MEMS gyroscope test system

Abstract

This invention pertains to sensor detection technology and relates to a MEMS gyroscope testing system. This system is the first to achieve convenient, rapid, and engineered gyroscope testing and data processing. The gyroscope under test is placed in a specially designed test fixture. Different test programs can be selected for different gyroscopes. After power-on, the useful digital signals are acquired and calculated by dedicated software to obtain the gyroscope's performance parameters.

Description

Technical Field

[0001] This invention relates to a MEMS gyroscope testing system. Background Technology

[0002] Silicon micromechanical vibration gyroscopes are emerging inertial sensing devices made from thin silicon wafers using semiconductor processing technology. Firstly, silicon is a thermosensitive material, and many of its properties are significantly affected by temperature. Furthermore, the resonator itself vibrates very little in the resonant state, and the electrical signal representing that displacement is also very weak, easily interfered with by the surrounding environment, making accurate and reliable measurement difficult. At the same time, testing parameters such as the stability and calibration coefficient of the entire gyroscope is crucial for evaluating its performance, and accurate measurement is of paramount importance. Secondly, the lack of efficient, batch testing methods for gyroscope products is also a pressing issue that needs to be addressed. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to propose a MEMS gyroscope testing system that can meet the requirements for testing the overall performance of MEMS gyroscopes.

[0004] The technical solution adopted in this invention is as follows:

[0005] The MEMS gyroscope testing system is characterized by comprising a dedicated MEMS gyroscope package housing (1), screws (2), fixture mounting holes (3), a fixture base plate (4), a dedicated test circuit board (5), connecting wires (6), a power supply (7), circuit board mounting posts (8), and a dedicated data processing unit (9). The dedicated MEMS gyroscope package housing (1) is mounted on the fixture base plate (4) by screws (2). The fixture base plate (4) has fixture mounting holes (3) and grooves (10). The fixture mounting holes (3) are placed on the dedicated MEMS gyroscope package housing (9). The gyroscope housing (1) is installed in a centralized position. The dedicated test circuit board (5) is installed at a 90-degree angle on the four sides of the fixture base plate (4) via the circuit board mounting posts (8). The dedicated test circuit board (5) is connected to the dedicated MEMS gyroscope housing (1) via the connecting wire (6), which is a shielded wire. The power supply (7) is connected to the dedicated test circuit board (5) to drive the gyroscope and supply power to the circuit board. The dedicated data processing unit (9) is connected to the dedicated test circuit board (5) to perform calculations on the output data of the gyroscope.

[0006] The groove on the fixture base plate (4) promotes heat dissipation. The fixture mounting hole (3) is placed at the position where the gyroscopes are most concentrated, which prevents mechanical coupling between the gyroscopes to the greatest extent. The circuit board mounting post (8) makes the dedicated test circuit board (5) close to the gyroscope being tested while preventing heat from acting on the gyroscope to the greatest extent, and takes into account the space occupied.

[0007] Furthermore, the MEMS gyroscope package housing (1) is a stainless steel gold-plated housing with insulators. The dedicated MEMS gyroscope package housing (1) provides vibration isolation and shielding against external electrical signals for the gyroscope chip, and also facilitates the installation of the gyroscope and the connection of leads.

[0008] Furthermore, the screw (2) is made of plastic. It serves to prevent cross-coupling of mechanical and electrical signals in the gyroscope.

[0009] Furthermore, the dedicated test circuit board (5) consists of a weak signal amplification circuit, a quantization circuit, and an FPGA, which realizes the pickup, amplification, and quantization of weak signals. The dedicated test circuit board (5) and the dedicated data processing unit (9) can accurately process the signals of the MEMS gyroscope, calculate the accurate parameter values ​​calibrated for the test items, and realize data testing and batch processing.

[0010] The advantages and beneficial effects of this invention are as follows: This invention is a simple and efficient testing device for complete MEMS gyroscopes, making it possible to accurately and in batches test complete gyroscopes. It has the advantages of being economical, practical, simple, and reliable. Experiments have proven that it can effectively and accurately measure the performance parameters of complete MEMS gyroscopes. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the MEMS gyroscope testing system of the present invention.

[0012] Figure 2 This is a schematic diagram of a dedicated test circuit board. Detailed Implementation

[0013] The present invention will now be described in detail with reference to the accompanying drawings.

[0014] The MEMS gyroscope testing system is characterized by comprising a dedicated MEMS gyroscope housing 1, screws 2, fixture mounting holes 3, a fixture base plate 4, a dedicated test circuit board 5, connecting wires 6, a power supply 7, circuit board mounting posts 8, and a dedicated data processing unit 9. The dedicated MEMS gyroscope housing 1 is mounted to the fixture base plate 4 by screws 2. The fixture base plate 4 has fixture mounting holes 3 and grooves 10. The fixture mounting holes 3 are positioned at the concentrated mounting locations of the dedicated MEMS gyroscope housing 1. The dedicated test circuit board 5 is mounted at a 90-degree angle to the four sides of the fixture base plate 4 by the circuit board mounting posts 8. The dedicated test circuit board 5 is connected to the dedicated MEMS gyroscope housing 1 by connecting wires 6, which are shielded wires. The power supply 7 is connected to the dedicated test circuit board 5 and is used to drive the gyroscope and supply power to the circuit board. The dedicated data processing unit 9 is connected to the dedicated test circuit board 5 and is used to process the output data of the gyroscope.

[0015] The groove on the fixture base plate 4 promotes heat dissipation, and the fixture mounting hole 3 is placed at the position where the gyroscopes are most concentrated to prevent mechanical coupling between the gyroscopes to the greatest extent. The circuit board mounting post 8 allows the dedicated test circuit board 5 to be close to the gyroscope being tested while preventing heat from acting on the gyroscope to the greatest extent, and also takes into account the space occupied.

[0016] The MEMS gyroscope package housing 1 is a gold-plated stainless steel housing with insulators. This dedicated MEMS gyroscope package housing 1 provides vibration isolation and shielding against external electrical signals for the gyroscope chip, while also facilitating the installation of the gyroscope and the connection of its leads.

[0017] Screw 2 is made of plastic. It serves to prevent cross-coupling of mechanical and electrical signals within the gyroscope.

[0018] The dedicated test circuit board 5 consists of a weak signal amplification circuit, a quantization circuit, and an FPGA. It realizes the acquisition, amplification, and quantization of weak signals. The dedicated test circuit board 5 and the dedicated data processing unit 9 can accurately process the signals of the MEMS gyroscope, calculate the accurate parameter values ​​calibrated for the test items, and realize data testing and batch processing.

[0019] This invention mounts a MEMS gyroscope chip into a dedicated MEMS gyroscope package, and a dedicated test circuit board is assembled according to requirements, such as... Figure 1 As shown. The specific operation steps are as follows:

[0020] 1. MEMS Gyroscope Installation: Open the dedicated MEMS gyroscope package housing, install the MEMS gyroscope whose overall performance needs to be tested into the package housing, and connect the housing pins according to the definitions;

[0021] 2. Installation of the dedicated test circuit board: See [link to dedicated test circuit board] Figure 2 A dedicated test circuit board is fixed according to the number and physical installation position of the MEMS gyroscopes under test. To avoid the temperature influence caused by redundant circuit boards, the dedicated test circuit board is installed according to the actual number of gyroscopes to be tested, and the signal lines of the MEMS gyroscopes are plugged into the mounting plug of the test circuit board as close as possible.

[0022] 3. Mode settings: Select the appropriate dedicated testing software for different gyroscope models, and set the sampling rate, sampling channels, sampling time, and data storage category;

[0023] 4. Measurement: Power on the gyroscope to bring it to a resonant operating state, and ensure the dedicated test circuit board is in normal working condition. Start the test.

[0024] 5. Calculation: The dedicated processing unit is activated to perform calculations on the digital signals output by the MEMS gyroscope and calculate the values ​​of its various parameters.

[0025] from Figure 1 As can be seen, the MEMS gyroscope testing system consists of fixtures 1, 2, 3, 4, and 8, a voltage source 7, a dedicated test circuit board 5, and a data acquisition and processing unit 9. The dedicated MEMS gyroscope housing 1 in the fixtures isolates the gyroscope chip from vibration and shields it from external electrical signals, while also facilitating gyroscope installation and lead connection. The screws 2, made of plastic, prevent mechanical and electrical signal cross-coupling of the gyroscope. The grooves on the fixture base plate 4 promote heat dissipation. The circuit board mounting posts 8 bring the dedicated test circuit board 5 close to the gyroscope while minimizing heat transfer to the gyroscope, taking into account space constraints. The fixture mounting holes 3 are placed at the most concentrated location of the gyroscopes to minimize mechanical coupling between them. First, the gyroscopes are installed, distributed according to the number of gyroscopes to be tested, with a maximum of 12 gyroscopes. Then, the corresponding dedicated test circuit boards are installed according to the physical installation positions of the gyroscopes, with a maximum of 4 dedicated test circuit boards. The data processing unit 9 includes data storage and data processing components. Different testing software can be selected based on the model of the gyroscope being tested, along with different data transmission types, acquisition frequencies, acquisition channels, and acquisition times. The data is processed according to the test requirements to directly obtain the complete table parameters.

[0026] Example

[0027] 1. Select a gyroscope, number it 1#, and install it into a dedicated MEMS gyroscope housing. Connect the gyroscope output to the housing pins with gold wire.

[0028] 2. Mount the gyroscope onto the fixture base plate 4 using 3mm diameter plastic screws;

[0029] 3. Install a dedicated test circuit board near the gyroscope and fix it to the fixture base plate 4 with the circuit board mounting post 8. The fixture base plate 4 is a 290mm×290mm×100mm stainless steel plate with a groove 20mm wide and 5mm deep.

[0030] 4. Use a standard DC power supply as the DC drive excitation source, and set the DC voltage to 5V and 15V. 15V powers the gyroscope, and 5V powers the dedicated test circuit board.

[0031] 5. According to Figure 1 Connect the dedicated test circuit board and the gyroscope using connecting cable 6, which is a 2cm long shielded cable. The digital signal is connected to the data processing unit 9.

[0032] 6. Open the data acquisition software of the data processing unit;

[0033] 7. After 30 minutes of data acquisition, the dedicated data processing module processed the signal to obtain the following result: the gyroscope's rate output was 0, and the frequency was 7704Hz.

[0034] After installation and debugging are completed, the MEMS gyroscope can be fully tested according to the specific implementation method.

Claims

1. A MEMS gyroscope testing system, characterized in that, The system includes a dedicated MEMS gyroscope package housing (1), screws (2), fixture mounting holes (3), a fixture base plate (4), a dedicated test circuit board (5), connecting wires (6), a power supply (7), circuit board mounting posts (8), and a dedicated data processing unit (9). The dedicated MEMS gyroscope package housing (1) is mounted to the fixture base plate (4) by screws (2). The fixture base plate (4) has fixture mounting holes (3) and grooves (10). The fixture mounting holes (3) are placed on the dedicated MEMS gyroscope package housing. 1) The dedicated test circuit board (5) is mounted at a 90-degree angle on the four sides of the fixture base plate (4) via the circuit board mounting posts (8). The dedicated test circuit board (5) is connected to the dedicated MEMS gyroscope package housing (1) via the connecting wire (6). The connecting wire (6) is a shielded wire. The power supply (7) is connected to the dedicated test circuit board (5) to drive the gyroscope and supply power to the circuit board. The dedicated data processing unit (9) is connected to the dedicated test circuit board (5) to perform calculations on the output data of the gyroscope.

2. The MEMS gyroscope testing system according to claim 1, characterized in that, The MEMS gyroscope housing (1) is a gold-plated stainless steel housing with insulators.

3. The MEMS gyroscope testing system according to claim 1, characterized in that, The screw (2) is made of plastic.

4. The MEMS gyroscope testing system according to claim 1, characterized in that, The dedicated test circuit board (5) consists of a weak signal amplification circuit, a quantization circuit and an FPGA.

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