The invention provides an electrostatic locking vertical sensitive micromechanical
inertial switch which comprises an insulating substrate, array fixation electrodes, a pull-in
electrode, a
mass block, conjoined serpentine springs, spring fixation bearings and a reverse limit stop structure. The array fixation electrodes are formed by a graph array through
layout wiring, is insulated from the pull-in
electrode through air gaps, and is located on the insulating substrate. The
mass block is connected with four conjoined serpentine springs, forms a suspended movable structure through the spring fixation bearing, and is located above the plane of the fixation electrodes and the pull-in
electrode. The reverse limit stop structure is suspended above the
mass block. According to the invention, the fixation
electrode array is used; through in-plane multi-point
layout, the conducting possibility of the fixation electrodes and the mass block is greatly improved; the pull-in electrode and the mass block are under
electrostatic attraction, which can arbitrarily prolong
contact time and improve contact performance; the reverse limit stop structure can effectively suppresses the
large deformation of the mass block in a non-sensitive direction, which improves the stability of the device.