Coating target loading device

Abstract

A coating target loading device comprises a material preparation driving mechanism and a transfer mechanism. The material preparation driving mechanism comprises a vertically-arranged rotating motor, a forked plate is arranged at the upper end of an output shaft of the rotating motor, a target material barrel is arranged on one side above the rotating motor, a valve is arranged at the lower end of the target material barrel, a first linear mechanism is arranged below one end of the peripheral side of the target material barrel, and a second linear mechanism is vertically arranged at one end of the output shaft of the target material barrel. A vertical rod is arranged on one side of the lower end of the second linear mechanism output shaft. The multiple transfer mechanisms are arranged outside the forked ends of the forked plate correspondingly and comprise rotating plates, a pair of extending plates are arranged on the outer side faces of the rotating plates, transfer cylinders with the upper portions and the lower portions opened are further fixed to the outer side faces of the rotating plates, bottom plates are slidably matched with the lower ends of the transfer cylinders, and inverted-L-shaped sliding blocks matched with the extending plates are arranged at the two ends of the peripheral sides of the bottom plates correspondingly. And a ring part matched with the vertical rod is also arranged on the peripheral side of the bottom plate. The coating target loading device can be used for automatically carrying out target loading on a plurality of crucibles in a vacuum coating machine, and the production efficiency can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating target material loading, in particular to a coating target material loading device. Background Art

[0002] In a vacuum coating machine, the target material used for coating needs to be loaded into a crucible first. These crucibles are usually arranged in a circular array on a rotatable ring inside the vacuum coating machine for use. For some larger vacuum coating machines, two rings are sometimes set inside, and the number of crucibles on each ring can reach 20 to 30.

[0003] The existing technology adopts a method of manually loading the target materials. This method not only requires the target materials to be manually loaded into the crucible one by one, but also requires separate weighing or a unified transfer container to make the target material amount in each crucible as consistent as possible, which further reduces production efficiency. Utility Model Content

[0004] In view of the above-mentioned defects, the utility model provides a coating target material loading device, which can automatically load target materials into multiple crucibles in a vacuum coating machine, thereby improving production efficiency.

[0005] In order to achieve the purpose of this utility model, the following technologies are proposed:

[0006] A coating target loading device, comprising:

[0007] The material preparation drive mechanism comprises a vertically arranged rotary motor, a bifurcated plate is provided at the upper end of the output shaft, a target barrel is provided at one side above the rotary motor, a valve is provided at the lower end of the target barrel, a first linear mechanism is provided below one end of the outer peripheral side of the target barrel, a second linear mechanism is vertically provided at one end of the output shaft, and a vertical rod is provided at one side of the lower end of the output shaft of the second linear mechanism;

[0008] Multiple transfer mechanisms are respectively arranged on the outside of each forked end of the forked plate, including a rotating plate. A pair of extension plates are provided on the outer side of the rotating plate. A transfer cylinder with openings at the upper and lower ends is also fixed to the outer side of the rotating plate. The lower end of the transfer cylinder is slidably matched with a bottom plate. The two ends of the outer peripheral side of the bottom plate are respectively provided with inverted L-shaped sliding blocks that match the extension plates. The outer peripheral side of the bottom plate is also provided with a ring portion that matches the vertical rod.

[0009] Furthermore, a side frame is provided at one end of the outer peripheral side of the rotating motor, a C-shaped bracket is provided on the side frame, and the target barrel is provided at one end of the horizontal side of the C-shaped bracket.

[0010] Furthermore, a discharge pipe is provided at the lower end of the valve.

[0011] Furthermore, an L-shaped hanger is provided on the outer peripheral side of the target barrel, and the first linear mechanism is provided at the lower end of the L-shaped hanger.

[0012] Furthermore, a horizontal plate is provided at the lower end of the output shaft of the second linear mechanism, and a vertical rod is provided at one end of the lower end surface of the horizontal plate.

[0013] Furthermore, the height of the upper end surface of the extension plate is lower than the height of the upper end surface of the rotation plate.

[0014] The beneficial effects of this technical solution are:

[0015] 1. There are multiple transfer mechanisms. When in use, you only need to make the transfer cylinder where the vertical rod is located directly above the crucible to be loaded with the target material, and then continuously rotate each transfer mechanism through the rotary motor, and then pull open the corresponding bottom plate through the vertical rod, so that the target material can be automatically loaded with high efficiency.

[0016] 2. A large amount of target materials can be pre-loaded in the target barrel. After the target materials in the transfer cylinder are loaded into the crucible, they can be continuously replenished through the material preparation drive mechanism, which is suitable for the situation where there are a large number of crucibles. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 An overall stereogram of an embodiment of the present application is shown.

[0018] Figure 2 The present application embodiment is shown Figure 1 A magnified view of part A.

[0019] Figure 3 A partial exploded view of an embodiment of the present application is shown. DETAILED DESCRIPTION

[0020] The present application will be described in detail below with reference to the accompanying drawings and in combination with embodiments. It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other without conflict.

[0021] like Figure 1~Figure 3 A coating target material loading device shown includes a material preparation drive mechanism 1 and a transfer mechanism 2.

[0022] The material preparation drive mechanism 1 includes a vertically arranged rotating motor 11, a fork plate 12 is provided at the upper end of its output shaft, a side frame is provided at one end of the outer peripheral side of the rotating motor 11, a C-shaped bracket 13 is provided on the side frame, a target barrel 14 is provided at one end of the upper horizontal side of the C-shaped bracket 13, and a valve 15 is provided at the lower end of the target barrel 14. Specifically, the valve 15 adopts a solid quantitative valve, and a discharge pipe is provided at the lower end of the valve 15. An L-shaped hanger 16 is also provided on the outer peripheral side of the target barrel 14, and a first linear mechanism 17 is provided at the lower end of the L-shaped hanger 16. A second linear mechanism 18 is vertically provided at one end of its output shaft, and a horizontal plate is provided at the lower end of the output shaft of the second linear mechanism 18, and a vertical rod 19 is provided at one end of the lower end surface of the horizontal plate.

[0023] There are multiple transfer mechanisms 2, which are respectively arranged on the outside of each forked end of the forked plate 12, including a rotating plate 21. A pair of extension plates 22 are provided on the outer side of the rotating plate 21. The height of the upper end surface of the extension plate 22 is lower than the height of the upper end surface of the rotating plate 21. A transfer cylinder 23 with openings on both the upper and lower sides is also fixed to the outer side of the rotating plate 21. The lower end of the transfer cylinder 23 is slidably matched with a bottom plate 24. The two ends of the outer peripheral side of the bottom plate 24 are respectively provided with inverted L-shaped sliding blocks 25 that match the extension plate 22. The outer peripheral side of the bottom plate 24 is also provided with a ring portion 26 that matches the vertical rod 19.

[0024] The above are only some of the embodiments listed in this application and are not intended to limit this application.

Claims

1. A coating target loading device, It is characterized in that include: A material preparation drive mechanism (1) comprises a vertically arranged rotating motor (11), the upper end of the output shaft of which is provided with a bifurcated plate (12), a target barrel (14) is provided on one side above the rotating motor (11), a valve (15) is provided on the lower end of the target barrel (14), a first linear mechanism (17) is provided below one end of the outer peripheral side of the target barrel (14), a second linear mechanism (18) is vertically provided at one end of the output shaft, and a vertical rod (19) is provided on one side of the lower end of the output shaft of the second linear mechanism (18); A plurality of transfer mechanisms (2) are respectively arranged outside each forked end of the forked plate (12), comprising a rotating plate (21), a pair of extension plates (22) being arranged on the outer side surface of the rotating plate (21), a transfer cylinder (23) with upper and lower openings being fixed to the outer side surface of the rotating plate (21), a bottom plate (24) being slidably matched at the lower end of the transfer cylinder (23), inverted L-shaped sliding blocks (25) matched with the extension plates (22) being arranged at both ends of the outer peripheral side of the bottom plate (24), and a ring portion (26) matching with the vertical rod (19) being arranged on the outer peripheral side of the bottom plate (24).

2. The coating target loading device according to claim 1, It is characterized in that A side frame is provided at one end of the outer peripheral side of the rotating motor (11), a C-shaped bracket (13) is provided on the side frame, and a target barrel (14) is provided at one end of the horizontal side of the C-shaped bracket (13).

3. The coating target loading device according to claim 1, It is characterized in that A discharge pipe is provided at the lower end of the valve (15).

4. The coating target loading device according to claim 1, It is characterized in that An L-shaped hanger (16) is also provided on the outer peripheral side of the target barrel (14), and a first linear mechanism (17) is provided at the lower end of the L-shaped hanger (16).

5. The coating target loading device according to claim 1, It is characterized in that A horizontal plate is provided at the lower end of the output shaft of the second linear mechanism (18), and a vertical rod (19) is provided at one end of the lower end surface of the horizontal plate.

6. The coating target loading device according to claim 1, It is characterized in that The height of the upper end surface of the extension plate (22) is lower than the height of the upper end surface of the rotating plate (21).

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