Spherical polishing tool head with spiral flow channel structure and parameter determination method thereof

Abstract

The present application belongs to the field of precision polishing equipment and process technology, and relates to a spherical polishing tool head with a spiral flow channel structure and a parameter determination method thereof, comprising a spherical polishing head, a center connecting rod, an annular groove, a spiral flow channel and a plurality of liquid outlet holes. The polishing liquid enters the spiral flow channel from the annular groove and is discharged to the working area through the plurality of liquid outlet holes along the spiral flow channel; the spiral flow channel adopts the form of an Archimedes spiral and can be provided as a double spiral flow channel; the plurality of liquid outlet holes are arranged in sequence along the spiral flow channel. According to the inlet loss, the friction loss along the way, the local resistance loss and the centrifugal pressure correction generated by the rotation of the tool head, the pressure at each liquid outlet hole is recursively determined, and the liquid outlet hole flow is calculated according to the pressure of each liquid outlet hole, the hole length, the hole diameter and the outlet pressure. The present application can make the flow of each liquid outlet hole consistent by adjusting the hole diameter of the liquid outlet hole at different positions, can improve the uniformity of the polishing liquid supply in the curved surface polishing process, can improve the cooling and lubricating effect, and can improve the machining stability.

Description

Technical Field

[0001] This invention belongs to the field of precision polishing equipment and process technology, specifically relating to a spherical polishing tool head with a spiral flow channel structure and a method for determining its parameters. Background Technology

[0002] With the rapid development of high-end manufacturing fields such as optical components, semiconductor devices, and precision mechanical parts, the demand for precision and ultra-precision polishing of spherical and complex curved surface parts is increasing. During the polishing process, polishing fluid plays multiple roles, including cooling, lubrication, chip removal, reducing polishing burns, and improving the surface quality. In scenarios using rotary tool heads, the uniform and stable delivery of the polishing fluid to the tool head's working area directly affects the temperature field distribution, abrasive wear state, processing stability, and final machining accuracy.

[0003] Existing polishing tool heads typically employ two methods for fluid supply: external spraying or simple internal channel supply. External spraying is susceptible to obstruction by the tool head and the effects of rotating airflow, making it difficult for the polishing slurry to consistently enter the actual contact area, resulting in low supply efficiency and poor uniformity. While simple internal channel supply can introduce polishing slurry into the tool head, uneven fluid output between different outlets can easily occur due to pressure attenuation along the flow path, changes in local resistance, and the centrifugal effect generated by the tool head's rotation.

[0004] Especially for spherical polishing tool heads, the slurry outlets are often distributed at different radii. As the polishing fluid flows within the tool head's internal structure, the remaining flow rate is lower closer to the end of the flow path. Simultaneously, the polishing fluid is affected by centrifugal pressure during tool head rotation, resulting in significant differences in pressure at different radii. Therefore, if all outlets use the same diameter or are not designed specifically for pressure distribution, it can easily lead to insufficient fluid supply in some areas and excessive fluid supply in others, thus affecting polishing quality and tool life.

[0005] In summary, existing spherical polishing tool heads have significant shortcomings in terms of uniform supply of polishing fluid. There is an urgent need for a spherical polishing tool head structure that can achieve uniform distribution and stable delivery of polishing fluid in order to improve the temperature field distribution in the polishing area, optimize the wear state of abrasive particles, and enhance processing stability and final processing accuracy. Summary of the Invention

[0006] This invention provides the following technical solution: a spherical polishing tool head with a spiral flow channel structure, comprising: The spherical polishing head is shaped like a spherical cap, with a spherical working area on the outer wall of its spherical crown.

[0007] The central connecting rod is connected at one end to the center of the cross-sectional circle of the spherical polishing head, and is used to connect with the external rotary drive component.

[0008] An annular groove, located on the spherical segment of the spherical polishing head, is recessed downwards along the height of the spherical cap and surrounds the central connecting rod; it is used to receive polishing fluid.

[0009] The spiral flow channel is located inside and connected to the annular groove. The spiral flow channel is arranged in a spiral shape along the radial direction of the spherical polishing head.

[0010] Multiple liquid outlet holes are arranged sequentially along the spiral flow channel, and the liquid outlet holes connect the spiral flow channel with the outer wall surface of the spherical crown of the spherical polishing head.

[0011] In the spherical polishing tool head, the polishing fluid enters the spiral flow channel through the annular groove and is discharged along the spiral flow channel through multiple outlet holes to the outer wall surface of the spherical crown of the spherical polishing head; along the fluid flow direction of the spiral flow channel, the diameter of each outlet hole changes along the flow direction, so that the output flow rate of each outlet hole tends to be consistent.

[0012] Preferably, the spiral channel is a double spiral channel, with the two spiral channels arranged symmetrically about the rotation axis of the spherical polishing head and the central connecting rod to improve the uniformity of the polishing fluid supply in the working area; the center line of the spiral channel adopts an Archimedean spiral, so that the polishing fluid forms a continuous distribution path during the flow from the outside to the inside.

[0013] Preferably, the annular groove is arranged vertically, and the polishing liquid enters from the upper opening of the annular groove and flows into the spiral flow channel from the lower end face of the annular groove; the cross-sectional area of ​​the annular groove perpendicular to the liquid inlet direction remains unchanged along the liquid inlet direction.

[0014] Preferably, the diameter of the liquid outlet gradually increases along the flow direction of the spiral flow channel so that the flow rates of each liquid outlet tend to be equal.

[0015] This invention also discloses a method for determining the liquid outlet parameters of a spherical polishing tool head. This method is used for the aforementioned spherical polishing tool head with a spiral flow channel structure, and includes the following steps: Step 1: Determine the structural parameters of the spherical polishing tool head, including the radius R of the bottom circle of the spherical crown. o The height H and width b of the annular groove, and the starting radius r of the outer ring of the spiral flow channel. out and inner circle termination radius r in The radial distance p between two adjacent spiral turns, the diameter d of the spiral flow channel section, and the diameter d of each outlet hole. i Hole length l i and the radius r i The number of spiral turns n and the number of liquid outlet holes N.

[0016] Step 2: Determine the physical properties and operating parameters of the polishing slurry. The physical properties include the polishing slurry density ρ and dynamic viscosity μ, and the operating parameters include the inlet flow rate Q.A Inlet pressure P A Export pressure P e And the angular velocity ω of the tool head rotation; Step 3: Based on Bernoulli's equation and considering inlet loss, friction loss along the flow path, and local resistance loss, determine the pressure change of the polishing fluid from the annular groove inlet to the spiral flow channel inlet; Step 4: Based on the centrifugal pressure correction between adjacent liquid outlets in the spiral flow channel, the friction loss and local resistance loss, the pressure at the location of each liquid outlet is recursively determined. Step 5: Calculate the flow rate q of each outlet based on the pressure, outlet pressure, orifice diameter, orifice length, and local resistance coefficient at each outlet location. i ; Step 6: Ensure that the flow rate of each outlet meets q i ≈q i 1. Or, with the flow deviation of each outlet being less than a preset threshold as the target, the orifice diameter d of each outlet is... i Adjustments will be made.

[0017] Preferably, in step 4, the remaining flow rate Q in the i-th segment of the spiral channel i The flow rate is determined recursively by subtracting the flow rate of the preceding outlet from the inlet flow rate.

[0018] Preferably, the diameter of the liquid outlet hole is determined based on the pressure at the liquid outlet hole, the hole length, the local resistance coefficient, and the physical properties of the polishing fluid.

[0019] Preferably, the pressure difference between two adjacent liquid outlets in the spiral flow channel is determined based on the centrifugal pressure correction term, the friction loss term, and the local friction loss term.

[0020] Preferably, along the flow direction of the spiral channel, the remaining flow rate in the spiral channel gradually decreases, and the diameter of each liquid outlet changes along the flow direction according to the requirement of uniform flow distribution, so that the flow rate of the i-th liquid outlet tends to be equal to the flow rate of the adjacent liquid outlet.

[0021] Preferably, the pressure P at the i-th outlet hole in the spiral flow channel i The iterative formula is: (2) In the formula: P i-1 For the pressure at the (i-1)th outlet, r i-1 r i Z corresponds to the radii of the (i-1)th and ith discharge holes, respectively. i-1 Z i These correspond to the heights of the (i-1)th and ith discharge holes, respectively. As the friction factor, The length of the spiral element between the two holes. The hydraulic diameter of the spiral flow channel. This is the local drag coefficient. The velocity of the fluid within the flow channel.

[0022] The beneficial effects of this invention are: 1. This invention significantly improves the uniformity of polishing slurry distribution, solving the problem of uneven slurry supply. The invention employs a slurry supply structure combining an annular groove and a spiral flow channel inside the spherical tool head. Utilizing the guiding and homogenizing effect of the spiral flow channel on the polishing slurry flow, it effectively alleviates the uneven slurry output caused by pressure attenuation along the flow path, local resistance variations, and the centrifugal effect of the tool head rotation, which are common in traditional simple internal channel slurry supply methods. When the polishing slurry is delivered to each outlet through the spiral flow channel, the flow state is more stable, and the flow rate difference between outlets at different radii is significantly reduced. This achieves uniform slurry supply in the working area, fundamentally solving the technical problem of insufficient slurry supply in some areas and excessive slurry supply in others.

[0023] 2. This invention establishes a pressure-flow recursive calculation method, providing a theoretical basis for the precise design of the outlet orifice diameter. By recursively calculating the pressure and flow rate at the annular groove, spiral flow channel, and outlet orifice, this invention systematically reveals the pressure variation along the flow path of the polishing fluid within the tool head and the centrifugal pressure distribution characteristics at different radii. Based on this calculation method, the orifice diameter of each outlet orifice can be specifically designed according to the actual pressure state at the radius of each outlet orifice, enabling balanced flow output under actual working pressure. This design method changes the traditional experience-based design mode, making the design of the outlet orifice diameter more reliable and significantly improving design accuracy and reliability.

[0024] 3. This invention optimizes the temperature field distribution in the polishing area, improving machining accuracy and surface quality. Because the polishing fluid can reach the tool head's working area uniformly and stably, the temperature field distribution in the polishing area is more uniform, effectively avoiding localized overheating and reducing the risk of polishing burns. Simultaneously, the uniform fluid supply conditions result in a more consistent distribution of abrasive grains in the working area, significantly improving the abrasive wear state and facilitating a consistent material removal rate. This, in turn, significantly improves the machining accuracy and surface quality of spherical and complex curved surface parts.

[0025] 4. This invention extends tool life and reduces processing costs. Uniform fluid supply ensures more even abrasive wear across all working areas of the tool head, preventing premature tool failure due to excessive localized wear and effectively extending the lifespan of the polishing tool head. Simultaneously, a stable fluid supply reduces processing defects and scrap rates caused by uneven fluid distribution, lowering overall processing costs.

[0026] 5. This invention has a wide range of applications and good prospects for industrial application; the structure of this invention is reasonably designed and is not only suitable for spherical polishing tool heads, but can also be extended to the liquid supply structure design of various complex curved surface polishing tool heads, which has important engineering application value for promoting the development of precision and ultra-precision polishing technology. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the spherical polishing tool head with a spiral flow channel structure and its parameter determination method according to the present invention. Figure 2 This is a three-dimensional front view of the spherical polishing tool head of the present invention; Figure 3 This is a three-dimensional top view of the spherical polishing tool head of the present invention; Figure 4 This is a three-dimensional isometric view of the spherical polishing tool head of the present invention.

[0028] In the diagram, 1 is the spherical polishing head; 2 is the central connecting rod; 3 is the annular groove; 4 is the spiral flow channel; and 5 is the liquid outlet. Detailed Implementation

[0029] The relevant technologies of this invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0030] like Figures 1-4 As shown, the spherical polishing tool head with a spiral flow channel structure in this embodiment includes a spherical polishing head 1, a central connecting rod 2, an annular groove 3, a spiral flow channel 4, and multiple liquid outlet holes 5; the spherical polishing head 1 is shaped like a spherical cap, and the outer wall of the spherical cap of the spherical polishing head 1 is provided with a spherical working area, and the outer radius of the spherical cap of the spherical polishing head 1 is R. o One end of the central connecting rod 2 is connected to the center of the cross-sectional circle of the spherical polishing head 1 for connection with an external rotary drive component. An annular groove 3 is located on the cross-sectional circle of the spherical polishing head 1, recessed downwards along the height of the spherical crown. The annular groove 3 surrounds the central connecting rod 2, and has a height H and a width b, used to receive polishing fluid input through a fixed inlet. The spherical polishing head 1, central connecting rod 2, and annular groove 3 are on the same rotation axis. A spiral flow channel 4 is located within the annular groove 3, communicating with it. The spiral flow channel 4 is arranged in a spiral shape along the radial direction of the spherical polishing head 1, with an outer starting radius r. out The inner circle termination radius is r inThe radial distance between two adjacent spiral turns is p. The cross-section of the spiral channel 4 perpendicular to the flow direction is circular with a diameter of d. Multiple liquid outlet holes 5 are arranged sequentially along the spiral channel 4, and the liquid outlet holes 5 connect the spiral channel 4 with the outer wall surface of the spherical crown of the spherical polishing head 1. The diameter of the i-th liquid outlet hole 5 is d. i The length of the hole is l i The radius is r i The polishing slurry enters the spiral flow channel 4 through the annular groove 3 and exits the outer wall surface of the spherical crown of the spherical polishing head 1 through multiple outlet holes 5 along the spiral flow channel 4; the diameter d of each outlet hole 5 is adjusted by... i This makes the flow rate of each outlet hole 5 tend to be consistent.

[0031] Furthermore, the spiral channel 4 is a double spiral channel 4, with the two spiral channels 4 arranged symmetrically about the rotation axis of the spherical polishing head 1 and the central connecting rod 2, so as to improve the uniformity of the polishing fluid supply in the working area.

[0032] Furthermore, the centerline of the spiral channel 4 adopts the form of an Archimedean spiral, so that the polishing fluid forms a continuous distribution path during the flow from the outside to the inside.

[0033] Furthermore, the spiral channel 4 has n spiral turns, and the number of multiple liquid outlet holes 5 is N, and the multiple liquid outlet holes 5 are arranged along the spiral channel 4 at a preset interval.

[0034] Furthermore, the annular groove 3 is arranged vertically, and the polishing liquid enters from the upper end face of the annular groove 3 and flows into the spiral channel 4 from the lower end face of the annular groove 3.

[0035] Furthermore, the cross-sectional area of ​​the annular groove 3 remains unchanged along the liquid inlet direction to reduce flow velocity fluctuations caused by abrupt changes in cross-section within the annular groove 3.

[0036] Furthermore, the diameter d of the liquid outlet 5 i Based on the pressure at outlet hole 5 and the hole length l i The local resistance coefficient and the physical properties of the polishing fluid were determined.

[0037] Furthermore, the physical properties of the polishing slurry include the slurry density ρ and the polishing slurry dynamic viscosity μ, and the operating parameters include the inlet flow rate Q. A Inlet pressure P A Export pressure P e And the angular velocity ω of the tool head rotation.

[0038] Furthermore, the pressure difference between two adjacent liquid outlet holes 5 within the spiral flow channel 4 is determined based on the centrifugal pressure correction term, the friction loss term, and the local friction loss term.

[0039] Furthermore, along the flow direction of the spiral channel 4, the remaining flow rate within the spiral channel 4 gradually decreases, and the orifice diameter of each outlet 5 changes along the flow direction according to the requirement of uniform flow distribution, so that the flow rate q of the i-th outlet 5... i The flow rate is close to that of the adjacent outlet 5.

[0040] This invention also discloses a method for determining the liquid outlet parameters of a spherical polishing tool head, comprising the following steps: Step 1) Determine the structural parameters of the spherical polishing tool head, including R. o H, b, r out r in p, d, d i l i r i , n, N; Step 2) Determine the physical properties and operating parameters of the polishing slurry. The physical properties include ρ and μ, and the operating parameters include Q. A P A P e , ω; Step 3) Determine the pressure change of the polishing fluid from the inlet of the annular groove 3 to the inlet of the spiral channel 4 based on Bernoulli's equation, and consider inlet loss, friction loss along the way and local resistance loss; Step 4) Based on the centrifugal pressure correction, friction loss and local resistance loss between adjacent liquid outlets 5 in the spiral flow channel 4, the pressure at the location of each liquid outlet 5 is recursively determined. Step 5) Calculate the flow rate q of each outlet 5 based on the pressure, outlet pressure, orifice diameter, orifice length, and local resistance coefficient at each outlet 5 location. i ; Step 6) Ensure the flow rate of each outlet 5 meets q i ≈q i 1. The target is that the flow deviation of each outlet 5 is less than a preset threshold, and the diameter d of each outlet 5 is... i Adjustments will be made.

[0041] Furthermore, the feature is that, in step 4, the remaining flow rate Q in the i-th segment of the spiral channel 4 i The flow rate is determined recursively by subtracting the flow rate of the preceding outlet orifice 5 from the inlet flow rate.

[0042] Example A schematic diagram of the dimensions of the spherical polishing tool head involved in this invention is shown below. Figure 1 As shown. Fluid enters from the upper end face A of the annular groove 3, with an inlet pressure of P. A It enters the spiral channel 4 at the lower end face B. From Bernoulli's equation, we can obtain P... A -P B : (1) The first term on the right side of the equation is the dynamic pressure term of the fluid. Since the area of ​​the annular groove 3 remains constant from A to B, according to the continuity equation, the first term is 0. The second term is the pressure change caused by the height difference. The third term is the rotational centrifugal pressure difference generated when the fluid is rotating. In this design, the annular groove 3 is a vertical groove, so the third term is 0. The fourth term... The inlet loss is caused by the relative motion between the fixed inlet and the rotating annular groove 3. , It is the velocity of the fluid relative to the tool at the inlet. The fifth term is the relative motion inlet loss coefficient; the fifth term is the friction loss along the path from A to B, obtained according to the Darcy-Weisbach equation. λ is the Darcy friction factor, D h It is the hydraulic diameter. V AB It is the average velocity of the fluid in the flow channel from A to B. ; Item 6 This is the local drag coefficient.

[0043] The inlet pressure P of the spiral flow channel 4 can be obtained from Bernoulli's equation. B The fluid enters the double-helix flow channel 4 from the bottom of the annular groove 3. The designed helix is ​​a reverse-contracting Archimedean helix, and its centerline is represented in cylindrical coordinates as: Consider a helical element with a length of... The total length of the spiral flow channel 4 can be obtained. The spiral flow channel has a circular cross-section with a hydraulic diameter of 4. Cross-sectional area The pressure P at the i-th outlet hole 5 within the spiral flow channel 4. i Pressure P can be applied at the (i-1)th outlet hole. i-1 Represented as: (2) The first term on the right side of the equation is the pressure of the (i-1)th outlet hole 5 in the spiral channel 4; the second term is the centrifugal pressure correction term; the third term is the pressure difference caused by the height change between the (i-1)th and ith outlet holes 5; and the fourth term is the friction loss and local resistance loss. The fluid enters from the bottom end face B of the annular groove 3, and P can be obtained from formula (1). B The pressure P at each liquid hole can be calculated iteratively using formula (2). i .

[0044] Let the flow rate of the i-th outlet 5 be q. i The inlet velocity is v i The export speed is u i According to Bernoulli's equation and the continuity equation, we can obtain: (3) (4) (5) (6) (7) Equation (4) represents the pressure loss compensated for by the fluid flow. The remaining flow rate in the i-th segment of the spiral channel 4 is Q. i We can obtain: Combined with the flow rate q of outlet hole 5 i The flow rate q of each outlet 5 can be obtained by using the iterative formula. i For the total 5 outlet holes, the following conditions are met. .

[0045] Because the fluid flows along the spiral channel 4 and exits from the outlet holes 5 along the way, the flow rate decreases as the fluid moves further along. To ensure that the flow rate of each outlet hole 5 is equal, i.e. , The orifice diameter can also be adjusted using the flow formula for the liquid outlet orifice 5.

[0046] In summary, this invention, by incorporating an annular groove combined with a spiral flow channel into the internal structure of the spherical polishing tool head, and employing a method for designing the outlet orifice diameter based on pressure-flow recursive calculations, effectively solves the problem of uneven polishing fluid distribution inherent in traditional fluid supply methods. This enables a uniform and stable supply of polishing fluid within the working area, thereby optimizing the temperature field distribution in the polishing zone and improving abrasive wear. This not only enhances the polishing accuracy and surface quality of curved parts but also extends the service life of the polishing tool head and reduces overall processing costs. The invention features a clear and rational structural design and a scientifically reliable design method. It can be directly applied to the design and manufacture of spherical polishing tool heads and can also be extended to the optimization of fluid supply structures for various complex curved surface polishing tools, demonstrating promising application prospects and significant promotional value in the field of precision and ultra-precision polishing.

[0047] It should be emphasized that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any way. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention shall still fall within the scope of the technical solution of the present invention.

Claims

1. A spherical polishing tool head with a spiral flow channel structure, characterized in that, include: The spherical polishing head (1) is shaped like a spherical cap, and its outer wall of the spherical cap has a spherical working area; The central connecting rod (2) is connected at one end to the center of the cross-sectional circle of the spherical polishing head (1) and is used to connect with the external rotary drive component; An annular groove (3) is provided on the spherical segment of the spherical polishing head (1), recessed downward along the height of the spherical crown, and surrounding the central connecting rod (2) for receiving polishing liquid; The spiral flow channel (4) is located in the annular groove (3) and communicates with the annular groove (3). The spiral flow channel (4) is arranged in a spiral shape along the radial direction of the spherical polishing head (1). Multiple liquid outlet holes (5) are arranged sequentially along the spiral flow channel (4), and the liquid outlet holes (5) are connected to the spiral flow channel (4) and the outer wall surface of the spherical crown of the spherical polishing head (1); In the spherical polishing tool head, the polishing liquid enters the spiral flow channel (4) through the annular groove (3) and is discharged along the spiral flow channel (4) through multiple outlet holes (5) to the outer wall surface of the spherical crown of the spherical polishing head (1); along the fluid flow direction of the spiral flow channel (4), the diameter of each outlet hole (5) changes along the flow direction, so that the output flow rate of each outlet hole tends to be consistent.

2. A spherical polishing tool head with a spiral flow channel structure according to claim 1, characterized in that, The spiral flow channel (4) is a double spiral flow channel, and the two spiral flow channels (4) are arranged symmetrically about the rotation axis of the spherical polishing head (1) and the central connecting rod (2); the center line of the spiral flow channel (4) adopts the Archimedean spiral.

3. A spherical polishing tool head with a spiral flow channel structure according to claim 1, characterized in that, The annular groove (3) is arranged in a vertical direction. The polishing liquid enters from the upper opening of the annular groove (3) and flows into the spiral channel (4) from the lower end face of the annular groove (3). The cross-sectional area of ​​the annular groove (3) perpendicular to the liquid inlet direction remains unchanged along the liquid inlet direction.

4. A spherical polishing tool head with a spiral flow channel structure according to claim 1, characterized in that, The diameter of the outlet hole (5) gradually increases along the flow direction of the spiral channel (4).

5. A method for determining the parameters of the liquid outlet of a spherical polishing tool head, characterized in that, The method is used for a spherical polishing tool head with a spiral flow channel structure as described in any one of claims 1 to 4, and the method includes the following steps: Step 1: Determine the structural parameters of the spherical polishing tool head, including the radius R of the bottom circle of the spherical crown of the spherical polishing head (1). o The height H and width b of the annular groove (3), and the starting radius r of the outer ring of the spiral channel (4) out and inner circle termination radius r in The radial distance p between two adjacent spirals, the diameter d of the spiral flow channel (4), and the diameter d of each outlet hole (5) i Hole length l i and the radius r i The number of spiral turns n and the number of liquid outlet holes N; Step 2: Determine the physical properties and operating parameters of the polishing slurry. The physical properties include the polishing slurry density ρ and dynamic viscosity μ, and the operating parameters include the inlet flow rate Q. A Inlet pressure P A Export pressure P e And the angular velocity ω of the tool head rotation; Step 3: Based on Bernoulli's equation and considering inlet loss, friction loss along the flow path and local resistance loss, determine the pressure change of the polishing fluid from the inlet of the annular groove (3) to the inlet of the spiral flow channel (4); Step 4: Based on the centrifugal pressure correction, friction loss and local resistance loss between adjacent outlet holes (5) in the spiral flow channel (4), the pressure at the location of each outlet hole (5) is recursively determined. Step 5: Calculate the flow rate q of each outlet hole (5) based on the pressure, outlet pressure, hole diameter, hole length, and local resistance coefficient at the location of each outlet hole (5). i ; Step 6: The flow rate of each outlet (5) satisfies q i ≈q i 1. The target is that the flow deviation of each outlet (5) is less than the preset threshold. The orifice diameter d of each outlet (5) is... i Adjustments will be made.

6. The method for determining the parameters of the liquid outlet according to claim 5, characterized in that, In step 4, the remaining flow rate Q in the i-th spiral channel (4) i The flow rate is determined recursively by subtracting the flow rate of the preceding outlet (5) from the inlet flow rate.

7. The method for determining the parameters of the liquid outlet hole according to claim 5, characterized in that, The diameter of the outlet hole (5) is determined based on the pressure, hole length, local resistance coefficient and physical properties of the polishing fluid at the outlet hole (5).

8. The method for determining the parameters of the liquid outlet according to claim 5, characterized in that, The pressure difference between two adjacent outlet holes (5) in the spiral flow channel (4) is determined based on the centrifugal pressure correction term, the friction loss term, and the local friction loss term.

9. The method for determining the parameters of the liquid outlet according to claim 5, characterized in that, Along the flow direction of the spiral channel (4), the remaining flow rate in the spiral channel (4) gradually decreases, and the diameter of each liquid outlet (5) changes along the flow direction according to the requirement of uniform flow distribution, so that the flow rate of the i-th liquid outlet (5) is close to the flow rate of the adjacent liquid outlet (5).

10. The method for determining the parameters of the liquid outlet hole according to claim 5, characterized in that, The pressure P at the i-th outlet hole in the spiral flow channel i The iterative formula is: （2） In the formula: P i-1 For the pressure at the (i-1)th outlet, r i-1 r i Z corresponds to the radii of the (i-1)th and ith discharge holes, respectively. i-1 Z i These correspond to the heights of the (i-1)th and ith discharge holes, respectively. As the friction factor, The length of the spiral element between the two holes. The hydraulic diameter of the spiral flow channel. This is the local drag coefficient. The velocity of the fluid within the flow channel.

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