Energy-saving spotlight heat dissipation lamp box for lithography mask substrate surface detection

Abstract

The application relates to the technical field of heat dissipation lamp boxes, and discloses an energy-saving spotlight heat dissipation lamp box for detecting the surface of a photoetching mask substrate, which comprises a support, the top of the side wall of the support is fixedly provided with a lamp box, the end of the side wall of the lamp box is fixedly provided with a connecting line, the end, away from the lamp box, of the connecting line is fixedly provided with a control box, the inner wall of the lamp box is fixedly provided with an inspection lamp, heat is generated, the impeller is started, suction is generated through rotation of the impeller, the air pushing plate is moved while the impeller rotates, the rotating plate cannot rotate due to resistance of the upper and lower sealing plates when the air pushing plate is pushed out, a pushing force is generated on the hot flow, the lamp box inner wall heat washing is alternately contacted, the hot flow is discharged under the pushing of the air pushing plate, the heat dissipation efficiency of the lamp box is improved, the light output is stable, and the detection accuracy is improved.

Description

Technical Field

[0001] This invention relates to the field of heat dissipation lamp box technology, specifically to an energy-saving spotlight heat dissipation lamp box for inspecting the surface of a photolithography mask substrate. Background Technology

[0002] The energy-saving spotlight heat dissipation light box for photolithography mask substrate surface inspection stems from the increasingly stringent requirements for high-precision mask inspection in semiconductor manufacturing. As integrated circuit manufacturing processes continue to shrink, the pattern precision on the mask has reached the nanometer level. Any tiny defect can lead to a significant drop in chip yield. Therefore, during the inspection process, the spotlight used for illumination must provide a stable, uniform, and high-intensity light source. However, if the large amount of heat generated cannot be effectively controlled, it will cause problems such as light source color drift, optical component deformation, and inspection errors. By introducing a forced air cooling system, optimizing the air duct structure, and adopting an adjustable light source layout, the heat dissipation performance is improved while reducing the overall power consumption. During long-term heat dissipation, the inner wall of the heat dissipation light box is subjected to the heat flow from the core heat source, which will cause progressive degradation of the material. This is mainly manifested as thermal fatigue accumulation, local overheating and microstructure degradation, which threatens the long-term reliability of the equipment. It also causes the inspection lamp spectral drift, light field distortion and thermal noise superposition caused by heat conduction, resulting in the collapse of the signal-to-noise ratio of low-light surface inspection, a surge in false defects and thermal damage to the material, ultimately causing the observation results to be completely distorted. Summary of the Invention

[0003] To solve the above-mentioned technical problems, the present invention provides an energy-saving spotlight heat dissipation light box for surface inspection of photolithographic mask substrates, including a bracket, a light box fixedly mounted on the top of the side wall of the bracket, a connecting wire fixedly mounted on the end of the side wall of the light box, a control box fixedly mounted on the end of the connecting wire away from the light box, and an inspection light fixedly mounted on the inner wall of the light box, and further including: The exhaust mechanism is rotatably installed on the inner wall of the light box; A heat conduction mechanism is slidably installed on the inner wall of the exhaust mechanism; The braking mechanism is fixedly installed on the inner wall of the light box.

[0004] Preferably, the exhaust system includes: Heat dissipation component, which is rotatably mounted on the inner wall of the light box; A rotating component is rotatably mounted on the outer wall of the heat dissipation component. In this process, while generating heat, the heat dissipation component is activated, which in turn drives the rotating component to move synchronously.

[0005] Preferably, the heat-conducting mechanism includes: A heat-absorbing component is slidably disposed on the inner wall of the heat dissipation component; Compression assembly, which is fixedly installed on the inner wall of heat dissipation assembly; When the rotating component rotates under force, pressure is applied to the compression component.

[0006] Preferably, the braking mechanism includes: The load-bearing component is fixedly installed on the inner wall of the light box; The scraping component is rotatably mounted on the inner wall of the light box; As the heat dissipation components move, the scraping components are forced to rotate due to the force applied.

[0007] Preferably, the heat dissipation component includes an impeller rotatably connected to the inner wall of the light box, a force rod fixedly connected to the bottom of the side wall of the impeller, a pusher plate slidably connected to the inner wall of the light box, and a groove provided on the inner wall of the pusher plate. In this process, while generating heat, the impeller is activated, which drives the pusher plate to move, causing the pusher plate to move back and forth on the inner wall of the light box.

[0008] Preferably, the rotating assembly includes a rotating plate rotatably connected to the bottom of the outer wall of the pusher plate, a sealing plate slidably connected to the left end of the inner wall of the pusher plate, and a protruding block fixedly connected to the side wall of the rotating plate. When the force bar initially rotates, it first pulls the pusher plate to move towards the side closer to the inspection light, causing the rotating plate to rotate under force. When the pusher plate is pushed outward, the rotating plate cannot rotate, thus generating a thrust on the heat flow.

[0009] Preferably, the heat absorption component includes ball bearings slidably connected to the bottom of the outer wall of the pusher plate, and a plurality of guide plates are provided on the bottom of the inner wall of the pusher plate. When the push plate moves, it drives several ball bearings to move synchronously. As the heat flows through, it passes through multiple guide plates and enters the interior of the push plate. When the push plate is quickly withdrawn, the heat inside the push plate is discharged.

[0010] Preferably, the compression assembly includes a spring sheet fixedly connected to the side wall of the sealing plate; When the sealing plate is struck by the rotating plate, pressure is applied to the spring sheet, which is made of nickel-based high-temperature alloy and has extremely high wear resistance, allowing it to work continuously at high temperatures.

[0011] Preferably, the force-bearing component includes a fixed frame fixedly connected to the inner wall of the light box, a fixed rod fixedly connected to the side wall of the fixed frame, an elastic plate rotatably connected to the outer wall of the fixed rod, and a plurality of telescopic rods fixedly connected to the end of the elastic plate away from the fixed rod. When the push plate moves towards the inspection light under force, it drives the telescopic rod to move synchronously. When the telescopic rod reaches its maximum limit, it exerts a pulling force on the elastic plate. The elastic plate is made of silicone and has the characteristics of high temperature resistance, strong chemical stability, softness and good resilience.

[0012] Preferably, a rotating ring is rotatably connected to the inner wall of the light box, and a scraper is fixedly connected to the side wall of the rotating ring. When the pusher plate is pushed outward, it causes the heat flow to flow out rapidly, applying a pushing force to the scraper blade, causing the scraper blade to rotate under the force. The scraper blade is made of silicone rubber, which has excellent flexibility and weather resistance, and is resistant to high temperature and aging. It also has natural hydrophobicity, which can effectively resist water vapor erosion.

[0013] The present invention has the following beneficial effects: (1) The present invention generates heat and starts the impeller at the same time. The impeller generates suction through rotation. While the impeller is rotating, it drives the pusher plate to move. When the pusher plate is pushed outward, the rotating plate is resisted by the upper and lower sealing plates and cannot rotate. It generates a push force on the heat flow. The above components realize the alternating contact of heat flushing the inner wall of the light box. At the same time, under the push of the pusher plate, the heat flow is accelerated, which can improve the heat dissipation efficiency of the light box, maintain stable light output, and improve detection accuracy.

[0014] (2) When the push plate moves, the present invention drives several ball bearings to move synchronously. When the push plate quickly pushes the heat flow, some of the heat flow will flow along the surface of the push plate and enter the gap between the push plate and the inner wall of the light box. At this time, when the heat flow passes through, it passes through multiple guide plates, so that the heat flow enters the interior of the push plate. When the sealing plate moves down, it opens the slot. When the push plate is quickly pulled back, the heat flow inside the push plate is discharged and flows out with the main heat flow. By guiding and discharging the heat flow through the above components, the interface temperature can be effectively reduced, thermal stress damage can be reduced, material degradation can be delayed, and the system operation stability and life can be improved.

[0015] (3) When the push plate moves towards the inspection light under force, it drives the telescopic rod to move synchronously. Under the continuous pull of the push plate, the telescopic rod is gradually stretched. When the telescopic rod reaches its maximum limit, the telescopic rod generates a pulling force on the elastic plate, forcing the elastic plate to rotate under force and generating pressure on the torsion spring on the surface of the fixed rod. During the gradual rotation of the elastic plate, the heat flow path gradually narrows. By gradually reducing the heat flow path cross-section through the above components under the condition of constant heat input, the fluid flow rate is increased, which can enhance the convective heat transfer efficiency, more efficiently remove heat from the pipe wall, indirectly achieve the cooling effect, and help suppress the excessive rise of pipe wall temperature.

[0016] (4) When the pusher plate is pushed outward, the hot flow is driven outward rapidly. At the same time, in combination with the characteristic that the hot flow itself will be driven outward by the wind, when the hot flow rushes outward, it contacts the inclined surface of the scraper and applies a pushing force to the scraper, causing the scraper to rotate under the force. When it rotates to a certain angle, it is pushed by the hot flow brought by the next pusher plate, which causes the scraper to rotate slowly under the impact of the hot flow. During the rotation process, the end of the scraper close to the inner wall of the light box, the inclined thin surface of the scraper is constantly in contact with the inner wall of the light box. The above components effectively scrape away the water mist formed on the inner wall of the light box, which can reduce the heat dissipation obstacles and equipment risks caused by condensation, and restore and maintain the high efficiency of heat dissipation performance. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic cross-sectional view of the overall structure of the present invention; Figure 3 This is a schematic cross-sectional view of the heat dissipation component of the present invention; Figure 4 This is a schematic diagram of some parts in the emission mechanism of the present invention; Figure 5 This is a schematic cross-sectional view of the rotating component of the present invention; Figure 6 This is a schematic cross-sectional view of the heat-absorbing component of the present invention; Figure 7 This is a schematic cross-sectional view of the compression component of the present invention; Figure 8 This is a schematic cross-sectional view of the force-bearing component of the present invention; Figure 9 This is a schematic cross-sectional view of the fixed frame of the present invention; Figure 10 This is a schematic diagram of some parts in the braking mechanism of the present invention; Figure 11 For the present invention Figure 10 Enlarged view of point A in the middle; Figure 12 This is a cross-sectional schematic diagram of the scraping component of the present invention.

[0019] The attached diagram lists the components represented by each number as follows: In the diagram: 1. Exhaust mechanism; 11. Heat dissipation component; 12. Rotating component; 13. Bracket; 14. Light box; 15. Connecting wire; 16. Control box; 17. Inspection light; 111. Impeller; 112. Force rod; 113. Pusher plate; 114. Slide groove; 121. Rotating plate; 122. Sealing plate; 123. Protrusion block; 2. Heat conduction mechanism; 21. Heat absorption component; 22. Compression component; 211. Ball bearing; 212. Guide plate; 221. Spring; 3. Braking mechanism; 31. Force-bearing component; 32. Scraping component; 311. Fixing frame; 312. Fixing rod; 313. Elastic plate; 314. Telescopic rod; 321. Rotating ring; 322. Scraper. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Example 1, please refer to Figures 1-2 This invention relates to an energy-saving spotlight heat dissipation light box for inspecting the surface of a photolithographic mask substrate, comprising a bracket 13, a light box 14 fixedly mounted on the top side wall of the bracket 13, a connecting wire 15 fixedly mounted on the end of the side wall of the light box 14, a control box 16 fixedly mounted on the end of the connecting wire 15 away from the light box 14, and an inspection light 17 fixedly mounted on the inner wall of the light box 14. It also includes: Ventilation mechanism 1 is rotatably mounted on the inner wall of light box 14; Heat conduction mechanism 2 is slidably disposed on the inner wall of exhaust mechanism 1; Braking mechanism 3 is fixedly installed on the inner wall of light box 14.

[0022] Exhaust system 1 includes: Heat dissipation component 11 is rotatably mounted on the inner wall of light box 14; Rotating component 12 is rotatably disposed on the outer wall of heat dissipation component 11; First, the staff adjusts the illumination height and angle of the light box 14 according to the testing requirements, and then fixes it on the bracket 13. Then, the control box 16 is connected to the power supply and turned on. The power indicator light is lit. Then, the knob on the outer wall of the control box 16 is rotated to continuously adjust the output illuminance. The output illuminance is connected to the light box 14 through the connecting wire 15. After the settings are completed, the inspection lamp 17 is turned on, and the inside of the light box 14 begins to preheat. While generating heat, the heat dissipation component 11 is activated, which drives the rotating component 12 to move synchronously.

[0023] The heat conduction mechanism 2 includes: Heat absorption component 21 is slidably disposed on the inner wall of heat dissipation component 11; Compression component 22 is fixedly disposed on the inner wall of heat dissipation component 11; As the heat dissipation component 11 moves, it causes the heat absorption component 21 to slide. When the rotating component 12 is subjected to force and rotates, it applies pressure to the compression component 22, forcing the compression component 22 to be compressed.

[0024] Braking mechanism 3 includes: Force-bearing component 31 is fixedly installed on the inner wall of the light box 14; Scraping component 32 is rotatably mounted on the inner wall of light box 14; During the movement of the heat dissipation component 11, a pulling force is generated on the force-receiving component 31, forcing the force-receiving component 31 to move. At the same time, during the rapid movement of the heat dissipation component 11, a thrust is generated to push the heat flow forward quickly, so that the heat flow comes into contact with the scraping component 32, causing the scraping component 32 to rotate under the force.

[0025] Example 2, please refer to Figures 3-12 The present invention is an energy-saving spotlight heat dissipation light box for surface inspection of photolithography mask substrate. Based on the first embodiment, the heat dissipation component 11 includes an impeller 111 rotatably connected to the inner wall of the light box 14, a force rod 112 fixedly connected to the bottom of the side wall of the impeller 111, and a pusher plate 113 slidably connected to the inner wall of the light box 14. A groove 114 is provided on the inner wall of the pusher plate 113. The process involves the staff first adjusting the illumination height and angle of the light box 14 according to the testing requirements, then fixing it on the bracket 13. Next, the control box 16 is connected to the power supply and turned on, illuminating the power indicator light. The staff then rotates the knob on the outer wall of the control box 16 to continuously adjust the output illuminance. The output illuminance is then connected to the light box 14 via the connecting cable 15. After setup, the inspection lamp 17 is activated, and the inside of the light box 14 begins to preheat. Simultaneously, the impeller 111 is activated, generating suction that quickly draws out the heat generated by the inspection lamp 17. As the impeller 111 rotates, it drives the force rod 112 to rotate synchronously. When the force rod 112 rotates, it contacts the groove on the inner wall of the pusher plate 113, applying external force to the groove and causing the pusher plate 113 to move back and forth within the light box 14.

[0026] The rotating assembly 12 includes a rotating plate 121 rotatably connected to the bottom of the outer wall of the push plate 113, a sealing plate 122 slidably connected to the left end of the inner wall of the push plate 113, and a protrusion 123 fixedly connected to the side wall of the rotating plate 121. When the force-applying rod 112 initially rotates, it first pulls the pusher plate 113 to move towards the side closer to the inspection light 17. The rotating plate 121 moves synchronously with the pusher plate 113. At this time, the rotating plate 121 is impacted by the heat flow during the movement, and under the rapid drive of the pusher plate 113, the rotating plate 121 is subjected to force and rotates. During the rotation, the protruding block on the side wall of the rotating plate 121 contacts the inclined surface of the sealing plate 122, generating downward pressure on the sealing plate 122. When the pusher plate 113 pushes outward, the rotating plate 121 is resisted by the upper and lower sealing plates 122 and cannot rotate, thus generating a thrust on the heat flow.

[0027] The heat absorption assembly 21 includes a ball bearing 211 that is slidably connected to the bottom of the outer wall of the pusher plate 113, and a plurality of guide plates 212 are provided on the bottom of the inner wall of the pusher plate 113. When the push plate 113 moves, it drives several ball bearings 211 to move synchronously, causing the ball bearings 211 to slide on the inner wall of the light box 14. When the push plate 113 quickly pushes the heat flow, some of the heat flow will flow along the surface of the push plate 113 and enter the gap between the push plate 113 and the inner wall of the light box 14. At this time, when the heat flow passes through, it passes through multiple guide plates 212. Under the layer-by-layer guidance of the guide plates 212, most of the heat flow enters the interior of the push plate 113. When the push plate 113 moves to the side of the inspection light 17, the sealing plate 122 moves due to the collision of the rotating plate 121. When the sealing plate 122 moves down, the slot is opened. When the push plate 113 is quickly pulled back, the heat flow inside the push plate 113 is discharged and flows out with the main heat flow.

[0028] Compression assembly 22 includes a spring piece 221 fixedly connected to the side wall of sealing plate 122; When the sealing plate 122 is impacted by the rotating plate 121 and moves downward, pressure is applied to the spring piece 221, forcing the spring piece 221 to be compressed and accumulate potential energy. The spring piece 221 is made of nickel-based high-temperature alloy.

[0029] The force-bearing component 31 includes a fixed frame 311 fixedly connected to the inner wall of the light box 14, a fixed rod 312 fixedly connected to the side wall of the fixed frame 311, an elastic plate 313 rotatably connected to the outer wall of the fixed rod 312, and a plurality of telescopic rods 314 fixedly connected to the end of the elastic plate 313 away from the fixed rod 312. When the push plate 113 is moved towards the side of the inspection light 17 under force, it drives the telescopic rod 314 to move synchronously. At this time, the telescopic rod 314 is in a semi-compressed state. During the pulling process, the telescopic rod 314 is gradually compressed to the limit state. Under the continuous pulling of the push plate 113, the telescopic rod 314 is gradually stretched. When the telescopic rod 314 reaches its maximum limit, the telescopic rod 314 generates a pulling force on the elastic plate 313, forcing the elastic plate 313 to rotate under force and exert pressure on the torsion spring on the surface of the fixed rod 312. Moreover, the elastic plate 313 is made of silicone. During the gradual rotation of the elastic plate 313, the heat flow path gradually narrows.

[0030] A rotating ring 321 is rotatably connected to the inner wall of the light box 14, and a scraper 322 is fixedly connected to the side wall of the rotating ring 321. When the pusher plate 113 is pushed outward, it causes the heat flow to flow out rapidly. At the same time, the heat flow itself is affected by the wind and flows outward. When the heat flow rushes outward, it comes into contact with the inclined surface of the scraper 322 and applies a pushing force to the scraper 322, causing the scraper 322 to rotate under the force. The scraper 322 is made of silicone rubber. When it rotates to a certain angle, it is pushed by the heat flow from the next pusher plate 113, which causes the scraper 322 to rotate slowly under the impact of the heat flow. During the rotation, the inclined thin surface of the scraper 322, which is close to the inner wall of the light box 14, is constantly in contact with the inner wall of the light box 14.

[0031] One specific application of this embodiment is as follows: The staff first adjusts the illumination height and angle of the light box 14 according to the detection requirements, and then fixes it on the bracket 13. Then, the control box 16 is connected to the power supply and turned on. The power indicator light is lit. Then, the knob on the outer wall of the control box 16 is rotated to continuously adjust the output illuminance. The output illuminance is connected to the light box 14 through the connecting wire 15. After the setting is completed, the inspection lamp 17 is started and the inside of the light box 14 begins to preheat.

[0032] During long-term heat dissipation, the inner wall of the light box 14 is subjected to the heat flow from the core heat source, which causes progressive material degradation, mainly manifested as thermal fatigue accumulation, local overheating, and microstructure degradation. This threatens the long-term reliability of the equipment, leading to spectral drift, light field distortion, and thermal noise superposition caused by heat conduction. This results in a collapse of the signal-to-noise ratio, a surge in false defects, and thermal damage to the material in low-light surface inspection, ultimately causing complete distortion of the observation results. Simultaneously with heat generation, the impeller 111 is activated. The rotation of the impeller 111 generates suction to quickly draw out the heat flow generated by the inspection lamp 17. While the impeller 111 rotates, it also drives the force rod 112 to rotate synchronously. Furthermore, as the force rod 112 rotates, it... Figure 4The push plate 113 contacts the groove 114 on its inner wall, and by applying external force to the groove 114, the push plate 113 is moved, causing it to move back and forth within the light box 14. Initially, when the force rod 112 rotates, it pulls the push plate 113 towards the side closer to the inspection light 17. The rotating plate 121 moves synchronously with the push plate 113. During this movement, the rotating plate 121 is impacted by heat flow and, driven rapidly by the push plate 113, rotates under force. During this rotation, as... Figure 5 As shown, the protruding block 123 on the side wall of the rotating plate 121 contacts the inclined surface of the sealing plate 122, generating downward pressure on the sealing plate 122. When the pusher plate 113 pushes outward, the rotating plate 121 is resisted by the upper and lower sealing plates 122 and cannot rotate, generating a thrust on the heat flow. Through the above components, the heat flow is alternately washed away by the heat flow on the inner wall of the light box 14, preventing the inner wall of the light box 14 from being continuously washed away by the heat flow. At the same time, under the push of the pusher plate 113, the heat flow is accelerated, which can improve the heat dissipation efficiency of the light box, extend the life of the light source, maintain stable light output, and improve detection accuracy.

[0033] Utilizing the aforementioned characteristics of the moving push plate 113, when the push plate 113 moves, it drives several ball bearings 211 to move synchronously, causing the ball bearings 211 to slide on the inner wall of the light box 14. When the push plate 113 rapidly pushes the heat flow, some of the heat flow will flow along the surface of the push plate 113 and enter the gap between the push plate 113 and the inner wall of the light box 14. At this time, when the heat flow passes through, it passes through multiple guide plates 212. Under the layered guidance of the guide plates 212, most of the heat flow enters the interior of the push plate 113. When the push plate 113 moves towards the side of the inspection light 17, the sealing plate 122 moves due to the collision with the rotating plate 121, and applies pressure to the spring 221, forcing the spring 221 to move. 21 is compressed and accumulates potential energy. When the sealing plate 122 moves downward, it opens the slot. When the push plate 113 is quickly pulled back, the heat flow inside the push plate 113 is discharged and flows out with the main heat flow. As the push plate 113 is pushed forward, because the bottom of the push plate 113 slides through the ball bearing 211, some heat flow will enter the bottom of the push plate 113 during the rapid movement of the push plate 113 and make full contact with the inner wall of the light box 14. Since the push plate 113 is still moving rapidly, the heat of the inner wall of the light box 14 will rise. By guiding and discharging the heat flow through the above components, the interface temperature can be effectively reduced, thermal stress damage can be reduced, material degradation can be delayed, and the system operation stability and life can be improved.

[0034] Utilizing the characteristics of the aforementioned pusher plate 113's movement, when the pusher plate 113 is moved towards the inspection light 17 under force, it drives the telescopic rod 314 to move synchronously. At this time, the telescopic rod 314 is in a semi-compressed state. During the pulling process, the telescopic rod 314 is gradually compressed to its limit state. Under the continuous pulling of the pusher plate 113, the telescopic rod 314 is gradually stretched. When the telescopic rod 314 reaches its maximum limit, it exerts a pulling force on the elastic plate 313, forcing the elastic plate 313 to rotate under force, and thus affecting the fixed... The torsion spring on the surface of the fixed rod 312 generates pressure. As the elastic plate 313 gradually rotates, the heat flow path gradually narrows. Even if the heat flow is accelerated, the heat flow continues to be generated, and the inner wall of the light box will still be subjected to repeated thermal stress, leading to structural fatigue. By gradually reducing the heat flow path cross-section through the above components under the condition of constant heat input, the fluid flow rate is increased, which can enhance the convective heat transfer efficiency, more efficiently remove heat from the pipe wall, indirectly achieve the cooling effect, and help suppress excessive rise in pipe wall temperature.

[0035] Utilizing the characteristics of the pusher plate 113 during resetting, when the pusher plate 113 is pushed outward, it causes the heat flow to flow out rapidly. Simultaneously, the heat flow itself is affected by the wind force, and as the heat flow flows outward, it contacts the inclined surface of the scraper blade 322, applying a pushing force to the scraper blade 322. This causes the scraper blade 322 to rotate under the force. After rotating to a certain angle, it receives the pushing force of the heat flow from the next pusher plate 113, causing the scraper blade 322 to rotate slowly under the impact of the heat flow. During this rotation, the inclined thin surface of the scraper blade 322, near the inner wall of the light box 14, continuously contacts the inner wall of the light box 14. Since the observation of the mask substrate requires no... The process takes place inside a cleanroom, where the ambient temperature is typically lower than that inside the lightbox 14. When the inspection light 17 is activated, heat continuously flows out of the lightbox 14. At this time, the temperature of the inner wall of the heat dissipation end of the lightbox 14 is the same as that of the cleanroom environment and has not yet been affected by the heat flow. As a result, when the heat flow encounters the cooler inner wall of the lightbox 14, water vapor in the air will condense into water droplets or form a thin layer of mist on the inner wall surface due to the temperature difference, thereby reducing heat dissipation efficiency and causing overheating risk. By effectively scraping away the water mist formed on the inner wall of the lightbox 14 using the aforementioned components, the heat dissipation obstacles and equipment risks caused by condensation can be reduced, and efficient heat dissipation performance can be restored and maintained.

[0036] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. An energy-saving spotlight heat dissipation light box for inspecting the surface of a photolithography mask substrate, comprising a bracket (13), a light box (14) fixedly disposed on the top of the side wall of the bracket (13), a connecting line (15) fixedly disposed on the end of the side wall of the light box (14), a control box (16) fixedly disposed at the end of the connecting line (15) away from the light box (14), an inspection light (17) fixedly disposed on the inner wall of the light box (14), and a pusher plate (113) slidably disposed on the inner wall of the light box (14), characterized in that, Also includes: Ventilation mechanism (1), wherein the ventilation mechanism (1) is rotatably disposed on the inner wall of the light box (14); A heat conduction mechanism (2) is slidably disposed on the inner wall of the exhaust mechanism (1); Braking mechanism (3) is fixedly installed on the inner wall of the light box (14).

2. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 1, characterized in that: The exhaust mechanism (1) includes: Heat dissipation assembly (11), which is rotatably disposed on the inner wall of the light box (14); Rotating assembly (12) is rotatably disposed on the outer wall of heat dissipation assembly (11).

3. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 2, characterized in that: The heat conduction mechanism (2) includes: A heat-absorbing component (21) is slidably disposed on the inner wall of the heat dissipation component (11); Compression assembly (22), which is fixedly disposed on the inner wall of heat dissipation assembly (11); As the heat dissipation component (11) moves, the heat absorption component (21) slides.

4. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 3, characterized in that: The braking mechanism (3) includes: Force-bearing component (31), which is fixedly installed on the inner wall of the light box (14); Scraping assembly (32), which is rotatably disposed on the inner wall of the light box (14); While the heat dissipation component (11) moves, it generates a pulling force on the force-bearing component (31).

5. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 4, characterized in that: The heat dissipation assembly (11) includes an impeller (111) rotatably connected to the inner wall of the light box (14), a force rod (112) is fixedly connected to the bottom of the side wall of the impeller (111), and a pusher plate (113) is slidably connected to the inner wall of the light box (14), and a groove (114) is provided on the inner wall of the pusher plate (113). The suction generated by the impeller (111) causes the heat flow to flow along the inner wall of the light box (14), and the path of the heat flow is consistent with the moving path of the push plate (113).

6. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 5, characterized in that: The rotating assembly (12) includes a rotating plate (121) rotatably connected to the bottom of the outer wall of the pusher plate (113), a sealing plate (122) is slidably connected to the left end of the inner wall of the pusher plate (113), and a protrusion (123) is fixedly connected to the side wall of the rotating plate (121). The fixed rod inside the rotating plate (121) is located at its lower end, and the rotating plate (121) is still in an inclined state when it is rotated to its maximum extent.

7. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 6, characterized in that: The heat absorption component (21) includes a ball bearing (211) slidably connected to the bottom of the outer wall of the pusher plate (113), and the bottom of the inner wall of the pusher plate (113) is provided with a plurality of guide plates (212). The bottom of the outer wall of the guide plate (212) does not contact the inner wall of the light box (14).

8. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 6, characterized in that: The compression assembly (22) includes a spring piece (221) fixedly connected to the side wall of the sealing plate (122); The spring (221) is made of nickel-based high-temperature alloy.

9. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 8, characterized in that: The force-bearing component (31) includes a fixed frame (311) fixedly connected to the inner wall of the light box (14), a fixed rod (312) fixedly connected to the side wall of the fixed frame (311), an elastic plate (313) rotatably connected to the outer wall of the fixed rod (312), and a plurality of telescopic rods (314) fixedly connected to one end of the elastic plate (313) away from the fixed rod (312). The elastic plate (313) is made of silicone.

10. The energy-saving spotlight heat dissipation box for surface inspection of a photolithographic mask substrate according to claim 9, characterized in that: A rotating ring (321) is rotatably connected to the inner wall of the light box (14), and a scraper (322) is fixedly connected to the side wall of the rotating ring (321). The scraper (322) is made of silicone rubber.

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