Ceramic coated heat exchange drum with nozzles, non-sealing deck and sealing deck
By using a curved surface design of the cooling roller during the lithium deposition process, combined with dielectric sections, sealed and unsealed mesa, trenches and gas inlets, the problems of substrate thermal damage and low deposition rate are solved, achieving efficient and uniform lithium deposition and increased yield.
CN122422571APending Publication Date: 2026-07-17ELEVATED MATERIALS GERMANY GMBH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- ELEVATED MATERIALS GERMANY GMBH
- Filing Date
- 2024-10-18
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
In existing technologies, the substrate is easily damaged by heat during lithium deposition, resulting in wrinkles and tears, and the lithium deposition rate is low, affecting the yield.
Method used
The cooling drum design includes curved surfaces, dielectric sections, sealed and unsealed platforms, grooves, and gas inlets. By adjusting the gap pressure and gas flow, uniform temperature control and efficient lithium deposition are achieved.
Benefits of technology
It improves lithium deposition rate, reduces substrate damage, enhances yield, optimizes substrate temperature uniformity, and reduces costs.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN122422571A_ABST
Abstract
本公开内容提供了一种冷却滚筒。所述冷却滚筒包括弯曲滚筒表面，所述弯曲滚筒表面用于支撑基板，所述弯曲滚筒表面包括介电部分、多个密封台面、多个非密封台面、多个沟槽以及设置在所述多个密封台面和所述多个非密封台面上的多个气体入口。
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