A buffer cleaning sheet for a probe card and a method of manufacturing the same

By combining a three-dimensional through-hole waterborne polyurethane buffer layer with a micron-sized abrasive cleaning and polishing layer, the problems of tip damage and environmental pollution during probe cleaning are solved, achieving a highly efficient and environmentally friendly probe cleaning effect.

CN122401296APending Publication Date: 2026-07-17MOZART SEMICON (SUZHOU) CO LTD
View PDF 1 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
MOZART SEMICON (SUZHOU) CO LTD
Filing Date
2026-05-25
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing cleaning methods are insufficient to effectively remove solder residue and oxide layers without damaging the probe tip, and traditional cleaning materials pose an environmental pollution risk.

Method used

The combination of a water-based polyurethane buffer layer with a three-dimensional through-hole structure and a micron-sized abrasive cleaning and polishing layer, along with a gradient solidification process and selectable abrasive types, forms a uniform and stable buffer cleaning sheet that combines protection and cleaning capabilities.

Benefits of technology

It reduces the risk of probe tip wear and deformation, improves cleaning stability and debris holding capacity, and achieves environmentally friendly and efficient cleaning results.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure FT_1
    Figure FT_1
  • Figure FT_2
    Figure FT_2
  • Figure SMS_1
    Figure SMS_1
Patent Text Reader

Abstract

本申请涉及一种用于探针卡的缓冲清洁片及其制备方法，一种用于探针卡的缓冲清洁片，包括PET薄膜、缓冲层与清洁研磨层，所述缓冲层采用内部具有三维贯通孔微孔的水性聚氨酯涂层贝斯制备得到，其泡孔直径为100‑220μm，厚度为260‑450μm。本申请通过水性聚氨酯浆料在凝固浴中的相转化过程，制备出具有均匀三维贯通微孔结构的柔性贝斯；该柔性贝斯能够有效吸收并分散清洁时悬臂梁式探针针尖受到的局部冲击力，从而提升清洁稳定性。
Need to check novelty before this filing date? Find Prior Art