Sample cup for scanning electron microscope and scanning electron microscope
By designing a sample cup with a groove structure and a protrusion structure in the scanning electron microscope, combined with a lifting column and locking components, the problem of time-consuming assembly and disassembly was solved, enabling rapid sample change and height adjustment, thus improving the user experience.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ANHUI ZEYOU TECH CO LTD
- Filing Date
- 2025-07-29
- Publication Date
- 2026-05-26
AI Technical Summary
When changing samples or adjusting sample height during the sample replacement process in existing scanning electron microscopes, the disassembly and assembly of sample cups takes a long time, which affects the user experience.
Design a sample cup that allows for quick assembly and disassembly through the interplay of a groove structure and a protrusion structure between the base and the cup body; combined with a lifting column and locking components, it facilitates easy adjustment of sample height and sample replacement.
It enables quick assembly and disassembly of sample cups and flexible adjustment of sample height, improving the efficiency of scanning electron microscope use and user experience.
Smart Images
Figure CN224288235U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of scanning electron microscopy, and more specifically, to a sample cup for a scanning electron microscope and a scanning electron microscope. Background Technology
[0002] Currently, when changing samples or altering sample height using scanning electron microscopes on the market, it is often necessary to remove the sample cup. This process of removing and reassembling the sample cup takes a lot of time and significantly reduces the user experience. Utility Model Content
[0003] The purpose of this application is to provide a sample cup to reduce the time required for users to assemble and disassemble sample cups on the sample stage of a scanning electron microscope.
[0004] The embodiments of this application are implemented as follows:
[0005] In a first aspect, embodiments of this application provide a sample cup for a scanning electron microscope, including a base and a cup body assembly. The cup body assembly includes a cup body, the base has a first mounting area, and the bottom of the cup body has a second mounting area. The first mounting area and the second mounting area are provided with mutually cooperating groove structures and protrusion structures. When installing the cup body, the cup body is placed on the base, and the groove structure and the protrusion structure cooperate with each other and can rotate relative to each other to restrict the cup body from axially detaching from the base. When disassembling the cup body, the groove structure and the protrusion structure rotate relative to each other, allowing the cup body to axially detach from the base.
[0006] In the above technical solution, the connection between the base and the cup can be achieved by the cooperation of the groove structure and the protrusion structure, which restricts the cup body from axially detaching from the base. When the groove structure and the protrusion structure rotate relative to each other, allowing the cup body to axially detach from the base, the cup body can be removed from the cup holder.
[0007] In some alternative embodiments, the groove structure includes a groove wall, and the protrusion structure is rotatable after being inserted into the groove structure in the axial direction of the groove structure, so that the groove wall restricts the cup body from axially disengaging from the base.
[0008] In the above technical solution, after the protruding structure is installed into the groove structure along the axial direction of the groove structure, the protruding structure is rotated so that the groove wall of the groove structure restricts the cup body, which can reliably prevent the cup body from detaching from the base axially.
[0009] In some optional embodiments, the surface of the protruding structure is provided with a recess, and the groove wall of the groove structure is provided with an elastic element and a moving element; during the mutual rotation of the groove structure and the protruding structure, the moving element can be pressed into the recess under the action of the elastic element, and the moving element can also be disengaged from the recess.
[0010] In the above technical solution, the moving part can be pressed into the recessed part under the action of the elastic element to restrict the relative rotation between the protruding structure and the groove structure, thereby playing a positioning role and stably confining the protruding structure within the groove structure. The moving part can be disengaged from the recessed part, thus facilitating the removal of the protruding structure from the groove structure.
[0011] In some alternative embodiments, the elastic element is a spring in a compressed state, the moving element is a rotatable spherical structure, one end of the elastic element abuts against the moving element, and the recess is a through-hole structure.
[0012] In some alternative embodiments, the cup assembly further includes a sample pin fixing plate and a lifting column; the cup is used to connect to the base; the sample pin fixing plate is connected to the end of the lifting column away from the cup, and the lifting column is variably connected to the cup to change the distance between the sample pin fixing plate and the cup.
[0013] In the above technical solution, since the lifting column and the cup body are variably connected, the distance between the sample nail fixing plate and the cup body can be changed. Therefore, the height of the sample can be easily adjusted for better observation of the sample.
[0014] In some optional embodiments, the side wall of the cup body is provided with a strip-shaped hole, and a locking component is disposed in the strip-shaped hole. One end of the lifting column extends into the cup body, and the locking component is connected to the lifting column. The locking component has a first state and a second state. In the first state, the locking component can fix the cup body and the lifting column relative to each other. In the second state, the locking component can move along the strip-shaped hole with the lifting column relative to the cup body.
[0015] In the above technical solution, in the first state, the cup and the lifting column are relatively fixed for observing the sample; in the second state, the locking component can move with the lifting column relative to the cup, so that the relative position between the lifting column and the cup can be changed, thereby changing the height of the sample.
[0016] In some alternative implementations, the locking assembly includes a bolt, the lifting column being provided with a threaded hole; the bolt includes a threaded portion and a head, the threaded portion being connected to the threaded hole, and the head being abutting against the cup body to restrict movement of the lifting column relative to the cup body.
[0017] In the above technical solution, the lifting column and the cup body can be connected by tightening the bolts so that the two can move together; the lifting column and the cup body can be moved relative to each other by loosening the bolts so as to change the distance between the sample nail fixing plate and the cup body.
[0018] In some alternative embodiments, the cup assembly further includes a sample pin fixing plate, one axial end of the lifting column is connected to the cup body, and the other axial end is connected to the sample pin fixing plate; the compression direction of the elastic element is parallel to the axial direction of the lifting column; the side of the sample pin fixing plate away from the base is used to hold the sample.
[0019] In the above technical solution, since the compression direction of the elastic element is parallel to the axial direction of the lifting column, an axial force can be applied to the lifting column, which makes the perpendicularity between the lifting column and the sample stage of the scanning electron microscope better, thereby effectively avoiding the skewing of the sample nail fixing plate on the lifting column, so as to facilitate better observation of the sample.
[0020] In some alternative implementations, the sample nail fixing plate has multiple mounting holes on the side facing away from the lifting column, and a crown spring is provided in the mounting holes; the crown spring is used to connect the sample nail inserted into the mounting hole.
[0021] In the above technical solution, the sample pin is connected by a crown spring, which facilitates the replacement of the sample pin and makes it convenient to change the sample.
[0022] Secondly, embodiments of this application provide a scanning electron microscope, including a sample stage and a sample cup provided in the first aspect, wherein the base is fixedly connected to the sample stage. Attached Figure Description
[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0024] Figure 1 A front view of the sample cup provided in an embodiment of this application;
[0025] Figure 2 A schematic diagram of the cup body assembly provided in an embodiment of this application;
[0026] Figure 3 A schematic diagram of the base provided in an embodiment of this application;
[0027] Figure 4A cross-sectional view of the sample cup provided in an embodiment of this application;
[0028] Figure 5 This is a three-dimensional structural diagram of the sample cup provided in an embodiment of this application;
[0029] Figure 6 An exploded view of the sample cup provided in an embodiment of this application.
[0030] Icons: 100-Sample cup; 110-Cup body assembly; 111-Cup body; 1111-Strip hole; 112-Sample nail fixing plate; 1121-Mounting hole; 113-Lifting column; 1131-Threaded hole; 114-Locking assembly; 120-Base; 130-Groove structure; 131-Groove wall; 1311-Notch; 140-Protruding structure; 141-Recess; 142-Protrusion; 150-Spring set screw; 151-Elastic element; 152-Moving element; 160-Crown spring. Detailed Implementation
[0031] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0032] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0034] In the description of this application, it should be noted that the terms "center," "upper," "lower," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0035] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0036] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0037] This application provides a sample cup 100 that can be used in a scanning electron microscope, such as... Figures 1 to 4 As shown, the system includes a base 120 and a cup assembly 110. The base 120 is used to connect to the bottom of the sample chamber in the scanning electron microscope. The cup assembly 110 is used to place the sample to be observed and is detachably connected to the cup 111. The cup assembly 110 includes a cup 111. The base 120 has a first mounting area, and the bottom of the cup 111 has a second mounting area. The first mounting area and the second mounting area are provided with a groove structure 130 and a protrusion structure 140 that cooperate with each other. When installing the cup 111, the cup 111 is placed on the base 120. The groove structure 130 and the protrusion structure 140 cooperate with each other and can rotate relative to each other to prevent the cup 111 from axially detaching from the base 120. When removing the cup 111, the groove structure 130 and the protrusion structure 140 rotate relative to each other, allowing the cup 111 to axially detach from the base 120.
[0038] In the sample cup 100 provided in this application, the base 120 and the cup body 111 are connected by a groove structure 130 and a protrusion structure 140, restricting the cup body 111 from axially detaching from the base 120. When the groove structure 130 and the protrusion structure 140 rotate relative to each other, allowing the cup body 111 to axially detach from the base 120, the cup body 111 can be removed from the base 120. In use, the sample cup 100 provided in this application allows the base 120 to be installed on the bottom wall of the sample chamber of a scanning electron microscope. When changing samples or adjusting the height of the observed sample, only the cup body assembly 110 needs to be removed for adjustment. Because the base 120 and the cup body 111 are connected by the groove structure 130 and the protrusion structure 140, they can be quickly disassembled. Therefore, using the sample cup 100 provided in this application allows for faster sample replacement.
[0039] In some implementations, such as Figure 5 and Figure 6 As shown, the groove structure 130 includes a groove wall 131. The protrusion structure 140 can be inserted into the groove structure 130 along its axial direction and then rotated, so that the groove wall restricts the cup body 111 from axially disengaging from the base 120. The axial direction of the groove structure 130 is the same as the thickness direction of the groove wall. When the protrusion structure 140 is inserted into the groove structure 130, the axial direction of the cup body 111 is parallel to the axial direction of the groove structure 130. In this embodiment, after the protrusion structure 140 is inserted into the groove structure 130 and then rotated, the groove wall can be positioned on the movement path of the protrusion structure 140 along the axial direction of the groove structure 130. Therefore, when the protrusion structure 140 moves along the axial direction of the groove structure 130, it is restricted by the groove wall, which restricts the cup body 111 from axially disengaging from the base 120. Furthermore, a notch 1311 for the protrusion structure 140 to be inserted into the groove structure 130 can be provided in the groove wall.
[0040] In some embodiments of this application, a groove structure 130 may be provided in the first mounting area, and a protrusion structure 140 may be provided in the second mounting area; that is, the groove structure 130 may be provided on the base 120, and the protrusion structure 140 may be provided on the bottom of the cup body 111. Alternatively, a protrusion structure 140 may be provided in the first mounting area, and a groove structure 130 may be provided in the second mounting area; that is, the protrusion structure 140 may be provided on the base 120, and the groove structure 130 may be provided on the bottom of the cup body 111. Figure 6 In the illustrated embodiment, the groove structure 130 is disposed on the base 120. The groove structure 130 includes a groove wall, which includes a plurality of arc-shaped flanges. A notch 1311 is formed between the ends of two adjacent flanges. The protrusion structure 140 has protrusions 142, the number and position of which correspond to the number and position of the notches 1311 in the groove wall. The notches 1311 allow the protrusions 142 in the protrusion structure 140 to be inserted into the groove structure 130 axially. In this case, rotating the cup body 111 causes the protrusions 142 to move below the flanges of the groove wall, thereby restricting the movement of the protrusions 142 and thus preventing the cup body 111 from axially detaching from the base 120.
[0041] In some embodiments, the surface of the protruding structure 140 is provided with a recess 141, and the groove wall 131 of the groove structure 130 is provided with an elastic element 151 and a moving element 152. During the relative rotation of the groove structure 130 and the protruding structure 140, the moving element 152 can be pressed into the recess 141 under the action of the elastic element 151. During the relative rotation of the cup body 111 and the base 120, the groove structure 130 and the protruding structure 140 will also rotate relative to each other. When the rotation reaches the position where the moving element 152 is pressed into the recess 141 under the action of the elastic element 151, the relative movement between the cup body 111 and the base 120 is hindered. When the external force driving the relative rotation of the cup body 111 and the base 120 is removed, the cup body 111 and the base 120 can remain relatively stationary under the limiting action of the moving element 152 and the recess 141, so as to facilitate the observation of the sample placed on the cup body assembly 110. In this embodiment, the moving part 152 can also be disengaged from the recess 141; that is, when a force is applied to the cup body 111 to drive the cup body 111 to rotate relative to the base 120, the moving part 152 can be disengaged from the recess 141 under the action of the external force, and the cup body 111 and the base 120 continue to rotate relative to each other until the protrusion structure 140 can be disengaged from the groove structure 130 along the axial direction. Then, a force along the axial direction of the groove structure 130 is applied to the cup body 111, and the cup body assembly 110 can be disassembled from the base 120.
[0042] In embodiments of this application, the elastic member 151 and the moving member 152 may be disposed in the groove structure 130, and the recessed portion 141 may be disposed in the protruding structure 140; alternatively, the elastic member 151 and the moving member 152 may be disposed in the protruding structure 140, and the recessed portion 141 may be disposed in the groove structure 130. Figure 4 In the embodiment shown, the elastic element 151 and the moving element 152 are disposed in the groove structure 130. Specifically, the elastic element 151 is disposed in the groove wall of the groove structure 130, and the moving element 152 is located at the end of the elastic element 151 away from the cup assembly; the recessed portion 141 is disposed in the protruding structure 140.
[0043] Furthermore, in some implementations, such as Figure 4 and Figure 6 As shown, the elastic element 151 and the moving element 152 can be provided by using existing structures such as spring set screw 150. The spring in the spring set screw 150 is the elastic element 151 in this solution, and the spherical structure in the spring set screw 150 is the moving element 152 in this solution.
[0044] In some embodiments, the recess 141 is a downwardly recessed structure capable of accommodating the moving member 152; for example, the recess 141 may be a pit with a curved or spherical surface. In other embodiments, the recess 141 may also be a hole-like structure, such as a blind hole or a through hole.
[0045] In the embodiments of this application, such as Figure 2 and Figure 6 As shown, the cup assembly 110 also includes a sample pin fixing plate 112 and a lifting column 113. The sample pin fixing plate 112 is used to place the sample. The sample pin fixing plate 112 is connected to the end of the lifting column 113 away from the cup body 111. The lifting column 113 is variably connected to the cup body 111 to change the distance between the sample pin fixing plate 112 and the cup body 111. In this embodiment, since the lifting column 113 is variably connected to the cup body 111 to change the distance between the sample pin fixing plate 112 and the cup body 111, the position of the sample can be changed for better observation of the sample.
[0046] In some implementations, such as Figure 5 and Figure 6 As shown, a strip-shaped hole 1111 is provided on the side wall of the cup body 111, and a locking component 114 is provided in the strip-shaped hole 1111. One end of the lifting column 113 extends into the cup body 111, and the locking component 114 is connected to the lifting column 113. The locking component 114 has a first state and a second state. In the first state, the locking component 114 can fix the cup body 111 and the lifting column 113 relative to each other. In the second state, the locking component 114 can move along the strip-shaped hole 1111 with the lifting column 113 relative to the cup body 111. In this embodiment, when the locking component 114 is in the first state, the cup body 111 and the lifting column 113 are relatively fixed for observation of the sample. When the locking component 114 is in the second state, it can move with the lifting column 113 relative to the cup body 111, thereby changing the relative position between the lifting column 113 and the cup body 111 and thus changing the height of the sample. Then, by returning the locking component 114 to the first state, the lifting column 113 and the cup body 111 are fixed in the new relative position. The slotted hole 1111 guides and restricts the relative movement between the locking component 114, the lifting column 113, and the cup body 111.
[0047] In some implementations, such as Figure 6 As shown, the locking component 114 can be a bolt as in the prior art. The lifting column 113 is provided with a threaded hole 1131. The bolt includes a threaded portion and a head, wherein the threaded portion is connected to the lifting column 113 through the threaded hole 1131, so that the locking component 114 can move together with the lifting column 113. During the process of screwing the bolt into the threaded hole 1131, the head of the bolt can abut against the cup body 111 to restrict the movement of the lifting column 113 relative to the cup body 111. At this time, the locking component 114 is in the first state. In other embodiments, the locking component 114 can also be a hand-tightening screw as in the prior art.
[0048] In some implementations, such as Figure 4As shown, one axial end of the lifting column 113 is connected to the cup body 111, and the other axial end is connected to the sample pin fixing plate 112; the compression direction of the elastic member 151 is parallel to the axial direction of the lifting column 113; the side of the sample pin fixing plate 112 away from the base 120 is used to set the sample. In this embodiment, when the elastic member 151 presses the moving member 152 into the recess 141, the elastic member 151 also applies a force to the cup body 111, and this force is parallel to the compression direction of the elastic member 151. Therefore, the force applied by the elastic member 151 to the cup body 111 is parallel to the axial direction of the lifting column 113, locking the base 120 and the cup body 111 together. The contact surfaces are squeezed together, thus ensuring a tight fit, thereby ensuring the stability of the locking between the cup body 111 and the base 120, and ensuring the parallelism between the side of the sample pin fixing plate 112 away from the base 120 and the mounting plane of the base 120, so that the height of the samples set on the same side of the sample pin fixing plate 112 is consistent. The mounting plane of the base 120 is the stage surface of the sample stage in the scanning electron microscope.
[0049] In some implementations, such as Figure 4 and Figure 6 As shown, the sample pin fixing plate 112 has multiple mounting holes 1121 on the side facing away from the lifting column 113, and a crown spring 160 is installed in the mounting hole 1121; the crown spring 160 is used to connect the sample pin inserted into the mounting hole 1121. Connecting the sample pin through the crown spring 160 facilitates the replacement of the sample pin and makes sample replacement convenient.
[0050] This application also provides a scanning electron microscope, including a sample stage and a sample cup 100 provided in this application, with a base 120 fixedly connected to the sample stage. In some embodiments, the base 120 can be locked to the sample stage by a threaded connection. When it is necessary to change the sample, the cup body 111 can be rotated to allow relative rotation between the cup body 111 and the base 120. Then, the cup body assembly 110 can be removed axially. After the sample is changed, the protrusion structure 140 is inserted into the groove structure 130, and then the cup body 111 is rotated so that the groove structure 130 restricts the cup body 111 from axially disengaging from the base 120. Using the sample cup 100 and the scanning electron microscope provided in this application, the cup body assembly 110 in the sample cup 100 can be easily assembled and disassembled.
[0051] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A sample cup for a scanning electron microscope, characterized in that, The device includes a base and a cup assembly. The cup assembly includes a cup body. The base has a first mounting area, and the bottom of the cup body has a second mounting area. The first mounting area and the second mounting area are provided with mutually cooperating groove structures and protruding structures. When installing the cup body, the cup body is placed on the base. The groove structure and the protruding structure cooperate with each other and can rotate relative to each other to prevent the cup body from axially detaching from the base. When disassembling the cup body, the groove structure and the protruding structure rotate relative to each other, allowing the cup body to axially detach from the base.
2. The sample cup according to claim 1, characterized in that, The groove structure includes a groove wall, and the protrusion structure can be inserted into the groove structure along the axial direction and then rotated so that the groove wall restricts the cup body from axially detaching from the base.
3. The sample cup according to claim 1, characterized in that, The surface of the protruding structure is provided with a recessed portion, and the groove wall of the groove structure is provided with an elastic element and a moving element; during the mutual rotation of the groove structure and the protruding structure, the moving element can be pressed into the recessed portion under the action of the elastic element, and the moving element can also be disengaged from the recessed portion.
4. The sample cup according to claim 3, characterized in that, The elastic element is a spring in a compressed state, the moving element is a rotatable spherical structure, and one end of the elastic element abuts against the moving element; the recessed portion is a through-hole structure.
5. The sample cup according to claim 3, characterized in that, The cup assembly also includes a sample pin fixing plate and a lifting column; the sample pin fixing plate is used to place the sample; the sample pin fixing plate is connected to the end of the lifting column away from the cup body, and the lifting column is variably connected to the cup body to change the distance between the sample pin fixing plate and the cup body.
6. The sample cup according to claim 5, characterized in that, The side wall of the cup body is provided with a strip-shaped hole, and a locking component is provided in the strip-shaped hole; one end of the lifting column extends into the cup body, and the locking component is connected to the lifting column; the locking component has a first state and a second state; in the first state, the locking component can fix the cup body and the lifting column relative to each other, and in the second state, the locking component can move along the strip-shaped hole with the lifting column relative to the cup body.
7. The sample cup according to claim 6, characterized in that, The locking assembly includes a bolt, and the lifting column is provided with a threaded hole; the bolt includes a threaded portion and a head, the threaded portion is connected to the threaded hole, and the head can abut against the cup body to restrict the movement of the lifting column relative to the cup body.
8. The sample cup according to claim 5, characterized in that, One axial end of the lifting column is connected to the cup body, and the other axial end is connected to the sample nail fixing plate; the compression direction of the elastic element is parallel to the axial direction of the lifting column; the side of the sample nail fixing plate away from the base is used to set the sample.
9. The sample cup according to claim 8, characterized in that, The sample nail fixing plate has multiple mounting holes on the side facing away from the lifting column, and a crown spring is installed in each mounting hole; the crown spring is used to connect the sample nail inserted into the mounting hole.
10. A scanning electron microscope, characterized in that, It includes a sample stage and a sample cup as provided in any one of claims 1-9, wherein the base is fixedly connected to the sample stage.