Ultra-pure xenon purification system

Abstract

The utility model discloses an ultrapure xenon purification system which comprises a xenon purification filtering tank and an end cover arranged at the top of the xenon purification filtering tank, a placing ring is fixed on the inner wall of the lower side of the center of the xenon purification filtering tank, and a purification filtering element is fixed at the upper end of the placing ring. The xenon purifying and filtering tank of the ultra-pure xenon purifying system is characterized in that the purifying and filtering element and the placing ring are sealed through a rubber pad, so that xenon which is not purified and filtered is prevented from leaking upwards through a contact gap between the purifying and filtering element and the placing ring. The purification synergistic device can play a role in secondary filtration and purification after the purification filter element filters and purifies the xenon, so that the content of impurities in the xenon which is finally filtered and purified is less, the variety of the impurities is less, and the filtration and purification effect on the xenon can be improved.

Description

Technical Field

[0001] The utility model belongs to the technical field related to xenon gas purification, and in particular relates to an ultra-pure xenon gas purification system. Background Art

[0002] With the continuous development of scientific research and industrial production, the demand for ultra-pure xenon is increasing. Ultra-pure xenon is widely used in semiconductor manufacturing, optical coating, laser technology and other fields. Its purity has a key impact on equipment performance and product quality. Traditional xenon purification methods such as condensation, adsorption and chemical treatment have problems such as high energy consumption, complex operation and waste generation. Membrane separation technology has become an ideal choice for ultra-pure xenon purification due to its advantages of high efficiency, environmental protection and energy saving.

[0003] However, when the ultra-pure xenon gas purification system uses a purification filter tank to filter and purify the xenon gas, the unpurified xenon gas needs to be transported to the purification filter tank, and then the xenon gas transported to the inside of the tank will pass through the purification filter element. When the xenon gas passes through the purification filter element, the impurities contained in the xenon gas will be filtered out, so that the purity of the xenon gas that finally passes through the purification filter element is improved. However, the effect of filtering and purifying the xenon gas by a single type of purification filter element is limited, so that the xenon gas after purification will still contain a small amount of impurities. In this way, the purified xenon gas needs to be purified twice or multiple times using other equipment, which will not only make the xenon gas purification process more complicated, but also waste more economic investment in the purification of the xenon gas. Utility Model Content

[0004] The purpose of the utility model is to provide an ultra-pure xenon gas purification system to solve the problem proposed in the above-mentioned background technology that the effect of filtering and purifying xenon gas by a single type of purification filter element is limited, so that the finally purified xenon gas still contains a small amount of impurities, so it is necessary to use other equipment to purify the purified xenon gas for a second or multiple times.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an ultrapure xenon gas purification system, comprising a xenon gas purification filter tank and an end cover arranged on the top of the xenon gas purification filter tank, a placement ring is fixed on the lower inner wall at the center of the xenon gas purification filter tank, a purification filter core is fixed on the upper end of the placement ring, a rubber pad is used to seal between the purification filter core and the placement ring to prevent unpurified and filtered xenon gas from leaking upward through the gap between the purification filter core and the placement ring, and a purification efficiency enhancement device is arranged on the upper side of the purification filter core;

[0006] The purification efficiency enhancement device includes a lifting ring, an airtight pad, an efficiency enhancement filter ring A, an efficiency enhancement filter ring B and an efficiency enhancement filter ring C. The lifting ring is fixed on the inner wall of the xenon gas purification filter tank, the lifting ring is located on the upper side of the purification filter core, an airtight pad is provided on the outer wall of the top end of the lifting ring, an efficiency enhancement filter ring A is placed on the top end of the airtight pad, an efficiency enhancement filter ring B is provided on the upper side of the efficiency enhancement filter ring A, and an efficiency enhancement filter ring C is provided on the upper side of the efficiency enhancement filter ring B. The internal diameters of the efficiency enhancement filter rings A, B and C are the same as the internal diameter of the lifting ring, and the shapes, sizes and structural compositions of the efficiency enhancement filter rings A, B and C are the same.

[0007] Preferably, the purification efficiency enhancement device also includes fixing screws and separating rings. Separating rings are provided between the efficiency enhancement filter ring A and the efficiency enhancement filter ring B and between the efficiency enhancement filter ring B and the efficiency enhancement filter ring C. The efficiency enhancement filter ring A, the efficiency enhancement filter ring B, the efficiency enhancement filter ring C and the multiple separating rings are fixedly connected to the supporting ring by fixing screws.

[0008] Preferably, the purification efficiency enhancement device also includes a polymer filter membrane, a composite filter membrane and an inorganic filter membrane. The efficiency enhancement filter ring A is provided with a polymer filter membrane, the efficiency enhancement filter ring B is provided with a composite filter membrane, and the efficiency enhancement filter ring C is provided with an inorganic filter membrane.

[0009] Preferably, the polymer filter membrane is made of polycarbonate, the composite filter membrane is made of a composite of polyether ester and aluminum oxide, and the inorganic filter membrane is made of silicon silicide.

[0010] Preferably, a drain outlet is provided at the bottom of the xenon gas purification filter tank, an air inlet is provided at the lower side of the left center of the xenon gas purification filter tank, and an air outlet is provided at the top of the end cover, and the drain outlet, air inlet and air outlet are all connected to the interior of the xenon gas purification filter tank.

[0011] Preferably, the air inlet is located on the lower side of the placement ring, and the bottom end of the sewage outlet, the left end of the air inlet and the top end of the air outlet are all provided with external flanges. A stop valve is fixed to the bottom end of the sewage outlet through the external flange and screws, and the stop valve is connected to the external sewage pipe.

[0012] Preferably, a docking flange A is provided on the outer wall of the top end of the xenon gas purification filter tank, and a docking flange B is provided on the outer wall of the bottom end of the end cover. A sealing gasket is provided between the docking flange A and the docking flange B, and the docking flange A and the docking flange B are fixedly connected by multiple screws.

[0013] Compared with the prior art, the present invention provides an ultrapure xenon purification system having the following features:

[0014] Beneficial effects:

[0015] The utility model adds a novel purification enhancement device near the top of the xenon purification filter tank of the ultra-pure xenon purification system. The purification enhancement device can play a role of secondary filtering and purification after the purification filter element filters and purifies the xenon gas, so that the impurity content in the xenon gas finally filtered and purified can be reduced, and the types of impurities can also be reduced, thereby increasing the filtering and purification effect of the xenon gas. The novel purification enhancement device can perform multiple filtering and purification on the xenon gas after filtering and purification. The device uses a variety of different filter membranes to perform secondary filtering and purification on the xenon gas after filtering and purification in a targeted manner, which can reduce the subsequent purification process of the xenon gas, thereby saving purification capital investment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a schematic diagram of the internal planar structure of an ultrapure xenon purification system.

[0017] Figure 2 The utility model is a schematic diagram of the external planar structure of an ultrapure xenon purification system.

[0018] Figure 3 It is a schematic diagram of the front cross-sectional structure of the purification and efficiency enhancement device of the utility model.

[0019] Figure 4 It is a schematic diagram of the three-dimensional disassembled structure of the purification and efficiency enhancement device of the utility model.

[0020] In the figure: 1. sewage outlet; 2. xenon purification filter tank; 3. air inlet; 4. placement ring; 5. purification filter element; 6. purification efficiency enhancement device; 7. end cover; 8. air outlet; 9. docking flange A; 10. docking flange B; 11. sealing gasket; 12. lifting ring; 13. airtight gasket; 14. efficiency enhancement filter ring A; 15. efficiency enhancement filter ring B; 16. efficiency enhancement filter ring C; 17. polymer filter membrane; 18. composite filter membrane; 19. inorganic filter membrane; 20. fixing screws; 21. separation ring. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] The utility model provides Figure 1-4An ultrapure xenon purification system shown in the figure comprises a xenon purification filter tank 2 and an end cap 7 arranged on the top of the xenon purification filter tank 2, a placement ring 4 is fixed on the inner wall of the lower side at the center of the xenon purification filter tank 2, a purification filter core 5 is fixed on the upper end of the placement ring 4, and a rubber pad is used to seal between the purification filter core 5 and the placement ring 4 to prevent unpurified and filtered xenon from leaking upward through the gap between the purification filter core 5 and the placement ring 4, a sewage outlet 1 is arranged at the bottom of the xenon purification filter tank 2, an air inlet 3 is arranged on the lower side of the center of the left end of the xenon purification filter tank 2, and an air outlet 8 is arranged on the top of the end cap 7. The sewage outlet 1, the air inlet 3 and the air outlet 8 are all connected to the interior of the xenon gas purification filter tank 2. The air inlet 3 is located at the lower side of the placement ring 4. The bottom end of the sewage outlet 1, the left end of the air inlet 3 and the top end of the air outlet 8 are all provided with external flanges. A stop valve is fixed to the bottom end of the sewage outlet 1 through an external flange and screws. The stop valve is connected to the external sewage pipe. A docking flange A9 is provided on the outer wall of the top end of the xenon gas purification filter tank 2, and a docking flange B10 is provided on the outer wall of the bottom end of the end cover 7. A sealing gasket 11 is provided between the docking flange A9 and the docking flange B10. The docking flange A9 and the docking flange B10 are fixedly connected by multiple screws.

[0023] like Figure 1 and Figure 2 As shown, when assembling and using the ultra-pure xenon purification system, first, the purification filter element 5 needs to be placed on the mounting ring 4 inside the tank body, and then the purification filter element 5 needs to be firmly fixed on the mounting ring 4 using buckles or screws, and then the purification enhancement device 6 needs to be installed on the upper side of the purification filter element 5, and the end cover 7 needs to be closed to the top of the xenon purification filter tank 2, and then the bottom docking flange B10 of the end cover 7 and the top docking flange A9 of the xenon purification filter tank 2 need to be fixedly connected using screws, and then the sewage pipe needs to be connected to the sewage discharge pipe. The stop valve at the bottom of port 1 is connected, the xenon gas delivery pipe is connected to the air inlet 3, and the purified xenon gas delivery pipeline is connected to the air outlet 8. Then the unpurified xenon gas will be delivered to the inside of the xenon gas purification filter tank 2 through the air inlet 3, and then the xenon gas needs to pass through the purification filter element 5 and the purification enhancement device 6, both of which will filter out the impurities in the xenon gas. Then the filtered and purified xenon gas will be delivered through the air outlet 8, and the filtered impurities will fall into the bottom of the tank and finally discharged through the sewage outlet 1.

[0024] like Figure 1 , Figure 3 and Figure 4As shown, a purification efficiency enhancement device 6 is arranged on the upper side of the purification filter element 5, and the purification efficiency enhancement device 6 includes a lifting ring 12, an airtight pad 13, an efficiency enhancement filter ring A14, an efficiency enhancement filter ring B15 and an efficiency enhancement filter ring C16. The lifting ring 12 is fixed on the inner wall of the xenon purification filter tank 2, and the lifting ring 12 is located on the upper side of the purification filter element 5. An airtight pad 13 is arranged on the outer wall of the top of the lifting ring 12, and an efficiency enhancement filter ring A14 is placed on the top of the airtight pad 13. An efficiency enhancement filter ring B15 is arranged on the upper side of the efficiency enhancement filter ring A14, and an efficiency enhancement filter ring C16 is arranged on the upper side of the efficiency enhancement filter ring A14. A filter ring C16 is arranged on the upper side of B15. The inner diameters of the filter rings A14, B15 and C16 are the same as the inner diameter of the lifting ring 12. The filter rings A14, B15 and C16 are the same in shape, size and structural composition. The purification enhancement device 6 also includes a fixing screw 20 and a separating ring 21. Separating rings are arranged between the filter rings A14 and B15 and between the filter rings B15 and C16. The spacer ring 21, the efficiency filter ring A14, the efficiency filter ring B15, the efficiency filter ring C16 and the plurality of spacer rings 21 are fixedly connected to the lifting ring 12 by fixing screws 20. The spacer ring 21 can keep a certain distance between the efficiency filter ring A14, the efficiency filter ring B15 and the efficiency filter ring C16, so as to avoid the situation that the efficiency filter ring A14, the efficiency filter ring B15 and the efficiency filter ring C16 are superimposed on each other and affect the xenon gas passing efficiency. The three are separated by a certain distance to It can make xenon gas pass more smoothly to increase the filtering and purification effect of xenon gas. The purification enhancement device 6 also includes a polymer filter membrane 17, a composite filter membrane 18 and an inorganic filter membrane 19. The polymer filter membrane 17 is arranged inside the enhancement filter ring A14, the composite filter membrane 18 is arranged inside the enhancement filter ring B15, and the inorganic filter membrane 19 is arranged inside the enhancement filter ring C16. The polymer filter membrane 17 is made of polycarbonate, the composite filter membrane 18 is made of a composite of polyether ester and alumina, and the inorganic filter membrane 19 is made of silicon silicide.

[0025] like Figure 1 , Figure 3 and Figure 4As shown, after the xenon gas containing impurities is transported to the interior of the xenon gas purification filter tank 2, the xenon gas needs to pass through the purification filter element 5 before it can be discharged through the gas outlet 8, and the xenon gas filtered and purified by the purification filter element 5 will pass through the purification enhancement device 6, and the purification enhancement device 6 will perform secondary filtration and purification on the xenon gas after filtration and purification, so that the impurities in the xenon gas that are not filtered out by the purification filter element 5 are filtered out. When the xenon gas passes through the purification enhancement device 6, the xenon gas will pass through the polymer filter membrane 17 inside the enhancement filter ring A14, the composite filter membrane 18 inside the enhancement filter ring B15, and the inorganic filter membrane 19 inside the enhancement filter ring C16 from bottom to top. After the xenon gas is filtered through the polymer filter membrane 17, the composite filter membrane 18 and the inorganic filter membrane 19 multiple targeted filtering, the purity will be higher. When xenon gas passes through the polymer filter membrane 17, the polymer filter membrane 17 made of polycarbonate can filter oxygen, nitrogen, water vapor, hydrogen and other light gases in the xenon gas, and the composite filter membrane 18 made of polyether ester and alumina can filter oxygen, hydrogen and other light gases in the xenon gas. Since the polymer filter membrane 17 and the composite membrane are made of different materials, the two membranes can focus on filtering oxygen, nitrogen, water vapor, hydrogen and other light gases in the xenon gas, and the inorganic filter membrane 19 made of silicon silicide can filter larger molecular impurities and heavy impurities in the xenon gas. The three filter membranes can filter a variety of impurities in the xenon gas, so that the xenon gas finally purified by the purification enhancement device 6 can be higher in purity.

[0026] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An ultrapure xenon gas purification system, comprising a xenon gas purification filter tank (2) and an end cover (7) arranged on the top of the xenon gas purification filter tank (2), a placement ring (4) is fixed on the inner wall of the lower side at the center of the xenon gas purification filter tank (2), a purification filter core (5) is fixed on the upper end of the placement ring (4), and a rubber pad is used to seal between the purification filter core (5) and the placement ring (4) to prevent unpurified and filtered xenon gas from leaking upward through the gap between the purification filter core (5) and the placement ring (4), characterized in that: A purification efficiency enhancement device (6) is arranged on the upper side of the purification filter core (5); The purification efficiency enhancement device (6) comprises a lifting ring (12), an airtight pad (13), an efficiency enhancement filter ring A (14), an efficiency enhancement filter ring B (15) and an efficiency enhancement filter ring C (16); the lifting ring (12) is fixed on the inner wall of the xenon purification filter tank (2); the lifting ring (12) is located on the upper side of the purification filter core (5); the outer wall of the top end of the lifting ring (12) is provided with an airtight pad (13); the top end of the airtight pad (13) is provided with an efficiency enhancement filter ring A (14); An efficiency-enhancing filter ring B (15) is arranged on the upper side of the efficiency-enhancing filter ring A (14), and an efficiency-enhancing filter ring C (16) is arranged on the upper side of the efficiency-enhancing filter ring B (15). The inner diameters of the efficiency-enhancing filter ring A (14), the efficiency-enhancing filter ring B (15) and the efficiency-enhancing filter ring C (16) are all the same as the inner diameter of the lifting ring (12), and the shapes, sizes and structural compositions of the efficiency-enhancing filter ring A (14), the efficiency-enhancing filter ring B (15) and the efficiency-enhancing filter ring C (16) are all the same.

2. The ultrapure xenon purification system according to claim 1, characterized in that: The purification efficiency enhancement device (6) further comprises fixing screws (20) and a separation ring (21); a separation ring (21) is provided between the efficiency enhancement filter ring A (14) and the efficiency enhancement filter ring B (15) and between the efficiency enhancement filter ring B (15) and the efficiency enhancement filter ring C (16); the efficiency enhancement filter ring A (14), the efficiency enhancement filter ring B (15), the efficiency enhancement filter ring C (16) and the plurality of separation rings (21) are fixedly connected to the lifting ring (12) via the fixing screws (20).

3. An ultrapure xenon purification system according to claim 2, characterized in that: The purification efficiency enhancement device (6) further comprises a polymer filter membrane (17), a composite filter membrane (18) and an inorganic filter membrane (19); the polymer filter membrane (17) is arranged inside the efficiency enhancement filter ring A (14), the composite filter membrane (18) is arranged inside the efficiency enhancement filter ring B (15), and the inorganic filter membrane (19) is arranged inside the efficiency enhancement filter ring C (16).

4. The ultrapure xenon purification system according to claim 3, characterized in that: The polymer filter membrane (17) is made of polycarbonate, the composite filter membrane (18) is made of a composite of polyether ester and aluminum oxide, and the inorganic filter membrane (19) is made of silicon silicide.

5. The ultrapure xenon purification system according to claim 1, characterized in that: The bottom of the xenon gas purification filter tank (2) is provided with a sewage outlet (1), the lower side of the left center of the xenon gas purification filter tank (2) is provided with an air inlet (3), and the top of the end cover (7) is provided with an air outlet (8), and the sewage outlet (1), the air inlet (3) and the air outlet (8) are all connected to the inside of the xenon gas purification filter tank (2).

6. The ultrapure xenon gas purification system according to claim 5, characterized in that: The air inlet (3) is located at the lower side of the placement ring (4); the bottom end of the sewage outlet (1), the left end of the air inlet (3) and the top end of the gas outlet (8) are all provided with external flanges; a stop valve is fixed at the bottom end of the sewage outlet (1) via the external flange and screws; the stop valve is connected to an external sewage pipe.

7. An ultrapure xenon purification system according to claim 6, characterized in that: The top outer wall of the xenon gas purification filter tank (2) is provided with a docking flange A (9), the bottom outer wall of the end cover (7) is provided with a docking flange B (10), a sealing gasket (11) is provided between the docking flange A (9) and the docking flange B (10), and the docking flange A (9) and the docking flange B (10) are fixedly connected by a plurality of screws.

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