A baffle position detection device and method based on ranging principle
By employing a baffle position detection device based on the distance measurement principle in the PVD equipment, and utilizing a ToF distance sensor and display control module to achieve accurate detection of the baffle position, the problem of inaccurate detection caused by mechanical vibration is solved, thereby improving production stability and equipment reliability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- HUAHONG INTEGRATED CIRCUIT (CHENGDU) CO LTD
- Filing Date
- 2026-02-27
- Publication Date
- 2026-05-29
AI Technical Summary
In existing PVD equipment, the position detection device of the baffle may shift or loosen due to mechanical vibration and structural aging, causing inaccurate detection, false alarms and equipment shutdown, which affects production stability and yield.
A baffle position detection device based on the ranging principle is adopted. The current position of the baffle is detected by the ToF ranging sensor and compared with the reference parameters to achieve accurate judgment. The integrated display control module provides visual display and real-time alarm.
This improves the accuracy and reliability of baffle position detection, reduces equipment malfunctions and unplanned downtime, and enhances the stability of the process and the reliability of production equipment.
Smart Images
Figure CN122107932A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of semiconductor manufacturing equipment technology and is applicable to physical vapor deposition (PVD) process chambers with shutters. In particular, it relates to a shutter position detection device and method based on the distance measurement principle. Background Technology
[0002] In semiconductor chip manufacturing processes, the formation of metal interconnect layers is crucial to device performance and reliability. PVD, as a key technology for achieving metal thin film deposition, directly impacts chip yield and electrical characteristics through its process stability and repeatability. PVD equipment typically includes a shutter disk within the chamber. This shutter disk precisely shields the chamber pedestal during non-sputtering phases to prevent target material from unintendedly depositing onto the pedestal during non-processing periods. Current technologies generally employ optical position sensors to detect the shutter's position. These sensors typically include a light emitter and a light receiver. The light emitter emits a beam along a slit structure, while the light receiver is mounted on a component that can move linearly along a screw mechanism and is perpendicularly aligned with the light emitter. During the baffle position detection process, the light receiver moves under the drive of the screw and is always within the coverage area of the light beam emitted by the light emitter. Based on the photoelectric effect, the light receiver converts the received light signal into a corresponding electrical signal (such as current or voltage), which is then transmitted to the PCB board of the control system via the signal line, thereby realizing the detection of the baffle position.
[0003] However, in actual high-frequency, long-term production operations, this sensing solution gradually revealed significant reliability issues. Due to the presence of moving parts such as slit valves inside the PVD chamber, mechanical vibrations are easily generated during opening and closing. These continuous micro-vibrations are transmitted to the sensor receiver and its supporting structure. Furthermore, the screw drive mechanism upon which the optical receiver relies inherently suffers from mechanical wear, increased clearance, and transmission errors, leading to inherent failure risks. Under the combined effects of mechanical vibration and structural aging, the sensor's optical receiver is prone to positional shifts or loosening, resulting in misalignment of the optical path and consequently causing abnormal or complete failure of the baffle position detection signal. This defect is particularly prominent in large-scale, high-intensity chip manufacturing environments. Specifically, after a certain period of continuous use, the failure rate of the baffle position sensor increases significantly, frequently triggering equipment alarm systems, causing the machine to enter a protective shutdown state, severely disrupting continuous production processes and resulting in capacity losses. In addition, emergency repairs and component replacements to restore production not only increase manpower and spare parts costs but also introduce particulate contamination risks due to frequent chamber cavitation, further affecting wafer surface cleanliness and final product yield. Summary of the Invention
[0004] The purpose of this invention is to provide a baffle position detection device and method based on the distance measurement principle, so as to overcome one or more technical problems in the prior art, such as the inaccurate detection of baffle position, false alarms, or even shutdown of equipment, due to the fact that the sensor adopts a movable structure and its receiving end is prone to position shift or fixation failure under long-term use and external mechanical vibration interference.
[0005] To achieve the above objectives, the present invention provides the following technical solution: The present invention proposes a baffle position detection device based on the distance measurement principle. The detection device includes: a support module, a display control module integrated on the support module, a distance measurement sensing module, and a baffle storage module for storing the baffle. The distance measurement sensing module is positioned facing the side where the baffle enters and exits the baffle storage module. The display control module is configured to: set reference parameters for the baffle, receive a position status signal of the baffle sent by a host, and send a detection control signal to the distance measurement sensing module to control the distance measurement sensing module to detect and calculate the current position of the baffle. It also determines the position detection result of the baffle based on the position status signal, the current position, and the reference parameters of the baffle, and at least visually display the current position and the reference parameters of the baffle. Furthermore, it is configured to generate a status command from the position detection result and display it, and transmit the position detection result to the host. The distance measurement sensing module is configured to receive the detection control signal, detect and calculate the current position of the baffle, and output the result to the display control module.
[0006] Optionally, the display control module includes a control unit, a parameter input unit, an information display unit, and a status indication unit communicatively connected to the control unit; the parameter input unit is configured to input reference parameters of the baffle and transmit them to the control unit, the reference parameters of the baffle including at least the target position of the baffle and the allowable offset of the baffle; the control unit is configured to receive the position status signal of the baffle sent by the host and control the ranging sensor module to detect and calculate the current position of the baffle, and determine the position detection result of the baffle based on the position status signal, the current position, and the reference parameters of the baffle, and is also configured to transmit the position detection result to the host, and control the information display unit and the status indication unit; the information display unit is configured to receive and display display data from the control unit, the display data including at least the current position, the target position of the baffle, and the allowable offset of the baffle; the status indication unit is configured to respond to the status command output by the control unit.
[0007] Optionally, the ranging sensor module is mounted on the bearing module, and the area corresponding to the mounting position of the baffle storage module and the ranging sensor module is provided with an opening.
[0008] Optionally, a transparent partition plate is installed on the opening to isolate the internal space of the baffle storage module from the external environment.
[0009] Optionally, the ranging sensor module is mounted on the baffle storage module.
[0010] Optionally, the ranging sensing module includes a ToF ranging sensor, which includes a transmitting unit, a receiving unit, and a signal unit communicatively connected to the transmitting unit and the receiving unit. The transmitting unit is configured to respond to a transmission control signal sent by the signal unit and transmit a light pulse to the baffle. The receiving unit is configured to receive a reflected light pulse corresponding to the transmitted light pulse reflected by the baffle and transmit the light pulse signal to the signal unit. The signal unit is configured to receive the detection control signal sent by the display control module, calculate the current position of the baffle based on the light pulse signal, and transmit it to the display control module.
[0011] Optionally, the baffle includes a shutter arm, a shutter disk, and a drive mechanism for driving the shutter arm to move the shutter disk into and out of the process chamber; the drive mechanism is communicatively connected to the host computer to transmit the position status signals of the shutter arm and the shutter disk to the host computer; the ranging sensing module includes a first ranging sensing module and a second ranging sensing module; the first ranging sensing module is configured to detect and calculate the current position of the shutter arm and output it to the display control module, and the second ranging sensing module is configured to detect and calculate the current position of the shutter disk and output it to the display control module.
[0012] Based on the same inventive concept, this invention also proposes a baffle position detection method based on the distance measurement principle. The baffle position detection method uses the baffle position detection device based on the distance measurement principle as described in any of the preceding claims. The detection method includes:
[0013] The reference parameters of the baffle are set through the display control module;
[0014] The display control module receives the position status signal of the baffle sent by the host and sends a detection control signal to the ranging sensor module. After receiving the detection control signal, the ranging sensor module detects and calculates the current position of the baffle and outputs it to the display control module.
[0015] The display control module determines the position detection result of the baffle based on the position status signal, the current position, and the reference parameters of the baffle, and at least visually displays the current position and the reference parameters of the baffle, generates a status command based on the position detection result for display, and transmits the position detection result to the host.
[0016] Optionally, the ranging sensing module includes a ToF (Time of Flight) ranging sensor, which includes a transmitting unit, a receiving unit, and a signal unit communicatively connected to the transmitting unit and the receiving unit. After receiving the detection control signal, the ranging sensing module detects and calculates the current position of the baffle and outputs it to the display control module. This includes: the signal unit receiving the detection control signal and sending a transmission control signal to the transmitting unit; the transmitting unit responding to the transmission control signal and emitting a light pulse towards the baffle; the receiving unit receiving the reflected light pulse corresponding to the emitted light pulse reflected by the baffle and transmitting the light pulse signal to the signal unit; and the signal unit calculating the current position of the baffle based on the light pulse signal.
[0017] Optionally, the baffle includes a baffle arm and a baffle disk; the ranging sensing module includes a first ranging sensing module that senses the baffle arm and a second ranging sensing module that senses the baffle disk; the reference parameters of the baffle include the reference parameters of the baffle arm and the reference parameters of the baffle disk; the first ranging sensing module detects the current position of the baffle arm, and the second ranging sensing module detects the current position of the baffle disk; the display control module determines the position detection result of the baffle arm based on the position status signal, the current position of the baffle arm, and the reference parameters of the baffle arm; the display control module determines the position detection result of the baffle disk based on the position status signal, the current position of the baffle disk, and the reference parameters of the baffle disk.
[0018] Compared with the prior art, the baffle position detection device and method based on the distance measurement principle provided by the present invention have the following beneficial effects: The baffle position detection device based on the distance measurement principle provided by the present invention includes a support module, a display control module integrated on the support module, a distance measurement sensing module, and a baffle storage module for storing the baffle; the distance measurement sensing module is arranged facing the side where the baffle enters and exits the baffle storage module; the display control module is configured to: set the reference parameters of the baffle, receive the position status signal of the baffle sent by the host, and send a detection control signal to the distance measurement sensing module to control the distance measurement sensing module to detect and calculate the current position of the baffle, and determine the position detection result of the baffle according to the position status signal, the current position, and the reference parameters of the baffle, and at least visually display the current position and the reference parameters of the baffle, and is also used to generate a status command from the position detection result and display it, and transmit the position detection result to the host; the distance measurement sensing module is configured to receive the detection control signal, detect and calculate the current position of the baffle, and output it to the display control module. Therefore, this invention measures the current position of the baffle through an integrated ranging sensor module, sets and stores the baffle's reference parameters (specifically, target position and allowable offset) through a display control module, and achieves accurate judgment of the baffle's position by comparing the current position with the baffle's reference parameters. Simultaneously, it significantly improves the intuitiveness and interactivity of operation by visually displaying the baffle's position data and position status. Furthermore, by establishing a linkage communication mechanism with the host computer, it can send alarms or status signals to the host computer in real time when the baffle position exceeds the allowable deviation or an anomaly occurs, enabling the host computer to take timely proactive intervention measures. This effectively avoids process anomalies, equipment malfunctions, and unplanned downtime caused by inaccurate baffle positioning, greatly enhancing the stability of the process and the reliability of the production equipment.
[0019] Furthermore, since the baffle position detection method based on the distance measurement principle proposed in this invention belongs to the same inventive concept as the baffle position detection device based on the distance measurement principle provided in this invention, the baffle position detection method based on the distance measurement principle provided in this invention has at least all the advantages of the baffle position detection device based on the distance measurement principle provided in this invention. For details on the beneficial effects of the baffle position detection method based on the distance measurement principle provided in this invention, please refer to the above description of the beneficial effects of the baffle position detection device based on the distance measurement principle provided in this invention, which will not be repeated here. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of a baffle position detection device based on the distance measurement principle provided in one embodiment of the present invention.
[0021] Figure 2 This is a top view of the display control module in a baffle position detection device based on the distance measurement principle provided in one embodiment of the present invention.
[0022] Figure 3 This is a schematic diagram of a baffle position detection device based on the distance measurement principle provided in another embodiment of the present invention;
[0023] Figure 4 This is a schematic diagram of the ranging principle of the ranging sensing module in a baffle position detection device based on the ranging principle provided in one embodiment of the present invention.
[0024] Figure 5 This is a flowchart illustrating a baffle position detection method based on the ranging principle provided in one embodiment of the present invention.
[0025] 1-Bearing module, 2-Display control module, 21-Control unit, 22-Parameter input unit, 221-Target position setting button, 222-Allowable offset setting button, 23-Information display unit, 231-Position display screen, 232-Allowable offset display screen, 24-Status indicator unit, 241-Power indicator light, 242-Baffle arm normal status light, 243-Baffle arm abnormal status light, 244-Baffle plate normal status light, 245-Baffle plate abnormal status light, 25-Panel, 3-Distance sensing module, 31-First distance sensing module, 32-Second distance sensing module, 4-Baffle storage module, 41-Opening, 5-Baffle, 51-Baffle arm, 52-Baffle plate, 6-Main unit. Detailed Implementation
[0026] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a further detailed explanation of the baffle position detection device and method based on the distance measurement principle proposed in this invention. The advantages and features of this invention will become clearer from the following description. It should be noted that the accompanying drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this invention.
[0027] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.
[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0029] The core idea of this invention is to provide a baffle position detection device and method based on the distance measurement principle. The detection device measures the current position of the baffle through an integrated distance measurement sensing module, sets and stores the reference parameters of the baffle (specifically, such as target position and allowable offset) through a display control module, and achieves accurate judgment of the baffle position by comparing the current position with the reference parameters of the baffle. At the same time, the position data and position status of the baffle are displayed visually, thereby significantly improving the intuitiveness and interactivity of the operation. By establishing a linkage communication mechanism with the host, when the baffle position is detected to exceed the allowable deviation or an abnormality occurs, an alarm or status signal can be sent to the host in real time, enabling the host to take timely proactive intervention measures. This effectively avoids process abnormalities, equipment misoperation, and unplanned downtime caused by inaccurate baffle position, greatly enhancing the stability of the process and the reliability of the production equipment.
[0030] To achieve the above-mentioned goals, one embodiment of the present invention provides a baffle position detection device based on the distance measurement principle. For example, please refer to... Figures 1-3 , Figure 1 This is a schematic diagram of a baffle position detection device based on the distance measurement principle provided in one embodiment of the present invention. Figure 2 This is a top view of the display control module in a baffle position detection device based on the distance measurement principle provided in one embodiment of the present invention. Figure 3 This is a schematic diagram of a baffle position detection device based on the distance measurement principle provided in another embodiment of the present invention. Figure 1As shown, the detection device includes: a carrier module 1, a display control module 2 integrated on the carrier module, a ranging sensor module 3, and a baffle storage module 4 for storing the baffle 5; the ranging sensor module 3 is disposed on the side where the baffle 5 enters and exits the baffle storage module 4; the display control module 2 is configured to: set the reference parameters of the baffle 5, receive the position status signal of the baffle 5 sent by the host 6, and send a detection control signal to the ranging sensor module 3 to control the ranging sensor module 3 to detect and calculate the current position of the baffle 5, and determine the position detection result of the baffle 5 according to the position status signal, the current position, and the reference parameters of the baffle 5, and at least visually display the current position and the reference parameters of the baffle 5, and is also used to generate a status command from the position detection result and display it, and transmit the position detection result to the host 6; the ranging sensor module 3 is configured to detect and calculate the current position of the baffle after receiving the detection control signal and output it to the display control module 2. Therefore, this invention measures the current position of the baffle 5 through the integrated ranging sensor module 3, sets and stores the reference parameters of the baffle 5 (specifically, such as target position and allowable offset) through the display control module 2, and achieves accurate judgment of the position of the baffle 5 by comparing the current position with the reference parameters of the baffle 5. At the same time, the position data and position status of the baffle 5 are displayed visually, which significantly improves the intuitiveness and interactivity of the operation. Furthermore, by establishing a linkage communication mechanism with the host 6, when the position of the baffle 5 exceeds the allowable deviation or an abnormality is detected, an alarm or status signal can be sent to the host 6 in real time, enabling the host 6 to take timely proactive intervention measures. This effectively avoids process abnormalities, equipment misoperation, and unplanned downtime caused by the inaccurate position of the baffle 5, greatly enhancing the stability of the process and the reliability of the production equipment.
[0031] For example, please continue to see Figure 2 ,like Figure 2As shown, in some exemplary embodiments, the display control module 2 includes a control unit 21, a parameter input unit 22, an information display unit 23, and a status indication unit 24 communicatively connected to the control unit 21; the parameter input unit 22 is configured to input the reference parameters of the baffle 5 and transmit them to the control unit 21, the reference parameters of the baffle 5 including at least the target position of the baffle 5 and the allowable offset of the baffle 5; the control unit 21 is configured to receive the position status signal of the baffle 5 sent by the host 6 and control the ranging sensing module 3 to detect and calculate the position status signal of the baffle 5. The system determines the current position of the baffle 5 and, based on the position status signal, the current position, and the reference parameters of the baffle 5, determines the position detection result of the baffle 5. It also transmits the position detection result to the host computer 6 and controls the information display unit 23 and the status indication unit 24. The information display unit 23 is configured to receive and display display data from the control unit 21, the display data including at least the current position, the target position of the baffle 5, and the allowable offset of the baffle 5. The status indication unit 24 is configured to respond to status commands output by the control unit 21.
[0032] The baffle position detection device provided by the present invention has a display control module 2 that integrates a control unit 21, a parameter input unit 22, an information display unit 23, and a status indication unit 24 to construct a human-computer interaction system with parameter setting, multimodal information feedback, and closed-loop decision-making capabilities. Specifically, the parameter input unit 22 enables operators to accurately set the reference parameters of the baffle, including the target position and allowable offset, thus achieving configurability of the detection standard and process adaptability. The control unit 21, as the core processing unit, not only controls the ranging sensor module 3 to detect the current position of the baffle 5, but also uses the position status signal and the reference parameters of the baffle 5 to make judgments, generate highly reliable position detection results, and complete bidirectional signal exchange with the host 6 and control the output information of the information display unit 23 and the status indication unit 24. The information display unit 23 at least visualizes the current position, the target position, and the allowable offset, enhancing the transparency of the operation. The status indication unit 24, according to the instructions of the control unit 21, intuitively displays the position status of the baffle 5 (specifically, by illuminating different status lights when the position distance is normal or abnormal), realizing rapid identification and early warning of the baffle position status. Thus, the present invention achieves a complete closed loop from parameter input, real-time detection, intelligent judgment to multi-dimensional feedback through the modular design of the display control module 2. This not only greatly improves the intuitiveness and operational efficiency of human-computer interaction, but also significantly enhances the reliability, maintainability and controllability of the device and the process through precise digital control and status display.
[0033] It should be noted that the present invention does not limit the specific integration method of the display control module 2 on the carrier module 1. As a preferred embodiment, please refer to [the following section / reference]. Figure 2 The display control module 2 also includes a panel 25, which is detachably (e.g., via clips or screws) mounted on the support module 1. Specifically, the parameter input unit 22, information display unit 23, and status indicator unit 24 are integrated on the upper surface of the panel 25, while the control unit 21 is integrated on the lower (or back) side of the panel 25. By separating the parameter input unit 22, information display unit 23, and status indicator unit 24 from the control unit 21 on both sides of the panel 25, the space utilization and overall integration of the device are effectively improved.
[0034] Preferably, in one preferred embodiment, the parameter input unit 22 includes a target position setting button 221 and an allowable offset setting button 222. The target position setting button 221 is used at least to set the target position of the baffle, and the allowable offset setting button 222 is used at least to set the allowable positional offset range of the baffle 5 relative to the target position. It should be noted that the above-described scheme of using separate buttons is merely an exemplary illustration of one specific implementation of the parameter input unit 22 and is not a limitation of the present invention. Those skilled in the art should understand that other design schemes can also be adopted according to actual application scenarios and human-computer interaction requirements. For example, the parameter input unit 22 can be set as a single multi-function button, which can switch between different parameter setting modes by cooperating with a mode selection switch or by different operation logics such as long press, short press, or continuous press, thereby sequentially completing the setting of multiple parameters such as the target position and the allowable offset. Such variations or substitutions based on conventional design ideas should all be considered to fall within the protection scope of the present invention, and will not be described in detail here.
[0035] Preferably, in one specific embodiment, the target position setting button 221 and the allowable offset setting button 222 are designed with recessed holes, which can prevent accidental pressing by personnel.
[0036] Preferably, in one specific embodiment, the information display unit 23 includes an LCD screen. The LCD screen enables real-time and intuitive visualization of the detection data of the baffle 5. Specifically, the LCD screen is configured to display at least the following data: the current position of the baffle 5, the target position, and the allowable offset, as well as the setting operations of the parameter input unit 22 on the reference parameters of the baffle 5. As a preferred embodiment, please refer to... Figure 2The information display unit 23 provided by the present invention includes a position display screen 231 and an allowable offset display screen 232. By adopting a separate display screen design, different information can be presented in parallel, thereby simplifying the operation process and improving the intuitiveness of information reading.
[0037] Preferably, in one specific embodiment, the status indication unit 24 includes an LED indicator to provide a real-time and intuitive response to the commands of the control unit. In one preferred embodiment, please refer to... Figure 1 and Figure 2 When the device needs to detect the baffle arm 51 and baffle plate 52 of the baffle 5 respectively, the status indicator unit 24 includes a power indicator light 241, a baffle arm normal status light 242, a baffle arm abnormal status light 243, a baffle plate normal status light 244, and a baffle plate abnormal status light 245. For example, in use, when an abnormal position of the baffle arm 51 and a normal position of the baffle plate 52 are detected, the control unit 21 generates a baffle arm abnormal status command and a baffle plate normal status command, and controls the baffle arm abnormal status light 243 and the baffle plate normal status light 244 to light up. It should be noted that the type and number of status lights in the status indicator unit 24 are only one specific implementation, and the scope of protection of the present invention is not limited thereto. Those skilled in the art can add, subtract, or change the specific form and number of status indicators according to actual needs. It should be noted that during the normal operation of the device, the power indicator light 241 remains lit.
[0038] For example, in some exemplary embodiments, please refer to Figure 1 ,like Figure 1 As shown, the ranging sensor module 3 is mounted on the supporting module 1, and the area corresponding to the mounting position of the baffle storage module 4 and the ranging sensor module 3 is provided with an opening 41. Therefore, in one embodiment of the present invention, by providing the opening 41 on the baffle storage module 4 and mounting the ranging sensor module 3 on the supporting module 1 and aligning it with the direction of the opening 41, it ensures that the optical path of the ranging sensor module 3 is unobstructed when detecting the baffle 5. This avoids the obstruction or attenuation of the optical path by the shell material of the baffle storage module 4, thereby ensuring the measurement accuracy of the distance and further guaranteeing the reliability and precision of the position and distance detection.
[0039] It should be noted that the present invention does not limit the specific size of the opening 41. Those skilled in the art should understand that the design of the size of the opening 41 is mainly determined according to the size and optical characteristics of the selected ranging sensing module 3. For example, in order to obtain a more concentrated detection beam, a smaller size of the opening 41 can be used; if a wider measurement range is required, the size of the opening 41 can be appropriately increased.
[0040] Exemplary examples, in some exemplary embodiments, a transparent isolation plate is installed on the opening 41 to isolate the internal space of the baffle storage module 4 from the external environment. Thus, by installing a transparent isolation plate on the opening 41 to achieve sealing, the present invention can effectively prevent the external environment from contaminating the internal space of the baffle storage module 4 while allowing the light signal of the ranging sensing module 3 to pass through, thus providing physical protection. It should be noted that the present invention does not limit the specific type and parameters of the transparent isolation plate. Those skilled in the art should understand that the selection of the specific type and parameters of the transparent isolation plate mainly depends on various factors such as the optical characteristics, signal strength requirements, and environmental protection level of the selected ranging sensing module 3. In practical applications, the specific type and parameters of the transparent isolation plate can be adaptively adjusted according to specific implementation needs without departing from the core concept of the present invention. In one preferred embodiment, the transparent isolation plate is transparent glass and meets the following conditions: optical transmittance to the ranging sensing module 3 is greater than 90%, long-term operating temperature is greater than 500°C, and it can withstand high vacuum pressure difference. Preferably, the transparent glass is fused silica glass.
[0041] For example, in some exemplary embodiments, please refer to Figure 3 ,like Figure 3 As shown, the ranging sensor module 3 is mounted on the baffle storage module 4. Therefore, another embodiment of the present invention employs a design where the ranging sensor module 3 is mounted on the baffle storage module 4. This design ensures that the ranging sensor module 3 can measure the distance to the baffle 5 while also possessing the advantages of a compact and neat structure, thereby improving the overall integration of the device of the present invention.
[0042] Exemplary examples, in some exemplary embodiments, the ranging sensing module 3 includes a ToF (Time of Flight) ranging sensor. The ToF ranging sensor includes a transmitting unit, a receiving unit, and a signal unit communicatively connected to the transmitting unit and the receiving unit. The transmitting unit is configured to respond to a transmission control signal sent by the signal unit and transmit a light pulse to the baffle. The receiving unit is configured to receive a reflected light pulse from the baffle corresponding to the transmitted light pulse and transmit the light pulse signal to the signal unit. The signal unit is configured to receive a detection control signal sent by the display control module, calculate the current position of the baffle based on the light pulse signal, and transmit the calculation to the display control module. Therefore, this invention selects a ToF ranging sensor as the ranging sensing module 3. By detecting and calculating the position of the baffle 5 using the ToF ranging sensor and comparing it with a target position to determine the position state of the baffle 5, this detection method features a simple measurement principle, fast response, large measurement range, and strong anti-interference capability, meeting the requirements for accurate ranging and high reliability.
[0043] Please see Figure 4 , Figure 4 This is a schematic diagram illustrating the ranging principle of the ranging sensing module in a baffle position detection device based on the ranging principle provided in one embodiment of the present invention. Specifically, the ToF ranging sensor used in the present invention can perform the following ranging process: After receiving the detection control signal, the signal unit sends a transmission control signal to the transmitting unit; the transmitting unit transmits a light pulse to the baffle; the baffle reflects a reflected light pulse corresponding to the transmitted light pulse; the receiving unit receives the reflected light pulse signal and transmits the reflected light pulse signal to the signal unit; the signal unit calculates the current position of the baffle using the following formula based on the reflected light pulse signal and transmits it to the display control module:
[0044]
[0045] Where D is the current position of the baffle, V is the speed of light, and T is the time difference (i.e., the time it takes for light to travel) between the emitted light pulse and the corresponding reflected light pulse.
[0046] It should be noted that, due to space limitations, this article will not elaborate on the working principle of the ToF ranging sensor. For more detailed information on the structure and basic principles of the ToF ranging sensor, please refer to the relevant technical adaptations of ToF ranging sensors known to those skilled in the art; this invention will not repeat them here. Furthermore, this invention does not limit the specific type or parameters of the ToF ranging sensor. In one preferred embodiment, the ToF ranging sensor employs an 850 nm / 940 nm laser rangefinder.
[0047] For example, in some of the exemplary embodiments, please continue to refer to Figure 1 and Figure 3 The baffle 5 includes a baffle arm 51, a baffle plate 52, and a drive mechanism (not shown in the figure) for driving the baffle arm 51 to move the baffle plate 52 into and out of the process chamber; the drive mechanism is communicatively connected to the host 6 to transmit the position status signals of the baffle arm 51 and the baffle plate 52 to the host 6; the ranging sensing module 3 includes a first ranging sensing module 31 and a second ranging sensing module 32; the first ranging sensing module 31 is configured to detect and calculate the current position of the baffle arm 51 and output it to the display control module 2, and the second ranging sensing module 32 is configured to detect and calculate the current position of the baffle plate 52 and output it to the display control module 2. Therefore, by employing a dual ranging sensor module, this invention enables independent positional distance detection of the baffle arm 51 and the baffle plate 52, thereby obtaining precise positional data of the baffle arm 51 and the baffle plate 52. This allows for refined and regional detection of the mechanical state of the baffle 5, not only identifying "positional anomalies" but also preliminarily locating the specific structural parts where the anomalies occur. This provides maintenance personnel with clear clues for fault diagnosis, greatly shortening the troubleshooting and repair time.
[0048] Based on the same inventive concept, this invention also proposes a baffle position detection method based on the distance measurement principle. This method utilizes the baffle position detection device based on the distance measurement principle described in any of the preceding claims. Please refer to [link to previous document]. Figures 1-5 , Figure 5 This is a flowchart illustrating a baffle position detection method based on the ranging principle provided in one embodiment of the present invention. The detection method includes:
[0049] S100: Set the reference parameters of the baffle through the display control module 2;
[0050] S200: The display control module 2 receives the position status signal of the baffle 5 sent by the host 6 and sends a detection control signal to the ranging sensor module 3. After receiving the detection control signal, the ranging sensor module 3 detects and calculates the current position of the baffle 5 and outputs it to the display control module 2.
[0051] S300: The display control module 2 determines the position detection result of the baffle 5 based on the position status signal, the current position, and the reference parameters of the baffle, and at least visually displays the current position and the reference parameters of the baffle, generates a status command based on the position detection result for display, and transmits the position detection result to the host 6.
[0052] Exemplary, in some exemplary embodiments, the ranging sensing module 3 includes a ToF ranging sensor, which includes a transmitting unit, a receiving unit, and a signal unit communicatively connected to the transmitting unit and the receiving unit. After receiving the detection control signal, the ranging sensing module 3 detects and calculates the current position of the baffle 5 and outputs it to the display control module 2. This includes: the signal unit receiving the detection control signal and sending a transmission control signal to the transmitting unit; the transmitting unit responding to the transmission control signal and transmitting a light pulse to the baffle 5; the receiving unit receiving the reflected light pulse corresponding to the transmitted light pulse reflected by the baffle 5 and transmitting the light pulse signal to the signal unit; and the signal unit calculating the current position of the baffle 5 based on the light pulse signal.
[0053] Exemplary embodiments include, in some of these exemplary implementations, the baffle 5 comprises a baffle arm 51 and a baffle disk 52, and the ranging sensing module 3 comprises a first ranging sensing module 31 that senses the baffle arm 51 and a second ranging sensing module 32 that senses the baffle disk 52; the reference parameters of the baffle 5 include the reference parameters of the baffle arm 51 and the reference parameters of the baffle disk 52, the first ranging sensing module 31 detects the current position of the baffle arm 51, and the second ranging sensing module 32 detects the current position of the baffle disk 52; the display control module 2 determines the position detection result of the baffle arm based on the position status signal, the current position of the baffle arm 51, and the reference parameters of the baffle arm 51; and the display control module 2 determines the position detection result of the baffle disk 52 based on the position status signal, the current position of the baffle disk 52, and the reference parameters of the baffle disk 51.
[0054] Preferably, in some exemplary embodiments, the position status signal includes a first position status signal in which both the baffle arm 51 and the baffle disk 52 are located in the baffle storage module 4, and a second position status signal in which the baffle arm 51 is located in the baffle storage module 4 and the baffle disk 52 is located in the process cavity (not shown in the figure); the reference parameters of the baffle include the target position of the baffle and the allowable offset of the baffle; the display control module 2 determines the position detection result of the baffle 5 based on the position status signal, the current position, and the reference parameters of the baffle, including: when the display control module 2 receives the first position status signal, determining whether the current position of the baffle arm 51 is within the allowable offset range of the baffle arm 51; if yes, determining whether the current position of the baffle disk 52 is within the allowable offset range of the baffle disk 52; if yes, the position detection result is normal; if no, the position detection result is abnormal; if the current position of the baffle arm 51 is not within the allowable offset range of the baffle arm 51, the position detection result is abnormal. When the display control module 2 receives the second position status signal, it determines whether the second ranging sensor module 32 has not sensed the baffle plate 52. If so, it determines whether the current position of the baffle arm 51 is within the allowable offset range of the baffle arm 51. If so, the position detection result is normal; if not, the position detection result is abnormal. If the second ranging sensor module 52 senses the baffle plate, the position detection result is abnormal.
[0055] Compared with existing technologies, the baffle position detection device and method based on the ranging principle provided by this invention have the following beneficial effects: This invention measures the current position of the baffle through an integrated ranging sensing module, sets and stores the reference parameters of the baffle (specifically, such as target position and allowable offset) through a display control module, and achieves accurate judgment of the baffle position by comparing the current position with the reference parameters of the baffle; at the same time, it significantly improves the intuitiveness and interactivity of operation by visually displaying the position data and position status of the baffle; and by establishing a linkage communication mechanism with the host, it can send alarm or status signals to the host in real time when the baffle position is detected to exceed the allowable deviation or an abnormality occurs, so that the host can take timely proactive intervention measures, thereby effectively avoiding process abnormalities, equipment misoperation and unplanned downtime caused by the inaccurate position of the baffle, and greatly enhancing the stability of the process and the reliability of the production equipment.
[0056] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "example," or "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.
[0057] The above are merely preferred embodiments of the present invention and do not constitute any limitation on the present invention. Any equivalent substitutions or modifications made by those skilled in the art to the technical solutions and content disclosed in the present invention without departing from the scope of the present invention shall be deemed to have remained within the protection scope of the present invention.
Claims
1. A baffle position detection device based on the distance measurement principle, characterized in that, The detection device includes: a support module, a display control module integrated on the support module, a ranging sensing module, and a baffle storage module for storing baffles; the ranging sensing module is disposed on the side where the baffles enter and exit the baffle storage module; the display control module is configured to: set reference parameters of the baffles, receive position status signals of the baffles sent by the host, and send detection control signals to the ranging sensing module to control the ranging sensing module to detect and calculate the current position of the baffles, and determine the position detection result of the baffles based on the position status signals, the current position, and the reference parameters of the baffles, and at least visually display the current position and the reference parameters of the baffles, and is also used to generate status commands from the position detection results and display them, and transmit the position detection results to the host; the ranging sensing module is configured to detect and calculate the current position of the baffles after receiving the detection control signals and output the result to the display control module.
2. The baffle position detection device based on the ranging principle as described in claim 1, characterized in that, The display control module includes a control unit, a parameter input unit, an information display unit, and a status indication unit that are communicatively connected to the control unit. The parameter input unit is configured to input the reference parameters of the baffle and transmit them to the control unit. The reference parameters of the baffle include at least the target position of the baffle and the allowable offset of the baffle. The control unit is configured to receive the position status signal of the baffle sent by the host and control the ranging sensor module to detect and calculate the current position of the baffle, and determine the position detection result of the baffle based on the position status signal, the current position and the reference parameters of the baffle. It is also configured to transmit the position detection result to the host and control the information display unit and the status indication unit. The information display unit is configured to receive and display display data from the control unit, the display data including at least the current position, the target position of the baffle, and the allowable offset of the baffle; The status indication unit is configured to respond to status commands output by the control unit.
3. The baffle position detection device based on the ranging principle as described in claim 1, characterized in that, The ranging sensor module is mounted on the bearing module, and the area corresponding to the mounting position of the baffle storage module and the ranging sensor module is provided with an opening.
4. The baffle position detection device based on the ranging principle as described in claim 3, characterized in that, A transparent partition plate is installed on the opening to isolate the internal space of the baffle storage module from the external environment.
5. The baffle position detection device based on the ranging principle as described in claim 1, characterized in that, The ranging sensor module is installed on the baffle storage module.
6. The baffle position detection device based on the ranging principle as described in claim 1, characterized in that, The ranging sensing module includes a ToF ranging sensor, which includes a transmitting unit, a receiving unit, and a signal unit communicatively connected to the transmitting unit and the receiving unit. The transmitting unit is configured to respond to a transmission control signal sent by the signal unit and transmit a light pulse to the baffle. The receiving unit is configured to receive a reflected light pulse corresponding to the transmitted light pulse reflected by the baffle and transmit the light pulse signal to the signal unit. The signal unit is configured to receive the detection control signal sent by the display control module, calculate the current position of the baffle based on the light pulse signal, and transmit the current position to the display control module.
7. The baffle position detection device based on the ranging principle as described in claim 1, characterized in that, The baffle includes a baffle arm, a baffle plate, and a drive mechanism for driving the baffle arm to move the baffle plate into and out of the process chamber; the drive mechanism is communicatively connected to the host to transmit the position status signals of the baffle arm and the baffle plate to the host; the ranging sensing module includes a first ranging sensing module and a second ranging sensing module. The first ranging sensor module is configured to detect and calculate the current position of the baffle arm and output it to the display control module, and the second ranging sensor module is configured to detect and calculate the current position of the baffle plate and output it to the display control module.
8. A method for detecting the position of a baffle based on the principle of ranging, characterized in that, The baffle position detection method based on the ranging principle applies the baffle position detection device based on the ranging principle as described in any one of claims 1-7, and the detection method includes: The reference parameters of the baffle are set through the display control module; The display control module receives the position status signal of the baffle sent by the host and sends a detection control signal to the ranging sensor module. After receiving the detection control signal, the ranging sensor module detects and calculates the current position of the baffle and outputs it to the display control module. The display control module determines the position detection result of the baffle based on the position status signal, the current position, and the reference parameters of the baffle, and at least visually displays the current position and the reference parameters of the baffle, generates a status command based on the position detection result for display, and transmits the position detection result to the host.
9. The baffle position detection method based on the ranging principle as described in claim 8, characterized in that, The ranging sensing module includes a ToF ranging sensor, which comprises a transmitting unit, a receiving unit, and a signal unit communicatively connected to the transmitting unit and the receiving unit. After receiving the detection control signal, the ranging sensing module detects and calculates the current position of the baffle and outputs it to the display control module, including: After receiving the detection control signal, the signal unit sends a transmission control signal to the transmission unit; The transmitting unit responds to the transmitting control signal and emits a light pulse toward the baffle; The receiving unit receives the reflected light pulse corresponding to the emitted light pulse reflected by the baffle and transmits the light pulse signal to the signal unit; the signal unit calculates the current position of the baffle based on the light pulse signal.
10. The baffle position detection method based on the ranging principle as described in claim 8, characterized in that, The baffle includes a baffle arm and a baffle disk, and the ranging sensing module includes a first ranging sensing module that senses the baffle arm and a second ranging sensing module that senses the baffle disk. The reference parameters of the baffle include the reference parameters of the baffle arm and the reference parameters of the baffle disk. The first ranging sensor module detects the current position of the baffle arm, and the second ranging sensor module detects the current position of the baffle disk. The display control module determines the position detection result of the baffle arm based on the position status signal, the current position of the baffle arm, and the reference parameters of the baffle arm. The display control module determines the position detection result of the baffle plate based on the position status signal, the current position of the baffle plate, and the reference parameters of the baffle plate.