Image sensor-based non-destructive testing system for uniformity of fluorine material modification layer
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- WUXI SUPERTEAM PRECISION MASCH CO LTD
- Filing Date
- 2026-06-15
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies cannot accurately determine the coupling trend between the physical barrier degradation and chemical functional passivation of fluorine-modified layers, making it difficult for test results to reflect the degradation consistency of the coating in a high-purity solvent environment, and thus failing to provide a basis for differentiated process control and targeted repair.
By using an image sensor-based system, the microstructure, subsurface structure, and surface chemical force distribution data of the fluorine-modified layer are simultaneously acquired to generate a physical barrier degradation rate distribution map and an anti-adsorption function passivation distribution map. Spatial superposition and cross-correlation analysis are then performed to identify failure coupling regions and construct a dimension for evaluating the uniformity of degradation tolerance.
It enables precise risk assessment of fluorine-modified layers, ensures comprehensive assessment of coating tolerance uniformity, reduces quality incidents, lowers maintenance costs, and improves drug purity and safety.
Smart Images
Figure CN122408672A_ABST