Euv process off-gas treatment apparatus and method

Abstract

The application relates to an EUV process waste gas treatment device and method, wherein the EUV process waste gas treatment device comprises a water tank assembly, a reaction tower assembly and a washing tower assembly are connected to the water tank assembly; the reaction tower assembly comprises a gas inlet top cover located at the top, a plurality of gas inlet pipes are arranged on the gas inlet top cover, the gas inlet pipes are arranged in a central position in a direction inclined to the axial direction of the gas inlet top cover; the gas inlet top cover comprises an internal combustion air interlayer, the gas inlet pipe comprises a waste gas inlet pipe and an air inlet pipe which are arranged in a nested mode, the air inlet pipe is provided with a gas inlet gap at the position of the combustion air interlayer, the waste gas inlet pipe is closed at the inlet end, and a plurality of waste gas inlets are uniformly arranged in a ring shape at the closed position; a burner is installed at the central position of the gas inlet top cover, and the plurality of gas inlet pipes are arranged in a central position in a cross mode relative to the flame jet of the burner. The device can be suitable for uniform mixing and stable combustion of 600 SLM large-flow hydrogen, and the tail end meets the emission standard of less than 1% of the volume concentration.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing process waste gas treatment technology, and more specifically, to an EUV process waste gas treatment device and method. Background Technology

[0002] EUV (Extreme Ultraviolet) lithography machines are used to manufacture chips with processes of 7nm, 5nm, 3nm and below. They use high-energy lasers to bombard tin droplets to generate extreme ultraviolet light with a wavelength of 13.5nm, which is then projected onto the wafer through a reflector to expose the circuit pattern.

[0003] The photolithography process requires a high-speed hydrogen gas flow (each machine can consume over 400 liters of hydrogen per minute) as a protective atmosphere and cleaning gas. This prevents the tin droplets used to generate EUV light from oxidizing. Simultaneously, the reactive free radicals generated by hydrogen continuously clean the reflective mirror surface, preventing carbon contamination and ensuring optical path stability. After completing its mission, the hydrogen gas is extracted by a vacuum pump. For safety reasons, it is typically mixed with approximately 50% nitrogen to form hydrogen-containing waste gas. Existing methods for treating hydrogen-containing waste gas mainly suffer from the following technical shortcomings: (1) It is flammable and explosive, with a wide explosive concentration range (4.0% - 75.6%). Within the explosive concentration range, a tiny electrostatic spark or a high-temperature surface is enough to trigger a catastrophic explosion. (2) The risk of backfire is high and it can easily lead to catastrophic accidents; (3) Due to the small size requirement of the equipment, the uniformity of hydrogen and air mixing, combustion stability and the ability to withstand sudden temperature drops are all huge challenges. (4) The process is complex. The hydrogen flow rate varies widely from 0 to 500 SLM, while the process N2 flow rate remains constant at 500 SLM. The waste gas concentration and flow rate change drastically in an instant, requiring the treatment system to have an ultra-fast response speed and extremely high control precision to prevent unstable combustion or incomplete treatment. Summary of the Invention

[0004] The purpose of this application is to provide an EUV process waste gas treatment device and method that is suitable for uniform mixing and stable combustion of 600 SLM high-flow-rate hydrogen, and meets the emission standard of less than 1% by volume at the tail end.

[0005] To achieve the above objectives, in a first aspect, the present invention provides an EUV process exhaust gas treatment device, comprising: a water tank assembly, wherein a reaction tower assembly and a scrubbing tower assembly are connected to the water tank assembly; The reaction tower assembly includes an air inlet top cover located at the top, and multiple air inlet pipes are provided on the air inlet top cover. The air inlet pipes are axially inclined and centered relative to the air inlet top cover. The air inlet top cover includes an internal combustion air jacket, and the air inlet pipe includes an inner and outer stacked exhaust gas inlet pipe and an air inlet pipe. The air intake pipe is provided with an air intake notch at the part of the combustion air interlayer, and the extension port of the exhaust gas intake pipe is closed, with multiple exhaust gas intake holes evenly distributed in a ring at the closed part. A burner is installed in the center of the top cover of the air inlet, and multiple air inlet pipes are centered and intersecting with the flames emitted by the burner.

[0006] In an optional embodiment, the exhaust gas inlet pipe and the air inlet pipe are coaxially stacked. The exhaust gas inlet pipe includes a vertically arranged vertical pipe section and an inclined pipe section that is centered at an angle. The air inlet pipe is coaxially stacked on the outside of the inclined pipe section.

[0007] In an optional embodiment, the air intake pipe and the inclined pipe section are axially centered relative to the top cover of the air inlet, and the inclination angle is 45°. The top cover of the air inlet is provided with a plurality of inclined air inlets, and the air intake pipe is provided with a docking flange, which is sealed and docked with the inclined air inlets.

[0008] In an optional embodiment, the extended end of the air intake pipe includes an end opening that extends beyond the combustion air interlayer, and the closed port of the exhaust gas intake pipe is located axially inside the end opening.

[0009] In an optional embodiment, a conical frustum is provided at the closed port of the exhaust gas inlet pipe. The conical frustum gradually narrows along the distal end of the inclined pipe section, and a plurality of exhaust gas inlet holes are evenly distributed in a ring on the conical frustum.

[0010] In an optional embodiment, each of the exhaust gas inlets is a through-hole structure and is opened in the direction of the thickness of the conical frustum at its location.

[0011] In an optional embodiment, the top cover of the air inlet is further connected to a combustion air intake pipe, which is connected to both sides of the bottom of the top cover of the air inlet, and the cavity of the combustion air intake pipe communicates with the space of the combustion air interlayer.

[0012] In an optional embodiment, the water tank assembly is connected to a circulating water pump, which is connected to a plate heat exchanger. The plate heat exchanger is used to return the cooled circulating water to the reaction tower assembly and the washing tower assembly to cool the high-temperature flue gas and wash the tail exhaust gas.

[0013] In an optional embodiment, the reaction tower assembly and the washing tower assembly each include a tower section structure, the water tank assembly is provided with an air inlet and an air outlet, and the tower section structure is directly connected to the air inlet and the air outlet respectively.

[0014] Secondly, the present invention provides a method for treating EUV process waste gas, performed according to the EUV process waste gas treatment apparatus described in any of the foregoing embodiments, comprising the following steps: EUV process exhaust gas is introduced into the top cover of the air inlet through the exhaust gas inlet pipe, and then introduced into the air inlet pipe through the exhaust gas inlet hole, where it is forcibly mixed with the air introduced into the combustion air interlayer. Hydrogen in the mixed gas is burned by the flame ejected from the burner. After cooling, it is converted from water vapor into water. The high-temperature flue gas generated is simultaneously sprayed and cooled inside the reaction tower components. The exhaust gas, cooled by spraying, is introduced into the scrubbing tower assembly above the liquid surface of the water tank assembly, and is then washed inside the scrubbing tower assembly before being discharged.

[0015] The EUV process exhaust gas treatment device in this application allows the process exhaust gas to enter the inlet top cover at an inclined and centered angle, which helps to reduce the axial flow velocity of the high-temperature flue gas at this location, increases the time the mixed gas spends inside the inlet top cover, and prepares for further cooling. The inclined and centered inlet angle facilitates direct high-temperature treatment of the process exhaust gas by the flame, improving treatment efficiency.

[0016] By setting up a combustion air jacket and combining it with an air inlet located at the combustion air jacket, the process waste gas and combustion air can be forcibly and uniformly mixed, facilitating the direct combustion of the process waste gas after forced and uniform mixing.

[0017] The reaction tower assembly and the scrubbing tower assembly are directly connected to the water tank assembly, enabling direct spraying and washing of the process waste gas after combustion treatment. This effectively ensures the treatment capacity of the process waste gas and can meet the requirements of uniform mixing and stable combustion of 600SLM high-flow-rate hydrogen.

[0018] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1This is a three-dimensional structural diagram of the air inlet top cover of this application; Figure 2 This is a cross-sectional structural diagram of the air inlet top cover of this application; Figure 3 This is a schematic diagram of the intake pipe structure of this application; Figure 4 This is a schematic diagram of the water tank assembly of this application; Figure 5 This is a schematic diagram of the overall structure of the EUV process waste gas treatment device of this application.

[0021] icon: 1-Water tank assembly; 11-Circulating water pump; 12-Plate heat exchanger; 13-Air inlet; 14-Air outlet; 2-Reaction tower assembly; 21-Inlet top cover; 211-Combustion air jacket; 22-Intake pipe; 221-Exhaust gas intake pipe; 2211-Exhaust gas intake port; 2212-Vertical pipe section; 2213-Inclined pipe section; 2214-Closed port; 2215-Frustum conical; 222-Air intake pipe; 222a-Intake notch; 222b-Matching flange; 222c-End opening; 23- Inclined air intake; 3-Scrubber tower assembly; 4-Burner; 5-Combustion air intake pipe. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] In the description of this application, it should be noted that the terms "inner" and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0025] The EUV process exhaust gas treatment device in this application is specifically used for the combustion treatment of EUV process exhaust gas containing H2. By optimizing the necessary structural composition, it can be adapted to the uniform mixing and stable combustion of 600SLM high-flow-rate hydrogen.

[0026] See Figure 1 and combined Figures 2-5 The EUV process exhaust gas treatment device in this application has the following main structure: a water tank assembly 1, and a reaction tower assembly 2 and a scrubbing tower assembly 3 connected to the water tank.

[0027] In terms of structural connections, the water tank assembly 1 serves as the base and water collection / storage unit of the overall device, directly connecting to and supporting the reaction tower assembly 2 and the washing tower assembly 3. This direct connection between the towers and tanks results in a compact structure and reduces piping connections.

[0028] The reaction tower assembly 2 is specifically a functional structure including an air intake anti-backfire and premixing function. Specifically, the reaction tower assembly 2 includes an air intake top cover 21 located at its top. Multiple air intake pipes 22 are provided on the air intake top cover 21, and the multiple air intake pipes 22 are axially inclined and centered relative to the air intake top cover 21.

[0029] The aforementioned inclined and centered air intake configuration specifically refers to the fact that the extension lines of all air intake pipes 22 point towards the central axis of the top cover, thereby forming a centripetal converging airflow field. At the same time, the inclined and centered air intake configuration helps to reduce the axial velocity of the high-temperature flue gas at the air intake section, increases the time the mixed gas spends inside the air intake top cover 21, and further facilitates the formation of a temperature gradient distribution field.

[0030] The concentrically converging airflow field facilitates the direct high-temperature treatment of process waste gas by the flame, thereby improving treatment efficiency.

[0031] To further enhance the uniform mixing effect of process exhaust gas and combustion air and eliminate potential combustion hazards, the top cover 21 of the air inlet is constructed as a hollow structure, forming an independent combustion air interlayer 211 inside. The lower half of each air inlet pipe 22 further adopts a coaxial sleeve structure with inner and outer overlapping, including an inner exhaust gas inlet pipe 221 and an outer coaxially sleeved air inlet pipe 222.

[0032] Regarding the airflow path, an intake notch 222a is provided on the wall of the air intake pipe 222 at the location of the combustion air jacket 211, allowing externally supplied air in the air intake pipe 222 to enter the combustion air jacket 211 through the intake notch 222a. Simultaneously, to prevent premature exhaust gas escape and to achieve directional injection, the extension port of the exhaust gas intake pipe 221 (i.e., the end facing the burner 4) is specifically designed as a closed structure, and multiple exhaust gas intake holes 2211 are evenly provided on the annular sidewall of this closed end.

[0033] The process waste gas introduced into the top cover 21 of the air inlet is first uniformly discharged outward from the waste gas inlet hole 2211. Then, in the annular space with a length interval between the closed end of the waste gas inlet pipe 221 and the open end 222c of the air inlet pipe 222, it is forcibly mixed with the combustion air entering at the corresponding part of the air inlet gap 222a, thereby effectively buffering the mixed gas and uniformly mixing the process waste gas and the combustion air to form a uniform hydrogen-oxygen gradient field.

[0034] In the combustion core area of ​​the air inlet top cover 21, a burner 4 is installed at the center of the air inlet top cover 21, for example, using a high-energy ignition device. Multiple air inlet pipes 22 are arranged in a ring around the burner 4, and their tilt angle allows the exhaust gas-air mixture stream to intersect with the flame emitted by the burner 4. More specifically, the mixed gas streams led out by different air inlet pipes 22 intersect with the flame emitted by the burner 4.

[0035] On the one hand, the shearing effect of the jet further circulates and mixes the gas mixture; on the other hand, it ensures that the gas mixture is covered by the flame the moment it leaves the air intake pipe 22, or more specifically, the opening 222c at the end of the air intake pipe 222, so as to achieve instant ignition, avoid the accumulation of unburned gas mixture, and eliminate the risk of explosion from the source.

[0036] The EUV process exhaust gas treatment device in this application enables the hydrogen-containing exhaust gas from the EUV process to be forcibly and uniformly premixed with the combustion air at the end of the air inlet pipe 22 before entering the tower cavity of the reaction tower assembly 2, and then rushes towards the central flame in the form of a high-speed inclined jet, thus achieving stable and safe combustion under conditions of large flow fluctuations.

[0037] In one specific embodiment, from the perspective of optimizing the specific structure of the intake pipe 22, the exhaust gas intake pipe 221 and the air intake pipe 222 are set in a coaxial stacked relationship to ensure the axial symmetry of the airflow distribution and avoid flow deviation.

[0038] From the perspective of specific structural composition and connection relationship, the exhaust gas inlet pipe 221 includes two sections. One section is a vertical pipe section 2212 that is vertically arranged along the axial direction of the inlet top cover 21 and is used to introduce process exhaust gas from the outside. The other section is an inclined pipe section 2213 that is inclined relative to the axial direction of the inlet top cover 21 and is centered. The axis of the inclined pipe section 2213 forms a certain angle with the axial direction of the inlet top cover 21.

[0039] The air intake pipe 222 is coaxially stacked on the outside of the inclined pipe section 2213 to form a sleeve structure. This arrangement can form an annular space with a length interval between the closed end of the exhaust gas intake pipe 221 and the open end 222c of the air intake pipe 222.

[0040] Furthermore, the air intake pipe 222 and the inclined pipe section 2213 are axially centered relative to the air intake top cover 21, and the inclination angle is 45°, which can comprehensively consider the jet penetration depth and residence time of the mixed gas, so that the two factors of jet penetration depth and residence time are balanced.

[0041] Furthermore, the above-mentioned configuration allows the mixed gas to achieve a balance between generating sufficient radial momentum to rush toward the central flame and maintaining a certain axial momentum to enter the reaction tower assembly 2 chamber downwards.

[0042] From the perspective of connection and fixation, the top cover 21 of the air inlet is provided with multiple inclined air inlets 23. The inclined air inlets 23 have the same axial inclination angle relative to the top cover 21 of the air inlet and are opposite to the position of each air inlet pipe 22.

[0043] An air inlet pipe 222 is provided with a docking flange 222b, which is sealed to the inclined air inlet 23. At the same time, the inclined pipe section 2213 of the exhaust gas inlet pipe 221 extends outward from the docking flange 222b and connects to the process exhaust gas inlet pipe 221 through the connecting flange after the connecting elbow, ensuring the normal passage of process exhaust gas.

[0044] The aforementioned connecting flange 222b and inclined air inlet 23, as well as the connecting flange and air inlet pipe 22, are sealed together by bolts, gaskets, etc., to avoid the risk of leakage of combustion air and process waste gas.

[0045] The end of the air intake pipe 222, that is, the end near the burner 4, has an end opening 222c structure. The end opening 222c extends beyond the combustion air jacket 211 in the axial direction of the air intake pipe 222, that is, it extends into the internal space of the reaction tower assembly 2, so that the air intake notch 222a corresponds to the position of the combustion air jacket 211.

[0046] In contrast, the closed port 2214 of the exhaust gas intake pipe 221 is not located at the end opening 222c of the air intake pipe 222, but is located on the axial inner side of the end opening 222c of the air intake pipe 222, forming an axial space between the closed end of the exhaust gas intake pipe 221 and the end opening 222c of the air intake pipe 222.

[0047] With this configuration, when the process waste gas is ejected from the waste gas inlet hole 2211 at the closed end of the waste gas inlet pipe 221, it is first injected into the cavity of the air inlet pipe 222 and premixed with the combustion air that enters the cavity through the inlet gap 222a in the aforementioned axial space.

[0048] The premixed gas then continues to flow forward and is eventually ejected from the end opening 222c of the air inlet pipe 222, entering the reaction tower assembly 2 for combustion. This in-cavity premixing method greatly improves the mixing uniformity and avoids areas with excessively high local concentrations within the air inlet top cover 21.

[0049] From the perspective of uniformly ejecting process exhaust gas, and to enhance the entrainment and mixing of process exhaust gas and combustion air, this embodiment improves the structure of the closed port 2214 of the exhaust gas inlet pipe 221.

[0050] Specifically, a conical frustum 2215 is provided at the closed port 2214 of the exhaust gas inlet pipe 221. The conical frustum 2215 gradually narrows along the distal end of the inclined pipe section 2213, i.e., in the direction of gas flow, forming a constriction structure similar to a nozzle. Multiple exhaust gas inlet holes 2211 are evenly distributed in a ring on the conical surface of the conical frustum 2215.

[0051] When the exhaust gas is ejected from the exhaust gas inlet 2211 on the conical surface, due to the guiding effect of the conical surface, multiple jets will be formed that expand outward in a radial pattern. These jets will generate strong turbulent mixing with the combustion air, which greatly improves the mixing effect compared to the angle of the existing straight hole injection.

[0052] Each exhaust gas inlet 2211 is a through hole structure, and the opening direction of each exhaust gas inlet 2211 is opened according to the thickness direction of the conical frustum 2215 at the location.

[0053] In other words, the axis of the exhaust gas inlet 2211 is aligned with the normal direction of the conical surface at its location. This ensures that the process exhaust gas jet is sprayed outward along the radial direction of the conical surface, maximizing the contact area and shear effect with the combustion air, which is conducive to forming turbulent mixing.

[0054] In another specific embodiment, from the perspective of external replenishment of combustion air, the top cover 21 of the air inlet is also connected to a combustion air inlet pipe 5. The combustion air inlet pipe 5 is connected to both sides of the bottom of the top cover 21 of the air inlet, and the cavity of the combustion air inlet pipe 5 is connected to the space of the combustion air interlayer 211. This allows the combustion air, oxygen-enriched air or purified combustion oxygen provided by the external combustion air fan to be evenly distributed to the combustion air interlayer 211. Then, the air is introduced into the air inlet pipe 222 through the air inlet notch 222a opposite to the position of the combustion air interlayer 211 for the above-mentioned premixing.

[0055] The water tank assembly 1 is connected to a circulating water pump 11, and the outlet of the circulating water pump 11 is connected to a plate heat exchanger 12. During operation, the circulating water pump 11 draws out the cooled washing circulating water collected in the water tank assembly 1 and pumps it into the plate heat exchanger 12. In the plate heat exchanger 12, the higher-temperature cooled washing circulating water exchanges heat with the plant cooling water (such as chilled water at 7-12°C), and the temperature of the circulating water decreases.

[0056] The cooled circulating water is returned to the spray layer inside the reaction tower component 2 for direct cooling of the high-temperature flue gas; the fine water mist with a large temperature difference fully exchanges heat with the high-temperature flue gas, achieving a rapid temperature drop; the large flow of circulating water is cooled twice by plate heat exchanger, and the stepped cooling coupling reduces the system temperature.

[0057] Simultaneously, a portion of the cooling water is also transported to the spray layer inside the scrubbing tower assembly 3 for washing the exhaust gas. Through this circulation method, water conservation and efficient heat removal are achieved, ensuring that the reaction tower assembly 2 and the scrubbing tower assembly 3 operate at suitable temperatures.

[0058] The reaction tower assembly 2 and the washing tower assembly 3 each include a tower section structure with a straight tower structure, and the water tank assembly 1 is a horizontal or transverse box structure. The box is provided with an air inlet 13 and an air outlet 14, and the flanges of the tower section structure are directly connected to the air inlet 13 and the air outlet 14 by bolts and gaskets, respectively.

[0059] This allows the flue gas, after being sprayed and cooled in reaction tower component 2, to directly enter the space above the liquid surface of the water tank, and then be directly introduced into the bottom of the scrubbing tower. The structure is compact, the gas resistance is reduced, and it is more suitable for the uniform mixing and stable combustion of large flow rates of hydrogen.

[0060] In one preferred embodiment, this application also provides a method for treating EUV process waste gas according to the above-described EUV process waste gas treatment device, specifically including the following key steps: S1, Forced premixing step: EUV process exhaust gas is introduced into the air inlet top cover 21 through exhaust gas inlet pipe 221, and introduced into air inlet pipe 222 through exhaust gas inlet hole 2211. It is then forcibly mixed with the air entering the air inlet pipe 222 through combustion air jacket 211. The high-speed process exhaust gas jet and the combustion air undergo turbulent mixing to form a premixed gas with uniform concentration and flow rate.

[0061] S2, the stable combustion and cooling step, the premixed gas continues to flow downward and is ejected at high speed from the end opening 222c of the air intake pipe 222. Its jet direction is centered at a 45° angle to the flame ejected from the burner 4 installed in the center of the air intake top cover 21.

[0062] The mixed gas is ignited by a flame as soon as it leaves the end opening 222c of the air inlet pipe 222. The hydrogen (H2) and oxygen (O2) in the gas undergo a combustion reaction: 2H2 + O2 → 2H2O. The heat generated by the combustion causes the flue gas temperature to rise sharply. The high-temperature flue gas then flows downward into the main body of the reaction tower assembly 2. Here, the water vapor generated by combustion is directly sprayed and cooled by cooling water from the circulating water pump 11 and the plate heat exchanger 12, directly converting it into water. The flue gas temperature is rapidly reduced to below the saturation temperature in a very short time, and the system pressure inside the reaction tower assembly 2 is reduced instantly, effectively preventing the formation of thermal NOx and protecting downstream equipment.

[0063] S3, the washing and emission step: After being sprayed and cooled, the exhaust gas, carrying water mist, enters the water tank assembly 1 downwards. Above the liquid surface in the water tank assembly 1, the gas and liquid undergo initial separation. Subsequently, the exhaust gas turns back upwards and enters the scrubbing tower assembly 3. Inside the scrubbing tower assembly 3, the exhaust gas comes into countercurrent contact with the scrubbing water or circulating water, and residual particulate matter and water-soluble substances in the exhaust gas are thoroughly removed.

[0064] Finally, clean gas that meets environmental standards (hydrogen volume concentration less than 1%) is discharged from the top of the scrubbing tower, completing the entire treatment process.

[0065] The EUV process exhaust gas treatment device and method in this application achieve uniform mixing of process exhaust gas and air before entering the combustion zone through inclined center air intake, coaxial sleeve premixing, and jet setting of exhaust gas inlet 2211. Combined with the coverage of the sprayed flame that is ignited immediately, it eliminates the accumulation of local explosive mixed gas and fundamentally eliminates the risk of explosion and backfire.

[0066] The forced mixing structure can ensure mixing uniformity and combustion stability within a drastic fluctuation range of hydrogen flow rate from 0 to 500 SLM.

[0067] The reaction tower assembly 2 and the scrubbing tower assembly 3 are directly connected to the water tank, realizing an integrated process of combustion, rapid cooling and scrubbing. It can quickly reduce the high temperature flue gas to a safe temperature while treating a large flow of waste gas, protecting the equipment and meeting strict emission standards (H2<1%).

[0068] It adopts a direct tower box connection and a modular 22-way intake pipe, with a compact overall structure, small footprint, and convenient for daily maintenance and component replacement.

[0069] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0070] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An EUV process waste gas treatment device, characterized in that, include: A water tank assembly, on which a reaction tower assembly and a washing tower assembly are connected; The reaction tower assembly includes an air inlet top cover located at the top, and multiple air inlet pipes are provided on the air inlet top cover. The air inlet pipes are axially inclined and centered relative to the air inlet top cover. The air inlet top cover includes an internal combustion air jacket, and the air inlet pipe includes an inner and outer stacked exhaust gas inlet pipe and an air inlet pipe. The air intake pipe is provided with an air intake notch at the part of the combustion air interlayer, and the extension port of the exhaust gas intake pipe is closed, with multiple exhaust gas intake holes evenly distributed in a ring at the closed part. A burner is installed in the center of the top cover of the air inlet, and multiple air inlet pipes are centered and intersecting with the flames emitted by the burner.

2. The EUV process waste gas treatment device according to claim 1, characterized in that, The exhaust gas inlet pipe and the air inlet pipe are coaxially stacked; The exhaust gas inlet pipe includes a vertically arranged vertical pipe section and an inclined pipe section that is centered at an angle. The air inlet pipe is coaxially stacked on the outside of the inclined pipe section.

3. The EUV process waste gas treatment device according to claim 2, characterized in that, The air intake pipe and the inclined pipe section are axially centered relative to the top cover of the air inlet, and the inclination angle is 45°. The top cover of the air inlet is provided with multiple inclined air inlets. The air intake pipe is provided with a docking flange, and the docking flange is sealed and docked with the inclined air inlet.

4. The EUV process waste gas treatment device according to claim 3, characterized in that, The air intake pipe has an open end that extends beyond the combustion air interlayer, and the closed end of the exhaust gas intake pipe is located axially inside the open end.

5. The EUV process waste gas treatment device according to claim 3, characterized in that, A conical truncated cone is provided at the closed port of the exhaust gas inlet pipe. The conical truncated cone gradually narrows along the distal end of the inclined pipe section, and multiple exhaust gas inlet holes are evenly distributed in a ring on the conical truncated cone.

6. The EUV process waste gas treatment device according to claim 5, characterized in that, Each of the exhaust gas inlets is a through-hole structure and is opened in the direction of the thickness of the conical frustum at its location.

7. The EUV process waste gas treatment device according to claim 1, characterized in that, The top cover of the air inlet is also connected to a combustion air intake pipe, which is connected to both sides of the bottom of the top cover of the air inlet, and the cavity of the combustion air intake pipe is in communication with the space of the combustion air interlayer.

8. The EUV process waste gas treatment device according to claim 1, characterized in that, The water tank assembly is connected to a circulating water pump, which is connected to a plate heat exchanger. The plate heat exchanger is used to return the cooled circulating water to the reaction tower assembly and the washing tower assembly to cool the high-temperature flue gas and wash the tail exhaust gas.

9. The EUV process waste gas treatment device according to claim 1, characterized in that, The reaction tower assembly and the washing tower assembly each include a tower section structure. The water tank assembly is provided with an air inlet and an air outlet. The tower section structure is directly connected to the air inlet and the air outlet, respectively.

10. A method for treating EUV process waste gas, carried out using the EUV process waste gas treatment apparatus according to any one of claims 1-9, characterized in that, Includes the following steps: EUV process exhaust gas is introduced into the top cover of the air inlet through the exhaust gas inlet pipe, and then introduced into the air inlet pipe through the exhaust gas inlet hole, where it is forcibly mixed with the air introduced into the combustion air interlayer. Hydrogen in the mixed gas is burned by the flame ejected from the burner. After cooling, it is converted from water vapor into water. The high-temperature flue gas generated is simultaneously sprayed and cooled inside the reaction tower components. The exhaust gas, cooled by spraying, is introduced into the scrubbing tower assembly above the liquid surface of the water tank assembly, and is then washed inside the scrubbing tower assembly before being discharged.

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