Bonding device suitable for product positioning

Abstract

The utility model discloses a bonding device suitable for product positioning. The bonding device comprises a frame main body, a plurality of first pressing claws and a plurality of second pressing claws, wherein the first pressing claws and the second pressing claws are arranged on two sides of the frame main body and are driven to lift; a first positioning groove is formed in the surface of the frame body, a second positioning groove is formed in the groove bottom of the first positioning groove, a plurality of positioning columns used for positioning a first product part are arranged on the periphery of the first positioning groove, and a vacuum plate used for adsorbing and positioning a second product part is arranged in the second positioning groove. The second pressing claws extend to be positioned to the surface of the first product part and are arranged close to the edge of the second positioning groove, and the first pressing claws extend to be positioned to the surface of the second product part. According to the utility model, the product is accurately positioned, and the product positioning efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing, and in particular relates to a bonding device suitable for product positioning. Background Art

[0002] Bonding is a technology that directly combines two homogeneous or heterogeneous semiconductor materials with clean and atomically flat surfaces under certain conditions after surface cleaning and activation treatment, and bonds the wafers together through van der Waals force, molecular force, and even atomic force. Bonding tooling is a process equipment used for bonding operations, which is mainly used to fix the wafers to be bonded for bonding operations. Traditional bonding tooling uses clamps to clamp the wafers to be bonded, and applies a certain weight of object to pressurize the bonding piece; the product is subjected to uneven force, the product is damaged, the production cost is increased, and the work efficiency is reduced. Utility Model Content

[0003] The purpose of the utility model is to solve the above technical problems and provide a bonding device suitable for product positioning, so as to accurately position the product and improve the efficiency of product positioning. In order to achieve the above purpose, the technical solution of the utility model is as follows:

[0004] A bonding device suitable for product positioning includes a frame body, a plurality of first pressure claws and a plurality of second pressure claws arranged on both sides of the frame body and driven to rise and fall; a first positioning groove is arranged on the surface of the frame body, a second positioning groove is arranged at the bottom of the first positioning groove, a plurality of positioning columns for positioning a first product component are arranged around the first positioning groove, a vacuum plate for adsorbing and positioning a second product component is arranged in the second positioning groove, a plurality of second pressure claws extend to be positioned on the surface of the first product component and are arranged close to the edge of the second positioning groove, and a plurality of first pressure claws extend to be positioned on the surface of the second product component.

[0005] Specifically, a vacuum base is disposed at the bottom of the frame body, and a vacuum cavity is formed between the vacuum base and the frame body.

[0006] Specifically, a negative pressure joint is externally connected to the bottom of the vacuum base, and the negative pressure joint is connected to the vacuum chamber.

[0007] Specifically, the vacuum plate is arranged above the vacuum cavity, and a plurality of adsorption holes penetrating the vacuum cavity are arranged in the vacuum plate.

[0008] Specifically, a positioning column is provided at each of the top corners of the bottom of the first positioning groove, and the corners of the first product component are provided with positioning holes that are plugged and matched with the first positioning columns.

[0009] Specifically, the end of the second pressing claw is provided with a first pressing portion corresponding to the first product component, and second pressing portions are provided on both sides of the first pressing portion.

[0010] Specifically, the first product component includes a main frame, a plurality of extension portions arranged on both sides of an inner frame edge of the main frame, and a plurality of connection portions arranged at both ends of the inner frame edge.

[0011] Compared with the prior art, the beneficial effects of the bonding device for product positioning of the utility model are mainly reflected in:

[0012] By setting the first positioning groove and the second positioning groove, it is adapted to the positioning of the first product component and the second product component; a plurality of first pressing claws and a plurality of second pressing claws accurately position the first product component and the second product component, and the force of the first product component and the second product component is balanced and stable, thereby improving the effect of the bonding process. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is one of the structural schematic diagrams of an embodiment of the utility model;

[0014] Figure 2 This is the second structural diagram of this embodiment;

[0015] Figure 3 This is a schematic diagram of the structure of the first positioning groove in this embodiment;

[0016] Figure 4 This is a schematic diagram of the structure of the first product component in this embodiment;

[0017] The numbers in the figure represent:

[0018] 1 frame body, 11 first positioning groove, 12 second positioning groove, 13 positioning column, 2 vacuum plate, 3 first pressing claw, 4 second pressing claw, 41 first crimping part, 42 second crimping part, 5 first product component, 51 positioning hole, 52 main frame, 53 extension part, 54 connecting part, 6 second product component, 7 vacuum base, 71 negative pressure connector. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present utility model are described clearly and completely below. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments.

[0020] Example:

[0021] Reference Figure 1-4As shown, this embodiment is a bonding device suitable for product positioning, including a frame body 1, a plurality of first pressing claws 3 and a plurality of second pressing claws 4 which are arranged on both sides of the frame body 1 and driven to rise and fall; a first positioning groove 11 is arranged on the surface of the frame body 1, a second positioning groove 12 is arranged at the bottom of the first positioning groove 11, a plurality of positioning columns 13 for positioning the first product component 5 are arranged around the first positioning groove 11, a vacuum plate 2 for adsorbing and positioning the second product component 6 is arranged in the second positioning groove 12, a plurality of second pressing claws 4 are extended to be positioned to the surface of the first product component 5 and are arranged close to the edge of the second positioning groove 12, and a plurality of first pressing claws 3 are extended to be positioned to the surface of the second product component 6.

[0022] A vacuum base 7 is provided at the bottom of the frame body 1, a vacuum cavity is formed between the vacuum base 7 and the frame body 1, a negative pressure joint 71 is externally connected to the bottom of the vacuum base 7, and the negative pressure joint 71 is connected to the vacuum cavity. A vacuum plate 2 is provided above the vacuum cavity, and a plurality of adsorption holes penetrating the vacuum cavity are provided in the vacuum plate 2. The second product component 6 is limited in the second positioning groove 12 and is positioned and adsorbed by the vacuum plate 2.

[0023] A positioning column 13 is disposed at each of the top corners of the bottom of the first positioning groove 11 , and a positioning hole 51 corresponding to and plugged with the first positioning column 13 is disposed at the corner of the first product component 5 .

[0024] In this embodiment, there are four first pressing jaws 3, which are symmetrically arranged on both sides of the frame body 1. The first pressing jaws 3 extend to the corners of the second product component 6, and the first pressing jaws 3 around the second product component 6 are stably pressed and positioned on the vacuum plate 2.

[0025] In this embodiment, the number of the plurality of second pressing claws 4 is two and they are symmetrically arranged on both sides of the frame body 1. The ends of the second pressing claws 4 are provided with a first pressing portion 41 corresponding to the first product component 5 and second pressing portions 42 arranged on both sides of the first pressing portion 41.

[0026] The first product component 5 includes a main frame 52, a plurality of extensions 53 disposed on both sides of the inner frame edge of the main frame 52, and a plurality of connection portions 54 disposed at both ends of the inner frame edge; the main frame 52 is positioned at the bottom of the first positioning groove 11. Part of the extension portion 53 extends to the second product component 6 for bonding, and part of the extension portion 53 is disposed at the edge of the second positioning groove 12. In order to ensure the state of the extension portion 53 here, the second pressing claw 4 is crimped and positioned on the extension portion 53 near the edge of the second positioning groove 12. A plurality of connection portions 54 extend to the second product component 6 for bonding.

[0027] The plurality of first pressing jaws 3 and the plurality of second pressing jaws 4 are respectively connected with driving members, and in this embodiment, the driving members are not limited to cylinders.

[0028] When this embodiment is applied, the first product component 5 is positioned in the first positioning groove 11, the second product component 6 is positioned in the second positioning groove 12, a plurality of first pressing jaws 3 and a plurality of second pressing jaws 4 are pneumatically pressed to position the first product component 5 and the second product component 6, and the vacuum plate 2 vacuum adsorbs and positions the second product component 6.

[0029] In this embodiment, the first positioning groove 11 and the second positioning groove 12 are provided to adapt to the positioning of the first product component 5 and the second product component 6; a plurality of first pressing claws 3 and a plurality of second pressing claws 4 accurately position the first product component 5 and the second product component 6, and the first product component 5 and the second product component 6 are subjected to a balanced and stable force, thereby improving the effect of the bonding process.

[0030] In the description of this specification, the term "specific embodiment" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0031] Although the implementation methods disclosed in the utility model are as above, the above contents are only implementation methods adopted to facilitate the understanding of the utility model, and are not used to limit the utility model. Any technician in the field to which the utility model belongs can make any modifications and changes in the form and details of implementation without departing from the spirit and scope disclosed in the utility model, but the scope of patent protection of the utility model shall still be based on the scope defined in the attached claims.

Claims

1. Bonding device suitable for product positioning, Features: It includes a frame body, a plurality of first pressing claws and a plurality of second pressing claws which are arranged on both sides of the frame body and driven to rise and fall; a first positioning groove is arranged on the surface of the frame body, a second positioning groove is arranged at the bottom of the first positioning groove, a plurality of positioning columns for positioning the first product component are arranged around the first positioning groove, a vacuum plate for adsorbing and positioning the second product component is arranged in the second positioning groove, a plurality of second pressing claws are extended to be positioned to the surface of the first product component and are arranged close to the edge of the second positioning groove, and a plurality of first pressing claws are extended to be positioned to the surface of the second product component.

2. The bonding device for product positioning according to claim 1, Features: A vacuum base is arranged at the bottom of the frame body, and a vacuum cavity is formed between the vacuum base and the frame body.

3. The bonding device for product positioning according to claim 2, Features: The bottom of the vacuum base is externally connected with a negative pressure joint, and the negative pressure joint is connected to the vacuum chamber.

4. The bonding device for product positioning according to claim 1, Features: The vacuum plate is arranged above the vacuum cavity, and a plurality of adsorption holes penetrating the vacuum cavity are arranged in the vacuum plate.

5. The bonding device for product positioning according to claim 1, Features: A positioning column is provided at each of the top corners of the bottom of the first positioning groove, and a positioning hole corresponding to the first positioning column and plugged in and matched with the first positioning column is provided at the corner of the first product component.

6. The bonding device for product positioning according to claim 1, Features: The end of the second pressing claw is provided with a first pressing portion corresponding to the first product component, and second pressing portions are provided on both sides of the first pressing portion.

7. The bonding device for product positioning according to claim 1, Features: The first product component includes a main frame, a plurality of extension parts arranged on both sides of the inner frame edge of the main frame, and a plurality of connection parts arranged at both ends of the inner frame edge.

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