Electrostatic locking vertical sensitive micromechanical inertial switch

Abstract

The invention provides an electrostatic locking vertical sensitive micromechanical inertial switch which comprises an insulating substrate, array fixation electrodes, a pull-in electrode, a mass block, conjoined serpentine springs, spring fixation bearings and a reverse limit stop structure. The array fixation electrodes are formed by a graph array through layout wiring, is insulated from the pull-in electrode through air gaps, and is located on the insulating substrate. The mass block is connected with four conjoined serpentine springs, forms a suspended movable structure through the spring fixation bearing, and is located above the plane of the fixation electrodes and the pull-in electrode. The reverse limit stop structure is suspended above the mass block. According to the invention, the fixation electrode array is used; through in-plane multi-point layout, the conducting possibility of the fixation electrodes and the mass block is greatly improved; the pull-in electrode and the mass block are under electrostatic attraction, which can arbitrarily prolong contact time and improve contact performance; the reverse limit stop structure can effectively suppresses the large deformation of the mass block in a non-sensitive direction, which improves the stability of the device.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electro-mechanical systems, in particular to a vertically sensitive micro-mechanical inertia switch for electrostatic locking. Background technique [0002] As a passive device, MEMS inertial switch has the characteristics of no energy consumption, small size and high integration. The MEMS inertial switch designed and manufactured based on traditional technology, when subjected to external acceleration exceeding the threshold value applied to the sensitive direction, the rigid contact between the moving electrode and the fixed electrode, the contact time is short, and the instantaneous conduction change of the inertial switch cannot be effectively collected. The scope of application is also greatly limited; at the same time, due to the limitation of its own processing conditions in the manufacturing process, it is difficult to achieve a good flatness on the surface of the mobile electrod...

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Problems solved by technology

However, the inertial switch designed in this way requires a large contact surface to produce pressure film damping, so the design size of the mass block is large, which is not conducive to reducing the design size of the inertial switch; secondly, because the contact time of the inertial switch is affected by various factors Especially for high-threshold inertial switches, the damping adsorption force will become weaker than the elastic restoring force of the movable electrode, so it is necessary to consider using a larger damping adsorption effect to achieve the effect of extending the contact time

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