Graphite boat transfer mechanism and drying device thereof

Abstract

The utility model relates to the technical field of transfer mechanisms, in particular to a graphite boat transfer mechanism and a drying device thereof, which comprise a frame and a bearing plate, the bearing plate is slidably arranged on the frame along the conveying direction of a graphite boat, and a first driving mechanism for driving the bearing plate to move along the conveying direction of the graphite boat is arranged on the frame. When the graphite boat transfer mechanism and the graphite boat drying device are used, the bearing plate is driven by the driving mechanism to move, the graphite boat on the bearing plate is transferred to a needed station, labor intensity is reduced, working efficiency is improved, the graphite boat drying device is simple in structure and convenient to operate, and the graphite boat drying device is suitable for large-scale popularization and application. Compared with the prior art, the graphite boat brick conveying device has the advantages that the graphite boat brick conveying device is simple in structure and convenient to use, the risk of boat collision is avoided, the use cost is reduced, and the problems that graphite boats are conveyed to designated stations through existing AGVs, boat collision is prone to occurring when the AGVs convey the graphite boats, and meanwhile the cost of the AGVs is high are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of transfer mechanisms, in particular to a graphite boat transfer mechanism and a drying device thereof. Background Art

[0002] After cleaning, the silicon wafers need to be dried to remove water from their surface. The transmission is usually carried out manually, which has low efficiency and high labor intensity, and is not suitable for large-scale production. In order to solve the problem of labor intensity, AGV carts are currently used to move graphite boats to designated workstations. However, AGV carts are prone to collisions when transporting graphite boats. At the same time, the cost of the AGV cart itself is relatively high, and is not suitable for small-scale production. Utility Model Content

[0003] The technical problem to be solved by the utility model is: in order to solve the problem that the existing AGV trolley is used to move the graphite boat to the designated workstation, the AGV trolley is prone to collision with the graphite boat when transporting the graphite boat, and the cost of the AGV trolley itself is relatively high, a graphite boat transfer mechanism and a drying device thereof are now provided.

[0004] The technical solution adopted by the utility model to solve the technical problem is: a graphite boat transfer mechanism, including a frame and a carrier plate, the carrier plate is slidably arranged on the frame along the graphite boat conveying direction, the frame is provided with a first driving mechanism for driving the carrier plate to move along the graphite boat conveying direction, and the carrier plate is provided with a limiting mechanism for limiting the displacement of the graphite boat along its transfer direction. Compared with the prior art, the frame drives the carrier plate to move through the driving mechanism to realize the transfer of the graphite boat on the carrier plate to the required work station, which reduces the labor intensity, improves the work efficiency, avoids the risk of collision with the boat, and also reduces the use cost.

[0005] In order to realize the limiting mechanism, some embodiments are preferred, wherein the limiting mechanism includes a limiting block mounted on the bearing plate, and the limiting block matches the bottom of the graphite boat. The limiting block is arranged on the bearing plate, and the graphite boat is arranged on the limiting block, and the displacement of the graphite boat along the displacement direction of the bearing plate is limited, so as to ensure that the displacement of the graphite boat is stable and reliable.

[0006] In order to meet the needs of different types of graphite boats, some preferred embodiments include two groups of limit blocks, which are spaced apart on both sides of the displacement direction of the load-bearing plate, and each group of limit blocks includes at least one limit block spaced apart from each other. By arranging limit blocks on both sides of the load-bearing plate, each group of limit holes includes at least one group, and installing the required limit blocks according to the model of the graphite boat, the applicability of the equipment is improved, and the use of more graphite boat models can be met.

[0007] In order to realize the first driving mechanism, some embodiments are preferred, wherein the first driving mechanism includes a servo motor, a synchronous pulley mechanism is provided on the frame, the synchronous pulley mechanism is provided along the displacement direction of the bearing plate, the servo motor is fixedly mounted on the frame, the output end of the servo motor is transmission-connected with the synchronous pulley mechanism, and the bearing plate is fixed on the synchronous belt of the synchronous pulley mechanism. The servo motor drives the synchronous pulley mechanism, and the synchronous pulley mechanism drives the bearing plate to move on the frame, thereby realizing the first driving mechanism.

[0008] In order to realize the sliding of the bearing plate on the frame, some embodiments are preferably provided with a guide rail on the frame, the guide rail is arranged along the displacement direction of the bearing plate, a slider matching the guide rail is installed on the bearing plate, and the slider is slidably installed on the guide rail. The bearing plate slides on the frame by the slider on the bearing plate cooperating with the guide rail on the frame.

[0009] In order to reduce the weight of the load-bearing plate, preferably in some embodiments, the load-bearing plate is provided with weight-reducing holes. By providing the weight-reducing holes on the load-bearing plate, the weight-reducing holes reduce the weight of the load-bearing plate.

[0010] In order to prevent the graphite boat from tipping over due to excessive displacement of the load-bearing plate, in some preferred embodiments, both ends of the frame along the displacement direction of the load-bearing plate are provided with stoppers, and the load-bearing plate is located between the stoppers at both ends of the frame. By providing stoppers at both ends of the load-bearing plate on the frame, the load-bearing plate is restricted between the stoppers.

[0011] In order to prevent the graphite boat from being unevenly loaded, some preferred embodiments are provided with limit switches on both sides of the frame along the displacement direction of the load-bearing plate. By installing limit switches on both sides of the load-bearing plate on the frame, the limit switches limit the displacement range of the graphite boat, ensuring that the displacement of the load-bearing plate is stable and reliable.

[0012] A drying device comprises an oven, one end of which is equipped with the above-mentioned graphite boat transfer mechanism, the oven is provided with a grabbing mechanism for grabbing the graphite boat, and the oven is provided with a second driving mechanism for driving the grabbing mechanism to move between the transfer mechanism and the oven.

[0013] Some preferred embodiments further include an outer shell, wherein the oven and the grabbing mechanism are both disposed in the outer shell, a notch is provided on the outer shell, and one end of the frame is disposed in the outer shell through the notch.

[0014] The beneficial effect of the utility model is that when the graphite boat transfer mechanism and the drying device of the utility model are in use, the driving mechanism drives the load-bearing plate to move, so that the graphite boat on the load-bearing plate can be transferred to the required work station, which reduces the labor intensity, improves the work efficiency, avoids the risk of boat collision, and reduces the use cost, and avoids the existing problem of using an AGV trolley to move the graphite boat to a designated work station, while the AGV trolley is prone to boat collision when transporting the graphite boat, and the cost of the AGV trolley itself is relatively high. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0016] Figure 1 It is a three-dimensional structural schematic diagram of Example 1 of the utility model;

[0017] Figure 2 This is a front view of Embodiment 1 of the present utility model;

[0018] Figure 3 It is a left side view of the embodiment 1 of the utility model;

[0019] Figure 4 It is a top view of embodiment 1 of the utility model;

[0020] Figure 5 This is a schematic diagram of the three-dimensional structure of Example 2 of the utility model Figure 1 ;

[0021] Figure 6 This is a schematic diagram of the three-dimensional structure of Example 2 of the utility model Figure 2 .

[0022] In the figure: 1, frame, 2, bearing plate, 3, first driving mechanism, 4, limit block, 5, synchronous pulley mechanism, 6, guide rail, 7, slider, 8, weight reduction hole, 9, stopper, 10, limit switch, 11, oven, 12, grabbing mechanism, 13, second driving mechanism, 14, outer shell, 15, notch. DETAILED DESCRIPTION

[0023] The utility model is further described in detail below in conjunction with the embodiments:

[0024] The present invention is not limited to the following specific implementations. A person skilled in the art can implement the present invention in a variety of other specific implementations according to the content disclosed in the present invention, or any design structure and idea of ​​the present invention with simple changes or modifications shall fall within the protection scope of the present invention. It should be noted that the embodiments and features in the embodiments of the present invention can be combined with each other without conflict.

[0025] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0027] Example 1

[0028] like Figure 1-4 As shown, a graphite boat transfer mechanism includes a frame 1 and a carrying plate 2, wherein the carrying plate 2 is slidably arranged on the frame 1 along the conveying direction of the graphite boat, the frame 1 is provided with a first driving mechanism 3 for driving the carrying plate 2 to move along the conveying direction of the graphite boat, and the carrying plate 2 is provided with a limiting mechanism for limiting the displacement of the graphite boat along its transfer direction.

[0029] The limiting mechanism comprises a limiting block 4 mounted on the bearing plate 2, and the limiting block 4 matches the bottom of the graphite boat.

[0030] There are two groups of the limit blocks 4, which are spaced apart on both sides of the displacement direction of the bearing plate 2, and each group of the limit blocks 4 includes at least one limit block 4 spaced apart from each other.

[0031] The first driving mechanism 3 includes a servo motor, and a synchronous pulley mechanism 5 is arranged on the frame 1. The synchronous pulley mechanism 5 is arranged along the displacement direction of the supporting plate 2. The servo motor is fixedly mounted on the frame 1, and the output end of the servo motor is transmission-connected to the synchronous pulley mechanism 5. The supporting plate 2 is fixed on the synchronous belt of the synchronous pulley mechanism 5.

[0032] A guide rail 6 is installed on the frame 1 , and the guide rail 6 is arranged along the displacement direction of the bearing plate 2 . A slider 7 matching the guide rail 6 is installed on the bearing plate 2 , and the slider 7 is slidably installed on the guide rail 6 .

[0033] The bearing plate 2 is provided with weight-reducing holes 8 .

[0034] Stoppers 9 are provided at both ends of the frame 1 along the displacement direction of the bearing plate 2 , and the bearing plate 2 is located between the stoppers 9 at both ends of the frame 1 .

[0035] The frame 1 is provided with limit switches 10 on both sides along the displacement direction of the bearing plate 2 .

[0036] Example 2

[0037] Embodiment 2 is an application of embodiment 1, specifically: Figure 5 and 6 As shown, a drying device includes an oven 11 and an outer shell 14, the outer shell 14 is equipped with a visual glass for observing the internal situation of the outer shell 14, one end of the oven 11 is equipped with the above-mentioned graphite boat transfer mechanism, the oven 11 is provided with a grabbing mechanism 12 for grabbing the graphite boat, the oven 11 is provided with a second driving mechanism 13, the second driving mechanism 13 is used to drive the grabbing mechanism 12 to move between the transfer mechanism and the oven 11, in this embodiment, the second driving mechanism 13 is a servo motor, the output shaft of the servo motor is equipped with a gear, the servo motor is installed on the grabbing mechanism 12, the grabbing mechanism 12 is slidably installed on the oven 11, and a rack matching the gear is installed on the oven 11, and the gear is meshed with the rack.

[0038] The oven 11 and the grabbing mechanism 12 are both arranged in an outer shell 14 . A notch 15 is provided on the outer shell 14 . One end of the frame 1 is arranged in the outer shell 14 through the notch 15 .

[0039] When the above-mentioned graphite boat transfer mechanism and its drying device are in use, the graphite boat to be transferred is first placed on the carrier plate 2. A limit groove matching the limit block 4 is provided at the bottom of the graphite boat. The limit block 4 is clamped in the limit groove to limit the deviation of the graphite boat in the displacement direction of the carrier plate 2, ensuring that the displacement of the graphite boat driven by the carrier plate 2 is stable and reliable. The servo motor of the first driving mechanism 3 drives the synchronous pulley mechanism 5, and the carrier plate 2 slides on the frame 1. The slider 7 on the carrier plate 2 is on the guide rail 6 on the frame 1. The supporting plate 2 slides from one end of the frame 1 to the other end and enters into the outer shell 14 through the notch 15 on the outer shell 14 until the supporting plate 2 moves the graphite boat to the desired position, and then the servo motor at the second driving mechanism 13 drives the grabbing mechanism 12 to slide on the oven 11, and makes the grabbing mechanism 12 move toward the graphite boat until the grabbing mechanism 12 moves to the desired position, grabs the graphite boat, and then moves to the desired position on the oven 11, and places the graphite boat in the oven 11.

[0040] The above-mentioned ideal embodiments of the utility model are inspirations. Through the above-mentioned description, relevant staff can make various changes and modifications without deviating from the technical concept of the utility model. The technical scope of the utility model is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A graphite boat transfer mechanism, characterized in that: The invention comprises a frame (1) and a carrying plate (2), wherein the carrying plate (2) is slidably arranged on the frame (1) along the conveying direction of the graphite boat, the frame (1) is provided with a first driving mechanism (3) for driving the carrying plate (2) to move along the conveying direction of the graphite boat, and the carrying plate (2) is provided with a limiting mechanism for limiting the displacement of the graphite boat along its transporting direction.

2. The graphite boat transfer mechanism according to claim 1, characterized in that: The limiting mechanism comprises a limiting block (4) mounted on the bearing plate (2), and the limiting block (4) matches the bottom of the graphite boat.

3. The graphite boat transfer mechanism according to claim 2, characterized in that: There are two groups of the limit blocks (4), which are arranged at intervals on both sides of the displacement direction of the bearing plate (2), and each group of the limit blocks (4) includes at least one limit block (4) arranged at intervals from each other.

4. The graphite boat transfer mechanism according to claim 1, characterized in that: The first driving mechanism (3) comprises a servo motor, a synchronous pulley mechanism (5) is arranged on the frame (1), the synchronous pulley mechanism (5) is arranged along the displacement direction of the bearing plate (2), the servo motor is fixedly mounted on the frame (1), the output end of the servo motor is transmission-connected to the synchronous pulley mechanism (5), and the bearing plate (2) is fixed on the synchronous belt of the synchronous pulley mechanism (5).

5. The graphite boat transfer mechanism according to claim 1, characterized in that: A guide rail (6) is installed on the frame (1), and the guide rail (6) is arranged along the displacement direction of the bearing plate (2). A slider (7) matching the guide rail (6) is installed on the bearing plate (2), and the slider (7) is slidably installed on the guide rail (6).

6. The graphite boat transfer mechanism according to claim 1, characterized in that: The bearing plate (2) is provided with weight-reducing holes (8).

7. The graphite boat transfer mechanism according to claim 1, characterized in that: Stop blocks (9) are provided at both ends of the frame (1) along the displacement direction of the bearing plate (2), and the bearing plate (2) is located between the stop blocks (9) at both ends of the frame (1).

8. The graphite boat transfer mechanism according to claim 1, characterized in that: Limit switches (10) are provided on both sides of the frame (1) along the displacement direction of the bearing plate (2).

9. A drying device, characterized in that: The invention comprises an oven (11), one end of which is mounted with a graphite boat transfer mechanism as claimed in any one of claims 1 to 8, the oven (11) is provided with a grabbing mechanism (12) for grabbing the graphite boat, and the oven (11) is provided with a second driving mechanism (13) for driving the grabbing mechanism (12) to move between the transfer mechanism and the oven (11).

10. The drying device according to claim 9, characterized in that: It also comprises an outer shell (14), the oven (11) and the grabbing mechanism (12) are both arranged in the outer shell (14), a notch (15) is provided on the outer shell (14), and one end of the frame (1) is arranged in the outer shell (14) through the notch (15).

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