Quickly dismounting wafer carrier

Abstract

The application provides a wafer carrier capable of being quickly disassembled. A locking mechanism and a locking mechanism are arranged between a carrier body and a base, and a driving mechanism is used to drive a locking part to switch between a locking position and an unlocking position. When the locking part is in the locking position, it penetrates the locking mechanism and is inserted into a locking hole on the base, thereby limiting the locking state on the basis of axial locking of the locking mechanism. After the carrier body and the base are locked, the locking part penetrates the locking mechanism and is inserted into the locking hole, which can limit the movement of the carrier body relative to the base in the circumferential direction, reduce the possibility of back-off or loosening of the carrier body, and improve the stability and vibration resistance of the connection between the carrier body and the base. Meanwhile, the position of the locking part is switched by the driving mechanism, so that the locking and unlocking operations can be quickly completed without the need to disassemble additional fasteners. In addition, the reliability of the connection between the carrier body and the base is ensured, and the disassembly efficiency of the carrier is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a quick-release wafer carrier. Background Technology

[0002] In semiconductor manufacturing and precision machining equipment, the stage is used to support wafers or workpieces and serves as a critical process execution component. Its installation stability and replacement efficiency directly affect the processing accuracy and production efficiency of the equipment. Existing stages are usually fixed to the base with bolts or multi-point fasteners. During disassembly and assembly, multiple fasteners need to be loosened or tightened one by one. This is not only cumbersome and time-consuming, but also prone to positioning errors during repeated installation, affecting processing consistency.

[0003] To improve assembly and disassembly efficiency, some existing technologies use snap-fit ​​or wedge-shaped structures for quick locking. However, these structures typically rely solely on locking engagement for fixation, making them susceptible to loosening due to vibration or thermal deformation during equipment operation, leading to platform position displacement. Furthermore, existing structures often fail to effectively distinguish between locking and stop functions, lacking a secondary constraint mechanism for the locked state, making it difficult to balance rapid assembly with high-reliability connections. Summary of the Invention

[0004] The technical problem to be solved by this application is to provide a quick-release wafer stage, which solves the problem of low disassembly and assembly efficiency caused by the reliance on multiple fasteners in the prior art.

[0005] To address the aforementioned technical problems, this application provides a quick-release wafer stage, comprising a base and a stage body, wherein the stage body is detachably mounted on the base, characterized in that it further comprises: A locking mechanism is provided on the base and the platform body, and the locking mechanism is used to lock the platform body axially after the platform body is connected to the base. A locking mechanism is provided on the platform body. The locking mechanism includes a locking member. The locking member has a locking position and an unlocking position along the radial direction of the platform body, and the position of the locking member corresponds to the position of the locking mechanism along the circumferential direction of the platform body. A drive mechanism, connected to the platform body, is used to drive the locking member to move between the locked position and the unlocked position, wherein: When the locking member is in the locked position, the locking member passes through the locking mechanism and is inserted into the locking hole on the base. When the locking member is in the unlocked position, the locking member is separated from the locking mechanism and the locking hole.

[0006] Optionally, the locking mechanism includes: A locking block protrudes from the outer side wall of the platform body; The base has an open receiving cavity, the locking groove is recessed in the inner wall of the receiving cavity, and the locking block is adapted to the locking groove.

[0007] Optionally, there may be multiple locking blocks, which are evenly spaced along the circumference of the platform body.

[0008] Optionally, the locking block is provided with a first inclined surface, and the locking groove is provided with a second inclined surface, wherein the first inclined surface abuts against the second inclined surface.

[0009] Optionally, a guide groove is also provided on the side wall of the accommodating cavity. The guide groove and the locking groove are spaced apart and connected along the circumference of the base. The guide groove is used to guide the locking block.

[0010] Optionally, the locking block is provided with a plug hole that penetrates the locking block, and when the locking block is accommodated in the locking groove, the position of the plug hole corresponds to the position of the locking hole; When the locking member is in the locked position, the locking member passes through the insertion hole and is inserted into the locking hole.

[0011] Optionally, the drive mechanism further includes: A drive disk is rotatably connected inside the platform body. A first bevel gear structure is provided on one side of the drive disk, and a spiral drive structure is provided on the other side of the drive disk. The driving component is rotatably connected to the side wall of the platform body and is provided with a second bevel gear structure, which meshes with the first bevel gear structure. The locking member is provided with a drive groove, which engages with the helical drive structure.

[0012] Optionally, the platform body is provided with a mounting groove, and the driving component is rotatably connected to the mounting groove.

[0013] Optionally, the number of driving members is multiple, and the multiple driving members are evenly spaced along the circumference of the platform body.

[0014] Optionally, the drive disk is connected to a plurality of the locking elements in a transmission connection to drive the plurality of locking elements to move synchronously along the radial direction.

[0015] The beneficial effects of this application are as follows: Compared with the prior art, this application sets a locking mechanism and a stopping mechanism between the platform body and the base, and drives the locking member to switch between the locked position and the unlocked position by a drive mechanism. In the locked position, the locking member passes through the locking mechanism and is inserted into the locking hole on the base, thereby restricting the locking state based on the axial locking achieved by the locking mechanism. After the platform body and the base are locked, the locking member passes through the locking mechanism and is inserted into the locking hole, which can restrict the circumferential movement of the platform body relative to the base, reduce the possibility of the platform body retraction or loosening, and thus improve the stability and vibration resistance of the connection between the platform body and the base. At the same time, the position switching of the locking member by the drive mechanism allows the locking and unlocking operations to be completed quickly without disassembling additional fasteners, improving the assembly and disassembly efficiency of the platform while ensuring the reliability of the connection between the platform body and the base. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the platform body and the base after they are assembled in this application; Figure 2 This is a schematic diagram of the structure of the platform body after separation from the base in this application; Figure 3 This is a schematic diagram of the base structure in this application; Figure 4 This is a schematic diagram of the structure of the platform body in this application; Figure 5 This is a schematic diagram of the driving structure in this application; Figure 6 This is a schematic diagram of the drive disk structure in this application.

[0017] Explanation of reference numerals in the attached figures: 10. Base; 11. Receiving cavity; 20. Platform body; 21. Mounting groove; 22. Ejector pin; 30. Locking mechanism; 31. Locking block; 311. First inclined surface; 312. Insertion hole; 32. Locking groove; 321. Second inclined surface; 33. Guide groove; 40. Locking mechanism; 41. Locking element; 411. Drive groove; 42. Locking hole; 50. Drive mechanism; 51. Drive disc; 511. First bevel gear structure; 512. Helical drive structure; 52. Drive element; 521. Second bevel gear structure. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this application pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects. Unless otherwise specified, the term "connection" as used herein can refer to a direct connection or an indirect connection, i.e., a connection through an intermediate object.

[0019] Furthermore, it should be understood that the orientations or positional relationships indicated by terms such as "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" in this document are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. The terms "first" and "second" in this document are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "multiple" means two or more.

[0020] Please refer to the following: Figures 1 to 6 The present application will now describe a quick-release wafer stage.

[0021] To address the problems existing in the prior art, embodiments of this application provide a quick-release wafer stage, including a base 10 and a stage body 20, wherein the stage body 20 is detachably mounted on the base 10 and coaxially arranged with the base 10. The quick-release wafer stage also includes a locking mechanism 30, a locking mechanism 40, and a driving mechanism 50.

[0022] The locking mechanism 30 is disposed on the base 10 and the platform body 20, and is used to lock the platform body 20 after it is connected to the base 10. The locking mechanism 40 is disposed on the platform body 20, and includes a locking member 41. The locking member 41 has a locked position and an unlocked position along the radial direction of the platform body 20, and the position of the locking member 41 corresponds to the position of the locking mechanism 30 along the circumferential direction of the platform body 20. The driving mechanism 50 is connected to the platform body 20 and is used to drive the locking member 41 to move between the locked position and the unlocked position. When the locking member 41 is in the locked position, it passes through the locking mechanism 30 and is inserted into the locking hole 42 on the base 10. When the locking member 41 is in the unlocked position, it is separated from the locking mechanism 30 and the locking hole 42.

[0023] With the above structure, under the premise that the locking mechanism 30 achieves locking, the locking member 41 forms a through constraint, which transforms the original locking state that relies on the fit gap or friction to the locking state with rigid limiting characteristics, thereby improving the anti-loosening ability between the platform body 20 and the base 10.

[0024] Specifically, the locking mechanism 30 is located at the connection interface between the base 10 and the stage body 20. It applies axial constraint to the stage body 20 after it is installed on the base 10, ensuring a stable axial position for the stage body 20 relative to the base 10. It should be noted that this connection interface not only serves as an assembly positioning element but also a load transfer element. When the stage body 20 carries a wafer or experiences vibration loads during equipment operation, the load is transferred to the base 10 through the locking mechanism 30, thus forming a continuous force path and preventing localized stress concentration on the stage body 20.

[0025] In this application, it should be noted that "axial" refers to the axial direction of the base 10 and the platform body 20, and "radial" refers to the radial direction of the base 10 and the platform body 20.

[0026] Based on the locking mechanism 30, a locking mechanism 40 is also provided on the platform body 20. The locking mechanism 40 is fixedly connected to the platform body 20 and is correspondingly arranged with the locking mechanism 30 in the circumferential position, so that the locking mechanism 40 can be aligned with the locking mechanism 30 in the circumferential position. The locking mechanism 40 includes a locking member 41, which is slidably connected inside the platform body 20 and can switch between the locked position and the unlocked position in the radial direction. Since the locking mechanism 30 only forms an axial limit on the platform body 20, it still has degrees of freedom in the circumferential and local gap directions. After the locking member 41 passes through the locking mechanism 30 and is inserted into the locking hole 42, constraints are formed between the locking mechanism 30, the base 10 and the platform body 20 in both the axial and circumferential directions, eliminating some of the original degrees of freedom of the platform body 20, thereby realizing multi-directional restriction of the platform body 20 in the axial and circumferential directions.

[0027] The drive mechanism 50 is connected to the platform body 20 and is connected to the locking member 41 via a transmission connection. It is used to drive the locking member 41 to switch between the locked position and the unlocked position. The drive mechanism 50 converts the externally input rotational motion into the radial linear motion of the locking member 41, changing the operation mode from "linear push-pull" to "rotational drive" to facilitate operation.

[0028] When the locking member 41 is in the locked position, the locking member 41 passes through the locking mechanism 30 and is inserted into the locking hole 42 on the platform body 20, so that the locking mechanism 30 and the platform body 20 form a constraint that is both axial and circumferential, thereby restricting the platform body 20 in multiple directions, axially and circumferentially, during use; when the locking member 41 is in the unlocked position, the locking member 41 disengages from the locking mechanism 30 and the locking hole 42, so as to facilitate the disassembly of the platform body 20 from the base 10.

[0029] The locking mechanism 30 achieves basic locking between the platform body 20 and the base 10. The locking mechanism 40 forms a through-type limiting constraint on the locking mechanism 30, further restricting the degree of freedom of movement of the platform body 20 and preventing loosening or retraction under vibration or external force. Simultaneously, the drive mechanism 50 controls the position switching of the locking component 41, enabling rapid locking and unlocking processes, thereby improving the assembly and disassembly efficiency of the platform body 20 while ensuring connection reliability.

[0030] Furthermore, since the locking member 41 is positioned circumferentially to correspond with the locking mechanism 30 along the platform body 20, a fixed circumferential correspondence is formed between the locking mechanism 40 and the locking mechanism 30. Based on this positional relationship, during assembly, once the locking mechanism 30 completes its circumferential positioning, the locking member 41 also completes its circumferential positioning accordingly. Therefore, it is possible to align the locking member 41 with the locking mechanism 30 without requiring separate circumferential adjustments. Through this arrangement, the locking mechanism 30 and the locking mechanism 40 are linked during the circumferential positioning process, integrating the previously separate positioning steps into a single positioning operation. This simplifies the assembly process, reduces operational complexity, and improves assembly efficiency and positioning consistency. Simultaneously, since the locking member 41 and the locking mechanism 30 maintain a constant correspondence, the impact of assembly errors on the locking fit is reduced, improving the reliability of the locking action.

[0031] Compared with the prior art, this application provides a locking mechanism 30 and a locking mechanism 40 between the platform body 20 and the base 10, and a driving mechanism 50 drives the locking member 41 to switch between a locked position and an unlocked position. In the locked position, the locking member 41 passes through the locking mechanism 30 and is inserted into the locking hole 42 on the base 10, thereby restricting the locking state based on the axial locking achieved by the locking mechanism 30. After the platform body 20 and the base 10 are locked, the locking member 41 passes through the locking mechanism 30 and is inserted into the locking hole 42, which can restrict the circumferential movement of the platform body 20 relative to the base 10, reduce the possibility of the platform body 20 retraction or loosening, and thus improve the stability and vibration resistance of the connection between the platform body 20 and the base 10. Meanwhile, the position switching of the locking component 41 is achieved through the drive mechanism 50, so that locking and unlocking operations can be completed quickly without disassembling additional fasteners. This ensures the reliability of the connection between the platform body 20 and the base 10 while improving the assembly and disassembly efficiency of the platform.

[0032] In the embodiments of this application, a plurality of ejector pins 22 are provided on the stage body 20. The ejector pins 22 are spaced apart on the stage body 20 and can slide relative to the stage body 20 along the axial direction of the stage body 20. The plurality of ejector pins 22 are used to lift the wafer from the bearing surface of the stage body 20 after the wafer has been processed, so that the robot can perform pick-and-place operations on the wafer. The plurality of ejector pins 22 are distributed circumferentially around the stage body 20 to make the force on the wafer more uniform during the lifting process, thereby reducing the risk of wafer warping, displacement or breakage. Specifically, the plurality of ejector pins 22 are connected to an ejector pin drive mechanism, which is used to drive the plurality of ejector pins 22 to switch between an extended position and a retracted position. When the multiple ejector pins 22 are in the retracted position, the tips of the multiple ejector pins 22 are lower than or flush with the bearing surface of the stage body 20 to avoid interference with the normal adsorption and processing of the wafer; when the multiple ejector pins 22 are in the extended position, at least a portion of the structure of the multiple ejector pins 22 extends out of the bearing surface of the stage body 20, thereby lifting the wafer away from the stage body 20 for subsequent transfer.

[0033] In the embodiments of this application, the locking mechanism 30 includes a locking block 31 and a locking groove 32.

[0034] The locking mechanism 30 protrudes from the outer wall of the stage body 20 and is integrally formed with the stage body 20. The base 10 has a receiving cavity 11, which extends through the base 10 along its axial direction. The receiving cavity 11 is used to accommodate part of the structure of the stage body 20 and the ejector pin drive mechanism during assembly. Specifically, the stage body 20 is installed within the receiving cavity 11, and the end of the stage body 20 used to support the wafer extends to the outer side of the receiving cavity 11. The locking groove 32 is recessed into the inner wall of the receiving cavity 11. The locking block 31 can enter the receiving cavity 11 and engage with the locking groove 32 when the stage body 20 is installed onto the base 10.

[0035] The shape of the locking block 31 is adapted to the shape of the locking groove 32, so that after the locking block 31 enters the locking groove 32, it is limited by the locking groove 32 in the axial direction, thereby restricting the axial displacement of the platform body 20 relative to the base 10.

[0036] During assembly, as the platform body 20 moves toward the base 10, the locking block 31 enters the receiving cavity 11 and embeds itself within it after aligning with the locking groove 32, thus establishing an initial locking relationship between the platform body 20 and the base 10. The locking block 31 and the locking groove 32 form a contact engagement, providing axial constraint on the platform body 20 and preventing it from detaching from the base 10. This arrangement creates a snap-fit ​​relationship between the locking block 31 and the locking groove 32, providing axial limitation for the platform body 20 and thereby improving the stability of the connection between the platform and the base 10.

[0037] In the embodiments of this application, there are multiple locking blocks 31, and the multiple locking blocks 31 are evenly spaced along the circumference of the platform body 20.

[0038] Specifically, multiple locking blocks 31 are evenly distributed circumferentially on the platform body 20, so that after the platform body 20 and the base 10 are assembled and each locking block 31 engages with the corresponding locking groove 32 on the base 10, multiple engagement points are formed circumferentially. Through the above-mentioned multi-point engagement relationship, the connection between the platform body 20 and the base 10 is transformed from single-point force bearing to multi-point force bearing, which helps to distribute the load borne by the platform body 20 and improve the overall force uniformity.

[0039] Furthermore, since multiple locking blocks 31 are evenly spaced circumferentially, in the locked state, each locking block 31 forms a circumferential constraint on the platform body 20, thereby reducing the offset or tilting of the platform body 20 caused by uneven local force and improving the installation stability of the platform body 20 relative to the base 10. Simultaneously, during equipment operation, when subjected to external vibration or impact, each locking block 31 can work together to provide stable support for the platform body 20, thereby reducing the possibility of loosening between the platform body 20 and the base 10.

[0040] Meanwhile, multiple locking blocks 31 are evenly distributed in the circumference, forming a ring support structure between the platform body 20 and the base 10. When under stress, the load can be dispersed in the circumference, thereby reducing local contact stress and improving the overall structure's resistance to deformation.

[0041] In the embodiments of this application, the locking block 31 is provided with a first inclined surface 311, and the locking groove 32 is provided with a second inclined surface 321. The first inclined surface 311 and the second inclined surface 321 are arranged opposite to each other and abut against each other.

[0042] Specifically, the first inclined surface 311 and the second inclined surface 321 form an inclined surface fit relationship. During the process of the locking block 31 entering the locking groove 32, the two first contact and form a guiding fit, so that the locking block 31 is gradually guided in the predetermined direction when entering the locking groove 32, thereby reducing the jamming phenomenon caused by position deviation during the assembly process and improving the smoothness of assembly.

[0043] Furthermore, when the platform body 20 and the base 10 move relative to each other, the first inclined surface 311 and the second inclined surface 321 slide relative to each other, so that the locking block 31 is constrained in the axial direction under the action of the inclined surface, and generates a component force in the axial direction under the decomposition of the inclined surface force, thereby making the platform body 20 press against the base 10.

[0044] In the locked state, the first inclined surface 311 and the second inclined surface 321 maintain contact and engagement. On the one hand, the inclined surface contact provides guidance and constraint to the locking block 31, preventing it from shifting; on the other hand, the wedge-shaped engagement creates a pressing effect, thereby improving the stability of the connection between the platform body 20 and the base 10. Using the above technical solution, the first inclined surface 311 and the second inclined surface 321 serve as guides during assembly and as wedges during locking, allowing the locking block 31 to smoothly enter the locking groove 32 and achieve reliable locking.

[0045] In the implementation of this application, a guide groove 33 is also provided on the side wall of the accommodating cavity 11. The guide groove 33 and the locking groove 32 are spaced apart and connected along the circumference of the base 10. The guide groove 33 is used to guide the locking block 31.

[0046] The guide groove 33 not only constrains the movement path of the locking block 31, but also pre-corrects the locking block 31 during the initial assembly stage, ensuring it is close to the target position before entering the locking groove 32, thereby reducing the alignment error of the subsequent locking component 41. Based on this, during the assembly process of the platform body 20 and the base 10, the platform body 20 sequentially undergoes the introduction, alignment, and locking stages during installation: the platform body 20 first enters the receiving cavity 11 for introduction; under the guidance of the guide groove 33, the locking block 31 gradually aligns with the locking groove 32 to achieve alignment; and then, the locking component 41 is inserted to complete the final locking. Through the above-mentioned guidance and phased coordination, the assembly process is transformed from relying on manual alignment to a controlled introduction guided by the structure, thereby reducing assembly difficulty and improving assembly efficiency and accuracy.

[0047] Specifically, the guide groove 33 is set on the side wall of the receiving cavity 11 and extends along the axial direction of the base 10. The guide groove 33 communicates with the locking groove 32, allowing the locking block 31 to first enter the guide groove 33 before entering the locking groove 32. Under the guidance of the guide groove 33, the displacement of the locking block 31 corresponds to the position of the locking groove 32. Subsequently, by rotating the platform body 20, the locking block 31 enters and engages in the locking groove 32. Through the above arrangement, during the process of installing the platform body 20 on the base 10 and locking the groove 32, the guide groove 33 limits the movement path of the locking block 31, allowing the locking block 31 to enter the locking groove 32 according to a predetermined trajectory. This reduces the alignment difficulty during assembly, minimizes jamming or interference, and improves the smoothness and reliability of assembly. On the other hand, during the process of installing the platform body 20 on the base 10 and locking groove 32, the guide groove 33 is also used to pre-position the locking block 31, so that the locking block 31 is in the correct circumferential position before entering the locking groove 32, thereby reducing the difficulty of alignment and improving assembly efficiency and positioning accuracy.

[0048] In this application, the locking block 31 is provided with a insertion hole 312, which penetrates the locking block 31. When the locking block 31 is accommodated in the locking groove 32, the position of the insertion hole 312 corresponds to the position of the locking hole 42. When the locking member 41 is in the locked position, the locking member 41 penetrates the insertion hole 312 and is inserted into the locking hole 42.

[0049] Specifically, the insertion hole 312 extends radially along the movement direction of the locking member 41 and passes through the locking block 31, allowing the locking member 41 to pass through the locking block 31 during radial movement. The locking hole 42 is provided on the base 10 and located on the bottom wall of the locking groove 32, corresponding to the insertion hole 312 in spatial position, so that the locking member 41 can pass through the insertion hole 312 and enter the locking hole 42 in the locked state.

[0050] In terms of the mating relationship, after the locking block 31 enters the locking groove 32 and completes the locking engagement, the insertion hole 312 and the locking hole 42 are spatially aligned, thereby providing a channel for the insertion of the locking member 41; when the locking member 41 is in the locked position, the locking member 41 passes through the insertion hole 312 radially and is inserted into the locking hole 42.

[0051] With the above structure, the locking member 41 not only cooperates with the base 10 in the locked state, but also restricts the locking mechanism 30 by penetrating the locking block 31, thereby limiting the platform body 20 in the axial and circumferential directions, preventing the platform body 20 from moving relative to the base 10 in the axial and circumferential directions, thereby improving the stability of the locking state between the platform body 20 and the base 10.

[0052] In embodiments of this application, the drive mechanism 50 further includes a drive disk 51 and a drive element 52.

[0053] The drive disk 51 is rotatably connected to the inside of the platform body 20. A first bevel gear structure 511 is provided on one side of the drive disk 51, and a helical drive structure 512 is provided on the other side of the drive disk 51. The drive member 52 is rotatably connected to the side wall of the platform body 20 and is provided with a second bevel gear structure 521. The second bevel gear structure 521 meshes with the first bevel gear structure 511, so that when the drive member 52 rotates, the rotation of the drive member 52 is transmitted to the drive disk 51, causing the drive disk 51 to rotate around its axis.

[0054] The locking member 41 is provided with a drive groove 411, which engages with the screw drive structure 512. The drive member 52 is provided with an inner square groove or an inner hexagonal groove. When the drive disc 51 rotates, the screw drive structure 512 engages with the drive groove 411, converting the rotational motion of the drive disc 51 into a radial linear motion of the locking member 41, thereby driving the locking member 41 to move between the locked position and the unlocked position.

[0055] During operation, the rotational motion of the drive member 52 is transmitted to the drive disk 51 via the first bevel gear structure 511 and the second bevel gear structure 521. When the drive disk 51 rotates around its axis, the rotational motion is converted into the radial sliding motion of the locking member 41 through the engagement of the helical drive structure 512 and the drive groove 411. When the drive member 52 rotates clockwise, the drive disk 51 drives the locking member 41 from the unlocked position to the locked position and completes the insertion engagement with the locking hole 42; when the drive member 52 rotates counterclockwise, the drive disk 51 drives the locking member 41 from the locked position to the unlocked position, at which point the locking member 41 disengages from the locked position, thereby achieving unlocking.

[0056] By adopting the above technical solution, the rotation of the driving component 52 is sequentially transmitted to the driving disk 51 and the locking component 41, realizing the conversion of rotational motion to linear motion, and enabling the locking component 41 to stably switch between the locked position and the unlocked position, thereby improving the reliability of the locking and unlocking process.

[0057] In this application, the platform body 20 is provided with a mounting groove 21, and the driving component 52 is rotatably connected to the mounting groove 21.

[0058] Specifically, the mounting groove 21 is formed on the side wall of the platform body 20 to accommodate the drive component 52, so that the drive component 52 is at least partially embedded inside the platform body 20.

[0059] In this application, there are multiple driving elements 52, and the multiple driving elements 52 are evenly spaced along the circumference of the platform body 20.

[0060] Specifically, multiple drive components 52 are distributed circumferentially, enabling each drive component 52 to form a transmission relationship with the drive disk 51. During operation, when any drive component 52 is driven, it can transmit rotation to the drive disk 51 through the bevel gear structure, thereby driving the locking component 41 to move.

[0061] Furthermore, since multiple drive components 52 are evenly spaced along the circumference, the drive operation can be performed at different positions without the need to fix a single operation position, thereby improving the convenience of operation.

[0062] In addition, the arrangement of multiple driving components 52 can improve the stability of the driving process. In actual use, when one of the driving components 52 is restricted or inconvenient to operate, the driving can be achieved through other driving components 52, thereby improving the overall reliability of the structure.

[0063] Optionally, the drive disk 51 is connected to multiple locking elements 41 in a transmission manner to drive the multiple locking elements 41 to move synchronously in the radial direction.

[0064] Specifically, the drive disk 51 and each locking element 41 are connected by a transmission relationship through the engagement of the helical drive structure 512 and the drive groove 411, enabling the drive disk 51 to simultaneously apply driving force to multiple locking elements 41 when it rotates. Through this transmission relationship, the rotation of the drive disk 51 is converted into radial linear motion of each locking element 41.

[0065] During operation, when the drive disk 51 rotates, each locking component 41 moves synchronously to the locking position under the drive of the drive disk 51 and enters the corresponding insertion position; when the drive disk 51 rotates in the opposite direction, each locking component 41 moves synchronously to the unlocking position and exits the insertion state, thereby achieving overall unlocking.

[0066] By setting up as described above, multiple locking components 41 are driven by the same driving source, and their movement processes are consistent. This avoids situations where some parts are not locked or are not fully locked due to asynchronous movements of the locking components 41, which helps to improve the overall reliability and stability of the locking structure.

[0067] The above are merely specific embodiments of this application, but the protection scope of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in this application should be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the scope of the claims.

Claims

1. A quick-release wafer stage, comprising a base and a stage body, wherein the stage body is detachably mounted on the base, characterized in that, Also includes: A locking mechanism is provided on the base and the platform body, and the locking mechanism is used to lock the platform body axially after the platform body is connected to the base. A locking mechanism is provided on the platform body. The locking mechanism includes a locking member. The locking member has a locking position and an unlocking position along the radial direction of the platform body, and the position of the locking member corresponds to the position of the locking mechanism along the circumferential direction of the platform body. A drive mechanism, connected to the platform body, is used to drive the locking member to move between the locked position and the unlocked position, wherein: When the locking member is in the locked position, the locking member passes through the locking mechanism and is inserted into the locking hole on the base. When the locking member is in the unlocked position, the locking member is separated from the locking mechanism and the locking hole.

2. The quick-release wafer stage according to claim 1, characterized in that, The locking mechanism includes: A locking block protrudes from the outer side wall of the platform body; The base has an open receiving cavity, the locking groove is recessed in the inner wall of the receiving cavity, and the locking block is adapted to the locking groove.

3. The quick-release wafer stage according to claim 2, characterized in that, The number of locking blocks is multiple, and the multiple locking blocks are evenly spaced along the circumference of the platform body.

4. The quick-release wafer stage according to claim 2, characterized in that, The locking block has a first inclined surface, and the locking groove has a second inclined surface, with the first inclined surface abutting against the second inclined surface.

5. The quick-release wafer stage according to claim 2, characterized in that, The side wall of the accommodating cavity is also provided with a guide groove, which is spaced apart from and connected to the locking groove along the circumference of the base. The guide groove is used to guide the locking block.

6. The quick-release wafer stage according to claim 2, characterized in that, The locking block is provided with a plug hole that penetrates the locking block, and when the locking block is accommodated in the locking groove, the position of the plug hole corresponds to the position of the locking hole; When the locking member is in the locked position, the locking member passes through the insertion hole and is inserted into the locking hole.

7. The quick-release wafer stage according to claim 1, characterized in that, The drive mechanism also includes: A drive disk is rotatably connected inside the platform body. A first bevel gear structure is provided on one side of the drive disk, and a spiral drive structure is provided on the other side of the drive disk. The driving component is rotatably connected to the side wall of the platform body and is provided with a second bevel gear structure, which meshes with the first bevel gear structure. The locking member is provided with a drive groove, which engages with the helical drive structure.

8. The quick-release wafer stage according to claim 7, characterized in that, The platform body is provided with a mounting groove, and the driving component is rotatably connected to the mounting groove.

9. The quick-release wafer stage according to claim 8, characterized in that, The number of driving components is multiple, and the multiple driving components are evenly spaced along the circumference of the platform body.

10. The quick-release wafer stage according to claim 7, characterized in that, The drive disk is connected to multiple locking components in a transmission manner, so as to drive the multiple locking components to move synchronously along the radial direction.

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