A film thickness detection device for a coating machine

Abstract

The application discloses a film thickness detection device for a coating machine, and relates to the technical field of film thickness measurement of the coating machine.The film thickness detection device comprises a supporting table, a controller arranged on one side of the supporting table, a measuring unit arranged on the supporting table, a horizontal unit arranged in the supporting table, a clean unit arranged on the supporting table, and a cavity formed in the supporting table.The measuring unit comprises an adjusting piece and a measuring piece, the horizontal unit comprises an adjusting piece, a follower and a detection piece, and the clean unit comprises a clean piece.The supporting table is fixedly connected with the adjusting piece, the supporting table is fixedly connected with the adjusting piece, and the clean piece is arranged on the supporting table.Through the horizontal unit, the horizontal calibration of a to-be-measured area is realized, and through the clean unit, the clean treatment of the to-be-measured area is realized, so that the horizontal reference of the test is ensured to be normal.After the staff completes the debugging through the measuring unit, the to-be-measured piece is placed in the to-be-measured area, the film thickness measurement of the to-be-measured piece is realized, and the accuracy of the measurement is ensured.

Description

Technical Field

[0001] This invention relates to the field of coating machine film thickness measurement technology, specifically a film thickness detection device for coating machines. Background Technology

[0002] Coating technology is widely used in precision manufacturing fields such as optics, semiconductors, and precision hardware. The accuracy and uniformity of the film thickness are the core keys to controlling the quality of coated products. The film thickness measuring device is a core supporting equipment of the coating machine. Its measurement accuracy and stability directly determine the yield rate of coated products and are of paramount importance to the quality control of precision coating production.

[0003] Currently, existing film thickness measurement devices mainly rely on adjusting bolts and support pads to calibrate the level of the measurement platform, thus ensuring a flat measurement reference. However, during continuous operation of the coating machine, a large amount of fine coating dust and film debris are continuously generated inside the cavity. These impurities are easily suspended and settled by airflow, accumulating in large quantities on the top surface of the bolts, the end face of the support pads, and the contact gap. After long-term operation, they form an uneven layer of impurities, causing local bulges on the reference surface of the measurement platform and uneven support stress, completely destroying the preset horizontal reference. Conventional bolt fine-tuning leveling methods can only correct conventional tilt deviations and cannot eliminate the reference error caused by local bulges, resulting in the platform being in a slightly tilted abnormal state for a long time. At the same time, residual dust on the surface of the measurement platform can cause workpiece placement to shift and not fit tightly, changing the workpiece measurement posture and interfering with the optical measurement path and measurement reference.

[0004] Therefore, there is an urgent need to develop a film thickness measurement device that can overcome the non-standard horizontal reference of the platform caused by the above reasons. Summary of the Invention

[0005] The technical problem to be solved by the present invention is the adjustment of the horizontal reference of the film thickness measurement platform of the coating machine, and the present invention provides a film thickness detection device for the coating machine.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: The film thickness detection device includes a support platform, a controller on one side of the support platform, a measuring unit on the support platform, a leveling unit inside the support platform, and a cleaning unit on the support platform. The support platform has a cavity inside; The measuring unit includes an adjustment component and a measuring component; The horizontal unit includes adjusting components, follower components, and detection components; A clean unit includes clean components; The support platform is fixedly connected to the adjusting component, and a cleanroom component is installed on the support platform.

[0007] Furthermore, the adjustment components include an electric push rod, a platform, an air pump, a fixing ring, and a vent pipe. The fixed end of the electric push rod is fixedly installed in the cavity of the support platform. The platform is fixedly connected to the telescopic end of the electric push rod, and the platform is slidably connected to the support platform. The telescopic end of the electric push rod has a hollow structure and a vent hole. The air pump is fixedly installed in the cavity of the support platform. The fixing ring is fixedly installed in the telescopic end of the electric push rod and has a vent hole. The vent hole of the telescopic end of the electric push rod and the vent hole of the fixing ring are arranged coaxially. There are multiple fixing rings, and the multiple fixing rings are connected by a vent pipe.

[0008] Furthermore, the follower includes a straight cylinder, a baffle, an elastic telescopic plate, a sliding rod, and a shielding plate. The straight cylinder is fixedly connected to the vent pipe, the baffle is slidably installed inside the vent pipe, the fixed end of the elastic telescopic plate is connected to the baffle via a connecting rod, the telescopic end of the elastic telescopic plate abuts against the inner wall of the straight cylinder, the fixed end of the elastic telescopic plate is slidably connected to the sliding rod, the fixed end of the elastic telescopic plate is connected to the inner wall of the straight cylinder via a spring, and the shielding plate is fixedly installed at the end of the elastic telescopic plate away from the baffle.

[0009] Furthermore, the fixed end of the elastic telescopic plate is a solid counterweight plate, while the telescopic end is a hollow plate.

[0010] Furthermore, the detection component includes a mounting block, an air guide chamber, an exhaust port, a straight rod, a detection disc, and a return spring. The mounting block is fixedly installed at the end of the straight cylinder. Two air guide chambers are opened inside the mounting block. The diameter of the air guide chambers is larger than the diameter of the shielding disc. In the initial position, the shielding disc and the air guide chambers are arranged coaxially. The mounting block is provided with an exhaust port. The straight rod is fixedly installed inside the air guide chamber. The detection disc is connected to the mounting block through the return spring. The detection disc is slidably connected to the straight rod. The detection disc is made of conductive material.

[0011] Furthermore, conductive coils are evenly wound around the outer surface of the straight rod, and the end of the conductive coil on the straight rod near the shielding plate is the current output end. The detection plate is electrically connected to the electric push rod.

[0012] Furthermore, the cleanroom component includes air blowing holes and dust collection channels. Air blowing holes are provided on the support platform and are connected to an air pump through a conduit. A dust collection channel is provided between the support platform and the platform.

[0013] Furthermore, the adjusting components include a column, a height adjusting bolt, a cantilever, and a clamping bolt. The column is fixedly installed on the support platform, the height adjusting bolt is installed on the column, the height adjusting bolt is fixedly connected to the cantilever, and the cantilever is fixedly connected to the clamping bolt.

[0014] Furthermore, the measuring components include a lifting rod and a counter. The lifting rod is installed inside the clamping bolt, the measuring head is connected to the lifting rod, and the counter is fixedly connected to the measuring head.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. Before the detection operation starts, the controller starts the air pump in the adjustment component, and the stable airflow is sent into the hollow inner cavity of the electric push rod. The airflow flows through the telescopic end channel of the electric push rod and merges with the fixed ring into the air pipe, and is distributed to the straight cylinder air path of each group of follower components. If the platform is tilted, the elastic telescopic plate inside the straight cylinder slides laterally to the lower side of the platform by the weight of the counterweight end, compresses the matching spring along the slide rod, and drives the baffle in the air pipe to move synchronously through the connecting rod. The telescopic end of the elastic telescopic plate closes and retracts in close contact with the inner wall of the straight cylinder to maintain the air path seal and prevent air leakage from affecting the flow detection accuracy.

[0016] 2. In this invention, the end shielding plate of the elastic telescopic plate shifts synchronously with the displacement, reducing the shielding area of ​​the high-side air guide cavity on the platform and increasing the flow cross-section, thus increasing the air flow rate. Conversely, the shielding area of ​​the low-side air guide cavity on the platform increases, reducing the flow cross-section and decreasing the air flow rate. The diverted airflow enters the air guide cavity inside the mounting block of the detection component and is finally discharged through the exhaust hole, preventing the cavity from being compressed and damaging the component. At the same time, the airflow generates an upward pneumatic lifting force on the conductive material detection plate inside the cavity.

[0017] 3. This invention utilizes a high flow rate on the high side to generate stronger lifting force, pushing the detection disc to compress the reset spring and slide upwards along the straight rod. This increases the number of turns in the conductive coil connected to the circuit and raises the circuit resistance. The controller then lowers the current of the corresponding electric push rod to cause it to contract, causing the high side of the platform to descend. The low side, lacking sufficient airflow lifting force, causes the reset spring to push the detection disc downwards. This reduces the number of turns in the connected coil and lowers the circuit resistance. The controller then increases the current of the electric push rod to extend it, raising the low side of the platform. The platform tilt is continuously corrected by differential adjustment of the electric push rods on both sides until the flow rate in each air path is balanced, all detection discs are at the same height, and the circuit resistance reaches a preset balance. The platform then completes fully automatic horizontal calibration, ensuring the accuracy of the measurement reference plane.

[0018] 4. During the process of the platform being lifted by the electric push rod, the air pump diverts part of the airflow to the air blowing hole of the clean part, and blows away the dust and film material debris on the surface of the platform in a directional manner. The impurities are pushed by the airflow to the dust collection channel between the support table and the platform for unified collection, which completely eliminates the interference of particulate matter on the measurement benchmark and stabilizes the accuracy of film thickness detection data. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall appearance and structure of the present invention; Figure 2 This is a schematic diagram of the external structure of the measuring unit of the present invention; Figure 3 This is a schematic diagram of the installation position of the adjusting component of the present invention; Figure 4 This is a schematic diagram of the mounting positions of the follower and the detection element of the present invention; Figure 5 This is a schematic diagram of the internal structure of the straight cylinder of the present invention; Figure 6 This is a schematic diagram of the mounting position structure of the shielding disc of the present invention; Figure 7 This is a schematic diagram of the internal structure of the mounting block of the present invention; Figure 8 for Figure 7 A partial enlarged view of the structure at point A in the middle; Figure 9 This is a schematic diagram of the installation position of the cleanroom component according to the present invention.

[0020] In the diagram: 1. Support platform; 2. Measuring unit; 21. Adjusting component; 211. Column; 212. Height adjustment bolt; 213. Cantilever; 214. Clamping bolt; 22. Measuring component; 221. Lifting rod; 222. Counter; 223. Measuring head; 3. Horizontal unit; 31. Adjusting component; 311. Electric push rod; 312. Platform; 313. Air pump; 314. Fixing ring; 315. Vent pipe; 32. Follower component; 321. Straight cylinder; 322. Baffle; 323. Elastic telescopic plate; 324. Slide rod; 325. Shielding plate; 33. Detection component; 331. Mounting block; 332. Air guide chamber; 333. Exhaust port; 334. Straight rod; 335. Detection plate; 336. Return spring; 4. Clean unit; 41. Clean component; 411. Air blowing port; 412. Dust collection channel. Detailed Implementation

[0021] Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] Example: Figures 1-9 As shown, the present invention provides the following technical solution: like Figures 1-9 As shown, the film thickness detection device includes a support platform 1, a controller is provided on one side of the support platform 1, a measuring unit 2 is provided on the support platform 1, a horizontal unit 3 is provided inside the support platform 1, and a clean unit 4 is provided on the support platform 1. The support platform 1 has a cavity inside; The measuring unit 2 includes an adjusting element 21 and a measuring element 22; The horizontal unit 3 includes an adjustment component 31, a follower component 32, and a detection component 33; Clean unit 4 includes clean component 41; The support platform 1 is fixedly connected to the adjusting component 21, and the support platform 1 is fixedly connected to the adjusting component 31. A clean component 41 is provided on the support platform 1.

[0023] The horizontal unit 3 calibrates the level of the area to be tested, and the clean unit 4 cleans the area to be tested to ensure that the horizontal reference for the test is normal. After the staff completes the debugging through the measurement unit 2, the test piece is placed in the area to be tested and the film thickness of the test piece is measured to ensure the accuracy of the measurement.

[0024] like Figure 3 , Figure 4 As shown, the adjusting component 31 includes an electric push rod 311, a platform 312, an air pump 313, a fixing ring 314, and a vent pipe 315. The fixed end of the electric push rod 311 is fixedly installed in the cavity of the support platform 1. The platform 312 is fixedly connected to the telescopic end of the electric push rod 311 and is slidably connected to the support platform 1. The telescopic end of the electric push rod 311 has a hollow structure and a vent hole. The air pump 313 is fixedly installed in the cavity of the support platform 1. The fixing ring 314 is fixedly installed in the telescopic end of the electric push rod 311 and has a vent hole. The vent hole of the telescopic end of the electric push rod 311 and the vent hole of the fixing ring 314 are arranged coaxially. There are multiple fixing rings 314, and the multiple fixing rings 314 are connected by the vent pipe 315.

[0025] like Figures 5-7 As shown, the follower 32 includes a straight cylinder 321, a baffle 322, an elastic telescopic plate 323, a sliding rod 324, and a shielding plate 325. The straight cylinder 321 is fixedly connected to the vent pipe 315. The baffle 322 is slidably installed inside the vent pipe 315. The fixed end of the elastic telescopic plate 323 is connected to the baffle 322 via a connecting rod. The telescopic end of the elastic telescopic plate 323 abuts against the inner wall of the straight cylinder 321. The fixed end of the elastic telescopic plate 323 is slidably connected to the sliding rod 324. The fixed end of the elastic telescopic plate 323 is connected to the inner wall of the straight cylinder 321 via a spring. The shielding plate 325 is fixedly installed at the end of the elastic telescopic plate 323 away from the baffle 322.

[0026] like Figures 5-7 As shown, the fixed end of the elastic telescopic plate 323 is a solid counterweight plate, and the telescopic end of the elastic telescopic plate 323 is a hollow plate.

[0027] Before measurement, the controller starts the air pump 313, and the pressure-stabilized airflow is simultaneously sent into the hollow inner cavity of the electric push rod 311. The airflow flows along the internal cavity of the telescopic end of the electric push rod 311, and merges into the air pipe 315 through the coaxial vent on the fixing ring 314. Then it is distributed to the follow-up air path in each group of straight cylinders 321. If there is an initial tilt during installation, it will cause the horizontal reference of the platform to deviate from the preset state. At this time, the elastic telescopic plate 323 inside the straight cylinder 321 will automatically slide laterally to the side with the lower platform height under the gravity of its own counterweight end. While the elastic telescopic plate 323 slides smoothly along the slide rod 324, it compresses the spring on the side and drives the baffle 322 in the air pipe 315 to move synchronously through the connecting rod. Since the telescopic end of the elastic telescopic plate 323 always abuts against the inner wall of the straight cylinder 321, it adaptively closes and retracts during the sliding process, ensuring that the side wall of the air path is sealed throughout, avoiding lateral air leakage from interfering with the accuracy of subsequent flow detection.

[0028] like Figures 6-8 As shown, the detection component 33 includes a mounting block 331, an air guide cavity 332, an exhaust port 333, a straight rod 334, a detection disc 335, and a return spring 336. The mounting block 331 is fixedly installed at the end of the straight cylinder 321. Two air guide cavities 332 are opened inside the mounting block 331. The diameter of the air guide cavity 332 is larger than the diameter of the shielding disc 325. In the initial position, the shielding disc 325 and the air guide cavity 332 are arranged coaxially. The mounting block 331 is provided with an exhaust port 333. The straight rod 334 is fixedly installed inside the air guide cavity 332. The detection disc 335 is connected to the mounting block 331 through the return spring 336. The detection disc 335 is slidably connected to the straight rod 334. The detection disc 335 is made of conductive material.

[0029] like Figure 8 As shown, a conductive coil is evenly wound on the outer surface of the straight rod 334. The end of the conductive coil on the straight rod 334 near the shielding plate 325 is the current output end. The detection plate 335 is electrically connected to the electric push rod 311.

[0030] As the elastic telescopic plate 323 slides, the shielding plate 325 at its end shifts laterally. For the side of the platform that is higher, the shielding plate 325 reduces the shielding area of ​​the corresponding air guide cavity 332 and increases the airflow cross-sectional area, thereby increasing the airflow on that side. For the side of the platform that is lower, the shielding plate 325 increases the shielding area of ​​the corresponding air guide cavity 332 and reduces the airflow cross-sectional area, thereby decreasing the airflow on that side. After the airflow is distributed, it enters the air guide cavity 332 inside the mounting block 331 and is finally discharged outward from the exhaust port 333, avoiding continuous pressure buildup in the cavity that could damage the components. When the airflow flows in the air guide cavity 332, it will generate an upward pneumatic lifting force on the detection plate 335.

[0031] The air chamber 332 on the higher side of the platform has a larger flow rate and stronger pneumatic lifting force, which pushes the detection plate 335 to compress the reset spring 336 and slide upward along the straight rod 334. Since the outer surface of the straight rod 334 is evenly wound with a continuous conductive coil, and the detection plate 335 is made of conductive material, after the detection plate 335 moves upward, the number of turns of the conductive coil connected to the control circuit increases, and the resistance in the circuit increases synchronously. The controller receives the signal and reduces the driving current of the corresponding side electric push rod 311, causing the electric push rod 311 on that side to retract, driving the higher side of the platform 312 to fall downward.

[0032] The airflow in the lower side of the platform 332 is smaller, and the pneumatic lifting force is weaker. The restoring force of the return spring 336 will push the detection plate 335 to slide downward along the straight rod 334. The number of turns of the conductive coil connected to the control circuit decreases, and the circuit resistance decreases synchronously. The controller receives the signal and increases the drive current of the corresponding electric push rod 311, causing the electric push rod 311 on that side to extend and drive the lower side of the platform 312 to rise. Through the differential reverse adjustment of the electric push rods 311 on both sides, the tilt of the platform gradually decreases until the airflow on each side of the platform tends to be consistent, and the detection plates 335 at all points stop at the same horizontal height. The control circuit resistance reaches the preset balance value, and the platform 312 completes the automatic calibration of the levelness, ensuring that the flatness of the measurement reference surface meets the requirements of high-precision film thickness detection.

[0033] like Figure 9 As shown, the cleanroom component 41 includes an air blowing hole 411 and a dust collection channel 412. The air blowing hole 411 is provided on the support platform 1. The air blowing hole 411 is connected to the air pump 313 through a conduit. The dust collection channel 412 is provided between the support platform 1 and the platform 312.

[0034] During the process of the electric push rod 311 lifting the platform 312 to the preset measurement height, part of the airflow output by the air pump 313 will be transported through the duct to the air blowing hole 411 of the support platform 1, and blow outward in a directional manner along the surface of the platform 312. The airflow will blow the coating dust and film debris accumulated on the platform to the dust collection channel 412 at the edge of the platform 312. The particles will be collected and discharged uniformly after entering the dust collection channel 412 with the airflow, thereby eliminating the interference of dust on the contact reference and ensuring measurement accuracy.

[0035] like Figure 1 , Figure 2 As shown, the adjusting component 21 includes a column 211, a height adjusting bolt 212, a cantilever 213, and a clamping bolt 214. The column 211 is fixedly installed on the support platform 1, the height adjusting bolt 212 is installed on the column 211, the height adjusting bolt 212 is fixedly connected to the cantilever 213, and the cantilever 213 is fixedly connected to the clamping bolt 214.

[0036] like Figure 2As shown, the measuring component 22 includes a lifting rod 221 and a counter 222. The lifting rod 221 is installed in the clamping bolt 214, the measuring head 223 is connected to the lifting rod 221, and the counter 222 is fixedly connected to the measuring head 223.

[0037] After the horizontal calibration and table cleaning are completed, the measurement reference is calibrated. The measuring head 223 and the counter 222 are assembled on the end of the cantilever 213 and locked in place by the clamping bolt 214. The height adjustment bolt 212 is rotated to drive the cantilever 213 to be adjusted downward along the column 211 until the probe of the measuring head 223 lightly touches the reference surface of the platform 312. The value of the counter 222 is then cleared to zero, and the measurement reference calibration is completed. After the benchmark calibration is completed, the cantilever 213 is raised, and the workpiece to be tested is placed stably in the measurement area of ​​the platform 312. The cantilever 213 is then slowly lowered again, so that the probe of the measuring head 223 is lightly pressed on the surface of the workpiece. The probe is pushed by the workpiece film layer, which drives the lifting rod 221 to move upward. The lifting rod 221 has a built-in grating reading mechanism, which can accurately read the lifting displacement of the probe. This displacement is the step thickness of the film layer relative to the benchmark surface. The value is directly output and displayed through the counter 222. After the measurement of a single workpiece is completed, the cantilever 213 is raised to reset, the probe falls back to the benchmark height, and the device enters the standby state, so that the continuous testing of the next workpiece can be carried out.

[0038] Working principle of the invention: Before the detection operation starts, the controller starts the air pump 313 in the adjustment component 31, and the pressure-stabilized airflow is sent into the hollow cavity of the electric push rod 311. The airflow flows through the telescopic end channel of the electric push rod 311 and the fixed ring 314 into the air pipe 315, and is distributed to the air path of the straight cylinder 321 of each group of follower components 32. If the platform 312 is tilted, the elastic telescopic plate 323 inside the straight cylinder 321 slides laterally to the lower side of the platform by the gravity of the counterweight end, compresses the matching spring along the slide rod 324, and drives the baffle 322 inside the air pipe 315 to move synchronously through the connecting rod. The telescopic end of the elastic telescopic plate 323 adheres tightly to the inner wall of the straight cylinder 321 and adaptively closes to maintain the air path seal and prevent air leakage from affecting the flow detection accuracy.

[0039] The end shielding plate 325 of the elastic telescopic plate 323 shifts synchronously with the displacement, the shielding area of ​​the high-side air guide cavity 332 on the platform decreases, the flow cross section increases, the air flow increases, the shielding area of ​​the low-side air guide cavity 332 on the platform increases, the flow cross section decreases, the air flow decreases, and the split airflow enters the air guide cavity 332 inside the mounting block 331 of the detection component 33, and is finally discharged through the exhaust hole 333, avoiding the cavity from being pressure-damaged by the component. At the same time, the airflow generates an upward pneumatic lifting force on the conductive material detection plate 335 inside the cavity.

[0040] The higher flow rate on the high side generates a stronger lifting force, pushing the detection plate 335 to compress the reset spring 336 and slide upward along the straight rod 334. This increases the number of turns of the conductive coil connected to the circuit and raises the circuit resistance. The controller then lowers the current of the corresponding electric push rod 311 to make it contract, causing the high side of the platform 312 to descend. The airflow on the low side lacks sufficient lifting force, so the reset spring 336 pushes the detection plate 335 downward. This reduces the number of turns of the connected coil and lowers the circuit resistance. The controller then increases the current of the electric push rod 311 to make it extend, raising the low side of the platform 312. By relying on the differential adjustment of the electric push rods 311 on both sides, the tilt of the platform 312 is continuously corrected until the flow rate of each air path is balanced, all detection plates 335 are at the same height, and the circuit resistance reaches the preset balance. The platform 312 then completes fully automatic horizontal calibration, ensuring the accuracy of the measurement reference plane.

[0041] During the process of the platform 312 being lifted by the electric push rod 311, the air pump 313 diverts part of the airflow to the air blowing hole 411 of the clean part 41, and blows away the dust and film material debris on the surface of the platform 312 in a directional manner. The impurities are pushed by the airflow to the dust collection channel 412 between the support table 1 and the platform 312 for unified collection, which completely eliminates the interference of particulate matter on the measurement benchmark and stabilizes the accuracy of the film thickness detection data.

[0042] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A film thickness detection device for a coating machine, characterized in that: The film thickness detection device includes a support platform (1), a controller is provided on one side of the support platform (1), a measuring unit (2) is provided on the support platform (1), a horizontal unit (3) is provided inside the support platform (1), and a clean unit (4) is provided on the support platform (1). The support platform (1) has a cavity inside; The measuring unit (2) includes an adjusting element (21) and a measuring element (22); The horizontal unit (3) includes an adjusting component (31), a follower component (32), and a detection component (33). The clean unit (4) includes a clean component (41). The support platform (1) is fixedly connected to the adjusting component (21), and the support platform (1) is fixedly connected to the adjusting component (31). A clean component (41) is provided on the support platform (1).

2. The film thickness detection device for a coating machine according to claim 1, characterized in that: The adjusting component (31) includes an electric push rod (311), a platform (312), an air pump (313), a fixing ring (314), and an air pipe (315). The fixed end of the electric push rod (311) is fixedly installed in the cavity of the support platform (1). The platform (312) is fixedly connected to the telescopic end of the electric push rod (311). The platform (312) is slidably connected to the support platform (1). The telescopic end of the electric push rod (311) has a hollow structure. (311) A vent hole is provided at the telescopic end. The air pump (313) is fixedly installed in the cavity of the support platform (1). The fixing ring (314) is fixedly installed at the telescopic end of the electric push rod (311). The fixing ring (314) is provided with a vent hole. The vent hole at the telescopic end of the electric push rod (311) and the vent hole of the fixing ring (314) are arranged coaxially. There are multiple fixing rings (314). Multiple fixing rings (314) are connected by a vent pipe (315).

3. The film thickness detection device for a coating machine according to claim 2, characterized in that: The follower (32) includes a straight cylinder (321), a baffle (322), an elastic telescopic plate (323), a slide rod (324), and a shielding plate (325). The straight cylinder (321) is fixedly connected to the vent pipe (315). The baffle (322) is slidably installed inside the vent pipe (315). The fixed end of the elastic telescopic plate (323) is connected to the baffle (322) via a connecting rod. The telescopic end of the elastic telescopic plate (323) abuts against the inner wall of the straight cylinder (321). The fixed end of the elastic telescopic plate (323) is slidably connected to the slide rod (324). The fixed end of the elastic telescopic plate (323) is connected to the inner wall of the straight cylinder (321) via a spring. The shielding plate (325) is fixedly installed at the end of the elastic telescopic plate (323) away from the baffle (322).

4. The film thickness detection device for a coating machine according to claim 3, characterized in that: The fixed end of the elastic telescopic plate (323) is a counterweight solid plate, and the telescopic end of the elastic telescopic plate (323) is a hollow plate.

5. The film thickness detection device for a coating machine according to claim 4, characterized in that: The detection component (33) includes a mounting block (331), an air guide cavity (332), an exhaust hole (333), a straight rod (334), a detection disc (335), and a return spring (336). The mounting block (331) is fixedly installed at the end of the straight cylinder (321). Two air guide cavities (332) are opened in the mounting block (331). The diameter of the air guide cavity (332) is larger than the diameter of the shielding disc (325). In the initial position, the shielding disc (325) and the air guide cavity (332) are arranged coaxially. The mounting block (331) is provided with an exhaust hole (333). The straight rod (334) is fixedly installed in the air guide cavity (332). The detection disc (335) is connected to the mounting block (331) through the return spring (336). The detection disc (335) is slidably connected to the straight rod (334). The detection disc (335) is made of conductive material.

6. The film thickness detection device for a coating machine according to claim 5, characterized in that: The outer surface of the straight rod (334) is uniformly wound with a conductive coil. The end of the conductive coil on the straight rod (334) near the shielding plate (325) is the current output end. The detection plate (335) is electrically connected to the electric push rod (311).

7. The film thickness detection device for a coating machine according to claim 6, characterized in that: The cleanroom component (41) includes an air blowing hole (411) and a dust collection channel (412). The support platform (1) is provided with an air blowing hole (411). The air blowing hole (411) is connected to an air pump (313) through a conduit. A dust collection channel (412) is provided between the support platform (1) and the platform (312).

8. The film thickness detection device for a coating machine according to claim 1, characterized in that: The adjusting component (21) includes a column (211), a height adjusting bolt (212), a cantilever (213), and a clamping bolt (214). The column (211) is fixedly installed on the support platform (1). The height adjusting bolt (212) is installed on the column (211). The height adjusting bolt (212) is fixedly connected to the cantilever (213). The cantilever (213) is fixedly connected to the clamping bolt (214).

9. The film thickness detection device for a coating machine according to claim 8, characterized in that: The measuring component (22) includes a lifting rod (221), a counter (222) and a measuring head (223). The lifting rod (221) is installed in a clamping bolt (214). The measuring head (223) is connected to the lifting rod (221). The counter (222) is fixedly connected to the measuring head (223).

Images