A laser protection liquid coating device and a working method thereof

Abstract

This invention discloses a laser protective liquid coating device and its operating method. The laser protective liquid coating device includes: a coating worktable for supporting the workpiece to be processed; a coating swing arm disposed around the periphery of the coating worktable, which includes a first nozzle and a second nozzle; a drain channel connected to the drain end of the coating worktable, the drain channel having a first drain port connected to a laser protective liquid recovery end and a second drain port connected to a waste discharge end; the drain channel includes a flow direction switching device that can change the liquid flow direction; and a control module that, when spraying laser protective liquid onto the workpiece, controls the flow direction switching device to open the first drain port and close the second drain port; and when spraying solvent onto the workpiece, the control module controls the flow direction switching device to open the second drain port and close the first drain port. Its advantage is that this device combines the flow direction switching device and the control module, enabling the recovery of the laser protective liquid.

Description

Technical Field

[0001] This invention relates to the field of laser protective liquid coating technology, particularly to the field of wafer laser grooving process, and specifically to a laser protective liquid coating device and its working method. Background Technology

[0002] In recent years, with social development and technological progress, technologies such as smart terminals and wearable devices have developed rapidly, leading to increasingly higher and more diversified requirements for their internal storage and control. To pursue a better user experience, electronic devices such as mobile phones and computers are becoming increasingly thinner and lighter, requiring smaller sizes and higher precision in the manufacturing of their internal controllers and other chips.

[0003] Laser processing has been widely used in chip manufacturing due to its advantages such as high precision, high speed, small deformation, and no material loss. When using lasers to cut chips, a laser protective liquid is applied to the workpiece surface to form a protective film in order to protect the workpiece (such as substrates and wafers) from damage and improve product yield and cutting efficiency. This protective film effectively prevents particle adhesion on the workpiece surface, suppresses edge chipping, fragmentation, and cracking, and also meets the cutting protection requirements of the workpiece (such as substrate materials like gallium arsenide and silicon carbide). However, the recovery of the laser protective liquid in existing coating devices has not received sufficient attention. Therefore, improvements are needed.

[0004] It is understood that the above statements only provide background information related to the present invention and do not necessarily constitute prior art. Summary of the Invention

[0005] Based on the aforementioned technical problems, the purpose of this invention is to provide a laser protective liquid coating device and its working method. This laser protective liquid coating device combines a flow switching device and a control module, which can realize the effective recovery of laser protective liquid, thereby reducing the resource consumption of laser protective liquid while meeting actual needs, and helping to control costs in actual production.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solution:

[0007] A laser protective liquid coating device, comprising:

[0008] A coating worktable, used to hold the workpiece to be processed;

[0009] A coating arm is disposed on the periphery of the coating worktable. The coating arm includes a first nozzle for spraying laser protective liquid onto the workpiece and a second nozzle for spraying solvent onto the workpiece.

[0010] A drainage channel is connected to the drainage end of the coating workbench. The drainage channel has a first drainage port and a second drainage port. The first drainage port is connected to the laser protective liquid recovery end, and the second drainage port is connected to the waste discharge end. The drainage channel includes a flow direction switching device, which can change the flow direction of the liquid in the drainage channel so that it is discharged from the first drainage port or the second drainage port.

[0011] The control module is used to control the operation of the laser protective liquid coating device; when spraying laser protective liquid onto the workpiece, the control module can control the flow direction switching device to open the first drain port and close the second drain port; when spraying solvent onto the workpiece, the control module can control the flow direction switching device to open the second drain port and close the first drain port.

[0012] Optionally, the flow direction switching device is a three-way valve.

[0013] Optional, also includes:

[0014] A driving device for driving the flow direction switching device to open the first drain port or the second drain port.

[0015] Optionally, the driving device is a pneumatic switch or an electric switch.

[0016] Optional, also includes:

[0017] A detection device for detecting the laser protective fluid discharged from the first drain port.

[0018] Optionally, the coating worktable is rotatable.

[0019] Optionally, a method of operating the aforementioned laser protective liquid coating device includes:

[0020] S1. Spray laser protective liquid onto the workpiece, while the control module controls the flow direction switching device to open the first drain port and close the second drain port.

[0021] S2. Spray solvent onto the workpiece, while the control module controls the flow direction switching device to open the second drain port and close the first drain port.

[0022] Optionally, S1 and S2 are executed alternately in a cycle.

[0023] Optional, also includes:

[0024] Before at least one S1 step, a laser protective liquid is sprayed onto the workpiece, while the control module controls the flow direction switching device to open the second drain port and close the first drain port.

[0025] Optionally, the control module controls the drive device to drive the flow direction switching device to open the first drain port or the second drain port.

[0026] Compared with the prior art, the present invention has the following advantages:

[0027] In a laser protective liquid coating device and its operating method according to the present invention, the laser protective liquid coating device combines a flow direction switching device and a control module. During the laser protective liquid coating operation, the control module can control the flow direction switching device to open the laser protective liquid recovery channel; during the solvent washing operation, the control module can control the flow direction switching device to open the liquid discharge channel. Based on the above structure, the laser protective liquid coating device can direct the liquid flowing from the coating worktable to the discharge channel to different discharge ports, so as to recover the laser protective liquid as needed, thereby realizing the recycling of the laser protective liquid. This structure helps to reduce the resource consumption of laser protective liquid during processing, achieve cost reduction and efficiency improvement, and also contributes to environmental protection and sustainable development. Attached Figure Description

[0028] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description will be briefly introduced below. Obviously, the drawings in the following description are one embodiment of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort:

[0029] Figure 1 This is a simplified schematic diagram of a laser protective liquid coating device according to the present invention;

[0030] Figure 2 This is a partial operational schematic diagram of a laser protective liquid coating device according to the present invention;

[0031] Figure 3 This is a schematic diagram of the flow direction of a flow direction switching device according to the present invention;

[0032] Figure 4 This is a schematic diagram of another flow direction of the flow direction switching device of the present invention;

[0033] Figure 5 This is a schematic diagram of the working method of a laser protective liquid coating device according to the present invention. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] It should be noted that, in this document, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Unless otherwise specified, an element defined by the phrase "comprising..." or "including..." does not exclude the presence of additional elements in the process, method, article, or terminal device that includes said element.

[0036] It should be noted that the accompanying drawings are all in a very simplified form and use non-precise ratios, and are only used to facilitate and clearly illustrate the purpose of the embodiments of the present invention.

[0037] like Figure 1 and Figure 2 The diagram shows a simplified schematic of a laser protective liquid coating device 100 according to the present invention. The device includes a coating worktable 110, a coating swing arm 120, a drain channel 130, and a control module 140. The control module 140 controls the operation of the laser protective liquid coating device 100. The coating worktable 110 supports a workpiece 150 to be processed, and the coating swing arm 120 is disposed around the periphery of the worktable 110. The coating swing arm 120 is connected to both a laser protective liquid supply device and a solvent supply device, and includes a first nozzle 121 for spraying laser protective liquid onto the workpiece 150 and a second nozzle 122 for spraying solvent onto the workpiece 150. In practical applications, the laser protective liquid in the laser protective liquid supply device is sprayed onto the workpiece 150 through the first nozzle 121 of the coating arm 120 to protect the surface of the workpiece 150; the solvent in the solvent supply device is sprayed onto the workpiece 150 through the second nozzle 122 of the coating arm 120 to remove the laser protective liquid from a specific area on the surface of the workpiece 150, making it easier for subsequent processing.

[0038] Furthermore, the coating workbench 110 includes a drain end 111, and the drain channel 130 is connected to the drain end 111 of the coating workbench 110. The drain channel 130 has a first drain port 131 and a second drain port 132. The first drain port 131 is connected to the laser protective fluid recovery end, and the second drain port 132 is connected to the waste discharge end. The drain channel 130 includes a flow direction switching device 160, which can change the flow direction of the liquid in the drain channel 130 so that it is discharged from the first drain port 131 or the second drain port 132.

[0039] Based on the above structure, in practical applications, when the laser protective liquid is sprayed onto the workpiece 150 through the first nozzle 121 of the coating arm 120, the control module 140 can control the flow direction switching device 160 to open the first drain port 131 and close the second drain port 132; when the solvent is sprayed onto the workpiece 150 through the second nozzle 122 of the coating arm 120, the control module 140 can control the flow direction switching device 160 to open the second drain port 132 and close the first drain port 131.

[0040] As described above, the laser protective liquid coating apparatus 100 of the present invention combines a flow direction switching device 160 and a control module 140. During the laser protective liquid coating operation, the control module 140 can control the flow direction switching device 160 to open the laser protective liquid recovery channel; during the solvent washing operation, the control module 140 can control the flow direction switching device 160 to open the liquid discharge channel. Based on the above structure, the laser protective liquid coating apparatus 100 can direct the liquid flowing from the coating worktable 110 to the discharge channel 130 to different discharge ports, so as to recover the laser protective liquid according to the needs, thereby realizing the recyclability of the laser protective liquid. This structure helps to reduce the resource consumption of laser protective liquid during processing, achieve cost reduction and efficiency improvement, and also contributes to environmental protection and sustainable development.

[0041] Furthermore, during the laser protective liquid coating process, the control device can not only control the flow switching device 160 to open the laser protective liquid recovery channel, but also control the flow switching device 160 to open the liquid discharge channel. Specifically, the control module 140 controls the flow switching device 160 to open the second drain port 132 and close the first drain port 131. In practical applications, the control module 140 can perform phased signal control to recover different proportions of laser protective liquid according to specific needs. Optionally, the control module 140 is a PLC electrical control device. Of course, the drive device 170 can also be other types of components; this invention does not limit this, as long as the corresponding functions can be achieved.

[0042] Optionally, the flow switching device 160 is a three-way valve, which allows the drain channel 130 to have two different drain ports, so that the laser protective fluid to be recovered and the liquid to be discharged can be discharged through different drain ports. For example, as Figure 3 and Figure 4 As shown, in one embodiment, the flow direction switching device 160 is an L-shaped three-way ball valve, which includes an inlet 161, a first outlet 162, and a second outlet 163. The first outlet 162 corresponds to or is connected to a first drain port 131, and the second outlet 163 corresponds to or is connected to a second drain port 132. The arrows in the figure indicate the flow direction of the liquid at the L-shaped three-way ball valve. In practical applications, the liquid discharged from the coating workbench 110 enters the L-shaped three-way ball valve through the inlet 161. The L-shaped three-way ball valve controls the flow direction of the liquid by rotating its valve core, causing it to flow out from the first outlet 162 or the second outlet 163.

[0043] Furthermore, such as Figure 1 As shown, the laser protective liquid coating device 100 further includes a driving device 170, which drives the flow direction switching device 160 to open the first drain port 131 or the second drain port 132. That is, the driving device 170 drives the flow direction switching device 160 to switch the liquid flow direction in the drain channel 130. During the operation of the laser protective liquid coating device 100, the control module 140 can control the driving device 170 to change the state of the flow direction switching device 160 based on information such as the laser protective liquid coating and dispensing operation time, thereby switching the drain port of the drain channel 130. Specifically, during the laser protective liquid coating process, the control module 140 can control the drive device 170 to drive the flow direction switching device 160 to open the first drain port 131 and close the second drain port 132 to open the laser protective liquid recovery channel, thereby realizing the recovery of the laser protective liquid; when the workpiece 150 is subjected to a dissolution and washing operation, the control module 140 can control the drive device 170 to drive the flow direction switching device 160 to close the first drain port 131 and open the second drain port 132, thereby closing the laser protective liquid recovery channel and opening the liquid discharge channel, thereby realizing the discharge of the liquid. Based on the above method, the laser protective liquid to be recovered and the liquid to be discharged can be separated and discharged, achieving the separation of the solvent and the recovered laser protective liquid.

[0044] Optionally, the drive device 170 is a pneumatic switch or an electric switch. Of course, the drive device 170 can also be other types of components, and the present invention does not limit this, as long as it can achieve the corresponding function.

[0045] Furthermore, the laser protective liquid coating device 100 also includes a detection device for detecting the laser protective liquid discharged from the first drain port 131. Based on the above, it can be understood that the channel connected to the first drain port 131 is equivalent to a laser protective liquid recovery channel. After the laser protective liquid is recovered, its sugar content or concentration can be measured and monitored by the detection device to determine whether it meets the defined specifications for use.

[0046] Different detection devices can be selected based on the different components of the laser protective fluid. Optionally, the laser protective fluid is a water-soluble laser protective fluid, and correspondingly, the main component of the solvent is water. Water-soluble laser protective fluid is relatively easy to form a film and clean on the surface of the workpiece 150, and its solvent, water, helps to reduce production costs. Furthermore, water-soluble laser protective fluid also helps to suppress static electricity during processing. For example, in one embodiment, the main components of the laser protective fluid include polyoxyethylene, propylene glycol methyl ether, and pure water. In this embodiment, a corresponding detection device can be selected to detect the recovered laser protective fluid.

[0047] When the laser protective liquid coating apparatus 100 of the present invention is applied in the field of chip manufacturing, the workpiece 150 to be processed is generally referred to as a wafer, substrate, or wafer. Optionally, the first nozzle 121 of the coating arm 120 includes multiple spray nozzles to uniformly spray the laser protective liquid onto the surface of the workpiece 150, thereby forming a uniform protective film on the surface of the workpiece 150; similarly, a similar arrangement can be made at the second nozzle 122 of the coating arm 120. During the processing, the wafer is placed on the coating worktable 110, and the control module 140 can control the coating arm 120 to be positioned at a predetermined processing position for laser protective liquid coating or solvent cleaning.

[0048] Furthermore, such as Figure 2 As shown, in one embodiment, the coating worktable 110 is rotatable. The coating worktable 110 can be regarded as a treatment cup, the upper surface of which includes a bearing surface for placing the workpiece 150 and a protruding structure surrounding the bearing surface. The protruding structure can prevent liquid splashed from the surface of the workpiece 150 from running out of the coating worktable 110, causing it to flow to the drain end 111 of the coating worktable 110, and then flow to different drain ports by means of the flow switching device 160.

[0049] During the laser protective liquid coating process, the rotation of the coating stage 110 helps to achieve uniform spraying onto the surface of the workpiece 150, while also reducing the movement of the coating arm 120. Furthermore, the rotation of the coating stage 110 can promptly separate and discharge excess liquid from the surface of the workpiece 150, thereby accelerating the film formation process. In practical applications, the rotation speed of the coating stage 110 can be adjusted according to factors such as the time required for laser protective liquid film formation and the desired film thickness to meet different application requirements. Further, in practical applications, the coating stage 110 can be placed inside a vacuum reaction chamber to isolate the workpiece 150 from air during processing, thus preventing undesirable changes such as oxidation.

[0050] Based on the same inventive concept, such as Figure 5 As shown, the present invention also provides a method for operating a laser protective liquid coating device 100. The method includes: S1, spraying laser protective liquid onto a workpiece 150, while a control module 140 controls a flow direction switching device 160 to open a first drain port 131 and close a second drain port 132; S2, spraying a solvent onto the workpiece 150, while the control module 140 controls the flow direction switching device 160 to open the second drain port 132 and close the first drain port 131. Based on the above method, laser protective liquid can be recovered in S1 and discharged in S2, thereby reducing resource consumption of laser protective liquid while meeting actual needs, which helps in cost control in actual production.

[0051] Furthermore, in the operating method of the laser protective liquid coating device 100 of the present invention, S1 and S2 are executed alternately in a cycle. In practical applications, the number of cycles can be set according to actual application requirements.

[0052] Furthermore, in actual production, the laser protective liquid coating device 100 typically operates continuously. Multiple workpieces 150, i.e., wafers, are sequentially placed into the coating worktable 110 for processing. The final step in processing each wafer is usually the cleaning operation described in S2. After wafer processing, a small amount of solvent may remain in the drain channel 130. Therefore, the operating method of the laser protective liquid coating device 100 of the present invention further includes: before at least one S1 step, spraying laser protective liquid onto the workpiece 150, while the control module 140 controls the flow direction switching device 160 to open the second drain port 132 and close the first drain port 131. In this stage, the control module 140 controls the flow direction switching device 160 to open the liquid discharge channel, discharging the liquid mainly containing laser protective liquid from the liquid discharge channel to avoid the recovered laser protective liquid failing to meet the purity requirements for use. Of course, in some embodiments, the above steps may not be included, and the present invention does not limit this. For example, in one embodiment, the purity of the laser protective fluid provided by the laser protective fluid supply device is much higher than the purity required for actual application. Even if a small amount of solvent is mixed in, it will not have a significant impact on its purity, that is, it still meets the purity required for actual application. In this case, only operations S1 and S2 need to be performed.

[0053] Furthermore, in the above steps of the working method of the laser protective liquid coating device 100 of the present invention, the drive device 170 can be driven by the control module 140 to open the first drain port 131 or the second drain port 132, thereby opening the laser protective liquid recovery channel or the liquid discharge channel.

[0054] In summary, the laser protective liquid coating device 100 and its working method of the present invention combine a flow direction switching device 160 and a control module 140. During the laser protective liquid coating operation, the control module 140 can control the flow direction switching device 160 to open the laser protective liquid recovery channel; during the solvent washing operation, the control module 140 can control the flow direction switching device 160 to open the liquid discharge channel. Based on the above structure, the laser protective liquid coating device 100 can direct the liquid flowing from the coating worktable 110 to the discharge channel 130 to different discharge ports, so as to recover the laser protective liquid according to the needs, thereby realizing the recyclability of the laser protective liquid. This structure helps to reduce the resource consumption of laser protective liquid during processing, achieve cost reduction and efficiency improvement, and also contributes to environmental protection and sustainable development.

[0055] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A laser protective liquid coating device, characterized in that, Include: A coating worktable, used to hold the workpiece to be processed; A coating arm is disposed on the periphery of the coating worktable. The coating arm includes a first nozzle for spraying laser protective liquid onto the workpiece and a second nozzle for spraying solvent onto the workpiece. A drainage channel is connected to the drainage end of the coating workbench. The drainage channel has a first drainage port and a second drainage port. The first drainage port is connected to the laser protective liquid recovery end, and the second drainage port is connected to the waste discharge end. The drainage channel includes a flow direction switching device, which can change the flow direction of the liquid in the drainage channel so that it is discharged from the first drainage port or the second drainage port. The control module is used to control the operation of the laser protective liquid coating device; when spraying laser protective liquid onto the workpiece, the control module can control the flow direction switching device to open the first drain port and close the second drain port; when spraying solvent onto the workpiece, the control module can control the flow direction switching device to open the second drain port and close the first drain port.

2. The laser protective liquid coating device as described in claim 1, characterized in that, The flow direction switching device is a three-way valve.

3. The laser protective liquid coating device as described in claim 1, characterized in that, Also includes: A driving device for driving the flow direction switching device to open the first drain port or the second drain port.

4. The laser protective liquid coating device as described in claim 3, characterized in that, The driving device is a pneumatic switch or an electric switch.

5. The laser protective liquid coating device as described in claim 1, characterized in that, Also includes: A detection device for detecting the laser protective fluid discharged from the first drain port.

6. The laser protective liquid coating apparatus as described in claim 1, characterized in that, The coating worktable is rotatable.

7. A method for operating the laser protective liquid coating apparatus as described in any one of claims 1 to 6, characterized in that, Include: S1. Spray laser protective liquid onto the workpiece, while the control module controls the flow direction switching device to open the first drain port and close the second drain port. S2. Spray solvent onto the workpiece, while the control module controls the flow direction switching device to open the second drain port and close the first drain port.

8. The operating method of the laser protective liquid coating device as described in claim 7, characterized in that, S1 and S2 are executed alternately in a cycle.

9. The operating method of the laser protective liquid coating device as described in claim 7 or 8, characterized in that, Also includes: Before at least one S1 step, a laser protective liquid is sprayed onto the workpiece, while the control module controls the flow direction switching device to open the second drain port and close the first drain port.

10. The operating method of the laser protective liquid coating device as described in claim 7, characterized in that, The control module controls the drive device to drive the flow direction switching device to open the first drain port or the second drain port.

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