Vacuum generating device and processing equipment

Abstract

The utility model discloses a vacuum generating device and processing equipment, the vacuum generating device comprises a gas-liquid separating box, the gas-liquid separating box comprises a box body and a first partition plate, the box body is provided with an inlet, an exhaust port and a drainage port, and the first partition plate is arranged in the box body and is opposite to the inlet; the vacuum pump is provided with an outlet, a liquid inlet and a negative pressure port, the outlet is communicated with the inlet, and the liquid inlet is communicated with the drainage port. According to the vacuum generating device disclosed by the utility model, a gas-liquid mixture from the outlet can be separated, and the separated liquid flows to the liquid inlet from the water outlet so as to return to the vacuum pump again, so that the separated liquid can be recycled, the external water supply amount is reduced, and the water-saving effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a vacuum generating device and processing equipment. Background Art

[0002] Ordinary dry vacuum generating devices cannot pump gas containing a large amount of water vapor or water droplets. Liquid ring vacuum pumps use liquid as sealing rings, which are most suitable for discharging gas containing water vapor or water droplets. Using liquid ring vacuum pumps as the suction source of vacuum generating devices can not only pump gas, but also pump gas containing water vapor or water droplets, and can also tolerate certain particles. However, liquid ring vacuum pumps need to add water from the outside to supplement the evaporation of liquid in the sealing water cycle. If direct water replenishment is used, the amount of water consumed is large, which does not save energy and reduce emissions. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a vacuum generating device, which enables the gas-liquid mixture coming out of the outlet to be separated into gas and liquid, and the separated liquid can be recycled to reduce the external water supply and improve the water-saving effect.

[0004] The utility model also provides a processing equipment, comprising the above-mentioned vacuum generating device.

[0005] According to the vacuum generating device of the embodiment of the utility model, it includes: a gas-liquid separation box, the gas-liquid separation box includes: a box body and a first partition, the box body has an inlet, an exhaust port and a drain port, the first partition is arranged in the box body and opposite to the inlet; a vacuum pump, the vacuum pump has an outlet, a liquid inlet and a negative pressure port, the outlet is connected to the inlet, and the liquid inlet is connected to the drain port.

[0006] According to the vacuum generating device of the embodiment of the utility model, a gas-liquid separation box is provided, the gas-liquid separation box has an inlet, an exhaust port and a drain port, the vacuum pump has an outlet, a liquid inlet and a negative pressure port, the outlet is connected to the inlet, and the liquid inlet is connected to the drain port, the gas-liquid separation box can separate the gas-liquid mixture coming from the outlet, and the separated liquid will flow from the drain port to the liquid inlet and then return to the vacuum pump, so that the separated liquid can be recycled, thereby reducing the external water supply and improving the water-saving effect.

[0007] In some embodiments of the utility model, the inlet is arranged on the side wall of the box body, and the first partition includes: a first plate body, the first plate body is horizontally arranged and located below the inlet, the first plate body is connected to the inner wall of the box body provided with the inlet, and the first plate body has a water outlet hole that penetrates the first plate body in the up and down directions; a second plate body, the second plate body is vertically arranged, the lower end of the second plate body is connected to an end of the first plate body away from the inner wall of the box body, and the second plate body is arranged opposite to the inlet and perpendicular to the axis of the inlet.

[0008] In some embodiments of the present invention, the upper end of the second plate is spaced apart from the top wall of the box.

[0009] In some embodiments of the utility model, a second partition is provided on the bottom wall of the box body, and the second partition is vertically arranged to divide the bottom space of the box body into a first water holding space and a second water holding space separated from each other. In the horizontal direction, the first water holding space is arranged close to the inlet relative to the second water holding space, and the projection of the second partition on the bottom wall of the box body is located in the first water holding space, and the drain outlet is connected to the second water holding space.

[0010] In some embodiments of the utility model, a third partition is provided in the first water holding space, and the third partition is vertically arranged, with the upper end of the third partition being higher than the upper end of the second partition and the lower end being spaced apart from the inner bottom wall of the box body, and the surface of the third partition facing the second partition is flush with the surface of the first partition facing away from the inlet, or, in the horizontal direction, the surface of the first partition facing away from the inlet is arranged closer to the inlet than the surface of the third partition facing away from the second partition.

[0011] In some embodiments of the present invention, a water overflow port is provided on the side wall of the box body, and the water overflow port is connected to the second water storage space; and / or, the bottoms of the first water storage space and the second water storage space both have discharge ports.

[0012] In some embodiments of the present invention, the gas-liquid separation box has a water replenishment port for connecting to a water source.

[0013] In some embodiments of the present invention, at least one of a filter, a solenoid valve and a flow meter is provided between the water source and the water replenishment port.

[0014] In some embodiments of the utility model, a solenoid valve and a flow meter are provided between the water source and the water replenishment port, the solenoid valve is multiple and includes a first solenoid valve and a second solenoid valve, the flow meter is multiple and includes a first flow meter and a second flow meter, and in the direction from the water source to the water replenishment port, the first solenoid valve, the second solenoid valve and the first flow meter are connected in series in sequence, and the second flow meter is connected in parallel with the second solenoid valve and then connected in series with the first solenoid valve and the first flow meter.

[0015] In some embodiments of the present invention, the exhaust port is disposed on the top wall of the gas-liquid separation box; and / or the drain port is disposed on the bottom wall of the gas-liquid separation box.

[0016] In some embodiments of the present utility model, a flow rate and temperature sensor is provided between the liquid inlet and the drain outlet.

[0017] In some embodiments of the utility model, the negative pressure port is connected to a vacuum pipe, and a one-way valve is provided on the vacuum pipe. The one-way valve only allows gas and / or liquid to flow toward the vacuum pump, and the end of the vacuum pipe facing away from the vacuum pump is suitable for connecting to the equipment to be vacuumed.

[0018] In some embodiments of the utility model, the negative pressure port is connected to an anti-cavitation pipeline, and one end of the anti-cavitation pipeline away from the vacuum pump is connected to the gas-liquid separation box.

[0019] In some embodiments of the present invention, the vacuum generating device further comprises: an outer cover, and the vacuum pump and the gas-liquid separation box are arranged in the outer cover.

[0020] In some embodiments of the present invention, a rotating wheel is provided at the bottom of the outer cover.

[0021] The processing equipment according to the embodiment of the utility model includes: a workbench, the upper surface of the workbench has a mounting groove, and the workbench has an exhaust channel connected to the mounting groove; a porous table top, the porous table top is embedded in the mounting groove, and the opening of the exhaust channel is located below the porous table top; the above-mentioned vacuum generating device, the negative pressure port is connected to the end of the exhaust channel away from the mounting groove; the processing device, the processing device is suitable for processing the product on the porous table top.

[0022] According to the processing equipment of the embodiment of the utility model, by setting the above-mentioned vacuum generating device, a gas-liquid separation box is set, the gas-liquid separation box has an inlet, an exhaust port and a drain port, the vacuum pump has an outlet, a liquid inlet and a negative pressure port, the outlet is connected to the inlet, and the liquid inlet is connected to the drain port. The gas-liquid separation box can separate the gas-liquid mixture coming from the outlet, and the separated liquid will flow from the drain port to the liquid inlet and then return to the vacuum pump, so that the separated liquid can be recycled, thereby reducing the external water supply and improving the water-saving effect.

[0023] In some embodiments of the present invention, the processing device is a grinding wheel device, and the processing equipment further includes: a cooling pipe, and the cooling pipe is used to spray cooling liquid to the product on the porous table.

[0024] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0026] Figure 1 is a three-dimensional diagram of a vacuum generating device according to an embodiment of the utility model;

[0027] Figure 2 It is an internal structure diagram of a vacuum generating device according to an embodiment of the utility model;

[0028] Figure 3 It is a schematic diagram of the pipeline of the processing equipment according to the embodiment of the utility model.

[0029] Reference numerals:

[0030] 100. Processing equipment;

[0031] 10. Vacuum generating device;

[0032] 1. Gas-liquid separation box; 11. Inlet; 12. Exhaust port; 13. Drain port; 14. Box body; 141. First water storage space; 142. Second water storage space; 143. Overflow port; 144. Discharge port; 15. First baffle; 151. First plate body; 1511. Water outlet; 152. Second plate body; 16. Second baffle; 17. Third baffle; 18. Water supply port; 181. Filter; 182. Solenoid valve; 1821. First solenoid valve; 1822. Second solenoid valve; 183. Flow meter; 1831. First flow meter; 1832. Second flow meter;

[0033] 2. Vacuum pump; 21. Outlet; 22. Liquid inlet; 23. Negative pressure port; 24. Flow and temperature sensor; 25. Vacuum pipe; 251. Check valve; 26. Anti-cavitation pipe; 261. Anti-cavitation valve;

[0034] 3. Outer cover; 31. Rotating wheel; 143a. External overflow outlet; 144a. External discharge outlet; 18a. External water supply outlet; 12a. External exhaust outlet;

[0035] 20. workbench; 201. mounting slot; 202. air extraction channel; 203. connecting hole;

[0036] 30. Porous countertops;

[0037] 40. Processing device; 401. Spindle; 402. Grinding wheel;

[0038] 50. Cooling pipe;

[0039] 60. Wafer;

[0040] 70. Emergency stop device;

[0041] 80. Wire harness perforation. DETAILED DESCRIPTION

[0042] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0043] In the description of the present utility model, it is necessary to understand that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0044] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] Reference below Figure 1-Figure 3 A vacuum generating device 10 according to an embodiment of the present invention will be described.

[0046] like Figure 1-Figure 3 As shown, the vacuum generating device 10 according to the embodiment of the utility model comprises: a gas-liquid separation box 1 and a vacuum pump 2 .

[0047] Specifically, refer to Figure 1-Figure 3 The gas-liquid separation box 1 includes: a box body 14 and a first partition 15, the box body 14 has an inlet 11, an exhaust port 12 and a drain port 13; the vacuum pump 2 has an outlet 21, a liquid inlet 22 and a negative pressure port 23, the outlet 21 is connected to the inlet 11, and the liquid inlet 22 is connected to the drain port 13.

[0048] It can be understood that the vacuum pump 2 is the suction source of the vacuum generating device 10. The impeller of the vacuum pump 2 rotates, thereby driving the liquid to flow in the vacuum pump 2, so that the negative pressure port 23 generates negative pressure, so that the gas can enter the vacuum pump 2 from the negative pressure port 23. At this time, if the equipment to be vacuumed is connected to the negative pressure port 23, the equipment to be vacuumed can be formed into a vacuum state.

[0049] At the same time, the gas will be discharged from the outlet 21, and the gas will take away a part of the liquid. In the prior art, the outlet is connected to the outside world. As the vacuum generating device continues to operate, the liquid in the vacuum generating device will become less and less. At this time, it is necessary to supply water to the vacuum pump by means of external water supply to ensure the normal operation of the vacuum pump, but this method consumes a lot of water. In the utility model, the gas-liquid mixture from the outlet 21 is separated by setting a gas-liquid separation box 1, wherein the separated gas will flow out from the exhaust port 12, thereby not affecting the normal operation of the vacuum generating device 10, and since the liquid inlet 22 is connected to the drain port 13, the separated liquid will flow from the drain port 13 to the liquid inlet 22 and then return to the vacuum pump 2, so that the separated liquid can be recycled, thereby reducing the external water supply and improving the water-saving effect.

[0050] Among them, it should be noted that supplying water to the vacuum pump 2 can not only realize the flow of liquid in the vacuum pump 2 to generate negative pressure at the negative pressure port 23, but also cool the vacuum pump 2 so that the vacuum pump 2 can work normally. At the same time, the specific operation and principle of the liquid flowing in the vacuum pump 2 to generate negative pressure at the negative pressure port 23 are familiar to technicians in this field, and will not be elaborated in detail in the utility model.

[0051] Furthermore, if Figure 3 As shown, the first baffle 15 is disposed in the box body 14 and is disposed opposite to the inlet 11. It can be understood that the box body 14 is used to contain liquid and structures in the gas-liquid separation box 1 such as the first baffle 15, etc., to prevent liquid from leaking outside the gas-liquid separation box 1, thereby affecting the operation of other parts of the vacuum generating device 10.

[0052] When the gas-liquid mixture comes from the inlet 11, due to the blocking effect of the first partition 15, the gas-liquid mixture will hit the first partition 15, and the liquid in the gas-liquid mixture will flow downward under the action of gravity, while the gas in the gas-liquid mixture will move upward and be discharged from the exhaust port 12, thereby achieving gas-liquid separation of the gas-liquid mixture, and no complex electrical components are required to separate the gas-liquid mixture, so that the structure is simple and the cost is low. In addition, since the first partition 15 is arranged in the box body 14 and opposite to the inlet 11, the efficiency of separating the gas-liquid mixture is improved.

[0053] Therefore, the gas-liquid separation box 1 can not only separate the liquid and gas in the gas-liquid mixture, but also store the liquid in the gas-liquid mixture. Compared with the separate device for separating the liquid and gas in the gas-liquid mixture and the device for storing the liquid, the structure is simpler and the cost is low.

[0054] According to the vacuum generating device 10 of the embodiment of the utility model, a gas-liquid separation box 1 is provided, the gas-liquid separation box 1 has an inlet 11, an exhaust port 12 and a drain port 13, the vacuum pump 2 has an outlet 21, a liquid inlet 22 and a negative pressure port 23, the outlet 21 is connected with the inlet 11, the liquid inlet 22 is connected with the drain port 13, the gas-liquid separation box 1 can separate the gas-liquid mixture coming from the outlet 21, the separated liquid will flow from the drain port 13 to the liquid inlet 22 and then return to the vacuum pump 2, so that the separated liquid can be recycled, thereby reducing the external water supply and improving the water-saving effect.

[0055] In some embodiments of the present invention, Figure 3As shown, the inlet 11 is provided on the side wall of the box body 14, and the first partition plate 15 includes: a first plate body 151 and a second plate body 152, the first plate body 151 is horizontally arranged and located below the inlet 11, the first plate body 151 is connected to the inner wall of the box body 14 provided with the inlet 11, and the first plate body 151 has a water outlet hole 1511 penetrating the first plate body 151 in the up-down direction;

[0056] It can be understood that the first plate has a blocking effect on the gas-liquid mixture and the separated liquid, preventing the gas-liquid mixture and the separated liquid from flowing freely in the box body 14. At the same time, the first plate body 151 has a water outlet hole 1511 that penetrates the first plate body 151 in the up and down directions, so that the separated liquid can flow out from the water outlet hole 1511.

[0057] Furthermore, if Figure 3 As shown, the second plate 152 is vertically arranged, the lower end of the second plate 152 is connected to the end of the first plate 151 away from the inner wall of the box body 14, and the second plate 152 is arranged opposite to the inlet 11 and perpendicular to the axis of the inlet 11. The second plate 152 is used for the gas-liquid mixture entering from the inlet 11 to collide, and the second plate 152 is vertically arranged. When the gas-liquid mixture collides with the second plate 152, the liquid in the gas-liquid mixture flows downward along the second plate 152 under the action of gravity, and the gas in the gas-liquid mixture moves upward along the second plate 152 and is discharged from the exhaust port 12, so that the gas-liquid mixture is better separated. At the same time, the second plate 152 is arranged opposite to the inlet 11 and perpendicular to the axis of the inlet 11, so that the gas-liquid mixture can collide with the second plate 152, which improves the collision effect and further improves the separation efficiency of the gas-liquid mixture.

[0058] In some embodiments of the present invention, Figure 3 As shown, the upper end of the second plate 152 is spaced apart from the top wall of the box body 14. Thus, blocking the flow of the separated gas can be avoided, so that the separated gas can flow to the exhaust port 12 and flow out from the exhaust port 12 better.

[0059] In some embodiments of the present invention, Figure 3 As shown, a second partition 16 is provided on the bottom wall of the box body 14. The second partition 16 is vertically arranged to divide the bottom space of the box body 14 into a first water holding space 141 and a second water holding space 142 separated from each other. In the horizontal direction, the first water holding space 141 is arranged close to the inlet 11 relative to the second water holding space 142, and the projection of the second partition 16 on the bottom wall of the box body 14 is located in the first water holding space 141, and the drain outlet 13 is connected to the second water holding space 142.

[0060] It is understandable that since the gas-liquid mixture also contains some solid particles, when the gas-liquid mixture collides with the first partition 15, the solid particles will flow into the first water holding space 141 along with the liquid. Since the solid particles will be deposited at the bottom of the box body 14, the setting of the second partition 16 can prevent the solid particles from entering the second water holding space 142 along with the flow of liquid. As the liquid height in the first water holding space 141 increases, the liquid in the first water holding space 141 will overflow the second partition 16 and enter the second water holding space 142, thereby achieving solid-liquid separation. At the same time, the drain port 13 is connected to the second water holding space 142, so that the purity of the liquid flowing to the vacuum pump 2 is increased, thereby improving the service life of the vacuum pump 2.

[0061] In some embodiments of the present invention, Figure 3 As shown, the first water holding space 141 is provided with a third partition 17, which is vertically arranged, with the upper end of the third partition 17 being higher than the upper end of the second partition 16 and the lower end being spaced apart from the inner bottom wall of the box body 14, and the surface of the third partition 17 facing the second partition 16 being flush with the surface of the first partition 15 facing away from the inlet 11, or, in the horizontal direction, the surface of the first partition 15 facing away from the inlet 11 is arranged closer to the inlet 11 relative to the surface of the third partition 17 facing away from the second partition 16.

[0062] It can be understood that, in the process of the separated liquid carrying solid particles falling into the first water holding space 141, the liquid carrying solid particles will splash on the water surface, and the setting of the third partition 17 can prevent the splashing liquid carrying solid particles from entering the second water holding space 142, thereby further improving the purity of the liquid in the second water holding space 142, thereby further increasing the purity of the liquid flowing to the vacuum pump 2, and improving the service life of the vacuum pump 2.

[0063] In some embodiments of the present invention, Figure 2 and Figure 3 As shown, a water overflow port 143 is provided on the side wall of the box body 14 , and the water overflow port 143 is connected to the second water storage space 142 ; thereby, it is possible to avoid excessive water in the second water storage space 142 , thereby improving the safety of the vacuum generating device 10 .

[0064] Furthermore, if Figure 2 and Figure 3 As shown, the bottoms of the first water holding space 141 and the second water holding space 142 are both provided with a discharge port 144 , so that the user can actively discharge the liquid in the first water holding space 141 and the second water holding space 142 through the discharge port 144 , thereby facilitating the cleaning and maintenance of the gas-liquid separation box 1 .

[0065] In some embodiments of the present invention, Figure 1-Figure 3As shown, the gas-liquid separation box 1 has a water supply port 18 for connecting to a water source. It is understandable that when the vacuum pump 2 is working, it is necessary to cool the liquid in the gas-liquid separation box 1 by external water so that the liquid entering the vacuum pump 2 has a suitable temperature, and the vacuum pump 2 can be cooled, so that the vacuum pump 2 can work normally.

[0066] In some embodiments of the present invention, Figure 1-Figure 3 As shown, at least one of a filter 181, a solenoid valve 182 and a flow meter 183 is provided between the water source and the water supply port 18, that is, one, two or three of them may be provided, for example, Figure 3 In the example shown, a filter 181, a solenoid valve 182 and a flow meter 183 are provided between the water source and the water replenishment port 18. It can be understood that the filter 181 is used to filter the water from the water source so that the water entering the gas-liquid separation box 1 is clean, the solenoid valve 182 can control the on-off of the flow path between the water source and the water replenishment port 18, and the flow meter 183 can detect and control the flow rate of the water from the water source, so that the water from the water source can flow into the gas-liquid separation box 1 at a certain flow rate, thereby meeting different needs.

[0067] In some embodiments of the present invention, Figure 1-Figure 3 As shown, a solenoid valve 182 and a flow meter 183 are provided between the water source and the water replenishment port 18, the solenoid valve 182 is multiple and includes a first solenoid valve 1821 and a second solenoid valve 1822, the flow meter 183 is multiple and includes a first flow meter 1831 and a second flow meter 1832, and in the direction from the water source to the water replenishment port 18, the first solenoid valve 1821, the second solenoid valve 1822 and the first flow meter 1831 are connected in series in sequence, and the second flow meter 1832 is connected in parallel with the second solenoid valve 1822 and then connected in series with the first solenoid valve 1821 and the first flow meter 1831.

[0068] It can be understood that the flow rate set by the first flow meter 1831 is greater than the flow rate set by the second flow meter 1832. For example, in the present invention, the flow rate set by the first flow meter 1831 is 3L / min, and the flow rate set by the second flow meter 1832 is 1L / min. By adjusting the different states of the first solenoid valve 1821 and the second solenoid valve 1822, different flow paths and flow rates of water flow are achieved, so that the vacuum generating device 10 can have three different water replenishment states to meet different needs:

[0069] 1. Non-water replenishment state: In the default state (the vacuum generating device 10 is not working), the first solenoid valve 1821 is closed, the flow path between the water source and the water replenishment port 18 is disconnected, and the vacuum generating device 10 does not replenish water.

[0070] 2. Normal water replenishment state: When the vacuum generating device 10 is working, the first solenoid valve 1821 is opened and the second solenoid valve 1822 is closed. At this time, the first flow meter 1831 and the second flow meter 1832 are connected in series, and the water from the water source enters the gas-liquid separation box 1 through the first flow meter 1831 and the second flow meter 1832. At this time, the water from the water source enters the gas-liquid separation box 1 according to the flow rate set by the second flow meter 1832. At this time, the vacuum generating device 10 replenishes water at a lower speed (for example, 1L / min in the utility model).

[0071] 3. Rapid water replenishment state: When the vacuum generating device 10 is working and the water temperature between the liquid inlet 22 and the drain outlet 13 is too high, the first solenoid valve 1821 is opened and the second solenoid valve 1822 is opened. At this time, the first flow meter 1831 and the second flow meter 1832 are connected in parallel, and the water from the water source enters the gas-liquid separation box 1 through the first flow meter 1831. At this time, the water from the water source enters the gas-liquid separation box 1 according to the flow rate set by the first flow meter 1831. At this time, the vacuum generating device 10 quickly replenishes water (for example, 3L / min in the present utility model).

[0072] Therefore, when the vacuum generating device 10 is in a normal water replenishment state, the water replenishment speed is low, which is beneficial to saving water. When the water temperature between the liquid inlet 22 and the drain outlet 13 is too high, the vacuum generating device 10 can also enter a rapid water replenishment state, so that the liquid entering the vacuum pump 2 has a suitable temperature, and the vacuum pump 2 can be cooled so that the vacuum pump 2 can work normally.

[0073] In some embodiments of the present invention, Figure 2 and Figure 3 As shown, the exhaust port 12 is arranged on the top wall of the gas-liquid separation box 1. Since the separated gas will float upward, the exhaust port 12 is arranged on the top wall of the gas-liquid separation box 1, so that the separated gas can be discharged from the exhaust port 12, thereby improving the exhaust efficiency.

[0074] and / or, if Figure 3 As shown, the drain port 13 is arranged on the bottom wall of the gas-liquid separation box 1. Since the separated liquid will flow downward under the action of gravity, and the drain port 13 is arranged on the bottom wall of the gas-liquid separation box 1, it is convenient for the separated liquid to flow out of the drain port 13, thereby improving the drainage efficiency, so that the liquid can return to the vacuum pump 2 faster, thereby improving the working efficiency of the vacuum pump 2.

[0075] In some embodiments of the present invention, Figure 3As shown, a flow temperature sensor 24 is provided between the liquid inlet 22 and the drain 13. It is understandable that the flow temperature sensor 24 is used to monitor the water temperature between the liquid inlet 22 and the drain 13. When the flow temperature sensor 24 detects that the water temperature between the liquid inlet 22 and the drain 13 is too high, the speed of external water replenishment to the vacuum generating device 10 is increased, thereby quickly reducing the water temperature between the liquid inlet 22 and the drain 13, avoiding the liquid temperature entering the vacuum pump 2 being too high, thereby failing to cool the vacuum pump 2, causing the vacuum pump 2 to shut down and be damaged. Therefore, a flow temperature sensor 24 is provided between the liquid inlet 22 and the drain 13, so that the liquid entering the vacuum pump 2 has a suitable temperature, and the vacuum pump 2 is cooled, so that the vacuum pump 2 can work normally.

[0076] In some embodiments of the present invention, Figure 3 As shown, the negative pressure port 23 is connected to a vacuum pipe 25, and a one-way valve 251 is provided on the vacuum pipe 25. The one-way valve 251 only allows gas and / or liquid to flow to the vacuum pump 2, and the end of the vacuum pipe 25 away from the vacuum pump 2 is suitable for connecting to the device to be vacuumed. In this way, the device to be vacuumed can be formed into a vacuum state, and at the same time, the one-way valve 251 can prevent the gas-liquid mixture in the vacuum pump 2 from entering the device to be vacuumed, further promoting the device to be vacuumed to form a vacuum state.

[0077] In some embodiments of the present invention, Figure 1-Figure 3 As shown, the negative pressure port 23 is connected to an anti-cavitation pipe 26, and one end of the anti-cavitation pipe 26 away from the vacuum pump 2 is connected to the gas-liquid separation box 1. It can be understood that an anti-cavitation valve 261 is provided on the anti-cavitation pipe 26, and the user can adjust the pressure at the negative pressure port 23 by operating the opening and closing degree of the anti-cavitation valve 261, so as to avoid the negative pressure port 23 The pressure is too low and the cavitation is serious, thereby improving the anti-cavitation effect and increasing the service life of the vacuum generating device 10.

[0078] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the vacuum generating device 10 further includes: an outer cover 3, and the vacuum pump 2 and the gas-liquid separation box 1 are arranged in the outer cover 3. It can be understood that the outer cover 3 can protect the internal parts of the vacuum generating device 10 such as the vacuum pump 2 and the gas-liquid separation box 1 and various pipelines.

[0079] Furthermore, if Figure 1 and Figure 2As shown, the outer cover 3 has an external overflow port 143a, an external discharge port 144a, an external water replenishment port 18a and an external exhaust port 12a corresponding to the overflow port 143, the discharge port 144, the water replenishment port 18 and the exhaust port 12 on the gas-liquid separation box 1, so as to facilitate the installation and fixation of the water channel structure in the vacuum generating device 10. At the same time, a connecting hole 203 is also provided on the outer cover 3, so as to facilitate the connection between the vacuum generating device 10 and the equipment to be vacuumed.

[0080] Furthermore, if Figure 1 and Figure 2 As shown, the outer cover 3 is also provided with an emergency stop device 70 and a wiring harness hole 80. The wiring harness hole 80 is used for the external wiring harness to pass through and connect with the vacuum pump 2, so as to supply power to the vacuum pump 2 and realize the normal operation of the vacuum pump 2. The emergency stop device 70 is connected to the vacuum pump 2. When an emergency occurs, the vacuum pump 2 can be stopped urgently by operating the emergency stop device 70, thereby improving the safety of the vacuum generating device 10.

[0081] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the bottom of the outer cover 3 is provided with a rotating wheel 31. Thus, the vacuum generating device 10 can be moved according to different needs, making it easy to carry the vacuum generating device 10. In addition, there are multiple rotating wheels 31, making it more convenient to carry the vacuum generating device 10. Figure 1 and Figure 2 In the example shown, there are four rotating wheels 31 , but the present invention is not limited thereto, and the number of the rotating wheels 31 may be other numbers, such as 2, 3, 5 or 6.

[0082] Reference below Figure 3 A processing device 100 according to an embodiment of the present invention is described.

[0083] like Figure 3 As shown, the processing equipment 100 according to the embodiment of the utility model includes: a workbench 20, a porous table 30, a processing device 40, and the above-mentioned vacuum generating device 10.

[0084] Specifically, refer to Figure 3 The upper surface of the workbench 20 has a mounting groove 201, and the workbench 20 has an exhaust channel 202 connected to the mounting groove 201; the porous table 30 is embedded in the mounting groove 201, and the opening of the exhaust channel 202 is located below the porous table 30; the negative pressure port 23 is connected to the end of the exhaust channel 202 away from the mounting groove 201; the processing device 40 is suitable for processing the product on the porous table 30.

[0085] It can be understood that the negative pressure port 23 is connected to the end of the exhaust channel 202 away from the mounting groove 201, so that when the vacuum generating device 10 is working, the negative pressure port 23 generates negative pressure, so that the vacuum generating device 10 can exhaust air from the mounting groove 201, so that the product on the porous table top 30 can be fixed on the workbench 20, so that the product processing is reliable.

[0086] It should be noted that the porous table 30 may be spaced apart from the bottom wall of the mounting groove 201 (for example, Figure 3 In the example shown), the porous table 30 can also abut against the bottom wall of the mounting groove 201.

[0087] According to the processing equipment 100 of the embodiment of the utility model, by setting the above-mentioned vacuum generating device 10, a gas-liquid separation box 1 is set, the gas-liquid separation box 1 has an inlet 11, an exhaust port 12 and a drain port 13, the vacuum pump 2 has an outlet 21, a liquid inlet 22 and a negative pressure port 23, the outlet 21 is connected with the inlet 11, the liquid inlet 22 is connected with the drain port 13, the gas-liquid separation box 1 can separate the gas-liquid mixture coming from the outlet 21, and the separated liquid will flow from the drain port 13 to the liquid inlet 22 and then return to the vacuum pump 2, so that the separated liquid can be recycled, thereby reducing the external water supply and improving the water-saving effect.

[0088] In some embodiments of the present invention, Figure 3 As shown, the processing device 40 is a grinding wheel device, and the processing equipment 100 also includes: a cooling pipe 50, and the cooling pipe 50 is used to spray cooling liquid to the product on the porous table 30.

[0089] It can be understood that when the processing device 40 is a grinding wheel device, the processed product is a wafer 60, and the processing device 40 includes a main shaft 401 and a grinding wheel 402 arranged at the lower end of the main shaft 401, and the grinding wheel 402 is used to grind the surface of the wafer 60; when the grinding wheel 402 grinds the wafer 60, grinding chips will be generated, and the cooling pipe 50 is used to spray coolant onto the wafer 60. The coolant not only takes away the heat generated when the wafer 60 is ground, thereby cooling the wafer 60, but also can rinse the grinding chips on the wafer 60.

[0090] In addition, when the vacuum generating device 10 is evacuating air, the grinding chips generated when the wafer 60 is ground and the coolant sprayed from the cooling tube 50 can also be sucked into the vacuum generating device 10 together, wherein the grinding chips will be separated by the gas-liquid separation box 1 and deposited at the bottom of the gas-liquid separation box 1, while the coolant can enter the vacuum generating device 10 for liquid circulation, thereby further reducing the external water supply and improving the water-saving effect.

[0091] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0092] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A vacuum generating device, characterized in that: include: A gas-liquid separation box, the gas-liquid separation box comprising: a box body and a first partition, the box body having an inlet, an exhaust port and a drain port, the first partition being arranged in the box body and opposite to the inlet; A vacuum pump is provided, wherein the vacuum pump has an outlet, a liquid inlet and a negative pressure port, wherein the outlet is communicated with the inlet, and the liquid inlet is communicated with the drain port.

2. The vacuum generating device according to claim 1, characterized in that: The inlet is arranged on the side wall of the box body, and the first partition comprises: A first plate body, the first plate body is horizontally arranged and located below the inlet, the first plate body is connected to the inner wall of the box body provided with the inlet, and the first plate body has a water outlet hole penetrating the first plate body in the up-down direction; The second plate body is vertically arranged, the lower end of the second plate body is connected to an end of the first plate body away from the inner wall of the box, and the second plate body is arranged opposite to the inlet and perpendicular to the axis of the inlet.

3. The vacuum generating device according to claim 2, characterized in that: The upper end of the second plate body is spaced apart from the top wall of the box body.

4. The vacuum generating device according to claim 1, characterized in that: The bottom wall of the box body is provided with a second partition, which is vertically arranged to divide the bottom space of the box body into a first water storage space and a second water storage space separated from each other. In the horizontal direction, the first water holding space is arranged close to the inlet relative to the second water holding space, and the projection of the second partition on the bottom wall of the box body is located in the first water holding space, and the drain port is connected to the second water holding space.

5. The vacuum generating device according to claim 4, characterized in that: The first water storage space has a third partition, which is vertically arranged, with an upper end of the third partition higher than an upper end of the second partition and a lower end spaced from an inner bottom wall of the box body. The surface of the third partition facing the second partition is flush with the surface of the first partition facing away from the inlet, or, in the horizontal direction, the surface of the first partition facing away from the inlet is arranged closer to the inlet than the surface of the third partition facing away from the second partition.

6. The vacuum generating device according to claim 4, characterized in that: The side wall of the box body is provided with an overflow port, and the overflow port is communicated with the second water storage space; And / or, the bottoms of the first water holding space and the second water holding space both have drain ports.

7. The vacuum generating device according to claim 1, characterized in that: The gas-liquid separation box has a water replenishment port for connecting to a water source.

8. The vacuum generating device according to claim 7, characterized in that: At least one of a filter, a solenoid valve and a flow meter is provided between the water source and the water replenishment port.

9. The vacuum generating device according to claim 8, characterized in that: An electromagnetic valve and a flow meter are provided between the water source and the water replenishment port. The electromagnetic valve is multiple and includes a first electromagnetic valve and a second electromagnetic valve. The flow meter is multiple and includes a first flow meter and a second flow meter. In the direction from the water source to the water replenishment port, the first solenoid valve, the second solenoid valve and the first flow meter are connected in series in sequence, and the second flow meter is connected in parallel with the second solenoid valve and then connected in series with the first solenoid valve and the first flow meter.

10. The vacuum generating device according to claim 1, characterized in that: The exhaust port is arranged on the top wall of the gas-liquid separation box; And / or, the drain port is arranged on the bottom wall of the gas-liquid separation box.

11. The vacuum generating device according to claim 1, characterized in that: A flow rate and temperature sensor is provided between the liquid inlet and the drain outlet.

12. The vacuum generating device according to claim 1, characterized in that: The negative pressure port is connected to a vacuum pipe, on which a one-way valve is provided, which only allows gas and / or liquid to flow toward the vacuum pump, and an end of the vacuum pipe facing away from the vacuum pump is suitable for connection with a device to be evacuated.

13. The vacuum generating device according to claim 1, characterized in that: The negative pressure port is connected to an anti-cavitation pipeline, and one end of the anti-cavitation pipeline away from the vacuum pump is communicated with the gas-liquid separation box.

14. The vacuum generating device according to claim 1, characterized in that: Also includes: The vacuum pump and the gas-liquid separation box are arranged in the outer cover.

15. The vacuum generating device according to claim 14, characterized in that: A rotating wheel is arranged at the bottom of the outer cover.

16. A processing equipment, characterized in that: include: A workbench, wherein the upper surface of the workbench is provided with a mounting groove, and the workbench is provided with an exhaust passage connected with the mounting groove; A porous table top, wherein the porous table top is embedded in the mounting groove, and the opening of the air extraction channel is located below the porous table top; The vacuum generating device according to any one of claims 1 to 15, wherein the negative pressure port is connected to an end of the air extraction channel away from the mounting groove; A processing device is suitable for processing the product on the porous table.

17. The processing equipment according to claim 16, characterized in that The processing device is a grinding wheel device, and the processing equipment also includes: A cooling pipe is used to spray cooling liquid onto the product on the porous table.

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