Gas phase full component intelligent identification method based on mass spectrometry detection

Abstract

This invention provides an intelligent gas-phase full-component identification method based on mass spectrometry, comprising: performing mass spectrometry on a detection gas formed by a target analytical gas and a reference gas to obtain a three-dimensional mass spectrometry spectrum; analyzing the obtained three-dimensional mass spectrometry spectrum using the mass spectrometry characteristic parameters of known component gases in the target analytical gas according to the equivalent feature spectrum method to determine the presence of unknown components; calculating the physical parameters of known component gases when there are no unknown components in the target analytical gas; and extracting the three-dimensional mass spectrometry spectrum of the unknown component from the obtained three-dimensional mass spectrometry spectrum to determine the type and mass spectrometry characteristic parameters of the unknown component gas. This method, based on the equivalent feature spectrum method, analyzes the three-dimensional mass spectrometry spectrum, enabling real-time and accurate identification of multi-component gases. It is suitable for identifying various types of gases, is not easily affected by environmental conditions or gas states, and can directly determine their mass spectrometry characteristic parameters.

Description

Technical Field

[0001] This invention belongs to the field of gas detection technology, specifically relating to an intelligent identification method for all gas phase components based on mass spectrometry detection. Background Technology

[0002] In the field of gas detection and analysis, the gas to be analyzed is often a complex mixture containing multiple gaseous components, and the concentration of each component may change dynamically over time. If the types of components in the gas are fixed and known, an appropriate detection method can be selected based on the known characteristics. However, in actual processes, the types of gases are often unknown. For example, in complex multiple reactions, the types of escaping gases constantly change, which in turn affects the reaction mechanism and process. Therefore, for detection scenarios involving unknown gaseous components, it is necessary to identify the types of gaseous components and then simultaneously achieve effective quantitative analysis.

[0003] To address the aforementioned issues, mass spectrometry offers significant advantages. Compared to other gas analysis techniques, mass spectrometry provides structured fingerprint information—the mass spectrum of a single gas, after normalization, can form its characteristic spectrum. However, practical mass spectrometry analysis still faces certain technical bottlenecks. For example, in multiple reaction processes, completely unknown components may appear, lacking all characteristic information, making it difficult to determine the types of gaseous components; when the content of unknown components escaping during the reaction is low, the signal-to-noise ratio of the mass spectrometry signal is poor, making detection difficult; when reactions occur under non-standard conditions such as high temperature or vacuum, the gaseous components cannot exist stably under standard conditions, making it difficult to obtain their characteristic information through conventional gas calibration procedures; some toxic and corrosive gaseous components cannot be calibrated using precisely prepared standard gases.

[0004] Therefore, there is an urgent need for an effective method to identify and calibrate unknown gas phase components, so as to provide accurate gas phase composition information for the study of complex reaction mechanisms. Summary of the Invention

[0005] The purpose of this invention is to provide an intelligent identification method for all gas phase components based on mass spectrometry. By using mass spectrometry detection and based on the equivalent feature spectrum method, the method can effectively identify the types of gas phase components and solve the problem that existing methods are limited by detection means or environmental conditions.

[0006] To achieve this objective, the present invention employs the following technical solution:

[0007] This invention provides an intelligent identification method for all gas-phase components based on mass spectrometry detection, the method comprising the following steps:

[0008] (1) Mass spectrometry is performed on the detection gas formed by the target analytical gas and the reference gas to obtain a three-dimensional mass spectrometry spectrum;

[0009] (2) According to the equivalent feature spectrum method, the mass spectrometry feature parameters of the known component gas in the target analytical gas are used to analyze the three-dimensional mass spectrum obtained in step (1) to determine whether the unknown component exists;

[0010] (3) When there are no unknown components in the target gas, calculate the physical parameters of the known component gas; when there are unknown components in the target gas, extract the three-dimensional mass spectrometry spectrum of the unknown component from the three-dimensional mass spectrometry spectrum obtained in step (1) and determine the type and mass spectrometry characteristic parameters of the unknown component gas.

[0011] The gas phase full-component identification method of the present invention utilizes mass spectrometry detection and is based on the equivalent feature map method to analyze the three-dimensional mass spectrum of the target analytical gas. It uses the spectral data to achieve autonomous separation and real-time accurate judgment of multi-component gases. It is less affected by signal noise interference and can be suitable for the identification of various types of gases, including toxic, highly corrosive and non-standard state gases. It is not easily affected by environmental conditions and gas state. Furthermore, it determines the mass spectrometry characteristic parameters of the identified gas types, enriches the characteristic parameter database, and facilitates subsequent analysis under various working conditions.

[0012] Preferably, the mass spectrometry characteristic parameters include characteristic spectrum and relative sensitivity.

[0013] Preferably, the parsing process in step (2) includes:

[0014] By introducing mass spectrometry characteristic parameters of known component gases, the three-dimensional mass spectra are solved to obtain the partial pressure time series of the reference gas and known components;

[0015] Time correlation analysis was performed on the partial pressures of the reference gas and known components.

[0016] Preferably, the time correlation analysis includes: calculating the correlation coefficient R between the partial pressures of the reference gas and the known components; when R ≥ 0.9, it is determined that the partial pressures of the reference gas and the known components are correlated; when R < 0.9, it is determined that the partial pressures of the reference gas and the known components are not correlated.

[0017] Preferably, the process of determining whether the unknown component exists includes:

[0018] When the partial pressures of the reference gas and the known components are correlated, a mass spectrometry total pressure balance analysis is performed on the partial pressures of the reference gas and the known components.

[0019] If the partial pressures of the reference gas and the known components satisfy the mass spectrometry total pressure equilibrium, it is determined that there is no unknown component; if the partial pressures of the reference gas and the known components do not satisfy the mass spectrometry total pressure equilibrium, it is determined that the unknown component exists.

[0020] If the partial pressures of the reference gas and the known components are not correlated, then the unknown components are determined to exist.

[0021] Preferably, the mass spectrometry total pressure equilibrium analysis includes:

[0022] Total gas pressure p inside the mass spectrometer t To maintain stability, if the difference between the partial pressure of the reference gas and the pressure drop of the total gas pressure inside the mass spectrometer and the partial pressure of the known components is less than half of the minimum partial pressure of the known components, it is determined that the total pressure balance of the mass spectrometer is satisfied; otherwise, it is determined that the total pressure balance of the mass spectrometer is not satisfied.

[0023] Preferably, the process of extracting the three-dimensional mass spectrometry spectrum of the unknown component in step (3) includes:

[0024] Using the partial pressures and mass spectrometry characteristic parameters of the known components, a three-dimensional mass spectrum including the reference gas and the known components is reconstructed according to the equivalent characteristic spectrum method. The three-dimensional mass spectrum of the detected gas is separated from the reconstructed three-dimensional mass spectrum to obtain the three-dimensional mass spectrum of the unknown components.

[0025] Preferably, the method for determining the type of the unknown component gas includes:

[0026] Extract the signal intensity of all mass-to-nucleus ratios from the three-dimensional mass spectra of gases with unknown components;

[0027] The mass-to-nucleus ratio corresponding to the highest signal intensity was selected as the main peak mass-to-nucleus ratio of the unknown component gas.

[0028] For any two mass-to-nucleus ratios, calculate the cocorrelation coefficient of the signal intensity. The mass-to-nucleus ratio with the highest cocorrelation coefficient with the main peak is taken as the mass-to-nucleus ratio of the broken peak. The gas type is determined by the mass-to-nucleus ratio of the main peak and the broken peak based on the molecular weight and ionization structure.

[0029] Preferably, the determination of the mass spectrometry characteristic parameters of the unknown component gas includes: determining the characteristic spectrum of the unknown component gas and determining the relative sensitivity of the unknown component gas.

[0030] Preferably, the method for determining the characteristic spectrum of the unknown component gas includes:

[0031] Using the main peak signal intensity of the unknown component gas as the denominator, the signal intensity of the broken peaks is normalized to obtain the characteristic spectrum of the unknown component gas.

[0032] The method for determining the relative sensitivity of the unknown component gas includes:

[0033] Set the initial relative sensitivity of the unknown component gas, use the characteristic spectrum of the unknown component gas, and solve the partial pressure of the unknown component gas from the three-dimensional mass spectrometry spectrum of the unknown component. When the partial pressure of the unknown component gas, the total partial pressure of the known components, and the pressure drop of the reference gas satisfy the mass spectrometry total pressure balance, the initial relative sensitivity is set as the relative sensitivity of the unknown component gas.

[0034] Compared with the prior art, the present invention has the following beneficial effects:

[0035] The intelligent gas phase full-component identification method of the present invention utilizes mass spectrometry detection and is based on the equivalent feature map method to analyze the three-dimensional mass spectrum of the target analytical gas. It uses the spectral data to achieve real-time and accurate identification of multi-component gases, is less affected by signal noise interference, and is suitable for the identification of various types of gases, including toxic, highly corrosive and non-standard state gases. It is not easily affected by environmental conditions and gas state, and directly determines the mass spectrometry feature parameters of the identified gas type, enriching the feature parameter database and facilitating subsequent analysis under various working conditions. Attached Figure Description

[0036] Figure 1 This is a flowchart of the gas-phase full-component identification method in Example 1;

[0037] Figure 2 This is a flowchart of the gas-phase full-component identification method in Example 1;

[0038] Figure 3 This is a three-dimensional mass spectrometry spectrum of the gas detected in Example 2;

[0039] Figure 4 This is the separation spectrum of the three-dimensional mass spectrometry spectrum of Example 2;

[0040] Figure 5 This is a characteristic spectrum of the unknown component gas in Example 2. Detailed Implementation

[0041] The technical solution of the present invention will be further illustrated below through specific embodiments. Those skilled in the art should understand that the embodiments described are merely illustrative of the present invention and should not be construed as limiting the invention in any way.

[0042] Example 1

[0043] This embodiment provides a method such as Figure 1 and Figure 2 The intelligent identification method for all gas phase components based on mass spectrometry detection shown includes the following steps:

[0044] (1) Mass spectrometry is performed on the target analytical gas and the reference gas to form a detection gas, and a three-dimensional mass spectrum of the detection gas is obtained.

[0045] Mass spectrometry is used to detect the target analytical gas, and a gas that does not react with any component in the target analytical gas is selected as the reference gas, such as argon.

[0046] A reference gas is used as a carrier gas and mixed with the target analytical gas to form a detection gas. This gas is then introduced into a mass spectrometer. Mass spectrometry detection parameters are set, and detection is performed to obtain a three-dimensional mass spectrometry spectrum with a time dimension.

[0047] In mass spectrometry detection, the mass-to-nucleus ratio (CMR) scan range should be set to cover at least all possible gaseous components. The ionization mode and ionization energy settings of the mass spectrometer must be capable of ionizing all components.

[0048] (2) According to the equivalent feature spectrum method, the mass spectrometry feature parameters of the gas with known components in the target analysis gas are used to analyze the three-dimensional mass spectrum obtained in step (1) to determine whether the unknown components exist.

[0049] Specifically, the basic principle of the equivalent feature map method is as follows:

[0050] In a mass spectrometer, each component of the detected gas can be ionized and produce its own characteristic peak. If the detected gas has i components, at any given time, all characteristic peaks and their fragment peaks superimpose to form the mass spectrum H of the detected gas. j .

[0051] Mass spectrum H j It can be expressed by the following formula:

[0052]

[0053] In the above formula, the characteristic matrix B ij The characteristic spectrum β of gas i at mass-to-nucleus ratio j ij Composition, A i,r It is a diagonal matrix, consisting of the relative sensitivity α of gas i to reference gas r. i,r Composition, P i Let be the partial pressure of gas i.

[0054] By inverse transformation of the above formula, the partial pressure P can be obtained. i The derivation is as follows:

[0055]

[0056] The mass spectrometry characteristic parameters of the gas, including the characteristic spectrum and relative sensitivity, are determined by methods already available in the art.

[0057] The characteristic spectrum β of the gas ij Determined by the following formula:

[0058]

[0059] Among them, I i + The characteristic ion current intensity of the gas.

[0060] The relative sensitivity α of gases i,r Determined by the following formula:

[0061]

[0062] in, denoted as the volumetric flow rate of the gas.

[0063] For the mass spectrometry testing process and determination method of mass spectrometry characteristic parameters of gases, please refer to CN114018370A.

[0064] (2.1) The three-dimensional mass spectrometry spectrum is analyzed. The specific process is as follows:

[0065] In the gas being detected, besides the reference gas r, there are k components, i.e., i=k+1. If among the k components, m components are known and n components are unknown, i.e., k=m+n.

[0066] In the acquired three-dimensional mass spectrum of the detected gas, the mass spectrum H at any given time point... j According to the formula (2), the characteristic spectrum and relative sensitivity of the known component gas, including the reference gas r, are introduced to solve the problem.

[0067] The partial pressures p of the m gases with known components at that moment are obtained by using the least squares method. m and the partial pressure p of the reference gas r Summing the partial pressures of the m gases of a known composition yields the partial pressure Σp of the known composition. m .

[0068] The mass spectra at each time point were analyzed to obtain the partial pressure time series P of the reference gas. r and the partial pressure time series ΣP of the known components m .

[0069] (2.2) Perform time correlation analysis on the partial pressure of the reference gas and the partial pressure of the known components, and calculate P. r With ΣP m The correlation coefficient R.

[0070] The formula for calculating the correlation coefficient R is as follows:

[0071]

[0072] If R ≥ 0.9, the two are considered correlated; if R < 0.9, they are considered uncorrelated.

[0073] (2.3) According to P r With ΣP m The correlation is used to determine whether the unknown component exists.

[0074] When judging P rWith ΣP m Related, perform total pressure balance analysis by mass spectrometry; when determining P r With ΣP m If they are unrelated, then the unknown component is determined to exist.

[0075] Specifically, the principle of total pressure equilibrium analysis by mass spectrometry is as follows:

[0076] In mass spectrometry detection, the total gas pressure p inside the mass spectrometer is... t Maintain stability.

[0077] In the initial moment, when only reference gas is present, the total gas pressure is only the pressure p of the reference gas. r (0), that is, p t =p r (0), which can be obtained from the vacuum level detection data inside the mass spectrometer.

[0078] At any given moment, when the target analytical gas is present in the detection gas, the partial pressure of the reference gas decreases, and the partial pressure of the reference gas at that moment is p. r (t), then the pressure drop of the reference gas is calculated as follows:

[0079]

[0080] In the target analytical gas, the partial pressures of the known components are Σp. m (t), the partial pressure of the unknown component is Σp n (t), then the pressure drop of the reference gas can be converted into:

[0081]

[0082] Partial pressure time series P of reference gas r and the partial pressure time series ΣP of known components m In the middle, for any given moment, the pressure drop Δp of the extracted reference gas r And the partial pressure Σp of the known components m .

[0083] When the pressure drop of the reference gas Δp r The partial pressure Σp of the known components m When the difference approaches 0, according to Δp r With Σp m If the difference is less than half of the minimum partial pressure of the known components, the mass spectrometer gas is in total pressure equilibrium, indicating that there are no unknown components in the target analytical gas; otherwise, it indicates that there are unknown components in the target analytical gas.

[0084] (3) When it is determined that there are no unknown components in the target gas, calculate the physical parameters of the known component gas; when it is determined that there are unknown components in the target gas, extract the three-dimensional mass spectrometry spectrum of the unknown component from the three-dimensional mass spectrometry spectrum obtained in step (1) and determine the type and mass spectrometry characteristic parameters of the unknown component gas.

[0085] (3.1) When it is determined that there are no unknown components.

[0086] Based on the equivalent characteristic spectrum method, the flow rate of the gas containing the known components and the concentration in the target analytical gas can be calculated from the partial pressure of the known components and the volumetric flow rate of the reference gas.

[0087] (3.2) When it is determined that there are unknown components.

[0088] (3.2.1) Extract the three-dimensional mass spectra of the unknown components.

[0089] For any given moment, the mass spectrum H of the known components, including the reference gas, is reconstructed from the partial pressures, characteristic spectra, and relative sensitivities of each gas in the known components according to equation (1). m+1 Subtracting the reconstructed mass spectrum from the mass spectrum of the detected gas yields the mass spectrum H of the unknown component. n H n =H j -H m+1 .

[0090] The mass spectra at each time point are reconstructed, and the mass spectra of unknown components are extracted to form a three-dimensional mass spectra of unknown components with a time dimension.

[0091] (3.2.2) Determine the types of gases of the unknown components.

[0092] From the obtained three-dimensional mass spectra of the unknown components, the time series signal intensity x of each mass nucleus ratio j is extracted. j .

[0093] For any two mass-to-nucleus ratios p and q, the signal intensity time series x p,t x q,t Calculate the cocorrelation coefficient R p,q .

[0094] Cocorrelation coefficient R p,q The calculation formula is:

[0095]

[0096] If the mass-to-nucleus ratios of the two groups are different, p≠q, then it is a cocorrelation analysis; if they are the same, then p=q, degenerating into an autocorrelation analysis.

[0097] For each pair of signal intensities with mass ratio j, the cocorrelation coefficient is calculated, yielding a symmetric matrix R with rows and columns j. Since the symmetric matrix R is symmetric and has a diagonal of 1, a set of cocorrelation analysis data from either the upper or lower triangular matrix can be selected as the interpretation object.

[0098] The mass-to-nucleus ratio (MMR) corresponding to the peak with the highest signal intensity is selected as the MMR of the main peak of the unknown component gas. The MMR corresponding to the signal intensity with the highest cocorrelation coefficient with the main peak is selected as the MMR of the fragmented peak. Based on the MMR of the main peak and the fragmented peak, and considering the gas molecular weight and possible ionized structures, the gas species of the unknown component is determined. If the gas species of the unknown component cannot be determined in this instance, the MMR of the fragmented peak is screened again based on the cocorrelation coefficient to further determine the gas species of the unknown component.

[0099] (3.2.3) Determine the characteristic spectrum of the gas with unknown components.

[0100] The signal intensity corresponding to the mass-to-nucleus ratio of the main peak of the gas with unknown components is used as the denominator for normalization. The signal intensity of the broken peak is then normalized to form the characteristic spectrum of the gas with unknown components.

[0101] (3.2.4) Determine the relative sensitivity of the gas with unknown components.

[0102] The initial relative sensitivity of the unknown component gas is set to 1. In the obtained three-dimensional mass spectrum of the unknown component, for any given time, according to equation (2), the initial relative sensitivity and characteristic spectrum of the unknown component gas are introduced to solve for the partial pressure p of the unknown component gas. n .

[0103] The partial pressure p of the unknown component gas n The partial pressure Σp of the known components m Pressure drop Δp of the reference gas r To perform total pressure equilibrium analysis by mass spectrometry, adjust the relative sensitivity setting of the unknown component gas until total pressure equilibrium is reached, i.e., the pressure drop Δp of the reference gas. r The partial pressure Σp of the known components m Partial pressure p of unknown component gas n The difference approaches 0, according to Δp r With Σp m If the difference is less than half of the minimum partial pressure of the known component, then the set relative sensitivity is the relative sensitivity of the unknown component gas.

[0104] Example 2

[0105] This embodiment provides an intelligent identification method for all gas phase components based on mass spectrometry. Using the method of Example 1, a specific analysis process is provided to illustrate the method of the present invention.

[0106] In this embodiment, the test object is the reaction of an unknown compound in a CO2 atmosphere to determine the types of gaseous components released during the reaction process. Argon is used as the reference gas, and the composition of the target analytical gas includes: known component gases CO2 and CO, and unknown component gases.

[0107] (1) The target analytical gas and the reference gas are combined to form a detection gas and subjected to mass spectrometry to obtain a three-dimensional mass spectrum of the detection gas. The mass-to-nucleus ratio is scanned in the range of 2 to 64, the ionization mode is EI mode, and the ionization energy is 70 eV.

[0108] The obtained three-dimensional mass spectrometry image is as follows Figure 3 As shown.

[0109] (2) Using the equivalent characteristic spectrum method, the mass spectrometry characteristic parameters of the gas with known components in the target analytical gas are used to analyze the three-dimensional mass spectrometry spectrum obtained in step (1). The original three-dimensional mass spectrometry spectrum is used to separate the three-dimensional spectra of the reference gas, CO2, and CO, as follows: Figure 4 As shown, it can be determined that an unknown component exists.

[0110] (3) Extract the three-dimensional mass spectra of the unknown components and determine the gas type and mass spectrometry characteristic parameters of the unknown components.

[0111] like Figure 4 As shown, the top layer is a three-dimensional map of the separated unknown component gas.

[0112] Based on the three-dimensional spectrum of the unknown component gas, the mass-to-nucleus ratio of the main peak is determined to be 64, and the mass-to-nucleus ratios of the broken peaks are 48, 32, and 16, thus identifying the unknown component gas as SO2.

[0113] Based on the three-dimensional spectrum of the unknown component gas, determine its characteristic spectrum and relative sensitivity, such as... Figure 5 As shown.

[0114] The above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A method for intelligent identification of all gas-phase components based on mass spectrometry detection, characterized in that, The intelligent identification method for all components in the gas phase includes the following steps: (1) Mass spectrometry is performed on the detection gas formed by the target analytical gas and the reference gas to obtain a three-dimensional mass spectrometry spectrum; (2) According to the equivalent feature spectrum method, the mass spectrometry feature parameters of the known component gas in the target analytical gas are used to analyze the three-dimensional mass spectrum obtained in step (1) to determine whether the unknown component exists; (3) When there are no unknown components in the target gas, calculate the physical parameters of the gas with known components; When there are unknown components in the target gas, extract the three-dimensional mass spectrometry spectrum of the unknown components from the three-dimensional mass spectrometry spectrum obtained in step (1) to determine the type of unknown component gas and its mass spectrometry characteristic parameters.

2. The intelligent identification method for all gas phase components according to claim 1, characterized in that, The parsing process described in step (2) includes: By introducing mass spectrometry characteristic parameters of known component gases, the three-dimensional mass spectra are solved to obtain the partial pressure time series of the reference gas and known components; Time correlation analysis was performed on the partial pressures of the reference gas and known components.

3. The intelligent identification method for all gas phase components according to claim 2, characterized in that, The formula for solving this problem is: Among them, P i Let B be the partial pressure of gas i; characteristic matrix B ij The characteristic spectrum β of gas i at mass-to-nucleus ratio j ij Composition; A i,r It is a diagonal matrix, consisting of the relative sensitivity α of gas i to reference gas r. i,r constitute.

4. The intelligent identification method for all gas phase components according to claim 2, characterized in that, The process of determining whether the unknown component exists includes: When the partial pressures of the reference gas and the known components are correlated, a mass spectrometry total pressure balance analysis is performed on the partial pressures of the reference gas and the known components. If the partial pressures of the reference gas and the known components satisfy the mass spectrometry total pressure equilibrium, it is determined that there is no unknown component; if the partial pressures of the reference gas and the known components do not satisfy the mass spectrometry total pressure equilibrium, it is determined that the unknown component exists. If the partial pressures of the reference gas and the known components are not correlated, then the unknown components are determined to exist.

5. The intelligent identification method for all gas phase components according to claim 4, characterized in that, The total pressure equilibrium analysis by mass spectrometry includes: Total gas pressure p inside the mass spectrometer t To maintain stability, if the difference between the partial pressure of the reference gas and the pressure drop of the total gas pressure inside the mass spectrometer and the partial pressure of the known components is less than half of the minimum partial pressure of the known components, it is determined that the total pressure balance of the mass spectrometer is satisfied; otherwise, it is determined that the total pressure balance of the mass spectrometer is not satisfied.

6. The intelligent identification method for all gas phase components according to any one of claims 1-5, characterized in that, Step (3) involves extracting the three-dimensional mass spectrometry spectrum of the unknown component, which includes: Using the partial pressures and mass spectrometry characteristic parameters of the known components, a three-dimensional mass spectrum including the reference gas and the known components is reconstructed according to the equivalent characteristic spectrum method. The three-dimensional mass spectrum of the detected gas is separated from the reconstructed three-dimensional mass spectrum to obtain the three-dimensional mass spectrum of the unknown components.

7. The intelligent identification method for all gas phase components according to any one of claims 1-6, characterized in that, The methods for determining the types of the unknown component gases include: Extract the signal intensity of all mass-to-nucleus ratios from the three-dimensional mass spectra of unknown components; The mass-to-nucleus ratio corresponding to the highest signal intensity was selected as the main peak mass-to-nucleus ratio of the unknown component gas. For any two mass-to-nucleus ratios, calculate the cocorrelation coefficient of the signal intensity. The mass-to-nucleus ratio with the highest cocorrelation coefficient with the main peak is taken as the mass-to-nucleus ratio of the broken peak. The gas type is determined by the mass-to-nucleus ratio of the main peak and the broken peak based on the molecular weight and ionization structure.

8. The intelligent identification method for all gas phase components according to any one of claims 1-7, characterized in that, The mass spectrometry characteristic parameters for determining the unknown component gas include: determining the characteristic spectrum of the unknown component gas and determining the relative sensitivity of the unknown component gas.

9. The intelligent identification method for all gas phase components according to claim 8, characterized in that, The method for determining the characteristic spectrum of the unknown component gas includes: Using the main peak signal intensity of the unknown component gas as the denominator, the signal intensity of the broken peaks is normalized to obtain the characteristic spectrum of the unknown component gas.

10. The intelligent identification method for all gas phase components according to claim 9, characterized in that, The method for determining the relative sensitivity of the unknown component gas includes: Set the initial relative sensitivity of the unknown component gas, use the characteristic spectrum of the unknown component gas, and solve the partial pressure of the unknown component from the three-dimensional mass spectrometry spectrum of the unknown component; when the partial pressure of the unknown component, the partial pressure of the known component, and the pressure drop of the reference gas satisfy the mass spectrometry total pressure balance, the initial relative sensitivity is set as the relative sensitivity of the unknown component gas.

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