Optical cleaning multivariate parallel analysis experiment system and method

Abstract

The application relates to the technical field of ultraviolet light cleaning, and particularly provides a light cleaning multivariable parallel analysis experiment system and method. The system comprises a reaction container, a cleaning light source module, a plurality of bearing assemblies arranged side by side below the cleaning light source module and not exceeding the boundary of the projection of the cleaning light source module in the overhead direction, a plurality of spacing adjustment assemblies, each of which is connected with one bearing assembly, a plurality of shielding assemblies arranged side by side in the reaction container, each of which corresponds to one bearing assembly, each of which is used for controlling the effective irradiation time of the cleaning light source module on the corresponding sample to be treated through physical shielding, and a controller used for adjusting the action timing of the spacing adjustment assemblies and / or the shielding assemblies according to a preset experiment parameter set so as to apply differentiated radiation parameters to different samples to be treated in the same experiment period.

Description

Technical Field

[0001] This application relates to the field of ultraviolet light cleaning technology, and more specifically, to an experimental system and method for multivariate parallel analysis of light cleaning. Background Technology

[0002] Ultraviolet (UV) cleaning technology, as an important method in the field of surface treatment, has the core advantage of achieving dry cleaning without the involvement of chemical reagents. Among these, the 172nm excimer light source, due to its unique short-wavelength characteristics, exhibits significant advantages in the decomposition of organic pollutants and surface activation. The actual effectiveness of this technology is influenced by a combination of key parameters, including but not limited to the distance between the light source and the sample, the effective irradiation time, the gas composition of the reaction environment, and the physicochemical properties of the pollutants themselves. These parameters often exhibit complex interactions, posing significant challenges to process optimization and mechanism research.

[0003] Current experimental setups suffer from significant technical limitations: traditional single-sample serial experimental modes are not only inefficient but also struggle to ensure consistent conditions across multiple experiments. Because light source performance degrades over time, and microenvironmental parameters within the reaction vessel (such as temperature, humidity, and gas composition) fluctuate dynamically, the comparability of data from different batches is severely compromised. Furthermore, existing equipment exhibits significant shortcomings in controlling key parameters. For instance, irradiation distance is typically fixed or adjusted mechanically, making dynamic adjustment with micrometer-level precision difficult. Irradiation time control often relies on a single start-stop system, failing to provide differentiated and precise control for different samples.

[0004] A more prominent problem is the lack of capability in studying the synergistic effects of multiple variables in existing technologies. In complex application scenarios, such as the treatment of mixed contaminants or cleaning processes under special atmospheric conditions, the coupling effects between different parameters can significantly affect the final cleaning effect. However, traditional experimental setups cannot establish multiple control experiments within the same experimental period, making it difficult to obtain comparable experimental data, which severely restricts in-depth research on the cleaning mechanism and the process of technology optimization.

[0005] There is currently no effective technical solution to the above problems. Summary of the Invention

[0006] The purpose of this application is to provide an experimental system and method for optical cleaning multivariate parallel analysis, which can apply differentiated radiation parameters to different samples to be processed.

[0007] In a first aspect, this application provides an experimental system for optical cleaning and multivariate parallel analysis, comprising:

[0008] Reaction vessel;

[0009] The cleaning light source module is located inside the reaction vessel;

[0010] Multiple support components are arranged side by side below the cleaning light source module and do not exceed the boundary of the projection of the cleaning light source module in the top view direction. Each support component is used to support one sample to be processed.

[0011] Multiple spacing adjustment components, each of which is connected to a carrier component, and each spacing adjustment component is used to adjust the spacing between its corresponding carrier component and the cleaning light source module;

[0012] Multiple shielding components are arranged side by side inside the reaction vessel. Each shielding component corresponds to a carrier component. Each shielding component is used to control the effective irradiation time of the cleaning light source module on its corresponding sample to be treated by physical shielding.

[0013] The controller is used to adjust the timing of the actions of the spacing adjustment component and / or the shielding component according to a preset set of experimental parameters, so as to apply differentiated radiation parameters to different samples to be treated within the same experimental cycle.

[0014] This application provides an experimental system for multivariate parallel analysis of optical cleaning. By adjusting the timing of the actions of the spacing adjustment component and the occlusion component within the same experimental cycle through a controller, differentiated radiation parameters are applied to different samples to be processed. This solves the problems of low efficiency, inconsistent conditions, and lack of multivariate synergistic research capabilities of traditional experimental devices. It has the advantages of improving experimental efficiency, ensuring the consistency of experimental conditions, and supporting the study of multivariate synergistic effects.

[0015] Optionally, the preset experimental parameter set includes a preset total irradiation time and preset target spacing and preset target occlusion time for each sample to be treated. Each occlusion component can switch between two states: physical occlusion of the sample to be treated and no physical occlusion. The process of adjusting the timing of the spacing adjustment component and / or the occlusion component according to the preset experimental parameters to apply differentiated radiation parameters to different samples to be treated within the same experimental cycle includes:

[0016] A1. For each sample to be processed, analyze whether the preset target occlusion time corresponding to the sample is greater than 0. If so, control the occlusion component corresponding to the sample to switch to the physical occlusion state of the sample. If not, control the spacing adjustment component corresponding to the sample to adjust the spacing between the sample and the cleaning light source module to the preset target spacing.

[0017] A2. Control the operation of the cleaning light source module;

[0018] A3. When the cumulative running time of the cleaning light source module has not reached the total irradiation time and the occlusion time of the physically occluded sample reaches the corresponding preset target occlusion time, the cleaning light source module is controlled to stop running, and the occlusion component corresponding to the sample to be processed that has reached the corresponding preset target occlusion time is controlled to switch to a state where the sample to be processed is not physically occluded. The spacing adjustment component corresponding to the sample to be processed that has reached the corresponding preset target occlusion time is controlled to adjust the distance between the sample and the cleaning light source module to the corresponding preset target distance, and then the cleaning light source module is controlled to run.

[0019] A4. Analyze whether the cumulative running time of the cleaning light source module has reached the total irradiation time. If yes, control the cleaning light source module to stop running, clear the cumulative running time, and end the analysis experiment. If not, return to step A3.

[0020] Optionally, step A1 includes:

[0021] A11. Obtain the parameters of the contaminants to be cleaned and the light intensity distribution information of the cleaning light source module that were measured in advance before the start of the analysis experiment.

[0022] A12. For each sample to be processed, adjust the preset target spacing and preset target occlusion duration corresponding to the sample based on the first light intensity statistical value of the region corresponding to the sample in the parameters of the pollutants to be cleaned and the light intensity distribution information.

[0023] A13. For each sample to be processed, analyze whether the preset target occlusion time corresponding to the sample is greater than 0. If so, control the occlusion component corresponding to the sample to switch to the physical occlusion state of the sample. If not, control the spacing adjustment component corresponding to the sample to adjust the spacing between the sample and the cleaning light source module to the preset target spacing.

[0024] Optionally, step A1 may also include steps performed after step A11:

[0025] A14. Generate a second statistical value of light intensity based on the light intensity distribution information;

[0026] A15. Adjust the total irradiation time based on the deviation between the second light intensity statistical value and the pre-calibrated light intensity statistical value corresponding to the cleaning light source module.

[0027] Optionally, each occlusion component includes a linear drive component and occlusion blades. The occlusion blades can completely block the sample to be processed. The driving direction of the linear drive component is perpendicular to the driving direction of the spacing adjustment component. The process of controlling the occlusion component corresponding to the sample to switch to a state of physical occlusion of the sample includes:

[0028] The spacing adjustment component corresponding to the sample is controlled to adjust the spacing between the sample and the cleaning light source module to a preset spacing. Then, the linear drive component corresponding to the sample is controlled to drive the shielding blade to move toward the sample to be processed, so that the shielding blade corresponding to the sample physically shields the sample. The preset spacing is greater than the vertical spacing between the shielding blade and the cleaning light source module.

[0029] The process of controlling the shielding component corresponding to the sample to switch to a state where the sample is not physically shielded includes:

[0030] The linear drive component corresponding to the sample is controlled to drive the shading blade to move away from the sample to be processed, so that the shading blade corresponding to the sample does not physically block the sample.

[0031] Optionally, the optical cleaning multivariate parallel analysis experimental system also includes an atmosphere control component, which is connected to the reaction vessel. The preset experimental parameter set also includes a preset gas composition, and the controller is also used to adjust the gas composition in the reaction vessel to the preset gas composition using the atmosphere control component.

[0032] Optionally, the atmosphere control component includes a mixing chamber and multiple gas supply components, each corresponding to a specific atmosphere gas. All gas supply components are connected to the input of the mixing chamber, and the output of the mixing chamber is connected to the reaction vessel. The preset experimental parameter set also includes a preset total gas flow rate. The process of adjusting the gas composition in the reaction vessel to the preset gas composition using the atmosphere control component includes:

[0033] B1. Determine the supply flow rate of each atmosphere gas based on the preset total intake flow rate and preset gas composition;

[0034] B2. Control the corresponding gas supply components to supply gas to the mixing chamber according to the supply flow rate;

[0035] B3. During the analytical experiment, obtain the actual gas composition inside the reaction vessel;

[0036] B4. While maintaining the gas flow rate entering the reaction vessel at the preset total inlet flow rate, adjust the flow rate of the atmospheric gas supplied by the gas supply component according to the difference between the actual gas composition and the preset gas composition, so that the actual gas composition is the same as the preset gas composition.

[0037] Optionally, an inlet and an outlet are arranged diagonally on the reaction vessel, with the inlet connected to an atmosphere control assembly.

[0038] Optionally, the reaction vessel includes a cavity and a cavity cover, the cavity and the cavity cover are hinged, the cleaning light source module is fixed at a preset installation position on the cavity, and a sealing component is provided between the cavity and the cavity cover.

[0039] Secondly, this application also provides an experimental method for optical cleaning multivariate parallel analysis, applied to the optical cleaning multivariate parallel analysis experimental system provided in the first aspect above. The optical cleaning multivariate parallel analysis experimental method includes the following steps:

[0040] S1. Adjust the timing of the actions of the spacing adjustment component and / or the shielding component according to the preset experimental parameter set, so as to apply differentiated radiation parameters to different samples to be processed within the same experimental cycle.

[0041] As can be seen from the above, the optical cleaning multivariate parallel analysis experimental system and method provided in this application, by adjusting the action sequence of the spacing adjustment component and the occlusion component within the same experimental cycle through the controller, applies differentiated radiation parameters to different samples to be processed, which solves the problems of low efficiency, inconsistent conditions and lack of multivariate synergistic research capability of traditional experimental devices. It has the advantages of improving experimental efficiency, ensuring the consistency of experimental conditions and supporting multivariate synergistic effect research. Attached Figure Description

[0042] Figure 1 This is a schematic diagram of the structure of an experimental system for optical cleaning and multivariate parallel analysis provided in an embodiment of this application.

[0043] Figure 2 This is a schematic diagram of the structure of the supporting component and the shielding component provided in the embodiments of this application.

[0044] Figure 3 This is a schematic diagram of the connection relationship of an experimental system for optical cleaning multivariate parallel analysis provided in an embodiment of this application.

[0045] Reference numerals: 1. Reaction vessel; 11. Chamber; 12. Chamber cover; 2. Cleaning light source module; 3. Supporting component; 4. Sample to be processed; 5. Spacing adjustment component; 6. Shielding component; 61. Linear drive component; 62. Shielding blade; 7. Controller; 8. Atmosphere control component; 9. Inlet; 10. Outlet. Detailed Implementation

[0046] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0047] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0048] Firstly, such as Figures 1-3 As shown, this application provides an experimental system for optical cleaning and multivariate parallel analysis, which includes:

[0049] Reaction vessel 1;

[0050] Cleaning light source module 2 is installed inside reaction vessel 1;

[0051] Multiple support components 3 are arranged side by side below the cleaning light source module 2 and do not exceed the boundary of the projection of the cleaning light source module 2 in the top view direction. Each support component 3 is used to support a sample 4 to be processed.

[0052] Multiple spacing adjustment components 5, each spacing adjustment component 5 is connected to a carrier component 3, and each spacing adjustment component 5 is used to adjust the spacing between its corresponding carrier component 3 and the cleaning light source module 2;

[0053] Multiple shielding components 6 are arranged in parallel inside the reaction vessel 1. Each shielding component 6 corresponds to a carrier component 3. Each shielding component 6 is used to control the effective irradiation time of the cleaning light source module 2 on its corresponding sample 4 through physical shielding.

[0054] The controller 7 is used to adjust the timing of the actions of the spacing adjustment component 5 and / or the shielding component 6 according to a preset set of experimental parameters, so as to apply different radiation parameters to different samples 4 to be treated within the same experimental cycle.

[0055] For ease of understanding, some key terms in this embodiment are explained below. The reaction vessel 1 in this embodiment is preferably made of 304 stainless steel, and its inner wall can be electropolished or coated to enhance corrosion resistance and reduce surface adsorption. This vessel provides a stable and controlled internal environment for experiments studying the ultraviolet cleaning mechanism. The cleaning light source module 2 in this embodiment preferably consists of 172nm excimer lamp modules with an effective irradiation length of not less than 30cm and an irradiation width of not less than 10cm. These modules are fixed side-by-side along the length of the reaction vessel 1. This light source module can provide uniform and efficient ultraviolet light irradiation, ensuring that its light spot completely covers the area where the sample 4 to be treated is located. In this embodiment, the carrier component 3 is preferably three independent square trays arranged side by side along the long side of the device. The sample to be processed 4 is preferably a two-inch wafer. The square tray is preferably 7cm*7cm in size and 1cm in thickness. Each square tray is provided with a circular slot for placing the two-inch wafer. The center-to-center distance between adjacent square trays is preferably 90mm so that the distance between adjacent trays is greater than 0. Each carrier component 3 is used to carry one sample to be processed 4. Since all carrier components 3 are located within the top-view projection boundary of the cleaning light source module 2 (the boundary of the projection of the cleaning light source module 2 in the top-view direction), this embodiment can ensure that each sample to be processed 4 is within the effective irradiation range. In this embodiment, the spacing adjustment component 5 is preferably a precision lifting mechanism driven by an independent stepper motor, integrated below each bearing component 3. This mechanism is preferably connected to the control system outside the cavity 11 through a sealed feeder and is equipped with a position encoder to form a closed-loop control system, so that its lifting stroke can be precisely controlled and fed back in real time. Specifically, in this embodiment, the lower surface of the cleaning light source module 2 is taken as the height zero point (0mm), and the direction perpendicular to the sample stage is defined as the positive direction. The user can directly set a positive number as the target irradiation spacing (e.g., 2.0mm, 10.5mm, 30.0mm) for the three samples in the irradiation distance module in the operation interface. This value is the vertical distance from the light source to the sample surface. The controller 7 independently drives each sample holder to lift to the corresponding height according to the set value, thereby realizing independent, continuous, digital precision control of the ultraviolet light irradiation distance parameter. The shielding component 6 in this embodiment preferably includes a miniature electric actuator capable of outputting linear motion and a light-shielding blade 62. The light-shielding blade 62 is designed to be slightly larger than the size of a two-inch wafer (preferably with a diameter of 60 mm) to ensure that the light-shielding blade 62 can completely block the two-inch wafer. The light-shielding blade 62 is preferably an anodized aluminum sheet of a lightweight thin plate with a thickness of about 2 mm. The working height of the light-shielding blade 62 is 30 mm (the lower surface of the cleaning light source module 2 is defined as the height reference plane 0 mm, and downward is the positive direction).

[0056] This application proposes a multivariate parallel analysis experimental system for optical cleaning, which aims to solve the problems of low experimental efficiency, low control precision, lack of real-time in-situ control capability, and difficulty in studying multivariate synergistic effects in existing ultraviolet cleaning experimental devices. The optical cleaning multivariate parallel analysis experimental system of this embodiment includes a reaction vessel 1, inside which a cleaning light source module 2 is arranged. Multiple support components 3 are arranged side-by-side below the cleaning light source module 2, not exceeding the boundary of the projection of the cleaning light source module 2 in the top view direction. Each support component 3 is used to support one sample 4 to be processed. To achieve precise control of the distance between the sample and the light source, each support component 3 is connected to a distance adjustment component 5, which is used to adjust the distance between its corresponding support component 3 and the cleaning light source module 2. Furthermore, to control the effective irradiation time of each sample 4 to be processed, multiple shielding components 6 are also arranged side-by-side inside the reaction vessel 1. Each shielding component 6 corresponds to one support component 3, and the effective irradiation time of the corresponding sample 4 by the cleaning light source module 2 is controlled by physical shielding. The operation of the entire system is coordinated by the controller 7. The controller 7 adjusts the timing of the action of the spacing adjustment component 5 and / or the shielding component 6 according to the preset experimental parameter set, so that different samples 4 to be treated can be subjected to different irradiation distances and / or irradiation durations within the same experimental cycle, thereby achieving the application of differentiated radiation parameters to different samples 4 to be treated within the same experimental cycle.

[0057] Specifically, the reaction vessel 1 can adopt various structural forms. For example, it can be a simple sealed cavity 11, sealed by bolts or buckles, or it can be a cavity 11 with an openable top cover connected to the cavity 11 by a hinge, facilitating sample loading and unloading and light source maintenance. The implementation of the cleaning light source module 2 is also diverse. For example, it can use a single high-power ultraviolet lamp or an array of multiple low-power ultraviolet lamps. The wavelength of the light source can be selected according to specific cleaning requirements, such as 172nm or 254nm. The arrangement of multiple support components 3 can be adjusted according to experimental needs. For example, it can be a tray slidingly mounted on the bottom of the reaction vessel 1, and the shape and size of the support components 3 can be customized according to the type of sample 4 to be processed. The spacing adjustment component 5 can be implemented using, but is not limited to, stepper motors, servo motors, pneumatic or hydraulic drive mechanisms. Its key is to achieve precise and independent adjustment of the distance between the sample and the light source. For example, it can use a simple manual adjustment knob or a motor-driven lifting platform. The implementation of the shading component 6 can include mechanical shading, electronic shading, or light-controlled shading. For example, it can be a simple manual skateboard or a light-blocking sheet driven by a motor.

[0058] The following is a more specific example to illustrate the above technical solution in greater detail: Suppose user A needs to study the effects of irradiation distance and irradiation time on the cleaning effect of three different contaminants (contaminant X, contaminant Y, and contaminant Z) in ultraviolet light cleaning technology. Traditional experimental setups typically require multiple independent experiments, testing only one set of parameters each time, which is inefficient and makes it difficult to ensure the consistency of experimental conditions. Using the photo-cleaning multivariate parallel analysis experimental system of this application, user A can efficiently complete this study. First, user A places three samples 4 to be treated, coated with contaminant X, contaminant Y, and contaminant Z respectively, on three support components 3. The top cover of the reaction container 1 is closed to ensure the airtightness of the internal environment. Next, user A sets a preset set of experimental parameters through the controller 7. For example, for contaminant X, the distance between it and the cleaning light source module 2 is set to 5 mm, and the effective irradiation time is set to 10 minutes; for contaminant Y, the distance between it and the cleaning light source module 2 is set to 15 mm, and the effective irradiation time is set to 20 minutes; for contaminant Z, the distance between it and the cleaning light source module 2 is set to 25 mm, and the effective irradiation time is set to 30 minutes. After receiving these parameters, the controller 7 coordinates the timing of the actions of the spacing adjustment component 5 and the shielding component 6. Specifically, the controller 7 drives the spacing adjustment component 5 corresponding to contaminant X to raise its supporting component 3 to a position 5mm away from the cleaning light source module 2; drives the spacing adjustment component 5 corresponding to contaminant Y to raise its supporting component 3 to a position 15mm away from the cleaning light source module 2; and drives the spacing adjustment component 5 corresponding to contaminant Z to raise its supporting component 3 to a position 25mm away from the cleaning light source module 2. After the spacing adjustment is completed, the cleaning light source module 2 starts operating. Simultaneously, the controller 7 will control the corresponding shielding component 6 to perform physical shielding according to the set effective irradiation time. For example, after the cleaning light source module 2 has been running for 10 minutes, the shielding component 6 corresponding to contaminant X will drive the shielding blades to physically shield contaminant X, stopping it from receiving ultraviolet light irradiation. After the cleaning light source module 2 has been running for 20 minutes, the shielding component 6 corresponding to contaminant Y will drive the shielding blades to physically shield contaminant Y. After the cleaning light source module 2 has been running for 30 minutes, the shielding component 6 corresponding to contaminant Z will drive the shielding blades to physically shield contaminant Z and stop the operation of the cleaning light source module 2, thus ending the experiment. Through the above process, within the same experimental cycle, the three samples 4 to be treated simultaneously received differentiated radiation parameters (different irradiation distances and irradiation times). After the experiment, user A can remove the samples and analyze the cleaning effect under different parameter combinations.

[0059] This embodiment of the optical cleaning multivariate parallel analysis experimental system integrates a reaction vessel 1, a cleaning light source module 2, multiple support components 3, multiple spacing adjustment components 5, multiple shielding components 6, and a controller 7, enabling the application of differentiated radiation parameters to multiple samples in a single experiment. Compared to traditional single-sample, serial experimental devices, the system of this application significantly improves experimental efficiency and avoids the time consumption and sample waste required for multiple independent experiments. For example, in the above example, the traditional method requires three independent experiments to obtain three sets of data, while the system of this application only requires one experiment. In addition, the independent control of the spacing adjustment components 5 and the shielding components 6 enables high precision and flexibility in adjusting the irradiation distance and irradiation time. The spacing adjustment components 5 can achieve distance control with micrometer-level precision, while the shielding components 6 can precisely control the effective irradiation time of each sample, which is difficult to achieve in traditional devices. For example, in traditional devices, the distance between the light source and the sample is mostly fixed or manually coarsely adjusted, making continuous, digital, and high-precision real-time adjustment impossible, while the spacing adjustment components 5 provide precise spacing adjustment control in this application. More importantly, this system enables parallel processing and real-time in-situ control of multiple samples within the same experimental environment. In the example above, pollutants X, Y, and Z received different radiation treatments under the same environmental conditions (such as temperature, humidity, and background pollution). This eliminates the errors introduced by small drifts in environmental parameters in traditional independent experiments, improving the accuracy and persuasiveness of control experiments. This parallel control capability is of great significance for a deeper understanding of photo-cleaning mechanisms, optimization of process parameters, and research on multivariate synergistic effects. For example, in complex scenarios such as the coexistence of multiple pollutants or the interaction between atmosphere and light intensity, the system in this application provides an effective means of parallel research, while existing commercial UV cleaning equipment is mainly geared towards production and lacks precise, programmable multivariate control and real-time control capabilities.

[0060] In summary, the optical cleaning multivariate parallel analysis experimental system of this application, through its unique technical concept and component integration, effectively solves the problems of low experimental efficiency, low control precision, lack of real-time in-situ control capability, and difficulty in studying multivariate synergistic effects in the prior art, providing an efficient, accurate, and flexible dedicated research platform for the study of ultraviolet cleaning mechanism.

[0061] In some preferred embodiments, the preset experimental parameter set includes a preset total irradiation time and preset target spacing and preset target occlusion time for each sample 4 to be treated. Each occlusion component 6 can switch between two states: physical occlusion of the sample 4 to be treated and no physical occlusion. The process of adjusting the timing of the spacing adjustment component 5 and / or the occlusion component 6 according to the preset experimental parameters to apply differentiated radiation parameters to different samples 4 to be treated within the same experimental cycle includes:

[0062] A1. For each sample 4 to be processed, analyze whether the preset target occlusion time corresponding to the sample is greater than 0. If so, control the occlusion component 6 corresponding to the sample to switch to the physical occlusion state of the sample. If not, control the spacing adjustment component 5 corresponding to the sample to adjust the spacing between the sample and the cleaning light source module 2 to the preset target spacing.

[0063] A2. Control the operation of cleaning light source module 2;

[0064] A3. When the cumulative running time of the cleaning light source module 2 has not reached the total irradiation time and the occlusion time of the physically occluded sample 4 reaches the corresponding preset target occlusion time, the cleaning light source module 2 is controlled to stop running, and the occlusion component 6 corresponding to the sample 4 whose occlusion time has reached the corresponding preset target occlusion time is controlled to switch to a state where the sample 4 is not physically occluded. The spacing adjustment component 5 corresponding to the sample 4 whose occlusion time has reached the corresponding preset target occlusion time is controlled to adjust the spacing between the sample and the cleaning light source module 2 to the corresponding preset target spacing, and then the cleaning light source module 2 is controlled to run.

[0065] A4. Analyze whether the cumulative running time of the cleaning light source module 2 has reached the total irradiation time. If yes, control the cleaning light source module 2 to stop running, clear the cumulative running time, and end the analysis experiment. If no, return to step A3.

[0066] The preset experimental parameter set is a key data set guiding the entire parallel analysis experiment. It contains all the initial settings and target values ​​required for the experiment. This parameter set can be pre-input via a user interface (e.g., a touchscreen or computer software) and stored in the internal memory of the controller 7, or imported into the controller 7 via an external file (e.g., a CSV or XML file), which the controller 7 then parses to obtain the parameters. The preset total irradiation time refers to the total time that the cleaning light source module 2 needs to be irradiated during the entire experimental cycle (equivalent to the total running time of the cleaning light source module during the entire experimental cycle). The preset target spacing refers to the target distance between each sample 4 to be treated and the cleaning light source module 2 when irradiated. The preset target occlusion time refers to the total time that each sample 4 to be treated needs to be physically occluded by the occlusion component 6 during the entire experimental cycle. Each shielding component 6 can switch between physically shielding and not physically shielding the sample 4 to be treated. This provides the ability to independently control the irradiation time of a single sample 4 to be treated. For example, the shielding component 6 can be a light shield driven by a stepper motor or a servo motor, which moves the light shield over the sample 4 to be treated by rotating or linearly moving the motor.

[0067] In the above scheme, for each sample 4 to be processed, the system analyzes whether the preset target occlusion duration corresponding to the sample is greater than 0. If so, the occlusion component 6 corresponding to the sample is controlled to switch to a physical occlusion state. If not, the spacing adjustment component 5 corresponding to the sample is controlled to adjust the spacing between the sample and the cleaning light source module 2 to the preset target spacing. This step aims to ensure that each sample 4 to be processed is in the correct initial state before the experiment begins, i.e., samples that need to be occluded are occluded, and samples that do not need to be occluded are adjusted to the target spacing. Specifically, the logic unit inside the controller 7 can read the preset target occlusion duration from the preset experimental parameter set and compare it with zero. Based on the comparison result, the controller 7 sends a control command to the corresponding occlusion component 6 or spacing adjustment component 5 through the digital output port. Subsequently, the controller 7 controls the cleaning light source module 2 to operate, thereby starting ultraviolet irradiation and beginning the experimental cycle. The controller 7 can control the power supply of the cleaning light source module 2 through a relay or solid-state relay to make it start emitting light. When the cumulative running time of the cleaning light source module 2 has not reached the total irradiation time, and the occlusion time of the physically blocked sample 4 reaches the corresponding preset target occlusion time, the controller 7 controls the cleaning light source module 2 to stop running. It also controls the occlusion component 6 corresponding to the sample 4 whose occlusion time has reached the corresponding preset target occlusion time to switch to a state where the sample 4 is not physically blocked. The controller further controls the spacing adjustment component 5 corresponding to the sample 4 whose occlusion time has reached the corresponding preset target occlusion time to adjust the distance between the sample and the cleaning light source module 2 to the corresponding preset target distance. Then, the controller controls the cleaning light source module 2 to run. This step achieves dynamic adjustment of the irradiation time for some samples; that is, when a sample reaches its preset occlusion time, it is switched from the occlusion state to the irradiation state, and its spacing is adjusted, while other samples continue to be processed as planned. The timer inside the controller 7 can monitor the cumulative running time of the cleaning light source module 2 and the occlusion time of each blocked sample in real time. When the conditions are met, controller 7 first sends a stop command to cleaning light source module 2, then sends switching and adjustment commands to the corresponding shielding component 6 and spacing adjustment component 5. After the actions are completed, it sends a start command to cleaning light source module 2. Controller 7 can also use an interrupt mechanism. When the shielding duration of a sample reaches a preset value, an interrupt service routine is triggered. This routine is responsible for executing a series of operations: stopping the light source, switching the shielding, adjusting the spacing, and restarting the light source. Finally, controller 7 analyzes whether the cumulative running time of cleaning light source module 2 has reached the total irradiation time. If so, it controls cleaning light source module 2 to stop running, clears the cumulative running time, and ends the analysis experiment. If not, it returns to step A3 above. This step is used to determine whether the entire experimental cycle has ended and to perform corresponding closing operations or loop execution. Controller 7 continuously compares the cumulative running time with the total irradiation time.When the accumulated runtime equals or exceeds the total irradiation time, controller 7 sends a stop command to cleaning light source module 2, resets the timer, and terminates the experimental process. Controller 7 can be set up with a main loop that checks the accumulated runtime after each execution of step A3. If the total irradiation time has not been reached, the loop continues (returning to step A3); if it has been reached, the loop exits, and a stop and termination operation is performed.

[0068] The following is a specific example. Assume a parallel ultraviolet cleaning experiment is to be performed on three samples 4, with a preset total irradiation time of 100 minutes. The preset target spacing for sample 1 is 5 mm, and the preset target occlusion time is 0 minutes; the preset target spacing for sample 2 is 10 mm, and the preset target occlusion time is 30 minutes; the preset target spacing for sample 3 is 15 mm, and the preset target occlusion time is 60 minutes. At the start of the experiment, controller 7 first executes step A1: For sample 1, with a preset target occlusion time of 0 minutes, controller 7 controls its spacing adjustment component 5 to adjust the distance between it and the cleaning light source module 2 to 5 mm; for sample 2, with a preset target occlusion time of 30 minutes, controller 7 controls its occlusion component 6 to switch to physical occlusion mode; for sample 3, with a preset target occlusion time of 60 minutes, controller 7 controls its occlusion component 6 to switch to physical occlusion mode. After completing the initial settings, controller 7 executes step A2, controlling the cleaning light source module 2 to operate. During the operation of the cleaning light source module 2, the controller 7 monitors its cumulative running time and the shading time of samples 2 and 3 in real time. When the cumulative running time of the cleaning light source module 2 reaches 30 minutes (at which point the shading time of sample 2 reaches 30 minutes), the controller 7 executes step A3 above: first, it controls the cleaning light source module 2 to stop running; then, it controls the shading component 6 corresponding to sample 2 to switch to a state without physical shading, and controls the spacing adjustment component 5 corresponding to sample 2 to adjust its distance from the cleaning light source module 2 to 10 mm; subsequently, the controller 7 controls the cleaning light source module 2 to run again. The cleaning light source module 2 continues to run, and when its cumulative running time reaches 60 minutes (at which point the shading time of sample 3 reaches 60 minutes), the controller 7 executes step A3 above again: it controls the cleaning light source module 2 to stop running; it controls the shading component 6 corresponding to sample 3 to switch to a state without physical shading, and controls the spacing adjustment component 5 corresponding to sample 3 to adjust its distance from the cleaning light source module 2 to 15 mm; subsequently, the controller 7 controls the cleaning light source module 2 to run again. The cleaning light source module 2 continues to run until its cumulative running time reaches 100 minutes. At this point, controller 7 executes step A4 above, analyzes that the accumulated running time has reached the total irradiation time, and then controls the cleaning light source module 2 to stop running, clear the accumulated running time, and end the current analysis experiment. Through the above process, the three samples obtained differentiated irradiation times and distances within the same experimental cycle, achieving efficient parallel experiments.

[0069] In some preferred embodiments, step A1 includes:

[0070] A11. Obtain the parameters of the contaminants to be cleaned and the light intensity distribution information of the cleaning light source module 2, which were pre-measured before the start of the analysis experiment.

[0071] A12. For each sample 4 to be processed, adjust the preset target spacing and preset target occlusion duration corresponding to the sample based on the first light intensity statistical value of the area corresponding to the sample in the parameters of the pollutants to be cleaned and the light intensity distribution information.

[0072] A13. For each sample 4 to be processed, analyze whether the preset target occlusion time corresponding to the sample is greater than 0. If so, control the occlusion component 6 corresponding to the sample to switch to the physical occlusion state of the sample. If not, control the spacing adjustment component 5 corresponding to the sample to adjust the spacing between the sample and the cleaning light source module 2 to the preset target spacing.

[0073] The parameters of the contaminants to be cleaned obtained in step A11 refer to the physical or chemical properties of the contaminants on the surface of the sample 4 to be treated, such as the type, thickness, density, optical absorption coefficient, and chemical bond energy of the contaminants. These parameters can be obtained in various ways. For example, the contaminants can be analyzed and quantified by a spectrometer (such as Fourier transform infrared spectroscopy or X-ray photoelectron spectroscopy). The light intensity distribution information of the cleaning light source module 2 refers to the distribution of ultraviolet light intensity output by the cleaning light source module 2 at different locations. This information can be obtained by scanning and measuring with an optical power meter placed at different locations below the cleaning light source module 2, or by using a CCD camera combined with a filter to image the light-emitting area of ​​the light source and analyzing the light intensity distribution through image processing technology.

[0074] In step A12, the first light intensity statistical value refers to the light intensity characteristic value corresponding to the region where the specific sample 4 to be processed is located in the light intensity distribution information of the cleaning light source module 2. This statistical value can be the average value, peak value, or specific percentile value of the light intensity in that region. Adjusting the preset target spacing and preset target occlusion duration refers to correcting the originally set experimental parameters based on the actually measured pollutant parameters and local light intensity statistical values. The specific adjustment process can be as follows: First, based on the pollutant parameters to be cleaned and the first light intensity statistical value, extract the corresponding spacing adjustment amount and occlusion duration adjustment amount from the pre-constructed mapping relationship table of pollutant parameters and light intensity statistical value combinations and their corresponding spacing adjustment amount and occlusion duration adjustment amount. Then, adjust the preset target spacing using the spacing adjustment amount and adjust the preset target occlusion duration using the occlusion duration adjustment amount.

[0075] In the aforementioned multivariate parallel analysis experimental system for optical cleaning, to overcome the problem that preset experimental parameters may not match the actual situation, leading to inaccurate experimental results, this application introduces a dynamic parameter adjustment mechanism in step A1. Specifically, before the analysis experiment begins, the system first acquires the actual parameters of the contaminants to be cleaned for each sample 4 and the actual light intensity distribution information of the cleaning light source module 2 in each sample area. This information is the basis for conducting accurate experiments because the cleaning effect is closely related to the characteristics of the contaminants and the actual light intensity. Subsequently, the system uses these real-time acquired parameters and information to finely adjust the preset target spacing and preset target occlusion time originally set for each sample 4. This adjustment is not a simple linear correction, but rather a comprehensive consideration based on contaminant parameters (such as type and thickness) and local light intensity statistics (such as average light intensity), optimized through preset cleaning models or empirical data to ensure that each sample receives precisely controlled radiation energy that matches its contaminant characteristics. For example, for areas with thicker contaminants or weaker light intensity, the spacing may be adjusted to be smaller or the effective irradiation time to be longer. After parameter adjustments are completed, the system will determine whether the adjusted preset target shading time is greater than zero for each sample 4 to be processed. If physical shading is required to control the effective irradiation time, the controller 7 will instruct the corresponding shading component 6 to immediately switch to physical shading mode, thereby protecting the sample at the beginning of the experiment and ensuring that it is not irradiated or is only partially irradiated during the initial operation of the cleaning light source module 2. Conversely, if physical shading is not required, the controller 7 will instruct the corresponding spacing adjustment component 5 to precisely adjust the distance between the sample 4 to be processed and the cleaning light source module 2 to the adjusted preset target distance.

[0076] Through the aforementioned mechanism, the proposed solution ensures that each sample 4 is in a precisely calibrated initial state before the cleaning light source module 2 begins operation, whether by controlling the effective irradiation time through physical shading or by controlling the light intensity through spacing adjustment. This dynamic and refined preprocessing step allows for more accurate and reliable operation of the cleaning light source module 2, segmented irradiation and shading switching, and determination of the total irradiation duration. This not only significantly improves the accuracy and reliability of the optical cleaning multivariate parallel analysis experiment but also makes it possible to apply differentiated radiation parameters to different samples 4 within the same experimental cycle, thereby effectively solving the experimental errors and inefficiencies caused by inaccurate parameters in traditional methods.

[0077] In some preferred embodiments, step A1 further includes steps performed after step A11:

[0078] A14. Generate a second statistical value of light intensity based on the light intensity distribution information;

[0079] A15. Adjust the total irradiation time based on the deviation between the second light intensity statistical value and the pre-calibrated light intensity statistical value corresponding to the cleaning light source module 2.

[0080] The purpose of generating a second light intensity statistical value based on the light intensity distribution information is to extract a quantitative index that represents the overall light intensity state of the current light source from the light intensity distribution information of the cleaning light source module 2. The methods for generating the second light intensity statistical value may include, but are not limited to: calculating the average light intensity value within the light intensity distribution area, calculating the total luminous flux within the light intensity distribution area, or selecting the peak or average light intensity of a specific key area. Based on this, the total irradiation time is adjusted according to the deviation between the second light intensity statistical value and the pre-calibrated light intensity statistical value corresponding to the cleaning light source module 2. The core of this adjustment is to compensate for the difference between the actual measured light intensity state and the ideal or standard state by comparing the difference. The pre-calibrated light intensity statistical value is a benchmark light intensity quantitative index measured by the cleaning light source module 2 under ideal working conditions or at the time of manufacture. The deviation can be the absolute difference or relative percentage difference between the actual statistical value and the calibration value. The methods for adjusting the total irradiation time may include, but are not limited to: when the actual light intensity statistical value is lower than the calibration value, the total irradiation time is extended proportionally; when the actual light intensity statistical value is higher than the calibration value, the total irradiation time is shortened proportionally. For example, if the actual light intensity is 90% of the calibrated value, the total irradiation time can be extended to 10 / 9 times the original value; if the actual light intensity is 110% of the calibrated value, the total irradiation time can be shortened to 10 / 11 times the original value.

[0081] The proposed solution generates a second statistical value of light intensity representing the overall state of the current light source based on light intensity distribution information before the analysis experiment begins. This second statistical value is compared with the pre-calibrated statistical value of light intensity of the cleaning light source module 2 under ideal conditions, thereby quantifying the deviation between the actual light intensity and the ideal light intensity of the current light source. Based on this deviation, the system can dynamically adjust the preset total irradiation time. This adjustment mechanism ensures that even if the actual output light intensity of the cleaning light source module 2 fluctuates or attenuates, by extending or shortening the total irradiation time, the total light energy received by the sample throughout the entire experimental cycle remains consistent with the preset target, thus effectively compensating for the potential impact of actual deviations in the light intensity distribution of the light source on the experimental results. Compared to adjusting the preset target spacing and preset target occlusion time only based on light intensity distribution information, this approach more comprehensively considers the overall performance of the light source, making the control of total radiant energy more precise when applying differentiated radiation parameters to different samples 4 within the same experimental cycle, significantly improving the accuracy and reliability of the experiment.

[0082] In some preferred embodiments, each shielding component 6 includes a linear drive component 61 and a shielding blade. The shielding blade can completely shield the sample 4 to be processed. The driving direction of the linear drive component 61 is perpendicular to the driving direction of the spacing adjustment component 5. The process of controlling the shielding component 6 corresponding to the sample to switch to a state of physically shielding the sample includes:

[0083] The spacing adjustment component 5 corresponding to the sample adjusts the distance between the sample and the cleaning light source module 2 to a preset distance. Then, the linear drive component 61 corresponding to the sample drives the shielding blade to move toward the sample to be processed 4 so that the shielding blade corresponding to the sample physically shields the sample. The preset distance is greater than the distance between the shielding blade and the cleaning light source module 2 in the vertical direction.

[0084] The process of controlling the shielding component 6 corresponding to the sample to switch to a state where the sample is not physically shielded includes:

[0085] The linear drive component 61 corresponding to the sample is controlled to drive the shielding blade to move away from the sample to be processed 4, so that the shielding blade corresponding to the sample does not physically shield the sample.

[0086] The linear drive assembly 61 is a mechanical device that converts rotational motion or electrical energy into linear reciprocating motion. Its function is to precisely control the horizontal movement of the shielding blades to shield or unshield the sample. For example, a stepper motor-driven screw-nut mechanism can be used, where the motor rotation drives the screw rotation, causing the nut (connected to the shielding blades) to move linearly along the screw axis. The shielding blades are flat or sheet-like structures used to physically block the light emitted from the cleaning light source module 2 from reaching the sample 4 to be treated. Their function is to precisely control the effective time that the sample 4 receives ultraviolet light irradiation. The shielding blades can be made of opaque metal materials, such as stainless steel, aluminum alloy, or titanium alloy, to ensure complete blocking of ultraviolet light. The shielding blades are designed to completely shield the sample 4 to ensure complete blocking of ultraviolet light irradiation when needed. The driving direction of the linear drive assembly 61 is set perpendicular to the driving direction of the spacing adjustment assembly 5. This perpendicular design aims to avoid physical interference between the shielding assembly 61 and the spacing adjustment assembly 5 or the cleaning light source module 2 during movement, ensuring that both operate independently and safely. For example, if the spacing adjustment component 5 moves up and down in the vertical direction (Z-axis), the driving direction of the linear drive component 61 can be designed to be horizontal (X-axis or Y-axis), so that the shielding blade moves horizontally along the length or width of the reaction vessel 1.

[0087] When physical shielding of the sample is required, the controller 7 first instructs the corresponding spacing adjustment component 5 to adjust the distance between the sample and the cleaning light source module 2 to a preset distance. This step is to provide sufficient space for the shielding blade before it moves, preventing it from colliding with the cleaning light source module 2 or the sample 4 to be processed, thus ensuring operational safety. This preset distance is set to be greater than the vertical distance between the shielding blade and the cleaning light source module 2. This condition ensures that there is sufficient clearance above the shielding blade when it moves horizontally, preventing it from colliding with the cleaning light source module 2, further ensuring the safe operation of the system. Once the sample is adjusted to the preset distance, the controller 7 instructs the corresponding linear drive component 61 to drive the shielding blade towards the sample 4 to be processed, so that it completely covers the sample, achieving physical shielding. This is the core step in achieving physical shielding of the sample. Through the precise control of the linear drive component 61, the shielding blade moves above the sample 4 to completely cover the sample, thereby interrupting the ultraviolet light irradiation. When it is necessary to remove the physical shielding, the controller 7 directly instructs the corresponding linear drive component 61 to move the shielding blades away from the sample 4 to be processed, thus removing them from above the sample and exposing it again to the ultraviolet light of the cleaning light source module 2. This is the core step in removing the physical shielding of the sample. Through the precise control of the linear drive component 61, the shielding blades are moved away from above the sample 4 to restore ultraviolet light irradiation of the sample. Since the shielding blades move horizontally and sufficient vertical space is ensured before the shielding operation, there is no need to readjust the sample spacing when removing the shielding, thereby simplifying the operation process and improving efficiency.

[0088] In some preferred embodiments, the optical cleaning multivariate parallel analysis experimental system further includes an atmosphere control component 8, which is connected to the reaction vessel 1. The preset experimental parameter set also includes a preset gas composition. The controller 7 is also used to adjust the gas composition in the reaction vessel 1 to the preset gas composition using the atmosphere control component 8.

[0089] The atmosphere control component 8 is a device for precisely regulating the gas environment inside the reaction vessel 1. As one implementation, the atmosphere control component 8 preferably consists of multiple gas cylinders, a gas flow controller 7, a mixer, a pressure sensor, a vacuum pump, and corresponding pipelines and valves. It is used to precisely control the type, proportion, and flow rate of the gas entering the reaction vessel 1 and maintain stable pressure within the vessel. The atmosphere control component 8 is connected to the reaction vessel 1 to ensure that it can effectively introduce the regulated gas into the reaction vessel 1 and maintain its airtightness. This connection can be achieved through sealed joints, flange connections, or welding, connecting the inlet and outlet pipelines of the atmosphere control component 8 to the corresponding interfaces on the reaction vessel 1. This ensures no gas leakage during transmission and enables effective replacement and control of the gas environment within the reaction vessel 1. The preset experimental parameter set also includes preset gas components, meaning that before the experiment begins, the user can set the desired gas type and proportion as experimental variables. For example, the user can input the target gas type (such as oxygen, nitrogen, argon, etc.) and its respective volume percentage or partial pressure value through the human-machine interface of the controller 7. The controller 7 is also used to adjust the gas composition within the reaction vessel 1 to a preset gas composition using the atmosphere control component 8. Its function is to achieve automated and precise control of the gas environment. For example, the controller 7 can precisely mix and supply oxygen and nitrogen by controlling the flow rate of the mass flow controller 7. The solution of this application, by introducing the atmosphere control component 8, enables precise control of the gas composition within the reaction vessel 1 in the optical cleaning multivariate parallel analysis experimental system. Before the experiment begins, the user inputs the required preset gas composition as part of a preset experimental parameter set into the controller 7. After receiving these preset parameters, the controller 7 instructs the gas supply unit (e.g., the mass flow controller 7) in the atmosphere control component 8 to precisely supply various atmosphere gases to the mixing chamber according to the preset ratio and flow rate. After these gases are fully mixed in the mixing chamber, they are transported to the interior of the reaction vessel 1 through pipelines. The controller 7 continuously monitors and maintains the gas composition within the reaction vessel 1 throughout the experiment, ensuring the stability and repeatability of the experimental environment.

[0090] In this way, the system of this application, based on the existing method of applying differentiated radiation parameters to different samples 4 to be treated through the spacing adjustment component 5 and the shielding component 6, further enhances the ability to precisely control the reaction atmosphere. This allows the experimental system to simultaneously study the independent effects and synergistic interactions of multiple key variables such as ultraviolet irradiation distance, irradiation time, and reaction atmosphere on the cleaning effect. For example, within the same experimental cycle, the system can test the effects of different irradiation distances or irradiation times on the sample cleaning effect under different gas compositions in parallel, thereby revealing the intrinsic mechanism of ultraviolet cleaning more comprehensively and deeply. This integrated multivariate control capability greatly expands the research depth and breadth of the experimental system, enabling researchers to efficiently conduct multi-factor interaction analysis and obtain more convincing experimental data on a unified experimental platform.

[0091] In some preferred embodiments, the atmosphere control component 8 includes a mixing chamber and multiple gas supply components, each corresponding to a specific atmosphere gas. All gas supply components are connected to the input of the mixing chamber, and the output of the mixing chamber is connected to the reaction vessel 1. The preset experimental parameter set also includes a preset total gas flow rate. The process of adjusting the gas composition in the reaction vessel 1 to the preset gas composition using the atmosphere control component 8 includes:

[0092] B1. Determine the supply flow rate of each atmosphere gas based on the preset total intake flow rate and preset gas composition;

[0093] B2. Control the corresponding gas supply components to supply gas to the mixing chamber according to the supply flow rate;

[0094] B3. During the analytical experiment, the actual gas composition inside reaction vessel 1 was obtained;

[0095] B4. While maintaining the gas flow rate entering the reaction vessel 1 at the preset total inlet flow rate, adjust the flow rate of the atmospheric gas supplied by the gas supply component according to the difference between the actual gas composition and the preset gas composition, so that the actual gas composition is the same as the preset gas composition.

[0096] The mixing chamber 11 is a cavity 11 used to fully mix multiple atmospheric gases in a preset ratio. Its design ensures that different gases achieve a uniform component distribution before entering the reaction vessel 1, avoiding gas stratification or localized uneven concentration. The mixing chamber 11 can be a cavity 11 with an internal turbulence structure or a static mixer. Multiple gas supply components are devices for independently controlling the flow rates of different types of atmospheric gases. Each gas supply component can consist of a gas source (such as a high-pressure gas cylinder or gas generator), a flow controller 7 (such as a mass flow controller 7 or a volume flow controller 7), and corresponding shut-off valves and pressure regulators. This correspondence ensures that each target atmospheric gas (such as oxygen, nitrogen, argon, etc.) has an independent supply and control channel, thereby enabling precise proportioning and independent adjustment of different gas components. All gas supply components are connected to the input end of the mixing chamber. This connection method allows various atmospheric gases from different gas supply components to converge in the mixing chamber for premixing, providing a uniform gas mixture for subsequent entry into the reaction vessel 1. The connection can be achieved by converging multiple pipelines into a common inlet or by an integrated manifold structure. The output of the mixing chamber is connected to reaction vessel 1. The homogeneous mixed gas processed by the mixing chamber is delivered to reaction vessel 1 through its output, ensuring that the atmosphere within reaction vessel 1 can quickly and stably reach the preset composition. The preset experimental parameter set also includes a preset total inlet flow rate. This parameter is an important component of the experimental parameter set. It defines the total amount of gas entering reaction vessel 1 per unit time, providing a benchmark for calculating the supply flow rate of various atmospheric gases, and helping to maintain pressure stability and gas renewal rate within reaction vessel 1.

[0097] In the gas composition adjustment process, firstly, step B1 determines the supply flow rate of each atmosphere gas based on the preset total inlet flow rate and preset gas composition. This step is the initial calculation stage for gas composition adjustment, aiming to accurately calculate the required output flow rate value of each gas supply component based on the total gas flow rate set in the experiment and the target proportion of each component gas. For example, if the preset total inlet flow rate is 100 sccm and the preset gas composition is 80% nitrogen and 20% oxygen, then the calculated nitrogen supply flow rate is 80 sccm and the oxygen supply flow rate is 20 sccm. Secondly, step B2 controls the corresponding gas supply components to supply gas to the mixing chamber according to the supply flow rate. This step is the gas supply execution stage. The controller 7 sends instructions to each gas supply component according to the supply flow rate value determined in step B1, so that it delivers gas to the mixing chamber according to the calculated flow rate. Secondly, step B3 involves obtaining the actual gas composition within reaction vessel 1 during the analysis experiment. This step is crucial for real-time monitoring of the gas environment within reaction vessel 1. By continuously collecting and analyzing gas samples from reaction vessel 1 during the experiment, the current actual gas composition information is obtained. This can be achieved using an online gas analyzer (such as a mass spectrometer, gas chromatograph, or specific gas sensor). Finally, step B4, while maintaining the gas flow rate entering reaction vessel 1 at a preset total inlet flow rate, adjusts the flow rate of the atmospheric gas supplied by the gas supply components based on the difference between the actual and preset gas compositions to ensure that the actual gas composition matches the preset gas composition. This step is the core of achieving closed-loop control of gas composition. It compares the actual gas composition obtained in step B3 with the preset target composition, calculates the deviation, and dynamically adjusts the flow output of each gas supply component to correct the deviation, ensuring that the gas composition within reaction vessel 1 always precisely matches the preset value. This adjustment process is performed while maintaining a constant total inlet flow rate to avoid affecting the pressure and overall gas flow rate within reaction vessel 1.

[0098] The scheme of this application achieves precise regulation of the gas composition within the reaction vessel 1 through an atmosphere control component 8. Specifically, the atmosphere control component 8 includes a mixing chamber and multiple gas supply components. Each gas supply component is specifically designed for a particular atmosphere gas, enabling independent and precise control of the supply of each gas. The outputs of all these gas supply components converge and connect to the input of the mixing chamber, ensuring that different types of gases are fully and uniformly mixed in the mixing chamber before entering the reaction vessel 1. The output of the mixing chamber is directly connected to the reaction vessel 1, delivering the premixed gas into the reaction vessel 1. Furthermore, the preset experimental parameter set includes not only the target gas composition but also a preset total inlet flow rate, providing a global flow rate benchmark for the entire gas regulation process. In actual operation, the controller 7 first precisely calculates the required supply flow rate for each atmosphere gas based on the preset total inlet flow rate and preset gas composition. Subsequently, the controller 7 instructs the corresponding gas supply component to supply gas to the mixing chamber according to these calculated flow rates. During the analysis experiment, the system continuously acquires the actual gas composition within the reaction vessel 1, making real-time monitoring of the gas environment possible. To ensure the precise stability of the gas composition, the system compares the real-time acquired gas composition with the preset gas composition while maintaining a constant total gas flow rate into reaction vessel 1. If a difference is detected, controller 7 immediately adjusts the flow rate of the corresponding gas supply component to dynamically compensate for this deviation, ensuring that the actual gas composition within reaction vessel 1 remains consistent with the preset value. Through the above structure and method, the scheme of this application achieves dynamic, closed-loop regulation and precise control of the gas composition within reaction vessel 1. This refined gas environment control capability, combined with the independent control of other variables such as irradiation distance and irradiation time in the photo-cleaning multivariate parallel analysis experimental system, allows for the application of differentiated radiation parameters to different samples 4 within the same experimental cycle, while ensuring a highly stable and controllable reaction atmosphere environment for each sample.

[0099] In some preferred embodiments, the reaction vessel 1 has an inlet 9 and an outlet 10 arranged diagonally, and the inlet 9 is connected to the atmosphere control assembly 8.

[0100] The diagonal arrangement refers to the relative spatial position of the inlet 9 and outlet 10 on the reaction vessel 1. This arrangement aims to promote uniform mixing and distribution of gas throughout the vessel by creating a specific airflow path. For example, if the inlet 9 is located at the lower right corner of the reaction vessel 1, then the outlet 10 is located at the upper left corner. This embodiment guides the gas to form an oblique convection circulation that runs through the main body of the vessel by arranging the inlet 9 and outlet 10 diagonally. This allows the airflow to pass through most of the area above the support assembly 3, effectively improving the atmospheric uniformity of the area containing the sample 4. Furthermore, this design avoids the formation of local dead zones or concentration gradients within the vessel, ensuring the uniformity and stability of the atmospheric components within the reaction vessel 1. In the optical cleaning multivariate parallel analysis experimental system, since multiple support assemblies 3 are used to support different samples 4, atmospheric uniformity is crucial to ensuring that all samples are tested under the same atmospheric conditions. Through this optimized design, the preset gas components regulated by the atmosphere control component 8 can act uniformly on each sample 4 to be treated, thereby ensuring the comparability and accuracy of experimental results between different samples and greatly improving the reliability of parallel experiments.

[0101] In some preferred embodiments, the reaction vessel 1 includes a cavity 11 and a cavity cover 12, the cavity 11 and the cavity cover 12 are hinged, the cleaning light source module 2 is fixed at a preset installation position on the cavity 11, and a sealing assembly is provided between the cavity 11 and the cavity cover 12.

[0102] The reaction vessel 1 consists of two parts: a cavity 11 and a cavity cover 12, which together enclose a sealed experimental space. The cavity 11 can be a box with an open top, while the cavity cover 12 covers and closes the opening. Alternatively, the cavity 11 can be an open tank, with the cavity cover 12 covering it; or, the cavity 11 can be a box with an opening, with the cavity cover 12 closing the opening. The cavity 11 and the cavity cover 12 are connected by a hinge structure, allowing the cavity cover 12 to open and close relative to the cavity 11 in a pivoting manner. The cleaning light source module 2 is fixed in a preset installation position inside the cavity 11 to ensure the stability and repeatability of its position during the experiment. For example, the cleaning light source module 2 can be directly fixed to the inner wall or top structure of the cavity 11 using mechanical fasteners such as bolts or clips. A sealing assembly is provided between the mating surfaces of the cavity 11 and the cavity cover 12 to form an airtight connection when the cavity cover 12 is closed, preventing gas leakage. For example, elastic seals such as O-rings and rectangular sealing rings can be used, which are compressed to form a seal when the cavity cover 12 is closed.

[0103] As can be seen from the above, the optical cleaning multivariate parallel analysis experimental system provided in this application applies differentiated radiation parameters to different samples 4 to be processed by adjusting the timing of the actions of the spacing adjustment component 5 and the occlusion component 6 within the same experimental cycle through the controller 7. This solves the problems of low efficiency, inconsistent conditions, and lack of multivariate synergistic research capability of traditional experimental devices, and has the advantages of improving experimental efficiency, ensuring the consistency of experimental conditions, and supporting multivariate synergistic effect research.

[0104] Secondly, this application also provides an experimental method for optical cleaning multivariate parallel analysis, applied to the optical cleaning multivariate parallel analysis experimental system provided in the first aspect above. The optical cleaning multivariate parallel analysis experimental method includes the following steps:

[0105] S1. Adjust the timing of the actions of the spacing adjustment component 5 and / or the shielding component 6 according to the preset experimental parameter set, so as to apply different radiation parameters to different samples 4 to be treated within the same experimental cycle.

[0106] The optical cleaning multivariate parallel analysis experimental method provided in this application is applied to the optical cleaning multivariate parallel analysis experimental system provided in the first aspect above. The principle of the optical cleaning multivariate parallel analysis experimental method provided in this embodiment is the same as the principle of the optical cleaning multivariate parallel analysis experimental system provided in the first aspect above, and will not be repeated here.

[0107] As can be seen from the above, the optical cleaning multivariate parallel analysis experimental system and method provided in this application, by adjusting the action timing of the spacing adjustment component 5 and the occlusion component 6 within the same experimental cycle through the controller 7, applies differentiated radiation parameters to different samples 4 to be processed, which solves the problems of low efficiency, inconsistent conditions and lack of multivariate synergistic research capability of traditional experimental devices. It has the advantages of improving experimental efficiency, ensuring the consistency of experimental conditions and supporting multivariate synergistic effect research.

[0108] In the embodiments provided in this application, it should be understood that relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0109] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A method for optical cleaning and multivariate parallel analysis experiments, characterized in that, The optical cleaning multivariate parallel analysis experimental method is applied in an optical cleaning multivariate parallel analysis experimental system. The system includes a reaction container, a cleaning light source module, multiple support components, multiple spacing adjustment components, multiple shielding components, and a controller. The cleaning light source module is disposed within the reaction container. Multiple support components are arranged side-by-side below the cleaning light source module and do not exceed the boundary of the module's projection in the top-view direction. Each support component carries one sample to be processed. Each spacing adjustment component is connected to one support component and is used to adjust the spacing between its corresponding support component and the cleaning light source module. Multiple shielding components are arranged side-by-side within the reaction container, each corresponding to one support component. Each shielding component is used to control the effective irradiation time of the corresponding sample to be processed by the cleaning light source module through physical shielding. The controller is used to adjust the timing of the actions of the spacing adjustment components and / or the shielding components according to a preset experimental parameter set, so as to apply differentiated radiation parameters to different samples to be processed within the same experimental cycle. The preset experimental parameter set includes a preset total irradiation time and preset target spacing and preset target occlusion time for each of the samples to be processed. Each occlusion component can switch between two states: physical occlusion of the sample to be processed and no physical occlusion. The optical cleaning multivariate parallel analysis experimental method includes the following steps: A1. For each sample to be processed, analyze whether the preset target occlusion time corresponding to the sample is greater than 0. If so, control the occlusion component corresponding to the sample to switch to the physical occlusion state of the sample. If not, control the spacing adjustment component corresponding to the sample to adjust the spacing between the sample and the cleaning light source module to the preset target spacing. A2. Control the operation of the cleaning light source module; A3. When the cumulative running time of the cleaning light source module has not reached the total irradiation time and the occlusion time of the physically occluded sample reaches the corresponding preset target occlusion time, the cleaning light source module is controlled to stop running, and the occlusion component corresponding to the sample to be processed that has reached the corresponding preset target occlusion time is controlled to switch to a state where the sample to be processed is not physically occluded. The spacing adjustment component corresponding to the sample to be processed that has reached the corresponding preset target occlusion time is controlled to adjust the spacing between the sample and the cleaning light source module to the corresponding preset target spacing, and then the cleaning light source module is controlled to run. A4. Analyze whether the cumulative running time of the cleaning light source module has reached the total irradiation time. If yes, control the cleaning light source module to stop running, clear the cumulative running time, and end the analysis experiment. If no, return to step A3.

2. The experimental method for optical cleaning multivariate parallel analysis according to claim 1, characterized in that, Step A1 includes: A11. Obtain the parameters of the contaminants to be cleaned and the light intensity distribution information of the cleaning light source module, which were pre-measured before the start of the analysis experiment. A12. For each of the samples to be processed, the preset target spacing and preset target occlusion duration corresponding to the sample are adjusted according to the parameters of the contaminants to be cleaned and the first statistical value of the light intensity in the region corresponding to the sample in the light intensity distribution information. A13. For each sample to be processed, analyze whether the preset target occlusion duration corresponding to the sample is greater than 0. If so, control the occlusion component corresponding to the sample to switch to the physical occlusion state of the sample. If not, control the spacing adjustment component corresponding to the sample to adjust the spacing between the sample and the cleaning light source module to the preset target spacing.

3. The experimental method for optical cleaning multivariate parallel analysis according to claim 2, characterized in that, Step A1 also includes steps performed after step A13: A14. Generate a second light intensity statistical value based on the light intensity distribution information; A15. Adjust the total irradiation time based on the deviation between the second light intensity statistical value and the pre-calibrated light intensity statistical value corresponding to the cleaning light source module.

4. The experimental method for optical cleaning multivariate parallel analysis according to claim 1, characterized in that, Each of the occlusion components includes a linear drive component and an occlusion blade. The occlusion blade is capable of completely occluding the sample to be processed. The driving direction of the linear drive component is perpendicular to the driving direction of the spacing adjustment component. The process of controlling the occlusion component corresponding to the sample to switch to a state of physical occlusion of the sample includes: The spacing adjustment component corresponding to the sample is controlled to adjust the spacing between the sample and the cleaning light source module to a preset spacing. Then, the linear drive component corresponding to the sample is controlled to drive the shielding blade to move toward the sample to be processed, so that the shielding blade corresponding to the sample physically shields the sample. The preset spacing is greater than the vertical spacing between the shielding blade and the cleaning light source module. The process of controlling the shielding component corresponding to the sample to switch to a state where the sample is not physically shielded includes: The linear drive component corresponding to the sample is controlled to drive the shading blade to move away from the sample to be processed, so that the shading blade corresponding to the sample does not physically block the sample.

5. The experimental method for optical cleaning multivariate parallel analysis according to claim 1, characterized in that, The optical cleaning multivariate parallel analysis experimental method further includes an atmosphere control component, which is connected to the reaction vessel. The preset experimental parameter set also includes a preset gas composition. The controller is also used to adjust the gas composition in the reaction vessel to the preset gas composition using the atmosphere control component.

6. The experimental method for optical cleaning multivariate parallel analysis according to claim 5, characterized in that, The atmosphere control component includes a mixing chamber and multiple gas supply components, each corresponding to a specific atmosphere gas. All gas supply components are connected to the input of the mixing chamber, and the output of the mixing chamber is connected to the reaction vessel. The preset experimental parameter set also includes a preset total gas flow rate. The process of adjusting the gas composition in the reaction vessel to the preset gas composition using the atmosphere control component includes: B1. Determine the supply flow rate corresponding to each of the atmospheric gases based on the preset total intake flow rate and the preset gas composition; B2. Control the corresponding gas supply component to supply gas to the mixing chamber according to the supply flow rate; B3. During the analytical experiment, the actual gas composition inside the reaction vessel was obtained; B4. While maintaining the gas flow rate entering the reaction vessel at the preset total inlet flow rate, adjust the flow rate of the atmospheric gas supplied by the gas supply assembly according to the difference between the actual gas composition and the preset gas composition, so that the actual gas composition is the same as the preset gas composition.

7. The experimental method for optical cleaning multivariate parallel analysis according to claim 5, characterized in that, The reaction vessel has an air inlet and an air outlet arranged diagonally, and the air inlet is connected to the atmosphere control component.

8. The experimental method for optical cleaning multivariate parallel analysis according to claim 1, characterized in that, The reaction vessel includes a cavity and a cavity cover. The cavity and the cavity cover are hinged together. The cleaning light source module is fixed at a preset installation position on the cavity. A sealing assembly is provided between the cavity and the cavity cover.

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