source bottle

Abstract

The application discloses a source bottle, and belongs to the technical field of semiconductor processing. The source bottle comprises a first bottle body, a second bottle body and a driving assembly. The first bottle body is provided with an air inlet and an air outlet, and comprises a first sidewall and a top wall which are fixedly connected. The second bottle body comprises a second sidewall and a bottom wall. The bottom wall is fixedly and sealingly connected to one end of the second sidewall. The other end of the second sidewall is fixedly connected to the inner wall of the first sidewall. The bottom wall, the second sidewall, the first sidewall and the top wall form a containing cavity. The containing cavity is used for containing a reaction source. The air inlet and the air outlet are communicated with the containing cavity. The second sidewall comprises an extensible corrugated portion. The driving assembly is arranged on the side of the bottom wall away from the second sidewall. The driving assembly is used for driving the bottom wall to move along the thickness direction of the bottom wall, and making the extensible corrugated portion to produce expansion and contraction deformation in the thickness direction. The source bottle can solve the problem that the output of the reaction source is reduced with the continuous reduction of the residual amount of the reaction source, and the uniformity of the film layer formed by the process is relatively poor.

Description

Technical Field

[0001] This application belongs to the field of semiconductor processing technology, specifically relating to a source bottle. Background Technology

[0002] Vapor deposition is an important process in semiconductor manufacturing. In this process, the precursor is usually contained in a source bottle, and by supplying a carrier gas into the source bottle, the carrier gas can carry the source vapor located above the liquid surface in the source bottle into the process chamber to complete the process reaction.

[0003] However, as the process continues, the precursor in the source bottle is continuously consumed, and the liquid level gradually decreases. This causes the pressure of the source vapor above the liquid surface in the source bottle to gradually decrease, which in turn causes the amount of source vapor carried by the carrier gas to gradually decrease. As a result, the thickness of the film formed by the process decreases, which has a significant adverse effect on the uniformity of the film. Summary of the Invention

[0004] The purpose of this application is to provide a source bottle to solve the problem that the output of the reaction source decreases as the remaining amount of the source source decreases, resulting in relatively poor uniformity of the film layer formed by the process.

[0005] This application discloses a source bottle, which includes a first bottle body, a second bottle body, and a driving assembly, wherein... The first bottle has an air inlet and an air outlet, and the first bottle includes a first side wall and a top wall that are fixedly connected. The second bottle includes a second side wall and a bottom wall. The bottom wall is fixedly and sealed to one end of the second side wall, and the other end of the second side wall is fixedly connected to the inner wall of the first side wall. The bottom wall, the second side wall, the first side wall, and the top wall form a receiving cavity, which is used to receive the reaction source. The air inlet and the air outlet are both connected to the receiving cavity. The second sidewall includes a retractable corrugated portion. The driving assembly is disposed on the side of the bottom wall opposite to the second sidewall. The driving assembly is used to drive the bottom wall to move along the thickness direction of the bottom wall and to cause the retractable corrugated portion to undergo expansion and contraction deformation in the thickness direction.

[0006] This application discloses a source bottle, the first bottle body of which has an air inlet and an air outlet. The first bottle body includes a first side wall and a top wall fixedly connected. One end of the second side wall of the second bottle body is fixedly connected to the inner wall of the first side wall, and the bottom wall of the second bottle body is fixedly connected to the other end of the second side wall, so that the bottom wall, the second side wall, the first side wall, and the top wall can form a receiving cavity for accommodating the reaction source. At the same time, the air inlet and the air outlet provided on the first bottle body are both in communication with the receiving cavity, so that the carrier gas outside the source bottle can enter the receiving cavity through the air inlet, and carry the vaporized reaction source above the liquid surface in the receiving cavity to flow out of the source bottle through the air outlet to participate in the corresponding process.

[0007] Meanwhile, the second sidewall includes a retractable corrugated section, and a driving component is provided on the side of the bottom wall of the second bottle away from the second sidewall. The driving component can drive the bottom wall to move along the thickness direction of the bottom wall, and cause the retractable corrugated section to expand and contract in the aforementioned thickness direction, thereby achieving the purpose of changing the volume of the receiving cavity. In this process, the distance between the liquid surface of the reaction source and the top wall in the receiving cavity can also be changed, thereby changing the pressure of the reaction source in the vapor state above the liquid surface, and the amount of reaction source output with the carrier gas can also be changed accordingly.

[0008] Furthermore, during the process, as the remaining amount of reaction source in the containment cavity gradually decreases, the driving component can drive the bottom wall to gradually approach the top wall, thereby gradually reducing the volume of the containment cavity. This keeps the pressure of the reaction source in vapor state above the liquid surface basically constant, ensuring that the rate of reaction source output through the exhaust port with the carrier gas remains constant, thus improving the uniformity of the film layer. Attached Figure Description

[0009] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of the source bottle structure disclosed in the embodiments of this application; Figure 2 This is a schematic diagram of a portion of the structure of the source bottle disclosed in the embodiments of this application; Figure 3 for Figure 2 The diagram shown is a structural schematic of the structure in another direction; Figure 4 This is a schematic diagram of the assembly of the carrier plate in the source bottle disclosed in the embodiments of this application.

[0010] Figure label: 110 - First sidewall, 120 - Top wall 210 - Second sidewall, 211 - Expandable corrugated part, 212 - Shaping part, 220 - Bottom wall 310-Drive shaft, 311-Threaded hole, 320-Piston, 330-Cylinder block, 331-Piston chamber, 332-Drive chamber, 341-Ascending air pipe, 342-Descending air pipe, 350-Panel, 410 - Intake pipe, 420 - Exhaust pipe 510 - Mass flow meter, 520 - Temperature measuring element, 530 - Suction device, 541 - First valve, 542 - Second valve 610-Bearing plate, 611-Perforation, 620-Connector, 621-Stud, 622-Gland. Detailed Implementation

[0011] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0012] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0013] like Figures 1-4 As shown in the embodiment of this application, a source bottle is disclosed. The source bottle can contain a reaction source, so that the carrier gas can carry the vaporized reaction source out of the source bottle and deliver it to the process chamber for the corresponding process.

[0014] like Figure 1 The source bottle includes a first bottle body, a second bottle body, and a drive assembly. Both the first and second bottle bodies can be made of materials such as metal. Alternatively, since the first bottle body primarily serves as the external shell structure, it can also be made of materials such as quartz. To facilitate the processing of the source bottle, both the first and second bottle bodies are made of metal. Furthermore, welding can be used to securely connect the first and second bottle bodies, creating a relatively stable assembly relationship between them and ensuring a reliable seal at the connection point.

[0015] The first bottle has an air inlet and an air outlet, and includes a first side wall 110 and a top wall 120. The first side wall 110 and the top wall 120 are fixedly connected, providing a good mounting base for devices such as the temperature measuring element 520 mentioned below. During the assembly of the first and second bottles, at least a portion of the second bottle can be located inside the first side wall 110, thus providing better protection for the second bottle from the first bottle. The air inlet and air outlet can be located on the first side wall 110, or both can be located on the top wall 120. The air inlet allows carrier gas from outside the source bottle to enter the space between the first side wall 110 and the top wall 120, carrying the vaporized reaction source from the source bottle to the outside of the source bottle via the air outlet. The carrier gas can be nitrogen or air, etc.

[0016] Specifically, both the air inlet and exhaust outlet can be formed on the top wall 120 of the first bottle, which is positioned opposite to the bottom wall 220 of the second bottle. This results in a relatively large distance between the air inlet and exhaust outlet and the liquid surface of the reaction source in the source bottle, thereby preventing the carrier gas flow from disrupting the stability of the liquid surface of the reaction source in the source bottle and improving the uniformity of the reaction source delivery. Furthermore, the air inlet can be connected to one end of the air inlet pipe 410, and the exhaust outlet can be connected to one end of the exhaust pipe 420. The other end of the air inlet pipe 410 can be connected to the carrier gas source, and the other end of the exhaust pipe 420 can be connected to a process chamber or other mechanism.

[0017] In detail, the second bottle includes a second sidewall 210 and a bottom wall 220. The second sidewall 210 is a closed ring structure, and the bottom wall 220 is disposed opposite to the top wall 120. The bottom wall 220 is fixedly and sealed to one end of the second sidewall 210, thereby forming an open cylindrical structure with the bottom wall 220 and the second sidewall 210. This ensures that the second bottle has the capacity to contain the reaction source. Simultaneously, to ensure that the reaction source can be transported by the carrier gas entering the source bottle through the inlet and output to the outside of the source bottle through the exhaust port, in this embodiment, the other end of the second sidewall 210 is fixedly connected to the inner wall of the first sidewall 110, and the bottom wall 220, the first sidewall 110, the second sidewall 210, and the top wall 120 form a receiving cavity for containing the reaction source. Of course, the dimensions and other parameters of the first and second bottles can be flexibly selected according to actual needs, and this document does not impose any limitations on them.

[0018] Accordingly, in order to ensure that the reaction source can be normally transported to the outside of the source bottle through the receiving cavity, both the air inlet and the air outlet need to be connected to the receiving cavity. In other words, in the embodiments of this application, during the assembly of the first and second bottles, the second bottle needs to be positioned to avoid the air inlet and the air outlet, thereby ensuring that the air inlet and the air outlet, which are connected to the inner cavity, can still be connected to the receiving cavity. In the above embodiments, the air inlet and the air outlet can be both located on the top wall 120. In this case, the second bottle connected to the first side wall 110 will not substantially obstruct or block the air inlet and the air outlet.

[0019] To ensure a stable and satisfactory pressure of the vapor-state reaction source formed above the liquid surface within the source bottle, in this embodiment, the second sidewall 210 includes a retractable corrugated section 211. A driving assembly is disposed on the side of the bottom wall 220 opposite to the second sidewall 210. The driving assembly can drive the bottom wall 220 to move along its thickness direction, causing the retractable corrugated section 211 to expand and contract in the thickness direction. Specifically, the retractable corrugated section 211 is generally corrugated tubular. Intuitively, the retractable corrugated section 211 includes multiple closed-loop folds. The ends of any two adjacent folds are sealed together to form a tubular structure. In any two adjacent folds, one gradually extends inward while the other gradually extends outward, thus making the entire retractable corrugated section 211 corrugated and possessing good expansion and contraction capabilities.

[0020] As described above, in the source bottle disclosed in this application embodiment, the second bottle body is a variable volume structure. By changing the specific structure of the expandable corrugated part 211 in the second bottle body, the bottom wall 220 of the second bottle body can rise or fall relative to the first bottle body. Thus, the movement of the bottom wall 220 of the second bottle body can be controlled according to parameters such as the volume of the reaction source in the second bottle body, and the expandable corrugated part 211 can be stretched and deformed to achieve the purpose of changing the pressure of the reaction source in the vapor state inside the source bottle and improving the output stability of the reaction source.

[0021] More specifically, when the volume of the reaction source in the second bottle is relatively large, the bottom wall 220 of the second bottle can be moved downwards, that is, the bottom wall 220 is gradually moved away from the air inlet in the thickness direction. At the same time, the expandable corrugated part 211 is stretched and deformed, increasing the size of the expandable corrugated part 211 in the aforementioned thickness direction, thereby increasing the volume of the second bottle to reduce the pressure of the vapor state reaction source in the source bottle and reduce the output of the reaction source. Conversely, when the volume of the reaction source in the second bottle is relatively small, the bottom wall 220 of the second bottle can be moved upwards, that is, the bottom wall 220 is gradually moved closer to the air inlet in the thickness direction. At the same time, the expandable corrugated part 211 is compressed and deformed, reducing the size of the expandable corrugated part 211 in the aforementioned thickness direction, thereby reducing the volume of the second bottle to increase the pressure of the vapor state reaction source in the source bottle and increase the output of the reaction source.

[0022] This application discloses a source bottle, the first bottle body of which has an air inlet and an air outlet. The first bottle body includes a first side wall 110 and a top wall 120 fixedly connected. One end of the second side wall 210 of the second bottle body is fixedly connected to the inner wall of the first side wall 110, and the bottom wall 220 of the second bottle body is fixedly connected to the other end of the second side wall 210, so that the bottom wall 220, the second side wall 210, the first side wall 110, and the top wall 120 can form a receiving cavity for accommodating the reaction source. At the same time, the air inlet and the air outlet provided on the first bottle body are both connected to the receiving cavity, so that the carrier gas outside the source bottle can enter the receiving cavity through the air inlet, and carry the vaporized reaction source above the liquid surface in the receiving cavity to flow out of the source bottle through the air outlet to participate in the corresponding process.

[0023] Meanwhile, the second sidewall 210 includes a retractable corrugated section 211, and the bottom wall 220 of the second bottle body is provided with a driving assembly on the side opposite to the second sidewall 210. The driving assembly can drive the bottom wall 220 to move along the thickness direction of the bottom wall 220, and cause the retractable corrugated section 211 to expand and contract in the aforementioned thickness direction, thereby achieving the purpose of changing the volume of the receiving cavity. In this process, the distance between the liquid surface of the reaction source in the receiving cavity and the top wall 120 can also be changed, thereby changing the pressure of the reaction source in the vapor state above the liquid surface, and the amount of reaction source output with the carrier gas can also be changed accordingly.

[0024] Furthermore, during the process, as the remaining amount of reaction source in the containment cavity gradually decreases, the driving component can drive the bottom wall 220 to gradually approach the top wall 120, thereby gradually reducing the volume of the containment cavity. This keeps the pressure of the reaction source in vapor state above the liquid surface basically constant, ensuring that the rate of the reaction source output through the exhaust port with the carrier gas remains constant, thus improving the uniformity of the film layer.

[0025] As described above, the operating state of the drive assembly can be determined based on the remaining amount of reaction source in the source bottle. In other words, the operating state of the drive assembly can be determined based on the distance between the liquid level of the reaction source in the source bottle and the top wall 120 of the source bottle. For example, if the aforementioned distance is less than a preset distance, the drive assembly can be driven to move the bottom wall 220 away from the top wall 120 along the thickness direction of the bottom wall 220, and the expandable corrugated portion 211 can be stretched to reduce the height of the liquid level of the reaction source in the source bottle, thereby reducing the pressure of the vapor-state reaction source in the source bottle. Conversely, if the aforementioned distance is greater than the preset distance, the drive assembly can be driven to move the bottom wall 220 closer to the top wall 120 along the thickness direction of the bottom wall 220, and the expandable corrugated portion 211 can be compressed to increase the height of the liquid level of the reaction source in the source bottle, thereby increasing the pressure of the vapor-state reaction source in the source bottle.

[0026] Considering that the relationship between the liquid level (i.e. the distance between the liquid level and the top wall 120) and the pressure of the vapor-state reaction source is not linear, controlling the drive component using the distance between the liquid level and the top wall 120 may still not be able to accurately ensure that the pressure of the vapor-state reaction source meets the requirements.

[0027] Therefore, in another embodiment of this application, the source bottle may further include a mass flow meter 510. As described above, one end of the exhaust pipe 420 may be connected to an exhaust port, so that the carrier gas entering through the air inlet can carry the vaporized reaction source out of the source bottle through the exhaust port. Thus, the mass flow meter 510 can obtain the amount of reaction source discharged out of the source bottle, that is, it can more accurately determine the pressure of the vaporized reaction source inside the source bottle, thereby more precisely controlling the drive assembly to ensure that the pressure of the vaporized reaction source inside the source bottle meets the preset pressure.

[0028] In detail, the mass flow meter 510 is installed in the exhaust pipe 420. The mass flow meter 510 can detect the mass flow rate of the reaction source output in the exhaust pipe 420, and by comparing the detected value of the mass flow meter 510 with the preset value, the control purpose of the drive component can be achieved more accurately.

[0029] When the mass flow rate is lower than a preset range, the control drive component drives the bottom wall 220 to move and squeezes the retractable corrugated part 211, thereby moving the bottom wall 220 towards the top wall 120 to raise the page height of the reaction source in the source bottle. In this process, the volume of space above the liquid surface can be reduced, thereby increasing the pressure of the reaction source in the aforementioned space in a vapor state, so as to increase the mass flow rate of the reaction source output through the exhaust pipe 420, so that the mass flow rate of the reaction source can meet the preset range.

[0030] Accordingly, when the mass flow rate is higher than the preset range, the control drive component drives the bottom wall 220 to move and stretches the retractable corrugated part 211, thereby moving the bottom wall 220 away from the top wall 120 to reduce the page height of the reaction source in the source bottle. In this process, the volume of space above the liquid surface can be increased, thereby reducing the pressure of the reaction source in the aforementioned space in a vapor state, so as to reduce the mass flow rate of the reaction source output through the exhaust pipe 420, so that the mass flow rate of the reaction source can meet the preset range again.

[0031] As described above, the first bottle body can serve as the mounting base for the temperature measuring element 520. Specifically, the temperature measuring element 520 can be a thermocouple, which can be inserted into the top wall 120 of the first bottle body and extends into the receiving cavity. One end of the temperature measuring element 520 near the bottom wall 220 needs to extend below the liquid surface of the reaction source to measure the temperature of the liquid reaction source, thereby facilitating the temperature control of the reaction source. Based on this, in order to prevent the driving assembly from squeezing the temperature measuring element 520 during the process of driving the bottom wall 220 towards the top wall 120 and damaging the temperature measuring element 520, in this embodiment of the application, the second side wall 210 can also include a shaping portion 212, which is a structure with a fixed shape and cannot be deformed.

[0032] In this case, the first end of the retractable corrugated part 211 can be fixedly connected to the bottom wall 220, and the second end of the retractable corrugated part 211 can be fixedly connected to the shaping part 212. The end of the shaping part 212 away from the retractable corrugated part 211 is fixedly connected to the inner wall of the first side wall 110. At the same time, by designing parameters such as the extension dimension of the shaping part 212 in the thickness direction of the bottom wall 220 and the setting position of the temperature measuring element 520, the end of the temperature measuring element 520 near the bottom wall 220 can be located on the side of the second end of the retractable corrugated part 211 away from the bottom wall 220 in the thickness direction. To put it simply, taking the position of the bottom wall 220 as the bottom and the position of the top wall 120 as the top as the top, in this embodiment of the application, the lower edge of the shaping part 212 can be extended to below the lower end of the temperature measuring element 520. Thus, when the driving assembly drives the bottom wall 220 close to the top wall 120 and the retractable corrugated part 211 is squeezed, it can be ensured that the bottom wall 220 is always spaced apart from the temperature measuring element 520, so that the reliability of the temperature measuring element 520 is relatively high.

[0033] As described above, the drive assembly is used to drive the bottom wall 220 to move relative to the top wall 120, and to cause the retractable corrugated portion 211 to undergo telescopic deformation. That is, in this embodiment, the drive assembly is used to drive the bottom wall 220 to perform linear motion. Optionally, the drive assembly includes a rotary drive member and a transmission mechanism. The transmission mechanism can convert the rotary drive action of the rotary drive member into a linear drive action. The transmission mechanism can be a lead screw and nut mechanism. In another embodiment of this application, the drive assembly can also include a linear drive mechanism such as a linear motor, a cylinder, or a hydraulic cylinder. In this case, there is no need to configure a transmission mechanism, and the drive shaft 310 of the drive assembly can be directly connected to the bottom wall 220, ensuring that the drive assembly can drive the bottom wall 220 to move closer to or away from the top wall 120.

[0034] In another embodiment of this application, to improve the movement stability of the bottom wall 220, the drive assembly may include a drive shaft 310, a piston 320, a cylinder 330, and a drive member. One end of the drive shaft 310 engages with the bottom wall 220, and the other end of the drive shaft 310 is fixedly connected to the piston 320. The piston 320 is installed in the cylinder 330, and the drive member drives the piston 320 to move along the thickness direction. When the drive assembly includes the cooperating piston 320 and cylinder 330, the piston 320 can provide a buffering effect, thereby making the movement stability of the bottom wall 220 relatively higher. Furthermore, in this embodiment, the drive member may employ the aforementioned linear drive mechanism.

[0035] In another embodiment of this application, to further improve the movement stability of the bottom wall 220, the piston 320 can be moved relative to the cylinder 330 by using compressed gas to achieve the purpose of moving the bottom wall 220. In this case, the driving component can include an ascending air pipe 341 and a descending air pipe 342, wherein one end of the ascending air source is connected to the air source, and the cylinder 330 has a piston chamber 331 and a driving chamber 332 that are connected to each other. The piston 320 is movably mounted in the piston chamber 331. The other end of the ascending air pipe 341 and one end of the descending air pipe 342 are both connected to the driving chamber 332. Correspondingly, the other end of the descending air pipe 342 can be connected to a recovery and emission system such as plant exhaust using a suction device 530 such as a dry pump.

[0036] When the above-described technical solution of this application is adopted, when it is necessary to drive the bottom wall 220 closer to the top wall 120, gas can be supplied to the drive chamber 332 through the rising air pipe 341 by the air source, so as to drive the piston 320 to rise in the cylinder 330 by the gas, and then drive the bottom wall 220 to move closer to the top wall 120 by the drive shaft 310; conversely, when it is necessary to move the bottom wall 220 away from the top wall 120, the air source can be stopped from supplying gas to the drive chamber 332 through the rising air pipe 341, and the suction device 530 such as the dry pump can be operated to extract the gas in the drive chamber 332 by the descending air pipe 342. Under the action of air pressure, the piston 320 descends in the cylinder 330, and then the bottom wall 220 moves away from the top wall 120 by the drive shaft 310.

[0037] Of course, in order to further improve the control reliability of the drive chamber 332, in this embodiment, a first valve 541 can be provided on the rising air pipe 341 and a second valve 542 can be provided on the descending air pipe 342, so that the first valve 541 can control the on / off state between the rising air pipe 341 and the drive chamber 332, and the second valve 542 can control the on / off state between the descending air pipe 342 and the drive chamber 332.

[0038] As described above, the bottom wall 220 of the second bottle can cooperate with the drive shaft 310 in the drive assembly. Typically, the radial dimension of the drive shaft 310 is relatively small. Therefore, to prevent excessive pressure between the drive shaft 310 and the bottom wall 220 from adversely affecting the reliability of the second bottle, in one specific embodiment of this application, the source bottle may also include a support plate 610. The support plate 610 is fixedly connected to the drive shaft 310, and the bottom wall 220 is supported on the support plate 610. Of course, in this embodiment, in the direction perpendicular to the aforementioned thickness direction, the size of the support plate 610 is larger than the size of the drive shaft 310, thereby increasing the contact area between the bottom wall 220 and the support plate 610, reducing the pressure between them, and improving the reliability of the second bottle. Specifically, the drive shaft 310 and the support plate 610 can be fixedly connected by welding or other methods, and correspondingly, the bottom wall 220 and the support plate 610 can also be fixed to each other by welding or other methods.

[0039] In another embodiment of this application, the bottom wall 220 is detachably supported on the support plate 610. That is, there is no fixed connection between the bottom wall 220 and the support plate 610. When it is necessary to move the bottom wall 220 away from the top wall 120, the bottom wall 220 can be pressed against the support plate 610 by the weight of the reaction source and the second side wall 210. As the support plate 610 descends with the drive assembly, the bottom wall 220 descends together, and under the gravity of the reaction source, the expandable corrugated part 211 undergoes tensile deformation. With the above technical solution, on the one hand, it is convenient to separate the second bottle and the support plate 610; on the other hand, it can prevent the support effect between different positions of the bottom wall 220 and the support plate 610 from being different due to a fixed connection between the two, which would adversely affect the reliability of the second bottle.

[0040] To further improve the load-bearing reliability of the support plate 610, in one specific embodiment of this application, the support plate 610 and the bottom wall 220 can be made to have the same shape and size, so that the contact area between the two can be maximized. In other words, in a plane perpendicular to the thickness direction, the projection of the support plate 610 can cover the projection of the bottom wall 220.

[0041] Furthermore, the size of the support plate 610 can be larger than the size of the bottom wall 220. This allows the bottom wall 220 to be entirely located within the outer edge of the support plate 610 when supported on it. In this case, even if the expandable corrugated portion 211 in the second bottle body experiences some lateral movement, the support plate 610 can still provide good support for the bottom wall 220, resulting in higher stability of the bottom wall 220 during movement. Therefore, in a plane perpendicular to the thickness direction, the projection of the bottom wall 220 lies within the projection of the outer edge of the support plate 610.

[0042] As described above, since the second bottle includes a retractable corrugated section 211, during the use of the source bottle, the second bottle may move laterally relative to the first bottle, that is, the second bottle may move relative to the first bottle along a direction perpendicular to the aforementioned thickness. This will have an adverse effect on the stability of the liquid surface of the reaction source in the containment cavity, and thus affect the output stability of the reaction source.

[0043] Therefore, in this embodiment, the end of the first sidewall 110 away from the top wall 120 can be located on the side of the bottom wall 220 away from the top wall 120. That is, in this embodiment, the first sidewall 110 is integrally fitted outside the second bottle body, so that the first sidewall 110 can provide a function for the second bottle body in a direction perpendicular to the aforementioned thickness direction, preventing the second bottle body from generating excessive lateral displacement, which can also improve the structural reliability of the second bottle body.

[0044] Furthermore, the distance between the inner wall of the second sidewall 210 and the first sidewall 110 can be less than or equal to 2 mm. In this case, the lateral displacement of the second sidewall 210 can be limited to the greatest extent, ensuring good stability of the liquid surface of the reaction source in the containment cavity, thereby improving the output stability of the reaction source.

[0045] As described above, the support plate 610 can be fixedly connected to the drive shaft 310 by welding. In order to prevent the welding process from adversely affecting the levelness of the support plate 610 and reducing the fit between the support plate 610 and the bottom wall 220, in another embodiment of this application, a threaded connection can also be used to form a fixed connection between the support plate 610 and the drive shaft 310. In this case, the support plate 610 and the drive shaft 310 are also detachable, which facilitates the maintenance of both.

[0046] In detail, the source bottle also includes a connector 620, which includes a stud 621 and a cap 622 for fixed connection. The cap 622 functions similarly to a nut, but its size is larger than that of a conventional nut in the direction perpendicular to the aforementioned thickness direction. This results in a higher pressing effect and uniformity of the cap 622 on the support plate 610. For this purpose, the support plate 610 has a through hole 611, and the drive shaft 310 has a threaded hole 311. The stud 621 passes through the through hole 611 and is fixedly connected to the threaded hole 311, with the support plate 610 sandwiched between the cap 622 and the drive shaft 310. During the locking process of the stud 621 and the threaded hole 311, the cap 622 provides good covering and pressing action on the support plate 610, allowing the support plate 610 to be stably supported on the top surface of the drive shaft 310. Additionally, the cap 622 can also share some of the pressure load on the support plate 610.

[0047] To further improve the assembly stability of the bearing plate 610, a tray 350 can be provided on the top surface of the drive shaft 310. In the direction perpendicular to the aforementioned thickness direction, the dimensions of both the tray 350 and the pressure cap 622 are larger than the dimensions of the drive shaft 310. In this case, a relatively larger area of ​​the bearing plate 610 can be directly clamped between the pressure cap 622 and the tray 350, further improving the installation stability of the bearing plate 610. Furthermore, both the pressure cap 622 and the tray 350 can be circular structures, thereby ensuring relatively high installation stability at different locations on the bearing plate 610 in the direction surrounding the aforementioned thickness. Additionally, the through hole 611 can also be a circular through hole, and its diameter can be slightly larger than the diameter of the stud 621, ensuring that the stud 621 can pass through the through hole 611 while minimizing the potential lateral displacement of the bearing plate 610.

[0048] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0049] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A source bottle, characterized in that, It includes a first bottle body, a second bottle body, and a drive assembly, wherein, The first bottle has an air inlet and an air outlet, and the first bottle includes a first side wall (110) and a top wall (120) fixedly connected. The second bottle includes a second side wall (210) and a bottom wall (220). The bottom wall (220) is fixedly and sealed to one end of the second side wall (210), and the other end of the second side wall (210) is fixedly connected to the inner wall of the first side wall (110). The bottom wall (220), the second side wall (210), the first side wall (110), and the top wall (120) form a receiving cavity. The receiving cavity is used to receive the reaction source. The air inlet and the air outlet are both connected to the receiving cavity. The second sidewall (210) includes a retractable corrugated portion (211). The drive assembly is disposed on the side of the bottom wall (220) away from the second sidewall (210). The drive assembly is used to drive the bottom wall (220) to move along the thickness direction of the bottom wall (220) and to cause the retractable corrugated portion (211) to undergo expansion and contraction deformation in the thickness direction.

2. The source bottle according to claim 1, characterized in that, It also includes an exhaust pipe (420) and a mass flow meter (510). One end of the exhaust pipe (420) is connected to the exhaust port, and the mass flow meter (510) is installed on the exhaust pipe (420). The mass flow meter (510) is used to detect the mass flow rate of the reaction source output from the exhaust pipe (420). When the mass flow rate is lower than a preset range, the drive assembly is controlled to drive the bottom wall (220) to move and squeeze the retractable corrugated part (211). When the mass flow rate is higher than the preset range, the drive assembly is controlled to drive the bottom wall (220) to move and stretch the retractable corrugated part (211).

3. The source bottle according to claim 1, characterized in that, The first bottle body is equipped with a temperature measuring element (520), and the second side wall (210) also includes a shaping part (212). The first end of the retractable corrugated part (211) is fixedly connected to the bottom wall (220), and the second end of the retractable corrugated part (211) is fixedly connected to the shaping part (212). The end of the shaping part (212) away from the retractable corrugated part (211) is fixedly connected to the inner wall of the first side wall (110). In the thickness direction, the end of the temperature measuring element (520) near the bottom wall (220) is located on the side of the second end of the retractable corrugated part (211) away from the bottom wall (220).

4. The source bottle according to claim 1, characterized in that, The drive assembly includes a drive shaft (310), a piston (320), a cylinder (330), and a drive member. One end of the drive shaft (310) is engaged with the bottom wall (220), and the other end of the drive shaft (310) is fixedly connected to the piston (320). The piston (320) is installed in the cylinder (330), and the drive member is used to drive the piston (320) to move along the thickness direction.

5. The source bottle according to claim 4, characterized in that, The drive unit includes an ascending air pipe (341) and a descending air pipe (342). The cylinder (330) has a piston chamber (331) and a drive chamber (332) that are interconnected. The piston (320) is movably mounted in the piston chamber (331). The ascending air pipe (341) and the descending air pipe (342) are both connected to the drive chamber (332).

6. The source bottle according to claim 4, characterized in that, It also includes a support plate (610), which is fixedly connected to the drive shaft (310), and the bottom wall (220) is detachably supported on the support plate (610).

7. The source bottle according to claim 6, characterized in that, In a plane perpendicular to the thickness direction, the projection of the bearing plate (610) overlaps the projection of the bottom wall (220).

8. The source bottle according to claim 6, characterized in that, It also includes a connector (620), which includes a stud (621) and a cap (622) for fixed connection. The bearing plate (610) is provided with a through hole (611), and the drive shaft (310) is provided with a threaded hole (311). The stud (621) passes through the through hole (611) and is fixedly connected to the threaded hole (311). The bearing plate (610) is sandwiched between the cap (622) and the drive shaft (310).

9. The source bottle according to claim 1, characterized in that, The end of the first sidewall (110) away from the top wall (120) is located on the side of the bottom wall (220) opposite to the top wall (120).

10. The source bottle according to claim 9, characterized in that, The distance between the second sidewall (210) and the inner wall of the first sidewall (110) is less than or equal to 2 mm.

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