X-ray absorption detection device, x-ray absorption detection method, storage medium, and computer program product

Abstract

The application provides an X-ray absorption detection device, an X-ray absorption detection method, a storage medium and a computer program product; the X-ray absorption detection device comprises an X-ray source, a curved crystal, a sample table and a detector; the X-ray absorption detection device further comprises a rotation adjusting sub-device and a controller; the curved crystal and the detector are arranged on the rotation adjusting sub-device; wherein the controller is configured to determine a measurement parameter based on an absorption edge energy of a to-be-detected element through a first model; the measurement parameter comprises an optical path parameter of a Rowland circle; based on the optical path parameter, the rotation adjusting sub-device is controlled to be translated and / or rotated, so that the curved crystal and the detector are located on the optical path of the Rowland circle, and a measured sample on the sample table is located on a diffraction optical path of the Rowland circle.

Description

Technical Field

[0001] This application relates to the field of spectral analysis technology, specifically to an X-ray absorption detection device, an X-ray absorption detection method, a storage medium, and a computer program product. Background Technology

[0002] As a key analytical instrument for measuring fine structure spectra of X-ray absorption detection, inaccurate measurement data when measuring different elements can affect the reliability of spectral analysis. Summary of the Invention

[0003] This application provides an X-ray absorption detection device, an X-ray absorption detection method, a storage medium, and a computer program product.

[0004] The X-ray absorption detection device provided in this application includes: an X-ray source, a curved crystal, a sample stage, and a detector; characterized in that the X-ray absorption detection device further includes: a rotation adjustment sub-device and a controller; the curved crystal and the detector are disposed on the rotation adjustment sub-device; wherein... The controller is used to determine measurement parameters based on the absorption edge energy of the element to be measured using a first model; the measurement parameters include: the optical path parameters of the Rowland circle; based on the optical path parameters, the controller controls the rotation adjustment device to translate and / or rotate, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample to be measured on the sample stage is in the diffraction optical path of the Rowland circle.

[0005] The X-ray absorption detection method provided in this application is characterized by comprising: The controller of the X-ray absorption detection device determines the measurement parameters based on the absorption edge energy of the element to be measured using a first model. The measurement parameters include the optical path parameters of the Rowland circle. Based on the optical path parameters, the controller controls the rotation adjustment sub-device of the X-ray absorption detection device to translate and / or rotate, so that the curved crystal and detector of the X-ray absorption detection device are positioned on the optical path of the Rowland circle, and the sample to be measured on the sample stage of the X-ray absorption detection device is positioned on the diffraction optical path of the Rowland circle.

[0006] The storage medium provided in this application embodiment is used to store a computer program, which causes a computer to execute the X-ray absorption detection method provided in any embodiment of this application.

[0007] The computer program product provided in the embodiments of this application includes a computer program that, when executed by a processor, implements the X-ray absorption detection method provided in any embodiment of this application.

[0008] The X-ray absorption detection device, X-ray absorption detection method, storage medium, and computer program products provided in this application have a controller that automatically determines measurement parameters based on the absorption edge energy of the element to be measured through a first model. The controller precisely controls the rotation adjustment sub-device to ensure that the bent crystal, detector, and sample are in the correct optical path of the Rowland circle, which greatly improves the degree of automation of the measurement. At the same time, by determining the measurement parameters through the model and automatically adjusting the position of the bent crystal and detector, the accuracy of the measurement data is enhanced and the reliability of the spectral analysis is improved, as it does not depend on the experience level of the operator. Attached Figure Description

[0009] Figure 1 Schematic diagram of the structure of the X-ray absorption detection device provided in the embodiments of this application Figure 1 ; Figure 2 Schematic diagram of the structure of the X-ray absorption detection device provided in the embodiments of this application Figure 2 ; Figure 3 A schematic diagram illustrating the proposed measurement parameters for embodiments of this application; Figure 4 This is a preview diagram of the scan points provided in an embodiment of this application; Figure 5 This is a schematic diagram of the data saving interface provided in an embodiment of this application; Figure 6 This is a schematic diagram of spectral analysis provided for an embodiment of this application; Figure 7 A schematic diagram illustrating the implementation process of the X-ray absorption detection method provided in the embodiments of this application; Figure 8 A schematic structural diagram of an electronic device provided in the embodiments of this application; Figure 9 This is a schematic structural diagram of the chip provided in an embodiment of this application. Detailed Implementation

[0010] The technical solutions of the embodiments of this application will now be described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0011] It should be noted that, in the embodiments of this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, in the embodiments of this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0012] In the description of the embodiments of this application, the term "correspondence" may indicate that there is a direct or indirect correspondence between two things, or that there is an association between two things, or that there is a relationship of instruction and being instructed, configuration and being configured, etc.

[0013] To facilitate understanding of the technical solutions of the embodiments of this application, the relevant technologies of the embodiments of this application are described below. The following relevant technologies are optional solutions and can be combined with the technical solutions of the embodiments of this application in any way, and they all fall within the protection scope of the embodiments of this application.

[0014] X-ray absorption fine structure spectroscopy, as an important non-destructive analytical technique, is one of the key methods for studying the structure of matter. It is used to study the local near-neighbor structure of atoms in solid and liquid substances and has wide applications in materials science, chemistry, and environmental science. An X-ray absorption spectrometer is an analytical device used to measure the fine structure of X-ray absorption spectra. Laboratory benchtop X-ray absorption spectrometers generally employ a translational-rotational structure, where the center of the Rowland circle is fixed, and the X-ray source and detector move in translation and rotation on the Rowland circle, respectively. The optical path system of this instrument occupies a relatively large space, and precise motion control of the X-ray source and detector is required to achieve good measurement results. Inaccurate measurement data will affect the reliability of spectral analysis.

[0015] For the measurement of different elements, it is necessary to optimize the instrument's measurement parameters and the bending crystal. This usually depends on the operator's experience level, which will affect the instrument's resolution and the accuracy and repeatability of the measurement data.

[0016] refer to Figure 1 , Figure 1 This is a schematic diagram of the structure of the X-ray absorption detection device provided in the embodiments of this application. Figure 1 ,like Figure 1 As shown, the X-ray absorption detection device provided in this embodiment includes: an X-ray source, a curved crystal, a sample stage, and a detector; the X-ray absorption detection device further includes: a rotation adjustment sub-device and a controller; the curved crystal and the detector are disposed on the rotation adjustment sub-device; wherein, The controller is used to determine measurement parameters based on the absorption edge energy of the element to be measured using a first model; the measurement parameters include: the optical path parameters of the Rowland circle; based on the optical path parameters, the controller controls the rotation adjustment device to translate and / or rotate, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample to be measured on the sample stage is in the diffraction optical path of the Rowland circle.

[0017] In this application embodiment, the X-ray absorption detection device can also be called an X-ray absorption spectrometer, and this application embodiment does not limit it to that.

[0018] In this embodiment, the X-ray source can be a fixed X-ray tube. During the scanning process, the rotation adjustment device is controlled to translate and / or rotate. The radius of the Rowland circle remains fixed, while the center of the Rowland circle changes continuously according to the scanning, thereby reducing the space required for the Rowland circle optical path system.

[0019] In this embodiment, the curved crystal is used for monochromatic and focusing X-rays. The curved crystal can be a Johann-type or Johanson-type spherical curved crystal. In practical applications, other types of curved crystals can also be used. This embodiment does not limit this.

[0020] In this embodiment, the controller is used to automatically calculate the optical path parameters of the dynamic Rowland circle based on the absorption edge energy of the element to be measured, and send control commands to the rotation adjustment sub-device based on the control parameters to control the rotation adjustment sub-device to translate and / or rotate, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample to be measured on the sample stage is in the diffraction optical path of the Rowland circle, thereby realizing intelligent automatic configuration of the optical path parameters.

[0021] In this embodiment of the application, the optical path parameters include: the rotation angle of the curved crystal, the translation position of the curved crystal, the translation position of the detector, and the translation position of the detector.

[0022] In this embodiment of the application, the rotation adjustment device includes: a first displacement stage, a second displacement stage, a first motor and a second motor. A bending crystal is disposed on the first displacement stage, and a detector is disposed on the second displacement stage. The first motor is used to control the movement of the first displacement stage to move the bending crystal, and the second motor is used to control the movement of the second displacement stage to move the detector.

[0023] In this embodiment, the controller is used to send a first control command and a second control command to a first motor and a second motor respectively based on optical path parameters; the first control command is used to control the first motor to drive the first displacement stage to move, so that the curved crystal moves to the rotation angle and translation position of the curved crystal characterized by the optical path parameters; the second control command is used to control the second motor to drive the second displacement stage to move, so that the detector follows the curved crystal to the translation position and translation position of the detector characterized by the optical path parameters.

[0024] In this embodiment, the controller is used to control the first motor to drive the first displacement stage to move based on optical path parameters, so that the curved crystal moves, and to control the second motor to drive the second displacement stage to move, so that the detector follows the curved crystal, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample under test on the sample stage is in the diffraction optical path of the Rowland circle.

[0025] Based on this, in this embodiment of the application, the rotation adjustment sub-device includes: a first displacement stage, a second displacement stage, a first motor, and a second motor; the bending crystal is disposed on the first displacement stage; and the detector is disposed on the second displacement stage. The controller is configured to control the first motor to drive the first displacement stage to move based on the optical path parameters, thereby moving the curved crystal, and to control the second motor to drive the second displacement stage to move, thereby moving the detector to follow the curved crystal, so that the curved crystal and the detector are positioned in the optical path of the Rowland circle, and the sample under test on the sample stage is positioned in the diffraction optical path of the Rowland circle.

[0026] In this embodiment, the incident light path of the Rowland circle refers to the light path from the X-ray source to the curved crystal, and the diffraction light path of the Rowland circle is the light path of the X-rays after diffraction by the curved crystal and then directed to the detector.

[0027] In this embodiment, a "master-slave driving mode" is adopted, in which the first motor drives the first displacement stage to move the curved crystal, and the second motor synchronously follows and drives the detector according to the geometric relationship of the Rowland circle, so as to ensure that both are always on the Rowland circle optical path.

[0028] In this embodiment, the motor can be selected according to the measurement requirements: a servo motor for high-resolution measurement, a linear motor for fast scanning, and a stepper motor for conventional measurement. This achieves the adaptation of the driving method to the motion accuracy of the optical path, maximizing accuracy while reducing manufacturing costs.

[0029] refer to Figure 2 , Figure 2This is a schematic diagram of the structure of the X-ray absorption detection device provided in the embodiments of this application. Figure 2 ,like Figure 2 As shown, the X-ray absorption detection device includes: an X-ray source, a curved crystal, a sample stage, a detector, a first rotation adjustment device, a second rotation adjustment device, and a helium chamber; the first and second rotation adjustment devices together constitute the rotation adjustment device; the helium chamber is disposed between the X-ray source and the curved crystal, and between the detector and the curved crystal, for providing helium so that the incident light path and diffraction light path of the Rowland circle are in helium, thereby reducing the absorption and scattering of X-rays by air.

[0030] Based on this, in the embodiments of this application, the X-ray absorption detection device further includes: a helium chamber; The helium chamber is located between the X-ray source and the curved crystal, and between the detector and the curved crystal, to provide helium so that the incident and diffracted light paths of the Rowland circle are in helium.

[0031] In the embodiments of this application, Figure 2 The helium chamber shown is an integrated helium chamber, meaning the incident light path and the diffraction light path are both within the same helium chamber. In practical applications, a segmented sealed helium chamber can also be used, with the incident light path and the diffraction light path located in different helium chambers. The controller controls the helium chamber to adaptively expand / contract / fine-tune its angle as it moves synchronously with the bending crystal and the detector, ensuring that the incident light path and the diffraction light path are in a helium atmosphere. This reduces the absorption loss of X-rays by air by ≥80%, lowers the scattering background noise, and ensures the effective acquisition of weak diffraction signals in the dynamic light path.

[0032] In this embodiment, the center of the light-passing port of the helium cavity coincides with the center line of the optical path of the dynamic Rowland circle, thus avoiding X-ray deflection caused by dynamic changes in the optical path.

[0033] In this embodiment, the controller can automatically adjust the helium flow rate of the helium chamber according to the operating parameters of the X-ray source to ensure that the helium atmosphere throughout the optical path matches the measurement parameters; the operating parameters of the X-ray source include: tube pressure parameters and tube flow parameters.

[0034] Based on this, the controller in this embodiment is further configured to determine the operating parameters of the helium chamber based on the operating parameters of the X-ray source; and adjust the helium flow rate in the helium chamber based on the operating parameters of the helium chamber, so that the helium flow rate matches the operating parameters of the X-ray source.

[0035] In this embodiment, the controller can determine the operating parameters of the helium chamber based on the operating parameters of the X-ray source using an artificial intelligence model. Based on the determined operating parameters of the helium chamber, the controller sends control commands to the helium chamber to control the adjustment of the helium flow rate.

[0036] In this embodiment, the controller can also iteratively adjust the optical path parameters based on the optical path diffraction signal (signal intensity, signal-to-noise ratio, etc.) collected by the detector, according to the signal quality (if the signal-to-noise ratio is low, automatically fine-tune the detector position or increase the X-ray focal spot, etc.), forming a fully automated intelligent adjustment closed loop of optical path acquisition-AI analysis-parameter adjustment-optical path optimization.

[0037] Based on this, in the embodiments of this application, the controller is further configured to adjust the measurement parameters based on the optical path diffraction signal collected by the detector, and control the rotation adjustment device to translate and / or rotate based on the adjusted optical path parameters, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample under test on the sample stage is in the diffraction optical path of the Rowland circle.

[0038] In this embodiment, the controller is used to iterate the first model based on the optical path diffraction signal collected by the detector, and redetermine the optical path parameters through the iterated first model to improve the accuracy of the measurement parameters determined by the first model.

[0039] In this embodiment, the X-ray absorption detection device can perform one operation to detect multiple samples. Multiple samples can be placed on the sample stage. When the sample to be tested is changed from one of the multiple measurement samples to another, the sample stage sends a sample change signal to the controller. The controller receives the sample change signal sent by the sample stage and responds to the sample change signal to re-determine the measurement parameters through the first model, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample to be tested after the sample change is in the diffraction optical path of the Rowland circle.

[0040] Based on this, in this embodiment of the application, the sample stage is used to place multiple measurement samples; The sample stage is used to send a sample change signal to the controller when the sample to be tested is changed from one of the plurality of measurement samples to another; The controller is configured to receive a sample change signal sent by the sample stage and, in response to the sample change signal, redetermine the measurement parameters using the first model, such that the curved crystal and the detector are positioned in the optical path of the Rowland circle, and the sample under test after sample change is positioned in the diffraction optical path of the Rowland circle.

[0041] In this embodiment, the sample stage is a rotary wheel sample stage, used to fix the thin film sample and realize automatic sample changing, such as... Figure 2As shown, the sample stage includes a rotating disk, and each groove can hold a thin film sample. The thin film sample is stuck in the groove. The rotating disk can rotate clockwise or counterclockwise to change samples. When the sample to be tested is changed from one of the multiple measurement samples to another, the sub-controller in the sample stage can send a sample change signal to the controller.

[0042] In this embodiment, the sample stage is placed in the diffraction light path between the curved crystal and the detector. The sample under test on the sample stage coincides with the center line of the optical path of the Rowland circle, ensuring that the sample is always at the X-ray focal point. After sample change, based on the determined optical path parameters, the sample under test automatically aligns with the center line of the optical path without manual adjustment.

[0043] In this embodiment of the application, for the measurement requirements of thin film samples, the controller can control the X-ray focal spot size of the optical path to match the sample clamping size of the sample stage, so as to ensure that the X-rays completely cover the sample test area.

[0044] In this embodiment of the application, the measurement parameters also include: X-ray focal spot size.

[0045] In this embodiment of the application, the measurement parameters also include one or more of the following parameters: tube voltage / tube current of the X-ray source, integration time of the detector, motor step size, scanning parameters (scanning range, step size, etc.), etc., and the measurement parameters are strictly matched with the geometric principle of the dynamic Rowland circle.

[0046] In this embodiment, the first model can automatically accumulate and iteratively optimize. It can be trained not only through a general spectral library, but also supplemented with a related dataset of multi-element X-ray absorption spectrum data, hardware parameters, and optical path parameters obtained by actual measurement of the X-ray absorption device provided in this embodiment (such as matching data of absorption edge energy of elements such as Mn, Fe, and Cu with corresponding optical path motion parameters and hardware operating parameters). It can also include actual measurement data under different helium atmospheres and different sample thicknesses to ensure the hardware compatibility of the first model with the X-ray absorption detection device. In this embodiment, the first model can employ a multi-branch convolutional neural network (CNN) with an attention mechanism. One branch extracts the energy features of the element absorption edge, and the other branch extracts the spatial features of the optical path geometry. The attention mechanism focuses on the parameter optimization near the absorption edge to ensure the parameter output accuracy at sub-eV resolution and highlight the strong correlation between the absorption edge energy and the optical path parameters.

[0047] In this embodiment, the detection process of the X-ray absorption detection device is as follows: Analyte selection → The first model outputs initial hardware / optical path / scanning parameters based on the absorption edge energy of the analyte → The controller controls the rotation adjustment device to synchronize the movement of the curved crystal / detector, the helium chamber automatically opens for adaptation, and the X-ray source starts according to the parameters → Sample measurement and spectral data acquisition via the detector → The controller performs real-time analysis of the spectrum using an AI model (including signal-to-noise ratio, resolution, and diffraction signal filtering effect) → If the spectral indicators do not reach sub-eV resolution / preset threshold, the controller iteratively optimizes the measurement parameters based on the spectral feedback data using the first model → The controller controls the rotation adjustment device to re-adapt to the new parameters → Measurement is repeated until the spectral indicators meet the standards → The detection data is saved, and the measurement parameters are added to the first model training set to complete self-learning.

[0048] In this embodiment of the application, based on the absorption edge energy of the element to be measured, the controller can also automatically select the optimal crystal type through the first model and output the diffraction angle corresponding to the crystal, thereby realizing the integrated intelligent operation of "crystal selection - angle setting" and realizing the optimization, update, adjustment and iteration function. In this embodiment of the application, the controller can be a host computer or other types of controllers, and this embodiment of the application does not limit this.

[0049] In this embodiment, the samples to be tested are placed sequentially on the sample stage. The X-ray absorption detection device and the host computer are turned on and connected. Then, the element to be tested is selected from the drop-down box for selecting the sample on the test page. The bending crystal will default to selecting the first available one. After selection, the host computer automatically calculates the available energy range based on the actual situation of the X-ray absorption detection device and places the monochromator (i.e., the bending crystal) on the monochromator rotating stage. After selecting the element to be tested, the parameter configuration is automatically generated through the first model, including the voltage and current of the X-ray tube, the integration time of the detector, as well as the scanning range and step size. These parameters can also be modified. Based on the scanning range and step size, an overview of the scan and the relationship between the scanning range and the absorption edge can be seen in the scan point preview. After the parameters are set, clicking the start button will automatically start the execution. The detection data will be automatically saved to the database, containing all parameters and spectral data of this experiment for easy viewing. The database can view the artificial intelligence (AI) analysis results of the spectrum, providing analysis results and suggestions. The first model iterates the test parameters and optimizes the measurement parameters to improve the test accuracy of subsequent sample measurements.

[0050] refer to Figure 3 , Figure 3 A schematic diagram illustrating the suggested measurement parameters provided in the embodiments of this application, such as... Figure 3 As shown, Figure 3The following shows the recommended types of bent crystals to be used when the element to be tested is Mn: Si (440), Ge (999), Si (111), Si (110), etc.

[0051] refer to Figure 4 , Figure 4 This is a schematic diagram of the scan point preview provided in the embodiments of this application. The horizontal axis represents energy, and the vertical axis represents the absorption coefficient. The spectrum presents different stages according to the energy change, from left to right: Pre-Edge, Edge, Post-Edge, and Far-Edge regions. The interface on the left shows the parameter input and X-ray Absorption Fine Structure (XAFS) scan parameter settings, which can adjust parameters such as the scan energy range and edge energy. The overall interface provides an intuitive view and operation options for scanning preview and analysis of XAFS experimental data.

[0052] refer to Figure 5 , Figure 5 This is a schematic diagram of the data saving interface provided in an embodiment of this application, such as... Figure 5 As shown, the database stores detection data from four measurements. For each strategy's data, you can click on the details to view the complete data, analyze the detection data using an AI model, or export it to JSON and / or CSV format.

[0053] refer to Figure 6 , Figure 6 This is a schematic diagram of spectral analysis provided for the embodiments of this application, such as... Figure 6 As shown, the detected spectrum can be analyzed using an AI model. The parameters analyzed include: energy, channels, peak value, score, total count, maximum count, standard deviation, baseline level, signal-to-noise ratio, energy resolution, etc.

[0054] refer to Figure 7 , Figure 7 This is a schematic diagram illustrating the implementation flow of the X-ray absorption detection method provided in the embodiments of this application, as shown below. Figure 7 As shown, the X-ray absorption detection method provided in this embodiment includes the following steps: Step 101: The controller of the X-ray absorption detection device determines the measurement parameters based on the absorption edge energy of the element to be measured using a first model; the measurement parameters include the optical path parameters of the Rowland circle; based on the optical path parameters, the controller controls the rotation adjustment sub-device of the X-ray absorption detection device to translate and / or rotate, so that the curved crystal and detector of the X-ray absorption detection device are positioned on the optical path of the Rowland circle, and the sample to be measured on the sample stage of the X-ray absorption detection device is positioned on the diffraction optical path of the Rowland circle.

[0055] In this application embodiment, the X-ray absorption detection device is the X-ray absorption device provided in any embodiment of this application.

[0056] In this embodiment of the application, the sample stage of the X-ray absorption detection device can hold multiple measurement samples. When the sample to be measured is changed from one of the multiple measurement samples to another, the sample stage sends a sample change signal to the controller. The controller receives the sample change signal sent by the sample stage and responds to the sample change signal by re-determining the optical path parameters of the Rowland circle through the first model, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample to be measured after the sample change is in the diffraction optical path of the Rowland circle.

[0057] Based on this, in this embodiment of the application, the sample stage of the X-ray absorption detection device is used to place multiple measurement samples, and the method further includes: When the sample to be tested is replaced by one of the plurality of measurement samples, the controller receives the sample replacement signal sent by the sample stage and responds to the sample replacement signal by re-determining the optical path parameters of the Rowland circle through the first model, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample to be tested after the sample replacement is in the diffraction optical path of the Rowland circle.

[0058] Figure 8 This is a schematic structural diagram of an electronic device provided in an embodiment of this application. Figure 8 The electronic device shown includes a processor 810, which can call and run computer programs from memory to implement the X-ray absorption detection method provided in the embodiments of this application.

[0059] Optionally, such as Figure 8 As shown, the electronic device may further include a memory 820. The processor 810 can retrieve and run computer programs from the memory 820 to implement the X-ray absorption detection method provided in this embodiment.

[0060] The memory 820 can be a separate device independent of the processor 810, or it can be integrated into the processor 810.

[0061] Optionally, such as Figure 8 As shown, the electronic device may also include a transceiver 830, which the processor 810 can control to communicate with other devices. Specifically, it can send information or data to other devices or receive information or data sent by other devices.

[0062] The transceiver 830 may include a transmitter and a receiver. The transceiver 830 may further include an antenna, and the number of antennas may be one or more.

[0063] This electronic device can implement the corresponding processes implemented by the X-ray absorption detection device in the various methods of the embodiments of this application, which will not be described in detail here for the sake of brevity.

[0064] For example, embodiments of this application also provide a computer program product, including a computer program that can be executed by a processor 810 of an electronic device to perform the steps described in any of the foregoing methods.

[0065] Figure 9 This is a schematic structural diagram of the chip according to an embodiment of this application. Figure 9 The chip shown includes a processor 910, which can call and run computer programs from memory to implement the methods in the embodiments of this application.

[0066] Optionally, such as Figure 9 As shown, the chip may also include a memory 920. The processor 910 can retrieve and run computer programs from the memory 920 to implement the methods described in this embodiment.

[0067] The memory 920 can be a separate device independent of the processor 910, or it can be integrated into the processor 910.

[0068] Optionally, the chip may also include an input interface 930. The processor 910 can control the input interface 930 to communicate with other devices or chips; specifically, it can acquire information or data sent by other devices or chips.

[0069] Optionally, the chip may also include an output interface 940. The processor 910 can control the output interface 940 to communicate with other devices or chips, specifically, to output information or data to other devices or chips.

[0070] This chip can be applied to the electronic devices in the embodiments of this application, and the chip can implement the corresponding processes implemented by the electronic devices in the various methods of the embodiments of this application. For the sake of brevity, it will not be described in detail here.

[0071] It should be understood that the chip mentioned in the embodiments of this application may also be referred to as a system-on-a-chip, system chip, chip system, or system-on-a-chip, etc.

[0072] It should be understood that the processor in the embodiments of this application may be an integrated circuit chip with signal processing capabilities. In implementation, the steps of the above method embodiments can be completed by integrated logic circuits in the processor's hardware or by instructions in software form. The processor described above can be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. It can implement or execute the methods, steps, and logic block diagrams disclosed in the embodiments of this application. The general-purpose processor can be a microprocessor or any conventional processor. The steps of the methods disclosed in the embodiments of this application can be directly embodied in the execution of a hardware decoding processor, or executed by a combination of hardware and software modules in the decoding processor. The software modules can be located in random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, or other mature storage media in the art. The storage medium is located in memory, and the processor reads information from the memory and, in conjunction with its hardware, completes the steps of the above method.

[0073] It is understood that the memory in the embodiments of this application can be volatile memory or non-volatile memory, or may include both volatile and non-volatile memory. The non-volatile memory can be read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory. The volatile memory can be random access memory (RAM), which is used as an external cache. By way of example, but not limitation, many forms of RAM are available, such as Static Random Access Memory (SRAM), Dynamic Random Access Memory (DRAM), Synchronous DRAM (SDRAM), Double Data Rate SDRAM (DDR SDRAM), Enhanced Synchronous DRAM (ESDRAM), Synchlink DRAM (SLDRAM), and Direct Rambus RAM (DR RAM). It should be noted that the memory used in the systems and methods described herein is intended to include, but is not limited to, these and any other suitable types of memory.

[0074] It should be understood that the above-described memory is exemplary and not a limiting description. For example, the memory in the embodiments of this application may also be static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM), and direct memory bus RAM (DR RAM), etc. That is to say, the memory in the embodiments of this application is intended to include, but is not limited to, these and any other suitable types of memory.

[0075] This application also provides a storage medium for storing a computer program. This storage medium can be applied to the electronic device in this application embodiment, and the computer program causes the computer to execute the corresponding processes implemented by the electronic device in the various methods of this application embodiment; for brevity, further details are omitted here.

[0076] Those skilled in the art will recognize that the modules and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0077] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and modules described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0078] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of modules is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple modules or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between apparatuses or modules may be electrical, mechanical, or other forms.

[0079] The modules described as separate components may or may not be physically separate. The components shown as modules may or may not be physical modules; that is, they may be located in one place or distributed across multiple network modules. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs.

[0080] In addition, the functional modules in the various embodiments of this application can be integrated into one processing module, or each module can exist physically separately, or two or more modules can be integrated into one module.

[0081] If the aforementioned functions are implemented as software functional modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or electronic device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0082] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Any modifications, equivalent substitutions, and improvements made within the spirit and scope of this application are included within the scope of protection of this application.

Claims

1. An X-ray absorption detection device, comprising: The device comprises an X-ray source, a curved crystal, a sample stage, and a detector; characterized in that the X-ray absorption detection apparatus further includes: a rotation adjustment sub-device and a controller; the curved crystal and the detector are disposed on the rotation adjustment sub-device; wherein... The controller is used to determine measurement parameters based on the absorption edge energy of the element to be measured using a first model; the measurement parameters include: the optical path parameters of the Rowland circle; based on the optical path parameters, the controller controls the rotation adjustment device to translate and / or rotate, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample to be measured on the sample stage is in the diffraction optical path of the Rowland circle.

2. The X-ray absorption detection device according to claim 1, characterized in that, The rotation adjustment sub-device includes: a first displacement stage, a second displacement stage, a first motor, and a second motor; the bending crystal is disposed on the first displacement stage; the detector is disposed on the second displacement stage; The controller is configured to control the first motor to drive the first displacement stage to move based on the optical path parameters, thereby moving the curved crystal, and to control the second motor to drive the second displacement stage to move, thereby moving the detector to follow the curved crystal, so that the curved crystal and the detector are positioned in the optical path of the Rowland circle, and the sample under test on the sample stage is positioned in the diffraction optical path of the Rowland circle.

3. The X-ray absorption detection device according to claim 1, characterized in that, The X-ray absorption detection device further includes: a helium chamber; The helium chamber is located between the X-ray source and the curved crystal, and between the detector and the curved crystal, to provide helium so that the incident and diffracted light paths of the Rowland circle are in helium.

4. The method according to claim 3, characterized in that, The controller is further configured to determine the operating parameters of the helium chamber based on the operating parameters of the X-ray source; and to adjust the helium flow rate in the helium chamber based on the operating parameters of the helium chamber, so that the helium flow rate matches the operating parameters of the X-ray source.

5. The X-ray absorption detection device according to claim 1, characterized in that, The controller is also used to adjust the measurement parameters based on the optical path diffraction signal collected by the detector, and to control the rotation adjustment device to translate and / or rotate based on the adjusted optical path parameters, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample under test on the sample stage is in the diffraction optical path of the Rowland circle.

6. The X-ray absorption detection device according to claim 1, characterized in that, The sample stage was used to hold multiple measurement samples; The sample stage is used to send a sample change signal to the controller when the sample to be tested is changed from one of the plurality of measurement samples to another; The controller is configured to receive a sample change signal sent by the sample stage and, in response to the sample change signal, redetermine the measurement parameters using the first model, such that the curved crystal and the detector are positioned in the optical path of the Rowland circle, and the sample under test after sample change is positioned in the diffraction optical path of the Rowland circle.

7. An X-ray absorption detection method, characterized in that, include: The controller of the X-ray absorption detection device determines the measurement parameters based on the absorption edge energy of the element to be measured using a first model. The measurement parameters include: the optical path parameters of the Rowland circle; Based on the optical path parameters, the rotation adjustment sub-device of the X-ray absorption detection device is controlled to translate and / or rotate, so that the curved crystal and detector of the X-ray absorption detection device are in the optical path of the Rowland circle, and the sample under test on the sample stage of the X-ray absorption detection device is in the diffraction optical path of the Rowland circle.

8. The method according to claim 7, characterized in that, The sample stage of the X-ray absorption detection device is used to place multiple measurement samples, and the method further includes: When the sample to be tested is replaced by one of the plurality of measurement samples, the controller receives the sample replacement signal sent by the sample stage and responds to the sample replacement signal by re-determining the optical path parameters of the Rowland circle through the first model, so that the curved crystal and the detector are in the optical path of the Rowland circle, and the sample to be tested after the sample replacement is in the diffraction optical path of the Rowland circle.

9. A storage medium, characterized in that, Used to store computer programs that cause a computer to perform the X-ray absorption detection method as described in claim 7 or 8.

10. A computer program product, comprising a computer program, characterized in that, When the computer program is executed by a processor, it implements the X-ray absorption detection method as described in claim 7 or 8.

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