A target pressure maintaining device

Abstract

The application relates to a target material pressure maintaining device which comprises a base, a first beam frame, a second beam frame, a mounting table and a pressure boosting cylinder, the first beam frame and the second beam frame are arranged on the top of the base in parallel with each other, the mounting table is arranged above the first beam frame and the second beam frame, and a plurality of first pistons and second pistons are further connected to the mounting table; the pressure boosting cylinder generates upward reaction force when working, the mounting table is also subjected to upward force because the pressure boosting cylinder is arranged on the mounting table, the cooperation between the mounting table and the first beam frame and the second beam frame is loosened, if the first piston rod is arranged on the lower side of the first beam frame and the second piston rod is arranged on the lower side of the second beam frame, the first piston rod and the second piston rod can bear the reaction force borne by the mounting table, the cooperation between the mounting table and the first beam frame and the second beam frame can be prevented from being loosened, and the service life of the application is prolonged.

Description

Technical Field

[0001] This invention relates to the field of pressure holding devices, and more particularly to a pressure holding device for a target material. Background Technology

[0002] Metal targets are materials used for bombardment by high-speed charged particles and are mainly used in semiconductor chip manufacturing, display manufacturing, photovoltaic cell packaging, optical coating and decorative coating.

[0003] After welding, metal targets need to be held under pressure. This involves continuously applying pressure to the metal target while slowly reducing its temperature. To meet the needs of automated production, a pressure holding device is required. However, the pressure booster cylinder in the pressure holding device is also subject to a reaction force while applying pressure to the metal target, which affects the connection between the pressure booster cylinder and other structures. In particular, when the pressure booster cylinder is connected to other structures, it has a significant impact on the service life of the pressure holding device. Summary of the Invention

[0004] In view of the current state of the prior art, the technical problem to be solved by the present invention is to provide a target material pressure holding device, which increases the service life of the invention by strengthening the connection between the pressure cylinder and other structures.

[0005] The technical solution adopted by the present invention to solve the above-mentioned technical problem is as follows: a target material pressure holding device, comprising a base, a first beam frame, a second beam frame, a mounting platform, and a pressure cylinder. The first beam frame and the second beam frame are arranged parallel to each other on the top of the base. The mounting platform is arranged across the first beam frame and the second beam frame and is slidably connected to the first beam frame and the second beam frame. The pressure cylinder is connected to the mounting platform. A plurality of first pistons and second pistons are also connected to the mounting platform. The first piston includes a retractable first piston rod, and the second piston includes a retractable second piston rod. The first piston rod is arranged on the other side of the first beam frame relative to the mounting platform, and the second piston rod is arranged on the other side of the second beam frame relative to the mounting platform.

[0006] Furthermore, the booster cylinder includes an output pressure head and a plurality of guide posts connected to the output pressure head, with each guide post being equally spaced, and the mounting platform having guide holes for the guide posts to slide through.

[0007] Furthermore, the top of the base is provided with a first loading plate and a second loading plate, and a temperature control plate is mounted on the first loading plate.

[0008] Furthermore, the temperature control plate includes a plurality of heat pipe holes and a heating pipe disposed in the heat pipe holes.

[0009] Furthermore, the first beam frame includes a first load-bearing rod and a plurality of first bases, one end of the first base being connected to the top of the base, and the other end of the first base being connected to the bottom of the first load-bearing rod.

[0010] Furthermore, a first guide rail is connected to the upper side of the first force-bearing rod, and a first slider that slides in cooperation with the first guide rail is provided on the mounting platform. The first piston rod is located below the first force-bearing rod.

[0011] Furthermore, the second beam frame includes a second force-bearing rod and a plurality of second bases, one end of the second base being connected to the top of the base and the other end of the second base being connected to the bottom of the second force-bearing rod.

[0012] Furthermore, a second guide rail is connected to the upper side of the second force-bearing rod, and a second slider that slides in cooperation with the second guide rail is provided on the mounting platform. The second piston rod is located below the second force-bearing rod.

[0013] Furthermore, the first piston is connected to the mounting platform via a first fixing bracket. The first fixing bracket includes a first vertical plate and a first horizontal plate. One end of the first vertical plate is connected to the mounting platform, and the other end of the first vertical plate is provided with a first limiting hole. The first horizontal plate is vertically connected to the first vertical plate, and the first piston is fixed to the first horizontal plate. The first piston rod passes through the first limiting hole.

[0014] Furthermore, the second piston is connected to the mounting platform via a second fixing bracket. The second fixing bracket includes a second vertical plate and a second horizontal plate. One end of the second vertical plate is connected to the mounting platform, and the other end of the second vertical plate is provided with a second limiting hole. The second horizontal plate is vertically connected to the second vertical plate, and the second piston is fixed to the second horizontal plate. The second piston rod passes through the second limiting hole.

[0015] Compared with the prior art, the advantages of the present invention are as follows: When the booster cylinder is working, it presses down and simultaneously generates an upward reaction force. Because the booster cylinder is mounted on the mounting platform, the mounting platform is also subjected to an upward force, causing the fit between the mounting platform and the first beam frame and the second beam frame to loosen. If the first piston rod and the second piston rod extend at this time, the first piston rod can abut against the lower side of the first beam frame, and the second piston rod can abut against the lower side of the second beam frame, so that the first piston rod and the second piston rod bear the reaction force borne by the mounting platform, thereby preventing the fit between the mounting platform and the first beam frame and the second beam frame from loosening and extending the service life of the present invention; when the mounting platform slides on the first beam frame and the second beam frame to change the position of the booster cylinder, the first piston rod and the second piston rod can be retracted, avoiding the first piston rod and the second piston rod from hitting other structures. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention;

[0017] Figure 2 for Figure 1 Enlarged view of A in the middle;

[0018] Figure 3 This is a schematic diagram of the structure of the present invention after removing components such as the base;

[0019] Figure 4 This is a schematic diagram of the structure of the first piston and the first fixing frame of the present invention;

[0020] Figure 5 This is a schematic diagram of the structure of the second piston and the second fixing frame of the present invention;

[0021] As shown in the figure: 1. Base; 1.1. First load-bearing plate; 1.2. Second load-bearing plate; 2. First beam frame; 2.1. First load-bearing rod; 2.2. First base; 2.3. First guide rail; 3. Second beam frame; 3.1. Second load-bearing rod; 3.2. Second base; 3.3. Second guide rail; 4. Mounting platform; 4.1. Guide hole; 4.2. First slider; 4.3. Second slider; 5. Pressure cylinder; 5.1. Output pressure head 5.2 Guide post; 6. First piston; 6.1 First piston rod; 7. Second piston; 7.1 Second piston rod; 8. Temperature control plate; 8.1 Heat pipe hole; 8.2 Heating tube; 9. First fixing bracket; 9.1 First vertical plate; 9.1.1 First limiting hole; 9.2 First horizontal plate; 10. Second fixing bracket; 10.1 Second vertical plate; 10.1.1 Second limiting hole; 10.2 Second horizontal plate. Detailed Implementation

[0022] The present invention will be further described below with reference to specific embodiments.

[0023] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0025] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0026] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] like Figure 1-5As shown, a target pressure holding device includes a base 1, a first beam frame 2, a second beam frame 3, a mounting platform 4, and a pressure boosting cylinder 5. The first beam frame 2 and the second beam frame 3 are arranged parallel to each other on the top of the base 1. The mounting platform 4 is arranged across the first beam frame 2 and the second beam frame 3 and is slidably connected to the first beam frame 2 and the second beam frame 3. The pressure boosting cylinder 5 is connected to the mounting platform 4. A plurality of first pistons 6 and second pistons 7 are also connected to the mounting platform 4. The first piston 6 includes a retractable first piston rod 6.1, and the second piston 7 includes a retractable second piston rod 7.1. The first piston rod 6.1 is disposed on the other side of the first beam frame 2 relative to the mounting platform 4, and the second piston rod 7.1 is disposed on the other side of the second beam frame 3 relative to the mounting platform 4. When the booster cylinder 5 operates, it presses down and simultaneously generates an upward reaction force. Because the booster cylinder 5 is mounted on the mounting platform 4, the mounting platform 4 is also subjected to an upward force, causing the fit between the mounting platform 4 and the first beam frame 2 and the second beam frame 3 to loosen. If the first piston rod 6.1 and the second piston rod 7.1 extend at this time, the first piston rod 6.1 can abut against the lower side of the first beam frame 2, and the second piston rod 7.1 can abut against the lower side of the second beam frame 3, so that the first piston rod 6.1 and the second piston rod 7.1 bear the reaction force borne by the mounting platform 4, thereby preventing the fit between the mounting platform 4 and the first beam frame 2 and the second beam frame 3 from loosening and extending the service life of the invention. When the mounting platform 4 slides on the first beam frame 2 and the second beam frame 3 to change the position of the booster cylinder 5, the first piston rod 6.1 and the second piston rod 7.1 can be retracted to prevent them from hitting other structures.

[0028] Preferably, the booster cylinder 5 includes an output pressure head 5.1 and a plurality of guide posts 5.2 connected to the output pressure head 5.1. The guide posts 5.2 are evenly spaced, and the mounting platform 4 is provided with guide holes 4.1 for the guide posts 5.2 to slide through. By evenly spaced multiple guide posts 5.2, the output pressure head 5.1 remains stable during operation. The guide holes 4.1, in sliding cooperation with the guide posts 5.2, restrict the accurate and stable sliding of the guide posts 5.2, thereby making the operation of the booster cylinder 5 more stable.

[0029] Preferably, there are two guide posts 5.2.

[0030] Preferably, the top of the base 1 is provided with a first carrying plate 1.1 and a second carrying plate 1.2, and a temperature control plate 8 is mounted on the first carrying plate 1.1. When the workpiece is placed on the temperature control plate 1.1.1 on the first carrying plate 1.1, the temperature of the temperature control plate 1.1.1 can be controlled to drop at a uniform rate, thereby slowly reducing the temperature of the workpiece and preventing a sudden drop in temperature. After the workpiece has completed the pressure holding process, it is placed on the second carrying plate 1.2 for natural cooling. At the same time, the second carrying plate 1.2 also has the function of material transfer and storage.

[0031] Preferably, the temperature control plate 8 includes a plurality of heat pipe holes 8.1 and heating tubes 8.2 disposed in the heat pipe holes 8.1. By inserting heating tubes 8.2 into the heat pipe holes 8.1, the entire temperature control plate 8 can be heated; the heating tubes 8.2 are a mature type of heating device, with good heating effect and easy and accurate temperature control, which facilitates the automatic temperature control of the temperature control plate 8.

[0032] Preferably, the first beam frame 2 includes a first load-bearing rod 2.1 and a plurality of first bases 2.2. One end of the first base 2.2 is connected to the top of the base 1, and the other end of the first base 2.2 is connected to the bottom of the first load-bearing rod 2.1. The first load-bearing rod 2.1 is connected to the base 1 through the first bases 2.2.

[0033] Preferably, a first guide rail 2.3 is connected to the upper side of the first force-bearing rod 2.1, and a first slider 4.2 that slides with the first guide rail 2.3 is provided on the mounting platform 4. The first piston rod 6.1 is located below the first force-bearing rod 2.1. By setting the first guide rail 2.3 above the first force-bearing rod 2.1, it slides with the first slider 4.2 on the mounting platform 4, thereby achieving a sliding fit between the mounting platform 4 and the first beam frame 2. When the booster cylinder 5 is working, the lower part of the first force-bearing rod 2.1 bears the pressure applied by the first piston rod 6.1, thereby bearing the reaction force on the mounting platform 4 through the first force-bearing rod 2.1, preventing the fit between the first guide rail 2.3 and the first slider 4.2 from loosening, and thus improving the service life of the invention.

[0034] Preferably, the second beam frame 3 includes a second load-bearing rod 3.1 and a plurality of second bases 3.2. One end of the second base 3.2 is connected to the top of the base 1, and the other end of the second base 3.2 is connected to the bottom of the second load-bearing rod 3.1. The second load-bearing rod 3.1 is connected to the base 1 through the second bases 3.2.

[0035] Preferably, a second guide rail 3.3 is connected to the upper side of the second force-bearing rod 3.1, and a second slider 4.3 is provided on the mounting platform 4 to slide in cooperation with the second guide rail 3.3. The second piston rod 7.1 is located below the second force-bearing rod 3.1. By setting the second guide rail 3.3 above the second force-bearing rod 3.1, it slides in cooperation with the second slider 4.3 on the mounting platform 4, thereby achieving a sliding cooperation between the mounting platform 4 and the second beam frame 3. When the booster cylinder 5 is working, the lower part of the second force-bearing rod 3.1 bears the pressure of the second piston rod 7.1, thereby bearing the reaction force on the mounting platform 4 through the second force-bearing rod 3.1, preventing the cooperation between the second guide rail 3.3 and the second slider 4.3 from loosening, and thus improving the service life of the invention.

[0036] Preferably, the first piston 6 is connected to the mounting platform 4 via a first fixing frame 9. The first fixing frame 9 includes a first vertical plate 9.1 and a first horizontal plate 9.2. One end of the first vertical plate 9.1 is connected to the mounting platform 4, and the other end of the first vertical plate 9.1 is provided with a first limiting hole 9.1.1. The first horizontal plate 9.2 is vertically connected to the first vertical plate 9.1. The first piston 6 is fixed to the first horizontal plate 9.2, and the first piston rod 6.1 passes through the first limiting hole 9.1.1. By setting the first vertical plate 9.1 and the first horizontal plate 9.2, the first piston 6 is positioned, and by setting the first limiting hole 9.1.1, the first piston rod 6.1 is positioned and guided, thereby accurately and stably controlling the direction of movement of the first piston rod 6.1.

[0037] Preferably, the second piston 7 is connected to the mounting platform 4 via a second fixing bracket 10. The second fixing bracket 10 includes a second vertical plate 10.1 and a second horizontal plate 10.2. One end of the second vertical plate 10.1 is connected to the mounting platform 4, and the other end of the second vertical plate 10.1 is provided with a second limiting hole 10.1.1. The second horizontal plate 10.2 is vertically connected to the second vertical plate 10.1. The second piston 7 is fixed to the second horizontal plate 10.2, and the second piston rod 7.1 passes through the second limiting hole 10.1.1. By setting the second vertical plate 10.1 and the second horizontal plate 10.2, the second piston 7 is positioned, and by setting the second limiting hole 10.1.1, the second piston rod 7.1 is positioned and guided, thereby accurately and stably controlling the direction of movement of the second piston rod 7.1.

[0038] Preferably, the mounting platform 4 is connected to a linear guide rail and is driven by a motor, with the torque increased by a reducer.

[0039] The working method of this invention is as follows: the workpiece is transferred to the temperature control plate 8 on the first carrier plate 1.1, the heating tube 8.2 is controlled to slowly cool down, and at the same time the mounting platform 4 moves above the workpiece, the pressure cylinder 5 presses the workpiece, the first piston rod 6.1 and the second piston rod 7.1 extend and are respectively inserted below the first force rod 2.1 and the second force rod 3.1 to bear the reaction force brought to the mounting platform 4 by the pressure cylinder 5 when it is working, and to prevent the first slider 4.2 from being stressed to the first guide rail 2.3 and the second slider 4.3 from being stressed to the second guide rail 3.3.

[0040] The advantages of this invention are as follows: When the booster cylinder 5 operates, it presses down and simultaneously generates an upward reaction force. Because the booster cylinder 5 is mounted on the mounting platform 4, the mounting platform 4 is also subjected to an upward force, causing the fit between the mounting platform 4 and the first beam frame 2 and the second beam frame 3 to loosen. If the first piston rod 6.1 and the second piston rod 7.1 extend at this time, the first piston rod 6.1 can abut against the lower side of the first beam frame 2, and the second piston rod 7.1 can abut against the lower side of the second beam frame 3, so that the first piston rod 6.1 and the second piston rod 7.1 bear the reaction force borne by the mounting platform 4, thereby preventing the fit between the mounting platform 4 and the first beam frame 2 and the second beam frame 3 from loosening and extending the service life of this invention. When the mounting platform 4 slides on the first beam frame 2 and the second beam frame 3 to change the position of the booster cylinder 5, the first piston rod 6.1 and the second piston rod 7.1 can be retracted, preventing the first piston rod 6.1 and the second piston rod 7.1 from hitting other structures.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A target material pressure holding device, characterized in that, The system includes a base (1), a first beam frame (2), a second beam frame (3), a mounting platform (4), and a booster cylinder (5). The first beam frame (2) and the second beam frame (3) are arranged parallel to each other on the top of the base (1). The mounting platform (4) is arranged across the first beam frame (2) and the second beam frame (3). The mounting platform (4) is slidably connected to the first beam frame (2) and the second beam frame (3). The booster cylinder (5) is connected to the mounting platform (4). Several first pistons (6) and second pistons (7) are also connected to the mounting platform (4). The first piston (6) includes a retractable first piston rod (6.1), and the second piston (7) includes a retractable second piston rod (7.1). The first piston rod (6.1) is located on the other side of the first beam frame (2) relative to the mounting platform (4), and the second piston rod (7.1) is located on the other side of the second beam frame (3) relative to the mounting platform (4).

2. The target material pressure holding device according to claim 1, characterized in that, The booster cylinder (5) includes an output pressure head (5.1) and a number of guide posts (5.2) connected to the output pressure head (5.1). The guide posts (5.2) are arranged at equal intervals. The mounting platform (4) is provided with guide holes (4.1) for the guide posts (5.2) to slide through.

3. The target material pressure holding device according to claim 1, characterized in that, The base (1) is provided with a first loading plate (1.1) and a second loading plate (1.2) on its top, and a temperature control plate (8) is mounted on the first loading plate (1.1).

4. The target material pressure holding device according to claim 3, characterized in that, The temperature control plate (8) includes a plurality of heat pipe holes (8.1) and heating pipes (8.2) disposed in the heat pipe holes (8.1).

5. The target material pressure holding device according to claim 1, characterized in that, The first beam frame (2) includes a first force-bearing rod (2.1) and a plurality of first bases (2.2). One end of the first base (2.2) is connected to the top of the base (1), and the other end of the first base (2.2) is connected to the bottom of the first force-bearing rod (2.1).

6. The target material pressure holding device according to claim 5, characterized in that, The first force-bearing rod (2.1) is connected to the upper side of the first guide rail (2.3), and the mounting platform (4) is provided with a first slider (4.2) that slides with the first guide rail (2.3). The first piston rod (6.1) is located below the first force-bearing rod (2.1).

7. The target material pressure holding device according to claim 1, characterized in that, The second beam frame (3) includes a second force-bearing rod (3.1) and several second bases (3.2). One end of the second base (3.2) is connected to the top of the base (1), and the other end of the second base (3.2) is connected to the bottom of the second force-bearing rod (3.1).

8. The target material pressure holding device according to claim 7, characterized in that, The second force-bearing rod (3.1) is connected to a second guide rail (3.3) on its upper side. The mounting platform (4) is provided with a second slider (4.3) that slides with the second guide rail (3.3). The second piston rod (7.1) is located below the second force-bearing rod (3.1).

9. The target material pressure holding device according to claim 1, characterized in that, The first piston (6) is connected to the mounting platform (4) via a first fixing bracket (9). The first fixing bracket (9) includes a first vertical plate (9.1) and a first horizontal plate (9.2). One end of the first vertical plate (9.1) is connected to the mounting platform (4), and the other end of the first vertical plate (9.1) is provided with a first limiting hole. 9.1.1), the first horizontal plate (9.2) is vertically connected to the first vertical plate (9.1), the first piston (6) is fixed to the first horizontal plate (9.2), and the first piston rod (6.1) passes through the first limiting hole (9.1.1).

10. A target material pressure-holding device according to claim 1, characterized in that, The second piston (7) is connected to the mounting platform (4) via a second fixing bracket (10). The second fixing bracket (10) includes a second vertical plate (10.1) and a second horizontal plate (10.2). One end of the second vertical plate (10.1) is connected to the mounting platform (4), and the other end of the second vertical plate (10.1) is provided with a second limiting hole. 10.1.1), the second horizontal plate (10.2) is vertically connected to the second vertical plate (10.1), the second piston (7) is fixed to the second horizontal plate (10.2), and the second piston rod (7.1) passes through the second limiting hole (10.1.1).

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