Infrared heating tube and vacuum furnace

Abstract

The present application relates to the technical field of vacuum furnace, provide a kind of infrared heating tube, including multi-section infrared heating body, vacuum cavity, first electrode section, second electrode section to N electrode section, power supply, electrode and multiple reflection plating layer;The reflection plating layer is symmetrically arranged in the vacuum cavity, the infrared heating body is arranged in the vacuum cavity, the reflection plating layer is arranged below the infrared heating body, the first electrode section, the second electrode section to N electrode section and the infrared heating body are alternately arranged, the power supply is connected with the electrode, the infrared heating body and the first electrode section, the second electrode section to N electrode section are connected with the electrode, and the first electrode section, the second electrode section to N electrode section are symmetrically arranged.The heating plate temperature uniformity of vacuum furnace is improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum furnace technology, and in particular to an infrared heating tube and a vacuum furnace. Background Technology

[0002] Existing vacuum welding equipment is a specialized device for welding workpieces. Its structure mainly includes a controller, a sealable cavity, a vacuum pump, a heating device, a heating plate, and a cooling device. The heating plate is located within the sealable cavity and is used to place the workpiece. The heating and cooling devices are located below the heating plate and are connected to the controller, which regulates the heating and cooling of the heating plate. The vacuum pump is located outside the sealable cavity and performs vacuuming to ensure the welding process is conducted in an oxygen-free environment, ensuring welding quality and reducing internal voids, thus improving the reliability of the weldment. Currently, commercially available infrared heaters consist of an outer sleeve and an internal heating element. The outer sleeve is often made of transparent quartz, while the internal heating element is often a halogen or carbon fiber heating element. These commonly used materials are all continuous heating elements, which can cause uneven heating, resulting in a higher temperature concentration in the middle of the heater and lower temperatures at both ends. This uneven heating affects the quality of the heated product and may also shorten the lifespan of the heating element, potentially causing safety issues. Furthermore, when using infrared heaters with transparent quartz sleeves, the infrared radiation generated by the heating element is emitted in all directions (360 degrees). However, during the heating process, we only need infrared radiation emitted towards the stage, resulting in wasted infrared radiation emitted in the opposite direction. This also causes heating of unnecessary components. Additionally, the heating plate of the vacuum furnace exhibits poor temperature uniformity. Summary of the Invention

[0003] This invention provides an infrared heating tube to solve the problem of poor temperature uniformity of the heating plate in the prior art vacuum furnace.

[0004] An infrared heating tube includes multiple infrared heating elements, a vacuum cavity, a first electrode segment, second to Nth electrode segments, a power supply, electrodes, and multiple reflective coatings. The reflective coatings are symmetrically arranged within the vacuum cavity. The infrared heating elements are disposed within the vacuum cavity, and the reflective coatings are disposed below the infrared heating elements. The first electrode segment, second to Nth electrode segments, and the infrared heating elements are alternately arranged. The power supply is connected to the electrodes. The infrared heating elements and the first to Nth electrode segments are connected to the electrodes. The first to Nth electrode segments are symmetrically arranged.

[0005] According to the infrared heating tube of the present invention, the lengths of the first electrode segment, the second electrode segment to the Nth electrode segment decrease sequentially.

[0006] According to the infrared heating tube of the present invention, the reflective coating includes a half-gold plating layer and a half-white plating layer, the half-gold plating layers are symmetrically arranged and disposed on the outside of the vacuum cavity, and the half-white plating layers are symmetrically arranged and disposed on the inside of the vacuum cavity.

[0007] According to the infrared heating tube of the present invention, the reflective coating is a sloped thickness coating.

[0008] According to the infrared heating tube of the present invention, the reflective coating is a high-temperature resistant reflective material.

[0009] According to the infrared heating tube of the present invention, the electrodes, the first electrode segment, the second electrode segment to the Nth electrode segment are made of electrode materials with good electrical conductivity and low heating rate.

[0010] The infrared heating tube according to the present invention further includes a quartz sleeve, which is sleeved on the vacuum cavity.

[0011] A vacuum furnace includes an infrared heating tube as described in any of the above claims, wherein a plurality of the infrared heating tubes are disposed inside the vacuum furnace and are evenly and parallelly distributed below a heating plate.

[0012] This invention improves the temperature uniformity of the vacuum furnace's heating plate by using an infrared heating tube with a shorter first electrode segment than the second, and a second electrode segment shorter than the third. The infrared heating tubes radiate heat onto the heating plate, and the radiation intensity gradually decreases from the outer edges to the middle, thus enhancing the uniformity of the heating plate. Alternating between white and gold plating alters the heat dissipation pattern, resulting in strong radiation at the outer edges and low intensity in the middle, preventing localized overheating and ensuring a more uniform temperature distribution. The sloping thickness of the coating creates a gradual change in infrared radiation intensity, with higher intensity in thicker areas and lower intensity in thinner areas, further improving the temperature uniformity of the vacuum furnace's heating plate. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the front view structure of the infrared heating tube in the first embodiment; Figure 2 This is a schematic diagram of the front view structure of the infrared heating tube in the second embodiment; Figure 3This is a schematic diagram of the front view structure of the infrared heating tube in the third embodiment; Figure 4 This is a schematic diagram of the structure of a vacuum furnace; Figure 5 This is a magnified view of the structure of part A; Reference numerals: 1. Power supply; 2. Electrode; 3. Infrared heating element; 4. Reflective coating; 5. Quartz sleeve; 6. Vacuum cavity; 31. Direct irradiation line of the infrared heating element; 32. Reflected line of the reflective coating; 41. Semi-gold plating layer; 42. Semi-white plating layer; 43. Sloping thickness coating; 71. First electrode segment; 72. Second electrode segment; 73. Third electrode segment; 74. Fourth electrode segment. Detailed Implementation

[0015] The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of the invention.

[0016] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0017] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0018] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0019] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0020] The following is combined with Figure 1-5 An infrared heating tube according to an embodiment of the present invention includes multiple infrared heating elements 3, a vacuum cavity 6, a first electrode segment 71, a second electrode segment 72 to the Nth electrode segment, a power supply 1, electrodes 2, and multiple reflective coatings 4. The reflective coatings 4 are symmetrically arranged within the vacuum cavity 6. The infrared heating elements 3 are disposed within the vacuum cavity 6, and the reflective coatings 4 are disposed below the infrared heating elements 3. The first electrode segment 71, the second electrode segment 72 to the Nth electrode segment are alternately arranged with the infrared heating elements 3. The power supply 1 is connected to the electrodes 2, and the power supply 1 and electrodes 2 are symmetrically arranged. The infrared heating elements 3 and the first electrode segment 71, the second electrode segment 72 to the Nth electrode segment are connected to the electrodes 2, and the first electrode segment 71, the second electrode segment 72 to the Nth electrode segment are symmetrically arranged. The infrared heating elements 3 can directly generate direct infrared irradiation lines 31, and the infrared heating elements 3 irradiate the reflective coatings 4 to generate reflective lines 32. The areas where the electrode segments are used are not heated. The infrared heating elements 3 are preferably infrared heating wires 3.

[0021] In some embodiments, N is preferably four segments, namely, a first electrode segment 71, a second electrode segment 72, a third electrode segment 73, and a fourth electrode segment 74. The first electrode segment 71, the second electrode segment 72, the third electrode segment 73, and the fourth electrode segment 74 do not generate heating radiation.

[0022] In some embodiments, the lengths of the first electrode segment 71, the second electrode segment 72, and the Nth electrode segment increase sequentially. That is, the length of the first electrode segment 71 is less than the length of the second electrode segment 72, the length of the second electrode segment 72 is less than the length of the third electrode segment 73, the length of the third electrode segment 73 is less than the length of the fourth electrode segment 74, and the length of the infrared heating element gradually decreases from both sides to the middle, so that the radiation intensity of the infrared heating tubes on both sides gradually decreases to the middle position of the infrared heating tubes, thereby improving the temperature uniformity of the heating plate of the vacuum furnace.

[0023] In some embodiments, the reflective coating 4 includes a half-gold plating layer 41 and a half-white plating layer 42. The half-gold plating layer 41 is symmetrically arranged and disposed on the outside of the vacuum cavity 6, while the half-white plating layer 42 is symmetrically arranged and disposed on the inside of the vacuum cavity 6. The half-gold plating process can achieve a reflectivity of about 90%, while the half-white plating process achieves a reflectivity of about 60%.

[0024] In some embodiments, the reflective coating 4 has a sloping thickness. That is, the reflective coating 4 is a sloping thickness coating 43. The sloping thickness coating 43 produces a gradual change in infrared radiation intensity, with high radiation intensity in areas with thick coating and low radiation intensity in areas with thin coating. In other words, the radiation intensity gradually decreases from both sides to the middle of the heating tube, improving the temperature uniformity of the heating plate in the vacuum furnace.

[0025] In some embodiments, the reflective coating 4 is a high-temperature resistant reflective material.

[0026] In some embodiments, electrode 2, first electrode segment 71, second electrode segment 72 to Nth electrode segment are made of electrode material with good conductivity and low heat generation rate.

[0027] In some embodiments, a quartz sleeve 5 is also included, which is sleeved on the vacuum chamber 6.

[0028] A vacuum furnace includes the aforementioned infrared heating tubes. Multiple infrared heating tubes are arranged inside the vacuum furnace, uniformly and parallelly distributed below a heating plate. Vacuum furnace equipment typically uses multiple sets of parallel infrared heaters as a heating mechanism to heat the workpiece. The temperature of these multiple sets of infrared heaters often concentrates from the periphery inwards, resulting in a higher temperature at the center.

[0029] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An infrared heating tube, characterized in that, It includes multiple infrared heating elements, a vacuum cavity, a first electrode segment, a second to Nth electrode segment, a power supply, electrodes, and multiple reflective coatings; the reflective coatings are symmetrically arranged inside the vacuum cavity, the infrared heating elements are disposed inside the vacuum cavity, the reflective coatings are disposed below the infrared heating elements, the first electrode segment, the second to Nth electrode segment are alternately arranged with the infrared heating elements, the power supply is connected to the electrodes, and the infrared heating elements and the first to Nth electrode segments are connected to the electrodes, the first electrode segment, the second to Nth electrode segment are symmetrically arranged.

2. The infrared heating tube according to claim 1, characterized in that, The lengths of the first electrode segment, the second electrode segment, and the Nth electrode segment increase sequentially.

3. The infrared heating tube according to claim 1, characterized in that, The reflective coating includes a half-gold plating layer and a half-white plating layer. The half-gold plating layers are symmetrically arranged and are disposed on the outside of the vacuum cavity. The half-white plating layers are symmetrically arranged and are disposed on the inside of the vacuum cavity.

4. The infrared heating tube according to claim 1, characterized in that, The reflective coating is a sloped thickness coating.

5. The infrared heating tube according to claim 1, characterized in that, The reflective coating is made of a high-temperature resistant reflective material.

6. The infrared heating tube according to claim 1, characterized in that, The electrodes, the first electrode segment, the second electrode segment to the Nth electrode segment are made of electrode materials with good electrical conductivity and low heat generation rate.

7. The infrared heating tube according to claim 1, characterized in that, It also includes a quartz sleeve, which is fitted onto the vacuum chamber.

8. A vacuum furnace, characterized in that, The vacuum furnace includes an infrared heating tube as described in any one of claims 1 to 7, wherein a plurality of the infrared heating tubes are provided inside the vacuum furnace, and the infrared heating tubes are evenly and parallelly distributed below the heating plate.

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