A flow guide cylinder carrying mechanism

Abstract

The present application relates to the technical field of semiconductor manufacturing, and discloses a guide tube carrying mechanism. The guide tube carrying mechanism comprises a supporting device and a carrying device. The annular supporting frame is provided with a bearing hole for bearing the guide tube. The flange can be lapped on the supporting frame. The annular supporting frame is rotationally connected to the bearing frame. The rotary driving assembly is connected to the bearing frame and drivingly connected to the annular supporting frame. The rotary driving assembly is used for driving the annular supporting frame to rotate. A plurality of fastening assemblies are connected to the annular supporting frame in a circumferential direction. The fastening assembly can press the flange against the annular supporting frame. The bearing frame of the conveying device is slidingly connected to the conveying frame body in the height direction. The lifting driving assembly is drivingly connected to the bearing frame and used for driving the bearing frame to lift. The present application solves the problem of difficult guide tube carrying, avoids the loss of hot field components caused by manual carrying, solves the problem of difficult rotation during cleaning, and improves the cleaning efficiency and cleanliness of the cleaned guide tube.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a flow guide tube transport mechanism. Background Technology

[0002] In the production and maintenance process of a 12-inch monocrystalline silicon crystal growth furnace, after the crystal growth process is completed, the guide tube needs to be removed from the furnace for cleaning. The transfer and post-processing of the guide tube is a key and challenging step. Currently, the industry generally uses a manual collaborative approach to remove the guide tube. Due to the high weight and large radial dimensions of the guide tube, it cannot be operated by a single person. Two operators must work together to first remove the guide tube from the furnace lifting rod, move it vertically downwards to a position below the water cooling jacket, and then move it horizontally to remove it from inside the furnace cavity.

[0003] This purely manual operation mode presents significant safety and quality risks: During the translation and removal process, due to limitations in human control precision, the guide tube is prone to tilting deviation, with one end higher than the other, frequently resulting in edge collisions with the water-cooling jacket. This can cause minor scratches and deformations on the surface of the hot zone components, or even damage to the sealing structure of the water-cooling jacket, leading to leakage risks in subsequent crystal growth processes and significantly increasing the replacement cost and downtime for hot zone components. Furthermore, when transferring the guide tube to the workbench for dust cleaning after removal, operators must manually rotate and flip the large-sized guide tube to complete the cleaning operation, resulting in low cleaning efficiency.

[0004] Therefore, there is an urgent need for a guide tube carrying mechanism to solve the aforementioned problems. Summary of the Invention

[0005] Based on the above, the purpose of this invention is to provide a guide tube carrying mechanism, which solves the problem of difficult guide tube handling and avoids damage to hot components caused by manual handling; it also solves the problem of difficult rotation during the cleaning process and improves the cleaning efficiency and cleanliness of the guide tube.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A guide tube transport mechanism, wherein the top of the guide tube is provided with a flange, the guide tube transport mechanism comprising: A support device includes a carrier frame, an annular support frame, a rotation drive assembly, and multiple fastening assemblies. The annular support frame has a bearing hole for supporting the guide tube. The flange can overlap the support frame. The annular support frame is rotatably connected to the carrier frame. The rotation drive assembly is connected to the carrier frame and drives the annular support frame to rotate. The multiple fastening assemblies are circumferentially spaced and connected to the annular support frame. The fastening assemblies can press the flange tightly against the annular support frame. A transport device includes a transport frame and a lifting drive assembly, wherein the support frame is slidably connected to the transport frame along the height direction, and the lifting drive assembly is driven to be connected to the support frame and is used to drive the support frame to lift.

[0007] As a preferred technical solution for a guide tube carrying mechanism, the fastening assembly includes a support, a swing arm, and a pressing component. The support is connected to the annular support frame, and a first rotating shaft is provided at the top of the support. The swing arm is rotatably connected to the first rotating shaft, and a threaded hole is provided at one end of the swing arm. The pressing component is threadedly connected to the threaded hole. The swing arm can rotate to a pressing position and a clearance position. When the swing arm is in the clearance position, it can avoid the disassembly and assembly of the guide tube. When the swing arm is in the pressing position, the pressing component can press against the flange.

[0008] As a preferred technical solution for a guide tube carrying mechanism, a first limiting rod is provided on the support. When the swing rod rotates to the pressing position, the first limiting rod can stop the swing rod from continuing to rotate.

[0009] As a preferred technical solution for a guide tube carrying mechanism, a second limiting rod is provided on the support. When the swing arm rotates to the avoidance position, the second limiting rod can stop the swing arm from continuing to rotate.

[0010] As a preferred technical solution for a guide tube carrying mechanism, the swing arm is provided with a first limiting groove corresponding to the first limiting rod, and the first limiting rod can be embedded in the first limiting groove; the swing arm is provided with a second limiting groove corresponding to the second limiting rod, and the second limiting rod can be embedded in the second limiting groove.

[0011] As a preferred technical solution of the guide tube carrying mechanism, the middle part of the swing rod is hinged to the first rotating shaft, the first limiting groove and the second limiting groove are located on one side of the swing rod, and the first limiting groove and the second limiting groove are respectively located on both sides of the hinge part of the swing rod.

[0012] As a preferred technical solution for a guide tube carrying mechanism, a second rotating shaft is provided on both sides of the annular support frame. One of the second rotating shafts is rotatably connected to the support frame, and the other second rotating shaft passes through the support frame and is connected to the drive end of the rotation drive assembly. The rotation drive assembly is a manual tilting reducer.

[0013] As a preferred technical solution for a guide tube transport mechanism, the lifting drive assembly includes a lifting drive component, an auxiliary wheel, and a chain. The lifting drive component is connected to the transport frame, and the drive end of the lifting drive component is rotatably connected to the auxiliary wheel. The lifting drive component can drive the auxiliary wheel to lift and lower. The chain is wound around the auxiliary wheel, with one end connected to the transport frame and the other end connected to the support frame.

[0014] As a preferred technical solution for a guide tube transport mechanism, the transport frame is provided with two oppositely arranged slide rails that extend along the height direction. Guide blocks are symmetrically arranged on both sides of the support frame, and the guide blocks on both sides of the support frame are slidably connected to the two slide rails respectively.

[0015] As a preferred technical solution for a guide tube transport mechanism, the bottom of the transport frame is provided with multiple rollers.

[0016] The beneficial effects of this invention are as follows: This invention provides a guide tube transport mechanism. In the initial state, the lifting drive assembly drives the transport frame to descend to a low position. When the guide tube needs to be disassembled in the crystal growth furnace, the guide tube transport mechanism is pushed directly below the guide tube position. The lifting drive assembly drives the transport frame to rise so that the guide tube is embedded in the bearing hole of the annular support frame. The flange of the guide tube overlaps in the bearing hole of the support frame. Then, multiple fastening components are adjusted so that the multiple fastening components press the flange tightly onto the annular support frame. Finally, the lifting drive assembly drives the transport frame to descend and push out the guide tube transport mechanism. When cleaning the guide tube, the rotation drive assembly drives the annular support frame to rotate. Since the fastening components are pressed against the flange, the guide tube is fixed in position relative to the annular support frame, allowing the guide tube carried by the annular support frame to tilt and flip. At this time, the bottom of the guide tube can be cleaned. This invention solves the problem of difficult handling of the guide tube. During the removal of the guide tube from the crystal growth furnace, the guide tube is under stable force and will not cause tilting deviation, thus avoiding damage to the hot zone components caused by manual handling. By driving the guide tube to tilt through the rotation drive assembly, the problem of difficult rotation during the cleaning process is solved, thereby improving the cleaning efficiency and cleanliness of the guide tube. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0018] Figure 1 This is one of the structural schematic diagrams of the guide tube carrying mechanism provided in a specific embodiment of the present invention; Figure 2 yes Figure 1 Enlarged view at point A; Figure 3 This is the second structural schematic diagram of the guide tube carrying mechanism provided in a specific embodiment of the present invention.

[0019] The markings in the image are as follows: 10. Flow guide tube; 101. Flanged edge; 1. Support device; 11. Bearing frame; 111. Guide block; 112. Second connecting hole; 12. Annular support frame; 121. Second rotating shaft; 13. Rotation drive assembly; 14. Fastening assembly; 141. Support; 1411. First rotating shaft; 142. Swing rod; 1421. First limiting groove; 1422. Second limiting groove; 143. First limiting rod; 144. Second limiting rod; 145. Pressing part; 146. Silicone part; 147. Rocker arm; 2. Transport device; 21. Transport frame; 211. Slide rail; 212. First connecting hole; 213. Roller; 22. Lifting drive assembly; 221. Lifting drive component; 222. Auxiliary wheel. Detailed Implementation

[0020] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0021] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0022] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0023] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0024] like Figures 1-3 As shown, this embodiment provides a guide tube transport mechanism, which includes a support device 1 and a transport device. The support device 1 includes a support frame 11, an annular support frame 12, a rotation drive assembly 13, and multiple fastening assemblies 14. The annular support frame 12 is provided with a support hole for carrying the guide tube 10. The flange 101 can overlap the support frame. The annular support frame 12 is rotatably connected to the support frame 11. The rotation drive assembly 13 is connected to the support frame 11 and is driven to the annular support frame 12. The rotation drive assembly 13 is used to drive the annular support frame 12 to rotate. Multiple fastening assemblies 14 are circumferentially spaced and connected to the annular support frame 12. The fastening assemblies 14 can press the flange 101 onto the annular support frame 12. The transport device 2 includes a transport frame body 21 and a lifting drive assembly 22. The support frame 11 is slidably connected to the transport frame body 21 in the height direction. The lifting drive assembly 22 is driven to the support frame 11 and is used to drive the support frame 11 to lift.

[0025] In the initial state, the lifting drive assembly 22 drives the transport frame 21 to descend to the low position. When the crystal growth furnace needs to disassemble the guide tube 10, the guide tube carrying mechanism is pushed directly below the position of the guide tube 10. The lifting drive assembly 22 drives the transport frame 21 to rise so that the guide tube 10 is embedded in the bearing hole of the annular support frame 12. The flange 101 of the guide tube 10 overlaps in the bearing hole of the support frame. Then, multiple fastening components 14 are adjusted so that the multiple fastening components 14 press the flange 101 onto the annular support frame 12. Finally, the lifting drive assembly 22 drives the transport frame 21 to descend and push out the guide tube carrying mechanism. When cleaning the guide tube 10, the rotation drive assembly 13 drives the annular support frame 12 to rotate. Since the fastening components 14 are pressed against the flange 101, the position of the guide tube 10 relative to the annular support frame 11 is fixed, so that the guide tube 10 carried by the annular support frame 12 can tilt and flip. At this time, the bottom of the guide tube 10 can be cleaned. This embodiment solves the problem of difficult handling of the guide tube 10. During the removal of the guide tube 10 from the crystal growth furnace, the guide tube 10 is under stable force and will not cause tilting deviation, thus avoiding the loss of hot field components caused by manual handling. By driving the guide tube 10 to tilt through the rotation drive assembly 13, the problem of difficult rotation during the cleaning process is solved, and the cleaning efficiency and cleanliness of the guide tube 10 are improved.

[0026] Furthermore, the fastening assembly 14 includes a support 141, a rocker arm 142, and a crimping member 145. The support 141 is connected to the annular support frame 12, and a first rotating shaft 1411 is provided on the top of the support 141. The rocker arm 142 is rotatably connected to the first rotating shaft 1411, and one end of the rocker arm 142 is provided with a threaded hole. The crimping member 145 is threadedly connected to the threaded hole. The rocker arm 142 can rotate to a crimping position and a clearance position. When the rocker arm 142 is in the clearance position, it can avoid the disassembly and assembly of the guide tube 10. When the rocker arm 142 is in the crimping position, the crimping member 145 can crimp onto the flange 101. The rocker arms 142 of the multiple fastening assemblies 14 rotate to the clearance position to allow the guide tube 10 to be inserted into or removed from the bearing hole. After the annular support frame 12 supports the guide tube 10, the swing arms 142 of the multiple fastening components 14 rotate to the pressing position, and the pressing member 145 is rotated, causing the bottom of the pressing member 145 to descend. The pressing members 145 of the multiple fastening components 14 press against the flange 101, thus fixing the position of the guide tube 10 and the annular support frame 12. When it is necessary to disassemble the guide tube 10, the pressing member 145 is rotated in the opposite direction, and the swing arms 142 rotate to the clearance position. At this time, the guide tube 10 can be detached from the annular support frame 12. In this embodiment, there are three fastening components 14.

[0027] It should be noted that when the guide tube 10 has an inner tube, the fastening assembly 14 is pressed onto the inner tube to prevent the inner tube and the heat insulation material of the guide tube 10 from falling off during the flipping process.

[0028] Preferably, a silicone part 146 is provided at the bottom of the crimping member 145, and the silicone part 146 is crimped onto the guide tube 10 to prevent scratching the guide tube 10. A rocker arm 147 is provided at the top of the crimping member 145, and the crimping member 145 can be manually rotated by rotating the rocker arm 147, which improves the ease of operation.

[0029] Preferably, a first limiting rod 143 is provided on the support 141. When the swing rod 142 rotates to the pressing position, the first limiting rod 143 can stop the swing rod 142 from continuing to rotate, so that the swing rod 142 can quickly rotate to the pressing position.

[0030] More preferably, a second limiting rod 144 is provided on the support 141. When the swing rod 142 rotates to the avoidance position, the second limiting rod 144 can stop the swing rod 142 from continuing to rotate, so that the swing rod 142 can quickly rotate to the avoidance position.

[0031] In this embodiment, the swing arm 142 is provided with a first limiting groove 1421 corresponding to the first limiting rod 143, and the first limiting rod 143 can be embedded in the first limiting groove 1421; the swing arm 142 is provided with a second limiting groove 1422 corresponding to the second limiting rod 144, and the second limiting rod 144 can be embedded in the second limiting groove 1422; the first limiting groove 1421 uniformly bears the force of the first limiting rod 143, and the second limiting groove 1422 uniformly bears the force of the second limiting rod 144, resulting in low local pressure, uniform wear over long-term use, and improved service life.

[0032] In this embodiment, the middle part of the swing arm 142 is hinged to the first rotating shaft 1411, the first limiting groove 1421 and the second limiting groove 1422 are located on one side of the swing arm 142, and the first limiting groove 1421 and the second limiting groove 1422 are respectively located on both sides of the hinged part of the swing arm 142.

[0033] Furthermore, a second rotating shaft 121 is respectively provided on both sides of the annular support frame 12. One second rotating shaft 121 is rotatably connected to the support frame 11, and the other second rotating shaft 121 passes through the support frame 11 and is connected to the drive end of the rotation drive assembly 13, which is a manual tilting reducer. The manual tilting reducer can drive the annular support frame 12 to rotate relative to the support frame 11 and fix it at any angle. In this embodiment, the manual tilting reducer is prior art, and its specific structure and principle will not be described in detail here.

[0034] In this embodiment, the lifting drive assembly 22 includes a lifting drive component 221, an auxiliary wheel 222, and a chain. The lifting drive component 221 is connected to the transport frame 21. The driving end of the lifting drive component 221 is rotatably connected to the auxiliary wheel 222, and the lifting drive component 221 can drive the auxiliary wheel 222 to rise and fall. The chain is wound around the auxiliary wheel 222, with one end connected to the transport frame 21 and the other end connected to the support frame 11. When the lifting drive component 221 drives the auxiliary wheel 222 to rise, the end of the chain connected to the transport frame 21 remains stationary, and the other end of the chain drives the support frame 11 to rise. When the lifting drive component 221 drives the auxiliary wheel 222 to fall, the end of the chain connected to the transport frame 21 remains stationary, and the support frame 11 falls due to its own weight. In this embodiment, the transport frame 21 is provided with a first connection hole 212 for connecting to the chain, and the support frame 11 is provided with a second connection hole 112 for connecting to the chain.

[0035] In this embodiment, the lifting drive component 221 is a hydraulic rod, which is vertically arranged. The bottom of the hydraulic rod is connected to the transport frame 21, and the auxiliary wheel 222 is connected to the top of the hydraulic rod.

[0036] Preferably, the transport frame 21 is provided with two oppositely arranged slide rails 211, which extend along the height direction. Guide blocks 111 are symmetrically arranged on both sides of the support frame 11. The guide blocks 111 on both sides of the support frame 11 are slidably connected to the two slide rails 211 respectively. The slide rails 211 provide guidance and fixation for the transport frame 21, which improves the sliding connection reliability of the transport frame 21 and improves the lifting accuracy.

[0037] In this embodiment, the bottom of the transport frame 21 is provided with multiple rollers 213 to facilitate the movement of the guide tube transport mechanism.

[0038] This embodiment also provides the working steps of the guide tube carrying mechanism, as follows: When the crystal growth furnace needs to disassemble the guide tube 10, push the guide tube transport mechanism directly below the guide tube 10. Raise the support device 1 using the hydraulic rod until it is slightly higher than the lifting rod. Remove the lifting rod of the guide tube 10 and press the crimping parts 145 of the three fastening components 14 onto the upper surface of the inner cylinder of the guide tube 10 and lock them in place. The hydraulic rod is equipped with a pressure relief valve. When the pressure relief valve is opened, the guide tube 10 descends to its lowest position, and the guide tube transport mechanism is pushed out. When cleaning the guide tube 10, raise it using the hydraulic rod to a position easily accessible to personnel. When cleaning the bottom of the guide tube 10, manually drive the manual tilting reducer. After the guide tube 10 tilts, stop rotating to complete the cleaning of the guide tube 10.

[0039] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A guide tube carrying mechanism, wherein a flange (101) is provided on the top of the guide tube (10), characterized in that, The guide tube carrying mechanism includes: The support device (1) includes a support frame (11), an annular support frame (12), a rotation drive assembly (13), and a plurality of fastening assemblies (14). The annular support frame (12) is provided with a support hole for supporting the guide tube (10). The flange (101) can overlap the support frame. The annular support frame (12) is rotatably connected to the support frame (11). The rotation drive assembly (13) is connected to the support frame (11) and driven to the annular support frame (12). The rotation drive assembly (13) is used to drive the annular support frame (12) to rotate. The plurality of fastening assemblies (14) are circumferentially spaced and connected to the annular support frame (12). The fastening assemblies (14) can press the flange (101) onto the annular support frame (12). The transport device (2) includes a transport frame (21) and a lifting drive assembly (22). The support frame (11) is slidably connected to the transport frame (21) in the height direction. The lifting drive assembly (22) is driven and connected to the support frame (11) and is used to drive the support frame (11) to lift.

2. The guide tube carrying mechanism according to claim 1, characterized in that, The fastening assembly (14) includes a support (141), a swing rod (142), and a pressing component (145). The support (141) is connected to the annular support frame (12). A first rotating shaft (1411) is provided on the top of the support (141). The swing rod (142) is rotatably connected to the first rotating shaft (1411). One end of the swing rod (142) is provided with a threaded hole. The pressing component (145) is threadedly connected to the threaded hole. The swing rod (142) can rotate to the pressing position and the avoidance position. When the swing rod (142) is in the avoidance position, it can avoid the disassembly and assembly of the guide tube (10). When the swing rod (142) is in the pressing position, the pressing component (145) can press against the flange (101).

3. The guide tube carrying mechanism according to claim 2, characterized in that, The support (141) is provided with a first limiting rod (143). When the swing rod (142) rotates to the pressing position, the first limiting rod (143) can stop the swing rod (142) from continuing to rotate.

4. The guide tube carrying mechanism according to claim 3, characterized in that, A second limiting rod (144) is provided on the support (141). When the swing rod (142) rotates to the avoidance position, the second limiting rod (144) can stop the swing rod (142) from continuing to rotate.

5. The guide tube carrying mechanism according to claim 4, characterized in that, The swing arm (142) is provided with a first limiting groove (1421) corresponding to the first limiting rod (143), and the first limiting rod (143) can be embedded in the first limiting groove (1421); the swing arm (142) is provided with a second limiting groove (1422) corresponding to the second limiting rod (144), and the second limiting rod (144) can be embedded in the second limiting groove (1422).

6. The guide tube carrying mechanism according to claim 5, characterized in that, The middle part of the swing arm (142) is hinged to the first rotating shaft (1411). The first limiting groove (1421) and the second limiting groove (1422) are located on one side of the swing arm (142), and the first limiting groove (1421) and the second limiting groove (1422) are respectively located on both sides of the hinge part of the swing arm (142).

7. The guide tube carrying mechanism according to any one of claims 1-6, characterized in that, The annular support frame (12) is provided with a second rotating shaft (121) on both sides. One second rotating shaft (121) is rotatably connected to the support frame (11), and the other second rotating shaft (121) passes through the support frame (11) and is connected to the drive end of the rotation drive assembly (13). The rotation drive assembly (13) is a manual tilting reducer.

8. The guide tube conveying mechanism according to any one of claims 1-6, characterized in that, The lifting drive assembly (22) includes a lifting drive component (221), an auxiliary wheel (222), and a chain. The lifting drive component (221) is connected to the transport frame (21). The driving end of the lifting drive component (221) is rotatably connected to the auxiliary wheel (222), and the lifting drive component (221) can drive the auxiliary wheel (222) to rise and fall. The chain is wound around the auxiliary wheel (222), and one end is connected to the transport frame (21), and the other end is connected to the support frame (11).

9. The guide tube carrying mechanism according to any one of claims 1-6, characterized in that, The transport frame (21) is provided with two oppositely arranged slide rails (211), which extend along the height direction. Guide blocks (111) are symmetrically arranged on both sides of the support frame (11), and the guide blocks (111) on both sides of the support frame (11) are slidably connected to the two slide rails (211).

10. The guide tube transport mechanism according to any one of claims 1-6, characterized in that, The bottom of the transport frame (21) is provided with multiple rollers (213).

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