Molecular pump shockproof mechanism for reducing shake

Abstract

The utility model relates to a molecular pump anti-vibration mechanism for reducing vibration. The molecular pump anti-vibration mechanism for reducing vibration comprises a base assembly, a buffer assembly, an outer frame assembly, a driving assembly, a clamping assembly and a molecular pump body. A buffering assembly is arranged on the outer side of the base assembly. An outer frame assembly is arranged at the upper end of the buffer assembly; a driving assembly is arranged at the upper end of the outer frame assembly; a clamping assembly is mounted on the driving assembly; a molecular pump body is arranged on the inner side of the base assembly. According to the molecular pump, the special anti-shake structure is arranged to replace an original shock pad structure, so that the phenomenon that in the using process of an existing molecular pump, due to rotation of an internal rotor, the whole molecular pump vibrates in the working process is avoided; and vibration buffering of the molecular pump is limited due to the material performance of a shock pad when the shock pad is used for shock absorption.

Description

Technical Field

[0001] The utility model relates to the field of molecular pumps, in particular to a molecular pump anti-vibration mechanism for reducing vibration. Background Art

[0002] A molecular pump is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, so that they obtain a directional speed, and are compressed and driven to the exhaust port to be drawn away by the front stage. In the process of working, the existing molecular pump will inevitably cause the entire molecular pump to vibrate due to the internal rotating rotor. The existing buffering and shock-absorbing method is often to set a shock-absorbing pad at the bottom of the molecular pump to reduce the impact of the vibration on the molecular pump. However, the setting of the shock-absorbing pad will limit the vibration buffering of the entire molecular pump due to its own material properties, which can easily affect the service life of the entire molecular pump. Therefore, the problem of the prior art is that during the use of the existing molecular pump, the entire molecular pump will vibrate due to the rotation of the internal rotor, and the shock-absorbing pad will often limit the vibration buffering of the molecular pump due to the material properties of the shock-absorbing pad itself, which can easily affect the service life of the entire molecular pump. Utility Model Content

[0003] In order to overcome the problem that the rotation of the internal rotor causes the entire molecular pump to vibrate during operation, the use of shock-absorbing pads for shock absorption often results in limited vibration buffering of the molecular pump due to the material properties of the shock-absorbing pads themselves, which can easily affect the service life of the entire molecular pump.

[0004] According to a first aspect of the present disclosure, a molecular pump anti-vibration mechanism for reducing vibration is provided, comprising a base assembly, a buffer assembly, an outer frame assembly, a drive assembly, a clamping assembly and a molecular pump body; a buffer assembly is arranged on the outer side of the base assembly; an outer frame assembly is arranged on the upper end of the buffer assembly; a drive assembly is arranged on the upper end of the outer frame assembly; a clamping assembly is mounted on the drive assembly; and a molecular pump body is arranged on the inner side of the base assembly.

[0005] Preferably, the molecular pump is shock-absorbing and buffered by the buffer assembly, the molecular pump body is positioned and fixed by the cooperation between the outer frame assembly and the clamping assembly, and the clamping assembly is driven by the driving assembly to rotate and adjust, so as to adapt to the installation conditions.

[0006] Preferably, the base assembly includes a fixed base, a mounting plate, a mounting hole, a connecting plate and a viscous slurry; a plurality of mounting plates are fixedly connected to the outer side of the fixed base, and the anti-vibration mechanism can be quickly installed by setting the plurality of mounting plates.

[0007] Preferably, a mounting hole is provided on the mounting plate; a connecting plate is provided at the upper end of the mounting plate; and a viscous slurry is provided on the inner side of the fixed base, so as to significantly reduce the vibration of the molecular pump.

[0008] Preferably, the buffer assembly includes a damper, a positioning nut, a return spring and a connecting ring; the damper is installed on the connecting plate; the outer clearance of the damper is matched with a positioning nut; the upper end of the positioning nut is fixedly connected to the return spring; the upper end of the return spring is fixedly connected to the connecting ring, and the damping treatment of the molecular pump is achieved by the cooperation between the damper and the return spring.

[0009] Preferably, the outer frame assembly includes a fixed frame, a connecting rod, a positioning groove and an engaging gear ring; the upper end of the connecting ring is fixedly connected to the fixed frame; a positioning groove is opened on the inner wall of the fixed frame; the connecting rod is fixed to the fixed frame; the outer side of the fixed frame is fixedly connected to the engaging gear ring, and the setting of the engaging gear ring is used to assist the sliding frame in rotation.

[0010] Preferably, the driving assembly includes a sliding frame, a driving motor, an engaging wheel and a fixed plate; a meshing wheel is arranged on one side of the meshing gear ring; the upper end of the meshing wheel is rotatably connected to the driving motor via a rotating shaft; a sliding frame is installed on the outer side of the driving motor; a fixed plate is installed on the sliding frame, and the meshing wheel is driven to rotate by the driving motor to realize the displacement adjustment of the sliding frame.

[0011] Preferably, the clamping assembly includes an electric push rod, a fixed plate, a fixed rod and a buffer ball; the electric push rod is installed on the fixed plate; the fixed plate is installed on the electric push rod; a plurality of fixed rods are installed on the fixed plate; and a buffer ball is fixedly connected to the fixed rod, and the vibration applied to the driving assembly by the vibration is buffered by the setting of the buffer ball.

[0012] Preferably, the number of the mounting pieces is four.

[0013] Preferably, the mounting piece and the mounting hole are arranged in pairs.

[0014] Preferably, the mounting piece is arranged on the outer periphery of the fixing base.

[0015] Beneficial effects of the utility model:

[0016] 1. By setting up a special anti-shake structure to replace the original shock-absorbing pad structure, the problem that the existing molecular pump will vibrate during operation due to the rotation of the internal rotor will be solved. The vibration buffering of the molecular pump is often limited due to the material properties of the shock-absorbing pad itself, which can easily affect the service life of the entire molecular pump.

[0017] 2. By filling the interior of the fixed base with viscous slurry, the bottom end of the molecular pump body can be extended into the viscous slurry, so that the material properties of the viscous slurry can greatly buffer the vibration generated by the molecular pump body, and at the same time, by setting the damper and the return spring to cooperate with each other, the vibration transmitted between the base assembly and the outer frame assembly can be greatly buffered, thereby improving the service life of the entire molecular pump to a certain extent, and then greatly improving the convenience of use of the entire shockproof mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The figure shows a first three-dimensional structure schematic diagram of the molecular pump anti-vibration mechanism of the utility model;

[0019] Figure 2 The figure shows a second three-dimensional structure schematic diagram of the molecular pump anti-vibration mechanism of the utility model;

[0020] Figure 3 The figure shows a three-dimensional structure diagram of the clamping assembly of the molecular pump anti-vibration mechanism of the utility model;

[0021] Figure 4 Shown is a schematic diagram of the installation of the molecular pump anti-vibration mechanism of the utility model.

[0022] Explanation of the accompanying drawings: 1. Base assembly; 2. Buffer assembly; 3. External frame assembly; 4. Drive assembly; 5. Clamping assembly; 6. Molecular pump body; 101. Fixed base; 102. Mounting plate; 103. Mounting hole; 104. Connecting plate; 105. Viscous slurry; 201. Damper; 202. Positioning nut; 203. Return spring; 204. Connecting ring; 301. Fixed frame; 302. Connecting rod; 303. Positioning groove; 304. Engaging gear ring; 401. Sliding frame; 402. Drive motor; 403. Engaging wheel; 404. Fixed plate; 501. Electric push rod; 502. Fixed plate; 503. Fixed rod; 504. Buffer ball. DETAILED DESCRIPTION

[0023] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0024] See also Figure 1-2The utility model provides an embodiment: a molecular pump anti-vibration mechanism for reducing jitter, comprising a base assembly 1, a buffer assembly 2, an outer frame assembly 3, a driving assembly 4, a clamping assembly 5 and a molecular pump body 6; the buffer assembly 2 is arranged on the outside of the base assembly 1; the outer frame assembly 3 is arranged on the upper end of the buffer assembly 2; the driving assembly 4 is arranged on the upper end of the outer frame assembly 3; the clamping assembly 5 is installed on the driving assembly 4; the molecular pump body 6 is arranged on the inner side of the base assembly 1, and the base assembly 1 includes a fixed A base 101, a mounting sheet 102, a mounting hole 103, a connecting sheet 104 and a viscous slurry 105; a plurality of mounting sheets 102 are fixedly connected to the outer side of the fixed base 101, and the multiple mounting sheets 102 are provided to realize the rapid installation of the anti-vibration mechanism, and the mounting sheet 102 is provided with a mounting hole 103; a connecting sheet 104 is provided at the upper end of the mounting sheet 102; a viscous slurry 105 is provided on the inner side of the fixed base 101, and the jitter of the molecular pump is greatly reduced by the viscous slurry 105.

[0025] See also Figure 3-4 In this embodiment, the buffer assembly 2 includes a damper 201, a positioning nut 202, a return spring 203 and a connecting ring 204; the damper 201 is installed on the connecting sheet 104; the outer clearance of the damper 201 is matched with a positioning nut 202; the upper end of the positioning nut 202 is fixedly connected to the return spring 203; the upper end of the return spring 203 is fixedly connected to the connecting ring 204, and the damper 201 and the return spring 203 cooperate with each other to achieve the shock absorption treatment of the molecular pump, and the outer frame assembly 3 includes a fixed frame 301, a connecting rod 302, a positioning groove 303 and an engaging toothed ring 304; the upper end of the connecting ring 204 is fixedly connected to the fixed frame 301; the inner wall of the fixed frame 301 is provided with a positioning groove 303; the fixed frame 301 is fixedly connected to the connecting rod 302; the outer side of the fixed frame 301 is fixedly connected to the engaging toothed ring 304, and the setting of the engaging toothed ring 304 is used to assist the sliding frame 401 to rotate The driving component 4 includes a sliding frame 401, a driving motor 402, an engaging wheel 403 and a fixing plate 404; a meshing wheel 403 is arranged on one side of the meshing gear ring 304; the upper end of the engaging wheel 403 is rotatably connected to the driving motor 402 through a rotating shaft; a sliding frame 401 is installed on the outer side of the driving motor 402; a fixing plate 404 is installed on the sliding frame 401, and the engaging wheel 403 is driven to rotate by the driving motor 402 to realize the displacement adjustment of the sliding frame 401, and the clamping component 5 includes an electric push rod 501, a fixing plate 502, a fixing rod 503 and a buffer ball 504; an electric push rod 501 is installed on the fixing plate 404; a fixing plate 502 is installed on the electric push rod 501; a plurality of fixing rods 503 are installed on the fixing plate 502; a buffer ball 504 is fixedly connected to the fixing rod 503, and the vibration applied to the driving component 4 by the setting of the buffer ball 504 is buffered.

[0026] During operation, the position of the clamping assembly 5 is adjusted according to the position of the molecular pump, and the meshing wheel 403 is driven to rotate by the driving motor 402, so that the position of the buffer ball 504 can be adjusted by the cooperation between the meshing wheel 403 and the meshing gear ring 304, and the buffer ball 504 is adjusted by adjusting the bolts on the fixing rod 503 so that the buffer ball 504 can be pressed against the molecular pump body 6, while ensuring that the bottom end of the molecular pump body 6 can be located in the viscous slurry 105 inside the fixed base 101, and the molecular pump body 6 can be used.

[0027] During the use of the molecular pump body 6, the viscous slurry 105 can be filled inside the fixed base 101 so that the bottom end of the molecular pump body 6 can extend into the viscous slurry 105, so that the material properties of the viscous slurry 105 can greatly buffer the vibration generated by the molecular pump body 6, and at the same time, the damper 201 and the return spring 203 are arranged to cooperate with each other, so that the vibration transmitted between the base component 1 and the outer frame component 3 can be greatly buffered, thereby improving the service life of the entire molecular pump to a certain extent, and further greatly improving the convenience of use of the entire shockproof mechanism.

[0028] Through the above steps, a special anti-shake structure is set to replace the original shock-absorbing pad structure to solve the problem that the existing molecular pump will vibrate during operation due to the rotation of the internal rotor during use. The shock-absorbing pad will often limit the vibration buffering of the molecular pump due to the material properties of the shock-absorbing pad itself, which can easily affect the service life of the entire molecular pump. At the same time, the molecular pump can be shock-absorbing and buffered by the buffer component 2, and the positioning and fixing of the molecular pump body 6 can be achieved through the cooperation of the outer frame component 3 and the clamping component 5. The driving component 4 is used to drive the clamping component 5 to rotate and adjust to achieve adaptation to the installation conditions.

[0029] It should be noted that in some embodiments, the number of mounting pieces is 4, and the 4 mounting pieces are evenly arranged on the periphery of the fixed base, and the so-called periphery of the fixed base is the outer edge of the fixed base. The so-called mounting piece and mounting hole are arranged in pairs, which means that one end of a mounting piece is provided with a mounting hole.

[0030] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the purpose of the present invention.

Claims

1. A molecular pump anti-vibration mechanism for reducing vibration, comprising a base assembly (1); characterized in that: The invention also comprises a buffer component (2), an outer frame component (3), a driving component (4), a clamping component (5) and a molecular pump body (6); the buffer component (2) is arranged on the outer side of the base component (1); the outer frame component (3) is arranged on the upper end of the buffer component (2); the driving component (4) is arranged on the upper end of the outer frame component (3); the clamping component (5) is installed on the driving component (4); and the molecular pump body (6) is arranged on the inner side of the base component (1).

2. The molecular pump anti-vibration mechanism according to claim 1, characterized in that: The base assembly (1) comprises a fixed base (101), a mounting plate (102), a mounting hole (103), a connecting plate (104) and a viscous slurry (105); a plurality of mounting plates (102) are fixedly connected to the outer side of the fixed base (101).

3. The molecular pump anti-vibration mechanism according to claim 2, characterized in that: A mounting hole (103) is provided on the mounting plate (102); a connecting plate (104) is provided at the upper end of the mounting plate (102); and a viscous slurry (105) is provided on the inner side of the fixed base (101).

4. The molecular pump anti-vibration mechanism according to claim 2, characterized in that: The buffer assembly (2) comprises a damper (201), a positioning nut (202), a return spring (203) and a connecting ring (204); the damper (201) is mounted on the connecting plate (104); the positioning nut (202) is fitted in the outer clearance of the damper (201); the return spring (203) is fixedly connected to the upper end of the positioning nut (202); and the connecting ring (204) is fixedly connected to the upper end of the return spring (203).

5. The molecular pump anti-vibration mechanism according to claim 2, characterized in that: The outer frame assembly (3) comprises a fixing frame (301), a connecting rod (302), a positioning groove (303) and a meshing toothed ring (304); the upper end of the connecting ring (204) is fixedly connected to the fixing frame (301); the inner wall of the fixing frame (301) is provided with a positioning groove (303); the fixing frame (301) is fixedly connected to the connecting rod (302); and the outer side of the fixing frame (301) is fixedly connected to the meshing toothed ring (304).

6. The molecular pump anti-vibration mechanism according to claim 4, characterized in that: The driving assembly (4) comprises a sliding frame (401), a driving motor (402), a meshing wheel (403) and a fixing plate (404); a meshing wheel (403) is arranged on one side of the meshing gear ring (304); the upper end of the meshing wheel (403) is rotatably connected to the driving motor (402) via a rotating shaft; a sliding frame (401) is installed on the outer side of the driving motor (402); and a fixing plate (404) is installed on the sliding frame (401).

7. The molecular pump anti-vibration mechanism according to claim 6, characterized in that: The clamping assembly (5) comprises an electric push rod (501), a fixing plate (502), a fixing rod (503) and a buffer ball (504); the electric push rod (501) is mounted on the fixing plate (404); the fixing plate (502) is mounted on the electric push rod (501); a plurality of fixing rods (503) are mounted on the fixing plate (502); and the buffer ball (504) is fixedly connected to the fixing rod (503).

8. The molecular pump anti-vibration mechanism according to claim 3, characterized in that: The number of the mounting pieces (102) is four.

9. The molecular pump anti-vibration mechanism according to claim 3, characterized in that: The mounting pieces (102) and the mounting holes (103) are arranged in pairs.

10. The molecular pump anti-vibration mechanism according to claim 3, characterized in that: The mounting piece (102) is arranged on the outer periphery of the fixed base (101).

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