High-precision optical element polishing equipment integrated with online detection function

Abstract

The application provides a high-precision optical element polishing equipment integrated with an online detection function, relates to the technical field of optical element manufacturing structures, and comprises an annular rotating ring cavity which is uniformly provided with seven work station grooves in the circumferential direction, a tray carrier is fixed in each groove and is used for carrying an optical element, a driving mechanism drives the rotating ring cavity to intermittently rotate, so that the workpiece sequentially passes through a feeding station, a first detection station, a first polishing station, a turnover station, a second detection station, a second polishing station and a discharging station, and each functional group is distributed on the outside in correspondence; the tray carrier adopts a negative pressure adsorption system, selectively activatable adsorption pipe groups are arranged in the negative pressure adsorption system, the connection between the adsorption pipe groups and a movable push plate is controlled through a bolt mechanism, workpiece lifting positioning is realized, different sizes of elements are adapted, and flexibility is improved; the equipment is integrated with online detection and polishing functions, the detection group identifies defects through a photographing camera, and the polishing group is targeted for grinding; the turnover group cooperates with a turnover cylinder and a supporting rod to complete double-sided processing of the workpiece. The whole process is automated, and manual intervention is reduced.

Description

Technical Field

[0001] This invention relates to the field of optical component manufacturing structure technology, and in particular to a high-precision optical component polishing device with integrated online inspection function. Background Technology

[0002] Polishing is a critical process in the manufacturing of high-precision optical components (such as optical glass). However, current technologies for mass polishing optical components generally suffer from the following problems: 1. Long auxiliary time: Processes such as loading and unloading, alignment, and measurement usually need to be carried out separately or transferred between different equipment, resulting in a high proportion of non-processing time and low overall efficiency; 2. Poor positioning accuracy: During the transfer and processing, the workpiece is prone to displacement, leading to an increased scrap rate. 3. Poor adaptability: Traditional equipment has difficulty adapting quickly to workpieces of different sizes and shapes, and changesover adjustments are complicated; 4. Lack of online quality control: Inspections before and after polishing are often conducted offline, which cannot provide real-time feedback to guide the polishing process, affecting processing accuracy and consistency; Therefore, there is an urgent need for an automated polishing equipment that can integrate loading and unloading, online inspection, double-sided polishing and automatic flipping functions, and has high adaptability and high efficiency. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a high-precision optical component polishing device with high processing efficiency, accurate positioning, good adaptability and online quality inspection function.

[0004] This invention provides the following technical solution: A high-precision optical component polishing device integrating online inspection function includes: The annular rotating cavity has seven work station slots evenly distributed around its circumference; Seven tray carriers are fixed in the workstation slots respectively to carry optical components; The driving mechanism is used to drive the rotating ring cavity to rotate intermittently, so that the pallet carrier passes through the loading station, the first inspection station, the first polishing station, the flipping station, the second inspection station, the second polishing station and the unloading station in sequence; And corresponding feeding group, first detection group, first polishing group, flipping group, second detection group, second polishing group and unloading group distributed on the outside of the rotating ring cavity.

[0005] This solution achieves continuous flow processing of optical components through a ring-shaped rotary cavity and a seven-station layout, significantly reducing auxiliary time for workpiece positioning and transfer. The stations are distributed according to the process sequence, ensuring seamless integration of loading, inspection, polishing, flipping, and unloading operations, avoiding the waste problems caused by multiple adjustments in traditional equipment. It also improves the overall processing efficiency of the equipment, and integrated online inspection ensures processing accuracy, making it suitable for mass production.

[0006] Preferably, the pallet carrier includes: Negative pressure chamber; Multiple adsorption tube assemblies are vertically arranged in the negative pressure chamber. Each adsorption tube assembly includes a tube body, a microporous suction cup at the top of the tube body, a through hole in the middle of the tube body, a sealing head in the tube body, and a guide rod that connects to the sealing head and passes through the bottom of the tube body. The movable push plate is located below the negative pressure chamber and can be lifted and lowered by a movable push cylinder; The guide rod can be selectively connected and fixed to the movable push plate via a pin mechanism. When connected and fixed, the lifting and lowering of the movable push plate can drive the entire adsorption tube assembly to lift and lower. When not connected, the sealing head is sealed at the top of the tube body, and the adsorption tube assembly is in a non-working state.

[0007] In this solution, the design of the adsorption tube assembly allows for selective activation based on the workpiece size. Precise positioning is achieved through negative pressure adsorption. The movable push plate drives the adsorption tube assembly to rise and fall, enabling the workpiece to flexibly adapt to loading, flipping, and unloading operations. This reduces positioning errors caused by size mismatch, allowing for the processing of different batches of workpieces to improve equipment adaptability and ensure more stable adsorption, thereby reducing the scrap rate. At the same time, there is no need to replace the fixtures, thus shortening the adjustment time.

[0008] Preferably, the latch mechanism includes: The first pin is used to insert and fix the guide rod to the extension plate located at the bottom end of the tube. The second pin is used to insert and fix the guide rod to the movable push plate; The third pin is used to insert and fix the guide rod to the extension plate when the adsorption tube assembly is not in operation.

[0009] In this solution, the pin mechanism simplifies the activation and deactivation process of the adsorption tube assembly. The mechanical fixing method ensures the reliability of the connection. The pin fixing is quick and easy to operate, and it avoids loosening during the lifting process, thereby improving stability. At the same time, the pin is replaceable, so maintenance is also simpler. This improves the durability of the equipment and production efficiency.

[0010] Preferably, the top end of the tube is provided with an outer abutment ring, and the surface of the pallet carrier is provided with a groove that matches the outer abutment ring. When the outer abutment ring is placed in the groove, the top end of the tube is flush with the surface of the pallet carrier.

[0011] In this design, the outer abutment ring ensures that the top of the tube is flush with the surface of the carrier, preventing workpiece displacement or wear during placement. The flush design also reduces vibration, thereby improving positioning accuracy and preventing scratches, thus protecting the workpiece surface. Overall stability is also greatly enhanced, making it better suited for high-precision optical glass processing.

[0012] Preferably, the pallet carrier further includes a lubricating oil chamber located above the negative pressure chamber.

[0013] In this solution, the lubricating oil chamber reduces friction during the lifting and lowering of the adsorption tube assembly, ensuring smooth movement, thereby extending component life, reducing noise and energy consumption, and maintaining the continuity of negative pressure adsorption, thus improving equipment reliability and the continuity of mass production.

[0014] Preferably, a fixed ring is installed inside the rotating ring cavity, and the fixed ring is connected to a vacuum pump through a pipe to provide a constant negative pressure to the negative pressure cavity; the outer ring of the rotating ring cavity is provided with an external gear ring, and the driving mechanism includes a drive motor, the drive end gear of which meshes with the external gear ring.

[0015] In this design, the fixed ring and external gear ring enable stable rotation of the rotating ring cavity and negative pressure supply, thereby ensuring constant negative pressure, reducing pressure fluctuations, and improving the overall automation level and processing consistency of the equipment.

[0016] Preferably, the loading group and the unloading group have the same structure, both including: Tubular guide sleeve, used for stacking workpieces; Multiple sets of first support rods distributed circumferentially along the tubular guide sleeve are driven by the first drive cylinder and can extend vertically into or out of the bottom end of the tubular guide sleeve; Multiple sets of second support rods distributed circumferentially along the tubular guide sleeve are driven by a second drive cylinder and can extend vertically into or out of the tubular guide sleeve, supporting the workpiece around its periphery.

[0017] In this solution, the first support rod, the second support rod, and the tubular guide sleeve work together to realize automatic loading and unloading of stacked workpieces, thereby enabling continuous operation, reducing manual intervention, and preventing workpiece collisions, thus greatly shortening the loading and unloading time and increasing the overall throughput.

[0018] Preferably, the flipping assembly includes a flipping cylinder adapted to the shape of the glass element, and a flipping shaft perpendicular to the axial direction of the flipping cylinder is provided on the outer wall of the flipping cylinder. The flipping cylinder is also provided with a fourth support rod and a fifth support rod perpendicular to the axial direction. The fourth and fifth support rods are used to support and position the front and back of the glass element when it is flipped, and to cooperate with the adsorption tube assembly of the tray carrier to complete the handover operation of the workpiece when the glass element is removed. The flipping process includes the following steps: First, activate the fourth support rod to vertically retract from the tilting cylinder; The adsorption tube assembly adsorbs the reverse side of the workpiece and extends into the tilting cylinder, continuously raising the workpiece until the front of the workpiece abuts against the fifth support rod. The through hole of the adsorption tube assembly extends out of the negative pressure chamber, and the adsorption tube assembly descends to create a gap with the workpiece, thus achieving easy separation. Before the descending adsorption tube assembly, the fifth support rod extends into the tilting cylinder to support the reverse side of the workpiece. The rotating shaft drives the rotating cylinder to rotate 10°. The adsorption tube assembly extends into the flipping cylinder again, the fifth support rod retracts, the adsorption tube assembly adsorbs the front of the workpiece and descends, completing the flipping; The flipping unit is integrated into the flipping station of the annular rotating cavity and works in conjunction with the feeding unit, the inspection unit and the polishing unit to achieve continuous workpiece flow. During the entire flipping process, the negative pressure chamber continuously provides a quantitative negative pressure through a vacuum pump, eliminating the need for additional air intake and exhaust operations.

[0019] In this solution, the flipping assembly works together with the fourth and fifth support rods and the adsorption tube assembly to flip the workpiece, thereby avoiding errors or damage caused by manual flipping, improving flipping accuracy, and seamlessly integrating into the production line, reducing downtime, reducing flipping operation time, and ensuring consistency of front and back processing.

[0020] Preferably, both the first and second detection groups include cameras for online photographic detection of the workpiece surface and identification of defect locations; both the first and second polishing groups include polishing discs, which can selectively polish specific defect locations based on the detection results.

[0021] In this solution, online inspection and polishing are integrated to achieve targeted processing, thereby identifying defects in real time, reducing over-polishing, and improving yield. It is especially suitable for the high-standard requirements of high-precision optical components.

[0022] Preferably, before the adsorption tube assembly descends and detaches from the workpiece, the through hole is outside the negative pressure chamber to avoid negative pressure interference; when the workpiece is re-adsorbed, the through hole re-enters the negative pressure chamber to restore the adsorption force.

[0023] In this solution, the design ensures smooth workpiece handover, prevents workpiece adhesion caused by negative pressure residue, improves operational reliability, reduces air pressure adjustment time, further optimizes equipment efficiency, and is suitable for high-speed batch processing scenarios.

[0024] The beneficial effects of this invention are: This invention discloses a high-precision optical component polishing device integrating online detection functionality. Its core lies in employing a circular assembly line layout, integrating seven functional stations onto a rotatable rotating cavity. Each station is equipped with a tray carrier containing a built-in adsorption tube assembly system. Through a pin mechanism, specific adsorption tube assemblies can be selectively connected to a lifting push plate. When connected, the adsorption tube assembly adsorbs workpieces under negative pressure and moves up and down with the push plate for loading, unloading, and flipping. When disconnected, the adsorption tube assembly is inactive. The entire system requires only a vacuum pump to provide a constant negative pressure. The switching of the adsorption state is controlled by whether the through-holes on the adsorption tube assembly are within the negative pressure chamber. Simple and reliable, the circular production line design enables parallel processing of processes, with continuous operation of loading, unloading, inspection, polishing, and flipping, greatly reducing auxiliary time and improving equipment utilization. Integrated online inspection function achieves closed-loop control of "inspection, positioning, and polishing," allowing for precise polishing of defects and ensuring consistent and high-precision processing quality. Simultaneously, the configurable adsorption tube assembly design allows the equipment to quickly adapt to optical components of different sizes and shapes; simply adjusting the adsorption tube assembly connected to the movable push plate facilitates easy production changes. Thus, from loading and unloading, flipping to inspection and polishing, the entire process is automated, reducing manual intervention and lowering labor intensity and the risk of human error. Attached Figure Description

[0025] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings: Figure 1 This is a top view of the rotating ring cavity. Figure 2 yes Figure 1 A sectional view of the pallet carrier along section AA. Figure 3 This is a structural diagram of the feeding assembly; Figure 4 This is a front view cross-sectional view of the flip-up assembly; Figure 5 This is the side view of the flip group; Markings in the diagram: 1. Rotary ring cavity; 2. Pallet carrier; 3. Loading station; 4. First inspection station; 5. First polishing station; 6. Tilting station; 7. Second inspection station; 8. Second polishing station; 9. Unloading station; 11. Fixing ring; 12. External gear ring; 13. Drive motor; 21. Negative pressure chamber; 22. Adsorption tube assembly; 23. Movable push plate; 24. Movable push cylinder; 28. Lubricating oil chamber; 31. Tubular guide sleeve; 32. First support rod; 33. Second support rod; 61. Tilting cylinder; 62. Tilting shaft; 63. Fourth support rod; 64. Fifth support rod; 221. Tube body; 222. Microporous suction cup; 223. Through hole; 224. Sealing head; 225. Guide rod; 226. Extension plate; 227. External abutment ring; 261. First pin; 262. Second pin; 263. Third pin. Detailed Implementation

[0026] Example 1 like Figure 1-5 As shown, a high-precision optical element polishing device integrating online detection function includes a set of annular rotating cavities 1. The rotating cavities 1 are evenly provided with seven sets of workstation slots along the circumference. Seven sets of tray carriers 2 are fixed in the seven sets of workstation slots. The seven sets of tray carriers 2 are respectively used for the loading station 3, the first detection station 4, the first polishing station 5, the flipping station 6, the second detection station 7, the second polishing station 8, and the unloading station 9 for the batch processing of high-precision optical elements. The outer side of the rotating cavities 1 is provided with loading group, first detection group, first polishing group, flipping group, second detection group, second polishing group, and unloading group along the circumference. The loading group, first detection group, first polishing group, flipping group, second detection group, second polishing group, and unloading group are respectively used to perform loading, front detection, front polishing, flipping, back detection, back polishing, and unloading operations on the workpieces on the seven sets of tray carriers 2 that rotate through.

[0027] The pallet carrier 2 includes a negative pressure chamber 21 for communicating with the annular cavity of the rotating ring cavity 1. A set of fixing rings 11 is also provided on the inner side of the rotating ring cavity 1. The fixing rings 11 are rotatably installed in the rotating ring cavity 1, and a vacuum pump is connected to the fixing rings 11 through a pipe. A set of external gear rings 12 is also provided on the outer ring of the rotating ring cavity 1. The drive end gear of the drive motor 13 is used to mesh with the external gear rings 12 to drive the rotating cavity to rotate.

[0028] The pallet carrier 2 also includes multiple sets of adsorption tube groups 22. Each adsorption tube group 22 includes a microporous suction cup 222 located at the top of the tube body 221 for adsorbing and positioning the surface of the optical glass, multiple sets of through holes 223 located in the middle of the tube body 221 and distributed in the circumferential direction, a sealing head 224 sealed in the tube body 221, and a guide rod 225 connected to the sealing head 224 and passing through the bottom end of the tube body 221. The pallet carrier 2 also includes a set of movable push plates 23 that are pushed and lifted by a movable push cylinder 24. At this point, the adsorption tube assembly 22 connected to the movable push plate 23 can be selected according to the size of the optical glass to be processed. Then, the movable push plate 23 drives the adsorption tube assembly 22 to rise and fall in the negative pressure chamber 21 to adsorb and drive the workpiece to rise and fall to adapt to batch production operations of loading, flipping and unloading. The adsorption tube assembly 22 is connected and fixed to the movable push plate 23 through the guide rod 225. That is, by pulling the guide rod 225 outward to make it pass through the movable push plate 23 until the sealing head 224 connected to the guide rod 225 is placed at the bottom end of the tube body 221, the guide rod 225 can be inserted and fixed to the extension plate 226 at the bottom of the tube body 221 through the first pin 261, and the guide rod 225 can be inserted and fixed to the movable push plate 23 through the second pin 262. Thus, when the movable push plate 23 is driven to rise and fall, the adsorption tube assembly 22 will also rise and fall accordingly. Since the adsorption tube assembly 22 can rise to protrude from the tray carrier 2 to adsorb the workpiece as it descends into the carrier, the adsorption tube assembly 22 connected to the movable push plate 23 can be selected according to the shape of the workpiece. Therefore, it has better adaptability and flexibility. If the adsorption tube assembly 22 connected to the movable push plate 23 is not selected, its sealing head 224 is in the original position at the top of the tube body 221, and its guide rod 225 is inserted and fixed to the extension plate 226 at the bottom of the tube body 221 through the third pin 263. When its through hole 223 and negative pressure chamber 21 When connected, since the sealing head 224 is sealed at the top of the tube body 221, no negative pressure adsorption effect is generated. In order to limit the tube body 221, an outer abutment ring 227 can be provided at the top of the tube body 221. When the outer abutment ring 227 is placed in the groove on the surface of the tray carrier 2, the top of the tube body 221 is flush with the surface of the tray carrier 2. In order to further improve the lubrication of the tube body 221 lifting and lowering, the tray carrier 2 also includes a lubricating oil chamber 28 located above the negative pressure chamber 21.

[0029] The loading and unloading groups have identical structures, each including a set of tubular guide sleeves 31 for circumferentially limiting the workpieces. The tubular guide sleeves 31 are used to stack the workpieces. In the loading group, the loading process is as follows: optical glass elements of the same shape and batch are stacked inside the tubular guide sleeves 31. The working process of the adsorption tube group 22 is as follows: first, the movable push plate 23 drives the adsorption tube group 22 to rise to approach the tubular guide sleeve 31, and it extends into the tubular guide sleeve 31 from its bottom end. When it comes into contact with the bottommost glass element of the filling guide sleeve, it adsorbs the glass element. At this time, multiple circumferentially distributed tubes extending vertically into the bottom end of the tubular guide sleeve 31... The first support rod 32 is driven by the first drive cylinder to retract outward from the tubular guide sleeve 31 when the adsorption tube group 22 supports the glass element. When the adsorption tube group 22 supports the glass element to descend one working position, multiple sets of second support rods 33, which extend vertically into the tubular guide sleeve 31 and are distributed circumferentially, abut against the periphery of the penultimate layer of glass element under the drive of the second drive cylinder. When the adsorption tube group 22 drives the bottom layer of glass element to continue to descend, the bottom layer of glass element detaches from the penultimate layer of glass element, and then the first support rod 32 is driven by the first drive cylinder to support the bottom end of the glass element in the tubular guide sleeve 31 again.

[0030] During material feeding, the second drive cylinder is first activated to drive the second support rod 33 to support the glass element at the bottom of the tubular guide sleeve 31. Then, the first support rod 32 is activated to retract from the tubular guide sleeve 31. The adsorption tube assembly 22 is then set to adsorb and support the bottom side of the glass element, extending it into the bottom end of the filling guide sleeve. The glass element continues to rise. When it contacts the lowest glass element inside the tubular guide sleeve 31, the second support rod 33 retracts out of the tubular guide sleeve 31, causing the glass elements to stack up one working position. At this time, the first support rod 32 can be made at the bottom end of the feeding element, and the through hole of the adsorption tube assembly 22 is separated from the negative pressure chamber 21. When the adsorption tube assembly 22 descends, a gap will be created between it and the glass element. Even if a negative pressure occurs during descent, it can still be easily detached.

[0031] Similarly, the flipping assembly includes a flipping cylinder 61 adapted to the shape of the glass element. A flipping shaft 62 perpendicular to the axial direction of the flipping cylinder 61 is provided on the outer wall of the flipping cylinder 61. A fourth support rod 63 and a fifth support rod 64 perpendicular to the axial direction are provided on the flipping cylinder 61. First, the lower fourth support rod 63 is activated and vertically retracts from the flipping cylinder 61. Then, the adsorption tube assembly 22 adsorbs and supports the reverse side of the glass element, extending it into the flipping cylinder 61. The glass element continues to rise until its front side abuts against the fifth support rod 64. At this point, the through hole of the adsorption tube assembly 22 exits the negative pressure chamber 21. Then, the adsorption tube assembly 22 descends, and... A gap is created between the glass element and the vacuum tube assembly 22, allowing for easy detachment even during descent under negative pressure. Before the descent suction tube assembly 22, the fifth support rod 64 extends again into the tilting cylinder 61 to support the reverse side of the glass element. Then, after the descent suction tube assembly 22 retracts from the tilting cylinder 61, the tilting shaft 62 rotates the tilting cylinder 61 180°. At this point, the suction tube assembly 22 retracts into the tilting cylinder 61, and the fifth support rod 64 retracts from the tilting cylinder 61. As the suction tube assembly 22 lowers the glass element, and before retracting from the tilting cylinder 61, the through hole is again within the negative pressure chamber 21, achieving negative pressure suction of the glass element. Throughout the process, the negative pressure chamber 21 only needs to maintain a fixed negative pressure through a vacuum pump, eliminating the need for other air intake and exhaust operations. This is convenient and significantly saves time on air intake and exhaust, thereby greatly improving processing efficiency.

[0032] Example 2 A high-precision optical component polishing method integrating online detection function, in this embodiment, based on a high-precision optical component polishing device integrating online detection function according to Embodiment 1, includes the following steps: S1: At the loading station, the workpiece is adsorbed and transferred to the pallet carrier 2; S2: Rotating ring cavity 1 rotates to send the workpiece to the first inspection station for front-side defect inspection; S3: Based on the test results, perform targeted polishing on the front side of the workpiece at the first polishing station; S4: At the flipping station, flip the workpiece 180°; S5: Perform reverse defect inspection at the second inspection station; S6: Based on the test results, perform targeted polishing on the reverse side of the workpiece at the second polishing station; S7: At the unloading station, remove the polished workpiece; The transfer, positioning, and flipping of workpieces between workstations are all accomplished through the coordinated action of the adsorption tube group 22 of the tray carrier 2 and each functional group.

[0033] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-precision optical component polishing device integrating online inspection function, characterized in that, include: The annular rotating cavity (1) has seven work station slots evenly opened in its circumference; Seven tray carriers (2) are fixed in the workstation slots respectively to carry optical components; The driving mechanism is used to drive the rotating ring cavity (1) to rotate intermittently, so that the pallet carrier (2) passes through the loading station (3), the first inspection station (4), the first polishing station (5), the flipping station (6), the second inspection station (7), the second polishing station (8) and the unloading station (9) in sequence. And corresponding to the loading station (3), the first inspection station (4), the first polishing station (5), the flipping station (6), the second inspection station (7), the second polishing station (8) and the unloading station (9) distributed on the outside of the rotating ring cavity (1) and corresponding to the loading station (3), the first inspection station (4), the first polishing station (5), the flipping station (6), the second inspection station (7), the second polishing station (8) and the unloading station (9).

2. The high-precision optical component polishing equipment integrating online detection function according to claim 1, characterized in that, The pallet carrier (2) includes: Negative pressure chamber (21); Multiple adsorption tube assemblies (22) are vertically arranged in the negative pressure chamber (21). Each adsorption tube assembly (22) includes a tube body (221), a microporous suction cup (222) at the top of the tube body, a through hole (223) in the middle of the tube body, a sealing head (224) in the tube body, and a guide rod (225) that connects to the sealing head and passes through the bottom of the tube body. The movable push plate (23) is located below the negative pressure chamber (21) and can be driven to rise and fall by the movable push cylinder (24); The guide rod (225) can be selectively connected and fixed to the movable push plate (23) through a pin mechanism. When connected and fixed, the lifting and lowering of the movable push plate (23) can drive the adsorption tube group (22) to lift and lower as a whole. When not connected, the sealing head (224) is sealed at the top of the tube body, and the adsorption tube group (22) is in a non-working state.

3. The high-precision optical component polishing equipment integrating online detection function according to claim 2, characterized in that, The latching mechanism includes: The first pin (261) is used to insert and fix the guide rod (225) to the extension plate (226) located at the bottom end of the tube body; The second pin (262) is used to insert and fix the guide rod (225) to the movable push plate (23); The third pin (263) is used to insert and fix the guide rod (225) to the extension plate (226) when the adsorption tube assembly (22) is in a non-working state.

4. A high-precision optical component polishing device integrating online detection function according to claim 2, characterized in that, The top of the tube body (221) is provided with an outer abutment ring (227), and the surface of the pallet carrier (2) is provided with a groove that matches the outer abutment ring (227). When the outer abutment ring (227) is placed in the groove, the top of the tube body (221) is flush with the surface of the pallet carrier (2).

5. A high-precision optical component polishing device integrating online detection function according to claim 2, characterized in that, The pallet carrier (2) also includes a lubricating oil chamber (28) located above the negative pressure chamber (21).

6. A high-precision optical component polishing device integrating online detection function according to claim 2, characterized in that, A fixed ring (11) is installed inside the rotating ring cavity (1). The fixed ring (11) is connected to a vacuum pump through a pipe to provide a constant negative pressure to the negative pressure cavity (21). The outer ring of the rotating ring cavity (1) is provided with an outer gear ring (12). The driving mechanism includes a drive motor (13), whose drive end gear meshes with the outer gear ring (12).

7. A high-precision optical component polishing device integrating online detection function according to claim 1, characterized in that, The loading and unloading groups have the same structure, both including: Tubular guide sleeve (31) is used for stacking workpieces; Multiple sets of first struts (32) distributed circumferentially along the tubular guide sleeve (31) are driven by the first drive cylinder and can extend vertically into or out of the bottom end of the tubular guide sleeve (31); Multiple sets of second support rods (33) distributed circumferentially along the tubular guide sleeve (31) are driven by the second drive cylinder and can extend vertically into or out of the tubular guide sleeve (31) and support the workpiece.

8. A high-precision optical component polishing device integrating online detection function according to claim 1, characterized in that, The flipping assembly includes a flipping cylinder (61) adapted to the shape of the glass element. A flipping shaft (62) perpendicular to the axial direction of the flipping cylinder (61) is provided on the outer wall of the flipping cylinder (61). A fourth support rod (63) and a fifth support rod (64) perpendicular to the axial direction are also provided on the flipping cylinder (61). The fourth support rod (63) and the fifth support rod (64) are used to support and position the front and back of the glass element when flipping the glass element, and to cooperate with the adsorption tube assembly (22) of the tray carrier (2) to complete the handover operation of the workpiece when removing the glass element.

9. A high-precision optical component polishing device integrating online detection function according to claim 1, characterized in that, Both the first and second detection groups include cameras for online photographic detection of the workpiece surface and identification of defect locations; both the first and second polishing groups include polishing and grinding discs, which can selectively polish specific defect locations based on the detection results.

10. A high-precision optical component polishing device integrating online detection function according to claim 2, characterized in that, Before the adsorption tube assembly descends and detaches from the workpiece, the through hole is outside the negative pressure chamber to avoid negative pressure interference; when the workpiece is re-adsorbed, the through hole re-enters the negative pressure chamber to restore the adsorption force.

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