A wide-width floating CVD method single-wall carbon nanotube film preparation device

Abstract

This invention relates to the field of carbon nanomaterial production equipment, and more particularly to a wide-width floating CVD method for preparing single-walled carbon nanotube thin films. The apparatus includes a reaction furnace, a square furnace tube, and an air inlet assembly. An electromagnetic induction coil is installed inside the reaction furnace. The square furnace tube expands the reaction area, improving the growth efficiency and yield of single-walled carbon nanotubes. Multiple sets of air inlet assemblies are used for multi-point uniform air intake, preventing significant flow deviation and dead zones within the square furnace tube. This stable airflow field ensures uniform fluid support for the floating catalyst particles, improving the spatial distribution uniformity of the catalyst within the square furnace tube and increasing catalyst utilization. The electromagnetic induction coil directly and precisely induction heats the graphite square furnace tube, better activating the catalyst and facilitating large-scale continuous production of single-walled carbon nanotubes. Furthermore, it improves heating uniformity and enhances the uniformity of single-walled carbon nanotube quality.

Description

Technical Field

[0001] This invention relates to the field of carbon nanomaterial production equipment, and more particularly to a wide-width floating CVD method for preparing single-walled carbon nanotube thin films. Background Technology

[0002] Single-walled carbon nanotubes (SUVs) are composed entirely of carbon atoms, and their geometry can be considered as a single layer of graphene rolled up. This structure determines the excellent electronic, mechanical, and other properties of SUVs. Methods for preparing SUVs mainly include chemical vapor deposition (CVD), arc discharge, and laser ablation. Among these, CVD has attracted much attention due to its simple process and good controllability. The core principle of preparing SUVs using CVD combined with a floating catalyst method is that, within a high-temperature reaction chamber, carbon-containing gaseous precursors (such as methane and carbon monoxide) decompose on the surface of nanoscale catalyst particles (such as iron and cobalt) suspended in the gas phase, dissolving and precipitating carbon atoms, thereby guiding the nucleation and directional growth of carbon nanotubes. The specific steps mainly include: First, the catalyst precursor (such as volatile organometallic compounds such as ferrocene) is introduced together with the carbon source gas and the carrier gas (such as hydrogen or argon) into a quartz reaction tube that has been heated to a high temperature (usually 800-1200°C). At high temperature, the catalyst precursor decomposes rapidly to form uniformly suspended nano-metal droplets. Subsequently, the carbon source gas undergoes catalytic cracking on the surface of these catalyst particles. After the dissolved carbon reaches supersaturation, it precipitates in the form of a graphene network and gradually "tops out" or "bottoms grow" to form single-walled carbon nanotubes.

[0003] However, current quartz reaction tubes are relatively narrow, limiting the production of only small quantities of single-walled carbon nanotubes and reducing efficiency. Furthermore, the use of a single inlet pipe (single-sided, single-point inlet) causes the mixed gas to disperse in a fan-shaped pattern after entering the furnace tube, leading to significant flow deviation and dead zones within the tube. This results in severely uneven airflow distribution, with excessively high velocity near the inlet pipe and extremely low or even stagnant velocity on the side furthest from it. This unstable airflow prevents the suspended catalyst particles from receiving uniform fluid support, causing some catalyst to be carried out of the reaction zone by the rapid airflow (due to insufficient effective reaction time), while others settle and agglomerate in the dead zones. The increased catalyst particle size and poor dispersibility not only reduce catalyst utilization and production efficiency, but also cause uneven growth of single-walled carbon nanotubes due to particle agglomeration, seriously affecting the consistency of product performance. Moreover, existing technologies generally use resistance wire thermal radiation to indirectly heat the furnace tube, which has low heating efficiency, high energy consumption, slow temperature rise, huge thermal inertia, and lag in temperature rise and fall, making it difficult to achieve rapid temperature rise and precise control. It is impossible to directly and more effectively heat the furnace tube, making it difficult to achieve large-scale continuous production of single-walled carbon nanotubes. Furthermore, there is a significant radial temperature gradient, resulting in uneven heating and reducing the uniformity of single-walled carbon nanotubes. Summary of the Invention

[0004] In order to overcome the shortcomings of the prior art, the present invention aims to provide a three-tube floating CVD device for preparing single-walled carbon nanotubes, which improves the spatial distribution uniformity of the catalyst, improves the heating uniformity, improves the uniformity of single-walled carbon nanotubes, and enables large-scale continuous production of single-walled carbon nanotubes, thereby improving production efficiency.

[0005] The technical solution adopted in this invention is as follows: A wide-width floating CVD method for preparing single-walled carbon nanotube thin films includes a reaction furnace box and a square furnace tube. The gas inlet end of the square furnace tube is connected to a flange, and the side of the flange away from the square furnace tube is connected to a gas inlet assembly. A catalyst feed pipe is connected to the top of the flange. Several sets of catalyst feed pipes are evenly arranged in the horizontal direction. Several sets of gas inlet assemblies are evenly arranged. An electromagnetic induction coil is installed inside the reaction furnace box and surrounds the outside of the square furnace tube. A winding frame is installed on one side of the gas outlet end of the square furnace tube. One end of the winding frame is connected to a first servo motor for driving it to rotate at a uniform speed.

[0006] Preferably, several electromagnetic induction coils are evenly arranged along the gas inlet and outlet directions of the square furnace tube.

[0007] Preferably, each electromagnetic induction coil is wound from a hollow copper tube, with one end of the hollow copper tube connected to an inlet pipe and the other end connected to an outlet pipe.

[0008] Preferably, the air intake assembly includes an air intake pipe, a first nut, a ferrule, and a connector. The connector is fixed to the square furnace tube. The first nut and the ferrule are both fitted onto the outside of the air intake pipe. The first nut and the connector are connected by threads. One end of the connector has a first conical surface on its inner side, and one end of the ferrule has a second conical surface on its outer side. The first conical surface and the second conical surface abut against each other. The first nut is connected to an annular push block, which is located on the side of the ferrule away from the connector. The air intake pipe extends into the square furnace tube after passing through the connector.

[0009] Preferably, the intake assembly also includes a retaining ring, one end of which abuts against the annular pusher, and the other end of which has a third conical surface on its outer side, and the other end of the retaining ring has a fourth conical surface on its inner side, with the third conical surface abutting against the fourth conical surface.

[0010] Preferably, the air inlet pipe is a steel pipe, with a flexible hose connected to the end of the steel pipe away from the square furnace tube.

[0011] Preferably, the winding frame includes a rotating shaft and winding rollers arranged parallel to the rotating shaft. Several winding rollers are arranged in a circular array with the rotating shaft as the center line, and the middle part of the winding rollers is connected to the rotating shaft through a connecting rod. The output end of the first servo motor is connected to one end of the rotating shaft.

[0012] Preferably, the device also includes a feeding mechanism, which comprises a second servo motor, a screw, a nut block, a slide rail, a slider, a translation plate, a fixed frame, and a feeding push plate for pushing the film roll wound on the winding frame along the axis of rotation. The feeding push plate is mounted on the translation plate, the slide rail and the second servo motor are both mounted on the fixed frame, the screw is rotatably connected to the fixed frame, the output end of the second servo motor is connected to the screw, the screw and the nut block are connected by threads, the nut block is connected to the translation plate, the translation plate is connected to the slider, and the slider is slidably connected to the slide rail.

[0013] Preferably, a material collection box is provided below the winding frame.

[0014] Preferably, an observation window is provided on one side of the winding rack, and the observation window is installed on the reactor box.

[0015] The beneficial effects of this invention are as follows: This three-tube floating CVD apparatus for preparing single-walled carbon nanotubes expands the reaction area by setting up a square furnace tube, thereby improving the growth efficiency and yield of single-walled carbon nanotubes. Multiple sets of gas inlet components ensure uniform gas intake at multiple points, preventing significant flow deviation and dead zones within the square furnace tube. This stable airflow field provides uniform fluid support for the floating catalyst particles, improving the spatial distribution uniformity of the catalyst within the square furnace tube and increasing catalyst utilization. Rapid and precise induction heating of the graphite square furnace tube via an electromagnetic induction coil better activates the catalyst, facilitating large-scale continuous production of single-walled carbon nanotubes and improving heating uniformity, thus enhancing the consistency of single-walled carbon nanotube quality. Attached Figure Description

[0016] Figure 1 This is a first three-dimensional schematic diagram of a wide-width floating CVD method for preparing single-walled carbon nanotube thin films.

[0017] Figure 2 This is a schematic diagram of the internal structure of a wide-width floating CVD method device for preparing single-walled carbon nanotube thin films.

[0018] Figure 3 for Figure 2 Enlarged diagram of point A in the middle.

[0019] Figure 4 This is a three-dimensional schematic diagram of an electromagnetic induction coil.

[0020] Figure 5 This is a cross-sectional view of the apparatus for preparing single-walled carbon nanotube thin films using the wide-area floating CVD method.

[0021] Figure 6 This is a cross-sectional view of the intake assembly.

[0022] Figure 7 This is an exploded view of the intake assembly.

[0023] Figure 8 This is a first structural front view of a wide-span floating CVD method device for preparing single-walled carbon nanotube thin films.

[0024] Figure 9 This is a second structural front view of a wide-span floating CVD single-walled carbon nanotube thin film preparation device.

[0025] In the diagram: 1. Reactor box; 2. Square furnace tube; 3. Gas inlet assembly; 301. Gas inlet pipe; 302. First nut; 303. Compression fitting; 304. Connector; 305. First conical surface; 306. Second conical surface; 307. Annular push block; 308. Snap ring; 309. Third conical surface; 310. Fourth conical surface; 311. Hose; 4. Electromagnetic induction coil; 5. Winding rack; 501. Rotating shaft; 502. Winding roller; 503. Connecting rod; 6. Water inlet pipe; 7. Water outlet pipe; 8. Feeding mechanism; 801. Second servo motor; 802. Screw; 803. Nut block; 804. Slide rail; 805. Slider; 806. Translation plate; 807. Fixing frame; 808. Feeding push plate; 9. Collection box; 10. Observation window; 11. Flange; 12. Catalyst feed pipe. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Please see Figures 1-7 The present invention provides a technical solution: a wide-width floating CVD method for preparing single-walled carbon nanotube thin films, including a reaction furnace box 1 and a square furnace tube 2. The gas inlet end of the square furnace tube 2 is connected to a flange 11. The side of the flange 11 away from the square furnace tube 2 is connected to a gas inlet assembly 3, and the top of the flange is connected to a catalyst feed pipe 12. Several groups of catalyst feed pipes 12 are evenly arranged in the horizontal direction. Several groups of gas inlet assemblies 3 are evenly arranged. An electromagnetic induction coil 4 is provided inside the reaction furnace box 1. The electromagnetic induction coil 4 surrounds the outside of the square furnace tube 2. A winding frame 5 is provided on one side of the gas outlet end of the square furnace tube 2. One end of the winding frame 5 is connected to a first servo motor for driving it to rotate at a uniform speed. Catalyst precursors (such as ferrocene vapor) are uniformly injected through multiple catalyst feed pipes 12, while a mixture of carbon source gas (such as methane, ethylene, etc.) and carrier gas (such as hydrogen, argon) is injected through multiple gas inlet components 3. This allows for separate delivery of catalyst precursors and reactant gases, independent control of flow rate and ratio, and rapid mixing after entering the square furnace tube 2. This avoids premature reaction or blockage that may occur during premixing and ensures instantaneous and uniform mixing of the two in the reaction zone. It facilitates the zoned feeding, precise control and uniform mixing of catalyst precursors and reactant gases, thereby precisely controlling the nucleation timing and spatial distribution of catalyst particles, and further improving the controllability of single-walled carbon nanotube growth and the uniformity of the film. By setting up a square furnace tube 2, the reaction area is expanded, improving the growth efficiency and yield of single-walled carbon nanotubes. Several sets of air intake components 3 are used for multi-point uniform air intake, preventing the formation of obvious flow deviation and dead zones in the gas within the square furnace tube 2. In turn, the stable airflow field allows the suspended catalyst particles to obtain uniform fluid support, which can improve the spatial distribution uniformity of the catalyst within the square furnace tube 2 and increase the utilization rate of the catalyst. The graphite square furnace tube 2 is directly and rapidly inductively heated by an electromagnetic induction coil 4, which can better activate the catalyst activity, facilitate the large-scale continuous production of single-walled carbon nanotubes, and improve the heating uniformity and the uniformity of the quality of single-walled carbon nanotubes.

[0028] To facilitate precise segmented temperature control of the reaction zone along the airflow direction, in this embodiment, preferably, several electromagnetic induction coils 4 are evenly arranged along the air inlet and outlet directions of the square furnace tube 2. The purpose is to form multiple independent heating temperature zones along the length of the square furnace tube 2 through multiple independently controlled electromagnetic induction coils 4, each corresponding to the optimal temperature required for different reaction stages such as catalyst decomposition, carbon nanotube growth, and growth termination, thereby achieving precise gradient control of the process temperature and optimizing the growth conditions and structural quality of single-walled carbon nanotubes.

[0029] To ensure effective cooling of the electromagnetic induction coil 4 when a strong alternating magnetic field is generated by a high-frequency current, preventing overheating damage and maintaining stable heating performance, in this embodiment, preferably, each electromagnetic induction coil 4 is wound with a hollow copper tube. One end of the hollow copper tube is connected to a water inlet pipe 6, and the other end is connected to a water outlet pipe 7. The water inlet pipe 6 and the water outlet pipe 7 are respectively connected to an external cooling water tank through pipes. The purpose is to introduce cooling water into the hollow copper tube through the water inlet pipe 6 and discharge it through the water outlet pipe 7. The discharged cooling water flows to the cooling water tank for heat exchange and cooling. The cooled cooling water re-enters the hollow copper tube through the water inlet pipe 6, and then continuously circulates within the hollow copper tube to remove the Joule heat generated by the resistance of the electromagnetic induction coil 4 during operation, ensuring that the temperature of the electromagnetic induction coil 4 remains stable within a safe range, and ensuring that the induction heating system can operate stably and efficiently for a long time.

[0030] To facilitate installation and adjustment of the insertion depth of the air inlet pipe 301 and ensure good sealing performance, in this embodiment, preferably, the air inlet assembly 3 includes an air inlet pipe 301, a first nut 302, a retainer 303, and a connector 304. The connector 304 is fixed to the square furnace tube 2. The first nut 302 and the retainer 303 are both sleeved on the outside of the air inlet pipe 301. The first nut 302 and the connector 304 are connected by threads. One end of the connector 304 has a first conical surface 305 on its inner side, and one end of the retainer 303 has a second conical surface 306 on its outer side. The first conical surface 305 abuts against the second conical surface 306. The first nut 302 is connected to an annular pusher 307, which is located on the side of the retainer 303 away from the connector 304. The air inlet pipe 301 extends into the square furnace tube 2 after passing through the connector 304. The exhaust end of the air inlet pipe 301 can be adjusted to the depth of its insertion into the square furnace tube 2 according to process requirements, so as to achieve gas flow within the square furnace tube 2. The precise injection at different axial positions aims to enable quick installation and disassembly of the intake pipe 301 via threaded connection. The length of the intake pipe 301 extending into the square furnace tube 2 can be adjusted to accommodate different process requirements for gas injection position. The specific installation steps are as follows: After the exhaust end of the intake pipe 301 is positioned, the intake pipe 301 is locked by tightening the first nut 302. During the tightening process, the first nut 302 drives the connected annular push block 307 to move, thereby pressing the ferrule 303 against one side of the connector 304. Under axial pressure, the second conical surface 306 of the ferrule 303 slides along the first conical surface 305 of the connector 304 and undergoes compression deformation, forcing the end of the ferrule 303 near the connector 304 to radially contract, thus gripping the outer wall of the intake pipe 301 and causing deformation of the intake pipe 301, achieving the first layer of locking and sealing to prevent gas leakage.

[0031] To enhance the sealing of the intake pipe 301, in this embodiment, preferably, the intake assembly 3 further includes a retaining ring 308. One end of the retaining ring 308 abuts against the annular push block 307, and the other end of the retaining ring 308 has a third conical surface 309 on its outer side. The other end of the retaining sleeve 303 has a fourth conical surface 310 on its inner side. The third conical surface 309 abuts against the fourth conical surface 310. The purpose is to push the annular push block 307 to squeeze the retaining ring 308 by tightening the first nut 302, so that the third conical surface 309 of the retaining ring 308 and the fourth conical surface 310 of the retaining sleeve 303 fit tightly together. This causes the end of the retaining ring 308 near the retaining sleeve 303 to radially contract, gripping the intake pipe 301 and forming a double locking seal with the retaining sleeve 303 to prevent gas leakage.

[0032] To facilitate connection to an external gas source, in this embodiment, preferably, the gas inlet pipe 301 is a steel pipe, and a flexible hose 311 is connected to the end of the steel pipe away from the square furnace tube 2, so that the gas source can be connected through the flexible hose 311.

[0033] To facilitate continuous and automated winding of single-walled carbon nanotube films and to expedite subsequent material cutting and roll-to-roll production, in this embodiment, preferably, the winding frame 5 includes a rotating shaft 501 and winding rollers 502 arranged parallel to the rotating shaft 501. Several winding rollers 502 are arranged in a circular array around the rotating shaft 501, with their central portions connected to the rotating shaft 501 via connecting rods 503. The output end of a first servo motor is connected to one end of the rotating shaft 501, the purpose of which is to drive the rotating shaft 501 to rotate at a uniform speed via the first servo motor, thereby causing the multiple winding rollers 502 to rotate synchronously. The take-up rollers 502 together form a rigid outer frame for carrying the film. The single-walled carbon nanotube film generated at the outlet of the square furnace tube 2 can be guided and continuously wound on the entire outer frame surface composed of these take-up rollers 502. As the rotating shaft 501 rotates, the film is evenly wound up to form a continuous film roll. This design allows the film to spread on the wide outer frame, which is beneficial for the flat winding of the film. When the film wound on the outer frame reaches the predetermined thickness, the entire film roll can be unloaded by the subsequent unloading mechanism, thereby realizing large-scale continuous production.

[0034] To facilitate automatic and stable unloading of the film roll after winding, this embodiment preferably includes an unloading mechanism 8. The unloading mechanism 8 includes a second servo motor 801, a screw 802, a nut block 803, a slide rail 804, a slider 805, a translation plate 806, a fixed frame 807, and an unloading push plate 808 for pushing the film roll wound on the winding frame 5 along the axis of the rotating shaft 501. The unloading push plate 808 is mounted on the translation plate 806. The slide rail 804 and the second servo motor 801 are both mounted on the fixed frame 807. The screw 802 is rotatably connected to the fixed frame 807. The output end of the second servo motor 801 is connected to the screw 802. The screw 802 and the nut block 803 are connected by a thread. The mother block 803 is connected to the translation plate 806, the translation plate 806 is connected to the slider 805, and the slider 805 is slidably connected to the slide rail 804. The purpose is that when the film roll wound on the take-up frame 5 reaches the set thickness, the second servo motor 801 is started. The second servo motor 801 drives the screw 802 to rotate, which in turn drives the translation plate 806, the unloading push plate 808 and the slider 805 to move along the slide rail 804 through the nut block 803. This achieves precise and stable linear motion of the unloading push plate 808 along the axis of the rotating shaft 501, so that the unloading push plate 808 contacts the end face of the film roll and gently pushes the film roll away from the outer ring frame composed of the take-up roller 502. This allows the film roll to detach from the take-up frame 5 along the axis, realizing automatic unloading and facilitating subsequent roll-to-roll processing.

[0035] In order to facilitate the collection of the unloaded film rolls, in this embodiment, preferably, a collection box 9 is provided below the winding frame 5. The purpose of the collection box 9 is to receive the finished film rolls pushed down from the winding frame 5, so as to achieve orderly collection and facilitate subsequent transfer and processing.

[0036] In order to facilitate observation of the working status of the winding frame 5, the film winding situation and the feeding process, in this embodiment, preferably, an observation window 10 is provided on one side of the winding frame 5. The observation window 10 is installed on the reaction furnace box 1. The purpose is that the operator can directly monitor the winding process through the high-temperature resistant observation window 10, so as to detect abnormalities in time and make adjustments in a timely manner without having to frequently open and close the furnace box, thus ensuring the continuity and safety of the production process.

[0037] Please see Figure 8 In order to facilitate the uniform distribution of the reaction gas in multiple layers, in this embodiment, preferably, the air intake components 3 are arranged in a rectangular array of several.

[0038] Please see Figure 9 To facilitate the three-dimensional, multi-layered, and uniform distribution of the reaction gas and further optimize the uniformity of the airflow field in the inlet area of ​​the square furnace tube 2, in this embodiment, preferably, the air intake component 3 includes a first air intake component and a second air intake component disposed below the first air intake component. Both the first air intake component and the second air intake component are evenly arranged in several groups along the horizontal direction. The several first air intake components and the several second air intake components are staggered. The purpose is to construct a three-dimensional air intake pattern through the upper and lower layers, multiple groups of horizontally arranged and staggered air intake components 3, so that the reaction gas is injected into the square furnace tube from different heights and different horizontal positions, effectively breaking the laminar flow or deflection flow that may be formed by single-layer single-row air intake, promoting more thorough turbulent mixing of the gas before entering the reaction zone, thereby forming a more uniform and stable airflow distribution on the cross-section of the square furnace tube 2, further reducing the airflow dead zone, providing uniform and continuous fluid support force for the floating catalyst particles, and ensuring that the catalyst is uniformly suspended and distributed in the reaction space.

[0039] The working principle and usage process of this invention are as follows: A reaction gas mixture containing carbon source gas, carrier gas, and catalyst precursor is uniformly introduced into the inlet end of a square furnace tube 2 through multiple uniformly arranged inlet components 3. Catalyst precursors (such as ferrocene vapor) are uniformly injected through multiple catalyst feed pipes 12. When the electromagnetic induction coil 4 is energized, it generates a high-frequency alternating magnetic field, directly and rapidly induction heating the graphite square furnace tube 2. This causes the internal temperature of the graphite square furnace tube 2 to rise rapidly, thereby causing the metal catalyst particles to quickly reach the reaction temperature and decompose into nano-catalytic droplets. The carbon source gas undergoes catalytic cracking on the catalyst surface, dissolving and precipitating carbon atoms to grow and form single-walled carbon nanotubes. Under the action of a stable and uniform airflow field, the catalyst particles are well dispersed, and the single-walled carbon nanotubes grow uniformly within the wide square furnace tube 2. The generated single-walled carbon nanotubes form an aerogel state and are transported to the outlet end of the square furnace tube 2 with the airflow. When the airflow carrying the suspended single-walled carbon nanotubes exits from the square furnace tube 2 into the wide winding cavity, the temperature drops and the flow rate decreases sharply. This weakens the transport kinetic energy of the carbon nanotubes, causing congestion and aggregation near the gas outlet of the square furnace tube 2. A large number of suspended nanotubes interlock and self-assemble into a continuous network aerosol through van der Waals forces. Subsequently, a uniformly rotating winding frame applies a stable axial mechanical traction force to the network aerosol, continuously pulling it out. During this traction process, the single-walled carbon nanotube network is stretched and further entangled under the action of van der Waals forces, thus being compacted into a dense, continuous, self-supporting wide film. The film is guided onto the uniformly rotating take-up frame 5 and continuously wound around the overall outer frame composed of multiple take-up rollers 502. The film is continuously stacked and compacted to achieve uniform collection and winding of the film. When the film roll collected on the outer frame reaches the set thickness, the unloading mechanism 8 is activated to push the entire film roll axially along the rotating shaft 501 into the collection box 9. After the unloading mechanism 8 is reset, the take-up frame 5 can continue to wind new films on empty rollers, thereby realizing wide-width, efficient, continuous and automated production of single-wall carbon nanotube films.

[0040] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A wide-width floating CVD method for preparing single-walled carbon nanotube thin films, comprising a reaction chamber (1), characterized in that: It also includes a square furnace tube (2), the air inlet end of which is connected to a flange (11), the side of the flange (11) away from the square furnace tube (2) is connected to an air inlet assembly 3, and the top of the flange is connected to a catalyst feed pipe (12), the catalyst feed pipe (12) is evenly arranged in several groups along the horizontal direction, the air inlet assembly (3) is evenly arranged in several groups, the interior of the reactor box (1) is provided with an electromagnetic induction coil (4), the electromagnetic induction coil (4) surrounds the outside of the square furnace tube (2), the air outlet end of the square furnace tube (2) is provided with a winding frame (5), one end of the winding frame (5) is connected to a first servo motor for driving it to rotate at a uniform speed.

2. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 1, characterized in that: Several electromagnetic induction coils (4) are evenly arranged along the gas inlet and outlet directions of the square furnace tube (2).

3. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 2, characterized in that: Each of the electromagnetic induction coils (4) is wound from a hollow copper tube, with one end of the hollow copper tube connected to an inlet pipe (6) and the other end connected to an outlet pipe (7).

4. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 1, characterized in that: The air intake assembly (3) includes an air intake pipe (301), a first nut (302), a sleeve (303), and a connector (304). The connector (304) is fixed on the square furnace tube (2). The first nut (302) and the sleeve (303) are both sleeved on the outside of the air intake pipe (301). The first nut (302) and the connector (304) are connected by threads. One end of the connector (304) has a first conical surface (305) on its inner side. One end of the sleeve (303) has a second conical surface (306) on its outer side. The first conical surface (305) and the second conical surface (306) abut against each other. The first nut (302) is connected to an annular pusher (307). The annular pusher (307) is located on the side of the sleeve (303) away from the connector (304). The air intake pipe (301) extends into the square furnace tube (2) after passing through the connector (304).

5. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 4, characterized in that: The intake assembly (3) also includes a retaining ring (308), one end of which abuts against the annular push block (307), and the other end of which is provided with a third conical surface (309) on the outer side. The other end of the retaining sleeve (303) is provided with a fourth conical surface (310) on the inner side, and the third conical surface (309) abuts against the fourth conical surface (310).

6. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 4 or 5, characterized in that: The air inlet pipe (301) is a steel pipe, and a flexible hose (311) is connected to the end of the steel pipe away from the square furnace tube (2).

7. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 1, characterized in that: The winding frame (5) includes a rotating shaft (501) and winding rollers (502) arranged parallel to the rotating shaft (501). Several winding rollers (502) are arranged in a circular array with the rotating shaft (501) as the center line, and the middle part is connected to the rotating shaft (501) through a connecting rod (503). The output end of the first servo motor is connected to one end of the rotating shaft (501).

8. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 7, characterized in that: It also includes a feeding mechanism (8), which includes a second servo motor (801), a screw (802), a nut block (803), a slide rail (804), a slider (805), a translation plate (806), a fixing frame (807), and a feeding push plate (808) for pushing the film roll wound on the winding frame (5) along the axis of the rotating shaft (501). The feeding push plate (808) is mounted on the translation plate (806), and the slide rail (804) and the second servo motor (801) are also included. The servo motors (801) are all mounted on the fixed frame (807). The screw (802) is rotatably connected to the fixed frame (807). The output end of the second servo motor (801) is connected to the screw (802). The screw (802) is connected to the nut block (803) by a thread. The nut block (803) is connected to the translation plate (806). The translation plate (806) is connected to the slider (805). The slider (805) is slidably connected to the slide rail (804).

9. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 8, characterized in that: A collection box (9) is provided below the winding frame (5).

10. The apparatus for preparing wide-width floating CVD single-walled carbon nanotube thin films according to claim 1, characterized in that: The winding rack (5) has an observation window (10) on one side, and the observation window (10) is installed on the reactor box (1).

Images