System and method for on-chip integration of high energy efficiency infrared polarization imaging

Abstract

This invention relates to infrared polarization imaging systems and methods, specifically to an on-chip integrated high-efficiency infrared polarization imaging system and method, solving the technical problems of low energy utilization or complex manufacturing processes in existing infrared polarization imaging systems. In the on-chip integrated high-efficiency infrared polarization imaging system provided by this invention, the infrared polarization module directly fabricates the infrared polarization array on an infrared substrate, simplifying the process. Furthermore, the infrared substrate employs a double-layer infrared antireflection film structure, effectively solving the problem of significant energy loss due to substrate mirror reflection in traditional direct fabrication of polarization arrays on infrared substrates, thus improving energy utilization. Simultaneously, the infrared polarization module and the infrared detector are indirectly coupled through a coupling lens group, avoiding the energy loss problem caused by the diffraction effect of the infrared polarization module itself in traditional direct coupling, further improving energy utilization.

Description

Technical Field

[0001] This invention relates to an infrared polarization imaging system and method, specifically to an on-chip integrated high-efficiency infrared polarization imaging system and method. Background Technology

[0002] Polarization imaging technology, as an optical information sensing technology that simultaneously detects and images polarization and spatial information, has received widespread attention in fields such as target recognition, agricultural production, marine remote sensing, and smart healthcare. Traditional polarization imaging technology relies on discrete polarizers, waveplates, and liquid crystal phase retarders, which are large in size and difficult to integrate, making it difficult to meet the development needs of miniaturized, lightweight, and large-size polarization imaging technologies.

[0003] Polarization arrays, as a novel type of polarization device based on subwavelength superstructures, have attracted widespread attention due to their planar structure and compatibility with advanced microelectronic processes. Existing polarization arrays are divided into metal wire-grid polarization arrays and metal oxide (such as titanium dioxide) polarization arrays. Metal wire-grid polarization arrays have an ideal energy utilization rate of 50%, which is insufficient for high-energy-efficiency polarization imaging applications. Meanwhile, the fabrication process of metal oxide polarization arrays such as titanium dioxide is too complex and expensive, hindering the development of large-scale industrial integration. Furthermore, due to the large dark current of infrared detector signals, their photoelectric conversion efficiency is low, with a maximum polarization imaging energy utilization rate of only 50%, resulting in low energy utilization of infrared polarization arrays and limiting their practical applications. Especially in large-scale on-chip infrared integrated systems, the energy loss of infrared polarization arrays further increases, significantly limiting their application in three-dimensional space with weak targets and in practical cloud and fog polarization imaging.

[0004] Therefore, there is an urgent need to develop high-efficiency, large-size integrated infrared polarization imaging systems and methods to meet the application requirements of practical infrared polarization information sensing technology. Summary of the Invention

[0005] The purpose of this invention is to solve the technical problems of low energy utilization or complex manufacturing processes in existing infrared polarization imaging systems, and to provide an on-chip integrated high-efficiency infrared polarization imaging system and infrared polarization imaging method.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0007] A high-efficiency infrared polarization imaging system integrated on a chip is characterized by comprising a large-aperture front infrared lens, an infrared polarization module, a coupling lens group, and an infrared detector arranged sequentially along the infrared incident light transmission direction.

[0008] The large-aperture front infrared lens is used to couple infrared incident light into incident parallel light.

[0009] The infrared polarization module is used to detect polarized light in incident parallel light. It includes an infrared polarization array and an infrared substrate arranged sequentially along the transmission direction of the infrared incident light. Both surfaces of the infrared substrate are provided with infrared antireflection films, thereby further improving energy utilization. The infrared antireflection films are used to increase the transmittance of infrared light, thereby improving energy utilization.

[0010] The coupling lens group is used to enhance the coupling between the infrared polarization module and the infrared detector. The infrared detector is used to realize the detection and imaging of polarized light to obtain infrared polarization information.

[0011] Furthermore, the coupling lens group includes a coupling collimating lens, an aberration compensation lens, and an achromatic compensation lens arranged sequentially along the infrared incident light transmission direction.

[0012] Furthermore, the infrared polarization array includes N infrared polarization element arrays, and the infrared detector includes N infrared pixel units corresponding to the N infrared polarization element arrays respectively;

[0013] Each of the infrared polarization element arrays includes H×M infrared polarization elements arranged in an array, and each infrared pixel unit includes K×L infrared photosensitive pixels arranged in an array, wherein N, H, M, K, and L are all positive integers, K is an integer multiple of H, L is an integer multiple of M, and K≠H, L≠M.

[0014] Furthermore, it also includes an electronically controlled scanning stage, on which the large-aperture front infrared lens, infrared polarization module, coupling lens group and infrared detector are all mounted. The electronically controlled scanning stage is used to realize dynamic scanning imaging of three-dimensional spatial infrared polarization information.

[0015] Furthermore, it also includes a data processing module and an electronic control module;

[0016] The input end of the data processing module is connected to the output end of the infrared detector, and is used to process the infrared polarization information to obtain the polarization parameters of the target under test.

[0017] The output terminal of the electronic control module is connected to the control terminals of the infrared detector and the electronically controlled scanning stage, respectively, and is used to synchronously send control signals to the infrared detector and the electronically controlled scanning stage, so as to enable the infrared detector to perform synchronous detection and imaging when the electronically controlled scanning stage is at any position in space.

[0018] Furthermore, the large-aperture front infrared lens includes a large-aperture positive lens and a front aberration compensation lens arranged sequentially along the transmission direction of the incident beam.

[0019] Furthermore, the infrared polarization element adopts a periodic structure of silicon dioxide, SU8 columnar or aluminum metal wire grid;

[0020] The infrared substrate is an infrared-transparent substrate, and its material is silicon or calcium fluoride.

[0021] Furthermore, H=M=2, and the 2×2 infrared polarization units are infrared polarization units of 0 degrees, 45 degrees, 90 degrees and 135 degrees respectively;

[0022] The 0°, 45°, 90° and 135° infrared polarization elements are formed by rotating the same periodic structure by 0°, 45°, 90° and 135° respectively in the XY plane, where the XY plane is a plane perpendicular to the direction of infrared incident light transmission.

[0023] This invention also provides an infrared polarization imaging method, employing the aforementioned on-chip integrated high-efficiency infrared polarization imaging system, characterized by the following steps:

[0024] Step 1: The infrared incident light emitted by the target under test is transmitted to the large-aperture front infrared lens. The large-aperture front infrared lens couples it into incident parallel light and transmits it to the infrared polarization module.

[0025] Step 2: The infrared polarization module detects the polarized light in the incident parallel light, obtains the polarized light energy distribution, and transmits it to the coupling lens group;

[0026] Step 3: The coupling lens group couples the light field energy with polarized light energy distribution to the infrared detector. The infrared detector detects and images the polarized light energy distribution to obtain infrared polarization information.

[0027] Furthermore, the on-chip integrated high-efficiency infrared polarization imaging system also includes an electronically controlled scanning stage, a data processing module, and an electronic control module;

[0028] In step 1, before transmitting the infrared incident light emitted by the target to the large-aperture front infrared lens, the following steps are also included:

[0029] The electronic control module sends control signals to the infrared detector and the electronically controlled scanning stage, so that the electronically controlled scanning stage is in a preset spatial position and the infrared detector is triggered synchronously.

[0030] Step 3 is followed by:

[0031] Step 4: The infrared detector sends infrared polarization information to the data processing module, which then calculates the polarization parameters based on the infrared polarization information.

[0032] Step 5: Change the preset spatial position in the XY plane, then return to step 1, until all spatial positions of the target under test in the XY plane are traversed to obtain the polarization parameters of all spatial positions in the XY plane, and then execute step 6; the XY plane is a plane perpendicular to the direction of infrared incident light transmission.

[0033] Step 6: The electronic control module sends a control signal to the electronically controlled scanning stage, causing the electronically controlled scanning stage to move along the Z-axis, and then returns to step 1 until all preset spatial positions of the Z-axis are traversed, obtaining the polarization parameters of all spatial positions in the XY plane corresponding to different spatial positions of the target on the Z-axis; the Z-axis is the direction of infrared incident light transmission.

[0034] Step 7: The data processing module reconstructs the polarization parameters of all spatial positions in the XY plane corresponding to different spatial positions of the target on the Z-axis according to the spatial position, and obtains the three-dimensional infrared polarization information of the target.

[0035] Compared with the prior art, the present invention has the following beneficial effects:

[0036] 1. The on-chip integrated high-efficiency infrared polarization imaging system provided by this invention directly fabricates the infrared polarization array on the infrared substrate in the infrared polarization module. The process is simple, and the infrared substrate adopts a double-layer infrared anti-reflection film structure, which can effectively solve the problem of large energy loss due to substrate mirror reflection when directly fabricating polarization arrays on the infrared substrate in the traditional way, thereby improving energy utilization. At the same time, the infrared polarization module and the infrared detector are indirectly coupled through a coupling lens group, avoiding the energy loss problem caused by the diffraction effect of the infrared polarization module itself when the two are directly coupled, further improving energy utilization.

[0037] 2. The on-chip integrated high-efficiency infrared polarization imaging system provided by the present invention consists of multiple infrared photosensitive pixels corresponding to one infrared polarization element. The total energy of multiple infrared photosensitive pixels compensates for the problem of large energy loss in traditional infrared imaging, thereby improving the infrared polarization imaging system's ability to perceive weak targets.

[0038] 3. The on-chip integrated high-efficiency infrared polarization imaging system provided by the present invention sets a large-aperture front infrared lens, an infrared polarization array, a coupling lens group and an infrared detector on an electronically controlled scanning stage. It can realize dynamic scanning imaging of three-dimensional spatial infrared polarization information through the electronically controlled scanning stage, which meets the development needs of three-dimensional spatial polarization information perception.

[0039] 4. The on-chip integrated high-efficiency infrared polarization imaging system provided by the present invention achieves large-angle collection of incident light field energy and polarization aberration compensation correction in the infrared spectrum by using a large-aperture front infrared lens composed of a large-aperture positive lens and a front aberration compensation lens, thus avoiding the problem of low energy collection efficiency of traditional imaging objectives.

[0040] 5. The infrared polarization imaging method provided by this invention can comprehensively utilize polarization parameters in the XY plane to obtain three-dimensional infrared polarization information, avoiding the problems of incomplete utilization of polarization information and low accuracy in traditional polarization information reconstruction. Attached Figure Description

[0041] Figure 1 This is a schematic diagram of the on-chip integrated high-efficiency infrared polarization imaging system in Embodiment 1 of the present invention;

[0042] Figure 2 This is a schematic diagram of the infrared polarization module in Embodiment 1 of the present invention;

[0043] Figure 3 This is a schematic diagram of the coupling between the infrared polarization module and the infrared detector in Embodiment 1 of the present invention;

[0044] Figure 4 This is a layout diagram of the control position of the electronically controlled scanning stage in the infrared polarization imaging method of Embodiment 1 of the present invention;

[0045] Figure 5 This is a schematic diagram of the on-chip integrated high-efficiency infrared polarization imaging system in Embodiment 2 of the present invention;

[0046] The annotations in the attached figures are explained as follows:

[0047] 1-Large-aperture front-facing infrared lens, 2-Infrared polarization module, 3-Coupled lens group, 4-Infrared detector, 5-Electrically controlled scanning stage, 6-Data processing module, 7-Electrically controlled module;

[0048] 11-Large aperture positive lens, 12-Front aberration compensation lens;

[0049] 21-Infrared polarization array, 22-Infrared substrate, 23-Infrared antireflection coating;

[0050] 31-Coupled collimating lens, 32-Aberration compensation lens, 33-Achromatic compensation lens. Detailed Implementation

[0051] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a further detailed explanation of the on-chip integrated high-efficiency infrared polarization imaging system and method proposed in this invention. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this invention and are not intended to limit the scope of protection of this invention.

[0052] Example 1

[0053] An on-chip integrated high-efficiency infrared polarization imaging system, such as Figure 1 As shown, it includes a large-aperture front infrared lens 1, an infrared polarization module 2, a coupling lens group 3 and an infrared detector 4 arranged sequentially along the infrared incident light transmission direction, as well as an electronically controlled scanning stage 5, a data processing module 6 and an electronically controlled module 7.

[0054] The large-aperture front infrared lens 1 is used to couple infrared incident light into incident parallel light, and includes a large-aperture positive lens 11 and a front aberration compensation lens 12 arranged sequentially along the transmission direction of the incident beam.

[0055] Infrared polarization module 2 is used to detect polarized light in incident parallel light, such as Figure 2 As shown, the system includes an infrared polarization array 21 and an infrared substrate 22 arranged sequentially along the infrared incident light transmission direction. Both surfaces of the infrared substrate 22 are provided with infrared antireflection films 23. These films increase the transmittance of infrared light, avoiding reflection loss caused by direct infrared light incidence, thereby improving energy utilization. The infrared polarization array 21 includes N infrared polarization element arrays, each array comprising H×M infrared polarization elements arranged in an array, where N, H, and M are all positive integers. In this embodiment, N=1, H=M=2, and the 2×2 infrared polarization elements are 0°, 45°, 90°, and 135° infrared polarization elements, respectively. The infrared substrate 22 is an infrared-band transparent substrate, made of silicon or calcium fluoride. The infrared polarization element adopts a periodic structure of silicon dioxide, SU8 columnar or aluminum metal wire grid. The 0-degree, 45-degree, 90-degree and 135-degree infrared polarization elements are formed by rotating the same periodic structure by 0 degrees, 45 degrees, 90 degrees and 135 degrees in the XY plane respectively. The XY plane is a plane perpendicular to the direction of infrared incident light transmission.

[0056] like Figure 3 As shown, the coupling lens group 3 is used to enhance the coupling between the infrared polarization module 2 and the infrared detector 4, avoiding the diffraction energy loss caused by the micro-nano structure in the infrared polarization array 21 under traditional direct coupling, thereby improving energy utilization. Since the infrared polarization array 21 in the infrared polarization module 2 is a subwavelength structure, it inherently exhibits diffraction effects, resulting in a divergence angle that is difficult to naturally match with the infrared detector 4. Adding the coupling lens group 3 allows for the collection, shaping, and projection of the light onto the photosensitive surface of the infrared detector 4, reducing losses during free propagation. The coupling lens group 3 includes a coupling collimating lens 31, an aberration compensation lens 32, and an achromatic compensation mirror 33 arranged sequentially along the incident beam propagation direction. The coupling collimating lens 31 is used to collect and reduce divergence, as well as to achieve incident angle matching and spot size matching; the aberration compensation lens 32 and the achromatic compensation mirror 33 are used to correct aberrations and chromatic aberrations, respectively, reducing energy dispersion and energy dispersion in adjacent pixels, thereby reducing crosstalk.

[0057] Infrared detector 4 is used to detect and image polarized light to obtain infrared polarization information. Infrared detector 4 includes N infrared pixel units, each corresponding to an array of N infrared polarization primitives. Each infrared pixel unit includes K×L infrared photosensitive pixels arranged in an array, where K and L are both positive integers, and K is an integer multiple of H, L is an integer multiple of M, K≠H, and L≠M. In this embodiment, K=L=2, meaning each polarization primitive corresponds to 4 infrared photosensitive pixels.

[0058] The large-aperture front-facing infrared lens 1, infrared polarization module 2, coupling lens group 3, and infrared detector 4 are all mounted on the electronically controlled scanning stage 5, which is used to realize dynamic scanning imaging of three-dimensional spatial infrared polarization information. In this embodiment, the large-aperture front-facing infrared lens 1, infrared polarization module 2, coupling lens group 3, and infrared detector 4 are packaged as an optoelectronic system and mounted on the electronically controlled scanning stage 5.

[0059] The input terminal of the data processing module 6 is connected to the output terminal of the infrared detector 4, and is used to process the infrared polarization information to obtain the polarization parameters of the target under test. The output terminal of the electronic control module 7 is connected to the control terminals of the infrared detector 4 and the electronically controlled scanning stage 5, respectively, and is used to synchronously send control signals to the infrared detector 4 and the electronically controlled scanning stage 5, so as to realize that the infrared detector 4 can synchronously perform detection and imaging when the electronically controlled scanning stage 5 is at any position in space.

[0060] This embodiment also provides an infrared polarization imaging method, which uses the above-mentioned on-chip integrated high-efficiency infrared polarization imaging system and includes the following steps:

[0061] Step 1: The electronic control module 7 sends control signals to the infrared detector 4 and the electronically controlled scanning stage 5, so that the electronically controlled scanning stage 5 is in a preset spatial position and the infrared detector 4 is triggered synchronously; then the infrared incident light emitted by the target under test is transmitted to the large-aperture front infrared lens 1, the large-aperture front infrared lens 1 couples it into incident parallel light, and transmits it to the infrared polarization module 2.

[0062] Step 2: The infrared polarization module 2 detects the polarized light in the incident parallel light, obtains the polarized light energy distribution, and transmits it to the coupling lens group 3.

[0063] Step 3: The coupling lens group 3 couples the light field energy with polarized light energy distribution to the infrared detector 4. The infrared detector 4 detects and images the polarized light energy distribution to obtain infrared polarization information.

[0064] Step 4: Infrared detector 4 sends infrared polarization information to data processing module 6. Data processing module 6 calculates polarization parameters based on the infrared polarization information. The specific method for calculating polarization parameters is as follows:

[0065] Based on the light intensity of the infrared polarization information at 0 degrees, 45 degrees, 90 degrees, and 135 degrees measured by infrared detector 4, the Stokes vector is calculated using the following formula:

[0066]

[0067]

[0068]

[0069] in, , , , The light intensities represent infrared polarization information at 0 degrees, 45 degrees, 90 degrees, and 135 degrees, respectively. , , All are Stokes vectors.

[0070] Then, based on the Stokes vector, the polarization angle and degree of polarization are calculated using the following formula to obtain the polarization parameters:

[0071]

[0072]

[0073] in, It is the polarization angle. This refers to the degree of polarization.

[0074] Step 5: Change the preset spatial position in the XY plane, then return to step 1, until all spatial positions of the target under test in the XY plane are traversed, obtain the polarization parameters of all spatial positions in the XY plane, and execute step 6.

[0075] Step 6: The electronic control module 7 sends a control signal to the electronically controlled scanning stage 5, causing the electronically controlled scanning stage 5 to move along the Z-axis. Then, it returns to step 1 until all preset spatial positions along the Z-axis are traversed, obtaining the polarization parameters of all spatial positions in the XY plane corresponding to different spatial positions along the Z-axis of the target under test. Here, the Z-axis is the direction of infrared incident light transmission.

[0076] Step 7: The data processing module 6 reconstructs the polarization parameters of all spatial positions in the XY plane corresponding to different spatial positions of the target on the Z-axis according to the spatial position, and obtains the three-dimensional infrared polarization information of the target.

[0077] In this embodiment, as Figure 4As shown, the electronically controlled scanning stage 5 first completes infrared polarization imaging of the XY plane at a certain position on the Z-axis. Then, the Z-axis position of the electronically controlled scanning stage 5 is adjusted, and the above steps are repeated to obtain the three-dimensional infrared polarization information of the target under test, obtain the polarization information distribution of the target under test, and realize large-area high-energy-efficiency infrared polarization imaging of the target under test.

[0078] Example 2

[0079] This embodiment has the same overall structure and imaging principle as Embodiment 1. The difference lies in that the 2×2 infrared polarization element array is expanded into a large-scale integrated infrared polarization array including four 2×2 infrared polarization element arrays through a patterning process. Correspondingly, as... Figure 5 As shown, the infrared detector 4 includes four infrared pixel units corresponding to four infrared polarization element arrays, respectively, to form a large-scale on-chip integrated high-efficiency infrared polarization imaging system.

Claims

1. An on-chip integrated high-efficiency infrared polarization imaging system, characterized in that: It includes a large-aperture front infrared lens (1), an infrared polarization module (2), a coupling lens group (3), and an infrared detector (4) arranged sequentially along the infrared incident light transmission direction. The large-aperture front infrared lens (1) is used to couple infrared incident light into incident parallel light; The infrared polarization module (2) is used to detect polarized light in incident parallel light. It includes an infrared polarization array (21) and an infrared substrate (22) arranged sequentially along the infrared incident light transmission direction. Both surfaces of the infrared substrate (22) are provided with infrared anti-reflection film (23). The infrared anti-reflection film (23) is used to increase the transmittance of infrared light, thereby improving energy utilization. The coupling lens group (3) is used to enhance the coupling between the infrared polarization module (2) and the infrared detector (4), thereby further improving the energy utilization rate; the infrared detector (4) is used to realize the detection and imaging of polarized light and obtain infrared polarization information.

2. The on-chip integrated high-efficiency infrared polarization imaging system according to claim 1, characterized in that: The coupling lens group (3) includes a coupling collimating lens (31), an aberration compensation lens (32), and an achromatic compensation lens (33) arranged sequentially along the infrared incident light transmission direction.

3. The on-chip integrated high-efficiency infrared polarization imaging system according to claim 1 or 2, characterized in that: The infrared polarization array (21) includes N infrared polarization element arrays, and the infrared detector (4) includes N infrared pixel units corresponding to the N infrared polarization element arrays respectively. Each of the infrared polarization element arrays includes H×M infrared polarization elements arranged in an array, and each infrared pixel unit includes K×L infrared photosensitive pixels arranged in an array, wherein N, H, M, K, and L are all positive integers, K is an integer multiple of H, L is an integer multiple of M, and K≠H, L≠M.

4. The on-chip integrated high-efficiency infrared polarization imaging system according to claim 3, characterized in that: It also includes an electronically controlled scanning stage (5), on which the large-aperture front infrared lens (1), infrared polarization module (2), coupling lens group (3) and infrared detector (4) are all mounted. The electronically controlled scanning stage (5) is used to realize dynamic scanning imaging of three-dimensional spatial infrared polarization information.

5. The on-chip integrated high-efficiency infrared polarization imaging system according to claim 4, characterized in that: It also includes a data processing module (6) and an electronic control module (7); The input end of the data processing module (6) is connected to the output end of the infrared detector (4) to process the infrared polarization information and obtain the polarization parameters of the target to be measured. The output terminal of the electronic control module (7) is connected to the control terminal of the infrared detector (4) and the electronic control scanning station (5) respectively, and is used to send control signals to the infrared detector (4) and the electronic control scanning station (5) synchronously, so as to realize that the infrared detector (4) performs synchronous detection and imaging when the electronic control scanning station (5) is at any position in space.

6. The on-chip integrated high-efficiency infrared polarization imaging system according to claim 5, characterized in that: The large-aperture front infrared lens (1) includes a large-aperture positive lens (11) and a front aberration compensation lens (12) arranged sequentially along the transmission direction of the incident beam.

7. The on-chip integrated high-efficiency infrared polarization imaging system according to claim 6, characterized in that: The infrared polarization element adopts a periodic structure of silicon dioxide, SU8 columnar or aluminum metal wire grid; The infrared substrate (22) is an infrared-transparent substrate, and its material is silicon or calcium fluoride.

8. The on-chip integrated high-efficiency infrared polarization imaging system according to claim 7, characterized in that: H=M=2, and the 2×2 infrared polarization elements are infrared polarization elements of 0 degrees, 45 degrees, 90 degrees and 135 degrees respectively; The 0°, 45°, 90° and 135° infrared polarization elements are formed by rotating the same periodic structure by 0°, 45°, 90° and 135° respectively in the XY plane, where the XY plane is a plane perpendicular to the direction of infrared incident light transmission.

9. An infrared polarization imaging method, employing the on-chip integrated high-efficiency infrared polarization imaging system as described in any one of claims 1-8, characterized in that, Includes the following steps: Step 1: The infrared incident light emitted by the target under test is transmitted to the large-aperture front infrared lens (1). The large-aperture front infrared lens (1) couples it into incident parallel light and transmits it to the infrared polarization module (2). Step 2: The infrared polarization module (2) detects the polarized light in the incident parallel light, obtains the polarized light energy distribution, and transmits it to the coupling lens group (3). Step 3: The coupling lens group (3) couples the light field energy with polarized light energy distribution to the infrared detector (4). The infrared detector (4) detects and images the polarized light energy distribution to obtain infrared polarization information.

10. The infrared polarization imaging method according to claim 9, characterized in that: The on-chip integrated high-efficiency infrared polarization imaging system also includes an electronically controlled scanning stage (5), a data processing module (6), and an electronically controlled module (7). In step 1, before transmitting the infrared incident light emitted by the target to the large-aperture front infrared lens (1), the following steps are also included: The electronic control module (7) sends control signals to the infrared detector (4) and the electronically controlled scanning stage (5) so that the electronically controlled scanning stage (5) is in a preset spatial position and the infrared detector (4) is triggered synchronously. Step 3 is followed by: Step 4: The infrared detector (4) sends the infrared polarization information to the data processing module (6), and the data processing module (6) calculates the polarization parameters based on the infrared polarization information. Step 5: Change the preset spatial position in the XY plane, then return to step 1, until all spatial positions of the target under test in the XY plane are traversed to obtain the polarization parameters of all spatial positions in the XY plane, and then execute step 6; the XY plane is a plane perpendicular to the direction of infrared incident light transmission. Step 6: The electronic control module (7) sends a control signal to the electronic control scanning stage (5) to move the electronic control scanning stage (5) along the Z-axis, and then returns to step 1 until all preset spatial positions of the Z-axis are traversed to obtain the polarization parameters of all spatial positions in the XY plane corresponding to different spatial positions of the Z-axis of the target to be measured; the Z-axis is the direction of infrared incident light transmission. Step 7: The data processing module (6) reconstructs the polarization parameters of all spatial positions in the XY plane corresponding to different spatial positions of the Z-axis of the target under test according to the spatial position, and obtains the three-dimensional infrared polarization information of the target under test.

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