Conveyor inspection system, substrate rotator, and test system having the same

Abstract

Embodiments disclosed herein generally relate to a conveyor inspection system and a method of singulating a substrate. The conveyor inspection system includes a movable conveyor and a fast conveyor. The movable conveyor is configured to pass an undesirable substrate to the fast conveyor. The method includes determining that the substrate is undesirable to enter a modular inspection cell, passing the substrate to a fast conveyor in response to determining that the substrate is undesirable to enter the modular inspection cell, and transporting the substrate on the fast conveyor. The conveyor inspection system and the method remove a substrate from a test system on a first pass, which reduces the time wasted analyzing an undesirable substrate that will be discarded.

Description

[0001] This application is a divisional application of the invention patent application filed on September 1, 2020, with application number 202080066651.4 and invention title "Conveyor Inspection System, Substrate Rotator and Test System Having the Conveyor Inspection System and Substrate Rotator". Technical Field

[0002] The embodiments of this disclosure generally relate to an apparatus and a method, and more specifically, to a conveyor inspection system, a substrate rotator, and a substrate testing system having the conveyor inspection system and the substrate rotator. Background Technology

[0003] Substrates (such as semiconductor substrates, solar substrates, etc.) are routinely inspected at separate inspection stations during processing to ensure they meet predetermined quality control standards. Different inspection technologies provide comprehensive data on the product and process. However, comprehensive inspection can be time-consuming due to the number of inspection stations required and the transfer time involved in moving substrates between stations, thereby reducing production volume. Therefore, equipment manufacturers often face the decision of whether to perform all inspections with excessive inspection / transfer time or to select some of the aforementioned inspection processes.

[0004] A typical substrate testing system can linearly process approximately 3,600 substrates per hour. However, as inspection processes continue to reduce the time required to complete inspection steps, substrate handling equipment within the testing system is needed to keep up with faster inspection times and / or additional inspection routines.

[0005] One drawback in this field is that damaged substrates can be unintentionally introduced into substrate testing systems. In particular, most conventional systems cannot detect substrates with damaged sides. In these cases, time and effort are wasted analyzing damaged or otherwise undesirable wafers that would be immediately rejected. Furthermore, undesirable wafers may interfere with components of the testing system, necessitating a shutdown of the testing system to remove the damaged substrate. This increases the user's ownership cost of the testing system.

[0006] Therefore, there is a need in the art for an apparatus and method to improve substrate handling in substrate testing systems. Summary of the Invention

[0007] The embodiments described herein generally relate to a conveyor inspection system and a method for sorting substrates within the inspection system. The conveyor inspection system and the method remove substrates from the testing system before they enter the modular inspection unit of the testing system, which reduces the time wasted analyzing unwanted substrates that would be discarded regardless of the inspection results.

[0008] In one embodiment, a conveyor inspection system is provided. The conveyor inspection system includes: an inlet conveyor; a movable conveyor positioned to receive a substrate from the inlet conveyor; a high-speed conveyor disposed below the movable conveyor; an image capture device positioned to acquire an image of the substrate disposed on the inlet conveyor; and an illumination source. The illumination source is configured to emit illumination light onto the inlet conveyor within the field of view of the image capture device.

[0009] In another embodiment, a conveyor inspection system is provided. The conveyor inspection system includes: an inlet conveyor; a movable conveyor positioned to receive a substrate from the inlet conveyor; and a high-speed conveyor disposed below the movable conveyor. The movable conveyor is configured to operate at a first speed. The high-speed conveyor is configured to operate at a second speed. The second speed is greater than the first speed.

[0010] In yet another embodiment, a method for sorting substrates is provided. The method includes: transporting the substrates on an inlet conveyor at a first speed; determining that the substrates not intended to be transported on the inlet conveyor will enter a modular inspection unit; transferring the substrates to a high-speed conveyor in response to determining that the substrates are not intended to enter the modular inspection unit; and transporting the substrates on the high-speed conveyor at a second speed greater than the first speed. Attached Figure Description

[0011] To gain a more detailed understanding of the features described above, reference can be made to embodiments to obtain a more specific description of the disclosure briefly outlined above, some of which are shown in the accompanying drawings. However, it should be noted that the drawings merely exemplify exemplary embodiments of the disclosure and should therefore not be construed as limiting its scope, as the disclosure can be applied to other equivalent embodiments.

[0012] Figure 1 A top plan view of an inspection (e.g., test) system according to one embodiment is illustrated.

[0013] Figure 2 A top plan view of a high-speed rotary sorting machine according to one embodiment is shown.

[0014] Figure 3A A top plan view of a conveyor inspection system according to one embodiment is shown.

[0015] Figure 3B A side plan view of a conveyor inspection system in a first orientation is shown according to one embodiment.

[0016] Figure 3C A side plan view of a conveyor inspection system in a second orientation is shown according to one embodiment.

[0017] Figure 4 This is a flowchart of a method for sorting substrates according to one embodiment.

[0018] Figure 5A A side plan view of a substrate rotator in a first orientation is shown according to one embodiment.

[0019] Figure 5B A top plan view of a substrate rotator in a first orientation is shown according to one embodiment.

[0020] Figure 5C A side plan view of a substrate rotator in a second orientation is shown according to one embodiment.

[0021] Figure 5D A top plan view of a substrate rotator in a second configuration according to one embodiment is shown.

[0022] Figure 5E A side plan view of a substrate rotator in a third configuration according to one embodiment is shown.

[0023] Figure 5F A top plan view of a substrate rotator in a third configuration according to one embodiment is shown.

[0024] Figure 6 This is a flowchart of a method for performing measurement on a substrate according to one embodiment.

[0025] Figure 7A A schematic diagram illustrating a body rotating in a first direction according to one embodiment is shown.

[0026] Figure 7B A schematic diagram illustrating a body rotating in a second direction according to one embodiment is shown.

[0027] Figure 7C A schematic diagram illustrating a body rotating in a first direction according to one embodiment is shown.

[0028] Figure 7D A schematic diagram illustrating a body rotating in a second direction according to one embodiment is shown.

[0029] To facilitate understanding, the same reference numerals have been used as much as possible to indicate common elements across the figures. It is contemplated that elements and features of the embodiments can be advantageously combined in other embodiments without further explanation. Detailed Implementation

[0030] The embodiments disclosed herein generally relate to a conveyor inspection system and a method for sorting substrates. The conveyor inspection system includes a movable conveyor and a high-speed conveyor. The movable conveyor is configured to transfer unwanted substrates to the high-speed conveyor, thus removing unwanted substrates from the conveyor inspection system before they enter a modular inspection unit. The method includes: determining that unwanted substrates will enter the modular inspection unit; transferring the substrates to the high-speed conveyor in response to determining that unwanted substrates will enter the modular inspection unit; and transporting the substrates on the high-speed conveyor. The conveyor inspection system and method remove substrates from the testing system upon their first entry into the testing system, which reduces the time wasted analyzing unwanted substrates in the modular inspection unit that would be discarded regardless of the inspection results from the modular inspection unit. Furthermore, removing unwanted substrates reduces disruption to the testing system, thereby lowering the ownership cost of the testing system.

[0031] As used herein, the term “about” refers to a change of + / - 10% relative to the nominal value. It should be understood that such change may be included in any value provided herein.

[0032] Figure 1 A top plan view of an inspection (e.g., testing) system 100 according to one embodiment is illustrated. The inspection system 100 is configured to inspect and sort a plurality of substrates 110. As shown, the inspection system 100 includes a front end 102, a conveyor system 114, a modular inspection unit 104, a sorting unit 106, and a controller 190. The front end 102 may be a loading unit. The conveyor system 114 is configured to transport substrates 110 from the loading unit (e.g., the front end 102) to the modular inspection unit 104. The modular inspection unit 104 may be a metering unit. The sorting unit 106 may be a sorting module that uses grippers to transfer substrates into a bin based on information obtained from instructions on the substrates in the modular inspection unit 104. The front end 102, the modular inspection unit 104, and the sorting unit 106 may be arranged linearly relative to each other, for example, wherein the conveyor system 114 extends through the front end 102, the modular inspection unit 104, and the sorting unit 106 of the inspection system 100 in a linear or substantially linear orientation. Alternatively, the front end 102, modular inspection unit 104, and sorting unit 106 may be arranged in another orientation, such as an "L-shape".

[0033] The front end 102 is configured to transport the substrate 110 to the remainder of the inspection system 100 via the conveyor system 114. As shown, the conveyor system 114 includes a first conveyor device 115, an intermediate conveyor device 117, and a second conveyor device 119. The conveyor system 114, and therefore the first conveyor device 115, the intermediate conveyor device 117, and the second conveyor device 119, may include any means configured to carry the substrate through the inspection system 100. For example, the conveyor system 114 may include one or more of a belt, rollers, rolls, or other means / mechanisms suitable for transporting the substrate through the inspection system 100. The conveyor system 114 may further include a carrier or tray for holding the substrate as it moves along the conveyor system 114, wherein the carrier or tray is moved by a drive mechanism. Each of the first conveyor device 115, the intermediate conveyor device 117, and the second conveyor device 119 may be driven individually.

[0034] Intermediate conveyor device 117 is part of conveyor inspection system 170. Conveyor inspection system 170 is configured to sort unwanted substrates 111 before they enter the modular inspection unit 104 of inspection system 100 and remove unwanted substrates from conveyor system 114. Conveyor inspection system 170 is also configured to transfer substrates 110 suitable for further testing and / or inspection to a second conveyor device 119 for transport to modular inspection unit 104. Further details regarding conveyor inspection system 170 are given in the following description of FIG3.

[0035] The conveyor system 114 may be a motor-driven conveyor system and may include one or more conveyors, such as a conveyor belt or track driven by actuators via rollers and / or drive gears. The conveyor system 114 may be linearly arranged to convey substrates through the modular inspection unit 104. Therefore, the conveyor system 114 is disposed within the modular inspection unit 104 and facilitates the conveying of substrates 110 through the modular inspection unit 104. Additional modular inspection units may be located between the front end 102 and the modular inspection unit 104, and / or between the modular inspection unit 104 and the sorting unit 106, and / or after the sorting unit 106, to facilitate the expansion of the inspection system 100.

[0036] As shown in the figure, the front end 102 includes a transfer robot 108. The transfer robot 108 is configured to transfer substrates 110 from one or more boxes 112 located within the front end 102 to a first conveyor device 115. The substrates loaded on the first conveyor device 115 are transferred to an intermediate conveyor device 117 and a second conveyor device 119 for further transport to a modular inspection unit 104. The transfer robot 108 includes support elements 108E, such as suction elements, end actuators, and gripper fixtures for holding and transferring the substrates 110.

[0037] Front end 102 receives one or more boxes 112. Each box 112 contains substrates 110 arranged in a stacked configuration. The substrates 110 can be stacked horizontally or vertically. For example, each box 112 includes multiple slots, and each slot is configured to hold the substrate 110. Boxes 112 can be positioned such that substrates 110 are positioned on top of one another. The substrates 110 are transferred from boxes 112 to a conveyor system 114 via a transfer robot 108 for transfer through an inspection system 100. Front end 102 includes a controller 190. Controller 190 may include a graphical user interface adapted to present information related to operations occurring in front end 102, including processing metrics, batch numbers, etc. In one example, controller 190 includes a touchscreen interface.

[0038] The modular inspection unit 104 is configured to perform one or more measurements on a substrate 110 passing through it. As shown, the modular inspection unit 104 includes one or more metering stations 116, a substrate edge metering system 181, and a substrate rotator 180. Figure 1 In one embodiment, the modular inspection unit 104 includes five metrology stations 116A to 116E, two of which are part of the substrate edge metrology system 181. Figure 1 In the illustrated embodiment, the metering stations 116D and 116E, separated by the substrate rotator 180, are part of the substrate edge metering system 181. It is envisioned that, if space permits, the inspection system 100 could be modified by adding or removing metering stations to the modular inspection unit 104, rather than by adding a second modular inspection unit, thereby increasing production volume and / or the number of metering processes performed.

[0039] Metrology station 116 may include any of the following: a microcrack inspection unit, a thickness measurement unit, a resistivity measurement unit, a photoluminescence unit, a geometry inspection unit, a saw mark detection unit, a strain detection unit, a chip detection unit, and / or a crystallinity detection unit. The microcrack inspection unit may be configured to inspect the substrate for cracks and determine the crystallinity of the substrate. The geometry inspection unit may be configured to analyze the surface properties of the substrate. The saw mark detection unit may be configured to identify saw marks on the substrate, including grooves, steps, and double-step marks. In addition to those listed above, metrology station 116 may include other examples. As described in detail below, each of the metrology stations 116 is used to deliver one or more metrological values ​​to sorting unit 106.

[0040] Metering station 116B may be a thickness measuring unit suitable for measuring the thickness of a substrate. Metering station 116B may also, or alternatively, measure the resistivity of substrate 110. Metering station 116B receives substrate 110 after inspection in metering station 116A, conveyed along conveyor system 114, which may be of any type. Metering station 116B is positioned downstream of metering station 116A along a straight path of substrate 110 defined by conveyor system 114. Metering station 116B performs one or more inspection processes on substrate 110. The inspection processes occurring at metering station 116B may be performed while the substrate is moving. Conversely, the movement of substrate 110 may be stopped at metering station 1168 to facilitate improved inspection accuracy.

[0041] Metrology station 116C may be a photoluminescent unit configured to detect defects and / or perform impurity measurements. Additionally, another metrology station (not shown) may be a geometry inspection unit configured to analyze the geometry and surface properties of substrate 110.

[0042] Metering station 116C receives the substrate 110 after it has been inspected at metering station 116B, conveyed along conveyor system 114. Metering station 116D receives the substrate 110 after it has been inspected at metering station 116C, conveyed along conveyor system 114. Metering station 116E receives the substrate 110 after it has been inspected at metering station 116D, conveyed along conveyor system 114, and so on, if additional metering units are used in the linear path shown. Alternatively, in some embodiments, non-linear path inspection is utilized. Therefore, substrate 110 can be conveyed non-linearly between metering stations 116A and 116E, such as in a circular or arc-shaped manner. Substrate rotator 180 picks up the substrate leaving metering station 116D on conveyor system 114, rotates the substrate, and then returns the rotated substrate to conveyor system 114 for transport to metering station 116E.

[0043] A substrate edge metrology system 181 is configured to measure defects on the edge of substrate 110. As shown, the substrate edge metrology system includes metrology stations 116D and 116E and a substrate rotator 180. According to one embodiment, metrology stations 116D and 116E are chip-side inspection (CSI) tools. The CSI tools include image capture devices, such as cameras, charge-coupled devices (CCDs), etc., adapted to capture images of one side of each substrate 110 as the substrate passes through metrology stations 116D and 116E to inspect one side of the substrate for chips, cracks, or other defects. The CSI tools are configured to image one side of the substrate 110 parallel to the direction in which the substrate moves downward along the conveyor system 114. Figure 1In the illustrated example, each metering station 116D, 116E has a CSI tool positioned to obtain images of two opposite sides of a substrate, typically sides of the substrate having an orientation parallel to the direction in which the substrate travels along a portion of the conveyor system 114 disposed within the modular inspection unit 104. In one example, the CSI tool is positioned to obtain images of two opposite sides of the substrate while the substrate is held on the conveyor system 114 within the metering stations 116D, 116E.

[0044] A substrate rotator 180 is disposed between metering stations 116D and 116E. At the first metering station 116D, the substrate is inspected for chips, cracks, or other defects on each side (e.g., not the leading or trailing edge of the substrate on conveyor system 114). After the substrate 110 passes the first metering station 116D, the substrate rotator 180 rotates the substrate 110 about 90 degrees or about 270 degrees about its central axis, while simultaneously translating the substrate 180 degrees. By translating the substrate 180 degrees, the substrate can be picked up and placed on conveyor system 114 at a substantially identical position relative to other substrates on conveyor system 114 as the substrate travels at a high speed along conveyor system 114. In other words, the substrate rotator 180 has a substrate pick-up position above a first position on conveyor system 114 and a substrate drop position above a second position on conveyor system 114, wherein the substrate rotator 180 translates (e.g., rotates) 180 degrees between the first and second positions on conveyor system 114. Additionally, depending on the direction in which the substrate rotator 180 rotates 180 degrees, the substrate rotates approximately 90° or approximately 270° around its central axis, such that the same edges (leading or trailing edges) of the substrate are placed on the conveyor system 114 in the same orientation, regardless of the direction of rotational translation. In other words, when the substrate rotator 180 rotates 180 degrees between a first position and a second position, the substrate rotates 90 degrees. This exposes the unmeasured sides of the substrate 110 (e.g., the leading and trailing edges before rotation by the substrate rotator 180) to the metrology station 116E, where inspection is performed to detect chips, cracks, or other defects. Therefore, each side of the substrate 110 is inspected by CSI tools. The following... Figure 4 More details about the substrate rotator emerged during the discussion.

[0045] Conveyor system 114 transports inspected substrates 110 from modular inspection unit 104 to sorting unit 106. Sorting unit 106 is configured to sort substrates 110 into different categories based on the metering value of each substrate found from metering station 116 in modular inspection unit 104. As shown, sorting unit 106 includes rotary sorting system 120. Conveyor system 114 delivers inspected substrates 110 to a position in sorting unit 106 accessible to rotary sorting system 120. Additionally, conveyor system 114 can continue through sorting unit 106 to connector 150. Therefore, if sorting unit 106 does not sort substrate 110, inspected substrate 110 bypasses rotary sorting system 120 of sorting unit 106. Alternatively, if inspected substrate 110 is not picked up by rotary sorting system 120, the substrate continues along conveyor system 114 toward connector 150.

[0046] In some embodiments, substrates not picked up by the rotary sorting system 120 continue along the conveyor system 114, leading to an unsorted substrate bin. In some embodiments, the sorting unit 106 is also connected via connector 150 to additional units, such as additional inspection systems, additional sorting units, and / or additional metering units. Connector 150 may also allow the conveyor system 114 to be aligned with the conveyor systems of additional units, such as additional inspection systems, additional sorting units, and / or additional metering units.

[0047] Controller 190 is configured to control and automate inspection system 100. Controller 190 may be coupled to or communicate with one or more of the following: conveyor system 114, front end 102, module unit 104, sorting unit 106, transfer robot 108, conveyor inspection system 170, substrate rotator 180, and / or metering stations 116A to 116E. Inspection system 100 may provide controller 190 with information regarding substrate movement, substrate transfer, substrate sorting, and / or the metering performed.

[0048] The controller 190 includes a central processing unit (CPU) (not shown), memory (not shown), and support circuitry (or I / O) (not shown). The CPU is one of any form of computer processor used in an industrial environment to control various processes and hardware (e.g., pattern generators, motors, and other hardware) and monitor processes (e.g., processing time, substrate position or location). The memory (not shown) is connected to the CPU and is one or more readily available memories, such as random access memory (RAM), read-only memory (ROM), floppy disk, hard disk, or any other form of digital storage device (local or remote). Software instructions and data may be encoded and stored in the memory to instruct the CPU. Support circuitry (not shown) is also connected to the CPU to support the processor in a conventional manner. Support circuitry includes conventional caches, power supplies, clock circuits, input / output circuits, subsystems, etc. A program (or computer instructions) readable by the controller 190 determines the tasks that can be performed on the substrate. The program may be software readable by the controller 190 and may include code to monitor and control, for example, processing time and the substrate's position or location within the inspection system 100.

[0049] Figure 2 A top plan view of a rotary sorting system 120 according to one embodiment is illustrated. The rotary sorting system 120 is configured to place substrates 110 into various bins according to the metering value of each substrate. As shown, the rotary sorting system 120 includes a rotatable support 122. The rotatable support 122 is configured to rotate the substrates 110 about a rotation axis R. The rotatable support 122 can be a rotary disk, a circular support, or any other shape for efficiently sorting the substrates 110.

[0050] As shown, the rotatable support 122 includes a plurality of arms 124. Each arm 124 is configured to rotate a given substrate 110 about a sorting unit 106. Each arm 124 has a first end 126 and a second end 128. The first end 126 of each arm 124 is connected to the rotatable support 122 via a suitable connection (such as a welded connection, a pin connection, a fastening connection, etc.). The second end 128 of each arm 124 extends radially outward relative to the axis of rotation R. In one embodiment, the rotatable support 122 includes twelve arms 124. Contemplatedly, any number of arms 124 may be included, such as ten or more arms 124, such as fourteen or sixteen arms.

[0051] At least one gripper 130 is coupled to the second end 128 of each arm 124. Each gripper 130 may be disposed on the underside or bottom end of each of the arms 124 such that each gripper 130 can grasp the substrate 110 when the inspected substrate 110 arrives at the sorting unit 106. Each gripper 130 may be a suction gripper, a claw gripper, a magnetic gripper, a pick-up device, or other suitable gripper. In one embodiment, each gripper 130 is a Bernoulli pick-up device.

[0052] One or more sorting bins 140 are positioned radially outside the axis of rotation R. In one embodiment, ten sorting bins 140 are used. It is contemplated that any number of sorting bins 140, such as six, eight, or twelve, can be used. As the plurality of arms 124 rotate by the rotatable support 122, the sorting bins 140 can be positioned directly below the path taken by the gripper 130. According to one embodiment, the rotary sorting system 120 rotates in a stepwise manner about the axis of rotation R such that the rotary sorting system 120 stops gripping (e.g., picking up) the substrate 110 from the conveyor system 114 when each substrate 110 enters the sorting unit 106. The sorting bins 140 are positioned to receive the substrate 110 from the rotary sorting system 120. The substrate 110 is sorted into the sorting bins 140 in response to one or more substrate characteristics determined during one or more periods of the inspection process performed in metering stations 116A to 116E. The rotary sorting system 120 positions a substrate 110 on a sorting bin 140, which is assigned to receive the substrate, the substrate having at least one predetermined substrate characteristic. The substrate 110 is then released from a corresponding gripper 130 into the appropriate sorting bin 140. The sorting bin 140 stores the sorted substrate 110 when the gripper 130 releases the substrate.

[0053] Each sorting box 140 can be individually removed from the sorting unit 106. Each sorting box 140 can be removably connected to the sorting unit 106, such as through a separately removable drawer or container, a sliding container, or a pull-out drawer or container. Each sorting box 140 can enter from outside the sorting unit 106, such that each sorting box 140 is removed from the sorting unit 106 without entering the sorting unit 106. A full sorting box 140 can be removed from the sorting unit 106 by pulling the sorting box 140 out. Each sorting box 140 can be removed from the sorting unit 106 when the sorting unit 106 sorts the substrate 110. Therefore, sorting of the substrate 110 can continue even if a particular sorting box 140 is full or has been removed. Thus, each sorting box 140 can be emptied or replaced during sorting.

[0054] Additionally, the controller 190 can count the number of substrates 110 in each sorting bin 140 using a counter (not shown). Therefore, when a particular sorting bin 140 is full or not in the appropriate position, the sorting unit 106 skips the full or removed sorting bin 140 until it is emptied or replaced. Once an empty sorting bin 140 is replaced within the sorting unit 106, the counter is reset for that particular sorting bin 140. The counter can be automatically reset each time a sorting bin 140 is replaced or emptied. The operator can empty or replace a full sorting bin 140. Therefore, the sorting unit 106 can continue rotating the substrates 110 until an assigned sorting bin 140 becomes available. If no sorting bin 140 is available, the sorting unit 106 can alert the operator and continue rotating the substrates 110 until a suitable sorting bin 140 becomes available. Once the controller 190 determines that a particular sorting box 140 is nearing or has reached its full capacity, the controller 190 can alert the operator by issuing an alarm and / or displaying an alarm.

[0055] Although not shown, it is contemplated that an additional sorting bin 140 could be positioned within the sorting unit 106 to receive substrates 110 that are inadvertently missed during sorting, thereby preventing damage to such substrates. Although ten sorting bins 140 are illustrated, it is contemplated that more or fewer than ten sorting bins 140 could be included within the sorting unit 106, such as six, eight, eighteen, or twenty-four sorting bins 140. Additionally, a disposal bin 144 could be positioned within the sorting unit 106 to capture substrates 110 that have been rejected by one or more of the metering stations 116A to 116E of the modular inspection unit 104. Thus, the rotary sorting system 120 can convey unwanted substrates to the disposal bin 144.

[0056] The rotary sorting system 120 may also include a yield analysis server 146 accessible by one or more access panels. The yield analysis server 146 is coupled to one or more of the front end 102 and metering stations 116A to 116E, and is adapted to receive, collect, analyze, store and / or report data received from the front end 102 and one or more metering stations 116A to 116E regarding each substrate 110 passing therethrough.

[0057] A rotatable support 122 is coupled to a rotatable actuator (not shown) (such as a cylinder or stepper motor). The rotary actuator rotates the rotatable support 122, for example, in a rotational manner. During each rotational step of the rotatable support 122, a new substrate 110 is received from the modular inspection unit 104 via a conveyor system 114 onto the rotary sorting system 120 via each gripper 130. Additionally, as discussed further below, the rotatable support 122 can rotate each of the plurality of arms 124 onto a corresponding sorting bin 140 and / or disposal bin 144, such that the substrate 110 is released into the sorting bin 140 or the disposal bin 144. Through continuous movement or rotational steps, substrates 110 can be continuously removed from the conveyor system 114, thereby immediately freeing up space on the conveyor system 114 for use with the next substrate 110. Therefore, the rotational motion allows each gripper 130 to engage with each sorting bin 140 such that the substrate held by the gripper 130 will be released into one of the sorting bins 140 before the gripper 130 rotates back to a position to receive another substrate 110. The rotary sorting system 120 will continue to move until all substrates 110 have been sorted.

[0058] In some embodiments, the rotary sorting system 120 picks up substrates 110 delivered from the modular inspection unit 104 every 2 / 3 of a second via the conveyor system 114. In such embodiments, the rotary sorting system 120 sorts at least 5,400 substrates per hour, which is a significant improvement over conventional sorting systems.

[0059] Figure 3A The image shows a partial top plan view of an inspection system 100 according to one embodiment, illustrating a conveyor inspection system 170. Figure 3B This is a side plan view of an inspection system 100 according to one embodiment, illustrating a conveyor inspection system 170 in a first orientation. The conveyor inspection system 170 is configured to transport a substrate 110 to a destination, where the destination depends on the substrate quality. As shown, the conveyor inspection system 170 includes an intermediate conveyor device 117, a movable conveyor actuator 209, an exit conveyor 203, an image capture device 250, one or more illumination sources 260, a fast conveyor 210, and a waste bin 240. The movable conveyor actuator 209, and any other actuators described herein, can be a motor, hydraulic actuator, pneumatic actuator, or other motion control mechanism.

[0060] As shown in the figure, the intermediate conveyor device 117 includes an inlet conveyor 201, a movable conveyor 202, and a movable conveyor actuator 209. The intermediate conveyor device 117, and therefore the inlet conveyor 201, movable conveyor 202, and outlet conveyor 203, may include any means configured to carry substrates along the intermediate conveyor device 117. For example, the intermediate conveyor device 117 may include one or more of a belt, roller, roll, or other means / mechanisms suitable for transporting substrates through the intermediate conveyor device 117. The intermediate conveyor device 117 may further include a carrier or tray for carrying the substrates, wherein the carrier or tray is moved by a drive mechanism. Each of the inlet conveyor 201, movable conveyor 202, and movable conveyor actuator 209 can be driven individually.

[0061] Image capture device 250 may be a camera, charge-coupled device (CCD), or other device suitable for determining whether the substrate is to be transported further to modular inspection unit 104. Substrate 110 may be transferred from front end 102, across inlet conveyor 201, movable conveyor 202, outlet conveyor 203 and into modular inspection unit 204, and therefore, inlet conveyor 201, movable conveyor 202, and outlet conveyor 203 may be considered as components of intermediate conveyor equipment 117.

[0062] like Figure 3A As shown, the translation devices 270, 272, and 274 (e.g., conveyor belts or equivalents) of the inlet conveyor 201, conveyor system 114, and outlet conveyor 203 are generally, but not necessarily, aligned in a linear direction. The translation device 272 of the conveyor system 114 is generally closer together than the translation device 276 of the fast conveyor 210. The translation devices 276 of the fast conveyor 210 are generally narrower than the width of the substrate, such that as the conveyor system 114 moves between the translation devices 276 of the fast conveyor 210, the substrate is lifted away from the conveyor system 114 and placed on the fast conveyor 210, as further described below.

[0063] Figure 3B An exemplary path of substrate 110 through conveyor inspection system 170 in a first orientation is illustrated. The substrate is placed on inlet conveyor 201 from a cassette (or other source) by conveyor robot 108. During the transport of substrate 110 across inlet conveyor 201, the portion of inlet conveyor 201 through which the substrate travels is illuminated by one or more illumination sources 260 (illumination is shown as beam 261). The portion of inlet conveyor 201 illuminated by one or more illumination sources 260 is also within the field of view of image capturing device 250. While illuminating substrate 110, image capturing device 250 acquires an image of at least the edges of the substrate. Generally, inlet conveyor 201 acquires an image of substrate 110 as the substrate moves across inlet conveyor 201.

[0064] The controller 190 acquires an image or image data from the image capture device 250. The controller 190 analyzes the image to determine whether the substrate 110 is undesirable or suitable for further transfer to the modular inspection unit 104. Examples of undesirable substrates include substrates with visible damage (such as cracks, fragments, or broken corners and / or edges). In another example, an undesirable substrate would include two substrates stacked on top of each other, for example, a double substrate. Standard image analysis algorithms or other suitable algorithms can be used to analyze the image to determine whether the substrate 110 is undesirable or suitable for further inspection. In one example, the outline of the substrate 110 is measured, and the area of ​​the substrate is calculated based on that outline. If the area of ​​the substrate 110 is less than a certain area limit, the substrate is considered damaged and therefore undesirable. If the area of ​​the substrate 110 is greater than a certain area limit, the substrate is considered a double substrate and therefore undesirable.

[0065] Controller 190, in response to determining that the substrate is desirable, causes conveyor inspection system 170 to guide the substrate from movable conveyor 202 to exit conveyor 203, or in response to determining that the substrate is undesirable, guides the substrate to high-speed conveyor 210. (Return to Reference) Figure 3B For example, once substrate 110 is determined to be suitable, suitable substrate 110 is then transported across movable conveyor 202 and exit conveyor 203 to modular inspection unit 104.

[0066] The movable conveyor 202 is configured to transport substrate 110 from inlet conveyor 201 to outlet conveyor 203. The movable conveyor 202 is configured to transport substrate 110 at the same speed as the inlet conveyor 201 system and the outlet conveyor 203. Although the movable conveyor 202 is illustrated as being coplanar with the inlet conveyor 201 and the outlet conveyor 203, any suitable arrangement of the inlet conveyor, movable conveyor, and outlet conveyor is contemplated in the first orientation of the conveyor inspection system 170. For example, the inlet conveyor 201 and / or the outlet conveyor 203 may be arranged at an angle to the movable conveyor 202, provided that the movable conveyor 202 is configured to move the substrate from the inlet conveyor to the outlet conveyor in the first orientation of the conveyor inspection system 170.

[0067] Figure 3CA side plan view of a conveyor inspection system 170 in a second orientation, according to one embodiment, is illustrated. The path of an unwanted substrate 111 (e.g., a broken substrate identified using the image capture device 250) through the conveyor inspection system 170 in the second orientation is illustrated. In response to the unwanted substrate 111 being identified as unwanted, a movable conveyor actuator 209 rotates a movable conveyor 202 in a direction away from the exit conveyor 203. In other words, the movable conveyor actuator 209 rotates the movable conveyor 202 from a position coplanar with the exit conveyor 203 to a position below the exit conveyor 203 and forming an acute angle with it.

[0068] The high-speed conveyor 210 is configured to form an acute angle with and below the movable conveyor 202 (when in the first orientation) and an acute angle with the exit conveyor 203. The high-speed conveyor 210 may include any suitable means configured to carry substrates across the high-speed conveyor 210. For example, the high-speed conveyor 210 may include one or more of a belt, rollers, rolls, or other means / mechanisms suitable for transporting substrates through the high-speed conveyor 210. The high-speed conveyor 210 may also include a carrier or tray for carrying the substrates, wherein the carrier or tray is moved by a drive mechanism. The high-speed conveyor 210 may be driven independently.

[0069] The high-speed conveyor 210 includes multiple transition devices 211 (e.g., belts of the high-speed conveyor or equivalent). The high-speed conveyor 210 is also positioned below the exit conveyor 203. According to one embodiment, the transition devices 211 include multiple lower belts, and two of these lower belts are located on opposite sides of the movable conveyor 202. Figure 3A As shown, the transition device 211 is located outside the movable conveyor 202. However, the transition device 211 can be located anywhere, as long as it is positioned to remove the substrate when the conveyor inspection system 170 is oriented in the second orientation. According to one embodiment, the transition device 211 is located inside the movable conveyor 202, and the movable conveyor includes a hole (not shown) that allows the transition device 211 to pass through when the movable conveyor 202 is moved to the second orientation. The transition device 211 can be moved from above the movable conveyor 202 to a position such that it is positioned to move the substrate in the second orientation.

[0070] The movable conveyor 202 rotates, causing the unwanted substrate 111 disposed in the movable conveyor 202 to be moved by the translation device (176, e.g.) of the high-speed conveyor 210. Figure 3A(As shown) the contact, thereby conveying the unwanted substrate 111 from the movable conveyor 202 to the high-speed conveyor 210. The high-speed conveyor 210 then conveys the unwanted substrate 111 to a waste bin 240 located below the inlet conveyor. Thus, the unwanted substrate 111 is removed from the inspection system 100 before a suitable substrate can be moved to the modular inspection unit 104. Removing the unwanted substrate 111 from the inspection system 100 reduces interference with the modular inspection unit 104, thereby reducing the cost of ownership.

[0071] According to one embodiment, the movable conveyor 202 is configured to operate at a first speed, and the high-speed conveyor 210 is configured to operate at a second speed, the second speed being greater than the first speed. The relative first and second speeds are determined at least in part by the size of the substrate 110, the rate at which the substrates move across the conveyor inspection system 170, and the inter-substrate distance during operation of the conveyor inspection system 170. Generally, the relative first and second speeds are selected to allow substrates to be conveyed from the movable conveyor 202 to the high-speed conveyor 210 and back to the movable conveyor 202 to return to a first orientation to receive the next substrate 170 traveling across the conveyor inspection system, without interrupting the rate at which the substrates travel through the inspection system 100.

[0072] The movable conveyor 202 is generally movable between a first orientation (e.g., a first position) configured to convey substrates from the inlet conveyor 201 to the outlet conveyor 203 and a second orientation (e.g., a second position) configured to convey substrates from the inlet conveyor 201 to the high-speed conveyor 210. Figure 3B and Figure 3C As shown, the movable conveyor 202 is pivotable at a first end 230 located closer to the inlet conveyor 201. For example, the first end 230 is attached to an axis (not shown) that allows the movable conveyor 202 to pivot about an axis of the shaft, thereby allowing controllable selection of the angular orientation of the movable conveyor 202. However, in other embodiments, the movable conveyor 202 may pivot about an axis offset from the movable conveyor 202, such that the first end 230 moves with the rotation of the movable conveyor 202. In any case, the movable conveyor 202 rotates and / or moves away from the outlet conveyor 203 to allow the substrate to be conveyed from the movable conveyor 202 to the high-speed conveyor 210.

[0073] The controller 190 may include or access a non-transitory computer-readable medium storing instructions. The non-transitory computer-readable medium storing instructions may be executed by a processor (e.g., the CPU of the controller 190). The instructions may be executed by the processor to determine, based on an image, whether the substrate 110 is defective, and in response to a defective substrate, to cause the movable conveyor 202 to move from a first orientation (e.g., ...) when a defective substrate is detected on the movable conveyor 202. Figure 3B The orientation shown is moved (e.g., rotated) to a second orientation (e.g., Figure 3C (as shown in the orientation), which results in defective substrates being conveyed to the high-speed conveyor 210 and carried by the high-speed conveyor to the waste bin 240, and the movable conveyor 202 being returned to the first orientation before the next substrate arrives on the movable conveyor.

[0074] Although the movable conveyor 202 in the second position is illustrated as substantially coplanar with the fast conveyor 210, any arrangement of the movable conveyor and the fast conveyor is conceivable in the second position of the conveyor inspection system 170. For example, the fast conveyor 210 may be configured at an angle to the movable conveyor 202, provided that the movable conveyor 202 is configured to move the substrate from the inlet conveyor to the fast conveyor when the conveyor inspection system 170 is in the second position.

[0075] Figure 4 This is a flowchart of a method 400 for sorting substrates 110 according to one embodiment. Although the method operation is combined... Figure 3B , Figure 3C and Figure 4 As described herein, however, those skilled in the art will understand that method 400 may be performed using other devices. Method 400 may be stored or accessed by controller 190 as a computer-readable medium containing instructions that, when executed by the processor of controller 190, cause inspection system 100 to perform method 400.

[0076] Method 400 begins with operation 410, in which substrate 110 is conveyed by an inlet conveyor (such as inlet conveyor 201 of conveyor inspection system 170).

[0077] At operation 420, an image of substrate 110 is captured by image capturing device 250 (such as a camera). In one example, while operation 420 is being performed, the inlet conveyor continues to move substrate 110.

[0078] At operation 430, the image is analyzed to determine whether substrate 110 is undesirable or suitable for further inspection. A controller (such as controller 190) determines whether substrate 110 is undesirable or suitable based on predefined criteria, such as comparing the captured image with a reference image obtained from an image library or derived from an algorithm. Operation 430 includes determining the measured area of ​​substrate 110 from the image of the substrate and comparing the measured area with acceptable values ​​within a predefined range to determine whether substrate 110 is undesirable or suitable for further inspection.

[0079] At operation 440, in response to determining whether the substrate is suitable or undesirable, substrate 110 is transported to its destination. If at operation 430 it is determined that substrate 110 is suitable for further inspection, the substrate is transferred across movable conveyor 202, and at a first position, across exit conveyor 203 to modular inspection unit 104, as... Figure 3B As shown. If it is determined at operation 430 that the substrate is undesirable, the movable conveyor actuator 209 moves the movable conveyor 202, on which the undesirable substrate is disposed, to a second position in a direction away from the exit conveyor 203, where the substrate is transferred from the movable conveyor 202 to the fast conveyor 210. In one example, the movable conveyor 202 rotates between the fast conveyors 210 and the exit conveyor 203. The fast conveyor 210 is positioned at an angle to the movable conveyor 202 and below it. The movable conveyor 202 rotates such that the undesirable substrate 111 comes into contact with the fast conveyor 210, thereby lifting the substrate from the movable conveyor and placing it onto the fast conveyor 210. The fast conveyor 210 moves the substrate at a speed greater than the speed at which the substrate moves on the movable conveyor, and then transfers the undesirable substrate 111 to a waste bin 240 located below the inlet conveyor. Once the substrate moving on the high-speed conveyor 210 is removed from the movable conveyor 202, the movable conveyor 202 returns to the first orientation where it can receive the next substrate from the inlet conveyor 201.

[0080] As described above, a conveyor inspection system and a method for sorting substrates are provided. The conveyor inspection system includes a movable conveyor and a high-speed conveyor. The movable conveyor is configured to transfer unwanted substrates to the high-speed conveyor. The method includes: determining that unwanted substrates enter a modular inspection unit; transferring the substrates to the high-speed conveyor in response to determining that unwanted substrates enter the modular inspection unit; and transporting the substrates on the high-speed conveyor.

[0081] The conveyor inspection system and method removes the substrate from the test system the first time it enters, reducing the time wasted analyzing unwanted substrates that will be discarded. Furthermore, removing unwanted substrates minimizes disruption to the test system, thereby lowering the cost of ownership.

[0082] Figure 5A A side plan view of a substrate rotator 180 in a first orientation is shown according to one embodiment. Figure 5B A top plan view of a substrate rotator 180 in a first orientation is illustrated according to one embodiment. As shown, the substrate rotator 180 includes a rotating device 554 and a supporting device 550. The supporting device 550 supports the rotating device 554 when the rotating device rotates.

[0083] The substrate rotator 180 includes a body 501 having a first gripper 510 and a second gripper 512 coupled to the body in a manner that allows the grippers 510, 512 to rotate in response to rotation of the body 501. Synchronous relative movement of the grippers 510, 512 and the body 501 can be achieved using one or more motors, actuators, linkages, belts, gears, combinations thereof, or other suitable means. In the example described below, synchronous rotation of the grippers 510, 512 in response to simultaneous rotation of the body 501 can be achieved using a single actuator.

[0084] Support device 550 is configured to support rotating device 554. As shown, support device 550 includes machine base 587, support column 586, support rod 585, overhead support member 583, main actuator 502, main belt 582, shaft 557, vacuum supply pipe 581, vacuum supply 556, and rotary joint 555. Overhead support member 583 is coupled to support column 586 by support rod 585. Support column 586 is supported by machine base 587.

[0085] Shaft 557 is connected to main actuator 502 by main belt 593. Shaft 557 is held by one or more bearings 575, which allow the shaft to rotate on its central axis. Main actuator 502 rotates shaft 557 via main belt 593. Shaft 557 is disposed in a channel (not shown) in overhead support 583, and shaft 557 rotates in the channel while overhead support 583 does not rotate. Shaft 557 extends through overhead support 583 and into the body 501 below. Shaft 557 is surrounded by tube 584. Tube 584 is separated from shaft 557 by one or more bearings 575.

[0086] Vacuum supply 556 is coupled to the first gripper 510 and the second gripper 512 via vacuum supply tube 581. The vacuum provided by vacuum source 556 allows the first gripper 510 and the second gripper 512 to pick up the substrate, as described in further detail below. Vacuum supply tube 581 passes through shaft 557 and enters the body 501, and also enters the first gripper 510 and the second gripper 512. In embodiments where vacuum is not required for the first gripper 510 and the second gripper 512 to function, vacuum supply 556 and vacuum supply tube 581 can be eliminated.

[0087] The rotating device 554 is configured to rotate one or more substrates. Figure 5A In the example shown, the rotating device 554 includes a body 501, a first gear 511, a main gear 590, a first gripper 510, a second gear 513, a second gripper 512, a belt 534, a first auxiliary gear 531, and a second auxiliary gear 532. The main actuator 502 is configured to rotate the shaft 557, and thus the body 501, about an axis 592. The shaft 592 is generally perpendicular to the plane of the conveyor system 114 and the substrate moving thereon. The shaft 592 is positioned through the center of the body 501.

[0088] The main actuator 502 can rotate the main body 501 in both clockwise and counterclockwise directions. The main actuator 502 is configured to rotate the main body 501 approximately 180 degrees between a first position and a second position. The main actuator 502 is configured to rotate the main body 501 in alternating clockwise and counterclockwise sequences such that, in the first or second position, the grippers 510, 512 attached to the main body 501 are positioned above and linearly aligned with the conveyor system 114.

[0089] The body 501 is elongated and has a first end 551 and a second end 552. A first gripper 510 is coupled to the first end 551 such that the first gripper 510 is rotatable about a first gripper axis 594. Similarly, a second gripper 512 is coupled to the second end 552 such that the second gripper 512 is rotatable about a second gripper axis 596. Axes 594 and 596 are generally parallel to axis 592 such that when the body 501 is rotated by the body actuator 502, the grippers 510 and 512 and their axes 594 and 596 rotate laterally about axis 592. A first auxiliary gear 531 and a second auxiliary gear 532 are disposed on opposite sides of the body actuator 502 and shaft 592. A main gear 590 is rotatably coupled to the body 501, and an intermediate gear surrounds shaft 557. The main gear 590 engages with the first auxiliary gear 531 and the second auxiliary gear 532 via a belt 534. When the main body 501 is rotated by the main body actuator 502, the main gear 590 remains stationary relative to the main body 501, while the grippers 510, 512 and the secondary gears 531, 532 rotate freely laterally with the main body 501 about the shaft 557 on the axis 592. When the main body actuator 502 rotates the main body 501, the relative lateral rotation of the gears 531, 532 about the main gear 590 causes the belt 534 to be driven (e.g., forward) by the main gear 590.

[0090] A first gear 511 is disposed at a first end 551 of the main body 501. A first auxiliary gear 531 is connected to the first gear 511 via a belt 534. The first gear 511 is coupled to a first gripper 510 such that when the first gear 511 rotates about axis 594 in a first direction, the first gripper 510 also rotates about axis 594 in the first direction. A second gear 513 is disposed at a second end 552 of the main body 501. A second auxiliary gear 532 is connected to the second gear 513 via a belt 534. The second gear 513 is coupled to a second gripper 512 such that when the second gear rotates about axis 596 by a first rotation, the second gripper 512 also rotates about axis 596 in the first direction. Since the belt 534 is coupled to the two gears 531 and 532, the two grippers 510 and 512 rotate simultaneously at a predetermined ratio in response to the simultaneous lateral rotation of the grippers 510 and 512 from the main body 501 about axis 592.

[0091] In one example, the belt 534 is laid out such that when the body 501 rotates in one direction, the two grippers 510, 512 rotate in opposite directions. In another embodiment, the belt 534 is laid out such that when the body 501 rotates in one direction, for example by twisting the belt 534 between one of the gears 531, 532 and the main gear 590, the two grippers 510, 512 rotate in the same direction. Alternatively, the relative directions of simultaneous rotation of the grippers 510, 512 can be selected by using multiple belts, gears, or other mechanisms. In an embodiment where the grippers 510, 512 rotate simultaneously in opposite directions, the substrate rotator 180 is configured such that one gripper rotates 180 degrees more than the other, for example, 90 degrees more than 270 degrees in response to a 180-degree rotation of the body 501. In an embodiment where the clamps 510 and 512 rotate simultaneously in the same direction, the substrate rotator 180 is configured such that one clamp rotates by the same amount as the other clamp, for example, the two clamps 510 and 512 rotate 90 degrees in response to a 180-degree rotation of the body 501.

[0092] In one example, body 501 rotates in a first direction to rotate a substrate held in a first gripper 510 closer to the next station 116, while a second gripper 512 without a substrate moves into position to receive the next substrate advancing along the conveyor system 114. As the first gripper rotates in the first direction, the substrate rotates such that either its trailing or leading edge (as oriented in the previous station 116) is aligned. Subsequently, the second gripper 512 picks up the next substrate advancing along the conveyor system 114, and as body 501 rotates the second gripper 512 and the substrate closer to the next station 116 in a second direction, the substrate rotates into the same orientation as the previous substrate placed back onto the conveyor system 114 by the first gripper 510. When body 501 rotates in the opposite first and second directions, kinks in the electrical and fluid conduits within the substrate rotator 180 are substantially eliminated.

[0093] The first gripper 510 and the second gripper 512 are configured to grip the first substrate and the second substrate, respectively. Each gripper 510, 512 may be a suction gripper, an electrostatic chuck (ESC), a claw gripper, a magnetic gripper, a pickup, or other suitable gripper. In one embodiment, each gripper 510, 512 is a Bernoulli pickup.

[0094] exist Figure 5BIn the example shown, the gear ratio between the first gear 511 and the main gear 590 is 2:1, causing the first gripper 510 to rotate by half a first angle of rotation of the main actuator. For example, if the main actuator 502 rotates the main body 501 by approximately 180 degrees, the first gripper 510 rotates by approximately 90 degrees. The gear ratio between the main gear 590 and the second gear 513 is 1:1.5, causing the second gripper 512 to rotate by two-thirds of the first angle of rotation of the main body 501. For example, if the main actuator 502 rotates the main body 501 by approximately 180 degrees, the second gripper 512 rotates by approximately 270 degrees.

[0095] although Figures 5A to 5F The first gripper 510 and the second gripper 512 shown are coupled to the main actuator 502 via a belt 534 and gears 511, 513, 531, 532, and 590, but other coupling methods may also be used. For example, gears 511 and 513 are directly coupled to the main gear 590. In other examples, a linkage may couple the main actuator 502 to the first gripper 510 and the second gripper 512. In yet another example, a separate actuator (not shown) is coupled to and rotates independently of the main actuator 502 to the first gripper 510 and the second gripper 512.

[0096] Figure 6 This is a flowchart of a method 600 for performing measurement on a substrate according to one embodiment. Although the method operations are combined... Figures 5A to 5F and Figure 6 This description is provided, but those skilled in the art will understand that any system configured to perform the method operations in any order falls within the scope of the embodiments described herein. Method 600 may be stored or accessed by controller 190 as a computer-readable medium containing instructions that, when executed by the processor of controller 190, cause inspection system 100 to perform method 600.

[0097] Method 600 begins with operation 610, in which metrology is performed on a first set of sides of a substrate (such as the first set of sides 520FS of the first substrate 520). Metrology may be performed at metrology station 116D. Metrology station 116D includes a CSI, and as the substrate passes through metrology station 116D, the CSI images the first set of sides 520FS of the first substrate 520 to inspect for chips, cracks, or other defects on the first set of sides of the substrate. According to one embodiment, the first set of sides 520FS of the first substrate 520 is parallel to the direction in which the substrate moves downward along the conveyor system 114.

[0098] In operation 615, metrology is performed on the first set of sides 521S of the second substrate 521. Metrology can be performed at metrology station 116D. Metrology station 116D includes a CSI, and as the second substrate passes through metrology station 116D, the CSI images the first set of sides 521FS of the second substrate 521 to inspect for chips, cracks, or other defects on the first set of sides of the substrate. According to one embodiment, the first set of sides 521FS of the second substrate 521 is parallel to the direction in which the substrate moves downward along the conveyor system 114.

[0099] At operation 620, the first substrate 520 is rotated by a first angle such that the second set of sides 520SS of the first substrate is in the same orientation as the first set of sides 520FS before the first substrate was rotated. The substrate 520 can be picked up from an upstream position of the conveyor system 114. According to one embodiment, the first substrate 520 is square, and the first angle is approximately 90 degrees. According to one embodiment, the conveyor system 114 can be stopped, and the first substrate 520 can be rotated while stationary. The conveyor system 114 can move while the first substrate 520 is rotating, but this requires that the first substrate 520 be placed further below the conveyor system 114 when rotation is complete. If the first substrate 520 is not placed further below the conveyor system 114, the substrate 520 may be undesirably placed on another substrate.

[0100] In some implementations, operation 620 is performed by substrate rotator 180. Figure 5A and Figure 5B An example of a substrate rotator 180 in a first orientation is illustrated, wherein the substrate rotator grips a first substrate 520 with a first clamp 510. According to one embodiment, the first substrate 520 is rotated approximately 90 degrees about a centerline of the first substrate, while simultaneously rotating the first substrate laterally 180 degrees in a first direction. According to another embodiment, the first substrate 520 is rotated approximately 270 degrees about a centerline of the first substrate, while simultaneously rotating the first substrate laterally 180 degrees in a first direction. In either case, the first substrate 520 is rotated such that a second set of sides 520SS is positioned in the same facing direction as the first set of sides 520FS. In embodiments where the first clamp 510 and the second clamp 512 are Bernoulli pickers, the first substrate 520 is picked up by the first clamp 510, while the first clamp does not move in the z-direction (e.g., away from the surface of the conveyor system 114 and / or away from the top surface of the first substrate 520). The Bernoulli pick-up uses a vacuum to attract and grip the first substrate 520, and therefore movement of the first gripper 510 in the z-direction is unnecessary. According to one embodiment, the second substrate 521 continues to move downward along the conveyor system 114, and thus the picked-up first substrate 520 partially overlaps with the second substrate 521 before the substrate rotator 180 rotates.

[0101] Figure 5C A side plan view of a substrate rotator 180 in a second orientation is shown according to one embodiment. Figure 5D A top plan view of a substrate rotator 180 in a second orientation according to one embodiment is shown. In this embodiment, the second orientation exemplifies that the substrate rotator 180 is rotated approximately 180° relative to the first orientation. If the gear ratio between the first gear 511 and the gear of the main actuator 502 is 2:1, the first gripper 510 also rotates approximately 90 degrees. The substrate 520 rotates a total of 180 degrees + 90 degrees = 270 degrees relative to the original orientation of the substrate. Therefore, the first set of sides 520FS is perpendicular to the substrate 520 and moves downward along the conveyor system 114. Additionally, the second set of sides 520SS is parallel to the second substrate 521 and moves downward along the conveyor system 114. Finally, the length of the main body 501 and the rotational speed of the main actuator 502 can be selected such that the substrate 520 is placed at the correct distance below the conveyor system 114, thereby maintaining sufficient substrate spacing. The substrate 520 continues to move downward along the conveyor system 114 to the metering station 116E.

[0102] in addition, Figure 5C and Figure 5D An example is illustrated where a second gripper 512 grips a second substrate 521, wherein a first set of sides 521FS of the second substrate is parallel to the direction in which the substrate moves downward along the conveyor system 114. The second substrate 521 can be picked up from an upstream position of the conveyor system 114. The second gripper 512 also allows the second substrate 521 to rotate, as further described below. Gripping the second substrate 521 improves the efficiency of the method by doubling the number of substrates reoriented within the same time frame. According to one embodiment, the second substrate 521 is rotated about -270 degrees about its centerline while being laterally rotated 180 degrees in a direction opposite to the first direction. According to another embodiment, the second substrate 521 is rotated about -90 degrees about its centerline while being laterally rotated 180 degrees in a direction opposite to the first direction. In either case, the second substrate 521 is rotated such that a second set of sides 521SS is positioned in the same facing direction as the first set of sides 521FS. In embodiments where the first gripper 510 and the second gripper 512 are Bernoulli pickers, the second substrate 521 is picked up by the second gripper 512, and the second gripper does not move in the z-direction (e.g., away from the surface of the conveyor system 114). The Bernoulli picker uses a vacuum to attract and grip the second substrate 521, and therefore movement of the second gripper 512 in the z-direction is unnecessary. Furthermore, when the vacuum in the Bernoulli picker decreases, the first substrate 520 falls onto the conveyor system 114, and the Bernoulli picker does not move in the z-direction.

[0103] At operation 625, the second substrate 521 is rotated by a second angle such that the second set of sides 521SS of the second substrate is in the same orientation as the first set of sides 521FS before the second substrate was rotated. According to one embodiment, the second substrate 521 is square, and the second angle is approximately 270°. According to one embodiment, the conveyor system 114 can be stopped, and the second substrate 521 can rotate while stationary. The conveyor system 114 can move while the second substrate 521 is rotating, but this requires that the second substrate 521 be positioned further below the conveyor system 114 upon completion of rotation. If the second substrate 521 is not positioned further below the conveyor system 114, it may undesirably be placed on another substrate.

[0104] Figure 5E A side plan view of a substrate rotator 180 in a third orientation according to one embodiment is shown. Figure 5F A top plan view of a substrate rotator 180 in a third orientation according to one embodiment is shown. In this embodiment, the third orientation illustrates that the substrate rotator 180 is rotated approximately -180 degrees relative to the second orientation. Therefore, the third orientation of the substrate rotator 180 is similar to the first orientation.

[0105] If the gear ratio between the second gear 513 and the gear of the main actuator 502 is 3:2, then the second gripper 512 also rotates approximately -270 degrees. The second substrate 521 rotates a total of -180 degrees - 270 degrees = -90 degrees = 270 degrees relative to its original orientation. Therefore, the second set of sides 521FS is perpendicular to the second substrate 521 in the direction of downward movement along the conveyor system 114. Additionally, the second set of sides 521SS is parallel to the second substrate 521 in the direction of downward movement along the conveyor system 114. Finally, the first substrate 520 and the second substrate 521 have the same orientation, for example, rotated 270 degrees relative to their original orientations.

[0106] At operation 630, metrology is performed on a second set of sides of the substrate (such as the second set of sides 520SS of the first substrate 520). Metrology can be performed at metrology station 116E. Metrology station 116E includes a CSI, and as the substrate passes through metrology station 116E, the CSI images the second set of sides 520SS of the first substrate 520 to inspect for chips, cracks, or other defects on the first set of sides of the substrate. According to one embodiment, the second set of sides 520SS of the first substrate 520 is parallel to the direction in which the substrate moves downward along the conveyor system 114. Therefore, method 600 results in metrology of multiple sets of sides 520FS, 520SS of the first substrate 520.

[0107] At operation 635, metrology is performed on the second set of sides 521SS of the second substrate 521. Metrology can be performed at metrology station 116E. Metrology station 116E includes a CSI, and as the substrate passes through metrology station 116E, the CSI images the second set of sides 521SS of the second substrate 521 to inspect for chips, cracks, or other defects on the first set of sides of the substrate. According to one embodiment, the second set of sides 521SS of the second substrate 521 is parallel to the direction in which the substrate moves downward along the conveyor system 114. Therefore, method 600 results in metrology of multiple sets of sides 521FS, 521SS of the second substrate 521.

[0108] In one example, the body 501 rotates in a first direction in one step, and the body rotates in the opposite direction in a second step. Figure 7A A schematic diagram of a body 501 rotating in a first direction according to one embodiment is shown. Figure 7A Examples are shown in Figure 5B and Figure 5D There are identical movements between them. The main body 501 rotates in a first direction (as indicated by arrow 701). The first gripper rotates in the same direction as the first direction of the main body 501 (as indicated by arrow 702). The second gripper rotates in the opposite direction to the first direction of the main body 501 (as indicated by arrow 703). For example, the main body 501 rotates 180 degrees in the first direction, the first gripper rotates 90 degrees in the first direction, and the second gripper rotates -270 degrees in the first direction.

[0109] Figure 7B A schematic diagram of a body 501 rotating in a second direction according to one embodiment is shown. Figure 7B Examples are shown in Figure 5D and Figure 5F There exists the same motion between them. The body 501 rotates in a second direction (indicated by arrow 701). This second direction is opposite to the first direction. The first gripper rotates in the same direction as the second direction of the body 501 (indicated by arrow 702). The second gripper rotates in the opposite direction to the second direction of the body 501 (indicated by arrow 703). For example, the body 501 rotates 180 degrees in the second direction, the first gripper rotates 90 degrees in the second direction, and the second gripper rotates -270 degrees in the second direction. Therefore, the body 501, as well as the first and second grippers, terminate in the same direction as they began. Figure 7A , Figure 7B The movement of the body 501 shown can be achieved using an actuator that rotates only 180 degrees (e.g., main actuator 502), instead of rotating the entire 360 ​​degrees.

[0110] In another example, the body 501 rotates in a first direction in one step, and the body rotates in the same direction in a second step. Figure 7C A schematic diagram illustrating a body 501 rotating in a first direction according to one embodiment is shown. The body 501 rotates in the first direction (indicated by arrow 701). A first gripper rotates in the same direction as the first direction of the body 501 (indicated by arrow 702). A second gripper rotates in the same direction as the first direction of the body 501 (indicated by arrow 703). For example, the body 501 rotates 180 degrees in the first direction, the first gripper rotates 90 degrees in the first direction, and the second gripper rotates 270 degrees in the first direction.

[0111] Figure 7D A schematic diagram illustrating a body 501 rotating in a second direction according to one embodiment is shown. The body 501 rotates in the second direction (indicated by arrow 701). A first gripper rotates in the same direction as the first direction of the body 501 (indicated by arrow 702). A second gripper rotates in the same direction as the first direction of the body 501 (indicated by arrow 703). For example, the body 501 rotates 180 degrees in the second direction, the first gripper rotates 90 degrees in the second direction, and the second gripper rotates 270 degrees in the second direction. Thus, the body 501, as well as the first and second grippers, terminate in the same direction as they began. Figure 7C , Figure 7D The motion of the body 501 shown can be achieved using an actuator that rotates in one direction (e.g., the main actuator 502), and does not necessarily have to rotate backward.

[0112] Those skilled in the art will understand that the foregoing examples are exemplary and not restrictive. It is anticipated that all substitutions, additions, equivalents, and improvements thereof will be clear to those skilled in the art upon reading the specification and studying the accompanying drawings, and are included within the true spirit and scope of this disclosure. Therefore, it is contemplated that the appended claims include all such modifications, substitutions, and equivalents falling within the true spirit and scope of these teachings.

Claims

1. A conveyor inspection system, comprising: Inlet conveyor; A movable conveyor, positioned to receive a substrate from the inlet conveyor; A high-speed conveyor, wherein the high-speed conveyor is disposed below the movable conveyor; An image capturing device, the image capturing device being positioned to obtain an image of the substrate disposed on the inlet conveyor; and An illumination source, wherein the illumination source is configured to emit illumination light onto the inlet conveyor in the field of view of the image capturing device.

2. The conveyor inspection system of claim 1, further comprising an exit conveyor positioned to receive the substrate from the movable conveyor.

3. The conveyor inspection system of claim 2, further comprising a high-speed conveyor actuator configured to rotate the movable conveyor relative to the exit conveyor by a first angle.

4. The conveyor inspection system of claim 3, wherein the first angle is an acute angle.

5. The conveyor inspection system of claim 3, further comprising a waste bin.

6. The conveyor inspection system of claim 5, wherein the high-speed conveyor is positioned to move the substrate to the waste bin.

7. The conveyor inspection system of claim 6, further comprising a controller configured to control the high-speed conveyor actuator.

8. The conveyor inspection system of claim 7, wherein the controller is configured to analyze the image and rotate the movable conveyor in response to the image.

9. The conveyor inspection system of claim 8, wherein the controller is configured to analyze the image based on the measured area of ​​the substrate in the image.

10. A conveyor inspection system, comprising: Inlet conveyor; A movable conveyor, positioned to receive a substrate from the inlet conveyor; and A high-speed conveyor is disposed below the movable conveyor, wherein... The mobile conveyor is configured to operate at a first speed. The high-speed conveyor is configured to operate at a second speed, and The second speed is greater than the first speed.

Images