Electrostatic enrichment and size sorting microstructure and method for lunar dust submicron particles

Abstract

The application provides an electrostatic enrichment and size separation microstructure and method of lunar dust submicron particles, and relates to the technical field of moon exploration. The application solves the problems of low concentration and difficult capture and multiple particle sizes and difficult separation of submicron lunar dust particles in the extreme environment of the moon. The application comprises a transparent structure layer one, an annular insulating layer, a transparent structure layer two and a transparent substrate layer which are stacked from top to bottom, and a programmable electric field driving unit. The transparent structure layer one is deposited with a plurality of thin film electrodes one, and the transparent structure layer one is provided with a plurality of sample inlet holes which are communicated with height limiting cavities. The transparent structure layer two is deposited with a plurality of thin film electrodes two, the number of the thin film electrodes two is same as that of the thin film electrodes one, and the thin film electrodes two are parallel to each other to form a plurality of electrode partitions for generating a mixed electric field of direct current and alternating current synchronous superposition. The upper surface of the transparent substrate layer is deposited with an optical sensor. The application is mainly used for realizing the electrostatic adsorption enrichment and dielectrophoresis separation of submicron lunar dust.

Description

Technical Field

[0001] This invention relates to the field of lunar exploration engineering technology, and in particular to a microstructure and method for electrostatic enrichment and size sorting of submicron lunar dust particles. Background Technology

[0002] In lunar exploration missions, the accurate detection of submicron-sized lunar dust (particle size 200-800 nm) relies on high-quality sample preprocessing. Existing technologies have significant limitations: traditional contact sampling (such as mechanical scraping) cannot achieve enrichment and easily damages the original state of the lunar dust; passive adsorption methods (such as adhesive films) lack sorting capabilities and easily lead to particle agglomeration; while existing high-sensitivity optical detection methods (such as metasurface sensing) lack a pre-enrichment-sorting process, resulting in a severely insufficient signal-to-noise ratio when dealing with low-concentration, multi-particle-size mixed lunar dust.

[0003] The synergistic effect of dielectric electrophoresis and electrostatic adsorption is an ideal technical approach for solving the sorting and enrichment of submicron particles. By controlling the frequency and intensity of the electric field, precise sorting can be achieved based on the particle charge-mass ratio (q / m) and dielectric polarity differences. Using transparent electrodes and combining them with a height-limiting cavity structure can avoid obstructing the subsequent detection optical path and control the particle movement space, thereby realizing the integration of "enrichment-sorting-detection". Summary of the Invention

[0004] This invention proposes a microstructure and method for electrostatic enrichment and size sorting of submicron lunar dust particles, aiming to solve the technical problems of low-concentration capture and multi-size sorting of submicron lunar dust particles under the extreme environment of the moon. The invention forms a structure with a limited-height cavity by sandwiching an annular insulating layer between a pair of transparent structural layers with deposited thin-film electrodes. Through differentiated design of the local conductivity characteristics of the opposing surfaces of the transparent structural layers, multiple electrode zones are formed using the thin-film electrodes. This creates a gradient electric field channel distributed along the particle movement direction within the limited-height cavity. By controlling the AC frequency, field strength, and DC field strength ratio of each electrode zone, a mixed electric field with synchronously superimposed DC and AC is generated within the limited-height cavity, achieving "electrostatic adsorption enrichment" and "dielectrophoretic sorting" of submicron lunar dust.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a microstructure for electrostatic enrichment and size sorting of lunar dust submicron particles, comprising a transparent structural layer one, an annular insulating layer, a transparent structural layer two, and a transparent base layer stacked from top to bottom, and a programmable electric field driving unit, wherein the lower surface of the transparent structural layer one, the inner wall of the annular insulating layer, and the upper surface of the transparent structural layer two form a height limiting cavity. The lower surface of the transparent structural layer 1 is arrayed with multiple thin film electrodes 1, and the transparent structural layer 1 is longitudinally provided with multiple sample inlet holes communicating with the height limiting cavity; The upper surface of the second transparent structure layer is arrayed with multiple thin film electrodes, the number of which is the same as that of the first thin film electrode. They are aligned in parallel to form multiple electrode partitions to generate a mixed electric field that is simultaneously superimposed with DC and AC. An optical sensor is deposited on the upper surface of the transparent substrate layer to monitor particle deposition within the height-limiting cavity; The programmable electric field driving unit is connected to thin film electrode one and thin film electrode two. The programmable electric field driving unit integrates a multi-channel independent switch matrix, which can individually control the AC frequency, field strength and DC field strength ratio of each electrode zone.

[0006] Furthermore, the transparent structural layer one, transparent structural layer two, and transparent substrate layer are all made of quartz glass, and the annular insulating layer is made of silicon nitride.

[0007] Furthermore, the transparent structural layer one and the transparent structural layer two have the same dimensions. The transparent structural layer one has a length of 10-20 mm, a width of 5-10 mm, and a thickness of 300-500 μm; the annular insulating layer has a thickness of 5-50 μm.

[0008] Furthermore, the first thin-film electrode is a graphene or ITO (indium tin oxide) thin film; the second thin-film electrode is a titanium alloy thin film.

[0009] Furthermore, the number of the first thin film electrode is 3-5; the first thin film electrode has a length of 10-20 mm, a width of 100-500 μm, and a thickness of 50-200 nm; the second thin film electrode has a length of 10-20 mm, a width of 100-500 μm, and a thickness of 100-300 nm.

[0010] Furthermore, the hybrid electric field, which is a synchronous superposition of DC and AC, has a DC electric field strength of 0.1-2 MV / m, an AC electric field strength of 0.5-5 MV / m, and a frequency range of 100 Hz-5 MHz.

[0011] A method for electrostatic enrichment and size sorting of submicron lunar dust particles, utilizing a microstructure for electrostatic enrichment and size sorting of submicron lunar dust particles, specifically includes the following steps: S1. Device initialization: The programmable electric field drive unit loads initial parameters; S2. Dust enrichment and sorting: Each electrode zone is controlled by a programmable electric field driving unit to form a mixed electric field containing DC and AC components superimposed synchronously in the height-limited cavity. Charged particles are enriched by electrostatic adsorption force, and particles of various sizes are sorted to multiple electrode zones by dielectric force. S3. Closed-loop control: The enrichment amount C and the sorting purity threshold D of the particles in the height-limiting cavity are monitored in real time by optical sensors. The parameters of the programmable electric field drive unit are adjusted to optimize the enrichment and sorting effect. When both the enrichment amount C and the sorting purity threshold D reach the target value, the electric field is stopped.

[0012] Furthermore, in step S2, the electrode partitions for sorting particles with a diameter of 200-400nm are subjected to an AC electric field with a frequency of 1-5MHz and a field strength of 2-5MV / m. Electrode sections for sorting particles with a diameter of 400-600 nm are subjected to an AC electric field with a frequency of 1 kHz-1 MHz and a field strength of 1-2 MV / m. Electrode sections for sorting particles with a diameter of 600-800 nm are subjected to an AC electric field with a frequency of 100 Hz-1 kHz and a field strength of 0.5-1 MV / m.

[0013] Furthermore, in step S3, the target values ​​are: enrichment amount C = 100-500 particles / cm²; sorting purity threshold D ≥ 90%.

[0014] A cleaning method for electrostatic enrichment and size sorting of submicron lunar dust particles, characterized by comprising the following steps: T1. Each electrode zone is controlled by a programmable electric field driving unit to apply an AC electric field with a frequency of 1-10MHz and a field strength of 0.1-0.5MV / m. T2. The particle deposition concentration in the height-limiting cavity is monitored in real time by optical sensors. When the deposition concentration is ≤5 particles / cm² and remains stable for 3 consecutive seconds, the cleaning is determined to be complete and the cleaning electric field is stopped.

[0015] Compared with existing technologies, the beneficial effects of the electrostatic enrichment and size sorting microstructure and method for submicron lunar dust particles described in this invention are: 1. Integrated microstructure design: The present invention uses a transparent structural layer 1, an annular insulating layer, a transparent structural layer 2 and a transparent base layer stacked from top to bottom to form a microstructure body with a limited height cavity. Combined with the synergistic design of thin film electrodes and limited height cavity, the "enrichment-sorting-detection" of lunar dust particles is seamlessly integrated, while effectively suppressing particle diffusion in the lunar vacuum environment and significantly improving sorting accuracy.

[0016] 2. Multi-physics field collaborative sorting strategy: Based on the charge-mass ratio and dielectric polarity difference of lunar dust particles, this invention proposes a collaborative mechanism that combines DC electrostatic adsorption and AC dielectric electrophoretic sorting. By using a programmable electric field driving unit to individually control the AC frequency, field strength and DC field strength ratio of each electrode zone, the invention achieves synchronous and high-precision sorting of 200-800nm ​​submicron lunar dust particles within a micron-level height-limited cavity.

[0017] 3. Intelligent closed-loop control and cyclic operation mode: This invention introduces an "adaptive adjustment algorithm based on particle deposition concentration-electric field parameter mapping model", which is a closed-loop control algorithm based on real-time monitoring. It "integrates the particle diffusion characteristics and dielectric separation rules under the lunar vacuum environment into the adjustment logic to achieve dual-objective optimization of 'enrichment accuracy + separation accuracy'", which is different from the existing closed-loop control that only targets a single parameter.

[0018] 4. Device Adaptability: This invention is coated with an anti-radiation coating and has undergone performance calibration and ground verification, ensuring high reliability and long lifespan in the extreme lunar environment. It achieves non-contact, real-time, and synchronous detection of lunar dust concentration, particle size, and spatial distribution, with a fast response speed, providing dynamic data support for the operation and maintenance of lunar exploration equipment. This device is adaptable to the residual pressure and high / low temperature environment of the moon, and features miniaturization and radiation resistance. It can be directly integrated into the pre-sample processing module of lunar exploration equipment, providing high-purity, high-concentration sample preprocessing support for high-precision optical detection of submicron lunar dust. Attached Figure Description

[0019] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings: Figure 1 This invention relates to an explosion-view microstructure for the electrostatic enrichment and size sorting of submicron lunar dust particles. Figure 1 ; Figure 2 This invention relates to an explosion-view microstructure for the electrostatic enrichment and size sorting of submicron lunar dust particles. Figure 2 ; Figure 3 This is a diagram showing the direction of particle motion when an electrostatic force is generated by applying a DC electric field inside the height-limiting cavity described in this invention. Figure 4 This is a diagram showing the particle motion direction when an alternating electric field is applied inside the height-limiting cavity of the present invention to generate dielectric force; Figure 5 This is a particle motion pattern when a hybrid electric field of synchronously superimposed DC and AC is applied inside the height-limiting cavity described in this invention. Figure 6 This is a schematic diagram of the electrostatic enrichment and size sorting microstructure for lunar dust submicron particles, as described in this invention, assembled onto a lunar exploration device. Figure 7 An exploded view of the ground-based verification of the electrostatic enrichment and size sorting microstructure of lunar dust submicron particles described in this invention. In the diagram: 1-Transparent structural layer one; 2-Annular insulating layer; 3-Transparent structural layer two; 4-Transparent substrate layer; 11-Thin film electrode one; 12-Sample inlet; 31-Thin film electrode two; H represents the height of the cavity; FE represents the electrostatic force; FDEP represents the dielectric force. 5-Thermoelectric cooling element; 6-Sealed structure. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of the present invention can be combined with each other, and the described embodiments are only some embodiments of the present invention, not all embodiments.

[0021] I. Detailed Implementation Method 1, see [link / reference] Figure 1-7 This embodiment describes a microstructure for electrostatic enrichment and size sorting of lunar dust submicron particles, comprising a transparent structural layer 1, an annular insulating layer 2, a transparent structural layer 3, and a transparent base layer 4 stacked from top to bottom, as well as a programmable electric field driving unit. The lower surface of the transparent structural layer 1, the inner wall of the annular insulating layer 2, and the upper surface of the transparent structural layer 3 form a height-limiting cavity. The lower surface of the transparent structural layer 1 has an array of thin film electrodes 11 deposited on it. The transparent structural layer 1 has a plurality of sample inlet holes 12 that communicate with the height limiting cavity in the longitudinal direction. Alternatively, micropores that communicate with the height limiting cavity and are used for sample inlet can be opened on the side wall of the annular insulating layer 2. The upper surface of the transparent structure layer 2 3 is arrayed with multiple thin film electrodes 2 31. The number of thin film electrodes 2 31 is the same as that of thin film electrodes 1 11. They are aligned in parallel to form multiple electrode partitions to generate a mixed electric field of DC and AC synchronous superposition. An optical sensor 41 is deposited on the upper surface of the transparent substrate layer 4 to monitor the particle deposition in the height-limiting cavity. The optical sensor is located directly below the transparent structural layer 3 and serves as a closed-loop control unit of the device, dynamically adjusting the electric field parameters and deposition time based on feedback signals. The programmable electric field driving unit is connected to thin film electrode 11 and thin film electrode 31. The programmable electric field driving unit integrates a multi-channel independent switch matrix, which can individually control the AC frequency, field strength and DC field strength ratio of each electrode zone.

[0022] Preferably, the transparent structural layer 1, transparent structural layer 3, and transparent base layer 4 are made of quartz glass with high light transmittance and low sheet resistance, with a light transmittance of ≥90% to ensure the penetration of the subsequent detection optical path, and the annular insulating layer 2 is made of silicon nitride.

[0023] Preferably, the transparent structural layer 1 and the transparent structural layer 3 have the same dimensions. The transparent structural layer 1 has a length of 10-20 mm, a width of 5-10 mm, and a thickness of 300-500 μm. The annular insulating layer 2 has a thickness of 5-50 μm.

[0024] Preferably, the first thin film electrode 11 is a graphene or ITO thin film; the second thin film electrode 31 is a titanium alloy thin film.

[0025] Preferably, the number of thin film electrodes 11 is 3-5; the dimensions of the thin film electrodes 11 are 10-20 mm in length, 100-500 μm in width, and 50-200 nm in thickness; the dimensions of the thin film electrodes 31 are 10-20 mm in length, 100-500 μm in width, and 100-300 nm in thickness.

[0026] See attached document Figure 5 Preferably, the mixed electric field of synchronous superposition of DC and AC exhibits an intensity pattern of "strong in the middle and weak on both sides", wherein the DC electric field intensity is 0.1-2MV / m, the AC electric field intensity is 0.5-5MV / m, and the frequency range is 100Hz-5MHz.

[0027] A method for electrostatic enrichment and size sorting of submicron lunar dust particles, utilizing a microstructure for electrostatic enrichment and size sorting of submicron lunar dust particles, specifically includes the following steps: S1. Device initialization: The programmable electric field drive unit loads initial parameters; S2. Dust Enrichment and Sorting: Each electrode zone is controlled by a programmable electric field driving unit to form a mixed electric field containing synchronously superimposed DC and AC components within the height-limited cavity. (See attached diagram.) Figure 3-5 The DC component provides a constant electrostatic force FE, which pulls lunar dust particles of all sizes along the normal direction of the electrode layer (vertically pointing to the deposition surface below) and rapidly gathers them in the lower electrode layer region to achieve enrichment. At the same time, the AC component is superimposed on the DC electric field and generates a differentiated dielectrophoretic force FDEP along the sorting zone direction (horizontal direction), which ultimately achieves simultaneous sorting of multiple particle sizes to the corresponding zones. S3. Closed-loop control: The enrichment amount C and the sorting purity threshold D of the particles in the height-limiting cavity are monitored in real time by optical sensor 41. The parameters of the programmable electric field driving unit are adjusted to optimize the enrichment and sorting effect. When both the enrichment amount C and the sorting purity threshold D reach the target value, the electric field is stopped.

[0028] In step S2, the electrode partitions for sorting particles with a diameter of 200-400nm are subjected to an AC electric field with a frequency of 1-5MHz and a field strength of 2-5MV / m. Electrode sections for sorting particles with a diameter of 400-600 nm are subjected to an AC electric field with a frequency of 1 kHz-1 MHz and a field strength of 1-2 MV / m. Electrode sections for sorting particles with a diameter of 600-800 nm are subjected to an AC electric field with a frequency of 100 Hz-1 kHz and a field strength of 0.5-1 MV / m.

[0029] In step S3, the particle deposition concentration A of each zone detected by the optical sensor is used as the feedback signal, and the preset target enrichment amount C and the sorting purity threshold D are used as dual standards to dynamically adjust the "DC electric field strength (affecting the enrichment rate)" and the "AC electric field frequency / field strength (affecting the sorting accuracy)". The target values ​​are: enrichment amount C = 100-500 particles / cm², deviation ≤ ±10 particles / cm²; sorting purity threshold D ≥ 90%.

[0030] Taking an enrichment level C = 10 particles / cm² and a sorting purity threshold D ≥ 90% as an example, when the monitored concentration A < the target value C - 10 particles / cm², the DC electric field strength is increased (by 10%-20%) to improve the enrichment rate; when A > C + 10 particles / cm², the DC electric field strength is decreased (by 5%-10%) to avoid over-deposition; when the sorting purity of a certain zone is < 90%, the AC electric field frequency (±10%) and field strength (±5%) of that zone are finely adjusted to optimize the sorting effect. This algorithm ensures that the enrichment level control deviation is ≤ ±10 particles / cm² and supports a "deposition-measurement-release" cyclic operation, meeting the needs of long-term detection.

[0031] After the test is completed, the programmable electric field driving unit controls each electrode zone to apply a reverse electric field to release particles and achieve recycling. The field strength of the reverse electric field is 1.1-1.5 times that of the original enrichment field strength, and the duration is 5-10 seconds. The electrodes are cleaned periodically with a low-intensity AC electric field. A cleaning method for electrostatic enrichment and size sorting of submicron lunar dust particles comprises the following steps: T1. Each electrode zone is controlled by a programmable electric field driving unit to apply an AC electric field with a frequency of 1-10MHz and a field strength of 0.1-0.5MV / m. T2. The particle deposition concentration in the height-limiting cavity is monitored in real time by optical sensors. When the deposition concentration is ≤5 particles / cm² (the residual threshold after cleaning) and remains stable for 3 consecutive seconds, the cleaning is determined to be complete and the cleaning electric field is stopped.

[0032] The device is covered with a radiation-resistant coating, preferably made of yttrium oxide (Y2O3). The coating must cover the outer surface of all components exposed to the radiation environment, while avoiding critical functional areas (sample inlet 12, light transmission window, conductive areas of thin film electrode 11 and thin film electrode 2 31, and detection window of optical sensor 41).

[0033] The fabrication of the device, including the precision machining and low-temperature bonding assembly processes involved in the fabrication.

[0034] The performance calibration and ground verification of the device were both carried out in a simulated lunar environment cabin. The performance calibration used simulated lunar dust with known particle size to calibrate the device's enrichment efficiency (≥80%) and sorting accuracy (≥90%). See attached document Figure 7 During ground verification, a thermoelectric cooler 5 was attached to the outer wall of the annular insulating layer 2. The thermoelectric cooler 5 was made of bismuth telluride (Bi2Te3) and its size was consistent with the outer wall of the annular insulating layer 2. A sealing structure 6 was set between the transparent structural layer 1 and the annular insulating layer 2, and between the annular insulating layer 2 and the transparent structural layer 3. The sealing structure 6 included a sealing ring made of fluororubber (cross-sectional size 30μm×50μm) and a sealing pressure ring made of titanium alloy (thickness 20μm). The inner diameter of the sealing ring matched the outer diameter of the annular insulating layer 2, and vacuum sealing was achieved through low-temperature bonding. During the initialization phase, the ambient temperature inside the height-limiting cavity is indirectly controlled by the thermoelectric cooling element 5 through the annular insulating layer 2; the sample inlet 12 is reused as an air extraction port, and the height-limiting cavity is evacuated by an external pre-vacuum assembly to reduce the internal pressure of the height-limiting cavity to ≤10. - The pressure is 3Pa (matching the residual pressure environment of the moon), and then the sealing ring elastically deforms to maintain the vacuum level. After the vacuum is completed, the external pre-vacuum assembly is disconnected. At this time, the sample inlet 12 is only used as a lunar dust sample inlet channel to complete the simulation of the lunar environment and verify the feasibility of the device in extreme environments and its long-term working life.

[0035] The embodiments of the present invention disclosed above are merely illustrative of the invention. These embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention.

Claims

1. A microstructure for electrostatic enrichment and size sorting of submicron lunar dust particles, characterized in that, It includes a transparent structural layer 1 (1), an annular insulating layer (2), a transparent structural layer 2 (3) and a transparent base layer (4) stacked from top to bottom, as well as a programmable electric field driving unit. The lower surface of the transparent structural layer 1 (1), the inner wall of the annular insulating layer (2) and the upper surface of the transparent structural layer 2 (3) form a height limiting cavity. The lower surface of the transparent structural layer (1) is arrayed with multiple thin film electrodes (11), and the transparent structural layer (1) is longitudinally provided with multiple sample inlet holes (12) that communicate with the height limiting cavity; The upper surface of the transparent structure layer 2 (3) is arrayed with multiple thin film electrodes 2 (31). The number of thin film electrodes 2 (31) is the same as that of thin film electrodes 1 (11). They are aligned in parallel to form multiple electrode partitions to generate a mixed electric field that is synchronously superimposed with DC and AC. An optical sensor (41) is deposited on the upper surface of the transparent substrate layer (4) for monitoring particle deposition in the height-limiting cavity; The programmable electric field driving unit is connected to thin film electrode one (11) and thin film electrode two (31). The programmable electric field driving unit integrates a multi-channel independent switch matrix, which can individually control the AC frequency, field strength and DC field strength ratio of each electrode zone.

2. The microstructure for electrostatic enrichment and size sorting of submicron lunar dust particles according to claim 1, characterized in that, The transparent structural layer one (1), transparent structural layer two (3) and transparent base layer (4) are all made of quartz glass, and the annular insulating layer (2) is made of silicon nitride.

3. The microstructure for electrostatic enrichment and size sorting of submicron lunar dust particles according to claim 1, characterized in that, The transparent structural layer one (1) and the transparent structural layer two (3) have the same dimensions. The transparent structural layer one (1) has a length of 10-20 mm, a width of 5-10 mm, and a thickness of 300-500 μm. The annular insulating layer (2) has a thickness of 5-50 μm.

4. The microstructure for electrostatic enrichment and size sorting of submicron lunar dust particles according to claim 1, characterized in that, The first thin film electrode (11) is a graphene or ITO thin film; the second thin film electrode (31) is a titanium alloy thin film.

5. The microstructure for electrostatic enrichment and size sorting of submicron lunar dust particles according to claim 1, characterized in that, The number of the first thin film electrode (11) is 3-5; the first thin film electrode (11) has a length of 10-20 mm, a width of 100-500 μm, and a thickness of 50-200 nm; the second thin film electrode (31) has a length of 10-20 mm, a width of 100-500 μm, and a thickness of 100-300 nm.

6. The microstructure for electrostatic enrichment and size sorting of submicron lunar dust particles according to claim 1, characterized in that, The hybrid electric field, which is a synchronous superposition of DC and AC, has a DC electric field strength of 0.1-2 MV / m, an AC electric field strength of 0.5-5 MV / m, and a frequency range of 100 Hz-5 MHz.

7. A method for electrostatic enrichment and size sorting of submicron lunar dust particles, characterized in that, The electrostatic enrichment and size sorting microstructure for submicron lunar dust particles as described in any one of claims 1-6 specifically includes the following steps: S1. Device initialization: The programmable electric field drive unit loads initial parameters; S2. Dust enrichment and sorting: Each electrode zone is controlled by a programmable electric field driving unit to form a mixed electric field containing DC and AC components superimposed synchronously in the height-limited cavity. Charged particles are enriched by electrostatic adsorption force, and particles of various sizes are sorted to multiple electrode zones by dielectric force. S3. Closed-loop control: The enrichment amount C and the sorting purity threshold D of the particles in the height-limiting cavity are monitored in real time by an optical sensor (41). The parameters of the programmable electric field driving unit are adjusted to optimize the enrichment and sorting effect. When both the enrichment amount C and the sorting purity threshold D reach the target value, the electric field is stopped.

8. The method for electrostatic enrichment and size sorting of submicron lunar dust particles according to claim 7, characterized in that, In step S2, the electrode partitions for sorting particles with a diameter of 200-400nm are subjected to an AC electric field with a frequency of 1-5MHz and a field strength of 2-5MV / m. Electrode sections for sorting particles with a diameter of 400-600 nm are subjected to an AC electric field with a frequency of 1 kHz-1 MHz and a field strength of 1-2 MV / m. Electrode sections for sorting particles with a diameter of 600-800 nm are subjected to an AC electric field with a frequency of 100 Hz-1 kHz and a field strength of 0.5-1 MV / m.

9. The method for electrostatic enrichment and size sorting of submicron lunar dust particles according to claim 7, characterized in that, In step S3, the target values ​​are: enrichment amount C = 100-500 particles / cm²; sorting purity threshold D ≥ 90%.

10. A cleaning method for electrostatic enrichment and size sorting of submicron lunar dust particles as described in any one of claims 1-6, characterized in that, Specifically, the steps include the following: T1. Each electrode zone is controlled by a programmable electric field driving unit to apply an AC electric field with a frequency of 1-10MHz and a field strength of 0.1-0.5MV / m. T2. The particle deposition concentration in the height-limiting cavity is monitored in real time by optical sensors. When the deposition concentration is ≤5 particles / cm² and remains stable for 3 consecutive seconds, the cleaning is determined to be complete and the cleaning electric field is stopped.

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