Cantilever beam-nanoprobe preparation device and method based on electrolysis and micro-assembly

Abstract

This application provides a cantilever beam-nanoprobe fabrication device and method based on electrolysis and microassembly. The device includes an air-floating optical platform, an in-situ electrochemical electrolysis system, and a microassembly system. The microassembly system is used to clamp and assemble the cantilever beam structure and metal wire, which are bonded together with conductive adhesive to form a probe preform. The in-situ electrochemical electrolysis system is used to perform in-situ electrochemical electrolysis on the probe preform. By controlling the electrolysis process parameters, a cantilever beam-nanoprobe with precisely controllable structural parameters is prepared. The air-floating optical platform supports the microassembly system and the in-situ electrochemical electrolysis system. This application adopts in-situ electrochemical electrolysis and microassembly, which can significantly reduce equipment and processing costs. The process is simple, easy to operate, and significantly improves processing efficiency and yield, making it suitable for large-scale production and meeting the application needs of high-precision micro-nano detection and characterization in various scenarios.

Description

Technical Field

[0001] This application relates to the field of cantilever beam nanoprobe micro / nano fabrication, specifically to a cantilever beam nanoprobe fabrication device and method based on electrolysis and microassembly. Background Technology

[0002] In fields such as micro / nano fabrication, materials science, and bioscience, the shrinking physical scale of studied objects places increasingly higher demands on metrology equipment. Besides traditional atomic force microscopy (AFM), the novel terahertz-scanning near-field optical microscopy (THz-Snom) imaging technique has seen significant application in micro / nano structure monitoring in recent years. Many micro / nano metrology monitoring devices require fine nanoprobes based on cantilever beam structures. These probes typically have lengths on the order of hundreds of micrometers and tip curvatures on the order of several nanometers. Traditional methods for fabricating cantilever beam probes based on nanoprobes usually involve electrochemical etching of the microprobes, followed by the transfer and assembly of the probe tips, which often requires focused ion beam etching. This process is characterized by high cost, complex processes, low yield, and strong equipment dependence.

[0003] A literature search of existing technologies revealed Chinese patent CN114232058A, which proposes an electrochemical 3D printing device and method based on a hollow atomic force microscope (AFM) cantilever beam probe. This method combines a hollow AFM cantilever beam probe with electrochemical deposition technology to develop a novel approach for 3D printing micro / nano-sized metal structures. The use of the hollow AFM cantilever beam probe enables microscopic manipulation, significantly improving printing accuracy, printing speed, and part performance, and enabling the manufacture of complex three-dimensional structures. While this approach combines cantilever beam probes with electrochemical deposition technology, it suffers from complex processes and low yield.

[0004] Therefore, there is an urgent need for a simplified, low-cost, and high-yield nanoprobe preparation device and method. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the purpose of this application is to provide a cantilever beam-nano probe fabrication device and method based on electrolysis and microassembly.

[0006] According to one aspect of this application, a cantilever beam-nano probe fabrication device based on electrolysis and microassembly is provided, comprising: A micro-assembly system for clamping and assembling a cantilever beam structure and a metal wire, wherein the cantilever beam structure and the metal wire are bonded with conductive adhesive to form a probe blank; An in-situ electrochemical electrolysis system is used to perform in-situ electrochemical electrolysis on the probe embryo. By controlling the electrolysis process parameters during the in-situ electrochemical electrolysis process, a cantilever beam-nano probe with precisely controllable structural parameters is prepared. The electrolysis process parameters include voltage, current, electrolyte ratio, and displacement control parameters. An air-floating optical platform is used to support the micro-assembly system and the in-situ electrochemical electrolysis system.

[0007] Optionally, the in-situ electrochemical electrolysis system includes an electrolyte container, a counter electrode, a signal source, and an amplifier. The electrolyte container is disposed on the air-floating optical platform and contains electrolyte. The probe embryo and the counter electrode both extend into the electrolyte. During the in-situ electrochemical electrolysis process, the electrolyte is used to provide anions and cations, forming a complete electrical circuit together with the probe embryo and the counter electrode. The signal source is used to output a preset electrical signal to control the voltage or current waveform of the in-situ electrochemical electrolysis process. The amplifier is electrically connected to the signal source and is used to amplify the power of the electrical signal output by the signal source.

[0008] Optionally, the micro-assembly system includes a vision acquisition module, a clamping module, and a dispensing device, all of which are mounted on the air-bearing optical platform. The vision acquisition module is used to acquire images of the clamping module, the dispensing device, and the in-situ electrochemical electrolysis system. The clamping module is used to clamp the cantilever beam structure and the metal wire, and adjusts the relative position between the cantilever beam structure and the metal wire based on the images acquired by the vision acquisition module. The dispensing device is used to coat the surface of the cantilever beam structure with conductive adhesive, which serves as an adhesive between the cantilever beam structure and the metal wire.

[0009] Optionally, the clamping module includes a wire clamping device and a cantilever beam structure clamping device. The wire clamping device includes a horizontal support rod, a clamping component, an adjusting screw, and a three-axis displacement stage. The three-axis displacement stage is mounted on the air-bearing optical platform. The horizontal support rod is horizontally connected to the top of the three-axis displacement stage. The clamping component is connected to the end of the horizontal support rod and is used to clamp the wire, keeping the wire in a vertical position. The adjusting screw is used to adjust the gap of the clamping component, enabling the clamping component to clamp wires of different diameters. The cantilever beam structure clamping device includes a motor, a cantilever beam structure clamping frame, a four-axis displacement stage, and a connecting rod. The four-axis displacement stage is located on the air-bearing optical platform. The motor is mounted on the four-axis displacement stage and is used to drive the connecting rod to rotate. The cantilever beam structure clamping frame is connected to the end of the connecting rod and is used to clamp the cantilever beam structure.

[0010] Optionally, the dispensing equipment includes a dispensing support plate, an adhesive receiving tube, a dispensing needle, a dispensing pressure head, and a three-axis displacement stage. The three-axis displacement stage is mounted on the air-bearing optical platform, the dispensing support plate is located on top of the three-axis displacement stage, the adhesive receiving tube is connected to the dispensing support plate and is used to receive the conductive adhesive, and the two ends of the adhesive receiving tube are respectively provided with a dispensing needle and a dispensing pressure head. The conductive adhesive can be stably extruded through the dispensing needle under the squeezing and pushing of the dispensing pressure head.

[0011] According to another aspect of this application, a method for preparing a cantilever beam-nano probe based on electrolysis and microassembly is provided, comprising: The cantilever beam-nano probe fabrication apparatus based on electrolysis and microassembly is provided. A micro-assembly system is used to clamp and assemble a cantilever beam structure and a metal wire. The cantilever beam structure and the metal wire are then bonded together with conductive adhesive to obtain a probe blank. The probe embryo is subjected to in-situ electrochemical electrolysis using an in-situ electrochemical electrolysis system. During the in-situ electrochemical electrolysis process, a cantilever beam-nano probe with precisely controllable structural parameters is prepared by adjusting the electrolysis process parameters, including voltage, current, electrolyte ratio, and displacement control parameters.

[0012] Optionally, the micro-assembly system includes a vision acquisition module, a wire clamping device, a cantilever beam structure clamping device, and an adhesive dispensing device; the step of using the micro-assembly system to clamp and assemble the cantilever beam structure and the wire, and bonding the cantilever beam structure and the wire with conductive adhesive to obtain a probe blank includes: The metal wire to be assembled is installed on the metal wire clamping device, the cantilever beam structure to be assembled is installed on the cantilever beam structure clamping device, and the electrode wire is led out. The visual acquisition module is used to acquire images of the dispensing device and the cantilever beam structure to obtain the relative positional relationship between the dispensing device and the cantilever beam structure. Based on the relative positional relationship, the dispensing device is moved closer to the cantilever beam structure and conductive adhesive is applied to the surface of the cantilever beam structure. The vision acquisition module is used to acquire images of the metal wire and the cantilever beam structure to obtain the relative positional relationship between the metal wire and the cantilever beam structure. Based on the relative positional relationship, the metal wire is brought into contact with the side of the cantilever beam structure coated with conductive adhesive, and after bonding, a probe embryo is obtained.

[0013] Optionally, the in-situ electrochemical electrolysis system includes an electrolyte container, a counter electrode, a signal source, and an amplifier. The in-situ electrochemical electrolysis system is used to perform in-situ electrochemical electrolysis on the probe embryo. During the in-situ electrochemical electrolysis process, by controlling the electrolysis process parameters, a cantilever beam-nanoprobe with precisely controllable structural parameters is prepared, including: The wire clamping device releases the wire and moves the probe embryo using the cantilever beam clamping device until the lower surface of the probe embryo contacts the upper liquid surface of the electrolyte in the electrolyte container and maintains a preset immersion depth. The electrode wires led out from the cantilever beam structure are connected to the counter electrode in the in-situ electrochemical electrolysis system via an amplifier to a signal source; The signal source and amplifier in the in-situ electrochemical electrolysis system are activated, and the cantilever beam-nano probe is prepared by setting preset electrolysis process parameters.

[0014] Optionally, the electrolyte container contains an electrolyte, which is any one of a mixture of calcium chloride aqueous solution and acetone, sodium hydroxide aqueous solution, and sulfuric acid solution.

[0015] Optionally, the conductive adhesive is either conductive silver paste or conductive epoxy resin; the metal wire is made of one or more of tungsten, platinum, iridium, and platinum-iridium alloys.

[0016] This application provides a cantilever beam-nanoprobe fabrication device based on electrolysis and microassembly. Employing in-situ electrochemical electrolysis and microassembly, it eliminates the need for expensive focused ion beam (FIB) equipment, significantly reducing equipment and processing costs. The process is simple, easy to operate, and significantly improves processing efficiency and yield, making it suitable for large-scale production. The device first assembles the cantilever beam structure and metal wire to obtain a probe preform, then performs in-situ electrochemical electrolysis on the preform. Using the cantilever beam structure as a support and positioning carrier for the metal wire, targeted electrochemical electrolysis is applied to the wire, achieving precise in-situ probe fabrication and improving processing accuracy. By adjusting the electrolysis process parameters, the structural parameters of the cantilever beam-nanoprobe can be flexibly controlled. This application has a wide range of applications, compatible with cantilever beam structures and nanoprobes of different materials and structures, meeting the needs of high-precision micro / nano detection and characterization applications in various scenarios.

[0017] Other technical effects resulting from the additional features will be further illustrated in the corresponding embodiments. Attached Figure Description

[0018] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the cantilever beam-nano probe fabrication device based on electrolysis and microassembly in one embodiment of this application; Figure 2 This is a schematic diagram of the structure of an in-situ electrochemical electrolysis system in one embodiment of this application; Figure 3 This is a schematic diagram of a micro-assembly system in one embodiment of this application, wherein (a) is an overall structural diagram of the micro-assembly system, and (b) is a partial enlarged view of the clamping components and adjusting screws in the micro-assembly system; Figure 4 This is a schematic diagram of the cantilever beam-nano probe preparation method based on electrolysis and microassembly in one embodiment of this application; Figure 5 This is a schematic diagram of the generation of a cantilever beam-nano probe in one embodiment of this application; Figure 6 This is a schematic diagram of a cantilever beam-nano probe with a tip diameter of 18.39 μm in one embodiment of this application; Figure 7 This is a schematic diagram of a cantilever beam-nanoprobe with a tip diameter of 2.9 μm in one embodiment of this application; Figure 8 This is a schematic diagram of a cantilever beam-nano probe with a tip diameter of 5.38 nm in one embodiment of this application; Figure 9 This is a schematic diagram of a cantilever beam-nano probe with a tip length of 7.83 μm in one embodiment of this application; Figure 10 This is a schematic diagram of a cantilever beam-nano probe with a tip length of 15.08 μm in one embodiment of this application; Figure 11 This is a schematic diagram of a cantilever beam-nano probe with a tip length of 38.29 μm in one embodiment of this application.

[0019] In the diagram: 100, air-floating optical platform; 200, in-situ electrochemical electrolysis system; 210, electrolyte; 220, electrolyte container; 230, counter electrode; 240, signal source; 250, amplifier; 300, micro-assembly system; 310. Visual acquisition module; 311. Horizontal visual acquisition unit; 312. Lateral visual acquisition unit; 313. Three-axis displacement stage one; 314. Three-axis displacement stage two; 320. Wire clamping device; 321. Lateral support rod; 322. Clamping component; 323. Adjusting screw; 324. Three-axis displacement stage three; 330. Cantilever beam structure clamping device; 331. Motor; 332. Cantilever beam structure clamping frame; 333. Four-axis displacement stage; 340. Dispensing device; 341. Dispensing support plate; 342. Glue container tube; 343. Glue container tube clamping device; 344. Dispensing needle; 345. Dispensing pressure head; 346. Three-axis displacement stage four. Detailed Implementation

[0020] The present application will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present application, but do not limit the present application in any way. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present application, and these all fall within the protection scope of the present application. Parts not described in detail in the following embodiments can be implemented using existing technology.

[0021] It should be noted that all information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, data stored, data displayed, etc.) involved in this application are information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of related data must comply with relevant regulations.

[0022] In the description of the embodiments of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0023] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature.

[0024] In the description of the embodiments in this application, "multiple" means two or more, unless otherwise explicitly specified. In this application, unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," "fixed," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0025] The terms "comprising" and "having," and any variations thereof, in the embodiments of this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such processes, methods, products, or devices.

[0026] In fields such as micro / nano fabrication, materials science, and bioscience, as the physical scale of the objects under study continues to shrink, higher demands are placed on metrology equipment. Many micro / nano metrology monitoring devices require fine nanoprobes based on cantilever beam structures. Traditional methods for fabricating cantilever beam probes based on nanoprobes suffer from high cost, complex processes, low yield, and strong equipment dependence. If wet etching technology is used to fabricate probes, existing wet etching techniques cannot achieve nanoscale precision. To overcome the problems of high cost, complex processes, and low yield associated with the use of expensive FIB (fiber-in-the-wall) fabrication and assembly in existing technologies, this application provides a cantilever beam-nanoprobe fabrication device based on electrolysis and microassembly to solve the aforementioned problems.

[0027] Reference Figure 1 As shown in the figure, this application provides a cantilever beam-nanoprobe fabrication device based on electrolysis and microassembly, including an air-floating optical platform 100, an in-situ electrochemical electrolysis system 200, and a microassembly system 300. The microassembly system 300 is used to clamp and assemble the cantilever beam structure and the metal wire, which are bonded together with conductive adhesive to form a probe preform. The in-situ electrochemical electrolysis system 200 is used to perform in-situ electrochemical electrolysis on the probe preform. By controlling the electrolysis process parameters during the in-situ electrochemical electrolysis process, a cantilever beam-nanoprobe with precisely controllable structural parameters is prepared. The electrolysis process parameters include voltage, current, electrolyte ratio, and displacement control parameters. The air-floating optical platform 100 is used to support the microassembly system 300 and the in-situ electrochemical electrolysis system 200.

[0028] It should be noted that the tip diameter of the cantilever beam-nanoparticle probe ranges from 5 nm to tens of micrometers. The precise and controllable structural parameters of the cantilever beam-nanoparticle probe specifically refer to the controllable tip diameter and tip length.

[0029] Furthermore, in the in-situ electrochemical electrolysis process, only the metal wire in the probe embryo is electrolyzed; the cantilever beam structure, as a mechanical support structure for the metal wire, does not participate in the electrolysis itself. The cantilever beam structure possesses good conductivity, serving as an electrochemical conductive pathway. Simultaneously, insulation is achieved by wrapping the outer surface of the cantilever beam structure with an insulating layer (the insulating layer material can be silicon nitride, alumina, polychloroparaxylene, etc.), controlling the electrolysis reaction to occur only in the metal wire region of the probe embryo. The "in-situ" aspect of the in-situ electrochemical electrolysis process means that the metal wire at the end of the cantilever beam structure is treated by electrochemical electrolysis without leaving the electrolyte environment and the overall assembly state, and without interrupting the electrolysis reaction process, directly preparing the target cantilever beam-nanoprobe in situ. During the in-situ electrochemical electrolysis process, by controlling the depth of the metal wire submerged in the electrolyte surface, as well as the current, voltage, and time parameters of the entire in-situ electrochemical electrolysis, the preparation of cantilever beam-nanoprobes with different tip lengths can be achieved.

[0030] For example, the micro-assembly system 300 and the in-situ electrochemical electrolysis system 200 are both mounted on the same air-floating optical platform 100. The air-floating optical platform 100 is equipped with an air pump, which applies gas pressure to the platform and ensures it remains horizontal. The micro-assembly system is specifically a nanoscale micro-assembly system that can clamp the metal wire to be electrolyzed, the metal wire to be assembled, and the cantilever beam structure to be assembled. Conductive adhesive is used to assemble the metal wire and the cantilever beam structure, thus fabricating a probe preform at the nanoscale. After obtaining the probe preform, combined with the in-situ electrochemical electrolysis system, in-situ electrochemical electrolysis is completed by adjusting parameters such as voltage, current, electrolyte ratio, and displacement control parameters (i.e., displacement strategy) in the in-situ electrochemical electrolysis system, thereby preparing the cantilever beam-nanoprobe structure.

[0031] This application employs a micro-assembly system, using conductive adhesive to bond the cantilever beam structure and metal wire to obtain a probe preform. Then, an in-situ electrochemical electrolysis system is used to produce the final cantilever beam-nanoprobe structure. This application utilizes in-situ electrochemical electrolysis and micro-assembly, eliminating the need for expensive focused ion beam equipment to process and assemble the cantilever beam-nanoprobe, significantly reducing equipment and processing costs. The process is simple, convenient, and significantly improves processing efficiency and yield, making it suitable for large-scale production. By first assembling the cantilever beam structure and metal wire to obtain the probe preform, and then performing in-situ electrochemical electrolysis on the probe preform, wet etching technology is eliminated. Using the cantilever beam structure as a support and positioning carrier for the metal wire, targeted electrochemical electrolysis is performed on the metal wire, achieving precise in-situ preparation of the probe and improving processing accuracy. By adjusting the electrolysis process parameters, the structural parameters of the cantilever beam-nanoprobe can be flexibly controlled. This application has a wide range of applications and is compatible with cantilever beam structures and nanoprobes of different materials and structures, meeting the application needs of high-precision micro-nano detection and characterization in multiple scenarios.

[0032] Reference Figure 2 As shown in some specific embodiments of this application, the in-situ electrochemical electrolysis system 200 includes an electrolyte container 220, a counter electrode 230, a signal source 240, and an amplifier 250. The electrolyte container 220 is disposed on the air-floating optical platform 100 and contains an electrolyte 210. The probe embryo and the counter electrode 230 both extend into the electrolyte 210. During the in-situ electrochemical electrolysis process, the electrolyte 210 is used to provide anions and cations, and together with the probe embryo and the counter electrode 230, it forms a complete electrical circuit. The signal source 240 is used to output a preset electrical signal to control the voltage or current waveform of the in-situ electrochemical electrolysis process. The amplifier 250 is electrically connected to the signal source 240 and is used to amplify the power of the electrical signal output by the signal source 240.

[0033] In the above embodiments of this application, the electrolyte 210 is used to form a complete electrical circuit with the counter electrode 230 and the probe embryo, while providing anions and cations for the in-situ electrochemical electrolysis process; the electrolyte container 220 is fixed on the air-floating optical platform 100 to contain the electrolyte during the in-situ electrochemical electrolysis process; the counter electrode 230 is disposed in the electrolyte container 220, with the probe embryo serving as one electrode in the in-situ electrochemical electrolysis process, and the counter electrode 230 serving as the other electrode in the electrical circuit formed by the probe embryo; the signal source 240 is used to input the required electrical signal into the entire in-situ electrochemical electrolysis system 200 by setting different parameters such as voltage and current values ​​during the in-situ electrochemical electrolysis process, thereby completing the in-situ electrochemical electrolysis of probe embryos of different materials; the amplifier 250 is used to amplify the electrical signal input from the signal source 240, and by adjusting the parameters, to meet the voltage or current range required for the in-situ electrochemical electrolysis of probe embryos of different materials. Both the signal source 240 and the amplifier 250 can be placed on the air-floating optical platform 100.

[0034] Reference Figure 3 As shown in some specific embodiments of this application, the micro-assembly system 300 includes a vision acquisition module 310, a clamping module, and a dispensing device 340, all of which are mounted on the air-floating optical platform 100. The vision acquisition module 310 is used to acquire images of the clamping module, the dispensing device 340, and the in-situ electrochemical electrolysis system 200. The clamping module is used to clamp the cantilever beam structure and the metal wire, and adjusts the relative position between the cantilever beam structure and the metal wire based on the images acquired by the vision acquisition module 310. The dispensing device 340 is used to coat the surface of the cantilever beam structure with conductive adhesive, which serves as an adhesive between the cantilever beam structure and the metal wire.

[0035] In the above embodiments of this application, the visual acquisition module 310 is used to acquire images of each component in the entire cantilever beam-nanoprobe fabrication device to obtain the relative positions between each component in the cantilever beam-nanoprobe fabrication device. The visual acquisition module 310 includes a horizontal visual acquisition unit 311, a lateral visual acquisition unit 312, a three-axis displacement stage 1 313, and a three-axis displacement stage 2 314. Both the three-axis displacement stage 1 313 and the three-axis displacement stage 2 314 are mounted on the air-bearing optical platform 100. The horizontal visual acquisition unit 311 is horizontally connected to the three-axis displacement stage 2 314 and can move in the X, Y, and Z axes. The visual acquisition direction of the horizontal visual acquisition unit 311 is kept horizontal and is used to acquire visual information in the horizontal direction. The lateral visual acquisition unit 312 is inclinedly connected to the three-axis displacement stage 1 313 and can move in the X, Y, and Z axes. The visual acquisition direction of the lateral visual acquisition unit 312 forms a certain angle with the horizontal plane and is used to supplement the visual information that the horizontal visual acquisition unit 311 cannot acquire. The horizontal vision acquisition unit 311 and the lateral vision acquisition unit 312 include, but are not limited to, image acquisition devices such as optical microscopes, CCD cameras, and CMOS cameras. The clamping module can clamp and move the cantilever beam structure and the metal wire by referring to the image acquired by the vision acquisition module 310, thereby changing the relative position between the cantilever beam structure and the metal wire.

[0036] In some specific embodiments of this application, the clamping module includes a wire clamping device 320 and a cantilever beam structure clamping device 330. The wire clamping device 320 includes a horizontal support rod 321, a clamping member 322, an adjusting screw 323, and a three-axis displacement stage 324. The three-axis displacement stage 324 is mounted on the air-bearing optical platform 100. The horizontal support rod 321 is horizontally connected to the top of the three-axis displacement stage 324. The clamping member 322 is connected to the end of the horizontal support rod 321 and is used to clamp the wire so that the wire is in a vertical state. The adjusting screw 323 is used to adjust the gap of the clamping member 322 so that the clamping member 322 can clamp wires of different diameters. The cantilever beam structure clamping device 330 includes a motor 331, a cantilever beam structure clamping frame 332, a four-axis displacement stage 333, and a connecting rod. The four-axis displacement stage 333 is mounted on the air-bearing optical platform 100. The motor 331 is mounted on the four-axis displacement stage 333 and is used to drive the connecting rod to rotate. The cantilever beam structure clamping frame 332 is connected to the end of the connecting rod and is used to clamp the cantilever beam structure.

[0037] In the above embodiments of this application, the three-axis displacement stage 324 is mounted on the air-bearing optical platform 100, and the transverse support rod 321 is mounted on the upper surface of the three-axis displacement stage 324, which can realize displacement in three directions: X, Y, and Z. The transverse support rod 321 is axially along the X-axis direction, and the clamping member 322 is mounted on one end of the transverse support rod 321 and is set close to the lens in the vision acquisition module 310. It is used to clamp the metal wire and keep the metal wire in a vertical state. The vertical direction in this application is the Z-axis direction. The Y-axis is perpendicular to the X-axis and Z-axis. The adjusting screw 323 is used to control the gap of the clamping member 322 so that the clamping member 322 can clamp metal wires of different diameters.

[0038] The four-axis displacement stage 333 is mounted on the air-bearing optical platform 100, enabling the motor 331 mounted on it to move in the X, Y, and Z directions. Its top plate is set along the Y direction, allowing it to rotate in the XZ plane with the Y direction as the axis. The motor 331 is rotary driven and fixed to the top plate of the four-axis displacement stage 333. The motor 331 is also equipped with a connecting rod, the rotation axis of which is set along the X-axis. The motor 331 is used to drive the connecting rod to rotate around the X-axis. The cantilever beam structure clamping frame 332 is fixed on the connecting rod. The cantilever beam structure clamping frame 332 is used to fix and clamp the cantilever beam structure. The cantilever beam structure clamping frame 332 is equipped with a metal pressure plate for leading out electrode wires, providing a conductive path for the cantilever beam structure, thereby allowing the probe embryo to participate in the electrochemical reaction as a working electrode to form a complete electrochemical electrolysis circuit.

[0039] Furthermore, the wire clamping device 320 is used to control the position of the wire, and the cantilever beam structure clamping device 330 is used to control the position of the cantilever beam structure, thereby controlling the relative position between the wire and the cantilever beam structure.

[0040] In some specific embodiments of this application, the dispensing device 340 includes a dispensing support plate 341, an adhesive receiving tube 342, a dispensing needle 344, a dispensing pressure head 345, and a three-axis displacement stage 346. The three-axis displacement stage 346 is mounted on the air-bearing optical platform 100, the dispensing support plate 341 is located on the top of the three-axis displacement stage 346, the adhesive receiving tube 342 is connected to the dispensing support plate 341 through an adhesive receiving tube clamping device 343, and is used to receive conductive adhesive. The two ends of the adhesive receiving tube 342 are respectively provided with a dispensing needle 344 and a dispensing pressure head 345, and the conductive adhesive can be stably extruded through the dispensing needle 344 under the squeezing and pushing of the dispensing pressure head 345.

[0041] In the above embodiments of this application, a three-axis displacement stage 346 is mounted on an air-bearing optical platform 100, and a dispensing support plate 341 is fixed on the upper surface of the three-axis displacement stage 346, enabling displacement in the X, Y, and Z axes. A support plane is provided, and an adhesive receiving tube 342 is used to store and contain conductive adhesive. An adhesive receiving tube clamping device 343 is fixed on the upper surface of the support plane provided on the dispensing support plate 341 and is used to clamp the adhesive receiving tube 342. A dispensing needle 344 is mounted on one end of the adhesive receiving tube 342. A dispensing pressure head 345 is connected to the other end of the adhesive receiving tube 342 where the dispensing needle 344 is not mounted, and is used to control the extrusion or stopping of the conductive adhesive.

[0042] Reference Figure 4 As shown, based on the same inventive concept, another embodiment of this application provides a method for fabricating a cantilever beam-nano probe based on electrolysis and microassembly, comprising: S1. A cantilever beam-nano probe fabrication device based on electrolysis and micro-assembly is provided; S2. The cantilever beam structure and metal wire are clamped and assembled using a micro-assembly system 300. The cantilever beam structure and metal wire are bonded together with conductive adhesive to obtain the probe blank. S3. The probe embryo is electrolyzed in situ using an in-situ electrochemical electrolysis system 200. During the in-situ electrochemical electrolysis process, the cantilever beam nanoprobe with precise controllable structural parameters is prepared by adjusting the electrolysis process parameters. The electrolysis process parameters include voltage, current, electrolyte ratio and displacement control parameters.

[0043] It should be noted that, in the embodiments of the cantilever beam-nano probe preparation method based on electrolysis and microassembly described above, the detailed operation of other components or mechanisms can be referred to the description of the corresponding components or mechanisms in the cantilever beam-nano probe preparation device based on electrolysis and microassembly described above, and will not be repeated here.

[0044] For example, cantilever beam structures are typically rectangular strips, which can be fabricated using silicon or insulating substrates deposited with conductive thin films such as titanium / platinum. They possess both good conductivity and rigid support properties. After being wrapped with an insulating layer and connected with metal wires, nanoscale high-precision probes can be fabricated through in-situ electrochemical electrolysis. Cantilever beam structures have good conductivity. For cantilever beam structures that are originally non-conductive, such as silicon-based structures, a conductive layer can be deposited on their surface using methods including, but not limited to, magnetron sputtering, to obtain the final cantilever beam structure.

[0045] The embodiments described above employ a cantilever beam-nano probe preparation method based on electrolysis and microassembly, which can achieve integrated preparation of cantilever beam-nano probes without the need for equipment such as focused ion beams, thereby reducing costs, simplifying processes, and increasing yield.

[0046] In some specific embodiments of this application, the micro-assembly system 300 includes a vision acquisition module 310, a wire clamping device 320, a cantilever beam structure clamping device 330, and an adhesive dispensing device 340; the micro-assembly system 300 is used to clamp and assemble the cantilever beam structure and the wire, and the cantilever beam structure and the wire are bonded together with conductive adhesive to obtain a nanoscale probe preform, which may further include: S21. Install the metal wire to be assembled on the metal wire clamping device 320, install the cantilever beam structure to be assembled on the cantilever beam structure clamping device 330, and lead out the electrode wire. S22. The visual acquisition module 310 acquires images of the dispensing device 340 and the cantilever beam structure to obtain the relative positional relationship between the dispensing device 340 and the cantilever beam structure. Based on the relative positional relationship, the dispensing device 340 is moved closer to the cantilever beam structure and conductive adhesive is applied to the surface of the cantilever beam structure. S23. The visual acquisition module 310 is used to acquire images of the metal wire and the cantilever beam structure to obtain the relative positional relationship between the metal wire and the cantilever beam structure. Based on the relative positional relationship, the metal wire is brought into contact with the side of the cantilever beam structure coated with conductive adhesive, and after bonding, a probe embryo is obtained.

[0047] Specifically, in the above embodiments of this application, the visual acquisition module 310 is used to acquire the relative position between the dispensing needle 344 of the dispensing device 340 and the cantilever beam structure. The three-axis displacement stage 346 of the dispensing device 340 and the four-axis displacement stage 333 of the cantilever beam structure clamping device 330 are moved with reference to the above relative position, so that the center of the dispensing needle 344 coincides with that of one end of the cantilever beam structure, and conductive adhesive is applied to one end of the cantilever beam structure. The visual acquisition module 310 is used to acquire the relative position between the bottom surface of the metal wire and the end of the cantilever beam structure coated with conductive adhesive. By adjusting the phase position between the three-axis displacement stage 324 and the four-axis displacement stage 333 of the metal wire clamping device 320, the bottom of the metal wire and the end of the cantilever beam structure coated with conductive adhesive are brought into contact, and the conductive adhesive is allowed to cure to obtain a nano probe preform. The conductive adhesive is cured by allowing it to stand for 24 hours in a clean, room-temperature environment (25℃±5℃, relative humidity ≤60%) to ensure complete cross-linking and curing. During the movement of the four-axis displacement stage 333 according to the relative position of the cantilever beam structure and the bottom of the metal wire, the top plate can be adjusted to make the cantilever beam structure form a certain angle, thus completing the tilted assembly of the metal wire and subsequent electrochemical electrolytic molding.

[0048] In some specific embodiments of this application, the in-situ electrochemical electrolysis system 200 includes an electrolyte container 220, a counter electrode 230, a signal source 240, and an amplifier 250. The in-situ electrochemical electrolysis system 200 is used to perform in-situ electrochemical electrolysis on the probe embryo. During the in-situ electrochemical electrolysis process, by controlling the electrolysis process parameters, a cantilever beam-nanoprobe with precisely controllable structural parameters is prepared. This may further include: S31. The metal wire clamping device 320 releases the metal wire, and the cantilever beam structure clamping device 330 moves the position of the probe blank until the lower surface of the probe blank contacts the upper liquid surface of the electrolyte 210 in the electrolyte container 220 and maintains the preset immersion depth. S32. The electrode wires led out from the cantilever beam structure and the counter electrode in the in-situ electrochemical electrolysis system are connected to the signal source 240 via amplifier 250. S33. Start the signal source 240 and amplifier 250 in the in-situ electrochemical electrolysis system 200, and complete the preparation of the cantilever beam-nano probe by setting the preset electrolysis process parameters.

[0049] Specifically, in the above embodiments of this application, firstly, the visual acquisition module 310 can be used to acquire the relative position of the angle between the upper end of the metal wire and the horizontal plane, and the relative position between the lower surface of the metal wire and the upper liquid surface of the electrolyte 210 in the electrolyte container 220; then, based on the relative position of the angle between the upper end of the metal wire and the horizontal plane, the cantilever beam structure clamping device 330 is used to rotate the cantilever beam structure 180 degrees around the X-axis; referring to the relative position between the lower surface of the metal wire and the upper liquid surface of the electrolyte 210 in the electrolyte container 220, the four-axis displacement stage 333 is adjusted to control the cantilever beam structure to descend until the lower surface of the probe embryo contacts the upper liquid surface of the electrolyte 210 in the electrolyte container 220 and maintains a suitable immersion depth; the electrode wires led out from the conductive cantilever beam structure and the counter electrode 230 are connected to the signal source 240, wherein the signal source 240 is used to apply a stable voltage / current to the working electrode and the counter electrode. By turning on the signal source 240 and amplifier 250 and setting appropriate parameters, the integrated fabrication of the nanoprobe can be completed.

[0050] In the in-situ electrochemical electrolysis process, the cantilever beam-nanoprobe structure is prepared by adjusting the voltage, current, electrolyte ratio, and displacement control parameters. The voltage and current can be controlled by the signal source 240 and amplifier 250. The displacement control parameters refer to the relative spatial state between the probe embryo, the counter electrode, and the electrolyte, such as the distance between the probe embryo and the counter electrode, and the immersion depth of the probe embryo in the electrolyte. The movement of the probe embryo can be achieved by controlling the movement of the cantilever beam structure clamping device 330, thereby changing the relative position between the probe embryo and the counter electrode, and the immersion depth of the probe embryo in the electrolyte. The parameters adjustable by the signal source 240 include, but are not limited to, frequency, amplitude, phase, modulation type, modulation depth, and modulation mode; the parameters adjustable by the amplifier 250 include, but are not limited to, amplification factor.

[0051] In some specific embodiments of this application, the electrolyte container 220 contains an electrolyte 210, which is any one of a saturated aqueous solution of calcium chloride and acetone, an aqueous solution of sodium hydroxide, and a sulfuric acid solution.

[0052] In the above embodiments of this application, the electrolyte 210 is selected according to different types of probe embryos. If the probe embryo uses materials that are easily corroded by acid, such as copper, iron, or zinc, then an aqueous solution of sodium hydroxide is selected; if the probe embryo uses acid- and alkali-resistant metals such as titanium or nickel, then dilute sulfuric acid is selected; if the probe embryo uses materials that are not resistant to acid and alkali, such as ceramics, organic polymers like resins, or plastics, then a mixed solution of saturated aqueous solution of calcium chloride and acetone is selected. The concentration of the sodium hydroxide aqueous solution can be selected as 0.1–2 mol / L, the concentration of the dilute sulfuric acid can be selected as 0.1–1 mol / L, and in the mixed solution of saturated aqueous solution of calcium chloride and acetone, the volume ratio of saturated aqueous solution of calcium chloride to acetone is 1:2–3:1.

[0053] In some specific embodiments of this application, the conductive adhesive is either conductive silver paste or conductive epoxy resin; the metal wire is made of one or more of tungsten, platinum, iridium, and platinum-iridium alloy.

[0054] In the embodiments described above, the conductive silver paste exhibits excellent conductivity, extremely low contact resistance, rapid curing, and strong adhesion, enabling a firm bond between the metal wire and the cantilever beam structure. The conductive epoxy resin possesses high mechanical strength, resistance to acids and alkalis, and resistance to electrolyte corrosion. The metal wires, made of tungsten, platinum, iridium, and platinum-iridium alloys, exhibit high chemical stability and excellent conductivity.

[0055] The following examples will be used to further illustrate this application in order to better understand the above-mentioned technical solutions. It should be understood that the following are only some examples and are not intended to limit this application.

[0056] A method for in-situ electrochemical electrolysis and assembly of an inclined cantilever beam-platinum-iridium alloy nanoprobe structure is described, following these steps: M1. The platinum-iridium alloy wire to be assembled and processed is installed on the clamping part 322 of the wire clamping device 320, and the platinum-iridium alloy wire is clamped by adjusting the adjusting screw 323. M2. The silicon cantilever beam structure with a gold coating is installed on the cantilever beam structure clamping frame 332 of the cantilever beam structure clamping device 330, and an electrode wire is led out. M3. The vision acquisition module 310 acquires the first relative position X01 between the dispensing needle 344 of the dispensing device 340 and the silicon cantilever beam structure. The three-axis displacement stage 346 and the four-axis displacement stage 333 of the dispensing device 340 are moved with reference to the first relative position X01 so that the center of the dispensing needle 344 coincides with the center of one end of the cantilever beam structure and the conductive adhesive is applied to one end of the cantilever beam structure. At the same time, the four-axis displacement stage 333 is adjusted so that the cantilever beam structure forms a certain angle with the horizontal plane (i.e. the upper surface of the air-bearing optical platform). M4. Using the vision acquisition module 310, the second relative position X02 between the bottom surface of the platinum-iridium alloy wire and the end of the cantilever beam structure coated with conductive adhesive is acquired. Referring to the second relative position X02, the three-axis displacement stage 324 and the four-axis displacement stage 333 of the wire clamping device 320 are adjusted so that the bottom surface of the platinum-iridium alloy wire and the end of the cantilever beam structure coated with conductive adhesive come into contact with each other. The conductive adhesive is then allowed to cure to obtain the platinum-iridium alloy probe blank. The conductive adhesive can be conductive epoxy resin. M5. Use the visual acquisition module 310 to acquire the relative angle R01 between the upper end of the platinum-iridium alloy wire and the horizontal plane, and at the same time acquire the third relative position X03 between the lower surface of the platinum-iridium alloy wire and the upper liquid surface of the electrolyte 210 in the electrolyte container 220 of the in-situ electrochemical electrolysis system 200. M6. Using the motor 331 of the cantilever beam structure clamping device 330, with reference to the relative angle R01, rotate the platinum-iridium alloy probe blank 180 degrees around the X-axis. M7. Referring to the third relative position X03, adjust the four-axis displacement stage 333 to control the platinum-iridium alloy probe blank to descend until the lower surface of the platinum-iridium alloy probe blank contacts the upper liquid surface of the electrolyte 210 in the electrolyte container 220 and maintains a suitable immersion depth. The immersion depth can be 0.5 to 3 mm (only the lower end of the probe blank extends into the electrolyte, not completely submerged in the electrolyte); the electrolyte 210 can be a mixed solution of saturated aqueous solution of calcium chloride and acetone, and the volume ratio of saturated aqueous solution of calcium chloride to acetone is 1:1.

[0057] M8. Connect the outgoing electrode wire to the counter electrode 230 in the in-situ electrochemical electrolysis system 200 and to the amplifier 250 in the in-situ electrochemical electrolysis system 200, wherein the amplifier 250 is used to amplify the signal from the signal source 240. M9. Turn on the signal source 240 and amplifier 250 in the in-situ electrochemical electrolysis system 200, and complete the integrated fabrication of the cantilever beam-platinum-iridium alloy nanoprobe by setting appropriate parameters; refer to Figure 5 As shown, the left image is a platinum-iridium alloy probe blank, and the right image is a cantilever beam-platinum-iridium alloy nanoprobe.

[0058] As a preferred parameter setting, in step M9, the output signal type of signal source 240 can be selected as a sinusoidal signal, the signal frequency is between 50 Hz and 2 kHz, the modulation type is sinusoidal amplitude modulation, the modulation frequency is between 10% and 90% of the signal frequency, the modulation depth is between 20% and 80%, and the peak-to-peak value is between 2 V and 5 V. At the same time, the amplification factor of amplifier 250 is set to 10. All of these settings can produce a platinum-iridium alloy probe of good quality. Furthermore, using the cantilever beam-nanoprobe fabrication method based on electrolysis and microassembly provided in this application, probe tip diameters tunable in the range of 5 nm to tens of micrometers can be generated, such as tip diameters of 5.38 nm, 2.9 μm, and 18.39 μm. Specific details of probes with different tip diameters can be found in [reference needed]. Figures 6-8 As shown; cantilever beam nanoprobes with different tip lengths can also be generated, such as 7.83µm, 15.08µm, and 38.29µm. For details on probes with different tip lengths, please refer to [reference needed]. Figures 9-11 As shown, the probe and various cantilever beams are integrated in situ.

[0059] In summary, this application achieves the fabrication of cantilever beam-nanoparticle probe structures by integrating an in-situ electrochemical electrolysis system with a nanoscale microassembly system. By adjusting the relative positions of the various parts in the device, the assembly of the probe and the cantilever beam can be achieved in conjunction with in-situ electrochemical fabrication. By adjusting the electrolysis process parameters of the signal source and amplifier, cantilever beam-nanoparticle probes with different materials and probe tip lengths can be fabricated. Compared with existing processes that require expensive FIB for nanoscale processing and assembly, this method has the advantages of low cost, simple process, and high yield.

[0060] The preferred features in the above embodiments can be used individually in any embodiment, or in any combination thereof, provided they do not conflict with each other. Furthermore, parts not described in detail in the embodiments can be implemented using existing technologies.

[0061] The foregoing has described some specific embodiments of this application. It should be understood that this application is not limited to the specific embodiments described above, and those skilled in the art can make various modifications or variations within the scope of the claims, which do not affect the substantive content of this application. The above-described preferred features can be used in any combination without conflict.

Claims

1. A cantilever beam-nanoprobe fabrication device based on electrolysis and microassembly, characterized in that, include: A micro-assembly system for clamping and assembling a cantilever beam structure and a metal wire, wherein the cantilever beam structure and the metal wire are bonded with conductive adhesive to form a probe blank; An in-situ electrochemical electrolysis system is used to perform in-situ electrochemical electrolysis on the probe embryo. By controlling the electrolysis process parameters during the in-situ electrochemical electrolysis process, a cantilever beam-nano probe with precisely controllable structural parameters is prepared. The electrolysis process parameters include voltage, current, electrolyte ratio, and displacement control parameters. An air-floating optical platform is used to support the micro-assembly system and the in-situ electrochemical electrolysis system.

2. The cantilever beam-nano probe fabrication device based on electrolysis and microassembly according to claim 1, characterized in that, The in-situ electrochemical electrolysis system includes an electrolyte container, a counter electrode, a signal source, and an amplifier. The electrolyte container is located on the air-floating optical platform and contains electrolyte. The probe embryo and the counter electrode both extend into the electrolyte. During the in-situ electrochemical electrolysis process, the electrolyte provides anions and cations, forming a complete electrical circuit together with the probe embryo and the counter electrode. The signal source outputs a preset electrical signal to control the voltage or current waveform of the in-situ electrochemical electrolysis process. The amplifier is electrically connected to the signal source and amplifies the power of the electrical signal output by the signal source.

3. The cantilever beam-nano probe fabrication device based on electrolysis and microassembly according to claim 1, characterized in that, The micro-assembly system includes a vision acquisition module, a clamping module, and a dispensing device, all of which are mounted on the air-float optical platform. The vision acquisition module is used to acquire images of the clamping module, the dispensing device, and the in-situ electrochemical electrolysis system. The clamping module is used to clamp the cantilever beam structure and the metal wire, and adjusts the relative position between the cantilever beam structure and the metal wire based on the images acquired by the vision acquisition module. The dispensing device is used to coat the surface of the cantilever beam structure with conductive adhesive, which serves as an adhesive between the cantilever beam structure and the metal wire.

4. The cantilever beam-nano probe fabrication device based on electrolysis and microassembly according to claim 3, characterized in that, The clamping module includes a wire clamping device and a cantilever beam structure clamping device. The wire clamping device includes a horizontal support rod, a clamping component, an adjusting screw, and a three-axis displacement stage. The three-axis displacement stage is mounted on the air-bearing optical platform. The horizontal support rod is horizontally connected to the top of the three-axis displacement stage. The clamping component is connected to the end of the horizontal support rod and is used to clamp the wire, keeping the wire in a vertical position. The adjusting screw is used to adjust the gap of the clamping component, enabling the clamping component to clamp wires of different diameters. The cantilever beam structure clamping device includes a motor, a cantilever beam structure clamping frame, a four-axis displacement stage, and a connecting rod. The four-axis displacement stage is located on the air-bearing optical platform. The motor is mounted on the four-axis displacement stage and is used to drive the connecting rod to rotate. The cantilever beam structure clamping frame is connected to the end of the connecting rod and is used to clamp the cantilever beam structure.

5. The cantilever beam-nano probe fabrication device based on electrolysis and microassembly according to claim 3, characterized in that, The dispensing equipment includes a dispensing support plate, an adhesive receiving tube, a dispensing needle, a dispensing pressure head, and a three-axis displacement stage. The three-axis displacement stage is mounted on the air-bearing optical platform. The dispensing support plate is located on top of the three-axis displacement stage. The adhesive receiving tube is connected to the dispensing support plate and is used to receive the conductive adhesive. The two ends of the adhesive receiving tube are respectively provided with a dispensing needle and a dispensing pressure head. The conductive adhesive can be stably extruded through the dispensing needle under the squeezing and pushing of the dispensing pressure head.

6. A method for preparing a cantilever beam-nanoprobe based on electrolysis and microassembly for use in the device according to any one of claims 1-5, characterized in that, include: The cantilever beam-nano probe fabrication apparatus based on electrolysis and microassembly as described in any one of claims 1-5 is provided; A micro-assembly system is used to clamp and assemble a cantilever beam structure and a metal wire. The cantilever beam structure and the metal wire are then bonded together with conductive adhesive to obtain a probe blank. The probe embryo is subjected to in-situ electrochemical electrolysis using an in-situ electrochemical electrolysis system. During the in-situ electrochemical electrolysis process, a cantilever beam-nano probe with precisely controllable structural parameters is prepared by adjusting the electrolysis process parameters, including voltage, current, electrolyte ratio, and displacement control parameters.

7. The method for preparing a cantilever beam-nano probe based on electrolysis and microassembly according to claim 6, characterized in that, The micro-assembly system includes a vision acquisition module, a wire clamping device, a cantilever beam structure clamping device, and an adhesive dispensing device. The process involves using a micro-assembly system to clamp and assemble a cantilever beam structure and a metal wire, then bonding the cantilever beam structure and the metal wire with conductive adhesive to obtain a probe blank, comprising: The metal wire to be assembled is installed on the metal wire clamping device, the cantilever beam structure to be assembled is installed on the cantilever beam structure clamping device, and the electrode wire is led out. The visual acquisition module is used to acquire images of the dispensing device and the cantilever beam structure to obtain the relative positional relationship between the dispensing device and the cantilever beam structure. Based on the relative positional relationship, the dispensing device is moved closer to the cantilever beam structure and conductive adhesive is applied to the surface of the cantilever beam structure. The vision acquisition module is used to acquire images of the metal wire and the cantilever beam structure to obtain the relative positional relationship between the metal wire and the cantilever beam structure. Based on the relative positional relationship, the metal wire is brought into contact with the side of the cantilever beam structure coated with conductive adhesive, and after bonding, a probe embryo is obtained.

8. The method for preparing a cantilever beam-nano probe based on electrolysis and microassembly according to claim 7, characterized in that, The in-situ electrochemical electrolysis system includes an electrolyte container, a counter electrode, a signal source, and an amplifier. The probe embryo is subjected to in-situ electrochemical electrolysis using this system. During the in-situ electrochemical electrolysis process, by controlling the electrolysis process parameters, a cantilever beam-nanoprobe with precisely controllable structural parameters is prepared, including: The wire clamping device releases the wire and moves the probe embryo using the cantilever beam clamping device until the lower surface of the probe embryo contacts the upper liquid surface of the electrolyte in the electrolyte container and maintains a preset immersion depth. The electrode wires led out from the cantilever beam structure are connected to the counter electrode in the in-situ electrochemical electrolysis system via an amplifier to a signal source; The signal source and amplifier in the in-situ electrochemical electrolysis system are activated, and the cantilever beam-nano probe is prepared by setting preset electrolysis process parameters.

9. The method for preparing a cantilever beam-nano probe based on electrolysis and microassembly according to claim 8, characterized in that, The electrolyte container contains an electrolyte, which is any one of the following: a mixed solution of calcium chloride and acetone, an aqueous solution of sodium hydroxide, and a sulfuric acid solution.

10. The method for preparing a cantilever beam-nano probe based on electrolysis and microassembly according to claim 7, characterized in that, The conductive adhesive is either conductive silver paste or conductive epoxy resin; the metal wire is made of one or more of tungsten, platinum, iridium, and platinum-iridium alloy.

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