Electrostatic elimination device, method of eliminating static electricity and manufacturing system

Abstract

The application relates to the technical field of electronics, in particular to an electrostatic elimination device, an electrostatic elimination method and a manufacturing system. The electrostatic elimination device comprises a containing cavity, a battery pack, a lead connector, a switch piece and an electrical connector. The containing cavity is used for containing a carrier plate carrying the battery pack. The battery pack comprises a first battery and a second battery connected in series. The lead connector comprises a zero potential node between a first electrode of the first battery and a second electrode of the second battery. The switch piece is configured to switch the electrical connection state between the electrical connector and the battery pack. The electrical connector is electrically connected to the zero potential node and coupled with a detection device, so that an electrostatic discharge path is formed between the zero potential node and the detection device.

Description

Technical Field

[0001] This application relates to the field of electronic technology, specifically to an electrostatic elimination device, a method for eliminating static electricity, and a manufacturing system, particularly an electrostatic elimination device for a detection device capable of detecting micro- and nano-scale components, and a method for eliminating static electricity using the electrostatic elimination device. Background Technology

[0002] In the manufacturing and fabrication of semiconductor components (such as chips, wafers, transistors, integrated circuits, or other micro / nanoscale electronic components), testing equipment equipped with probes is typically used to test parameters such as voltage, current, resistance, or communication data to perform quality inspection and process control. These testing steps help ensure that the electrical performance of semiconductor components meets design specifications and improve product reliability and yield.

[0003] Existing testing methods typically involve manual operation or the use of inspection tools (such as automated testing devices equipped with robotic arms that can hold probes) on a workbench to perform electrical tests on multiple test points on semiconductor circuits. However, in actual testing, the circuit board is often not effectively fixed, leading to insufficient probe positioning accuracy, which in turn affects testing efficiency and accuracy. Furthermore, static electricity can accumulate between operators, circuit boards, and the workbench. Electrostatic discharge (ESD) has a significant impact on the electrical test results of semiconductor components and product quality, and can even cause component damage. Therefore, the industry widely adopts various electrostatic protection measures to reduce the interference of static electricity on the testing process and ensure the reliability of test results and product quality.

[0004] In the past, various electrostatic discharge (ESD) technologies were widely used in the industry to effectively eliminate static electricity, including tip discharge, ion neutralization, electrostatic isolation, airflow dust removal, and grounding discharge. Tip discharge utilizes the high electric field intensity generated at the tip of a conductor to ionize the surrounding air, releasing electrons to neutralize the static charge. Ion neutralization actively releases positive and negative ions through an ion generator, neutralizing the static charge on the surface of charged objects and reducing the risk of static buildup. Electrostatic isolation effectively blocks the transfer of static charge to sensitive electronic components by using highly insulating materials or designing isolation structures. Airflow dust removal uses airflow to blow away charged particles or dust adhering to the surface of components, further reducing the risk of static accumulation and particulate contamination. Grounding discharge connects charged objects to the ground, using a low-impedance path to guide static charge to the ground, thereby preventing ESD damage to electronic components.

[0005] However, existing electrostatic discharge (ESD) technologies often fail to completely release static electricity, leaving residual charge. Taking grounding discharge as an example, these methods typically connect the equipment to be discharged to the ground using a wire, and utilize the building's metal structure (such as the steel frame) as a discharge path. However, these metal structures often contain impurities or surface oxide layers, reducing their conductivity and hindering effective charge release, thus preventing complete ESD elimination. This issue is particularly critical in high-precision electronic processes such as semiconductor manufacturing, precision circuit assembly, and circuit quality inspection, as even minute amounts of residual static electricity can significantly impact process stability, product yield, or inspection accuracy.

[0006] In summary, how to provide an electrostatic elimination device suitable for testing equipment for micro- and nano-scale components, so as to effectively and thoroughly eliminate the static charge generated during the testing process and thus avoid damage to the components by static electricity, is a technical problem that urgently needs to be solved in the industry. Summary of the Invention

[0007] Based on this, this application provides an electrostatic elimination device, a method for eliminating static electricity, and a manufacturing system to effectively and thoroughly eliminate static charges generated during the testing process, thereby preventing static electricity from damaging components.

[0008] In some embodiments, this application provides an electrostatic discharge device, including a accommodating cavity, a battery pack, a conductive member, a switching member, and an electrical connector. The accommodating cavity is used to accommodate a carrier plate. The battery pack is disposed on the carrier plate and includes a first battery and a second battery connected in series. The conductive member is connected in series to the battery pack and includes a zero-potential node located between a first electrode of the first battery and a second electrode of the second battery. The switching member is electrically connected to the conductive member and configured to switch the electrical connection state between the electrical connector and the battery pack. The electrical connector is electrically connected to the zero-potential node and coupled to a detection device to form an electrostatic discharge path between the zero-potential node and the detection device.

[0009] In some embodiments, the number of batteries included in the battery pack is an even number.

[0010] In some embodiments, the conductor includes at least one of a wire, a conductive pattern, a conductive sheet, a conductive adhesive, a conductive tape, a conductive fabric, and a conductive foam.

[0011] In some embodiments, the static eliminator also includes an indicator light source configured to emit an indicator signal in response to an electrical connection state.

[0012] In some embodiments, the static eliminator also includes a portable outer casing with a accommodating cavity.

[0013] In some embodiments, the electrostatic elimination device also includes an outer housing having a receiving cavity, the outer housing being configured to attach and secure to the detection device.

[0014] In some embodiments, the detection device has probes that can be used to detect micro- and nano-scale components.

[0015] In some embodiments, the voltage value of the electrostatic discharge generated via the electrostatic discharge path is less than 10 volts.

[0016] In some embodiments, the static eliminator also includes an alerting device electrically connected to the static discharge path and configured to reflect the static discharge status of the static discharge path.

[0017] In some embodiments, the battery pack further includes at least one third battery connected in series to the second electrode of the first battery, and at least one fourth battery connected in series to the first electrode of the second battery; the number of at least one third battery and at least one fourth battery are equal.

[0018] In some embodiments, the static elimination device further includes an adjustment element electrically connected to the conductor and the detection device, and configured to adjust the resistance value between the conductor and the detection device.

[0019] In some embodiments, this application provides another electrostatic discharge device, including: a battery pair mounted on a carrier plate, and a conductive member connected in series with the battery pair. When the conductive member is connected to the battery pair to form an electrical circuit, the conductive member forms a zero-potential node between the first electrode and the second electrode, and the zero-potential node is electrically coupled to the detection device to form an electrostatic discharge path.

[0020] In some embodiments, the detection device is configured to use probes to detect micro- and nano-scale components.

[0021] In some embodiments, the voltage value of the electrostatic discharge generated via the electrostatic discharge path is less than 10 volts.

[0022] In some embodiments, the static elimination device also includes a portable housing that contains a carrier plate therein.

[0023] In some embodiments, a switch is provided on the outer surface of the portable housing, the switch being configured to connect or disconnect an electrical circuit.

[0024] In some embodiments, an indicator light source is provided on the outer surface of the portable housing, and the indicator light source is configured to emit an indicator signal in response to the electrical connection state of the electrical circuit.

[0025] In some embodiments, the battery pair includes a battery panel mounted on a flexible substrate.

[0026] In some embodiments, the static elimination device is configured to be integrated into the wearable device.

[0027] In some embodiments, this application provides a method for eliminating static electricity. The method includes: placing a battery pack on a carrier plate; connecting a conductor in series with a first battery and a second battery in the battery pack; connecting the conductor with the first battery and the second battery to form an electrical circuit, and forming a zero-potential node between the first electrode of the first battery and the second electrode of the second battery; electrically coupling the zero-potential node to a detection device; and releasing static electricity generated by the detection device to the zero-potential node through a static discharge path formed between the detection device and the zero-potential node; wherein the detection device has a probe that can be used to detect micro- and nano-scale components.

[0028] In some embodiments, this application provides a manufacturing system for manufacturing probe cards. The manufacturing system provides multiple probes and assembles the multiple probes into a guide plate and a space conversion unit within an outer frame or housing; wherein the manufacturing system includes the electrostatic elimination device in any of the above embodiments.

[0029] In some embodiments, this application provides a manufacturing system for manufacturing probe holders, providing multiple probes, assembling the multiple probes on a guide plate and a space conversion unit, and electrically connecting them to a detection device;

[0030] The manufacturing system includes the static eliminator in any of the above embodiments, and the static eliminator has two batteries connected in series to form opposing potential points.

[0031] In some embodiments, this application provides a manufacturing system for providing a probe card to analyze a test object. The probe card provides multiple probes and assembles the multiple probes on a guide plate and a space conversion unit. At least one test object is analyzed through at least one tip of the multiple probes. The manufacturing system includes an electrostatic elimination device as described in any of the above embodiments, and the test object includes at least one of a wafer, a die, and an integrated circuit.

[0032] In summary, this application focuses on electrostatic discharge (ESD) protection technology in the fields of semiconductor testing and manufacturing. It is specifically designed for the testing and analysis of micro / nano-scale components, or related product assembly processes. Through dedicated ESD elimination devices and methods, it addresses the precision requirements of the analyte, the semiconductor object being analyzed, or the assembly of probe-related products, while preventing ESD interference or damage. Its technological innovation lies in the introduction of a zero-potential node design. This design utilizes two batteries connected in series to form a counteracting potential point, serving as an independent and stable ESD discharge terminal, rather than relying on traditional grounding or plasma diffusion. Simultaneously, it incorporates a voltage consistency control mechanism, including battery screening of the same specifications, a voltage balancing circuit, and status monitoring, to ensure long-term operational stability. The Faraday cage structure outer casing provides anti-interference, maintaining the zero-potential node at 0V ± 0.01V. Furthermore, this design is modular, allowing direct coupling with probe testing devices and extension to diverse application scenarios such as wearable devices. Through the above, this application can completely eliminate static electricity, avoiding damage to micro- and nano-components; improve the accuracy and reliability of electrical detection, analysis, or assembly, reducing misjudgments and failures caused by ESD; thereby improving product yield and ensuring finished product quality; at the same time, it enhances the stability of the device in different environments; and improves operational convenience and safety through battery status display and warning functions, comprehensively improving the efficiency and reliability of the semiconductor testing process.

[0033] The technical features of this application have been broadly outlined above to facilitate a better understanding of the detailed description thereof below. Other technical features constituting the target of the claims will be described below. Those skilled in the art to which this application pertains will understand that the concepts and specific embodiments disclosed below can be readily utilized as modifications or designs to achieve the same purpose as this application. Those skilled in the art will also understand that such equivalent constructions cannot depart from the spirit and scope of this application as defined by the appended claims. Attached Figure Description

[0034] Figure 1 The figure shown is a perspective view of an electrostatic elimination device according to a first embodiment of this application.

[0035] Figure 2 The diagram shown is a schematic diagram of a detection device according to an embodiment of this application.

[0036] Figure 3 The diagram shown is a schematic diagram of an electrostatic elimination device according to a second embodiment of this application.

[0037] Figure 4 The diagram shown is a schematic diagram of an electrostatic elimination device according to a third embodiment of this application.

[0038] Figure 5The diagram shown is a schematic diagram of an electrostatic elimination device according to a fourth embodiment of this application.

[0039] Figure 6 The diagram shown is a schematic diagram of an electrostatic elimination device according to a fifth embodiment of this application.

[0040] Figure 7 The diagram shown is a schematic diagram of an electrostatic elimination device according to a sixth embodiment of this application.

[0041] Figure 8 The diagram shown is a schematic of the static elimination device according to the sixth embodiment above integrated into a wearable device.

[0042] Explanation of reference numerals in the attached figures:

[0043] 100: Static electricity elimination device; 140: Conductor.

[0044] 110a: Outer casing 20: Detection device

[0045] 110b: Receptacle chamber; 201: Test end

[0046] 111: Switching element; 202: Wire.

[0047] 112: Electrical connector; 203: Substrate

[0048] 113: Indicator light source; 204: Connection unit

[0049] 120: Carrier plate; 205: Space conversion unit

[0050] 130: Battery pack; 206: Probe head

[0051] 131: First battery; 207: Probe

[0052] 1311: First electrode; 207': Probe array

[0053] 1312: Second electrode 30: Warning device

[0054] 132: Second battery; 300: Static electricity elimination device

[0055] 1321: First electrode; 310: Receiving cavity

[0056] 1322: Second electrode; 330: Battery pack

[0057] 331: First battery; 432: Second battery

[0058] 3311: First electrode; 440: Conductor

[0059] 3312: Second electrode; 50: Wearable device

[0060] 332: Second battery; 500: Static electricity elimination device

[0061] 3321: First electrode; 510: Receptacle cavity

[0062] 3322: Second electrode; 530: Battery pack

[0063] 340: Connector; 531: First Battery

[0064] 40: Adjustment element; 532: Second battery

[0065] 400: Static electricity elimination device; 533: Third battery

[0066] 410: Receptacle cavity; 534: Fourth battery

[0067] 430: Battery pack; 540: Connector

[0068] 431: First Battery 60: User

[0069] 600: Static eliminator; 720: Carrier plate

[0070] 610: Receptacle cavity; 730: Battery pack

[0071] 630: Battery pack; 731: First battery

[0072] 631: First battery; 732: Second battery

[0073] 632: Second battery O: Test object

[0074] 640: Connector N: Zero Potential Node

[0075] 700: Static eliminator PA: Static discharge path Detailed Implementation

[0076] To better understand the structure, content, advantages, and effects of this application, the application is described in detail below with reference to the accompanying drawings and in the form of one or more alternatively combined embodiments. The accompanying drawings are for illustrative purposes and to assist in the description only, and should not be interpreted or limited in terms of the scale and arrangement of the accompanying drawings.

[0077] As used herein, the terms “approximately,” “substantial,” “substantial,” and “substantively” are used to describe and consider minor variations. When used in conjunction with an event or situation, these terms may mean that the event or situation has clearly occurred or that the event or situation is very close to occurring.

[0078] Please see Figure 1 This is a perspective view of the static elimination device 100 according to the first embodiment of this application. In some embodiments, the static elimination device 100 has a box-shaped structure, with an outer box body 110a on the outside and an accommodating cavity 110b inside, which can be used to accommodate the carrier plate 120. In some embodiments, the carrier plate 120 may be a printed circuit board (PCB), a flexible substrate, a flexible substrate, a flexible display substrate, a heat spreader, a space conversion plate, a perovskite solar panel, a ceramic substrate, or other substrate structures with good electrical insulation and thermal stability.

[0079] The carrier plate 120 can support the battery pack 130 disposed thereon. The battery pack 130 can consist of one or more battery cells connected in series, that is, the number of batteries it includes is even. Figure 1 In the illustrated embodiment, the battery pack 130 includes a first battery 131 and a second battery 132 connected in series. The first battery 131 has a first electrode 1311 (e.g., a positive electrode) and a second electrode 1312 (e.g., a negative electrode), while the second battery 132 also has a first electrode 1321 (e.g., a positive electrode) and a second electrode 1322 (e.g., a negative electrode).

[0080] In some embodiments, the terminal voltage provided by the battery cells (e.g., the first battery 131 or the second battery 132) used in the battery pack 130 may be between 0V and 12V. The battery cell may be a button cell, a cylindrical DC dry cell, or a disposable battery or a rechargeable battery with rechargeable capability. Further, the aforementioned battery cell may be selected from, but is not limited to, the following types: low-voltage lithium metal batteries (e.g., Li-MnO2), lithium manganese oxide button cells, lithium thionyl chloride batteries (Li-SOCl2), or other lithium-ion and lithium polymer batteries with similar characteristics. In other embodiments, the aforementioned battery cell may also be in the form of a solar panel, such as a perovskite solar panel, or other similar thin-film solar panels, such as dye-sensitized solar cells (DSSC), copper indium gallium selenide (CIGS), or amorphous silicon solar cells (a-Si). Furthermore, in some embodiments, the battery pack 130 may be composed of battery cells of the same type and specifications to ensure consistency of terminal voltage between each pair of batteries.

[0081] To ensure the consistency of the terminal voltages of the first battery 131 and the second battery 132 in the battery pack 130, and to maintain the stability of the zero-potential node N, this application provides the following measures. First, the battery cells used in the battery pack 130 (e.g., the first battery 131 and the second battery 132) should be batteries of the same model, batch, and specifications, such as the same chemical composition (e.g., lithium manganese oxide) and rated voltage (e.g., 3V). During the battery assembly process, each battery should be initially voltage-screened using a precision voltage measurement device (e.g., a digital voltmeter) to ensure that the voltage difference is less than 0.01V, thereby reducing voltage unevenness caused by manufacturing differences.

[0082] Furthermore, to further ensure voltage consistency of the battery pack 130 during long-term use, this application may optionally include a voltage balancing circuit electrically connected between the first battery 131 and the second battery 132. This voltage balancing circuit may include a microcontroller unit (MCU) and a voltage sensor to monitor the terminal voltage of each battery in real time. When a voltage difference exceeding a default threshold (e.g., 0.05V) is detected, the voltage balancing circuit can partially discharge the battery with the higher voltage through resistive current shunting or charge transfer to balance the voltages of the two batteries. This voltage balancing circuit may be integrated onto the carrier board 120 and electrically coupled to the battery pack 130 via a connector 140.

[0083] To address voltage shifts caused by battery aging or varying discharge rates, this application further provides a battery status monitoring and maintenance mechanism. In some embodiments, the static electricity elimination device 100 may include a battery status indicator (e.g., an LED indicator or digital display mounted on the outer casing 110a) to display the remaining charge or voltage status of the battery pack 130. When the battery voltage is below a default value (e.g., 80% of the rated voltage) or the voltage difference between two batteries exceeds a safe range (e.g., 0.1V), the indicator may issue a visual or audible warning to prompt the user to replace the battery.

[0084] Furthermore, the stability of battery voltage may be affected by environmental conditions (such as temperature and humidity). To ensure the stability of the zero-potential node N under different environments, the battery pack 130 should use battery cells with high-temperature stability and low internal resistance characteristics, such as lithium thionyl chloride batteries (Li-SOCl2). In some embodiments, the static eliminator 100 may further include a temperature compensation module, which monitors the ambient temperature through a thermistor or other temperature sensing element and adjusts the operating parameters of the voltage balancing circuit according to temperature changes to maintain the consistency of battery voltage. The above measures ensure that the static eliminator 100 can operate stably in various application scenarios (such as cleanrooms, laboratories, or outdoor testing environments).

[0085] The static eliminator 100 also includes a conductor 140 for forming an electrical circuit with the battery pack 130. In some embodiments, the conductor 140 may include at least one of a wire, a conductive pattern, a conductive sheet, a conductive adhesive, a conductive tape, a conductive fabric, conductive foam, or other conductive elements with similar functions.

[0086] In a specific configuration, the connector 140 can be connected in series between specific electrodes within the battery pack 130. For example, in one embodiment, the connector 140 can be connected in series between the positive terminal (first electrode 1311) of the first battery 131 and the negative terminal (second electrode 1322) of the second battery 132. In some embodiments, since the first electrode 1311 of the first battery 131 and the second electrode 1322 of the second battery 132 have terminal voltages of the same magnitude but opposite polarities, when the battery pack 130 forms an electrical circuit through the connector 140, a zero-potential node N with opposing potentials can be formed between the two electrodes. Since the potential of the zero-potential node N is 0V, it can serve as an electrical neutral point, thereby providing a stable reference point for electrostatic collection and introduction.

[0087] To ensure the potential stability of the zero-potential node N and maintain the efficiency and reliability of the electrostatic discharge device 100 during electrostatic discharge, this application provides an electromagnetic interference (EMI) protection design. In some embodiments, the outer casing 110a of the electrostatic discharge device 100 is made of a conductive material (such as an aluminum alloy or copper shielding layer) to form a Faraday cage structure, which is used to shield external electromagnetic interference (EMI), such as radio frequency interference from detection equipment or surrounding electronic devices. This shielding structure can guide external electromagnetic fields to the surface of the outer casing 110a and release them through a grounding terminal (if any) or the zero-potential node N, thereby ensuring that the potential of the zero-potential node N is not disturbed and is maintained within a stable range of 0V ± 0.01V.

[0088] In some embodiments, the static eliminator 100 can be electrically coupled to the detection device 20, forming a static discharge path PA. Specifically, the static eliminator 100 can establish this static discharge path with the detection device 20 via an electrical connector 112. The electrical connector 112 can be disposed on the outer casing 110a of the static eliminator 100 and electrically connected to the zero potential node N via a wire or other conductive element with similar function (e.g., conductive sheet, conductive tape, etc.). In some embodiments, the electrical connector 112 may include a female connector of a banana plug, the corresponding plug terminal of which is pre-electrically connected to the detection device 20 to be static-eliminated. In this way, when the user inserts the plug terminal into the corresponding female connector, a stable static discharge path PA can be established between the static eliminator 100 and the detection device 20. In this way, the detection device 20 can guide the static charge to be released into the electrical circuit including the battery pack 130 and the conductor 140 through the static discharge path PA established between it and the static elimination device 100, thereby effectively eliminating the static charge generated during the detection process.

[0089] To ensure that the current during electrostatic discharge is controlled within a safe range to avoid damage to the detection device 20 or the test object (such as micro / nano-scale components), this application provides a current-limiting mechanism integrated into the electrostatic discharge path PA. In some embodiments, a current-limiting resistor is connected in series between the electrical connector 112 of the electrostatic elimination device 100 and the zero-potential node N. The resistance value of this current-limiting resistor ranges from 10Ω to 1000Ω, and the specific value can be adjusted according to the electrostatic withstand capability of the test object. This current-limiting resistor can effectively reduce the instantaneous current peak during electrostatic discharge, ensuring that the discharge current is controlled within a safe range to protect sensitive electronic components.

[0090] Furthermore, to further enhance the safety of electrostatic discharge, this application may optionally include a transient suppression element, such as a transient voltage suppressor (TVS) or a metal oxide varistor (MOV), which is connected in parallel in the electrostatic discharge path PA between the electrical connector 112 and the detection device 20. When electrostatic discharge generates a momentary high voltage or high current, the transient suppression element can quickly turn on, diverting the excessive current to the zero potential node N, thereby preventing the current or voltage from exceeding the tolerance range of the device under test. This transient suppression element can be integrated onto the carrier plate 120 and electrically coupled to the electrical connector 112 via the conductive member 140.

[0091] To achieve real-time monitoring and protection, the electrostatic eliminator 100 may further include a current monitoring module electrically connected to the electrostatic discharge path PA to measure the magnitude of the discharge current. In some embodiments, the current monitoring module includes a current sensor (e.g., a Hall effect sensor) and a microcontroller unit (MCU) to record the peak value and duration of the discharge current in real time. If the discharge current exceeds the default safe range, the module can trigger a protection mechanism, such as automatically disconnecting the electrostatic discharge path PA via a switching element 111, or issuing a visual or audible alarm via an alarm device (alarm device 50 in the embodiments described below) to prompt the user to check the system status. In another feasible implementation, the microcontroller of the electrostatic eliminator 100 may integrate at least one communication unit. When the module triggers the protection mechanism after detecting that the discharge current exceeds the default safe range, it can transmit the abnormal record to the built-in memory of the device 100 or to at least one storage unit (local or cloud) of at least one manufacturing system that can accept the abnormal record, for recording information such as production batch, part number, and time, to facilitate subsequent quality control or sampling inspection procedures.

[0092] The impedance design of the electrostatic discharge path PA is also crucial for current control. In some embodiments, the conductor 140 and the electrical connector 112 are made of low-resistance conductive materials (e.g., copper or silver wires with a resistivity of less than 1.68 × 10⁻⁶). -8 The conductor is made of Ω·m and its cross-sectional area and length are ensured to be appropriate (e.g., the conductor diameter is between 0.5 mm and 2 mm, and the length is less than 50 cm) to control the total impedance of the electrostatic discharge path PA between 0.1 Ω and 10 Ω. This impedance range can ensure efficient electrostatic discharge while avoiding instantaneous high current due to excessively low impedance. In addition, to ensure impedance stability, an anti-oxidation coating can be applied to the surfaces of the conductor 140 and the electrical connector 112 to prevent impedance increase due to oxidation during long-term use. Through the above measures, the electrostatic eliminator 100 of this application can achieve safe and efficient electrostatic discharge in a variety of electrostatic sensitive application scenarios.

[0093] In the configuration of the above embodiment, since the first battery 131 and the second battery 132 provide a stable DC current, the zero-potential node N formed by them can be maintained at an electrically "clean" 0V potential. Compared with the traditional method of conducting static electricity into the building structure (such as steel frame) through a grounding wire, the overall conductivity of the steel frame material may decrease due to impurities or oxide layers. Therefore, the method of establishing a zero-potential reference point with batteries provided in this application has better consistency and stability, which helps to more effectively eliminate static charge and improve the static elimination effect of the system.

[0094] In some embodiments, the static eliminator 100 may include a switching element 111 disposed on its outer housing 110a and electrically connected to the conductor 140. The switching element 111 may be configured to switch the electrical connection state between the conductor 140 and the battery pack 130. Specifically, the switching element 111 may be electrically connected to the conductor 140 via a wire or other component and disposed in the current path between the conductor 140 and the battery pack 130, thereby realizing the function of controlling the conductor 140 to be turned on or off.

[0095] In a specific configuration, the switching element 111 can be a toggle switch, which has a two- or three-state mechanical lever structure, allowing the internal contacts to be switched between closed and open by tossing. When the user switches the lever to the ON position, the conductive structure inside the toggle switch closes the current path, connecting the electrical circuit between the battery pack 130 and the conductor 140, thus activating the electrostatic discharge mechanism. Conversely, when switched to the OFF position, the path is cut off, preventing static current from entering the circuit. Through this switch control design, the user can select to activate or deactivate the electrostatic discharge path PA according to actual detection and maintenance needs, improving the overall system's operational convenience. In other embodiments, a rotary mechanical structure can also be used, achieving the same switching mode through rotation.

[0096] In some embodiments, the static eliminator 100 may further include an indicator light source 113 disposed on its outer casing 110a. The indicator light source 113 is configured to emit a corresponding visual indicator signal in response to the electrical connection state between the connector 140 and the battery pack 130. Specifically, the indicator light source 113 may be electrically connected to the connector 140 via a wire or other conductive element. When the electrical circuit between the connector 140 and the battery pack 130 is connected (e.g., switched to the on state by the switching element 111), the indicator light source 113 emits visible light due to the current flowing in the path, indicating to the user that the static eliminator 100 is currently in an activated state. Conversely, when the switching element 111 is switched to the off state and the circuit is cut off, the indicator light source 113 will also turn off, indicating that the static eliminator 100 is currently in a non-activated state.

[0097] In some embodiments, the indicator light source 113 may include a small light source element that can be mounted on the outer casing 110a of the static elimination device 100, such as a light-emitting diode (LED), a miniature neon lamp, or other low-power, long-life visual cueing elements. This light source element can serve as a real-time indicator of the operating status and also enhance the user's intuitive understanding during operation and maintenance.

[0098] It should be noted that, in Figure 1In the disclosed embodiments, some components (such as switch 111, electrical connector 112, and indicator light 113) are disposed on the outer casing 110a of the static elimination device 100. However, those skilled in the art will understand that these components can also be disposed in other locations on the outer casing 110a (e.g., on the side, bottom, or at least partially within the accommodating cavity 110b) to accommodate different design requirements. Therefore, all embodiments with variations in the configuration of the above components fall within the scope of protection of this application.

[0099] In some embodiments, the outer casing 110a of the static eliminator 100 can be portable. This allows users to easily carry the static eliminator 100 and use it in different work environments, greatly improving convenience and flexibility. The portable design not only facilitates movement but also allows users to quickly deploy it in scenarios requiring static elimination, without relying on fixed installation locations. Furthermore, this design helps save space and allows for flexible application in various locations, such as laboratories, factories, and testing sites, providing higher operational efficiency and flexibility.

[0100] In other embodiments, the outer casing 110a of the static eliminator 100 can be configured to attach to the device to which static electricity is to be eliminated (e.g., the detection device 20), ensuring that the static eliminator 100 is not prone to poor contact due to movement or collision during use. This attachment design effectively reduces physical displacement between devices, improves system stability and reliability, and avoids poor contact problems caused by vibration or movement during operation, thereby ensuring the stability and safety of the static discharge process.

[0101] Please see Figure 2 This diagram illustrates a detection device 20 according to an embodiment of this application. In some embodiments, the detection device 20 can be used to inspect the test structure, size, material properties, circuit structure, or electrical parameters of a test object O. In some embodiments, the test object O can be a chip, wafer, transistor, integrated circuit, or other micro / nano-scale electronic component.

[0102] In some embodiments, the detection device 20 can be a non-destructive testing tool, including but not limited to the following devices: atomic force microscope (AFM), transmission electron microscope (TEM), focused ion beam microscope (FIB), scanning probe microscope (SPM), electrostatic force microscope (EFM), scanning capacitance microscope (SCM), and scanning ion conductance microscope (SICM). In some embodiments, the detection device 20 can also be integrated into a complete test system or detection system. Furthermore, although in the embodiments described herein, the electrostatic eliminator 100 is primarily used to eliminate static charge accumulated on the detection device 20, in other embodiments, the electrostatic eliminator 100 can also be used to eliminate static charge accumulated on other devices (such as test equipment, assembly equipment, processing equipment, needle bending devices, or loads).

[0103] like Figure 2 As shown, the test end 201 of the detection device 20 is disposed on the substrate 203 and electrically connected to the connection unit 204 via the wire 202. The connection unit 204 further converts and transmits the electrical signals detected by the probes 207 (or the probe array 207' formed by the probes 207) disposed on the probe head 206 via the space transformation unit 205, thereby performing electrical detection of the analyte O. In some embodiments, the space transformation unit 205 can be configured to change the direction, spacing, or arrangement of the electrical signal path so that it is configured to correspond to the input end of the connection unit 204. In some embodiments, the probe 207 can be a micro probe, a nano probe, an angstrom probe, or other probes used to detect micro- and nano-scale components.

[0104] As previously stated, the electrostatic discharge device 100 of this application is primarily used to eliminate the static charge accumulated on the detection device 20. When the detection device 20 generates and accumulates static charge, the static charge can be guided to the electrostatic discharge device 100 for release via components such as wires. However, since the device under test (DUT) O is typically a precision electronic component, applying excessive current may damage it. To avoid generating excessive instantaneous current during electrostatic discharge, which could damage the DUT O, the electrostatic discharge current generated between the electrostatic discharge device 100 and the detection device 20 should be limited to an acceptable range. In some embodiments, the voltage value of the electrostatic discharge generated via the electrostatic discharge path PA can be controlled between 0V and 2.5V. In other embodiments, the voltage value of the electrostatic discharge can also be controlled within different ranges such as 0V to 5V, 0V to 7.5V, or 0V to 10V. The above voltage range can be adjusted according to actual electrostatic protection requirements to balance the efficiency of electrostatic discharge with the safety of component use.

[0105] Furthermore, in some embodiments, the detection device 20 may include a separate grounding mechanism (not shown, such as a wire or other similarly functional element). However, to avoid damage to the device under test O due to excessive instantaneous current generated during electrostatic discharge, the grounding mechanism is not electrically connected to the electrostatic discharge device 100 when the electrostatic discharge device 100 is electrically coupled to the detection device 20. Through the configuration of the above embodiments, the electrostatic discharge device 100 can achieve effective electrostatic discharge under controlled and low-risk discharge conditions, further protecting the detection device 20 and its corresponding device under test to avoid potential or permanent damage caused by excessive discharge current.

[0106] Please see Figure 3 This is a schematic diagram of the static eliminator 300 according to the second embodiment of this application. In this embodiment, the static eliminator 300 has at least partially the same or similar structure as the static eliminator 100. The static eliminator 300 includes a battery pack 330 disposed in a receiving chamber 310. The battery pack 330 includes a first battery 331 and a second battery 332, and has a conductive member 340 connected in series with the battery pack 330. When the conductive member 340 is electrically connected to the battery pack 330 to form an electrical circuit, a zero-potential node N can be established between the first electrode 3311 of the first battery 331 and the second electrode 3322 of the second battery 332. The detection device 20 can be electrically coupled to the zero-potential node N through a wire or other electrically conductive element, thereby forming a static discharge path PA between the detection device 20 and the static eliminator 300. In addition, the static eliminator 300 may also include other elements that are the same as or similar to those of the static eliminator 100 (e.g., outer casing, carrier plate, indicator light source, etc.), which will not be described in detail here.

[0107] Please see Figure 4 This is a schematic diagram of the static eliminator 400 according to the third embodiment of this application. In this embodiment, the static eliminator 400 and the static eliminator 300 described above have at least some of the same or similar constituent elements in structure, including but not limited to the configuration of the battery pack 430 (e.g., including the first battery 431, the second battery 432 and their corresponding electrodes) disposed in the accommodating cavity 410, the arrangement of the conductive member 440, and the electrical coupling mechanism between the detection device 20 and the zero potential node N.

[0108] The main difference between this embodiment and the aforementioned static electricity elimination device 300 is that the static electricity elimination device 400 further includes an alarm device 50 electrically connected to the static electricity discharge path PA. Specifically, the alarm device 50 may include an alarm and / or a display. In some embodiments, the alarm may be a speaker such as a buzzer, or a light-emitting element such as an alarm light source. With the configuration of the above embodiment, the alarm device 50 can visually or audibly prompt the user whether the static electricity discharge status is normal. When static electricity is not completely discharged or the system malfunctions, the display can show the corresponding identification screen and issue an alarm through the alarm or light-emitting element, prompting the user to perform corresponding checks and handling.

[0109] To enhance the safety and ease of operation of the electrostatic discharge device 400, this application further clarifies the triggering conditions and functions of the warning device 50. In some embodiments, the warning device 50 is configured to trigger an alarm when an abnormality occurs in the electrostatic discharge path PA or when the system state exceeds a safe range. Specific triggering conditions include, but are not limited to: (1) the electrostatic discharge current exceeds a preset safety threshold, indicating that the electrostatic discharge is not completely released or there is a risk of excessive current; (2) the electrostatic discharge voltage exceeds a safe range (e.g., higher than 5V), which may damage the component under test O; (3) the potential of the zero potential node N deviates from a preset range (e.g., exceeds 0V±0.02V), indicating inconsistent battery voltage or circuit abnormality; (4) the voltage of the battery pack 430 is lower than the default value (e.g., 80% of the rated voltage), indicating battery aging or insufficient power. The above conditions are detected in real time by the current monitoring module, voltage monitoring module, or potential monitoring module (if any), and the detection results are transmitted to the warning device 50.

[0110] The warning device 50 can provide various warning types to visually alert the user to the system status. In some embodiments, the warning device 50 includes a light-emitting element, such as a light-emitting diode (LED) disposed on the outer casing 410a. When an anomaly is detected, the LED can flash at different frequencies or colors depending on the type of anomaly; for example, rapid red flashing indicates excessive current, while slow yellow flashing indicates insufficient battery power. Furthermore, the warning device 50 may include a buzzer as an auditory warning element. When an electrostatic discharge anomaly occurs, the buzzer emits an intermittent high-frequency sound (e.g., 1 kHz, lasting 0.5 seconds, with a 1-second interval) to attract the user's attention. In some embodiments, the warning device 50 further includes a digital display disposed on the outer casing to display specific anomaly information, such as "Abnormal Current: 350 μA" or "Low Battery Voltage: 2.4V," providing more precise status information.

[0111] The warning device 50 is implemented through hardware and software integration. In some embodiments, the warning device 50 is electrically connected to a control circuit on the carrier board 410. This control circuit includes a microcontroller unit (MCU) and related sensors (e.g., current sensors, voltage sensors). The microcontroller determines whether the triggering conditions are met based on sensor data and drives an LED, buzzer, or display to output the corresponding warning signal. To ensure the reliability of the warning device 50, its hardware components are selected as low-power, long-life components. The circuitry of the warning device 50 can be electrically coupled to the battery pack 430 via the connector 440, utilizing the battery pack 430 for power, eliminating the need for an additional power supply module.

[0112] Please see Figure 5 This is a schematic diagram of the electrostatic eliminator 500 according to the fourth embodiment of this application. In this embodiment, the electrostatic eliminator 500 has at least some of the same or similar constituent elements as the electrostatic eliminator 300 and electrostatic eliminator 400, including but not limited to the arrangement of the conductor 540 disposed in the accommodating cavity 510, and the electrical coupling mechanism between the detection device 20 and the zero potential node N.

[0113] The main difference between this embodiment and the aforementioned static eliminators 300 and 400 is that the battery pack 530 used in the static eliminator 500, in addition to including the first battery 531 and the second battery 532, further connects a third battery 533 and a fourth battery 534 in series in the same electrical circuit. Through the configuration of the above embodiment, more voltage setting ranges and more flexible selection of electrostatic discharge conditions can be provided, which helps to meet different electrostatic protection needs and improve system adaptability and operational stability. Furthermore, although... Figure 5The battery pack 530 shown includes only one third battery 533 and one fourth battery 534. However, those skilled in the art will understand that the battery pack 530 can also include more pairs of battery cells connected in series to achieve at least one zero-potential node. Each node can be coupled to different detection devices. In other words, multi-node redundancy can simultaneously serve multiple detection ports or maintain electrostatic discharge functionality when a single port fails, improving system reliability. From another perspective, an independent low-pass filter or EMI suppression component can also be added between the zero-potential node and the detection device, or such components can be integrated into a microcontroller to eliminate high-frequency noise that may be introduced during electrostatic discharge and automatically connect the zero-potential node when electrostatic accumulation is detected to complete automatic discharge; and automatically disconnect after the electrostatic discharge disappears.

[0114] Please see Figure 6 This is a schematic diagram of the static eliminator 600 according to the fifth embodiment of this application. In this embodiment, the static eliminator 600 has at least some of the same or similar constituent elements as the static eliminator 300, static eliminator 400 and static eliminator 500, including but not limited to the configuration of the battery pack 630 (e.g., including the first battery 631, the second battery 632 and their corresponding electrodes) disposed in the accommodating cavity 610, the arrangement of the conductive member 640, and the electrical coupling mechanism between the detection device 20 and the zero potential node N.

[0115] The main difference between this embodiment and the aforementioned static eliminators 300, 400, and 500 is that the static eliminator 600 may further include an adjustment element 40. This adjustment element 40 may be electrically connected to the detection device 20 via a wire or other similar element and is disposed in the electrical circuit between the conductor 640 and the battery pack 630, thereby adjusting the resistance value between the detection device 20 and the electrical circuit. In some embodiments, the adjustment element 40 is configured for adjustment by the user 60 within a voltage adjustment range (e.g., 0V to 12V) provided by the battery pack 630.

[0116] In some embodiments, the adjusting element 40 may include at least one of a passive element, potentiometer, variable resistor, rheostat, thermistor, photoresistor, or other element with adjustable resistance. In terms of adjustment range, the resistance value provided by the adjusting element 40 can cover the range of 0.01Ω to 10MΩ. With the above configuration, the user can precisely fine-tune the electrostatic discharge circuit according to actual application requirements to effectively control the electrostatic discharge rate and discharge current.

[0117] Please see Figures 7 to 8These are schematic diagrams of the static eliminator 700 according to the sixth embodiment of this application, and a schematic diagram of integrating the static eliminator 700 into the wearable device 50. In this embodiment, the static eliminator 700 has at least some of the same or similar constituent elements as the aforementioned static eliminators 300, 400, 500 and 600, including but not limited to the configuration of the battery pack 730 (e.g., including the first battery 731, the second battery 732 and their corresponding electrodes), the arrangement of the conductive parts, and the electrical coupling mechanism between the detection device 20 and the zero potential node N, which will not be repeated here. Figure 7 In a derivative example, the static elimination device 700 may have the battery pack 730, conductors, etc., formed on the carrier plate or on the inner surface of the outer casing by in-mold forming.

[0118] The main difference between this embodiment and the static elimination device in the previous embodiments is that the first battery 731 and the second battery 732 in the battery pack 730 are in the form of battery panels. In some embodiments, these battery panels may be perovskite batteries and are mounted on a flexible carrier plate 720 to provide the stable power required by the device. Figure 8 As shown, the electrostatic eliminator 700 can be integrated into the wearable device 50 for user wear, thereby enabling faster and more convenient electrostatic elimination. Through its wearable design, users can continuously perform electrostatic protection while moving or operating equipment, without the need for additional manual contact or operation of the electrostatic eliminator, further improving practicality and efficiency. It is particularly suitable for applications such as handling electrostatic sensitive components, cleanroom operations, or high-frequency testing. In one embodiment, the wearable device 50 may be equipped with an electroluminescent display unit to trigger an alarm when the electrostatic discharge path PA malfunctions or the system state exceeds a safe range.

[0119] To ensure the safety of the static elimination device 700 when integrated into the wearable device 50, this application provides several design measures to protect the user from potential risks of electrical or thermal effects. In some embodiments, the first battery 731 and the second battery 732 (e.g., perovskite solar panels) in the battery pack 730 are fully encapsulated with a highly insulating encapsulation material (such as polyimide or silicone-based insulating layers) to ensure complete isolation of the battery surface from human skin or the external environment. Furthermore, the electrode connection points of the solar panels are sealed to prevent leakage risks caused by sweat, moisture, or other conductive media, thereby ensuring the electrical safety of the wearable device 50 during long-term use.

[0120] To address the potential thermal effects generated by the battery pack 730 or circuit operation, this application provides a thermal management design to ensure that the wearable device 50 meets human safety temperature requirements. In some embodiments, the flexible carrier 720 employs a highly thermally conductive material (such as a graphene-containing composite substrate with a thermal conductivity greater than 100 W / m·K) as a heat dissipation layer to quickly conduct the heat generated by the battery pack 730 or control circuit to the environment. Furthermore, the operating current of the battery pack 730 is controlled within a low-power range (e.g., less than 50 mA) to reduce heat generation. In some embodiments, the wearable device 50 may include a temperature sensor (e.g., a thermistor, disposed on the carrier 720) to monitor the device surface temperature. If the temperature exceeds a safe threshold (e.g., 40°C), the control circuit can automatically reduce the output power of the battery pack 730 or suspend the electrostatic discharge function, thereby preventing thermal effects from causing discomfort or damage to the user's skin.

[0121] Please see Figures 1 to 8 This application also provides a method for eliminating static electricity, which can be implemented using components or combinations of any one of the static electricity elimination devices 100, 300, 400, 500, 600, and 700. The method includes: placing a battery pack on a carrier plate; connecting a conductive member in series with a first battery and a second battery in the battery pack; connecting the conductive member to the first and second batteries to form an electrical circuit, and forming a zero-potential node between the first electrode of the first battery and the second electrode of the second battery; electrically coupling the zero-potential node to a detection device; and releasing the static electricity generated by the detection device to the zero-potential node through a static discharge path formed between the detection device and the zero-potential node.

[0122] In some applications, the electrostatic elimination device can be designed as a portable structure, allowing operators to carry it on their person. For professionals in the probe-related field, this device can be flexibly utilized in the production of probes, assembly of needles, fabrication of probe cards (e.g., vertical, cantilever, MEMS probes, POGO PINs, spring needles, bendable needles, wire needles, etc.), and in the assembly of probes with space conversion plates. Furthermore, this device can also be used to perform processes such as detection, analysis, repair, and cleaning of analytes using probes. The application scope is not limited to probes and probe cards, but also covers semiconductor or wafer inspection systems, integrated circuit inspection systems, and can be extended to probe sockets, probe connection assemblies, and equivalent fields of other non-solid-state analytes, such as laser integrated circuits, silicon photonics integrated circuits, or slicing analysis.

[0123] Furthermore, in some embodiments, the battery pack also includes a "stretchable battery" to address the application requirements of wearable electronics, medical patches, electronic skin (e-skin), and software robots that require flexible or stretchable power sources. Known stretchable battery technologies include fabricating traditional rigid battery materials (such as lithium-ion battery electrodes) into wave-like, mesh-like, or serpentine structures. When the material is stretched, the wave structure unfolds to maintain conductivity and stretchability. Related research has confirmed this; for example, the University of Illinois has published a stretchable lithium-ion battery. Another approach uses flexible and conductive materials such as conductive polymers (such as PEDOT:PSS), carbon nanotubes, or graphene films as electrodes, combined with substrates such as silicone or PU elastomers, allowing the battery to be stretched and directly worn on the user's body. Simultaneously, some studies utilize liquid electrolytes or ionic liquids to replace traditional solid-state separators, combined with elastic encapsulation materials, to maintain battery performance under bending or stretching conditions; some studies even use liquid metals (such as gallium alloys) as conductors, combining flexibility and high conductivity.

[0124] Through the above design, the electrostatic elimination device of this application, by combining a portable and wearable structure, can provide greater convenience, scalability and safety in various probe applications and electrostatic sensitive element detection fields.

[0125] Please see Figures 1 to 8 This application also provides a manufacturing system for manufacturing probe cards. The manufacturing system provides multiple probes and assembles the multiple probes into a guide plate and a space conversion unit within an outer frame or housing. The manufacturing system includes the electrostatic elimination device from any of the above embodiments.

[0126] Please see Figures 1 to 8 This application further provides a manufacturing system for manufacturing probe holders. The manufacturing system provides multiple probes and assembles the multiple probes onto a guide plate and a space conversion unit, and electrically connects them to a detection device. The manufacturing system includes the electrostatic elimination device from any of the above embodiments, and the electrostatic elimination device has two batteries connected in series to form opposing potential points.

[0127] Please see Figures 1 to 8 This application also provides a manufacturing system for providing a probe card to analyze a test object. The probe card provides multiple probes, and the multiple probes are assembled on a guide plate and a space conversion unit. At least one test object is analyzed through at least one tip of the multiple probes. The manufacturing system includes an electrostatic discharge device as described in any of the above embodiments, and the test object includes at least one of a wafer, a die, and an integrated circuit.

[0128] The foregoing has outlined several embodiments to enable those skilled in the art to better understand the solutions of this application. Those skilled in the art should understand that this application can be readily used as a basis for designing or modifying other programs and structures to achieve the same purpose and / or attain the same advantages of the embodiments introduced herein. Those skilled in the art should also recognize that such equivalent constructions should not depart from the spirit and scope of this application, and that various changes, substitutions, and modifications can be made to this document.

Claims

1. A static electricity elimination device, characterized in that, include: Accommodating cavity; A battery pack is disposed in the accommodating cavity, and the battery pack includes a first battery and a second battery connected in series. A connector is connected in series to the battery pack, and the connector includes a zero-potential node located between the first electrode of the first battery and the second electrode of the second battery. A switching element, electrically connected to the conductor and configured to switch the electrical connection state between the conductor and the battery pack; and An electrical connector is electrically connected to the zero-potential node and coupled to the detection device to form an electrostatic discharge path between the zero-potential node and the detection device.

2. The static electricity elimination device as described in claim 1, characterized in that, The number of batteries included in the battery pack is an even number.

3. The static electricity elimination device as described in claim 1, characterized in that, The conductive component includes at least one of the following: a wire, a conductive pattern, a conductive sheet, a conductive adhesive, a conductive tape, a conductive fabric, and a conductive foam.

4. The static electricity elimination device as described in claim 1, characterized in that, The electrostatic elimination device further includes an indicator light source configured to emit an indicator signal in response to the electrical connection state.

5. The static electricity elimination device as described in claim 1, characterized in that, The static electricity elimination device also includes a portable outer casing having the accommodating cavity.

6. The static electricity elimination device as described in claim 1, characterized in that, The electrostatic elimination device further includes an outer casing having the accommodating cavity, the outer casing being configured to attach and fix to the detection device.

7. The static electricity elimination device as described in claim 1, characterized in that, The detection device has probes that can be used to detect micro- and nano-scale components.

8. The static electricity elimination device as described in claim 1, characterized in that, The voltage value of the electrostatic discharge generated through the electrostatic discharge path is less than 10 volts.

9. The static electricity elimination device as described in claim 1, characterized in that, The static electricity elimination device further includes an alarm device electrically connected to the static electricity release path and configured to reflect the static electricity release status of the static electricity release path.

10. The static electricity elimination device as described in claim 1, characterized in that, The battery pack further includes at least one third battery connected in series to the second electrode of the first battery, and at least one fourth battery connected in series to the first electrode of the second battery; the number of the at least one third battery and the at least one fourth battery are equal.

11. The static electricity elimination device as described in claim 1, characterized in that, The static elimination device further includes an adjustment element electrically connected to the conductor and the detection device, and configured to adjust the resistance value between the conductor and the detection device.

12. A static electricity elimination device, characterized in that, include: Battery pairs, connected in series; and A conductor is connected in series with the battery pair to form an electrical circuit and to form a zero-potential node between the opposing electrodes of the battery pair; The zero-potential node is configured to be electrically coupled to the detection device to form an electrostatic discharge path.

13. The static electricity elimination device as described in claim 12, characterized in that, The detection device is configured to use probes to detect micro- and nano-scale components.

14. The static electricity elimination device as described in claim 12, characterized in that, The voltage value of the electrostatic discharge generated through the electrostatic discharge path is less than 10 volts.

15. The static electricity elimination device as described in claim 12, characterized in that, The static elimination device also includes a portable box housing the carrier plate therein.

16. The static electricity elimination device as described in claim 15, characterized in that, A switch is provided on the outer surface of the portable housing, and the switch is configured to connect or disconnect the electrical circuit.

17. The static electricity elimination device as described in claim 16, characterized in that, An indicator light source is provided on the outer surface of the portable housing, and the indicator light source is configured to emit an indicator signal in response to the electrical connection state of the electrical circuit.

18. The static electricity elimination device as described in claim 12, characterized in that, The battery pair includes a battery panel mounted on a flexible substrate.

19. The static electricity elimination device as described in claim 18, characterized in that, The static elimination device is configured to be integrated into a wearable device.

20. A method for eliminating static electricity, characterized in that, include: Battery packs are provided; A connector is provided, wherein the connector is connected in series to the first battery and the second battery in the battery pack; The conductive member is connected to the first battery and the second battery to form an electrical circuit, and a zero potential node is formed between the first electrode of the first battery and the second electrode of the second battery. The zero-potential node is electrically coupled to the detection device; and The static electricity generated by the detection device is released to the zero potential node through the static discharge path formed between the detection device and the zero potential node; The detection device has a probe that can be used to detect micro- and nano-scale components.

21. A manufacturing system, characterized in that, The manufacturing system is used to manufacture probe cards. The manufacturing system provides multiple probes and assembles the multiple probes into a guide plate and a space conversion unit within an outer frame or housing. The manufacturing system includes an electrostatic elimination device as described in any one of claims 1 to 19.

22. A manufacturing system, characterized in that, The manufacturing system is used to manufacture probe holders, which provide multiple probes and assemble the multiple probes onto a guide plate and a space conversion unit and electrically connect them to the detection equipment. The manufacturing system includes a static eliminator as described in any one of claims 1 to 19, wherein the static eliminator has two batteries connected in series to form opposing potential points.

23. A manufacturing system, characterized in that, The manufacturing system is used to provide a probe card for analyzing a analyte. The probe card provides multiple probes and assembles the multiple probes on a guide plate and a space conversion unit. At least one analyte is analyzed through at least one tip of the multiple probes. The manufacturing system includes an electrostatic elimination device as described in any one of claims 1 to 19, and the test object includes at least one of a wafer, a die, and an integrated circuit.

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