A sample transfer device applied to a scanning electron microscope rapid sample changing chamber

By coordinating the design of cylinder components, limit components, and pressure adjustment components, the sample cell slider is automatically slid out and sealed using vacuum pressure difference, which solves the problems of versatility, compatibility, and safety of scanning electron microscope sample transfer devices, and realizes reliable transfer and recovery of air-sensitive samples.

CN122409727APending Publication Date: 2026-07-17HANGZHOU YUANWEI TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-05-06
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing scanning electron microscope sample transfer devices suffer from problems such as limited versatility, high cost, incompatibility with rapid sample change chambers, difficulty in sample recovery, and risk of mechanical collision, making it difficult to safely and reliably transfer air-sensitive samples.

Method used

The system employs a cylinder assembly, a limit assembly, and a pressure adjustment assembly working in tandem. It utilizes vacuum pressure difference to drive the sample cell slider to automatically slide out and seal. Combined with multiple sealing rings and limit guide rods, it ensures the safety and compatibility of the sample during the transfer process.

Benefits of technology

It achieves end-to-end inert/vacuum protection for air-sensitive samples, simplifies the operation process, improves the efficiency of microscopic analysis, reduces costs, avoids the risk of mechanical collision, and supports reliable sample recovery.

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Abstract

The application provides a sample transfer device applied to a scanning electron microscope quick sample changing chamber, and belongs to the technical field of scanning electron microscope accessories, and aims to solve the problems of limited universality of the existing transfer device, incompatibility with the quick sample changing chamber and sample recovery difficulty. The device comprises a cylinder assembly, a limiting assembly and a pressure adjusting assembly. The cylinder assembly comprises a barrel box and a sample groove slider provided with a sample groove. Three sealing rings are arranged on the outer surface of the slider to form three sealed spaces in the box. The limiting assembly comprises a guide rod and a limiting plate, which is used for limiting the sliding-out distance of the slider, ensuring that the sample groove is completely exposed after sliding out and the second sealing ring is still located in the box. The pressure adjusting assembly comprises a locking screw and a sealing plug for adjusting the required air pressure for the sliding-out of the slider. The application is small in size, compatible with conventional sample chambers and quick sample changing chambers, can realize automatic sliding-out of the sample under vacuum and automatic sealing after testing, and is safe and reliable in operation.
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