Flexible-rigid composite folding micro-gimbal and manufacturing method thereof

Abstract

This invention relates to the field of micro-gimbal technology, and discloses a rigid-flexible composite foldable micro-gimbal and its manufacturing method, including the following steps: pre-treating the raw materials, laminating them under high temperature and vacuum conditions, and then using SCM (Superconducting Microwave Coagulation) technology to remove material from the composite two-dimensional planar material using an ultrafast laser, obtaining the released two-dimensional planar rigid-flexible composite body, platform base, and driver; assembling the rigid-flexible composite body, platform base, and driver in three dimensions according to the designed joints and anchor points to form a micro-rotating platform; and using a high-precision microscopic observation system to achieve high-precision integrated assembly of the micro-camera, micro-rotating platform, and driving circuit, thus obtaining the rigid-flexible composite foldable micro-gimbal. This invention can improve the adaptability, scalability, and mass production capability of micro-gimbals, solving the technical problem that existing micro-gimbals cannot simultaneously meet the requirements of mass production, high precision, and high reliability for millimeter-level micro-gimbals.

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