A detachable probe card for semiconductor testing

Abstract

This invention relates to a detachable probe card for semiconductor testing, comprising a chuck, a probe card body, a mounting frame, and a docking mechanism. The probe card body is housed within the mounting frame, which has docking holes. The docking mechanism on the chuck mates with the docking holes. The docking mechanism includes a connecting seat, a fixed seat, a spring, a telescopic column, and a limiting rod. The fixed seat has a receiving cavity. The spring drives the telescopic column to move up and down. The limiting rod, following the telescopic column, passes through a slot in the docking hole and rotates within the receiving groove to quickly lock the mounting frame and chuck together. Reverse operation unlocks the mechanism. The chuck has a telescopic rod to adjust the position of the docking mechanism, the connecting seat has a limiting plate for precise alignment, and the receiving groove is an arc-shaped groove with anti-slip texture. This invention replaces traditional bolt fixing with an elastic rotation locking structure. Combined with the design of the telescopic rod and limiting plate, it solves the problems of low assembly and disassembly efficiency, inaccurate alignment, and easy loosening of traditional probe cards. It also has the advantages of multi-specification compatibility, convenient operation, and stable locking, significantly improving the changeover efficiency and testing stability of semiconductor testing.

Description

Technical Field

[0001] This invention relates to the field of probe cards, and more particularly to a detachable probe card for semiconductor testing. Background Technology

[0002] As a core interface device in the semiconductor wafer testing stage, the probe card enables the transmission of electrical signals between the tester and the bare die through precise contact between the probe and the chip pads or bumps. This directly determines the accuracy and efficiency of chip electrical performance testing. Especially in bare die testing scenarios where batches are similar but specifications are slightly different, the probe card structure needs to be frequently replaced or adjusted to match testing requirements. In this case, the disassembly and assembly efficiency becomes a key factor affecting the production line capacity.

[0003] Currently, the invention patent with application number 202122183912.5 discloses a detachable probe card for semiconductor testing. The probe card is detachably connected through components such as a fixed bracket, mounting frame and adjusting bolts. Although it reduces the risk of probe damage to a certain extent, it has significant defects in fixing efficiency. It adopts a combination of multiple sets of bolts and sliding blocks for positioning. When changing probe plates of different sizes, the bolts need to be adjusted symmetrically one by one to achieve the limiting fixation of the lifting horizontal plate and the vertical plate. The whole process requires repeated manual calibration. The fixing or disassembly of a single set of probe cards takes a long time. In batch testing scenarios, this leads to a significant increase in equipment downtime and waiting time, directly reducing the utilization rate of the production line. Summary of the Invention

[0004] To address the aforementioned technical problems, this invention provides a detachable probe card for semiconductor testing.

[0005] The present invention provides a detachable probe card for semiconductor testing, which adopts the following technical solution:

[0006] A detachable probe card for semiconductor testing includes a chuck, a probe card body, a mounting frame, and a docking mechanism. The probe card body is disposed within the mounting frame, and the docking mechanism is disposed on the chuck. The mounting frame has a plurality of docking holes, and the docking mechanism corresponds to the positions of the docking holes. The docking mechanism includes a connecting seat, a fixing seat, a spring, a telescopic column, and a limiting rod. The connecting seat is disposed on the chuck, and the fixing seat is mounted on the connecting seat. The fixing seat has a receiving cavity. The telescopic column includes a pressing part, a sliding part, and a limiting part. The two ends of the sliding part are respectively connected to the limiting part and the pressing part, and the outer diameter of the sliding part is smaller than that of the limiting part. The device comprises a pressing part and a limiting part. The sliding part is completely disposed within the receiving cavity. The outer wall of the pressing part slides in conjunction with the receiving cavity. The spring is disposed within the receiving cavity, with one end of the spring abutting against the pressing part and the other end abutting against the bottom of the receiving cavity. The spring applies an upward force to the telescopic column. One end of the sliding part protruding from the receiving cavity is connected to the limiting part. The limiting part restricts the telescopic column from sliding out of the receiving cavity. The limiting rod is fixed on the limiting part. The docking hole includes a through groove and a receiving groove. The shape of the through groove is adapted to the shape of the limiting part and the limiting rod. The receiving groove is disposed below the through groove and provides space for the limiting rod to rotate.

[0007] Optionally, the top of the pressing part extends out of the receiving cavity.

[0008] Optionally, the portion of the pressing part that extends out of the receiving cavity is provided with a handle.

[0009] Optionally, it also includes a telescopic rod, with the connecting seat fixed to one end of the telescopic rod and the other end of the telescopic rod slidingly engaged with a chuck.

[0010] Optionally, a limiting plate is provided on the side of the connecting seat away from the chuck. When the limiting plate abuts against the outer wall of the mounting frame, the limiting part and the limiting rod on the limiting part are aligned with the through groove.

[0011] Optionally, the receiving groove is an arc-shaped groove, the center of the arc-shaped groove coincides with the axis of the sliding part, the arc length of the arc-shaped groove is adapted to the rotation angle of the limiting rod, and the inner wall of the arc-shaped groove is provided with anti-slip texture.

[0012] In summary, the present invention has at least one of the following beneficial technical effects:

[0013] 1. Because the spring in the fixed seat cavity always applies an upward preload to the telescopic column, manually pressing the pressing part of the telescopic column will drive the sliding part and the limiting part to compress the spring downward, so that the limiting part and the limiting rod pass through the through groove and enter the lower receiving groove. At this time, rotating the pressing part will cause the limiting rod to rotate in the receiving groove. After releasing the pressing part, the spring releases its elastic potential energy and pushes the telescopic column to reset. The limiting rod will then be in close contact with the non-through groove area of ​​the receiving groove. Since the limited rod cannot pass through the through groove after rotation, the mechanical locking of the mounting frame and the chuck is achieved. Unlocking only requires pressing and rotating the telescopic column in the opposite direction to make the limiting rod return to the initial angle that matches the through groove. The spring will drive the limiting part and the limiting rod to pass through the through groove, thus separating the mounting frame and the chuck. This solves the problem of low disassembly and assembly efficiency caused by the traditional patent requiring each bolt to be tightened.

[0014] 2. By adjusting the lateral and longitudinal positions of the connecting seat and the upper docking mechanism using the sliding telescopic rod, precise matching with docking holes at different positions on the mounting frame can be achieved, significantly improving the chuck's compatibility with probe card bodies of various specifications.

[0015] 3. The anti-slip texture on the inner wall of the arc-shaped groove can effectively increase the friction between the limit rod and the groove wall. Combined with the upward preload continuously applied by the spring, the locking position of the limit rod can be fixed, preventing the limit rod from loosening due to equipment vibration, external force contact, or other factors during semiconductor testing. At the same time, the anti-slip texture design will not affect the reverse rotation operation during unlocking. Only a moderate force is needed to drive the limit rod out of the locked position. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a detachable probe card for semiconductor testing.

[0017] Figure 2 This is a top view of the mounting frame.

[0018] Figure 3 This is a bottom view of the chuck and docking mechanism.

[0019] Figure 4 This is a partial sectional view of the docking mechanism and docking holes.

[0020] Explanation of reference numerals in the attached drawings: 1. Chuck; 2. Probe card body; 3. Mounting frame; 4. Docking mechanism; 41. Connecting seat; 42. Fixing seat; 421. Receiving cavity; 43. Spring; 44. Telescopic column; 441. Pressing part; 442. Sliding part; 443. Limiting part; 45. Limiting rod; 46. Turn handle; 47. Limiting plate; 5. Docking hole; 51. Through groove; 52. Receiving groove; 53. Anti-slip texture; 6. Telescopic rod. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0023] Furthermore, "several" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0024] This invention discloses a detachable probe card for semiconductor testing. (Refer to...) Figure 1-4A detachable probe card for semiconductor testing includes a chuck 1, a probe card body 2, a mounting frame 3, and a docking mechanism 4. The probe card body 2 is disposed within the mounting frame 3, and the docking mechanism 4 is disposed on the chuck 1. The mounting frame 3 has a plurality of docking holes 5, and the docking mechanism 4 is positioned corresponding to the docking holes 5. The docking mechanism 4 includes a connecting seat 41, a fixing seat 42, a spring 43, a telescopic column 44, and a limiting rod 45. The connecting seat 41 is disposed on the chuck 1, and the fixing seat 42 is mounted on the connecting seat 41. The fixing seat 42 has a receiving cavity 421. The telescopic column 44 includes a pressing part 441, a sliding part 442, and a limiting part 443. The sliding part 442 is connected to the limiting part 443 and the pressing part 441 at its two ends respectively. The outer diameter of the sliding part 442 is smaller than that of the pressing part 441 and the limiting part 443. The sliding part 442 is completely disposed within the receiving cavity 421. The outer wall of the pressing part 441 is slidably fitted with the receiving cavity 421. The spring 43 is disposed within the receiving cavity 421. One end of the spring 43 abuts against the pressing part 441 and the other end abuts against the bottom of the receiving cavity 421. The spring 43 applies an upward force to the telescopic column 44. One end of the sliding part 442 that protrudes from the receiving cavity 421 is connected to the limiting part 443. The limiting part 443 restricts the telescopic column 44 from sliding out of the receiving cavity 421. The limiting rod 45 is fixed in the limiting position. On part 443, the mating hole 5 includes a through groove 51 and a receiving groove 52. The shape of the through groove 51 is adapted to the shape of the limiting part 443 and the limiting rod 45. The receiving groove 52 is located below the through groove 51 and provides space for the limiting rod 45 to rotate. With this design, since the spring 43 in the receiving cavity 421 of the fixed seat 42 always applies an upward preload to the telescopic column 44, manually pressing the pressing part 441 of the telescopic column 44 can drive the sliding part 442 and the limiting part 443 to compress the spring 43 downward, so that the limiting part 443 and the limiting rod 45 pass through the through groove 51 and enter the lower receiving groove 52. At this time, rotating the pressing part 441... After the limiting rod 45 rotates within the receiving groove 52, the pressing part 441 is released, and the spring 43 releases its elastic potential energy to push the telescopic column 44 back to its original position. The limiting rod 45 then fits tightly against the area of ​​the receiving groove 52 that is not through the groove 51. Since the limited rod 45 can no longer pass through the through groove 51 after rotation, the mechanical locking between the mounting frame 3 and the chuck 1 is achieved. Unlocking only requires pressing and rotating the telescopic column 44 in the opposite direction to make the limiting rod 45 return to the initial angle that matches the through groove 51. The spring 43 drives the limiting part 443 and the limiting rod 45 to pass through the through groove 51, thus separating the mounting frame 3 and the chuck 1. This solves the problem of low disassembly and assembly efficiency caused by the traditional patent requiring each bolt to be tightened.

[0025] The top of the pressing part 441 extends through the receiving cavity 421, providing pressing space when the pressing part moves downward. The part of the pressing part 441 that extends through the receiving cavity 421 is provided with a handle 46, and the limit rod 45 can be rotated by rotating the handle 46.

[0026] The chuck 1 is also equipped with a telescopic rod 6. The connecting seat 41 is fixed to one end of the telescopic rod 6, and the other end of the telescopic rod 6 slides with the chuck 1. Through this design, the position of the docking mechanism 4 can be flexibly adjusted. When facing different sizes and specifications of the mounting frame 3, it is not necessary to replace the entire chuck 1 or the docking mechanism 4. Simply adjust the horizontal and vertical positions of the connecting seat 41 and the docking mechanism 4 above by sliding the telescopic rod 6 to accurately match the docking holes 5 at different positions on the mounting frame 3, which greatly improves the compatibility of the chuck 1 with multi-specification probe card bodies 2.

[0027] A limiting plate 47 is provided on the side of the connecting seat 41 away from the chuck 1. When the limiting plate 47 abuts against the outer wall of the mounting frame 3, the limiting part 443 and the limiting rod 45 on the limiting part 443 are exactly aligned with the through groove 51. During the installation process, the operator does not need to repeatedly aim with the naked eye or manually adjust the position of the mounting frame 3. The limiting part 443 and the limiting rod 45 are instantly aligned with the through groove 51 by means of the positioning effect of the limiting plate 47. This solves the problem of misalignment between the docking hole 5 and the limiting part 443 caused by visual errors and manual operation deviations during the traditional alignment process.

[0028] The receiving groove 52 is an arc-shaped groove, the center of which coincides with the axis of the sliding part 442. The arc length of the arc-shaped groove is adapted to the rotation angle of the limiting rod 45. The inner wall of the arc-shaped groove is provided with anti-slip texture 53, which can effectively increase the friction between the limiting rod 45 and the groove wall. Combined with the upward preload continuously applied by the spring 43, the locking position of the limiting rod 45 can be fixed, preventing the limiting rod 45 from loosening due to equipment vibration, external force contact, or other factors during semiconductor testing. At the same time, the design of the anti-slip texture 53 will not affect the reverse rotation operation during unlocking. Only a moderate force is needed to drive the limiting rod 45 out of the locked position.

[0029] The above are all preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, all equivalent changes made in accordance with the structure, shape and principle of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A detachable probe card for semiconductor testing, characterized in that: The device includes a chuck (1), a probe card body (2), a mounting frame (3), and a docking mechanism (4). The probe card body (2) is disposed within the mounting frame (3), and the docking mechanism (4) is disposed on the chuck (1). The mounting frame (3) has a plurality of docking holes (5), and the docking mechanism (4) is positioned corresponding to the docking holes (5). The docking mechanism (4) includes a connecting seat (41), a fixing seat (42), a spring (43), a telescopic column (44), and a limiting rod (45). The connecting seat (41) is mounted on the chuck (1), and the fixing seat (42) is mounted on the connecting seat (41). The fixing seat (42) has a receiving cavity (421). The telescopic column (44) includes a pressing part (441), a sliding part (442), and a limiting part (443). The two ends of the sliding part (442) are respectively connected to the limiting part (443) and the pressing part (441). The outer diameter of the sliding part (442) is smaller than that of the pressing part (441) and the limiting part (443). 3) The sliding part (442) is completely disposed within the receiving cavity (421). The outer wall of the pressing part (441) slides in cooperation with the receiving cavity (421). The spring (43) is disposed within the receiving cavity (421). One end of the spring (43) abuts against the pressing part (441) and the other end abuts against the bottom of the receiving cavity (421). The spring (43) applies an upward force to the telescopic column (44). One end of the sliding part (442) protruding from the receiving cavity (421) is connected to the limiting part (443). The limiting part (443) restricts the telescopic column (44) from sliding out of the receiving cavity (421), the limiting rod (45) is fixed on the limiting part (443), the docking hole (5) includes a through groove (51) and a receiving groove (52), the shape of the through groove (51) is adapted to the shape of the limiting part (443) and the limiting rod (45), the receiving groove (52) is disposed below the through groove (51), and the receiving groove (52) provides space for the limiting rod (45) to rotate.

2. The detachable probe card for semiconductor testing according to claim 1, characterized in that: The top of the pressing part (441) extends out of the receiving cavity (421).

3. The detachable probe card for semiconductor testing according to claim 1, characterized in that: The portion of the pressing part (441) that protrudes from the receiving cavity (421) is provided with a throttle (46).

4. A detachable probe card for semiconductor testing according to claim 1, characterized in that: It also includes a telescopic rod (6), the connecting seat (41) is fixed to one end of the telescopic rod (6), and the other end of the telescopic rod (6) is slidably engaged with the chuck (1).

5. A detachable probe card for semiconductor testing according to claim 1, characterized in that: A limiting plate (47) is provided on the side of the connecting seat (41) away from the chuck (1). When the limiting plate (47) abuts against the outer wall of the mounting frame (3), the limiting part (443) and the limiting rod (45) on the limiting part (443) are aligned with the through groove (51).

6. A detachable probe card for semiconductor testing according to claim 1, characterized in that: The receiving groove (52) is an arc-shaped groove, the center of which coincides with the axis of the sliding part (442), the arc length of which is adapted to the rotation angle of the limiting rod (45), and the inner wall of the arc-shaped groove is provided with anti-slip texture (53).

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