Pressure regulating valve for gasification fluid for semiconductor and pressure regulating method

Abstract

The present application relates to the technical field of gas flow control, in particular to a gasification fluid pressure regulating valve for semiconductors and a pressure regulating method. The valve body is provided with an inlet channel at one end and an outlet channel at the other end. A valve core is sealingly connected in the vertical direction in the core cavity and blocks the inlet channel and the outlet channel. A central cavity is formed in the valve core. An outer ring cavity is formed on the outer side of the valve core. A central plate is slidingly arranged in the vertical direction in the central cavity. A ring plate is slidingly arranged in the vertical direction in the outer ring cavity. A fixed cylinder is fixed to the upper end of the valve body. A pressing plate is slidingly arranged in the vertical direction in the fixed cylinder. The pressing plate is connected to the central plate through a second spring. The ring plate is connected to the pressing plate through a first spring. The present application reduces the continuous working time of the first spring or the second spring through the alternate working of the first spring and the second spring, effectively preventing the fatigue and permanent deformation of the first spring and the second spring.

Description

Technical Field

[0001] This invention relates to the field of gas flow control technology, specifically to a vaporized fluid pressure regulating valve and pressure regulating method for semiconductors. Background Technology

[0002] In semiconductor manufacturing processes, the stable delivery of high-purity gases is crucial for ensuring chip yield and process precision. As a core component of the gas delivery system, the performance of the vaporized fluid pressure regulating valve directly affects the precise control of gas pressure and the long-term stability of the system. With the evolution of semiconductor technology towards smaller process nodes, the requirements for gas purity, pressure stability, and valve durability are becoming increasingly stringent. Traditional pressure regulating valves often employ a single-spring structure, achieving pressure control through mechanical adjustment. However, under long-term high-pressure, high-frequency operating conditions, the spring is prone to fatigue deformation or creep, leading to output pressure drift.

[0003] While pressure regulating valves in the industry are constantly being optimized in structure, such as by adopting piston-type sensing designs to reduce regulating torque or achieving zero leakage through double seals of metal and rubber, it is still difficult to completely solve the performance degradation problem of spring systems after long-term service. Especially in applications with high flow rates and high pressure differentials (such as tubular trailers for bulk specialty gas supply or equipment inlet points), springs need to continuously withstand high loads, and changes in their elastic coefficient will directly affect the constancy of outlet pressure. To maintain pressure accuracy, equipment needs to be frequently shut down for manual spring replacement, which not only increases maintenance costs but may also interrupt continuous production processes and affect wafer fab capacity. Summary of the Invention

[0004] The main objective of this invention is to provide a semiconductor vaporized fluid pressure regulating valve and pressure regulating method that can improve service life.

[0005] To achieve the above objectives, the technical solution provided by this invention is as follows:

[0006] A vaporized fluid pressure regulating valve for semiconductors includes a valve body with an inlet channel at one end and an outlet channel at the other end. A core cavity is formed within the valve body between the inlet and outlet channels. A valve core is slidably and sealingly connected vertically within the core cavity, blocking both the inlet and outlet channels. A central cavity is formed within the valve core, and an outer annular cavity is formed on the valve core outside the central cavity. A central plate is slidably mounted vertically within the central cavity, and an annular plate is slidably mounted vertically within the outer annular cavity. A fixed cylinder is fixed to the upper end of the valve body, and a screw is threadedly connected to the upper end of the fixed cylinder. A pressure plate is slidably mounted vertically within the fixed cylinder, rotatably connected to the lower end of the screw. The pressure plate is connected to the central plate via a second spring, and the annular plate is connected to the pressure plate via a second spring. A first spring connection is provided, and a first limiting component is provided inside the annular plate. The first limiting component includes an external mounting hole opened in the annular plate, a first limiting switch installed at the bottom of the external mounting hole, a first magnetic plug elastically slidably connected inside the external mounting hole, and the first magnetic plug slidably inserted into the insertion hole of the valve body. An internal mounting hole corresponding to the insertion hole is opened on the center plate, a second limiting switch is installed at the bottom of the internal mounting hole, a second magnetic plug elastically slidably connected inside the internal mounting hole, the second magnetic plug triggers the second limiting switch, a second electromagnet is installed inside the internal mounting hole, a first electromagnet is installed inside the external mounting hole, a second driving component that enables the center plate to rise and fall is provided on the pressure plate, and a first driving component that enables the annular plate to rise and fall is provided on the pressure plate.

[0007] By setting a first driving component, a first limiting component, a second driving component, and a second limiting component, the working states of the first spring and the second spring can be switched during the operation of this pressure regulating valve, so that the first spring and the second spring work alternately, avoiding damage to the first spring or the second spring due to continuous operation for a long time.

[0008] Specifically, the screw is vertically arranged, with its lower end located inside the fixed cylinder. A vertically arranged sliding groove is provided on the inner wall of the fixed cylinder, and a protrusion is fixed on the outer side of the pressure plate, with the protrusion slidingly engaged in the sliding groove.

[0009] The sliding fit between the protrusion and the groove prevents the pressure plate from rotating with the screw when the screw is rotated, ensuring that the pressure plate can only move up and down within the fixed cylinder during the screw rotation process.

[0010] Specifically, the spring constant of the first spring is the same as that of the second spring.

[0011] After the first spring and the second spring switch their working states, the pressure on the valve core is kept equal.

[0012] Specifically, the axial direction of the external mounting hole is parallel to the radial direction of the annular plate. The first electromagnet is fixed at the bottom of the external mounting hole. The first electromagnet can magnetically attract the first magnetic plug. The first magnetic plug is connected to the bottom of the external mounting hole through a first return spring.

[0013] After the first electromagnet is activated, it can push the first magnetic plug away from the first electromagnet.

[0014] Specifically, the axial direction of the inner mounting hole is parallel to the radial direction of the center plate. A second electromagnet is installed at the bottom of the inner mounting hole. The second electromagnet magnetically attracts a second magnetic plug. The second magnetic plug is connected to the bottom of the inner mounting hole through a second return spring. The elastic stiffness coefficient of the first return spring is greater than that of the second return spring.

[0015] In the initial state, the opposite end faces of the first magnetic plug and the second magnetic plug are flush with the inner wall of the central cavity. At this time, the second magnetic plug is in contact with the bottom of the inner mounting hole.

[0016] Specifically, the first drive assembly includes a first motor fixed inside the pressure plate, one end of a first pull rope fixedly connected to the output shaft of the first motor, the first pull rope passing through a hole in the pressure plate, the other end of the first pull rope fixedly connected to the upper end of the annular plate, and the second electromagnet, the first electromagnet, the first limit switch, the first motor and the controller are electrically connected.

[0017] After the first motor starts, its output shaft winds the first pull rope, allowing the annular plate to move upward within the outer annular cavity. After the first motor stops, the annular plate moves downward within the outer annular cavity under the elastic force of the first spring.

[0018] Specifically, the second drive assembly includes a second motor fixed inside the pressure plate, one end of the second pull rope is fixedly connected to the output shaft of the second motor, and the other end of the second pull rope passes through the vertical hole of the pressure plate and is fixedly connected to the upper end of the center plate. The second motor, the first electromagnet, the second electromagnet, the second limit switch and the controller are electrically connected.

[0019] After the second motor starts, its output shaft winds the second pull rope, allowing the center plate to move upward within the center cavity. After the second motor stops, the center plate moves downward within the center cavity under the force of the second spring.

[0020] Specifically, the magnetic poles of the ends of the first electromagnet and the first magnetic plug are the same.

[0021] After the first electromagnet is activated, it can ensure that a magnetic repulsive force is generated between the first electromagnet and the first magnetic plug.

[0022] Specifically, the magnetic poles at the opposite ends of the second electromagnet and the second magnetic plug are the same.

[0023] After the second electromagnet is activated, it can ensure that a magnetic repulsive force is generated between the second electromagnet and the second magnetic plug.

[0024] Initially, the opposing end faces of the first and second magnetic blocks are flush with the inner wall of the central cavity. When the screw is rotated to drive the pressure plate downward, the second spring drives the central plate downward within the central cavity. The first spring applies pressure to the valve core through the annular plate and the first magnetic block. The vaporized fluid applies an upward thrust to the valve core through the inlet channel, causing the valve core to rise and compress the first spring. Then, the vaporized fluid is discharged from the outlet channel at a constant pressure. After a certain period of time, the second drive assembly drives the central plate upward within the central cavity, compressing the second spring. After the second drive assembly is activated... The second electromagnet activates and deactivates the first electromagnet. After activation, the second magnetic plug tends to move outward from the valve core. When the second magnetic plug aligns with the first magnetic plug, the magnetic repulsion between the second electromagnet and the second magnetic plug pushes the first magnetic plug outward from the valve core, compressing the first return spring. Simultaneously, the second limit switch closes, causing the second drive assembly to shut down. When the opposing end faces of the first and second magnetic plugs are flush with the inner wall of the outer ring cavity, the first limit switch is deactivated. The magnetic insert is activated, causing the annular plate to move downwards within the outer annular cavity. The first spring's force is released, and at this point, only the second spring applies pressure to the valve core, thus completing the switching between the working states of the first and second springs. After a certain period, the first drive assembly drives the annular plate upwards within the outer annular cavity, compressing the first spring. Upon activation of the first drive assembly, the second electromagnet closes, and the first electromagnet activates. The activation of the first electromagnet causes the first magnetic insert to tend to move inwards towards the valve core. When the second magnetic insert aligns with the first magnetic insert, the first electromagnet... Under the magnetic repulsion between the iron and the first magnetic plug, the first magnetic plug pushes the second magnetic plug to move towards the inside of the valve core. The second return spring is compressed. At the same time, the first limit switch is closed, causing the first drive assembly to shut down. When the opposite end faces of the first and second magnetic plugs are flush with the inner wall of the central cavity, the second limit switch is activated by the second magnetic plug. Then, the central plate moves downward in the central cavity, and the elastic force of the second spring is released. At this time, only the first spring applies pressure to the valve core, thereby completing the switching of the working state between the second and first springs.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0026] 1. By alternating the operation of the first and second springs, the continuous working time of the first or second spring is reduced, effectively preventing fatigue and permanent deformation of the first and second springs, reducing the risk of overall valve damage due to failure of the first or second spring, thereby significantly improving the durability and long-term operational stability of the pressure regulating valve.

[0027] 2. The automatic switching mechanism ensures the accuracy and timeliness of the state transition between the first and second springs, avoids errors caused by manual intervention, and can seamlessly switch during operation, maintaining a constant pressure of the vaporized fluid in the outlet channel and improving the operational reliability of the valve in high-pressure environments such as semiconductor manufacturing.

[0028] 3. Because the first and second springs work alternately, the wear rate of individual springs is reduced, thus reducing the need for maintenance or spring replacement.

[0029] 4. The repulsive driving mechanism of the first magnetic plug and the first electromagnet, as well as the repulsive driving mechanism of the second magnetic plug and the second electromagnet, ensure that the switching process is smooth and without mechanical impact, prevent accidental damage to the internal components of the pressure regulating valve, and enable it to adapt to the vaporized fluid environment with different pressure requirements, thereby enhancing the overall safety of the system.

[0030] 5. The switching process between the first spring and the second spring is efficiently completed through the cooperation of the first motor and the first pull rope, and the cooperation of the second motor and the second pull rope. No additional external energy input is required, which reduces energy loss and maintains the accuracy of pressure regulation, thus helping to improve the energy efficiency ratio of the equipment in long-term operation. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the present invention.

[0032] Figure 2 for Figure 1 A magnified view of region A in the middle.

[0033] Figure 3 This is a schematic diagram of the first magnetic plug being inserted into the socket.

[0034] Figure 4 for Figure 3 A magnified view of region B in the middle.

[0035] Figure 5 This is a schematic diagram showing the end faces of the first and second magnetic inserts being flush with the inner wall of the central cavity.

[0036] Figure 6 This is a diagram showing the positions of the first and second motors.

[0037] Figure 7 This is a schematic diagram showing only the first spring applying pressure to the valve core.

[0038] Figure 8 for Figure 7 A magnified view of region C in the middle.

[0039] Figure 9 This is a schematic diagram showing the center plate located inside the center cavity.

[0040] Figure 10 for Figure 9 A magnified view of region D in the middle.

[0041] Figure 11 This is a schematic diagram showing only the second spring applying pressure to the valve core.

[0042] Figure 12 for Figure 11 A magnified view of region E in the middle.

[0043] Figure 13 for Figure 11 A magnified view of region F in the middle.

[0044] Figure 14 This is a schematic diagram of the insertion hole on the valve core.

[0045] Figure 15 This is a schematic diagram showing the fit between the annular plate and the center plate and the valve core.

[0046] The components in the attached diagram are named as follows: 1. Valve body; 2. Inlet channel; 3. Outlet channel; 4. Valve core; 5. Insertion hole; 6. Annular plate; 601. External mounting hole; 7. First magnetic insert; 8. First return spring; 9. First electromagnet; 10. First limit switch; 11. Center plate; 110. Internal mounting hole; 12. Second magnetic insert; 13. Second return spring; 14. Second electromagnet; 15. Second limit switch; 16. Fixed cylinder; 17. Screw; 18. Pressure plate; 19. Slide groove; 20. First spring; 21. Second spring; 22. First motor; 23. First pull rope; 24. Second motor; 25. Second pull rope; 26. Outer annular cavity; 27. Center cavity. Detailed Implementation

[0047] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0048] like Figures 1-15 As shown, a vaporized fluid pressure regulating valve for semiconductors includes a valve body 1. One end of the valve body 1 has an inlet channel 2, and the other end has an outlet channel 3. A core cavity is formed within the valve body 1 between the inlet channel 2 and the outlet channel 3. A valve core 4 is slidably and sealingly connected within the core cavity in the vertical direction, blocking both the inlet channel 2 and the outlet channel 3. A sealing ring is fixedly and sealingly connected to the outside of the valve core 4, and the valve core 4 and the valve body 1 are slidably and sealingly connected through the sealing ring.

[0049] like Figure 9As shown, a central cavity 27 is provided inside the valve core 4, and an outer annular cavity 26 is provided on the valve core 4 outside the central cavity 27. A central plate 11 is slidably arranged in the vertical direction inside the central cavity 27, and an annular plate 6 is slidably arranged in the vertical direction inside the outer annular cavity 26.

[0050] like Figure 1 As shown, a fixed cylinder 16 is fixed to the upper end of the valve body 1, and a screw 17 is threadedly connected to the upper end of the fixed cylinder 16. A pressure plate 18 is slidably arranged in the vertical direction inside the fixed cylinder 16, and the pressure plate 18 is rotatably connected to the lower end of the screw 17.

[0051] like Figure 1 and Figure 15 As shown, the screw 17 is vertically arranged, and the lower end of the screw 17 is located inside the fixed cylinder 16. A vertically arranged sliding groove 19 is provided on the inner wall of the fixed cylinder 16. A protrusion is fixed on the outer side of the pressure plate 18, and the protrusion is slidably engaged in the sliding groove 19.

[0052] The sliding fit between the protrusion and the groove 19 can prevent the pressure plate 18 from rotating with the screw 17 when the screw 17 is rotated, ensuring that the pressure plate 18 can only move up and down within the fixed cylinder 16 during the rotation of the screw 17.

[0053] The pressure plate 18 is connected to the center plate 11 by the second spring 21.

[0054] The annular plate 6 and the pressure plate 18 are connected by the first spring 20.

[0055] The spring constant of the first spring 20 is the same as that of the second spring 21.

[0056] like Figure 3 and Figure 5 As shown, a first limiting component is provided inside the annular plate 6. The first limiting component includes an external mounting hole 601 opened in the annular plate 6, a first limiting switch 10 installed at the bottom of the external mounting hole 601, and a first magnetic plug 7 elastically slidably connected inside the external mounting hole 601. The first magnetic plug 7 is slidably inserted into the plug hole 5 of the valve body 1.

[0057] like Figure 5 As shown, the axial direction of the external mounting hole 601 is parallel to the radial direction of the annular plate 6. The first electromagnet 9 is fixed to the bottom of the external mounting hole 601. The first electromagnet 9 can magnetically attract the first magnetic plug 7. The first magnetic plug 7 is connected to the bottom of the external mounting hole 601 through the first return spring 8. One end of the first return spring 8 is fixed to the bottom of the external mounting hole 601, and the other end of the first return spring 8 is fixedly connected to the first magnetic plug 7.

[0058] The center plate 11 has an inner mounting hole 110 corresponding to the insertion hole 5. A second limit switch 15 is installed at the bottom of the inner mounting hole 110. A second magnetic plug 12 is elastically slidably connected inside the inner mounting hole 110. The second magnetic plug 12 triggers the second limit switch 15. A second electromagnet 14 is installed inside the inner mounting hole 110. A first electromagnet 9 is installed inside the outer mounting hole 601.

[0059] The axial direction of the inner mounting hole 110 is parallel to the radial direction of the center plate 11. A second electromagnet 14 is installed at the bottom of the inner mounting hole 110. The second electromagnet 14 magnetically attracts the second magnetic plug 12. The second magnetic plug 12 is connected to the bottom of the inner mounting hole 110 through a second return spring 13.

[0060] One end of the second reset spring 13 is fixed to the bottom of the inner mounting hole 110, and the other end of the second reset spring 13 is fixedly connected to the second magnetic plug 12.

[0061] The spring constant of the first return spring 8 is greater than that of the second return spring 13. In the initial state, the first electromagnet 9 and the second electromagnet 14 are closed, the first magnetic plug 7 is inserted into the socket 5, and the end faces of the first magnetic plug 7 and the second magnetic plug 12 are flush with the inner wall of the central cavity 27.

[0062] The pressure plate 18 is provided with a second drive assembly that enables the center plate 11 to rise and fall, and the pressure plate 18 is provided with a first drive assembly that enables the annular plate 6 to rise and fall.

[0063] The first drive assembly includes a first motor 22 fixed inside the pressure plate 18, one end of a first pull rope 23 fixedly connected to the output shaft of the first motor 22, the first pull rope 23 passing through a hole on the pressure plate 18, and the other end of the first pull rope 23 fixedly connected to the upper end of the annular plate 6. The second electromagnet 14, the first electromagnet 9, the first limit switch 10, the first motor 22 and the controller are electrically connected.

[0064] There are two first pull ropes 23, and two second pull ropes 25 are fixedly connected to the upper ends of the left and right sides of the annular plate 6, respectively.

[0065] The perforations include interconnected straight holes and vertical holes. The vertical holes are connected to the inner hole where the first motor 22 is located, and the vertical holes are connected to the inside of the fixed cylinder 16 below the pressure plate 18.

[0066] The magnetic poles of the opposite ends of the first electromagnet 9 and the first magnetic plug 7 are the same. After the first electromagnet 9 is activated, it can ensure that a magnetic repulsive force is generated between the first electromagnet 9 and the first magnetic plug 7.

[0067] The second drive assembly includes a second motor 24 fixed inside the pressure plate 18, one end of a second pull rope 25 fixedly connected to the output shaft of the second motor 24, and the other end of the second pull rope 25 passing through the vertical hole of the pressure plate 18 and fixedly connected to the upper end of the center plate 11. The second motor 24, the first electromagnet 9, the second electromagnet 14, the second limit switch 15 and the controller are electrically connected.

[0068] The upper end of the vertical hole is connected to the inner hole where the second motor 24 is located, and the lower end of the vertical hole is connected to the inside of the fixed cylinder 16 below the pressure plate 18.

[0069] The magnetic poles at the opposite ends of the second electromagnet 14 and the second magnetic plug 12 are the same. After the second electromagnet 14 is activated, it can ensure that a magnetic repulsive force is generated between the second electromagnet 14 and the second magnetic plug 12.

[0070] In the initial state, the end faces of the first magnetic insert 7 and the second magnetic insert 12 facing each other are flush with the inner wall of the central cavity 27, as shown below. Figures 1-3 As shown, at this time, the first magnetic plug 7 is inserted into the plug hole 5, the annular plate 6 and the valve core 4 cannot move relative to each other in the vertical direction, while the central plate 11 and the valve core 4 can move relative to each other in the vertical direction.

[0071] When the rotating screw 17 drives the pressure plate 18 downward, the second spring 21 drives the center plate 11 downward in the center cavity 27, and the first spring 20 applies pressure to the valve core 4 through the annular plate 6 and the first magnetic plug 7.

[0072] When this pressure regulating valve is in operation, the vaporized fluid exerts an upward thrust on the valve core 4 through the inlet channel 2. The valve core 4 moves upward and compresses the first spring 20. Then, the vaporized fluid is discharged from the outlet channel 3 at a constant pressure. By rotating the screw 17 to adjust the downward distance of the pressure plate 18, the pressure of the first spring 20 on the valve core 4 can be adjusted, thereby achieving the discharge pressure of the gas fluid in the outlet channel 3.

[0073] After a certain period of time, the second motor 24 starts, and the output shaft of the second motor 24 winds the second pull rope 25. As the output shaft of the second motor 24 winds the second pull rope 25, the center plate 11 moves upward in the center cavity 27, and the second spring 21 is compressed. After the second motor 24 starts, the second electromagnet 14 starts and closes the first electromagnet 9. After the second electromagnet 14 starts, the second magnetic plug 12 tends to move outward from the valve core 4.

[0074] When the second magnetic plug 12 corresponds to the first magnetic plug 7, under the magnetic repulsion between the second electromagnet 14 and the second magnetic plug 12, the second magnetic plug 12 pushes the first magnetic plug 7 to move outward toward the valve core 4, and the first return spring 8 is compressed. At the same time, after the second magnetic plug 12 moves outward toward the valve core 4, the second limit switch 15 closes and causes the second motor 24 to shut down.

[0075] When the end faces of the first magnetic plug 7 and the second magnetic plug 12 are flush with the inner wall of the outer annular cavity 26, the first limit switch 10 is activated by the first magnetic plug 7. Since the second motor 24 is off, under the elastic force of the first spring 20, the annular plate 6 moves downward in the outer annular cavity 26, and the elastic force of the first spring 20 is released.

[0076] At this time, only the second spring 21 applies pressure to the valve core 4, thereby completing the switching of the working state between the first spring 20 and the second spring 21.

[0077] After a certain period of time, the first driving component drives the annular plate 6 to move upward within the outer annular cavity 26. The first spring 20 is compressed, and after the first motor 22 starts, the second electromagnet 14 is turned off, and the first electromagnet 9 is turned on. The first electromagnet 9 causes the first magnetic plug 7 to tend to move towards the inside of the valve core 4. When the second magnetic plug 12 corresponds to the first magnetic plug 7, under the magnetic repulsion between the first electromagnet 9 and the first magnetic plug 7, the first magnetic plug 7 pushes the second magnetic plug 12 towards the inside of the valve core 4, and the second return spring 13 is compressed. At the same time, after the first magnetic plug 7 moves towards the inside of the valve core 4, the first limit switch 10 closes, causing the first motor 22 to turn off.

[0078] When the end faces of the first magnetic plug 7 and the second magnetic plug 12 are flush with the inner wall of the central cavity 27, the second limit switch 15 is activated by the second magnetic plug 12. Then, under the elastic force of the second spring 21, the central plate 11 moves downward in the central cavity 27, and the elastic force of the second spring 21 is released.

[0079] At this time, only the first spring 20 applies pressure to the valve core 4, thereby completing the switching of the working state between the second spring 21 and the first spring 20.

[0080] By alternating the operation of the first spring 20 and the second spring 21, the continuous working time of the first spring 20 or the second spring 21 is reduced, effectively preventing fatigue and permanent deformation of the first spring 20 and the second spring 21, reducing the risk of overall valve damage due to failure of the first spring 20 or the second spring 21, thereby significantly improving the durability and long-term operational stability of the pressure regulating valve.

[0081] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A vaporized fluid pressure regulating valve for semiconductors, comprising a valve body (1), an inlet channel (2) machined at one end of the valve body (1), an outlet channel (3) machined at the other end of the valve body (1), a core cavity being formed within the valve body (1) between the inlet channel (2) and the outlet channel (3), and a valve core (4) being slidably and sealingly connected in the vertical direction within the core cavity, characterized in that, A central cavity (27) is provided inside the valve core (4), and an outer ring cavity (26) is provided on the valve core (4) outside the central cavity (27). A central plate (11) is slidably arranged inside the central cavity (27), and an annular plate (6) is slidably arranged inside the outer ring cavity (26). A fixed cylinder (16) is fixed at the upper end of the valve body (1), and a screw (17) is threadedly connected to the upper end of the fixed cylinder (16). A pressure plate (18) is slidably arranged inside the fixed cylinder (16). The pressure plate (18) is rotatably connected to the lower end of the screw (17). The pressure plate (18) is connected to the central plate (11) by a second spring (21), and the annular plate (6) is connected to the pressure plate (18) by a first spring (20). A first limiting component is provided inside the annular plate (6). The first limiting component includes an outer mounting hole (601) opened inside the annular plate (6). A hole bottom of the outer mounting hole (601) is installed with The first limit switch (10) has a first magnetic plug (7) that is elastically slidably connected in the outer mounting hole (601). The first magnetic plug (7) is slidably inserted into the socket (5) of the valve body (1). The center plate (11) has an inner mounting hole (110) corresponding to the socket (5). The bottom of the inner mounting hole (110) is equipped with a second limit switch (15). The inner mounting hole (110) has a second magnetic plug (12) that is elastically slidably connected in the inner mounting hole (110). The second magnetic plug (12) triggers the second limit switch (15). The inner mounting hole (110) is equipped with a second electromagnet (14). The outer mounting hole (601) is equipped with a first electromagnet (9). The pressure plate (18) is equipped with a second drive assembly that enables the center plate (11) to rise and fall. The pressure plate (18) is equipped with a first drive assembly that enables the ring plate (6) to rise and fall.

2. The semiconductor vaporized fluid pressure regulating valve according to claim 1, characterized in that, The screw (17) is vertically arranged, and the lower end of the screw (17) is located inside the fixed cylinder (16). A vertically arranged sliding groove (19) is provided on the inner wall of the fixed cylinder (16). A protrusion is fixed on the outside of the pressure plate (18), and the protrusion is slidably engaged in the sliding groove (19).

3. The semiconductor vaporized fluid pressure regulating valve according to claim 1, characterized in that, The spring constant of the first spring (20) is the same as that of the second spring (21).

4. The semiconductor vaporized fluid pressure regulating valve according to claim 1, characterized in that, The axial direction of the external mounting hole (601) is parallel to the radial direction of the annular plate (6). The first electromagnet (9) is fixed at the bottom of the external mounting hole (601). The first electromagnet (9) can magnetically attract the first magnetic plug (7). The first magnetic plug (7) is connected to the bottom of the external mounting hole (601) through the first reset spring (8).

5. The semiconductor vaporized fluid pressure regulating valve according to claim 4, characterized in that, The axial direction of the inner mounting hole (110) is parallel to the radial direction of the center plate (11). A second electromagnet (14) is installed at the bottom of the inner mounting hole (110). The second electromagnet (14) magnetically attracts the second magnetic plug (12). The second magnetic plug (12) is connected to the bottom of the inner mounting hole (110) through a second return spring (13). The elastic stiffness coefficient of the first return spring (8) is greater than that of the second return spring (13).

6. The semiconductor vaporized fluid pressure regulating valve according to claim 4, characterized in that, The first drive assembly includes a first motor (22) fixed inside the pressure plate (18), one end of a first pull rope (23) fixedly connected to the output shaft of the first motor (22), the first pull rope (23) passing through a hole on the pressure plate (18), the other end of the first pull rope (23) fixedly connected to the upper end of the annular plate (6), and the second electromagnet (14), the first electromagnet (9), the first limit switch (10), the first motor (22) and the controller are electrically connected.

7. The semiconductor vaporized fluid pressure regulating valve according to claim 5, characterized in that, The second drive assembly includes a second motor (24) fixed inside the pressure plate (18), one end of the second pull rope (25) is fixedly connected to the output shaft of the second motor (24), and the other end of the second pull rope (25) passes through the vertical hole of the pressure plate (18) and is fixedly connected to the upper end of the center plate (11). The second motor (24), the first electromagnet (9), the second electromagnet (14), the second limit switch (15) and the controller are electrically connected.

8. The semiconductor vaporized fluid pressure regulating valve according to claim 1, characterized in that, The magnetic poles of the ends of the first electromagnet (9) and the first magnetic plug (7) opposite each other are the same.

9. The semiconductor vaporized fluid pressure regulating valve according to claim 1, characterized in that, The magnetic poles at opposite ends of the second electromagnet (14) and the second magnetic plug (12) are the same.

10. A pressure regulating method based on the semiconductor vaporized fluid pressure regulating valve as shown in claim 1, characterized in that, Includes the following steps: S1. In the initial state, the end faces of the first magnetic plug (7) and the second magnetic plug (12) are flush with the inner wall of the central cavity (27). When the screw (17) is rotated to drive the pressure plate (18) to move downward, the second spring (21) drives the central plate (11) to move downward in the central cavity (27). The first spring (20) applies pressure to the valve core (4) through the annular plate (6) and the first magnetic plug (7). S2. The vaporized fluid exerts an upward thrust on the valve core (4) through the inlet channel (2), the valve core (4) moves upward and compresses the first spring (20), and then the vaporized fluid is discharged from the outlet channel (3) at a constant pressure. S3. After a certain period of time, the second drive assembly drives the center plate (11) to move upward in the center cavity (27), the second spring (21) is compressed, and after the second drive assembly is started, the second electromagnet (14) starts and closes the first electromagnet (9). After the second electromagnet (14) is started, the second magnetic plug (12) tends to move towards the outside of the valve core (4). When the second magnetic plug (12) corresponds to the first magnetic plug (7), under the magnetic repulsion between the second electromagnet (14) and the second magnetic plug (12), the second magnetic plug (12) pushes the first magnetic plug (7) towards the valve core. (4) When moving outward, the first reset spring (8) is compressed. At the same time, the second limit switch (15) is closed and the second drive assembly is closed. When the end faces of the first magnetic plug (7) and the second magnetic plug (12) are flush with the inner wall of the outer ring cavity (26), the first limit switch (10) is touched by the first magnetic plug (7). Then the ring plate (6) moves downward in the outer ring cavity (26), and the elastic force of the first spring (20) is released. At this time, only the second spring (21) applies pressure to the valve core (4), thereby completing the switching of the working state of the first spring (20) and the second spring (21). S4. After a certain period of time, the first driving component drives the annular plate (6) to move upward in the outer annular cavity (26), the first spring (20) is compressed, and after the first driving component is started, the second electromagnet (14) is closed and the first electromagnet (9) is started. The first electromagnet (9) is started and causes the first magnetic plug (7) to have a tendency to move inward toward the valve core (4). When the second magnetic plug (12) corresponds to the first magnetic plug (7), under the magnetic repulsion between the first electromagnet (9) and the first magnetic plug (7), the first magnetic plug (7) pushes the second magnetic plug (12) toward the valve core (4). When the lateral movement occurs, the second reset spring (13) is compressed. At the same time, the first limit switch (10) closes and the first drive assembly is closed. When the end faces of the first magnetic plug (7) and the second magnetic plug (12) are flush with the inner wall of the central cavity (27), the second limit switch (15) is activated by the second magnetic plug (12). Then, the central plate (11) moves downward in the central cavity (27), and the elastic force of the second spring (21) is released. At this time, only the first spring (20) applies pressure to the valve core (4), thereby completing the switching of the working state of the second spring (21) and the first spring (20).

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