Adsorption device, film formation device, adsorption method, film formation method, and method for manufacturing electronic device

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By arranging multiple pressing components at the corners of the substrate, and utilizing the synergistic effect of the support unit and the pressing components, the problem of poor substrate adhesion caused by vacuum container deformation is solved, and stable adsorption of the substrate in a vacuum environment is achieved.

CN122296080APending Publication Date: 2026-06-26CANON TOKKI CORP

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Patent Information

Application Number: CN202480073940.5
Authority / Receiving Office: CN · China
Patent Type: Applications(China)
Current Assignee / Owner
Priority Date: 2023-11-29
Filing Date: 2024-11-18
Publication Date: 2026-06-26

Application Information

Patent Timeline

29 Nov 2023

Priority

18 Nov 2024

Application

CN202480073940.5

26 Jun 2026

Publication

CN122296080A

IPC: H10P72/50; C23C14/50; H10P72/78

CPC: C23C14/50; H10P72/70; H10P72/50; C23C14/54

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AI Technical Summary

Technical Problem

In the prior art, the uneven protrusion of the pressing component caused by the deformation of the vacuum container affects the adhesion quality of the substrate.

Method used

Multiple pressing components are arranged at the corners of the substrate. Through the synergistic effect of the support unit and the pressing components, the substrate posture is adjusted in a vacuum environment to avoid the influence of vacuum container deformation.

Benefits of technology

Stable adsorption of substrates in a vacuum environment was achieved, avoiding poor adhesion caused by deformation of the vacuum container and improving the adsorption quality of the substrates.

✦ Generated by Eureka AI based on patent content.

Patent Text Reader

Abstract

The adsorption device is characterized in that the adsorption device is provided with a supporting unit for supporting the peripheral edge part of a first main surface of an adsorbed body, and the adsorbed body is provided with the first main surface and a second main surface on the opposite side of the first main surface; an adsorption member that adsorbs the body to be adsorbed from the second main surface side of the body to be adsorbed; and a plurality of pressing members that are provided to an adsorption member and that press the body to be adsorbed from the second main surface side of the body to be adsorbed, the plurality of pressing members being respectively disposed at positions corresponding to at least two of a plurality of corners of the second main surface of the body to be adsorbed.

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