Public rotation rotating stand system and vacuum coating machine

Abstract

The utility model discloses a public rotation rotating stand system which has the advantage that workpieces can be conveniently taken and placed. In addition, the utility model also discloses a vacuum coating machine. The public rotation rotating frame system comprises a public rotation driving mechanism, supporting frames, a workpiece carrying frame and an exhaust pipe, the multiple supporting frames are rotatably installed on the public rotation driving mechanism, and the multiple supporting frames are arranged in a circle around the exhaust pipe. The revolution and rotation driving mechanism drives the bearing frame to rotate while driving the bearing frame to revolve with the exhaust pipe as the center, the bearing frame is provided with a plurality of layered containing spaces, the workpiece carrying frames are movably placed in the containing spaces, and the workpiece carrying frames are provided with a plurality of pairs of inserting grooves which are formed in a one-up-one-down spaced mode and used for inserting the piece-type workpieces.

Description

Technical Field

[0001] The utility model relates to the field of film coating equipment, in particular to a revolving rotating frame system and a film coating machine. Background Art

[0002] When the prior art uses a vacuum coating machine to coat the surface of a workpiece, a turntable is generally set in the process chamber of the vacuum coating machine, and the workpiece is placed on the turntable so that the workpiece is coated while following the rotation of the turntable. Through the rotation of the turntable, each workpiece on the turntable can obtain an equal opportunity to be plated by the sputtering target. In order to obtain a uniform film deposition on all parts of the workpiece surface, the workpiece is also rotated while following the revolution of the turntable. However, for workpieces such as PCBA, it is very inconvenient to take it off the turntable, which greatly affects the convenience and production efficiency of processing. Therefore, there is an urgent need for a rotary turntable system and a vacuum coating machine that are convenient for taking and placing workpieces to overcome the above-mentioned defects. Utility Model Content

[0003] The utility model aims to provide a reciprocating rotating frame system which is convenient for taking and placing workpieces.

[0004] Another object of the utility model is to provide a vacuum coating machine that is convenient for taking and placing workpieces.

[0005] To achieve the above-mentioned purpose, the utility model provides a reciprocal rotation turret system, which includes a reciprocal rotation drive mechanism, a support frame, a workpiece carrier and an exhaust pipe. Multiple support frames are rotatably installed on the reciprocal rotation drive mechanism. Multiple support frames are arranged in a circle around the exhaust pipe. The reciprocal rotation drive mechanism drives the support frame to revolve around the exhaust pipe as the center and drives the support frame to rotate at the same time. The support frame is provided with a plurality of layered placement spaces. The workpiece carrier can be detachably placed in the placement space. The workpiece carrier is provided with a plurality of pairs of insertion slots for inserting sheet-type workpieces, which are arranged one above the other and spaced apart from each other.

[0006] Preferably, the workpiece carrier comprises two carrier plates arranged one above the other and a connecting rod connected to the two carrier plates, the carrier plates are provided with a plurality of insertion slots, and the plurality of insertion slots are arranged in an isotropic manner with the center of the carrier plates as the center of the circle.

[0007] Preferably, the carrier includes an inner ring, an outer ring and a plurality of support rods, the inner ring and the outer ring are coaxially arranged, the outer ring surrounds the inner ring, one end of the support rod is connected to the inner ring, and the other end of the support rod is connected to the outer ring, the plurality of support rods are arranged in a scattered manner with the center of the inner ring as the center of the circle, and the insertion slots are opened on the support rods.

[0008] Preferably, the supporting frame includes a top connecting frame installed on the top, a bottom connecting frame, a surrounding rod and a plurality of cross brackets, the upper end of the surrounding rod is installed on the top connecting frame and the lower end is installed on the bottom connecting frame, the two surrounding rods are arranged relatively spaced apart, the cross bracket is installed on the two surrounding rods, and the plurality of cross brackets are arranged at intervals from top to bottom, and the upper and lower adjacent cross brackets enclose a placement space, and the top connecting frame and the bottom connecting frame are rotatably installed on the reciprocal and self-rotation driving mechanism.

[0009] Preferably, the reciprocal and self-rotation driving mechanism includes a driving device, a first turntable, a second turntable, a third turntable and a mounting plate. The second turntable is arranged below the first turntable. The first turntable and the second turntable are respectively coaxially arranged with the exhaust pipe. The mounting plate is installed above the first turntable through a structural rod. The top connecting frame is rotatably installed on the mounting plate. The third turntable is arranged in a coordinated linkage with the second turntable. The bottom connecting frame is installed on the third turntable. The first turntable and the second turntable are arranged to rotate synchronously. The driving device drives the first turntable to rotate and drives the second turntable to rotate synchronously, so that the supporting frame revolves, and links the third turntable to rotate to make the supporting frame rotate.

[0010] Preferably, the reciprocating and self-rotating driving mechanism further comprises a mounting chassis, which is arranged below the second turntable, the second turntable is mounted on the mounting chassis, and the third turntable is arranged on one side of the second turntable.

[0011] Preferably, the exhaust pipe is coaxially arranged with the mounting plate, the first rotating plate, the second rotating plate and the mounting chassis.

[0012] Preferably, the outer wall of the exhaust pipe is provided with a plurality of exhaust through holes along the axial direction, each group of exhaust through holes is arranged in a circle with the axis of the exhaust pipe as the center, and two adjacent exhaust through holes in each group of exhaust through holes are arranged at intervals.

[0013] Preferably, the diameter of each group of exhaust holes increases continuously from top to bottom.

[0014] To achieve the above another purpose, the utility model also provides a vacuum coating machine, which includes a reaction chamber, an evaporation device, a vacuum device and the above-mentioned revolving turntable system. The reaction chamber has a coating chamber, the evaporation device is connected to the coating chamber, the revolving turntable system is installed in the coating chamber, and the vacuum device is connected to the exhaust pipe.

[0015] Compared with the prior art, in the utility model, after the sheet-type workpiece (such as a PCBA board) is inserted into the insertion slot, the sheet-type workpiece is carried by the support bracket, and then the workpiece carrier can be conveniently loaded into the placement space. During coating, the orbital and self-rotation driving mechanism drives the support bracket to revolve around the exhaust pipe as the center, and at the same time drives the support bracket to rotate. This makes the workpiece carrier also revolve around the exhaust pipe as the center, and rotate at the same time, so that the surface coating of the workpiece is more uniform. After coating, the workpiece carrier can be directly removed from the placement space, and then the workpiece can be directly pulled out from the insertion slot. It can be seen that the orbital and self-rotation turntable system of the utility model can facilitate the removal and placement of workpieces, which helps to improve processing convenience and improve processing efficiency.

[0016] It is understandable that, since the vacuum coating machine of the present invention includes the above-mentioned reciprocating rotating frame system, the vacuum coating machine of the present invention has the advantages of convenient workpiece placement and facilitating processing convenience and improving processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional diagram of the vacuum coating machine of the utility model.

[0018] Figure 2 A top view of the vacuum coating machine of the present invention.

[0019] Figure 3 It is a three-dimensional diagram of the vacuum coating machine of the utility model at another angle.

[0020] Figure 4 It is a three-dimensional diagram of the reciprocating rotating frame system of the utility model after the workpiece carrier is hidden.

[0021] Figure 5 It is a three-dimensional diagram of the revolving and self-rotating rotating frame system of the utility model.

[0022] Figure 6 It is a three-dimensional diagram of the rotary frame system of the utility model at another angle.

[0023] Figure 7 It is a bottom view of the rotary frame system of the utility model after the installation chassis is hidden.

[0024] Figure 8 A three-dimensional diagram of the rotary frame system of the utility model after a plurality of workpiece carriers are installed on a supporting frame. DETAILED DESCRIPTION

[0025] In order to explain the technical content and structural features of the present invention in detail, further description will be given below in combination with the implementation modes and the accompanying drawings.

[0026] like Figure 1 , Figure 2 and Figure 3As shown, the vacuum coating machine 100 of the utility model includes a revolving turret system 10, a reaction chamber 20, an evaporation device 30 and a vacuum pumping device. The reaction chamber 20 has a coating chamber 21, the evaporation device 30 is connected to the coating chamber 21, and the revolving turret system 10 is installed in the coating chamber 21. The vacuum pumping device is connected to the coating chamber 21, specifically, the vacuum pumping device is connected through the exhaust pipe 14 described below, so as to achieve communication with the coating chamber 21. The evaporation device 30 is used to evaporate the liquid film material into a coating gas with a certain temperature, and the evaporation device 30 inputs the coating gas obtained by evaporation into the coating chamber 21. The vacuum pumping device vacuumizes the coating chamber 21. A positive electrode (not shown) is also provided in the coating chamber 21, and the chamber wall of the coating chamber 21 is grounded. The revolving turret system 10 is used for placing workpieces. After the workpiece is placed on the revolving turret system 10, the vacuum pumping device is started to evacuate the coating chamber 21 until the preset vacuum degree is reached. The positive electrode is energized, so that the coating chamber 21 generates an ionization electric field, and the coating gas that reaches the preset temperature enters the coating chamber 21 and is ionized to generate plasma, and the plasma acts on the surface of the workpiece to coat the surface of the workpiece. During the coating process, the vacuum pumping device continues to operate to maintain the vacuum state in the coating chamber 21, and the coating gas is continuously input into the coating chamber 21 to ensure the continuity of the coating. The vacuum coating machine 100 provided in this embodiment can be a PECVD coating machine, and can also be applied as a CVD coating machine or a PVD coating machine, or even a composite coating machine.

[0027] The reaction chamber 20, the evaporation device 30 and the vacuum device can refer to the prior art, for example, the vacuum device can be applied as a vacuum pump, but the above structure is not the improvement of the utility model. The utility model mainly proposes improvements to the male-and-self-rotating turret system 10, and the structure of the male-and-self-rotating turret system 10 is described in detail below.

[0028] like Figure 1 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8As shown, the rotary system 10 of the utility model includes a rotary drive mechanism 11, a support frame 12, a workpiece carrier 13 and an exhaust pipe 14. A plurality of support frames 12 are rotatably mounted on the rotary drive mechanism 11, and the plurality of support frames 12 are arranged in a circle around the exhaust pipe 14. The rotary drive mechanism 11 drives the support frames 12 to revolve around the exhaust pipe 14 and drives the support frames 12 to rotate. The support frame 12 is provided with a plurality of layers of placement spaces 121, and the workpiece carrier 13 is removably placed in the placement spaces 121. The workpiece carrier 13 is provided with a plurality of pairs of insertion slots 131 arranged one above and one below for inserting sheet-type workpieces. In the utility model, after the sheet-type workpiece (such as a PCBA board) is inserted into the insertion slot 131, the sheet-type workpiece is carried by the support frame 12, and then the workpiece carrier 13 can be conveniently loaded into the placement space 121. During coating, the orbital and self-rotating driving mechanism 11 drives the support bracket 12 to orbit around the exhaust pipe 14, and at the same time drives the support bracket 12 to rotate. This makes the workpiece carrier 13 also orbit around the exhaust pipe 14 and rotate at the same time, so that the surface coating of the workpiece is more uniform. After coating, the workpiece carrier 13 can be directly removed from the placement space 121, and then the workpiece can be directly extracted from the insertion slot 131. It can be seen that the use of the orbital and self-rotating turntable system 10 of the utility model can facilitate the removal and placement of workpieces, which helps to improve processing convenience and improve processing efficiency.

[0029] like Figure 8 As shown, the workpiece carrier 13 has a bar-type structure, which reduces the blocking deposition of the film material. Specifically, the workpiece carrier 13 of the utility model includes two carrier plates 132 arranged one above the other and a connecting rod 133 connected to the two carrier plates 132. The carrier plates 132 have a plurality of insertion slots 131, and the plurality of insertion slots 131 are arranged in an isotropic manner with the center of the carrier plates 132 as a circle. This allows the sheet workpiece to be loaded into the workpiece carrier 13 at equal angles, and multiple sheets of workpieces can be loaded on the workpiece carrier 13.

[0030] Furthermore, the carrier plate 132 includes an inner ring 1321, an outer ring 1322 and a plurality of support rods 1323. The inner ring 1321 and the outer ring 1322 are coaxially arranged, the outer ring 1322 surrounds the inner ring 1321, one end of the support rod 1323 is connected to the inner ring 1321, and the other end of the support rod 1323 is connected to the outer ring 1322. The plurality of support rods 1323 are arranged in a scattered manner with the center of the inner ring 1321 as the center of the circle, and the insertion slot 131 is opened on the support rod 1323.

[0031] like Figures 4 to 8As shown, the support frame 12 includes a top connecting frame 122, a bottom connecting frame 123, a first surrounding rod 124 and a plurality of cross brackets 125. The upper end of the surrounding rod 124 is mounted on the top connecting frame 122 and the lower end is mounted on the bottom connecting frame 123. The two surrounding rods 124 are relatively spaced apart, and the cross bracket 125 is mounted on the two surrounding rods 124. The plurality of cross brackets 125 are spaced apart from each other from top to bottom, and the upper and lower adjacent cross brackets 125 enclose a placement space 121. The top connecting frame 122 and the bottom connecting frame 123 are rotatably mounted on the revolution and rotation driving mechanism 11. The support frame 12 also belongs to a bar-type structure, which is conducive to reducing the blocking deposition of the film material.

[0032] like Figures 1 to 8 As shown, the revolution and rotation driving mechanism 11 includes a driving device 111, a first rotating disk 112, a second rotating disk 113, a third rotating disk 114 and a mounting disk 115. The second rotating disk 113 is arranged below the first rotating disk 112. The first rotating disk 112 and the second rotating disk 113 are arranged coaxially with the exhaust pipe 14 respectively. The mounting disk 115 is installed above the first rotating disk 112 through a structural rod 117. The top connecting frame 122 is rotatably mounted on the mounting disk 115. The third rotating disk 114 is arranged in a coordinated linkage with the second rotating disk 113. The bottom connecting frame 123 is mounted on the third rotating disk 114. The first rotating disk 112 and the second rotating disk 113 are arranged to rotate synchronously. The driving device 111 drives the first rotating disk 112 to rotate and drives the second rotating disk 113 to rotate synchronously, so that the support frame 12 revolves, and links the third rotating disk 114 to rotate so that the support frame 12 rotates. Preferably, the first rotating disk 112, the second rotating disk 113 and the third rotating disk 114 are gear structures, but not limited thereto, and the mounting disk 115 is a disc structure. The first rotating disk 112 and the second rotating disk 113 are fixedly connected by a steel plate or a steel bar, etc., to ensure that the first rotating disk 112 and the second rotating disk 113 can rotate synchronously. The driving device 111 is a motor.

[0033] Furthermore, the rotary drive mechanism 11 further includes a mounting chassis 116, which is disposed below the second rotating disk 113, and the second rotating disk 113 is mounted on the mounting chassis 116. The mounting chassis 116 plays a role of bearing and connection, and the mounting chassis 116 is a disc, but is not limited thereto. Preferably, the exhaust pipe 14 is coaxially arranged with the mounting disc 115, the first rotating disk 112, the second rotating disk 113 and the mounting chassis 116 to avoid eccentricity during rotation and affect the stability of rotation.

[0034] like Figures 4 to 8As shown, the outer wall of the exhaust pipe 14 is provided with multiple groups of exhaust holes 141 along the axial direction, each group of exhaust holes 141 is arranged in a circle with the axis of the exhaust pipe 14 as the center, and two adjacent exhaust holes 141 in each group of exhaust holes 141 are arranged at intervals. When the vacuum device is working, the exhaust gas in the coating chamber 21 enters the exhaust pipe 14 through the exhaust holes 141 and is finally extracted. A plurality of groups of exhaust holes 141 are provided from top to bottom in the center of the coating chamber 21, so that the exhaust gas in the coating chamber 21 can be extracted more evenly and the exhaust gas can be discharged in time. The vacuum extraction device is connected to the upper end of the exhaust pipe 14. It can be understood that the suction force on the upper end of the exhaust pipe 14 is greater than the suction force on the lower end of the exhaust pipe 14. In order to ensure that the exhaust gas is discharged roughly evenly from various parts of the exhaust pipe 14, the diameter of each group of exhaust holes 141 from top to bottom is continuously increased. In this way, even if the suction force at the lower end is relatively small, because the diameter of the exhaust holes 141 is large, it is effectively ensured that the exhaust holes 141 in various parts of the exhaust pipe 14 discharge exhaust gases in roughly the same amount, thereby achieving roughly uniform exhaust from top to bottom.

[0035] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 8 As shown, a butt joint 22 connected to the exhaust pipe 14 is installed on the top of the reaction chamber 20 , and the vacuum pumping device is connected to the exhaust pipe 14 through the butt joint 22 .

[0036] Figure 1 In the figure, the direction indicated by arrow X is from left to right, the direction indicated by arrow Y is from front to back, and the direction indicated by arrow Z is from bottom to top.

[0037] The above disclosure is only a preferred example of the present invention, which cannot be used to limit the scope of the present invention. Therefore, equivalent changes made according to the claims of the present invention are all within the scope of the present invention.

Claims

1. The rotating frame system, Features: It includes a reciprocal and self-rotation driving mechanism, a support bracket, a workpiece carrier and an exhaust pipe. A plurality of the support brackets are rotatably installed on the reciprocal and self-rotation driving mechanism. The plurality of the support brackets are arranged in a circle around the exhaust pipe. The reciprocal and self-rotation driving mechanism drives the support brackets to revolve around the exhaust pipe as the center and drives the support brackets to rotate at the same time. The support bracket is provided with a plurality of layered placement spaces. The workpiece carrier can be detachably placed in the placement space. The workpiece carrier is provided with a plurality of pairs of insertion slots for inserting sheet-type workpieces, which are arranged one above the other and spaced apart from each other.

2. The revolving turret system according to claim 1, It is characterized in that The workpiece carrier comprises two carrier plates arranged one above the other and a connecting rod connected to the two carrier plates. The carrier plates are provided with a plurality of insertion slots, which are arranged in an isotropic manner with the center of the carrier plates as the center of the circle.

3. The revolving turret system according to claim 2, It is characterized in that The carrier includes an inner ring, an outer ring and a plurality of support rods, the inner ring and the outer ring are coaxially arranged, the outer ring surrounds the inner ring, one end of the support rod is connected to the inner ring, and the other end of the support rod is connected to the outer ring, the plurality of support rods are scatteredly arranged with the center of the inner ring as the center of the circle, and the insertion slots are opened on the support rods.

4. The revolving turret system according to claim 1, It is characterized in that The supporting frame includes a top connecting frame installed on the top, a bottom connecting frame, a surrounding rod and a plurality of cross brackets, the upper end of the surrounding rod is installed on the top connecting frame and the lower end is installed on the bottom connecting frame, the two surrounding rods are relatively spaced apart, the cross bracket is installed on the two surrounding rods, and the plurality of cross brackets are spaced apart from each other from top to bottom, and the upper and lower adjacent cross brackets enclose the placement space, and the top connecting frame and the bottom connecting frame are rotatably installed on the reciprocal and self-rotation driving mechanism.

5. The revolving turret system according to claim 4, It is characterized in that The reciprocal and self-rotation driving mechanism includes a driving device, a first turntable, a second turntable, a third turntable and a mounting plate, the second turntable is arranged below the first turntable, the first turntable and the second turntable are respectively coaxially arranged with the exhaust pipe, the mounting plate is installed above the first turntable through a structural rod, the top connecting frame is rotatably installed on the mounting plate, the third turntable is arranged in coordination with the second turntable, the bottom connecting frame is installed on the third turntable, the first turntable and the second turntable are arranged to rotate synchronously, the driving device drives the first turntable to rotate and drives the second turntable to rotate synchronously, so that the supporting frame revolves, and links the third turntable to rotate to make the supporting frame rotate.

6. The revolving turret system according to claim 5, It is characterized in that The reciprocating and self-rotating driving mechanism further comprises a mounting chassis, wherein the mounting chassis is arranged below the second rotating disk, the second rotating disk is mounted on the mounting chassis, and the third rotating disk is arranged at one side of the second rotating disk.

7. The revolving turret system according to claim 6, It is characterized in that The exhaust pipes are coaxially arranged with the mounting plate, the first rotating plate, the second rotating plate and the mounting chassis.

8. The revolving turret system according to claim 1, It is characterized in that The outer side wall of the exhaust pipe is provided with a plurality of exhaust through holes along the axial direction, each group of the exhaust through holes is arranged in a circle with the axis of the exhaust pipe as the center, and two adjacent exhaust through holes in each group of the exhaust through holes are arranged at intervals.

9. The revolving turret system according to claim 8, It is characterized in that The diameter of each group of exhaust holes increases continuously from top to bottom.

10. A vacuum coating machine, It is characterized in that It comprises a reaction chamber, an evaporation device, a vacuum pumping device and a revolving turntable system as described in any one of claims 1 to 9, wherein the reaction chamber has a coating chamber, the evaporation device is connected to the coating chamber, the revolving turntable system is installed in the coating chamber, and the vacuum pumping device is connected to the exhaust pipe.

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