direction of the spray plate 111. This allows the fluid to diffuse evenly along the flow channels 120 on the spray plate 111 and further evenly to the second side 102 of the air intake 110.
[0044] As fluid continuously enters the flow channel 120 through the air inlet 121, the fluid concentration near the air inlet 121 is relatively higher than that further away from the air inlet 121. To further achieve uniform air intake, in some embodiments, the spray plate 111 is flat, and the depth of the flow channel 120 gradually increases in the direction from the air inlet 121 to the direction away from the air inlet 121. Due to the greater depth of the flow channel 120, when the thickness of the spray plate 111 is uniform, the path from the flow channel 120 to the air outlet 130 on the second side 102 is shorter, and the gas in the flow channel 120 diffuses to the second side 102 faster; conversely, if the flow channel 120 is shallower, the path from the flow channel 120 to the air outlet 130 on the second side 102 is longer, and the gas in the flow channel 120 diffuses to the second side 102 relatively slowly. By setting the depth of the flow channel 120 near the air inlet 121 to be shallow and the depth of the flow channel 120 far from the air inlet 121 to be deep, on the one hand, the speed at which the fluid in the high concentration area of the flow channel 120 diffuses to the second side 102 can be slowed down, while the speed at which the fluid in the low concentration area of the flow channel 120 diffuses to the second side 102 can be increased. On the other hand, the speed at which the gas flows out of the air outlet 130 of the flow channel 120 near the air inlet 121 is reduced, which can promote the diffusion of the gas in the flow channel 120 to the area far from the air inlet 121. Under the combined effect, the amount of gas in the flow channel 120 diffused to the second side 102 tends to be consistent, further improving the uniformity of the concentration of the fluid diffused to the second side 102 of the spray plate 111.
[0045] It should be noted that the gradual increase in the depth of the flow channel 120 means that the overall trend of the depth of the flow channel 120 gradually increases in the direction from the air inlet 121 to away from the air inlet 121. This can be a linear increase or a step-like increase.
[0046] Of course, in other embodiments, the spray plate 111 can be an arc-shaped plate, with the spray plate 111 arched away from the second side 102 at the position corresponding to the air inlet 121. Because the spray plate 111 arches away from the second side 102 at the position corresponding to the air inlet 121, the second side 102 of the air inlet 110 is farther from the reaction position in the reaction chamber at the position corresponding to the air inlet 121, resulting in a longer distance for the gas in the flow channel 120 to diffuse to the reaction position; conversely, if the second side 102 of the air inlet 110 is closer to the reaction position in the reaction chamber at a position away from the air inlet 121, the gas in the flow channel 120 will diffuse to the reaction position a shorter distance. By arching the spray plate 111 away from the second side 102 at the position corresponding to the air inlet 121, the fluid concentration difference in the flow channel 120 near and away from the air inlet 121 can be balanced, making the fluid concentration and flow rate reaching the reaction position in the reaction chamber after passing through the spray plate 111 more consistent, further improving the uniformity of air intake.
[0047] In some embodiments, the spray plate 111 has a recessed section on the side facing the first side 101 to form multiple flow channels 120. By creating channels in the spray plate 111, independent flow channels 120 can be formed to allow for uniform fluid diffusion. The depth of the flow channels 120 can be varied by changing the depth of the channels. Specifically, the flow channels 120 can be formed by excavating on the side of the spray plate 111 facing the first side 101, or the spray plate 111 and the flow channels 120 can be integrally injection molded.
[0048] In other embodiments, the air intake device 100 includes multiple spirally arranged and spaced-apart convex baffles (not shown in the figure). The convex baffles are disposed on the side of the spray plate 111 facing the first side 101, and the convex baffles enclose to form multiple flow channels 120. The flow channels 120 are independent of each other, allowing for uniform fluid diffusion. The depth of the flow channels 120 can be changed by varying the height of the convex baffles. Specifically, the convex baffles can be bonded, welded, or otherwise disposed on the spray plate 111 depending on their material selection; alternatively, the convex baffles can be integrally formed with the spray plate 111.
[0049] Specifically, if the flow channel 120 is formed by a convex baffle disposed on the first side 101 of the spray plate 111, then the seal 150 is disposed between the convex baffle and the cover plate 140. If the flow channel 120 is formed by a recess on the side of the spray plate 111 facing the first side 101, the seal 150 is disposed between the surface of the first side 101 of the spray plate 111 and the cover plate 140.
[0050] In some embodiments, a heating element 160 is provided on the cover plate 140. The heating element 160 is used to regulate the temperature of the fluid flowing through the spray plate 111, so that the temperature of the fluid entering the reaction chamber is suitable and uniform. Specifically, the heating element 160 is an annular heating block with a heating wire inside. The heating block is positioned appropriately on the cover plate 140, and the coverage area is uniform, so as to uniformly transfer heat to the spray plate 111, thereby achieving uniform heating of the fluid in the flow channel 120.
[0051] Please continue reading Figure 6 and Figure 7 , Figure 6 This is a schematic diagram of the back structure of the spray plate of an air intake device according to an embodiment of this application; Figure 7 This is a partial perspective structural diagram of the spray plate of the air intake device according to an embodiment of this application from the rear view. In some embodiments, two flow channels 120 are arranged side by side. Each flow channel 120 is provided with two exhaust vents 130 along its extending direction. Each exhaust vent 130 is inclined toward the corresponding adjacent flow channel 120 as it extends from the flow channel 120 toward the second side 102. Therefore, when the two flow channels 120 are used to diffuse different fluids, the two fluids mix and blend on the second side 102, improving the uniformity of the distribution of the two fluids in the reaction chamber.
[0052] Furthermore, the adjacent exhaust ports 130 of the two flow channels 120 are arranged alternately at intervals, and the adjacent exhaust ports 130 of the two flow channels 120 are alternately arranged on the same curve at the exhaust end of the second side 102. At this time, it can be further ensured that the fluid discharged through the exhaust ports 130 of the two flow channels 120 is fully mixed and evenly distributed, thereby improving the uniformity and consistency of the reaction.
[0053] Please continue reading Figure 8 and Figure 9 , Figure 8 This is a partial cross-sectional structural schematic diagram of an air intake device according to an embodiment of this application, used to show the air outlet; Figure 9 This is a partial cross-sectional structural schematic diagram of an air intake device according to another embodiment of this application, used to illustrate the air outlet.
[0054] In some embodiments, the angle α between the extension direction of the vent 130 and the thickness direction of the inlet 110 is 5° to 20°. For example, 5°, 8°, 10°, 17°, or 20°. The reasonable tilt angle of the vent 130 extension can ensure that the fluid in the adjacent flow channels 120 is fully mixed while reducing the extension path.
[0055] In some embodiments, the spacing between two adjacent air outlets 130 in each row is 3mm-15mm. For example, 3mm, 5mm, 9mm, or 15mm. In the extending direction of the flow channel 120, the spacing between adjacent air outlets 130 may be equal or unequal. For example, the air outlets 130 near the air inlet 121 may be densely arranged, while those far from the air inlet 121 may be sparsely arranged, or vice versa. This can be adjusted according to actual process requirements to regulate the uniformity of fluid diffusion.
[0056] In some embodiments, the spacing between adjacent flow channels 120 is 1mm-5mm, such as 1mm, 3mm, or 5mm. In this case, the flow channels 120 on the air intake 110 are arranged reasonably, which can increase the coverage area of the flow channels 120 while ensuring structural strength and improving the uniformity of fluid distribution.
[0057] In some embodiments, the coverage ratio of the flow channel 120 on the air intake 110 is 60%-90%. For example, 60%, 75%, 80%, or 90%. Therefore, the coverage ratio of the flow channel 120 on the air intake 110 is reasonable, which can leave a certain space for the sidewall thickness of the flow channel 120, and can increase the coverage area of the flow channel 120 while ensuring structural strength, thereby improving the uniformity of fluid distribution.
[0058] In some embodiments, the outer diameter of the second side 102 of the air intake 110 is 300mm-400mm, such as 300mm, 320mm, 345mm, 370mm, or 400mm. The outer diameter of the area on the second side 102 of the air intake 110 where the air outlets 130 are distributed is 300mm-350mm, such as 300mm, 323mm, or 350mm. The air outlets 130 of the air intake 110 are reasonably arranged on the second side 102 of the air intake 110, which can ensure that the gas in the flow channel 120 is uniformly diffused to the second side 102 of the air intake 110.
[0059] In some embodiments, the width of the flow channel 120 is 5mm-10mm. For example, 5mm, 7mm, or 10mm. The width of the flow channel 120 is suitable to allow fluid to pass through smoothly.
[0060] In some embodiments, the depth of the flow channel 120 is 15mm-25mm, such as 15mm, 20mm, or 25mm. The appropriate depth of the flow channel 120 allows for sufficient fluid diffusion. Of course, the depth of the flow channel 120 can also be adjusted according to the actual thickness of the air intake 110.
[0061] In some embodiments, such as Figure 8As shown, the diameter of the air outlet 130 is consistent along its extension direction from the flow channel 120 to the second side 102 of the air inlet 110. Specifically, the diameter of the air outlet 130 is 0.8mm-2mm, for example, 0.8mm, 1mm, or 2mm. The suitable diameter of the air outlet 130 allows the fluid in the flow channel 120 to diffuse to the second side 102 of the air inlet 110 at a suitable flow rate.
[0062] In other embodiments, such as Figure 9 As shown, in the extension direction of the vent 130 from the flow channel 120 to the second side 102, the diameter of the vent 130 gradually increases. The gradual increase in the diameter of the vent 130 means that the diameter of the vent 130 gradually increases overall, which can be a linear increase or a stepped increase. With the gradually increasing diameter of the vent 130, the fluid first enters the smaller orifice. The smaller orifice has a smaller diameter, and the fluid enters slowly, which acts as a buffer, further buffering and stabilizing the fluid. Then, it enters the reaction chamber through the larger orifice, resulting in a more uniform and stable fluid flow.
[0063] Specifically, the vent 130 includes a first segment 131 and a second segment 132 connected in sequence. The diameter of the first segment 131 is smaller than the diameter of the second segment 132. The ratio of the length L1 of the first segment 131 to the length L2 of the second segment 132 is 1:1 to 1:15, for example, 1:1, 1:5, 1:10, or 1:15. The diameter of the first segment 131 is 0.2mm to 0.6mm, for example, 0.2mm, 0.3mm, or 0.6mm. The diameter of the second segment 132 is 0.8mm to 2mm, for example, 0.8mm, 1mm, or 2mm. The connection angle between the first segment 131 and the second segment 132 is 90° to 150°, for example, 90°, 120°, or 150°.
[0064] Another embodiment of this application provides a reaction apparatus. The reaction apparatus includes a reaction chamber and an air inlet device 100 as described in any of the above embodiments. A reaction cavity is formed inside the reaction chamber, providing space for the processing of the workpiece. The air inlet device 100 is disposed on the air inlet side of the reaction chamber, and the process gas enters the reaction cavity through the air inlet device 100. By providing the air inlet device 100 as described in the above embodiments, fluid can be uniformly diffused from the first side 101 of the air inlet 110 to the second side 102, and the process gas can be uniformly distributed on the air inlet side, thereby achieving uniform diffusion of the process gas within the reaction cavity and improving the reaction effect of the reaction apparatus.
[0065] Specifically, the reaction equipment can be a semiconductor thin film deposition equipment or other semiconductor coating equipment.
[0066] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.
Claims
1. An air intake device, characterized in that, include: The air intake has a first side and a second side that are arranged opposite to each other; At least one flow channel is formed in the air intake portion, the at least one flow channel extends in a tortuous manner within the air intake portion, the air intake portion also has an air intake passage extending from a first side of the air intake portion to communicate with the flow channel, fluid flows into the flow channel from the first side through the air intake passage and diffuses along the extension direction of the flow channel; the air intake portion also has a plurality of air outlets spaced apart along the extension direction of the flow channel, the air outlets extending from the flow channel to a second side, fluid in the flow channel diffuses to the second side through the air outlets.
2. The air intake device according to claim 1, characterized in that, The air intake includes: A spray plate, wherein the flow channel is formed on the side of the spray plate facing the first side, and the air outlet is formed on the spray plate and extends from the flow channel to the side of the spray plate facing the second side; A cover plate is provided on the surface of the spray plate facing the first side. The cover plate has an air intake channel. The air intake channel is provided in a one-to-one correspondence with the flow channel. Each air intake channel forms an air inlet at the connection between itself and the corresponding flow channel.
3. The air intake device according to claim 2, characterized in that, The cover plate is also provided with an air extraction channel that communicates with the flow channel. The air extraction channel is provided in a one-to-one correspondence with the flow channel. Each air extraction channel forms an air extraction port at the connection point with the corresponding flow channel. The air extraction port and the air inlet are distributed at both ends of the flow channel.
4. The air intake device according to claim 3, characterized in that, The air inlet is circular or elongated, and the air outlet is circular or elongated.
5. The air intake device according to claim 2, characterized in that, The spray plate is flat, and the depth of the flow channel gradually increases in the direction from the air inlet to away from the air inlet; or, the spray plate is an arc-shaped plate, and the spray plate arches away from the second side corresponding to the position of the air inlet.
6. The air intake device according to claim 2, characterized in that, Multiple flow channels are arranged side by side on the spray plate, and the multiple flow channels extend spirally from the middle of the spray plate to the edge of the spray plate.
7. The air intake device according to claim 6, characterized in that, The multiple flow channels are arranged in a centrally symmetrical manner on the spray plate with the center of the spray plate as the midpoint of symmetry.
8. The air intake device according to claim 6, characterized in that, The air intake includes multiple spirally arranged and spaced-apart convex baffles, which are disposed on the side of the spray plate facing the first side, and the convex baffles surround to form multiple flow channels; or, the side of the spray plate facing the first side is recessed to form multiple flow channels.
9. The air intake device according to claim 2, characterized in that, The end face of the sidewall of the flow channel away from the second side is taken as the channel end face. The air intake part also includes a sealing element, which is disposed between the channel end face and the cover plate.
10. The air intake device according to claim 1, characterized in that, The flow channels are arranged in two parallel rows. Each flow channel has two exhaust holes along its extension direction. As each row of exhaust holes extends from the flow channel to the second side, it is inclined toward the direction of the corresponding adjacent flow channel.
11. The air intake device according to claim 10, characterized in that, The adjacent exhaust vents of the two flow channels are arranged alternately at intervals, and the adjacent exhaust vents of the two flow channels are alternately arranged on the same curve at the exhaust end on the second side.
12. The air intake device according to claim 10, characterized in that, The angle between the extension direction of the air outlet and the thickness direction of the air inlet is 5°-20°; and / or, the distance between two adjacent air outlets in each row is 3mm-15mm.
13. The air intake device according to claim 1, characterized in that, The spacing between adjacent flow channels is 1mm-5mm; and / or, the coverage ratio of the flow channels on the air intake is 60%-90%; and / or, the outer diameter of the second side of the air intake is 300mm-400mm, and the outer diameter of the area on the second side of the air intake where the air outlets are distributed is 300mm-350mm; and / or, the width of the flow channel is 5mm-10mm; and / or, the depth of the flow channel is 15mm-25mm.
14. The air intake device according to claim 1, characterized in that, In the direction of extension of the air outlet from the flow channel to the second side, the diameter of the air outlet is consistent or gradually increases.
15. The air intake device according to claim 14, characterized in that, When the diameters of the air outlets are consistent, the diameter of the air outlets is 0.8mm-2mm; As the diameter of the air outlet gradually increases, the air outlet includes a first segment and a second segment connected in sequence, wherein the diameter of the first segment is smaller than the diameter of the second segment; the ratio of the length of the first segment to the length of the second segment is 1:1 to 1:15; and / or, the diameter of the first segment is 0.2mm to 0.6mm; and / or, the diameter of the second segment is 0.8mm to 2mm; and / or, the connection angle between the first segment and the second segment is 90° to 150°.
16. The air intake device according to claim 2, characterized in that, The cover plate is equipped with a heating element to regulate the temperature of the fluid flowing through the spray plate.
17. A reaction apparatus, characterized in that, include: The reaction chamber has a reaction cavity inside; The air intake device as described in any one of claims 1-16 is disposed on the air intake side of the reaction chamber.