Substrate handling device

Abstract

This invention provides a substrate handling apparatus that can more reliably transfer a substrate from a preceding process device. The substrate handling apparatus includes: a conveyor belt for transferring a substrate from the preceding process device; a drive source for rotating the conveyor belt; and a control device that controls the drive source to keep the rotation speed of the conveyor belt below the speed at which the substrate is transferred from the preceding process device before the front end of the substrate is transferred to the conveyor belt, and controls the drive source to accelerate the rotation speed of the conveyor belt based on the timing of the transfer of the front end of the substrate from the preceding process device to the conveyor belt, thereby transferring the substrate from the conveyor belt.

Description

Technical Field

[0001] This disclosure relates to a substrate handling apparatus for handling substrates. Background Technology

[0002] Conventionally, each apparatus in a manufacturing production line that mounts components onto a substrate includes a substrate transport device for transporting substrates. For example, Patent Document 1 describes a substrate transport device in a component mounting machine that positions a substrate at a mounting position for component mounting. The substrate transport device transports the substrate using a conveyor belt.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 10-200299 Summary of the Invention

[0006] The technical problem that the invention aims to solve

[0007] A substrate handling device moves substrates into a preceding process device, such as a substrate supply device or an intermediate conveyor device connecting the devices, and moves the substrates out to a subsequent process device. During substrate handling between the preceding and subsequent process devices, if the conveyor belt speeds differ, sufficient friction cannot be achieved between the conveyor belt and the substrate, resulting in the substrate handling device being unable to move the substrate.

[0008] This disclosure was made in view of the above-mentioned problems, and its object is to provide a substrate handling apparatus that can more reliably move a substrate from a previous process apparatus into the substrate.

[0009] Means for solving technical problems

[0010] To solve the above-mentioned technical problems, this specification discloses a substrate handling apparatus comprising: a conveyor belt for handling a substrate from a previous process device; a drive source for rotating the conveyor belt; and a control device for controlling the drive source to keep the rotation speed of the conveyor belt below the speed at which the previous process device handles the substrate before the front end of the substrate from the previous process device is transferred to the conveyor belt, and for accelerating the rotation speed of the conveyor belt based on the timing of the transfer of the front end of the substrate from the previous process device to the conveyor belt, thereby handling the substrate from the conveyor belt.

[0011] Invention Effects

[0012] According to the substrate handling apparatus of this disclosure, the rotational speed of the conveyor belt is controlled to be below the handling speed of the previous process device before the leading edge of the substrate, which has been moved from the previous process device, is transferred to the conveyor belt. This ensures the necessary frictional force for the conveyor belt to receive the substrate, enabling more reliable transfer of the substrate from the previous process device to the conveyor belt. In other words, substrate transfer errors can be suppressed. Furthermore, the substrate handling apparatus accelerates the rotational speed of the conveyor belt according to the timing of the leading edge of the substrate's transfer to the conveyor belt to perform substrate loading. Therefore, by ensuring more reliable substrate transfer and accelerating the transfer after a partial transfer, the time required for substrate loading can be shortened. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the substrate manufacturing production line 10 of the first embodiment.

[0014] Figure 2 This is a schematic diagram of screen printing machine 12.

[0015] Figure 3 This is a block diagram showing the electrical connections of the screen printing machine 12.

[0016] Figure 4 This is an explanatory diagram of the printing apparatus 41 and the process transfer apparatus 42.

[0017] Figure 5 This diagram shows the state in which the process transfer device 42 is raised.

[0018] Figure 6 It is a graph showing the relationship between rotational speed V and time in the first acceleration mode.

[0019] Figure 7 It is a graph showing the relationship between rotational speed V and time in the second acceleration mode.

[0020] Figure 8 (a) to (c) are graphs showing the relationship between the state of the substrate S being transported from the intermediate conveyor 21 to the screen printing machine 12 and the rotational speed V.

[0021] Figure 9 This is a graph showing the relationship between the rotational speed V and time in the second embodiment.

[0022] Figure 10 This is a schematic diagram of the screen printing machine 12A according to the third embodiment. Detailed Implementation

[0023] (Regarding substrate manufacturing production line 10)

[0024] Hereinafter, a substrate manufacturing production line, which is one embodiment of the present disclosure, will be described in detail with reference to the accompanying drawings. Figure 1The substrate manufacturing production line 10 of the first embodiment is schematically shown. (As shown) Figure 1 As shown, in the substrate manufacturing production line 10 of the first embodiment, a material storage tank 11, a screen printing machine 12, a component mounting machine 13, a reflow machine 14, and an inspection machine 15 are sequentially arranged from the upstream side of the manufacturing process in the production line. Furthermore, the five devices, including the material storage tank 11, are interconnected via intermediate conveyors 21-25. Additionally, in Figure 1 middle, Figure 1 The left side is the upstream side, and the right side is the downstream side. Additionally, the material storage device 11, screen printing machine 12, component mounting machine 13, reflow machine 14, and inspection machine 15 are sometimes collectively referred to as substrate handling devices 11-15. In the following description, the direction of the manufacturing process in the substrate manufacturing production line 10 will be referred to as... Figure 1 The direction to the right of the substrate is called the substrate transport direction. Figure 1 The vertical direction is called the up-down direction, which is the direction perpendicular to the substrate transport direction and the up-down direction (and). Figure 1 The direction orthogonal to the paper surface is referred to as the substrate width direction for explanation.

[0025] In addition, the substrate manufacturing production line 10 is equipped with a management PC (short for computer) 17 (see reference). Figure 3 The management PC 17 is a device that manages information about each device in the substrate manufacturing production line 10. The management PC 17 manages the progress status of each device in the manufacturing production line. The substrate handling devices 11-15 exchange data with the management PC 17 to obtain information about the substrates being produced, the progress status of other devices, etc.

[0026] The storage container 11 includes a storage device 31 and a process transfer device 32. The storage device 31 temporarily stores a substrate with a circuit pattern formed on it and sequentially supplies the substrate to the supply position 33 below it. The process transfer device 32 transfers the substrate from the supply position 33 of the storage device 31 to the transfer outlet 35 on the downstream side of the storage container 11. The screen printing machine 12 includes a printing device 41 and a process transfer device 42. The printing device 41 coats the substrate with a viscous fluid. The process transfer device 42 transfers the substrate from the transfer inlet 43 on the upstream side of the screen printing machine 12 through the printing position 44 below the printing device 41 to the transfer outlet 45 on the downstream side.

[0027] The component mounting machine 13 includes a component assembly device 51 and a process transfer device 52. The component assembly device 51 assembles electronic components onto a substrate fed from the screen printing machine 12. The process transfer device 52 transfers the substrate from the upstream inlet 53 of the component mounting machine 13 to the downstream outlet 55 via a mounting position 54 below the component assembly device 51. The reflow machine 14 includes a reflow device 61 and a process transfer device 62. The reflow device 61 fixes the viscous fluid coated by the screen printing machine 12. The process transfer device 62 transfers the substrate from the upstream inlet 63 of the reflow machine 14 to the downstream outlet 65 via a reflow position 64 below the reflow device 61. The inspection machine 15 includes an inspection device 71 and a process transfer device 72. The inspection device 71 inspects the mounting status of the electronic components mounted on the substrate. The process transfer device 72 transfers the substrate from the upstream inlet 73 of the inspection machine 15 to the downstream outlet 75 via the inspection position 74 below the inspection device 71.

[0028] The substrate handling devices 11-15, each equipped with process transfer devices 32, 42, 52, 62, and 72, are capable of varying the substrate handling speed. The substrate handling devices 11-15 are, for example, based on a substrate sensor described later. Figure 2 The substrate transport speeds of the process transfer devices 32, 42, 52, 62, and 72 are changed based on the detection signals S1 to S3 from the substrate sensors 121-123, etc. Additionally, the substrate transport devices 11-15 perform substrate transport based on instructions from the management PC 17 that manages the substrate manufacturing production line 10. Meanwhile, intermediate conveyors 21-25 transport substrates at preset substrate transport speeds and at constant substrate transport speeds. Intermediate conveyors 21-24 are sequentially arranged between substrate transport devices 11-15, with intermediate conveyor 25 located downstream of substrate transport device 15. The intermediate conveyors 21-25 are operated based on control information C2 (see reference 1) described later. Figure 2 The system uses instructions to switch between a constant substrate transport speed and a stopped substrate transport state. Additionally, the intermediate conveyors 21-25 can also be structures capable of changing the substrate transport speed.

[0029] (Regarding screen printing machines 12)

[0030] In the following description, the screen printing machine 12 in the substrate handling apparatuses 11 to 15 will be described. However, the control of the screen printing machine 12 described below can also be performed in other substrate handling apparatuses 11, 13 to 15. Figure 2 The structure of the screen printing machine 12 is schematically shown, indicating the state as viewed from the width direction of the substrate. Figure 3 The electrical connections of the screen printing machine 12 are shown. Figure 4The structure of the printing apparatus 41 and the process transfer apparatus 42 is schematically shown, and the state is shown from the substrate transport direction.

[0031] like Figures 2-4 As shown, in addition to the printing device 41 and the process transfer device 42 mentioned above, the screen printing machine 12 also includes a main body 47 and a control device 48 (see reference). Figure 3 ), External IF (short for interface) 49 (refer to) Figure 3 The control device 48 is configured as a microprocessor centered on the CPU 48A, controlling the entire screen printing machine 12. The screen printing machine 12 performs printing operations based on the control of the control device 48. Specifically, the screen printing machine 12 uses the squeegee 80 of the printing device 41 to press a viscous fluid on the screen mask M into the pattern holes 77 formed on the screen mask M, thereby coating (printing) the viscous fluid onto the substrate S, which is the object to be printed, through the pattern holes 77. Examples of "printing objects" include, for example, a substrate S with mounted components, a three-dimensional object, etc. Examples of "viscous fluids" include solder paste, conductive paste, adhesive, etc. Hereinafter, the substrate S is used as an example of a printing object, and solder paste is used as an example of a viscous fluid. In addition, the screen printing machine 12 is connected to the management PC 17 and intermediate conveyors 21 and 22 via an external IF 49.

[0032] The main body 47 includes a cover for the screen printing machine 12, and has the aforementioned loading inlet 43 and loading outlet 45. The printing apparatus 41 is located in the upper part of the main body 47 and is a unit that uses a screen mask M to print solder paste onto a substrate S. The printing apparatus 41 includes a printing head 81 and a printing moving part 82. Figure 3 ), scraper lifting section 83 ( Figure 3 The printing head 81 is equipped with a supply unit 85 and a mask unit 87. The printing moving unit 82 moves the printing head 81 in a predetermined printing direction and includes a guide formed along the moving direction, a slider that moves along the guide, and a motor that drives the slider. In this embodiment, the printing head 81 is configured, for example, to have two detachable squeegees 80. The squeegee lifting unit 83 is configured to allow the two squeegees 80 mounted on the printing head 81 to be raised and lowered separately.

[0033] The supply unit 85 can switch between a connected state and a disconnected state with the print head 81. In the connected state, when the print head 81 is moved by the printing moving part 82, the supply unit 85 moves together with the print head 81. The supply unit 85 includes a container for holding solder paste, a drive mechanism for spraying solder paste from the container, etc., and sprays solder paste onto the screen mask M under the control of the control device 48. By being disconnected from the print head 81, the supply unit 85 can standby at a replacement position where the container can be replaced. Therefore, printing performed by the print head 81 can be performed simultaneously with the replacement of the container. Alternatively, the supply unit 85 can also be a structure that is always connected to the print head 81.

[0034] The mask section 87 is disposed vertically between the printing head 81 and the process transfer device 42, and is a unit for fixing and holding the screen mask M. The mask section 87 positions the screen mask M and fixes it in a horizontal position.

[0035] The process transfer device 42 is a device positioned below the mask section 87, which loads in the substrate S, positions the loaded substrate S at the printing position 44, and performs actions to contact the screen mask M and separate from the screen mask. The process transfer device 42 includes a pair of side frames 91, a pair of substrate transport conveyors 92, a pair of substrate guides 93, and a substrate guide moving part 94 (see reference). Figure 3 ), Side frame moving part 95 (refer to) Figure 3 ), fixed part lifting part 96, support platform lifting part 97, support platform 98 and base plate support component 99.

[0036] A pair of substrate handling conveyors 92 each have a conveyor belt 101 (see reference) Figure 2 ), multiple rollers 102 (refer to) Figure 2 The conveyor belt 101 is an endless loop belt that rotates from the inlet 43 to the outlet 45, mounted on the multiple rollers 102. The servo motor 103 is the drive source for rotating the conveyor belt 101. For example, the output shaft of the servo motor 103 is connected to any roller 102 via a reduction gear. The process transfer device 42, based on the control of the control device 48, controls the rotation of the servo motor 103, changing the rotation speed of the rollers 102, thereby changing the rotation speed V of the conveyor belt 101. This changes the substrate transport speed of the substrate S transported by the conveyor belt 101. The conveyor belt 101... Figure 2 The clockwise rotation (wheel rotation) moves the placed substrate S in the substrate transport direction, i.e. Figure 2 Move it to the right in the middle.

[0037] The servo motor 103 is one example of the drive source disclosed herein. However, the drive source of this disclosure is not limited to a servo motor; it can also be other drive sources capable of rotating the conveyor belt 101, such as a stepper motor. Furthermore, the drive source for other conveyor belts besides the conveyor belt 101 (such as the conveyor belt 131 of the intermediate conveyor 21 described later) can also be appropriately changed. In this embodiment, the case where a servo motor is used as the drive source will be described.

[0038] The substrate guide 93 is a plate-shaped component mounted on the upper surface of each of the pair of side frames 91. The pair of side frames 91 are disposed on the plate-shaped fixing portion 105 and are longer plate-shaped components in the substrate transport direction. The pair of side frames 91 can slide relative to the fixing portion 105 in the substrate width direction. The side frame moving portion 95 is a mechanism that performs the action of moving the pair of side frames 91 in the substrate width direction to bring them closer together or separate them. Thus, by moving the pair of side frames 91 in the substrate width direction, the spacing between the pair of side frames 91 can be adjusted according to the width dimension of the substrate S. The pair of substrate guides 93 move together with the side frames 91 in the substrate width direction. The pair of substrate guides 93 can slide relative to the pair of side frames 91 in the substrate width direction. The substrate guide moving portion 94 is a mechanism that performs the action of moving the pair of substrate guides 93 in the substrate width direction to bring them closer together or separate them. As a result, the pair of substrate guides 93 move in the width direction of the substrate, clamping and fixing the substrate S from both sides in the width direction when the upper surface of the substrate S and the upper surface of the substrate guides 93 are on the same plane. The fixing part lifting part 96 is a mechanism that raises and lowers the fixing part 105 relative to the main body part 47. Therefore, the substrate S placed on the substrate transport conveyor belt 92 is raised and lowered together with the side frame 91 by driving the fixing part lifting part 96.

[0039] A support platform 98 is positioned between a pair of side frames 91 and above the fixing portion 105, and is supported from below by a support platform lifting portion 97. The support platform lifting portion 97 is a mechanism that raises and lowers the support platform 98 relative to the fixing portion 105. The support platform 98 is a component capable of holding a substrate support member 99. Therefore, the substrate support member 99 rises and falls together with the support platform 98 by driving the support platform lifting portion 97. Figure 5 As shown, the control device 48 controls the lifting part 96 of the fixing part to raise the substrate S, and drives the lifting part 97 of the support platform to raise the support platform 98. The substrate support member 99 is connected to a pressure reducing device (not shown) via piping, supports the substrate S from the lower surface side, and is fixed by negative pressure adsorption. The substrate S is supported from below by the substrate support member 99, and solder paste is applied while it is in contact with the screen mask M (pattern hole 77) from below.

[0040] When the control device 48 performs the loading and unloading of the substrate S, it drives the lifting unit 96 of the fixing part and the lifting unit 97 of the support platform to position the fixing part 105 and the support platform 98. Figure 4 The position after descent is shown. Additionally, after the substrate S is loaded, the control device 48 drives the lifting unit 96 of the fixing part and the lifting unit 97 of the support platform to position the fixing part 105 and the support platform 98. Figure 5 The position after the ascent is shown. In the following explanation, [the position will be...]. Figure 4 The positions of the fixing part 105 and the support platform 98 shown are called the transport positions. Figure 5 The positions of the fixing part 105 and the support platform 98 shown are referred to as the printing execution positions for explanation.

[0041] In addition, the screen printing machine 12 includes a cleaning unit 111 and an imaging unit 112. The cleaning unit 111 is a unit that cleans the back side of the screen mask M using cleaning components. The imaging unit 112 is, for example, a camera that images the substrate S and the screen mask M. The control device 48 performs alignment of the screen mask M and the substrate S based on the imaging data from the imaging unit 112.

[0042] In addition, such as Figure 2 As shown, the screen printing machine 12 includes three substrate sensors 121, 122, and 123. The three substrate sensors 121-123 are used to detect the substrate being transported, and are non-contact sensors such as infrared sensors. Furthermore, the detection method of the substrate sensors 121-123 is not particularly limited; visible light or other methods can also be used. Additionally, the substrate sensors 121-123 are not limited to non-contact sensors; contact sensors such as relays can also be used.

[0043] Furthermore, the structure of the screen printing machine 12 described above is one example. For instance, the substrate support member 99 may be replaceable depending on the type of substrate S. Additionally, the pair of side frames 91 may be fixed in position. In this case, the process transfer device 42 may not include the side frame moving part 95. Furthermore, the process transfer device 42 may not include the fixing lifting part 96. That is, the process transfer device 42 may not include a device for lifting the substrate transport conveyor 92. In this case, the transport position of the substrate S and the printing execution position may be the same position (height). Additionally, the screen printing machine 12 may be able to lower the print head 81 and the mask part 87 to the position of the substrate S. Furthermore, the process transfer device 42 may not include the cleaning part 111. Furthermore, the process transfer device 42 may not include the imaging part 112. Furthermore, the process transfer device 42 may not include substrate sensors 121, 122, and 123 for detecting the position of the substrate S.

[0044] (Substrate sensors 121~123)

[0045] The process transfer device 42 is a device that transfers the substrate S from the transfer inlet 43 through the printing position 44 to the transfer outlet 45 when positioned in the transport position. In the transport position, such as... Figure 2 As shown, the upstream end of the conveyor belt 101 ( Figure 2 The left end of the conveyor becomes the same height as the inlet 43, and the downstream end becomes the same height as the outlet 45. (As described later...) Figure 8 As shown, the upstream end of the conveyor belt 101 is the upstream fold-back portion of the annular conveyor belt 101. Figure 8 The upstream end 147). Similarly, the downstream end is the folded-back portion on the downstream side. The substrate sensors 121 to 123 output detection signals S1 to S3 corresponding to the presence or absence of the substrate S in the detection area of ​​each sensor for the substrate S transported by the process transfer device 42 disposed at the transport position.

[0046] A substrate sensor 121 is disposed near the inlet 43, and a detection area for detecting the substrate S is provided upstream of the upstream end of the conveyor belt 101 in the substrate transport direction. The detection area of ​​the substrate sensor 121 is, for example, located between the conveyor belt 101 of the screen printing machine 12 and the conveyor belt 131 of the upstream intermediate conveyor 21 in the substrate transport direction. For example, when the substrate S is not in the detection area, the substrate sensor 121 outputs a low-level detection signal S1 to the control device 48; when the substrate S is in the detection area, it outputs a high-level detection signal S1 to the control device 48. Similarly, other substrate sensors 122 and 123 also output detection signals S2 and S3, respectively. Based on the rise of the detection signal S1 from low to high (hereinafter sometimes referred to as "on") from the substrate sensor 121, the control device 48 can detect when the front end SF of the substrate S approaches the inlet 43 and the conveyor belt 101. In addition, based on the situation where the detection signal S1 drops from a high level to a low level (hereinafter, sometimes referred to as disconnected) after being turned on, the control device 48 can detect the situation where the rear end SR of the substrate S has passed through the detection area of ​​the substrate sensor 121, that is, the situation where the substrate S has been moved into the screen printing machine 12.

[0047] The substrate sensor 122 is positioned upstream of the deport outlet 45. The detection area of ​​the substrate sensor 122 is located within the screen printing machine 12 near the deport outlet 45. The control device 48 is activated based on the detection signal S2 from the substrate sensor 122, enabling it to detect when the leading edge SF of the substrate S reaches a predetermined position within the screen printing machine 12. The control device 48 is also activated based on the detection signal S2 to detect when the substrate S reaches the printing position 44.

[0048] The substrate sensor 123 is located near the outlet 45. The detection area of ​​the substrate sensor 123 is, for example, set between the conveyor belt 101 and the conveyor belt 132 of the downstream intermediate conveyor 22. The control device 48 detects the passage of the rear end SR of the substrate S, i.e., the completion of the removal of the substrate S, based on the detection signal S3 of the substrate sensor 123 being disconnected.

[0049] The control device 48 outputs a control command D1 for the servo motor 103 based on the detection signals S1-S3 from the three substrate sensors 121-123, thereby controlling the rotational speed V. Specifically, for example, the servo motor 103 is equipped with a motor drive circuit (servo amplifier) ​​that controls the current supplied to the motor. The control device 48 controls the current supplied from the motor drive circuit to the motor (windings, etc.) of the servo motor 103 by changing the control command D1 output to the motor drive circuit of the servo motor 103. The control command D1 is the target rotational speed, acceleration, rotational direction, target torque, etc. of the motor. The motor drive circuit performs feedback control on the servo motor 103 based on the control command D1 input from the control device 48 and encoder information (rotational position information, etc.) input from the encoder installed on the servo motor 103, controlling the servo motor 103 to the target rotational speed, etc. Thus, the control device 48 can control the servo motor 103 at a predetermined rotational speed and acceleration, and can control the rotational speed V.

[0050] (Regarding intermediate conveyors 21 and 22)

[0051] In addition to the aforementioned endless loop conveyor belt 131, the upstream intermediate conveyor 21 also includes a servo motor 135 for rotating the conveyor belt 131 and a feed control device 136 for controlling the servo motor 135. Similarly, in addition to the aforementioned endless loop conveyor belt 132, the downstream intermediate conveyor 22 also includes a servo motor 137 for rotating the conveyor belt 132 and a control device 138 for controlling the servo motor 137. In the following description, to avoid making the explanation complicated, the conveyor belt 131 and servo motor 135 of the intermediate conveyor 21, which is the feed side (upstream side) when viewed from the screen printing machine 12, will be referred to as feed belt 131 and feed motor 135, and the conveyor belt 132 and servo motor 137 of the intermediate conveyor 22, which is the output side (downstream side), will be referred to as output belt 132 and output motor 137.

[0052] At the downstream end 143 of the conveyor belt 131 (see reference) Figure 8 (a) and the upstream end 147 of the conveyor belt 101 of the screen printing machine 12 (refer to) Figure 8(a) The substrate sensor 121 is configured with a predetermined gap between the substrate and the intermediate conveyor 21. The detection area of ​​the substrate sensor 121 is set to detect the area at the front end SF of the gap. In addition, the intermediate conveyor 21 is set to keep the rotation speed of the feed motor 135 constant, so that the feed belt 131 rotates at a constant rotation speed (wheel speed). The rotation speed of the feed belt 131 is called the feed rotation speed VI. The feed rotation speed VI can also be called the substrate transport speed of the intermediate conveyor 21 for transporting the substrate S. The control device 48 of the screen printing machine 12 sends and receives control information C2 with the feed control device 136 via an external IF 49. The feed control device 136 outputs control command D2 to the feed motor 135 to control the feed motor 135. Based on the control information C2, the feed control device 136 controls the feed motor 135 to switch between a state in which the feed belt 131 rotates at the feed rotation speed VI and transports the substrate S at a constant speed and a state in which the rotation of the feed belt 131 is stopped and the transport is stopped.

[0053] The structures of intermediate conveyor 22 and substrate sensor 123 are the same as those of intermediate conveyor 21 and substrate sensor 121. Therefore, detailed descriptions of intermediate conveyor 22 and substrate sensor 123 are omitted. The transfer control device 138 of intermediate conveyor 22 outputs control command D3 to transfer motor 137 to control transfer motor 137. Based on control information C3 from control device 48, transfer control device 138 controls transfer motor 137, switching between a state where transfer belt 132 rotates at transfer rotation speed VO and transfers substrate S at a constant speed, and a state where the rotation of transfer belt 132 is stopped and transfer is stopped. Furthermore, the start and stop instructions (control information C2, C3) for the rotation of intermediate conveyors 21 and 22 can also be executed by a device other than screen printing machine 12. For example, management PC 17 can also instruct intermediate conveyors 21 and 22 to start and stop rotation.

[0054] (Regarding the control of rotational speed V)

[0055] Here, in the substrate manufacturing line 10, when transporting substrate S from any preceding process conveyor belt to a subsequent process conveyor belt, if there is a difference in the rotational speed of the conveyor belts, there is a possibility that substrate S cannot be transferred. For example, when transferring substrate S from intermediate conveyor 21 to screen printing machine 12, if the rotational speed V of conveyor belt 101 (e.g., 200 mm / s) is faster than the input rotational speed VI of intermediate conveyor 21 (e.g., 100 mm / s), it may be impossible to ensure sufficient friction between conveyor belt 101 and substrate S. As a result, substrate S cannot be transferred from input belt 131 to conveyor belt 101.

[0056] In contrast, the screen printing machine 12 of this embodiment includes Figure 6 The first acceleration mode shown and Figure 7The second acceleration mode shown is used for transferring the substrate S. By changing the rotational speed V according to each acceleration mode, the control device 48 can more reliably perform the transfer of the substrate S. First, the first acceleration mode will be explained. Figure 6 The diagram shows the change in rotational speed V in the first acceleration mode, with the horizontal axis representing time and the vertical axis representing rotational speed V. (Example:) Figure 6 As shown, the first acceleration mode is as follows: after a predetermined time T has elapsed since timer TM1, timer TM2 switches the rotational speed V from the first rotational speed V1 to the second rotational speed V2.

[0057] Figure 8 This indicates the relationship between the state of the substrate S being transported from the intermediate conveyor 21 to the screen printing machine 12 and the rotational speed V. As described above, each substrate transport device 11-15 sends and receives data with the management PC 17 to obtain information on the progress of other devices. For example, the control device 48 of the screen printing machine 12 instructs the intermediate conveyor 21 to start rotation via control information C2 based on the timing of the substrate S being transported from the storage tank 11. Based on the input of the control information C2, the intermediate conveyor 21 rotates the transport belt 131 at a constant transport rotational speed VI. The transport rotational speed VI is, for example, 100 mm / s.

[0058] like Figure 8 As shown in (a), the substrate S is guided by the substrate guide 141 of the intermediate conveyor 21 while being transported by the transport belt 131 in the substrate transport direction at a transport rotation speed VI. Figure 8 In the state shown in (a), the front end SF of the substrate S is upstream of the downstream end 143 of the feed belt 131 and has not reached the detection area 145 of the substrate sensor 121. The front end SF is the end of the substrate S that is downstream in the substrate transport direction (the end that is the end point in the substrate transport direction). The detection signal S1 of the substrate sensor 121 is in a low-level off state. In other words, the detection area 145 of the substrate sensor 121 is set at a position downstream of the downstream end 143 of the feed belt 131. Figure 8 In the state shown in (a), the control device 48 causes the conveyor belt 101 to rotate at a first rotational speed V1. The first rotational speed V1 is, for example, 50 mm / s. Therefore, the control device 48... Figure 8 In the state shown in (a), the conveyor belt 101 is rotated at a first rotational speed V1 (50 mm / s) that is slower than the loading rotational speed VI (100 mm / s) of the intermediate conveyor 21, which is a preceding process device.

[0059] Next, as Figure 8As shown in (b), substrate S is transported by conveyor belt 131 at a transport rotation speed VI, and the front end SF of substrate S is transported to a position downstream of the downstream end 143. The front end SF reaches (intrudes into) the detection area 145 of substrate sensor 121. The detection area 145 is, for example, the area that blocks the optical axis of the light sensor. Upon reaching the detection area 145 by the front end SF, the detection signal S1 is switched on from an off state to a high-level on state. The control device 48 starts timing for a predetermined time T at the timing of the activation of the detection signal S1. Therefore, Figure 6 Timing TM1 is the timing when the front end SF arrives at the detection area 145 of the substrate sensor 121. In other words, it is the timing when the substrate sensor 121 detects the front end SF of the substrate S transported from upstream. Figure 8 In the state shown in (b), the control device 48 also causes the conveyor belt 101 to rotate at a first rotational speed V1 (50 mm / s).

[0060] Next, as Figure 8 As shown in (c), the substrate S is further transported by the conveyor belt 131, becoming a state where it protrudes further from the downstream end 143 of the conveyor belt 131 in the substrate transport direction. The front end SF, for example, is located downstream of the upstream end 147 in the substrate transport direction, reaching a position where it contacts the conveyor belt 101. Through contact with the upper surface of the conveyor belt 101, the substrate S receives a force (transport force) in the substrate transport direction from the conveyor belt 101 using the frictional force between the substrate S and the conveyor belt 101. Figure 8 (c) is the state. Figure 6 Timing TM2. When the first acceleration mode is set, the control device 48 executes a control command D1 on the servo motor 103 to switch the rotational speed V of the conveyor belt 101 from the first rotational speed V1 to the second rotational speed V2 after a predetermined time T has elapsed since timing TM1. Specifically, the control device 48 executes the control command D1 on the motor drive circuit (servo amplifier) ​​of the servo motor 103 to change the target rotational speed from the first rotational speed V1 to the second rotational speed V2. The second rotational speed V2 is, for example, 200 mm / s.

[0061] Therefore, in this embodiment, the control device 48 accelerates the rotational speed V based on the timing of the transfer of the substrate S from the intermediate conveyor 21 (which serves as the preceding process device) to the conveyor belt 101, as detected by the substrate sensor 121. As described above, if the conveyor belt 101 of the subsequent process rotates faster than the loading belt 131 of the preceding process when the substrate S has not been transferred at all, the frictional force required for loading cannot be sufficiently ensured, and the conveyor belt 101 slides relative to the substrate S. No matter how much the loading belt 131 is rotated, it cannot be pulled into the conveyor belt 101. In contrast, in this embodiment, acceleration begins at the timing when the front end SF, i.e., a portion of the substrate S, is mounted on the conveyor belt 101 of the subsequent process. Thus, the acceleration of the conveyor belt 101 can begin while reliably generating the frictional force required for loading between the conveyor belt 101 and the substrate S. Even if a speed difference occurs between the preceding and following process devices, the generation of transfer errors of the substrate S can be suppressed, and the substrate S can be stably loaded into the following process device.

[0062] The reasons for the difference in the rotational speed V of the conveyor belt 101 include, for example, the fact that the manufacturers of the various devices (substrate handling devices 11-15, intermediate conveyors 21-25) in the substrate manufacturing production line 10 are different, and that industry-standard handling speed regulations (standard speeds) are not clearly defined. Therefore, users sometimes choose cheaper intermediate conveyors such as 21 based on the price of the device and the manufacturing cost of the substrate S. As a result, for example, by configuring low-speed intermediate conveyors 21-25 between the high-speed screen printer 12 and the component mounting machine 13, a difference in handling speed (rotational speed) occurs between the devices. Furthermore, depending on the device, there are devices where the handling speed cannot be changed, resulting in unresolved speed differences and errors in substrate S transfer. On the other hand, from the viewpoint of shortening cycle time and reducing manufacturing costs, a faster substrate S handling speed is preferred. Therefore, in the screen printer 12 of this embodiment, by accelerating it after transferring a portion of the substrate S, errors in substrate S transfer can be suppressed, and cycle time can be shortened and manufacturing costs reduced.

[0063] Furthermore, while the screen printing machine 12 has been described above, by applying the same speed control to other substrate handling devices 13-15 (process transfer devices 52, 62, 72), transfer errors of the substrate S can be suppressed, and cycle time can be shortened, and manufacturing costs can be reduced. Additionally, the same speed control can be applied to the upstream storage device 11 when receiving the substrate S from upstream process devices (substrate S supply robot, AGV (automated guided vehicle), etc.). Similarly, the same speed control can be applied to the intermediate conveyors 21-25 during the transfer from upstream process devices. Therefore, in each device (substrate handling device 11-15, intermediate conveyors 21-25) arranged in the substrate manufacturing production line 10, even when any device is operating at low speed, the contents of this disclosure can be applied to devices that become subsequent processes of that device.

[0064] In addition, such as Figure 4 As shown, the process transfer device 42 of this embodiment is configured to transport only both ends of the substrate S in the substrate width direction using the conveyor belt 101. For example, in the substrate width direction, the width of one end of the substrate S in contact with the conveyor belt 101 is several millimeters. In such a structure, compared with a structure in which the conveyor belt 101 is integrally provided on the lower surface of the substrate S so that the entire lower surface is in contact with the conveyor belt 101, the possibility of not obtaining sufficient frictional force increases. In particular, in cases where the substrate S warps due to the expansion and contraction of the insulating resin, the area of ​​one end of the substrate S in contact with the conveyor belt 101 may become even smaller. On the other hand, if it is to transport... Figure 4 Even if the support platform 98 and the support platform lifting unit 97 shown are provided below the substrate S at the printing position 44, sufficient operating space must be ensured below the substrate S. Therefore, it is difficult to provide the conveyor belt 101 on the entire lower surface of the substrate S. Therefore, as in the screen printing machine 12 of this embodiment, the above-described speed control is extremely effective in a structure in which the conveyor belt 101 contacts only the end in the width direction of the substrate for transport.

[0065] In addition, such as Figure 8 As shown in (a), in this embodiment, the substrate sensor 121 has a detection area 145 positioned upstream of the upstream end 147 of the conveyor belt 101 in the substrate transport direction. Furthermore, the predetermined time T is set to the time required from the timing TM1 at which the substrate S is detected by the substrate sensor 121 until the front end SF of the substrate S begins to transfer to the conveyor belt 101. Sometimes, the situation where the front end SF, transported from upstream, comes into contact with the conveyor belt 101 and rides on it is described as a transfer or the start of transfer. Therefore, for example, it is possible to... Figure 8 (b) The position of the front end SF when the detection signal S1 is turned on is... Figure 8 (c) The time obtained by dividing the distance between the front end SF and the contact point of the conveyor belt 101 by the loading rotation speed VI is set as a predetermined time T. Based on the configuration of the substrate sensor 121 and the loading rotation speed VI, an appropriate predetermined time T can be set, allowing acceleration to begin at the timing when the substrate S starts to transfer. This enables a reduction in loading time.

[0066] Furthermore, the control device 48 executes a control command D1 on the servo motor 103 to switch from the first rotational speed V1 to the second rotational speed V2 based on the elapsed time T. The second rotational speed V2 is set to a speed faster than the loading rotational speed V1. As a result, transfer errors of the substrate S can be suppressed, and the loading time can be shortened, thereby reducing the cycle time.

[0067] Furthermore, in this embodiment, the first rotational speed V1 is slower than the loading rotational speed VI of the intermediate conveyor 21, which serves as the preceding process device. Therefore, by starting loading at a first rotational speed V1, slower than that of the preceding process device, before and at the moment of substrate S transfer, the slippage of the conveyor belt 101 relative to the substrate S can be suppressed, allowing for a more reliable start to the transfer of the substrate S. By starting loading at a relatively slow rotational speed V, the rotational force of the conveyor belt 101 that hinders the intermediate conveyor 21 from moving the substrate S can be suppressed as much as possible. Then, by accelerating from the moment the transfer begins, the substrate S can be loaded (transferred) rapidly.

[0068] Furthermore, the values ​​of the aforementioned loading rotation speed VI, first rotation speed V1, and second rotation speed V2 are examples. For instance, the first rotation speed V1 can also be the same as the loading rotation speed VI. That is, after a predetermined time T has elapsed, the preceding process device and the following process device can rotate at the same rotation speed. Therefore, as the first rotation speed V1, a rotation speed lower than the loading rotation speed VI can be appropriately used. Furthermore, as the second rotation speed V2, a speed faster than the first rotation speed V1 can be appropriately used.

[0069] Next, the second acceleration mode will be explained. For example... Figure 7 As shown, the second acceleration mode is as follows: after a predetermined time T elapsed from time TM1, at time TM2, the rotation speed V1 is accelerated to the second rotation speed V2 with a constant acceleration. In the first acceleration mode, the control device 48 executes a control command D1 for the servo motor 103, which switches the rotation speed V from the first rotation speed V1 to the second rotation speed V2. In contrast, in the second acceleration mode, the control device 48 executes a control command D1 to gradually accelerate from the first rotation speed V1 to the second rotation speed V2 with a predetermined acceleration.

[0070] When the second acceleration mode is set, the control device 48 performs the same operation as in the first acceleration mode. Figure 8 The controls shown in (a) and (b) are then... Figure 8 As shown in (c), the control device 48 begins to accelerate the rotational speed V after a predetermined time T has elapsed, i.e., the time at which the front end SF reaches (contacts) the conveyor belt 101. Therefore, based on the fact that a predetermined time T has elapsed since the time TM1 when the substrate S is detected by the substrate sensor 121, the control device 48 executes a control command D1 on the servo motor 103 to accelerate the rotational speed V from the first rotational speed V1 to the second rotational speed V2 with a constant acceleration. In this second acceleration mode, the generation of transfer errors of the substrate S can also be suppressed, and the cycle time can be shortened. Furthermore, by gradually accelerating, the slippage of the substrate S relative to the conveyor belt 101 can be more reliably suppressed.

[0071] The first acceleration mode also requires acceleration to increase the rotational speed V. Therefore, the difference between the first and second acceleration modes can also be described as a difference in the magnitude of acceleration. For example, the first acceleration mode is a mode in which the servo motor 103 accelerates from the first rotational speed V1 to the second rotational speed V2 with maximum acceleration based on control command D1. In contrast, the second acceleration mode is a mode in which the servo motor 103 accelerates with an acceleration value specified by the control device 48 via control command D1. In other words, the first acceleration mode can also be described as a mode with a larger acceleration than the second acceleration mode. Furthermore, the above definitions of each acceleration mode are just examples. For example, the second acceleration mode can also be set to a mode in which the acceleration is reduced by a predetermined value from the acceleration of the first acceleration mode. That is, the acceleration of each acceleration mode can also be defined relatively. In this case, in the second acceleration mode, the control device 48 may not specify the acceleration value via control command D1.

[0072] Here, depending on the characteristics of the substrate S, the second acceleration mode is sometimes more suitable than the first acceleration mode. For example, if the substrate S is light, and a rapid acceleration like the first acceleration mode is performed at the stage when the front end SF begins to transfer to the conveyor belt 101, the substrate S may slide relative to the conveyor belt 101. Therefore, when the substrate S is light, a gradual acceleration mode like the second acceleration mode is suitable. Conversely, when the substrate S is heavy, the friction between the substrate S and the conveyor belt 101 increases, so by applying the first acceleration mode, a shorter cycle time can be achieved compared to the second acceleration mode. Therefore, when the weight of the substrate S is above a predetermined weight, the first acceleration mode is preferred, and when the weight is below the predetermined weight, the second acceleration mode is preferred.

[0073] Furthermore, when the substrate S is long in the substrate transport direction (i.e., when the substrate S is long in the direction in which the conveyor belt 101 extends), the size of the portion of the substrate S remaining on the feed belt 131 side at the stage where the front end SF begins to transfer to the conveyor belt 101 is larger compared to the case where the substrate length in the transport direction is shorter. With a larger remaining portion, the frictional force generated between the feed belt 131 and the substrate S increases, so even if the conveyor belt 101 stretches the substrate S, the force remaining on the feed belt 131 side also increases. Therefore, for a long substrate S, when performing a rapid acceleration such as the first acceleration mode, the substrate S may slide relative to the conveyor belt 101 due to the force remaining on the feed belt 131 side. Therefore, when the substrate S is long, a gradual acceleration mode such as the second acceleration mode is suitable. Conversely, when the substrate S is short, the force remaining on the feed belt 131 is smaller, so by applying the first acceleration mode, compared to the second acceleration mode, a shorter cycle time can be achieved. Therefore, when the length of the substrate S in the substrate transport direction is less than or equal to a predetermined length, the first acceleration mode is preferably applied, and when the length is longer than the predetermined length, the second acceleration mode is preferably applied.

[0074] Furthermore, when the substrate S is thin, similar to when the substrate S is light, when a rapid acceleration, such as the first acceleration mode, is performed at the stage where the front end SF begins to transfer to the conveyor belt 101, the substrate S may slide relative to the conveyor belt 101. Therefore, when the substrate S is thin, a gradual acceleration mode, such as the second acceleration mode, is suitable. Conversely, when the substrate S is thick, the friction between the substrate S and the conveyor belt 101 increases, so by applying the first acceleration mode, a shorter cycle time can be achieved compared to the second acceleration mode. Therefore, when the thickness of the substrate S is greater than a predetermined thickness, the first acceleration mode is preferred, and when the thickness is less than a predetermined thickness, the second acceleration mode is preferred.

[0075] also, Figure 6 and Figure 7 The speed switching method and acceleration shown for each acceleration mode is just one example. For instance, the second acceleration mode may not be a mode that accelerates at a constant acceleration, but rather a mode that increases speed in stages. For example, the following action could be repeated: accelerating from 50 to 100 mm / s and then rotating for a constant time, followed by accelerating from 100 to 150 mm / s and then rotating for a constant time. Alternatively, the acceleration may not be constant, but rather gradually increased.

[0076] (Regarding the switching between the first and second acceleration modes)

[0077] As described above, the control device 48 has two acceleration modes. The control device 48 switches between a first acceleration mode and a second acceleration mode based on the weight of the substrate S being transported, the thickness of the substrate S, and the length of the substrate S in the substrate transport direction. The management PC 17 manages information related to the substrate S produced on the substrate manufacturing production line 10 and sends the substrate S information to the substrate transport devices 11-15 according to a so-called changeover adjustment that changes the type of substrate S being produced. For example, if it is a screen printing machine 12, the information of the substrate S includes information such as the width of the substrate S; if it is a component mounting machine 13, the information of the substrate S includes information such as the type and mounting position of the electronic components to be assembled. In this embodiment, the management PC 17 has the weight, thickness, and length of the substrate S in the substrate transport direction as information about the substrate S. Based on predetermined reference values ​​as described above, the management PC 17 determines the weight, thickness, and length of the substrate S to be produced next, and decides which of the two acceleration modes should be executed in the next production run. For example, if the weight of the substrate S is above a predetermined weight, the management PC 17 decides to execute the first acceleration mode; if the weight is below the predetermined weight, it decides to execute the second acceleration mode. The management PC 17 determines which acceleration mode (first or second) should be executed based on weight, thickness, and length, and decides the execution mode by the majority of the three determinations. For example, if the first acceleration mode is executed based on weight and thickness, and the second acceleration mode is executed based on length, the first acceleration mode is selected as the acceleration mode for the next production run. The management PC 17 instructs the screen printing machine 12 and the like to execute the determined acceleration mode. Thus, the control device 48 can execute an appropriate acceleration mode corresponding to the weight, thickness, and length of the substrate S.

[0078] Furthermore, the method for determining the acceleration mode described above is an example. For instance, the PC17 can also assign weight coefficients to weight, thickness, and length respectively, and determine the next acceleration mode based on the sum of the values ​​obtained by multiplying the difference from the baseline value by the weight coefficients. For example, with the coefficients for weight, thickness, and length set to a1, a2, and a3 respectively, the judgment value is calculated using the following formula.

[0079] Judgment value = (Reference weight - Substrate weight) a1 + (reference thickness - substrate thickness) a2 + (substrate length - reference length) a3

[0080] Furthermore, it is possible to determine the first acceleration mode if the judgment value is negative, and the second acceleration mode if the judgment value is positive.

[0081] Alternatively, the management PC 17 can determine the acceleration mode based on at least one of the parameters: weight, thickness, and length. Alternatively, the acceleration mode determination can be performed by a device other than the management PC 17, such as the screen printing machine 12 (control device 48). In this case, the control device 48 can also obtain information about the substrate S from the management PC 17 before starting production of the next substrate S and determine the acceleration mode for the next production run. Furthermore, the screen printing machine 12 can also have three or more acceleration modes. Specifically, the control device 48 can also be capable of switching to the acceleration mode of the second embodiment described later (see [reference]). Figure 9 The screen printing machine 12 can also be configured to execute only one of the first acceleration mode and the second acceleration mode. That is, it can also be configured not to switch acceleration modes.

[0082] Alternatively, the acceleration mode can be determined by the operator of the substrate manufacturing production line 10. For example, if the operator is aware in advance that the substrate S is prone to slippage in the conveyor belt (feed belt 131, etc.) of the previous process, the operator can manually select the second acceleration mode. This is because when the substrate S slips, the actual moving speed of the substrate S is lower than the speed of the conveyor belt of the previous process. Therefore, when the belt speed (rotation speed V) of the substrate handling devices 11-15 is consistent with the actual substrate moving speed (feed rotation speed VI) of the previous process, the substrate S is easy to transfer.

[0083] Furthermore, depending on the substrate type and batch, transport errors can sometimes occur due to substrate S getting caught on the conveyor belt between the preceding and following processes, caused by the step between the conveyor belts. For example, substrate types and batches where the front end SF of substrate S tends to warp downwards are prone to falling into the gap between the preceding and following processes and getting caught on the step. For such substrate types and batches, substrate S can be lifted sharply in the first acceleration mode to facilitate transport. In the event of a transport error, the operator can also manually switch to the first acceleration mode. Alternatively, if the control device 48 detects that the substrate sensor 121 has been continuously turned on for more than a predetermined time, the control device 48 can also automatically switch to the first acceleration mode.

[0084] (Regarding substrate sensor 121)

[0085] As described above, during the stage of loading the substrate S, the control device 48 arranges the fixing part 105 and the support platform 98 in... Figure 4The transport position is shown. Then, after the substrate S is started being transported, the control device 48 detects that the substrate S has been transported to the printing position 44 based on the activation of the detection signal S2 of the substrate sensor 122, and stops the rotation of the conveyor belt 101. The control device 48 drives the fixing part lifting part 96 and the support platform lifting part 97 to raise the fixing part 105 and the support platform 98 to the position shown. Figure 5 The printing is performed at the indicated printing position. When the solder paste printing is completed, the control device 48 lowers the fixing part 105 to the transport position and rotates the conveyor belt 101 to remove the substrate S.

[0086] The control device 48 switches between a state that allows the lifting section 96 and the support platform lifting section 97 to lift the conveyor belt 101 (fixed section 105) and the support platform 98, and a state that restricts the lifting section 96 and the support platform lifting section 97 from lifting the fixed section 105, etc., based on the detection state of the substrate S by the substrate sensor 122. For example, before the substrate S is loaded, the detection signals S1 and S2 of the substrate sensors 121 and 122 are both off, so the control device 48 prohibits the lifting operation. In addition, the control device 48 also prohibits the lifting operation when the detection signal S1 is on, the substrate S begins to move to the conveyor belt 101, and the detection signal S2 is off. Then, the control device 48 allows the lifting operation after the detection signal S1 is off when the rear end SR of the substrate S passes through the detection area 145, and the substrate S reaches the printing position 44 and the conveyor belt 101 is stopped based on the on of the detection signal S2. For example, when the above-mentioned lifting operation is prohibited, the control device 48 will not perform any processing that would cause the fixed section 105, etc., to rise for some reason. Furthermore, when the control device 48 is in a state where lifting and lowering operations are prohibited, it will not perform any lifting or lowering operations even if the user performs a manual operation to raise the fixing part 105, etc. Additionally, after the substrate S reaches the printing position 44 and the conveyor belt 101 stops, i.e., when lifting and lowering operations are permitted, if a manual operation to raise the fixing part 105, etc., is performed, the control device 48 will perform lifting and lowering operations. Therefore, for example, when the substrate S stops at the loading inlet 43, damage to the substrate S due to lifting and lowering operations can be prevented. Furthermore, the substrate sensor 121, which confirms the intrusion of the substrate S, can also be used as a substrate sensor for speed control of the conveyor belt 101, reducing the number of substrate sensors required for the screen printing machine 12. This can reduce the manufacturing cost of the screen printing machine 12. Moreover, the control device 48 prohibits lifting and lowering operations when both the substrate sensor 123 and the substrate sensor 121 are simultaneously activated.

[0087] Furthermore, the determination of whether lifting or lowering is permitted based on the aforementioned detection signals S1 and S2 is one example. For instance, the control device 48 may prohibit lifting or lowering when the detection signal S1 is on, and permit lifting or lowering when it is off. Alternatively, the control device 48 may not completely prohibit lifting or lowering, but may perform limiting processes such as slowing down the lifting or lowering speed.

[0088] Furthermore, the correspondence between the terminology used in this embodiment and the terminology described in the claims will be explained below. The substrate handling device 11, screen printing machine 12, component mounting machine 13, reflow machine 14, inspection machine 15, and intermediate conveyors 21-25 of this embodiment are examples of the substrate handling device and preprocessing device disclosed herein. The servo motor 103 is an example of a drive source. The control command D1 is an example of a command. The support platform lifting unit 97 and the fixing unit lifting unit 96 are examples of lifting devices.

[0089] Based on the above embodiments, the following effects are achieved.

[0090] In one embodiment, before the front end SF of the substrate S, which has been moved from the feed conveyor 131, is transferred to the conveyor belt 101, the control device 48 controls the rotational speed V of the conveyor belt 101 to a first rotational speed V1, which is less than the feed rotational speed VI of the intermediate conveyor 21. This ensures the necessary frictional force for the conveyor belt 101 to receive the substrate S, allowing the substrate S to be reliably transferred from the intermediate conveyor 21 to the conveyor belt 101. That is, it suppresses errors in the transfer of the substrate S. Then, the control device 48 accelerates the rotational speed V to perform the feed of the substrate S according to the timing TM2 at which the front end SF of the substrate S begins to move to the conveyor belt 101. This allows for more reliable transfer of the substrate S, and by accelerating it after a partial transfer, the time required to feed the substrate S can be shortened. In particular, in apparatuses such as the screen printing machine 12 that process substrates S before mounting electronic components, a faster second rotational speed V2 can be used for feeding. Therefore, applying the above-described speed control to the screen printing machine 12, which handles substrates S before mounting electronic components, is extremely effective.

[0091] (Second Embodiment)

[0092] Next, a second embodiment of this disclosure will be described. In the first embodiment described above, after the front end SF is detected by the substrate sensor 121, acceleration of the rotational speed V is performed after a predetermined time T has elapsed. In contrast, in the second embodiment, the difference from the first embodiment is that acceleration begins at the moment of detection without waiting for the predetermined time T to elapse. Furthermore, in the following description, the same reference numerals are used to refer to the same structures as in the first embodiment, and their descriptions are omitted as appropriate. The same applies to the third embodiment.

[0093] Figure 9 This illustrates the relationship between the rotational speed V and time in the second embodiment. In the second embodiment, the control device 48 starts accelerating the servo motor 103 at a timing TM1 when the front end SF is detected by the substrate sensor 121. For example, similar to the second acceleration mode described above, the control device 48 accelerates the rotational speed V from the first rotational speed V1 to the second rotational speed V2 with a constant acceleration. Furthermore, the third rotational speed V3, which is the timing TM2 at which the front end SF begins to transfer (contact) to the conveyor belt 101, is 100 mm / s or less, that is, an acceleration VI or less than the loading rotational speed VI of the intermediate conveyor 21 of the preceding process device.

[0094] Therefore, in the second embodiment, the control device 48 controls the rotational speed V to be less than the loading rotational speed VI before the substrate S is detected by the substrate sensor 121 (before timing TM1). The control device 48 accelerates the rotational speed V at a constant acceleration from the timing TM1 when the substrate S is detected by the substrate sensor 121. With this speed control, the loading of the substrate S can also begin at a third rotational speed V3, below the loading rotational speed VI, enabling smooth loading of the substrate S and reducing the loading time. Therefore, the control device of this disclosure can also, as in the first embodiment, determine the timing of the beginning of the transfer (transfer) of the front end of the substrate to the conveyor belt based on the substrate detected by the substrate sensor from the previous process device using a predetermined time T. Alternatively, as in the second embodiment, the control device of this disclosure can accelerate from the detected moment without determining the predetermined time T. That is, in the second embodiment, it is not necessary to determine the predetermined time T based on the detection. In other words, it can also be described as control that sets the predetermined time T to zero.

[0095] Another example is the control where the predetermined time T is set to zero. For instance, the substrate sensor 121 can also be positioned on the upper part of the conveyor belt 101 and near the upstream end 147 (see reference). Figure 8 (a)) position. More specifically, for example, the position where the front end SF of the substrate S, which is being moved from the intermediate conveyor 21, initially contacts the conveyor belt 101 (see reference). Figure 8 C) The area capable of detecting the front end SF is set as the detection area 145 of the substrate sensor 121. Furthermore, the control device 48 can also accelerate the rotational speed V to a second rotational speed V2 at the timing when the detection signal S1 is turned on. In such control, acceleration can begin based on the detection of the substrate sensor 121 without using a predetermined time T. Therefore, the arrangement of the substrate sensors 121-123 in the first embodiment described above is an example.

[0096] (Third embodiment)

[0097] Next, a third embodiment of this disclosure will be described. In the first embodiment described above, speed control of the rotational speed V is performed based on the detection signal S1 from the substrate sensor 121. In contrast, in the third embodiment, speed control is performed based on the output signal input from the intermediate conveyor 21, which differs from the first embodiment.

[0098] Figure 10 The screen printing machine 12A of the third embodiment is shown. The screen printing machine 12A does not have a substrate sensor 121. The control device 48 of the screen printing machine 12A inputs a take-out signal S4 from the take-in control device 136 of the intermediate conveyor 21. The take-in control device 136 outputs the take-out signal S4 according to the timing of taking out the substrate S. Therefore, the control device 48 of the third embodiment can input a take-out signal S4 indicating that the substrate S has been taken out from the intermediate conveyor 21. The method by which the take-in control device 136 detects the timing of taking out the substrate S is not particularly limited. For example, it can be a method using a sensor such as the substrate sensor 121, or it can be a method using a timer to measure time. After a predetermined time T2 has elapsed since the time the take-out signal S4 was input, the control device 48 accelerates the rotation speed V in the same way as in the first embodiment. The predetermined time T2 is set from the time the take-out signal S4 is input by the control device 48 until the front end SF of the substrate S begins to transfer to the conveyor belt 101 (becoming...). Figure 8 (c) The time required until the state shown. Therefore, in the screen printing machine 12A, without using the substrate sensor 121, the timing for accelerating the rotational speed V can be determined based on the take-out signal S4 from the previous process device. Therefore, if it is the same structure as the first embodiment, the predetermined time T2 of the third embodiment becomes a longer time than the predetermined time T of the first embodiment. More specifically, the predetermined time T2 can be set as the time obtained by adding the predetermined time T to the time from the input of the take-out signal S4 from the control device 48 to the time from the front end SF to the arrival of the detection area 145.

[0099] For example, before inputting a take-out signal S4 indicating that the substrate has been taken out, the control device 48 sets the rotational speed V to a first rotational speed V1. After inputting the take-out signal S4, the control device 48 maintains the first rotational speed V1 until a predetermined time T2 has elapsed. Furthermore, if the control device 48 is in a first acceleration mode, it changes the rotational speed V from the first rotational speed V1 to a second rotational speed V2 after the predetermined time T2 has elapsed. Even with such speed control, the substrate S can be taken in smoothly as in the first embodiment, thus shortening the take-in time.

[0100] Furthermore, the contents of this disclosure can also be implemented by combining the structures of the first to third embodiments described above. For example, the control device 48 can also switch between the acceleration mode using a predetermined time T in the first embodiment and the acceleration mode not using a predetermined time T in the second embodiment. In addition, the control device 48 can also be a structure that can perform both the speed control using the detection signal S1 of the substrate sensor 121 in the first embodiment and the speed control using the take-out signal S4 in the third embodiment.

[0101] Furthermore, this disclosure is not limited to the embodiments described above, and various modifications and alterations can be made without departing from the spirit of this disclosure. For example, the control device 48 may also be a structure capable of executing only one mode as an acceleration mode. Therefore, it is also possible to omit the switching of modes based on the weight, length, and thickness of the substrate S.

[0102] The screen printing machine 12 may also be a structure in which the substrate transport conveyor 92 (conveyor belt 101) cannot be raised or lowered.

[0103] Furthermore, this disclosure is not limited to the dependent relationships described in the claims. For example, this specification also discloses the technical idea of ​​changing "the substrate handling apparatus of claim 3" to "the substrate handling apparatus of any one of claims 1 to 6" in claim 7. Additionally, this specification also discloses the technical idea of ​​changing "the substrate handling apparatus of claim 2" to "the substrate handling apparatus of any one of claims 2 to 7" in claim 8. Furthermore, this specification also discloses the technical idea of ​​changing "the substrate handling apparatus of claim 1" to "the substrate handling apparatus of any one of claims 1 to 8" in claim 9. Furthermore, this specification also discloses the technical idea of ​​changing "the substrate handling apparatus of claim 2" to "the substrate handling apparatus of any one of claims 2 to 9" in claim 10.

[0104] Explanation of reference numerals in the attached figures

[0105] 11. Storage device (substrate handling device, pre-process device), 12, 12A. Screen printing machine (substrate handling device, pre-process device), 13. Component mounting machine (substrate handling device, pre-process device), 14. Reflow machine (substrate handling device, pre-process device), 15. Inspection machine (substrate handling device, pre-process device), 21~25. Intermediate conveyor (substrate handling device, pre-process device), 48. Control device, 96. Fixing part lifting part (lifting device), 97. Support table lifting part (lifting device), 101. Conveyor belt, 103. Servo motor (drive source), 121. Substrate sensor, 145. Detection area, 147. Upstream end, D1. Control command, S. Substrate, SF. Front end, S4. Move signal, T, T2. Preset time, TM2. Timing, V. Rotation speed, V1. First rotation speed, V2. Second rotation speed.

Claims

1. A substrate handling device, comprising: The conveyor belt transports the substrate from the previous process equipment; A drive source that causes the conveyor belt to rotate; and The control device controls the drive source to keep the rotation speed of the conveyor belt below the speed at which the substrate is transported by the previous process device before the front end of the substrate is transferred from the previous process device to the conveyor belt, and controls the drive source to accelerate the rotation speed of the conveyor belt according to the timing of the transfer of the front end of the substrate from the previous process device to the conveyor belt, so that the substrate is transported by the conveyor belt.

2. The substrate handling apparatus according to claim 1, wherein, The substrate handling device also includes a substrate sensor. The control device accelerates the rotation speed of the conveyor belt based on the timing of the transfer of the front end of the substrate to the conveyor belt, as detected by the substrate sensor when the substrate is removed from the previous process device.

3. The substrate handling apparatus according to claim 2, wherein, The substrate sensor has a detection area for detecting the substrate positioned upstream of the upstream end of the conveyor belt in the substrate transport direction. The control device accelerates the rotational speed of the conveyor belt after a predetermined time has elapsed since the substrate was detected by the substrate sensor. The predetermined time is the time required from the moment the substrate is detected by the substrate sensor until the front end of the substrate is transferred to the conveyor belt.

4. The substrate handling apparatus according to claim 3, wherein, The control device executes the following instruction on the drive source based on a predetermined time elapsed since the substrate was detected by the substrate sensor: switch the rotation speed of the conveyor belt from a first rotation speed to a second rotation speed. The second rotational speed is faster than the speed at which the preceding process device transports the substrate.

5. The substrate handling apparatus according to claim 3, wherein, The control device executes the following instruction on the drive source based on a predetermined time elapsed since the substrate was detected by the substrate sensor: to accelerate the rotational speed of the conveyor belt from a first rotational speed to a second rotational speed with constant acceleration. The second rotational speed is faster than the speed at which the preceding process device transports the substrate.

6. The substrate handling apparatus according to claim 4 or 5, wherein, The first rotational speed is slower than the speed at which the preceding process device transports the substrate.

7. The substrate handling apparatus according to claim 3, wherein, The control device is capable of executing a first acceleration mode and a second acceleration mode. The first acceleration mode involves executing the following instruction on the drive source based on a predetermined time elapsed since the substrate was detected by the substrate sensor: switching the rotational speed of the conveyor belt from a first rotational speed to a second rotational speed. The second acceleration mode is to execute the following instruction on the drive source based on a predetermined time elapsed since the substrate was detected by the substrate sensor: to accelerate the rotational speed of the conveyor belt from a first rotational speed to a second rotational speed with a constant acceleration and a smaller acceleration than that in the first acceleration mode. The second rotational speed is faster than the speed at which the preceding process device transports the substrate. The control device switches between the first acceleration mode and the second acceleration mode based on at least one of the weight of the substrate being transported, the length of the substrate in the substrate transport direction, and the thickness of the substrate.

8. The substrate handling apparatus according to claim 2, wherein, The substrate sensor has a detection area for detecting the substrate positioned upstream of the upstream end of the conveyor belt in the substrate transport direction. The control device controls the drive source to keep the rotation speed of the conveyor belt lower than the speed at which the preceding process device transports the substrate before the substrate is detected by the substrate sensor, and accelerates the rotation speed of the conveyor belt at a constant acceleration from the moment the substrate is detected by the substrate sensor.

9. The substrate handling apparatus according to claim 1, wherein, The control device can input a take-out signal from the preceding process device indicating that the substrate has been removed, and accelerate the rotation speed of the conveyor belt after a predetermined time has elapsed since the take-out signal was input. The predetermined time is the time required from the moment the move-out signal is input until the front end of the substrate is transferred to the conveyor belt.

10. The substrate handling apparatus according to claim 2, wherein, The substrate handling device also includes a lifting device for raising and lowering the conveyor belt. The substrate sensor has a detection area for detecting the substrate positioned upstream of the upstream end of the conveyor belt in the substrate transport direction. The control device switches between a state that allows the lifting device to lift the conveyor belt and a state that restricts the lifting device from lifting the conveyor belt, based on the detection state of the substrate detected by the substrate sensor.

Images