A carbon-carbon deposition furnace control system and method with active early warning and hierarchical interlocking cooperation

Abstract

This invention discloses a control system and method for a carbon-carbon deposition furnace with active early warning and hierarchical interlocking, belonging to the field of carbon-carbon composite material preparation equipment control. It solves the problem of delayed early warning and potential safety hazards in existing deposition furnace control systems. The system includes a multi-dimensional monitoring module integrating various process parameter detection devices and safety protection devices for real-time acquisition of the deposition furnace's operating parameters; a data processing and early warning module for outputting hierarchical early warning signals according to preset early warning logic based on the operating parameters; a hierarchical interlocking control module for matching corresponding interlocking strategies and generating corresponding protection commands based on the level of the hierarchical early warning signals; and an execution module including multiple execution units, such as a shutdown control unit and a process parameter adjustment unit, for receiving interlocking control commands and driving the corresponding execution units to perform protective actions. This invention is applied to deposition furnaces.

Description

Technical Field

[0001] This invention relates to the field of control technology for carbon-carbon composite material preparation equipment, specifically to a control system and method for a carbon-carbon deposition furnace with active early warning and hierarchical interlocking. Background Technology

[0002] Carbon-carbon deposition furnaces are core equipment in the fabrication of carbon-ceramic brake discs. Their operation involves high temperatures and flammable and explosive gases, necessitating extremely high safety control requirements. Currently, existing deposition furnaces are generally equipped with basic safety control functions, with their core control logic being "sensor acquisition + PLC judgment + single interlock action." Related technologies can be found in, for example, a safety control system for LPCVD equipment disclosed in Chinese Patent Publication No. CN118449087A, and a control method based on PLC in a diamond growth system disclosed in Chinese Patent Publication No. CN112126910B. Such systems can only implement threshold-triggered alarms and basic interlock functions, lacking proactive early warning mechanisms and hierarchical interlock designs, thus exhibiting significant shortcomings.

[0003] Among these, proactive early warning refers to a prevention and control mode that can identify early signs of malfunctions. However, existing systems can only passively wait for parameters to exceed thresholds before issuing alarms, failing to capture early characteristics such as high-temperature aging of heaters, resulting in delayed responses and a high risk of escalating accidents. Graded interlocking involves differentiated handling based on the severity of the malfunction. Existing technologies do not differentiate between malfunction levels, uniformly adopting a power and gas cut-off approach. This can easily lead to over-handling reducing production efficiency or under-handling creating safety hazards. For example, the polycrystalline silicon reduction furnace interlocking system disclosed in Chinese Patent CN105204452B still relies on manual handling and does not implement a graded interlocking mechanism. Furthermore, existing systems lack independence; safety modules and main control modules often share components, making them prone to mutual interference. Fault diagnosis and tracing capabilities are weak, only providing alarm signals and lacking the ability to analyze the causes of malfunctions and trace data.

[0004] Solving the above problems faces multiple difficulties: multi-parameter coupling makes it difficult to extract the characteristics of fault precursors; the level boundaries and control logic of hierarchical interlocking are difficult to standardize; an effective balance needs to be achieved between safety and production continuity; at the same time, it is also difficult to balance the independence and coordination between the safety system and the main control system.

[0005] Therefore, there is an urgent need to develop a control system with proactive early warning, hierarchical interlocking, and high reliability to meet the pressing safety control requirements of high-end manufacturing. Summary of the Invention

[0006] To address the technical problem of delayed early warning and potential safety hazards in existing deposition furnace control systems, this invention proposes a carbon-carbon deposition furnace control system and method that combines proactive early warning with hierarchical interlocking.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a carbon deposition furnace control system with active early warning and hierarchical interlocking coordination, comprising: The multi-dimensional monitoring module integrates various types of process parameter detection devices and safety protection devices, which are distributed in key parts of the deposition furnace to collect the furnace's operating parameters in real time. The data processing and early warning module is communicatively connected to the multi-dimensional monitoring module and is used to output graded early warning signals according to the operating parameters and preset early warning logic. The hierarchical interlocking control module communicates with the data processing and early warning module. It is used to match the corresponding interlocking strategy according to the level of the hierarchical early warning signal and generate corresponding protection instructions. The protection instructions include one or more of the following: outputting light warning signals, outputting audible and visual alarm signals, and outputting interlocking control instructions. The interlocking control instructions include shutdown interlocking control instructions and adjustment interlocking control instructions. The execution module includes multiple execution units, which include a shutdown control unit and a process parameter adjustment unit. Both the shutdown control unit and the process parameter adjustment unit are communicatively connected to the hierarchical interlocking control module to receive interlocking control commands and drive the corresponding execution units to perform protective actions.

[0008] Furthermore, the process parameter detection device includes at least: A gas concentration sensor is deployed inside the gas source cabinet of the deposition furnace to monitor the concentration of combustible gas in real time. Temperature sensor, used to collect the furnace body temperature of the deposition furnace; Pressure sensors are used to monitor the pressure inside the deposition furnace in real time. A flow sensor is used to collect the water flow rate and water temperature in the cooling water circuit; The current detection unit, including a shunt, is used to collect the current in the heating circuit of the deposition furnace; Safety protection devices should include at least: The position detection unit includes a proximity switch and a limit switch. The proximity switch is used to detect the signals of the furnace door being raised to the correct position and lowered to the correct position, and the limit switch is used to detect the signals of the furnace door being locked to the correct position and opened to the correct position. The emergency stop device includes a local emergency stop button on the control box and a safety emergency stop button on the equipment. The two emergency stop buttons are set independently and both use fail-safe normally closed contacts to connect to the data processing and early warning module. Both the local emergency stop button on the control box and the safety emergency stop button on the equipment are linked to the shutdown control unit to trigger a global safety interlock in an emergency and have the highest control priority.

[0009] Furthermore, the data processing and early warning module calculates the rate of change, average value, and fluctuation amplitude characteristics of the operating parameters at preset intervals. When the current operating parameters exceed their respective preset thresholds, it generates corresponding first-level, second-level, and third-level early warning signals.

[0010] Furthermore, the hierarchical interlocking control module is configured as follows: When a Level 1 warning signal generated by the data processing and warning module is received, a light warning signal is output, but no interlocking control command is generated. When the secondary warning signal generated by the data processing and early warning module is received, the first audible and visual alarm signal is output, and an adjustment interlock control command is generated as needed; When the data processing and early warning module receives the level 3 early warning signal, it generates a shutdown interlock control command and a second audible and visual alarm signal. The shutdown interlock control command controls the shutdown control unit to perform corresponding actions.

[0011] When the emergency stop device is triggered, the generation and execution of the shutdown interlock control command are subject to the highest control priority of the emergency stop device.

[0012] Furthermore, the shutdown control unit includes at least a power control component for the operating mechanism of the deposition furnace, a power control component for the heating system of the deposition furnace, a shutdown component for the gas inlet system of the deposition furnace, and a power control component for the vacuuming of the deposition furnace. The power control component for the operating mechanism of the deposition furnace is used to control the power supply of the operating mechanism; the power control component for the heating system of the deposition furnace is used to control the power supply of the heating system; the shutdown component for the gas inlet system of the deposition furnace is used to control the gas inlet valve of the gas inlet system; and the power control component for the vacuum pumping of the deposition furnace is used to control the power supply of the vacuum pumping equipment.

[0013] Furthermore, the process parameter adjustment unit includes at least an intake gas adjustment control component, a vacuum adjustment control component, and a heating system adjustment control component; The air intake regulation and control component is used to control the air intake flow rate and air intake speed of the deposition furnace. The vacuum regulation and control component is used to control the gas flow rate and gas extraction speed of the deposition furnace in order to regulate the pressure inside the deposition furnace. The heating system adjustment and control component is used to control the heating power of the heating system.

[0014] Furthermore, the data processing and early warning module and the hierarchical interlocking control module are both integrated into the PLC controller.

[0015] A method for controlling a carbon deposition furnace with active early warning and hierarchical interlocking, employing the aforementioned active early warning and hierarchical interlocking control system, is characterized by comprising the following steps: Step S1: Collect the operating parameters of the deposition furnace in real time through the multi-dimensional monitoring module; Step S2: The operating parameters are processed by the data processing and early warning module, and a graded early warning signal is generated based on the preset early warning logic; Step S3: The hierarchical interlocking control module matches the corresponding interlocking strategy according to the received hierarchical warning signal level and generates corresponding protection instructions. The protection instructions include one or more of the following: outputting light warning signals, outputting audible and visual alarm signals, and outputting interlocking control instructions. Step S4: The execution module responds to the interlocking control command and performs the corresponding protective action; Step S5: Repeat steps S1-S4 until the deposition operation is completed.

[0016] Furthermore, the protective actions include controlling the shutdown control unit and controlling the process parameter adjustment unit.

[0017] 1. A storage medium storing a computer program, wherein the computer program, when run, executes the steps of the method described above.

[0018] The advantages of this invention over the prior art are as follows: 1. This invention's system, through a multi-dimensional monitoring module, covers key risk points of the deposition furnace, including gas concentration, temperature, pressure, water flow and temperature, heating current, furnace door position, and emergency shutdown, providing a complete data foundation for proactive early warning. Through data processing and early warning modules, it identifies early warning signs and outputs tiered early warning signals according to preset warning logic. This allows it to detect potential risks 15-60 minutes before an accident occurs, achieving a shift from passive response to proactive early warning. 2. The hierarchical interlocking control module of this invention only provides a warning without intervention upon receiving a light warning signal; upon receiving a level two warning signal, it automatically adjusts parameters; upon receiving a level three warning signal, it generates a shutdown interlocking control command, driving the shutdown control unit to execute the corresponding action. This avoids unnecessary production interruptions and maximizes process continuity.

[0019] 3. The system of this invention can replace traditional manual inspection. It relies on the PLC controller to realize automatic monitoring and early warning of equipment status, predict faults in advance and reserve maintenance cycle to avoid emergency repair costs.

[0020] 4. This invention's system differs from general-purpose control systems, specifically adapted to the high-temperature, high-pressure conditions of carbon deposition. Through high-precision equipment and precise control, it ensures the stability of core parameters. Product qualification rates are improved by 5%-8%, better meeting the production needs of high-end carbon-carbon composite materials. Attached Figure Description

[0021] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a system principle topology diagram of the present invention; Figure 2 This is the alarm pop-up interface of the host computer in this invention; Figure 3 This is a schematic diagram of the method flow of the present invention. Detailed Implementation

[0022] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate relative orientations or positional relationships and are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0023] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0024] like Figures 1 to 3 As shown, the present invention provides a carbon deposition furnace control system with active early warning and hierarchical interlocking coordination, comprising: The multi-dimensional monitoring module integrates various types of process parameter detection devices and safety protection devices, which are distributed in key parts of the deposition furnace to collect the furnace's operating parameters in real time.

[0025] Specifically, the process parameter detection device includes at least: The gas concentration sensor selected is the MQ-4 methane sensor, with a detection range of 300-10000ppm. It is deployed in the gas source cabinet of the deposition furnace for real-time monitoring of methane concentration. The temperature sensor, using an N-type thermocouple, has a measurement range of 0-1300℃ and is used to collect the furnace body temperature of the deposition furnace; The pressure sensor uses Inforcon vacuum gauges, including a 1000 Torr vacuum gauge (range 0~133.32kPa) and a 10 Torr vacuum gauge (range 0-1.33kPa), which work together to achieve accurate monitoring of different pressure ranges inside the furnace; The flow sensor adopts an integrated temperature and flow sensor. In this embodiment, it is equipped with an Yima brand integrated temperature and flow sensor with a flow range of 3~100cm / s and a temperature range of -40~150℃, which is used to collect the water flow and water temperature of the cooling water circuit. The current detection unit includes a shunt. In this embodiment, an RSA shunt (specification 3600A / 75mV) is used, which generates a 75mV voltage drop when a 3600A current passes through the two ends of the shunt. This voltage drop is used to collect the current of the heating circuit of the deposition furnace heating system.

[0026] Safety protection devices should include at least: The position detection unit includes a proximity switch and a limit switch. The proximity switch is used to detect the signals of the furnace door being raised to the correct position and lowered to the correct position, and the limit switch is used to detect the signals of the furnace door being locked to the correct position and opened to the correct position. The emergency stop device includes a local emergency stop button on the control panel and a safety emergency stop button on the equipment. These two buttons are independently configured and both use fail-safe normally closed contacts connected to the PLC controller's data processing and early warning module. Based on the PLC controller's data processing and early warning module, both the local emergency stop button and the safety emergency stop button are linked to the shutdown control unit to trigger a global safety interlock in emergency situations. The local emergency stop button and the safety emergency stop button have equal functionality, both using fail-safe normally closed contacts, and possess the highest control priority.

[0027] The data processing and early warning module communicates with the multi-dimensional monitoring module and is used to output graded early warning signals according to the preset early warning logic based on the operating parameters.

[0028] Specifically, the data processing and early warning module is integrated into the PLC controller. The data processing and early warning module has a built-in wavelet transform filtering algorithm, which is used to filter and reduce noise in the operating parameters.

[0029] The data processing and early warning module calculates the rate of change, average value, and fluctuation amplitude of the operating parameters at preset intervals. When the current operating parameters exceed their respective preset thresholds, it generates corresponding first-level, second-level, and third-level early warning signals.

[0030] In this embodiment, the data processing and early warning module continuously collects various operating parameters at a frequency of 6.67Hz. After wavelet transform filtering, it calculates the parameter change rate, average value, fluctuation amplitude, and other characteristics every 5 minutes. Based on preset thresholds, it identifies fault precursors and generates Level 1 (minor), Level 2 (general), and Level 3 (serious) early warning signals to achieve proactive early warning and capture potential risks 30-60 minutes in advance.

[0031] The hierarchical interlocking control module, integrated into the PLC controller, presets fault level classification standards and corresponding differentiated interlocking strategies. It communicates with the data processing and early warning module to match the corresponding interlocking strategy according to the level of the hierarchical early warning signal and generate corresponding protection commands. The protection commands include one or more of the following: outputting light warning signals, outputting audible and visual alarm signals, and outputting interlocking control commands. The interlocking control commands include shutdown interlocking control commands and adjustment interlocking control commands.

[0032] The execution module includes multiple execution units, which include a shutdown control unit and a process parameter adjustment unit. Both the shutdown control unit and the process parameter adjustment unit are communicatively connected to the hierarchical interlocking control module to receive interlocking control commands and drive the corresponding execution units to perform protective actions.

[0033] Specifically, the hierarchical interlocking control module is configured as follows: Level 1 Warning (Minor Fault): When the hierarchical interlocking control module receives the Level 1 warning signal generated by the data processing and warning module, it outputs a light warning signal and uploads the Level 1 warning signal to the audible and visual alarm and the host computer. The audible and visual alarm controls the yellow LED tri-color light to light up. The host computer displays the light warning signal and generates a corresponding maintenance plan based on the Level 1 warning signal. The equipment management personnel perform maintenance according to the maintenance plan, while the deposition furnace continues to perform deposition operations normally without generating interlocking control commands. Level 2 Early Warning (General Fault): When the tiered interlocking control module receives a level 2 early warning signal generated by the data processing and early warning module, it outputs a first audible and visual alarm signal; the first audible and visual alarm signal is transmitted to the first audible and visual alarm device to execute the alarm action; in another embodiment, when the tiered interlocking control module receives a level 2 early warning signal generated by the data processing and early warning module, it generates a first audible and visual alarm signal. When the fault corresponding to the level 2 early warning signal can be intervened through process parameter adjustment, the tiered interlocking control module generates an adjustment interlocking control command, the first audible and visual alarm signal is transmitted to the first audible and visual alarm device to execute the alarm action, and the adjustment interlocking control command drives the process parameter adjustment unit of the execution module to execute the corresponding action; the first audible and visual alarm device includes an LED tri-color light and a buzzer.

[0034] Level 3 Early Warning (Severe Fault): When the graded interlocking control module receives a Level 3 early warning signal generated by the data processing and early warning module, it generates an emergency stop interlocking control command and a second audible and visual alarm signal. All three signals—Level 3 early warning signal, emergency stop interlocking control command, and second audible and visual alarm signal—are uploaded to the host computer for display. The host computer generates a corresponding protection plan based on the Level 3 early warning signal, which is then used by equipment administrators for maintenance. Simultaneously, the emergency stop interlocking control command drives the shutdown control unit to perform corresponding safety protection actions, such as cutting off the heating system power supply and closing dangerous air intake paths. It also selectively controls the vacuum equipment based on the fault type to minimize risk. The second audible and visual alarm signal is transmitted to the second audible and visual alarm device, which then executes the alarm action. The second audible and visual alarm device includes a tri-color LED light and a fan-shaped alarm.

[0035] The shutdown control unit includes at least the following components: a power control component for the operating mechanism of the deposition furnace, a power control component for the heating system of the deposition furnace, a shutdown component for the gas inlet system of the deposition furnace, and a power control component for the vacuum pumping system of the deposition furnace. The power control component for the operating mechanism of the deposition furnace controls the power supply to the operating mechanism; the power control component for the heating system of the deposition furnace controls the power supply to the heating system; the shutdown component for the gas inlet system of the deposition furnace controls the gas inlet valves of the gas inlet system; and the power control component for the vacuum pumping system of the deposition furnace controls the power supply to the vacuum pumping equipment.

[0036] The vacuum power control component of the deposition furnace is configured to selectively control the start or stop of the vacuum equipment according to the fault type corresponding to the three-level warning signal when the graded interlock control module receives the three-level warning signal.

[0037] The process parameter adjustment unit includes at least an air intake adjustment control component, a vacuum adjustment control component, and a heating system adjustment control component; the air intake adjustment control component is used to control the air intake flow rate and air intake speed of the deposition furnace; the vacuum adjustment control component is used to control the air extraction flow rate and air extraction speed of the deposition furnace to adjust the pressure inside the deposition furnace; and the heating system adjustment control component is used to control the heating power of the heating system.

[0038] The multi-dimensional monitoring module, data processing and early warning module, and hierarchical interlocking control module are connected to the host computer. The host computer receives and displays the operating parameters collected by the multi-dimensional monitoring module, the hierarchical early warning signals output by the data processing and early warning module, and the interlocking control commands output by the hierarchical interlocking control module. Based on the different hierarchical early warning signals and the pre-stored maintenance schemes, it outputs the corresponding maintenance schemes.

[0039] This invention's system employs dual emergency stop protection—a local emergency stop on the control panel and a safety emergency stop on the equipment—both using fail-safe normally closed contacts connected to the PLC controller's data processing and early warning module, ensuring the highest control priority. When the operator presses the emergency stop button on the control panel or the safety emergency stop button on the equipment, the data processing and early warning module immediately executes a global safety interlock: the heating system is immediately shut off, all process air inlet valves are urgently closed, the pump unit stops or starts, and the moving mechanism is forcibly stopped. Simultaneously, the explosion-proof LED tri-color red light remains constantly lit, a high-decibel buzzer continuously sounds an alarm, and the host computer simultaneously displays an emergency stop fault interface. The emergency stop signal remains self-locking; after the fault is cleared, manual reset confirmation is required before the equipment can be restarted, ensuring the absolute safety of personnel, materials, and equipment under extreme operating conditions.

[0040] The system of this invention detects four sets of position signals of the furnace door: rising, falling, locking, and opening, by setting proximity switches and limit switches. One normally open contact of the proximity switch and one normally open contact of the limit switch are connected to the data processing and early warning module of the PLC controller to realize the acquisition of the furnace door rising, falling, locking, and opening signals.

[0041] A method for controlling a carbon deposition furnace with active early warning and hierarchical interlocking, employing the aforementioned active early warning and hierarchical interlocking control system, includes the following steps: Step S1: Collect the operating parameters of the deposition furnace in real time through the multi-dimensional monitoring module; Step S2: After processing the operating parameters through the data processing and early warning module, a graded early warning signal is generated based on the preset early warning logic.

[0042] In one embodiment, step S2 includes the following process: Wavelet transform filtering algorithm is used to filter and reduce noise in the operating parameters; The rate of change, average value, and fluctuation characteristics of the operating parameters are calculated at preset intervals. When the current operating parameters are detected to exceed their corresponding preset thresholds, corresponding Level 1, Level 2, and Level 3 warning signals are generated.

[0043] Step S3: The hierarchical interlocking control module matches the corresponding interlocking strategy according to the received hierarchical warning signal level and generates corresponding protection instructions. The protection instructions include one or more of the following: outputting light warning signals, outputting audible and visual alarm signals, and outputting interlocking control instructions.

[0044] Step S4: The execution module responds to the interlock control command and executes the corresponding protective actions. These protective actions include controlling the shutdown control unit and the process parameter adjustment unit.

[0045] Step S5: Repeat steps S1-S4 until the deposition operation is completed.

[0046] The control method of the present invention will be described in detail below with reference to a specific process flow. Example 1

[0047] The methane proactive warning and tiered cascading process includes the following steps: Step S1: After the deposition furnace process is started, the gas concentration sensor monitors the concentration data of methane in the deposition furnace in real time.

[0048] Step S2: The data processing and early warning module continuously collects methane concentration data monitored by the gas concentration sensor at a frequency of 6.67Hz, and after wavelet transform filtering, accurately calculates key characteristic parameters such as the methane concentration growth rate. When the methane concentration is detected to rise from 50 ppm to 500 ppm within 10 minutes, a level 2 methane concentration warning signal is generated. Step S3: The graded interlocking control module receives the secondary warning signal generated in step S2, generates the first audible and visual alarm signal and the corresponding adjustment interlocking control command, which is the control command to shut down the methane gas path. Step S4: The execution module receives the adjustment interlock control command and controls the first audible and visual alarm device to activate (the LED yellow light illuminates and the buzzer starts), adjusting the inlet flow rate of the methane gas path to zero. At this time, the heating system and other processes of the deposition furnace continue to operate normally, allowing sufficient time for staff to troubleshoot.

[0049] Step S5: Repeat steps S1-S4. If the fault is not handled in time and the methane concentration continues to rise to 1000 ppm, the execution module receives the shutdown interlock control command and the second audible and visual alarm signal output by the graded interlock control module. The data processing and early warning module outputs a three-level early warning signal corresponding to the methane concentration monitoring and transmits it to the graded interlocking control module. The graded interlocking control module outputs a shutdown interlocking control command and a second audible and visual alarm signal corresponding to the three-level early warning signal. The execution module receives the shutdown interlocking control command and the second audible and visual alarm signal output by the graded interlocking control module. The shutdown interlocking control command corresponding to the methane concentration monitoring includes cutting off the power supply to the operating mechanism of the deposition furnace, cutting off the power supply to the heating system of the deposition furnace, closing the gas inlet valve of the gas inlet system of the deposition furnace, and cutting off the power supply to the vacuum equipment of the deposition furnace. The module simultaneously executes operations such as stopping the heating of the deposition furnace, cutting off all gas paths, and shutting down all operating mechanisms. The second audible and visual alarm signal is transmitted to the second audible and visual alarm device, which controls the red LED to light up and controls the start of the wind turbine alarm, achieving comprehensive protection under extreme fault conditions. Example 2

[0050] The proactive early warning and tiered interlocking system for water flow and temperature includes the following steps: Step S1: After the deposition furnace process is started, the temperature and flow rate integrated sensors arranged on the furnace top cover, bottom cover, and the cooling water path of the four copper electrodes collect the water flow rate and water temperature data of the cooling water path in real time. The water flow rate and water temperature data are analog values.

[0051] Step S2: The collected water flow and water temperature data are converted from analog to digital by the data processing and early warning module to obtain real-time water flow and water temperature data; When the water flow rate drops from the normal 100 cm / s to 10 cm / s and the water temperature rises from the normal 30℃ to 45℃, and this state lasts for 30 seconds, a level two warning signal for water flow rate and water temperature is generated.

[0052] Step S3: The hierarchical interlocking control module receives the secondary early warning signals of water flow and water temperature generated in step S2 and generates the first audible and visual alarm signal. Step S4: The execution module receives the secondary warning signal and controls the first audible and visual alarm device to operate (the LED yellow light turns on and the buzzer starts). The heating system of the deposition furnace continues to operate normally to avoid accidental shutdown caused by temporary fluctuations.

[0053] Step S5: Repeat steps S1-S4. If the water flow rate continues to decrease to below 8 cm / s, or the water temperature rises to 48°C, and this abnormal state persists for more than 30 seconds, the data processing and early warning module outputs a level-three early warning signal corresponding to the water flow and water temperature monitoring of the cooling water circuit and transmits it to the graded interlocking control module. The graded interlocking control module outputs the shutdown interlocking control command and the second audible and visual alarm signal corresponding to the level-three early warning signal. The execution module receives the shutdown interlocking control command and the second audible and visual alarm signal output by the graded interlocking control module, and the shutdown interlocking corresponding to the water flow and water temperature monitoring of the cooling water circuit. The control commands include: driving the power control component of the deposition furnace operating mechanism to cut off the power supply to the operating mechanism; driving the power control component of the deposition furnace heating system to cut off the power supply to the heating system; driving the shutdown component of the deposition furnace air intake system to close the air intake valve of the deposition furnace air intake system; driving the power control component of the deposition furnace vacuum system to cut off the power supply to the vacuum equipment; and simultaneously executing operations such as stopping the heating of the deposition furnace, cutting off all gas paths, and shutting down all operating mechanisms. The second audible and visual alarm signal is transmitted to the second audible and visual alarm device, which controls the red light of the audible and visual alarm device to light up and activates the wind turbine alarm, achieving comprehensive protection under extreme fault conditions. Example 3

[0054] The active early warning and tiered interlocking process for the heating system (graphite heater) includes the following steps: Step S1: After the deposition furnace process is started, the RSA shunt monitors the voltage drop signal of the deposition furnace heating circuit in real time. Step S2: The heating circuit current value is calculated by the data processing and early warning module, and then the real-time resistance value of the graphite heater is calculated. The difference between the collected real-time resistance value of the graphite heater and the preset threshold (9mΩ in this embodiment) is then compared to accurately reflect the degree of heater loss. When the real-time resistance value is between 16mΩ and 20mΩ and remains between 16mΩ and 20mΩ for 60 consecutive days, it indicates that the actual working efficiency of the heater is less than 120kW, and a secondary early warning signal for the current is generated. Step S3: The hierarchical interlocking control module receives the secondary warning signal of the current generated in step S2 and generates the first audible and visual alarm signal. Step S4: The execution module receives the secondary warning signal and controls the first audible and visual alarm device to operate (the LED yellow light turns on and the buzzer starts). The graphite heater maintains normal operation and heating status, which can meet basic production needs. Step S5: Repeat steps S1-S4. If the fault is not handled in time, and the real-time resistance exceeds 20mΩ, the actual efficiency of the heater will be less than 100kW, seriously affecting the heating efficiency and process progress, and failing to meet the heating requirements within the specified time. The data processing and early warning module outputs a three-level early warning signal for the current monitoring of the deposition furnace heating circuit and transmits it to the graded interlocking control module. The graded interlocking control module outputs the shutdown interlocking control command and the second audible and visual alarm signal corresponding to the three-level early warning signal. The execution module receives the shutdown interlocking control command and the second audible and visual alarm signal output by the graded interlocking control module, and the shutdown interlocking control command and the second audible and visual alarm signal corresponding to the current monitoring of the deposition furnace heating circuit are executed. The interlock control commands include: the power control component for driving the deposition furnace operating mechanism to cut off the power to the operating mechanism; the power control component for driving the deposition furnace heating system to cut off the power to the heating system; the shutdown component for driving the deposition furnace air intake system to close the air intake valve of the deposition furnace air intake system; and the power control component for driving the deposition furnace vacuum pumping to cut off the power to the vacuum pumping equipment. Simultaneously, operations such as stopping the deposition furnace heating, cutting off all gas paths, and shutting down all operating mechanisms are executed. A second audible and visual alarm signal is transmitted to the second audible and visual alarm device, controlling the red light of the audible and visual alarm device to illuminate and activating the wind turbine alarm, achieving comprehensive protection under extreme fault conditions. Personnel can then stop the machine and replace the heater. Example 4

[0055] The pressure and temperature proactive early warning and tiered interlocking process includes the following steps: Step S1: After the deposition furnace process is started, the pressure sensor monitors the pressure inside the deposition furnace in real time. Step S2: After performing linear transformation on the collected pressure data through the data processing and early warning module, the accurate furnace pressure value is obtained. In this embodiment, the deposition process is preset to operate at a pressure of 2.5 kPa and a temperature of 1100°C. When the pressure inside the furnace is detected to be higher than 2.5 kPa but lower than 3.1 kPa, a secondary warning signal corresponding to the pressure is generated. Step S3: The graded interlocking control module receives the secondary warning signal corresponding to the pressure generated in step S2, generates the first audible and visual alarm signal and the corresponding adjustment interlocking control command. The adjustment interlocking control command is to control the air intake adjustment control component to reduce the air intake or to control the vacuum adjustment control component to open another pump group. Step S4: The execution module receives the adjustment interlock control command and controls the first audible and visual alarm device to operate (the LED yellow light turns on and the buzzer starts), the air intake adjustment control component controls to reduce the air intake volume or the vacuum adjustment control component controls to open another pump group. Step S5: Repeat steps S1-S4. If the fault is not handled in time, the furnace pressure will continue to rise. When the furnace pressure exceeds 3.1 kPa and lasts for more than 30 seconds, the data processing and early warning module outputs the three-level early warning signal corresponding to the furnace pressure monitoring and transmits it to the graded interlocking control module. The graded interlocking control module outputs the shutdown interlocking control command and the second audible and visual alarm signal corresponding to the three-level early warning signal. The execution module receives the shutdown interlocking control command and the second audible and visual alarm signal output by the graded interlocking control module. The shutdown interlocking control command corresponding to the furnace pressure monitoring includes driving the power control component of the deposition furnace operating mechanism to cut off the power supply of the operating mechanism, driving the power control component of the deposition furnace heating system to cut off the power supply of the heating system, driving the shutdown component of the deposition furnace air intake system to close the air intake valve of the deposition furnace air intake system, and driving the power control component of the deposition furnace vacuum pumping system to connect the power supply of the vacuum pumping equipment. Simultaneously, the deposition furnace heating is stopped, all air intake paths are cut off, all operating mechanisms are closed, and all vacuum pumping equipment is started to begin pumping and depressurizing to avoid excessive furnace pressure causing damage to materials and equipment. The second audible and visual alarm signal is transmitted to the second audible and visual alarm device, which controls the red light of the audible and visual alarm device to light up and activates the wind turbine alarm, thus achieving comprehensive protection under extreme fault conditions. Example 5

[0056] Furnace door position detection and interlock control includes the following steps: Step S1: After the deposition furnace process is started, the proximity switch monitors the furnace door rising and falling to the position signals in real time, and the limit switch monitors the furnace door locking and opening to the position signals in real time. Step S2: After processing the four sets of position signals (furnace door raised to position, lowered to position, locked to position, and opened to position) collected by the data processing and early warning module, the accurate four sets of position signals (furnace door raised to position, lowered to position, locked to position, and opened to position) are obtained. When the data processing and early warning module does not receive the furnace door raising, lowering, locking, or opening signals within a preset time, it generates a level one early warning signal for position monitoring. Step S3: The cascaded interlocking control module receives the first-level warning signal corresponding to the position detection generated in step S2, generates a light warning signal, and uploads the first-level warning signal to the host computer. Step S4: The execution module receives the light warning signal output by the cascade control module and controls the yellow light of the LED tri-color light to turn on, and the host computer displays a furnace door not in position prompt signal; Step S5: Repeat steps S1-S4. If the operator needs to adjust the furnace door to the corresponding position according to the operating specifications, the deposition furnace can continue the deposition operation only after the data processing and early warning module receives a valid signal and the early warning signal is automatically released, ensuring that the furnace door operation is safe and reliable and the process flow is executed in an orderly manner.

[0057] Through actual debugging and verification, the early warning and interlocking functions of the system and method of this invention in all dimensions meet the design requirements, and the overall performance is significantly better than that of the existing system.

[0058] In terms of methane early warning, it can detect the precursors of trace methane leaks 15 minutes in advance, and the response time of the graded interlocking action is less than 10ms. After minor faults are dealt with, the process can continue to run without product scrapping; serious faults can be completely shut down within 2 seconds without any safety accidents.

[0059] In terms of water flow and temperature warning, it can effectively filter out equipment water flow fluctuations caused by temporary water use fluctuations in the factory, avoid accidental shutdowns that could result in product losses, and handle serious malfunctions within 2 seconds. There have been no incidents of damage to the heating copper electrodes or fires caused by excessively high water temperature or low water flow.

[0060] Regarding early warning for graphite heaters, based on the trend analysis of operating parameters, a severe wear warning for the heater can be issued two months in advance. After the warning is triggered, the equipment can still maintain normal production conditions without immediate shutdown for maintenance. This ensures production continuity and provides staff with ample time for spare parts procurement and maintenance plan development, significantly reducing operation and maintenance costs and production risks.

[0061] In terms of pressure and temperature early warning, it can accurately identify pressure fluctuations in the range of 2.5KPa-3.1KPa. The secondary early warning response is timely, and the host computer simultaneously pops up solutions such as "reduce air intake" and "start one pump group" to help with rapid handling. When the furnace pressure exceeds 3.1kPa and triggers the tertiary alarm for 30 seconds, the system completes the gas cut-off and pressure reduction of the entire pump group within 1 second. The rate is stable and controllable, with no damage to materials or equipment, ensuring the stability of the 1100℃ process and no quality problems.

[0062] During the debugging of the furnace door position detection and interlock control, the system can accurately identify the furnace door's rising, falling, locking, and opening states. The response time for non-positioning signals is ≤0.5s, with no false alarms or missed detections. After an early warning, the equipment is prohibited from automatically performing subsequent actions, allowing only manual adjustments to avoid equipment malfunctions and process disruptions. After multiple debugging sessions, the furnace door position detection is accurate, the interlock logic is rigorous, and the system operates stably under 1100℃ process conditions, without any malfunctions, material damage, or quality issues caused by abnormal furnace door positions, meeting the safety requirements for precision deposition furnace operation.

[0063] Overall, the system and method of this invention significantly improve the safety protection level and production efficiency of deposition furnace operation, and have good practical application value.

[0064] The present invention provides a storage medium on which a computer program is stored, and the computer program executes the above-described method steps when it is run.

[0065] Regarding the specific structure of this invention, it should be noted that the connection relationships between the various component modules used in this invention are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this invention without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this invention, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A carbon deposition furnace control system with active early warning and hierarchical interlocking, characterized in that, include: The multi-dimensional monitoring module integrates various types of process parameter detection devices and safety protection devices, which are distributed in key parts of the deposition furnace to collect the furnace's operating parameters in real time. The data processing and early warning module is communicatively connected to the multi-dimensional monitoring module and is used to output graded early warning signals according to the operating parameters and preset early warning logic. The hierarchical interlocking control module communicates with the data processing and early warning module. It is used to match the corresponding interlocking strategy according to the level of the hierarchical early warning signal and generate corresponding protection instructions. The protection instructions include one or more of the following: outputting light warning signals, outputting audible and visual alarm signals, and outputting interlocking control instructions. The interlocking control instructions include shutdown interlocking control instructions and adjustment interlocking control instructions. The execution module includes multiple execution units, which include a shutdown control unit and a process parameter adjustment unit. Both the shutdown control unit and the process parameter adjustment unit are communicatively connected to the hierarchical interlocking control module to receive interlocking control commands and drive the corresponding execution units to perform protective actions.

2. The active early warning and hierarchical interlocking coordinated carbon deposition furnace control system according to claim 1, characterized in that, The process parameter detection device includes at least: A gas concentration sensor is deployed inside the gas source cabinet of the deposition furnace to monitor the concentration of combustible gas in real time. Temperature sensor, used to collect the furnace body temperature of the deposition furnace; Pressure sensors are used to monitor the pressure inside the deposition furnace in real time. A flow sensor is used to collect the water flow rate and water temperature in the cooling water circuit; The current detection unit, including a shunt, is used to collect the current in the heating circuit of the deposition furnace; Safety protection devices should include at least: The position detection unit includes a proximity switch and a limit switch. The proximity switch is used to detect the signals of the furnace door being raised to the correct position and lowered to the correct position, and the limit switch is used to detect the signals of the furnace door being locked to the correct position and opened to the correct position. The emergency stop device includes a local emergency stop button on the control box and a safety emergency stop button on the equipment. The two emergency stop buttons are set independently and both use fail-safe normally closed contacts to connect to the data processing and early warning module. Both the local emergency stop button on the control box and the safety emergency stop button on the equipment are linked to the shutdown control unit to trigger a global safety interlock in an emergency and have the highest control priority.

3. The active early warning and hierarchical interlocking coordinated carbon deposition furnace control system according to claim 1, characterized in that, The data processing and early warning module calculates the rate of change, average value, and fluctuation amplitude of the operating parameters at preset intervals. When the current operating parameters exceed their respective preset thresholds, it generates corresponding first-level, second-level, and third-level early warning signals.

4. The active early warning and hierarchical interlocking coordinated carbon deposition furnace control system according to claim 2, characterized in that, The hierarchical interlocking control module is configured as follows: When a Level 1 warning signal generated by the data processing and warning module is received, a light warning signal is output, but no interlocking control command is generated. When the secondary warning signal generated by the data processing and early warning module is received, the first audible and visual alarm signal is output, and an adjustment interlock control command is generated as needed; When the data processing and early warning module receives the level 3 early warning signal, it generates a shutdown interlock control command and a second audible and visual alarm signal. The shutdown interlock control command controls the shutdown control unit to perform corresponding actions. When the emergency stop device is triggered, the generation and execution of the shutdown interlock control command are subject to the highest control priority of the emergency stop device.

5. The active early warning and hierarchical interlocking coordinated carbon deposition furnace control system according to claim 1, characterized in that, The shutdown control unit includes at least the power control components for the operating mechanism of the deposition furnace, the power control components for the heating system of the deposition furnace, the shutdown components for the gas inlet system of the deposition furnace, and the power control components for the vacuuming of the deposition furnace. The power control component for the operating mechanism of the deposition furnace is used to control the power supply of the operating mechanism; the power control component for the heating system of the deposition furnace is used to control the power supply of the heating system; the shutdown component for the gas inlet system of the deposition furnace is used to control the gas inlet valve of the gas inlet system; and the power control component for the vacuum pumping of the deposition furnace is used to control the power supply of the vacuum pumping equipment.

6. The active early warning and hierarchical interlocking coordinated carbon deposition furnace control system according to claim 1, characterized in that, The process parameter adjustment unit includes at least an air intake adjustment control component, a vacuum adjustment control component, and a heating system adjustment control component. The air intake regulation and control component is used to control the air intake flow rate and air intake speed of the deposition furnace. The vacuum regulation and control component is used to control the gas flow rate and gas extraction speed of the deposition furnace in order to regulate the pressure inside the deposition furnace. The heating system adjustment and control component is used to control the heating power of the heating system.

7. The active early warning and hierarchical interlocking coordinated carbon deposition furnace control system according to claim 1, characterized in that, The data processing and early warning module and the hierarchical interlocking control module are both integrated into the PLC controller.

8. A method for controlling a carbon-carbon deposition furnace with active early warning and hierarchical interlocking, comprising a carbon-carbon deposition furnace control system with active early warning and hierarchical interlocking as described in any one of claims 1-7, characterized in that, Includes the following steps: Step S1: Collect the operating parameters of the deposition furnace in real time through the multi-dimensional monitoring module; Step S2: The operating parameters are processed by the data processing and early warning module, and a graded early warning signal is generated based on the preset early warning logic; Step S3: The hierarchical interlocking control module matches the corresponding interlocking strategy according to the received hierarchical warning signal level and generates corresponding protection instructions. The protection instructions include one or more of the following: outputting light warning signals, outputting audible and visual alarm signals, and outputting interlocking control instructions. Step S4: The execution module responds to the interlocking control command and performs the corresponding protective action; Step S5: Repeat steps S1-S4 until the deposition operation is completed.

9. The carbon deposition furnace control method with active early warning and hierarchical interlocking as described in claim 8, characterized in that, The protective actions include controlling the shutdown control unit and controlling the process parameter adjustment unit.

10. A storage medium, characterized in that, The storage medium stores a computer program, which, when run, performs the steps of the method as described in any one of claims 8-9.

Images