488results about "Noble gas compounds" patented technology

The invention discloses a temperature swing adsorption helium low-temperature purification system which comprises a vacuum cold box, and a first-stage dividing wall heat exchanger, a liquid cold medium Dewar, a high-temperature area adsorption unit, a second-stage dividing wall heat exchanger, a cold head heat exchanger and a low-temperature area adsorption unit are sequentially connected in the vacuum cold box in the gas transmission direction. Wherein the input end of the first-stage dividing wall heat exchanger is connected with the outside through a pipeline, and is used for introducing crude helium; the high-temperature area adsorption unit is used for adsorbing impurity gas with the boiling point temperature being greater than or equal to 77K in the crude helium, and the low-temperature area adsorption unit is used for adsorbing impurity gas with the boiling point temperature being 20K-30K in the crude helium, so that high-purity helium is obtained. According to the invention, not only can high-flow high-component impurity gas with the boiling point of 77K or above be treated, but also high-flow high-component impurity gas with the boiling point of 30K or below can be treated, and high-flow multi-component high-concentration industrial production working conditions can be better matched by adopting physical adsorption of the high-temperature and low-temperature region adsorbents.

A process to purify helium from a feed gas stream containing a mixture of at least nitrogen, methane and helium including introducing the feed gas stream into a first helium membrane separation unit, thereby producing a first helium membrane permeate and a first helium membrane residue; introducing at least part of the first residue into a first nitrogen membrane separation unit thereby producing a first nitrogen membrane permeate stream; introducing a stream derived from the first helium membrane permeate into a hydrogen PSA unit thereby producing a helium rich product stream. Wherein a stream derived from the first nitrogen membrane permeate stream exits the system as a fuel gas product stream. Wherein the feed gas stream has a higher heating value, and wherein the first nitrogen membrane permeate stream has a higher heating value at least 5% higher than the higher heating value of the feed gas.

The invention provides an inert gas generation system, and relates to the technical field of industrial gas production. The inert gas generation system comprises the following modules: a gas pretreatment module, an intelligent separation module, a dynamic purification module, a pressure regulation and control module, a quality analysis module, a safety control module and an energy efficiency optimization module, and the gas pretreatment module is used for removing particulate matters through an electrostatic dust collection device by adopting a multi-stage gradient filtering algorithm based on ambient air input, adjusting humidity by combining a dew point control technology, forming a standardized gas source and generating a standard gas source. Through combination of a multi-stage gradient filtering algorithm and a dew point control technology, collaborative treatment of particulate matters and humidity is realized, stable gas source input is formed, the reliability of a subsequent processing link is improved, membrane separation parameters are dynamically predicted by applying a convolutional neural network model, and the permeation efficiency of a hollow fiber membrane stack is optimized.

The invention provides an oriented ultrathin FER zeolite molecular sieve membrane as well as a preparation method and application thereof. The preparation method comprises the following steps: firstly, synthesizing a monodisperse FER zeolite nanosheet with a high length-depth ratio through a hydrothermal method; preparing a seed crystal liquid, and coating the surface of a porous carrier with the seed crystal liquid to form an oriented seed crystal layer; and carrying out hydrothermal epitaxial growth in a secondary growth solution. Through innovative design of seed crystal synthesis and epitaxial growth, the FER zeolite membrane prepared by the method has a structure with high alpha-axis preferred orientation, submicron controllable thickness, compactness and no defect. The membrane can be used for accurately screening gas molecules with small size difference by utilizing six-membered ring pore channels uniformly arranged along an a axis. When helium and methane or carbon dioxide are separated, the membrane shows permeation flux and separation selectivity far superior to those in the prior art, provides a brand new technical approach for efficient and low-energy-consumption recovery of helium and other high-value gases in the industry, and has great industrial application value.

The invention relates to an air pre-impurity-removal control method and system for enrichment and separation of Kr, and relates to the technical field of gas separation and purification, and the air pre-impurity-removal control method comprises the following steps: removing impurity components in air through an impurity removal device to obtain air subjected to impurity removal treatment; carrying out multi-stage enrichment and separation treatment on the air subjected to impurity removal treatment to obtain enriched Kr gas; and introducing the enriched Kr gas into a chromatographic separation device, and separating krypton from other inert gases to obtain a target krypton component. The problems that in the traditional Kr enrichment and separation process, due to the fact that air impurities are prone to icing, the device is blocked, the multi-stage separation parameter adaptability is poor, and the enrichment efficiency is low are solved, and through pre-impurity removal of intelligent parameter configuration and multi-stage enrichment of gradient temperature control, the Kr separation stability, the enrichment efficiency and the target component purity are improved.

The present invention relates to the technical field of special gas purification, and specifically discloses a porous adsorption material for removing neon from helium and a preparation method thereof. The method comprises the following steps: (1) preparing a lignin raw material treated by fermentation; (2) preparing a carbon precursor; (3) placing the carbon precursor in a mixed solution containing a metal salt and a surfactant, stirring and impregnating to obtain a carbon precursor impregnated with the metal salt; (4) washing the carbon precursor impregnated with the metal salt to remove the excessively deposited metal salt, and drying to obtain a washed carbon precursor; (5) activating and creating pores in the washed carbon precursor with carbon dioxide at a high temperature to obtain a porous adsorption material for removing neon from helium. The porous carbon adsorption material prepared by the present invention using renewable natural biomass raw materials has a uniformly distributed pore structure and has a high adsorption and capture ability for neon under low-temperature conditions, and can effectively remove neon impurities in helium.

The invention relates to a Kr separation method and system based on selective desorption, a terminal and a storage medium, and relates to the technical field of rare gas purification. Calculating the difference between the quotient of the historical krypton loss amount and the adsorption column mass and the initial unit krypton adsorption amount to generate the actual unit krypton adsorption amount; calculating the quotient between the product of the actual unit krypton adsorption quantity and the mass of the adsorption column and the flow velocity of the single to-be-adsorbed air so as to generate actual adsorption time; controlling the first-stage adsorption column to adsorb the to-be-adsorbed air according to the actual adsorption time so as to generate a to-be-separated adsorption column; controlling the adsorption column cleaning device to clean the adsorption column to be separated according to the actual unit krypton adsorption quantity, and collecting desorbed gas after cleaning to the waste gas storage device; and performing desorption operation on the cleaned adsorption column, controlling a gas collection device to collect desorbed gas, and heating and activating the first-stage adsorption column to recover the adsorption capacity. The application has the effect of reducing krypton loss.

The invention discloses a recovery device and method of rare gas He for CVD (chemical vapor deposition) atmosphere, and relates to the field of rare gas recovery, the recovery device of rare gas He for CVD atmosphere comprises an alkaline drying device, a primary filtering device, a helium recovery membrane group, a trace impurity removal device and a precision filtering device which are connected in sequence, the alkaline drying device is connected with a waste gas outlet of the CVD reactor, the primary filtering device is used for preliminarily filtering waste gas to remove particle dust, and an outlet of the precision filtering device is connected with the helium recovery membrane group, so that high-purity helium obtained by the precision filtering device is circularly purified. And efficient recovery and purification of the rare gas He in the CVD atmosphere are realized. By means of the circulating purification design, the helium recovery rate is increased, product losses caused by one-time treatment are effectively reduced, and therefore resource waste is reduced.

The invention belongs to the technical field of tail gas treatment, and relates to a device system and a method for recovering helium from semiconductor manufacturing process tail gas, by adopting a composite device system of an adsorption device, a membrane separation assembly and a gas purification tower, the recovery and purification operation of low-concentration helium containing toxic, corrosive and various rare gas mixed working conditions can be completed, and the helium recovery efficiency is improved. The recovered helium can be purified to 99.999% or above, the recovery rate is high, the purity is high, front and back gas heat exchange is fully utilized, the energy consumption is low, and the helium supply source is further widened; the device system is free of gas emptying in the whole process, reflows, collects and discharges back to a tail gas pipeline, and is suitable for various manufacturing processes of semiconductors.

The invention discloses a pressure buildup device and a pressure buildup method for low-temperature purification of helium. The pressure buildup device comprises a flash evaporation unit, a purification unit and a heat regeneration unit which are connected in sequence. According to the invention, through the arrangement of the pressure buildup device, the product gas of the liquid-air separator can be used for carrying out pressure buildup on the adsorber under regeneration pressure buildup in a medium-high pressure working state, so that the adsorber under the regeneration pressure buildup in the working state is prevented from pressurizing the adsorber under the regeneration pressure buildup, and the pressure of the adsorber under the working state is prevented from being lost; due to the fact that the pressure difference between a liquid-air separator and an adsorber under regeneration pressure buildup is large, middle-high pressure impact is prone to causing equipment damage, meanwhile, the pressure buildup process is conducted in the purification process, the time needed by pressure buildup is shortened, after the adsorber in the working state is saturated, pressure buildup of the adsorber in the regeneration state is completed, automatic switching can be achieved, and the efficiency is improved. And the high-purity helium is continuously produced, so that the use requirement of the high-purity helium is met.

The present invention relates to a method for separating helium and neon, which comprises adsorbing and separating a mixed gas containing helium and neon with an adsorbent containing a metal organic framework material, wherein the metal organic framework material comprises a metal ion and an organic ligand, wherein the organic ligand comprises a compound shown in Formula I; and the metal ion is selected from transition metal ions. The metal organic framework material of the present invention has low raw material price, mild synthesis conditions, simple operation, easy post-treatment, and good stability. At the same time, the metal organic framework material is used for low-temperature adsorption separation with a high neon adsorption capacity. Compared with the existing helium-neon low-temperature separation process, it has significant advantages such as low energy consumption, low equipment requirements, and simple process, and has broad industrial application prospects.

The invention relates to the technical field of special polymer functional membranes, and discloses a polybenzimidazole gas separation membrane as well as a preparation method and application thereof, the polybenzimidazole gas separation membrane has an interpenetrating network-shaped pore structure, and the polybenzimidazole gas separation membrane has a nanoscale pore structure. The pore size distribution of the nanoscale pore structure is 0.1-30 nm, and the average pore size of the nanoscale pore structure is 1-80 nm. The polybenzimidazole gas separation membrane has an interpenetrating network-shaped pore structure and a nanoscale pore structure, so that the polybenzimidazole gas separation membrane has relatively high gas selectivity and permeability coefficient and also has relatively good mechanical properties.

The invention relates to the technical field of solid separation, in particular to the high-end equipment manufacturing industry, in particular to an efficient low-temperature adsorption method helium purification device which comprises a machine body and a material control assembly, a purification cavity is formed in the machine body, helium can flow in the purification cavity from top to bottom, and an adsorbent can also flow in the purification cavity from top to bottom; the material control assembly is used for regulating and controlling the motion state of the adsorbent, the material control assembly has a first control state, and when the material control assembly is in the first control state, the material control assembly is used for mixing and stirring the adsorbent in the purification chamber. According to the helium purification device, the material control assembly is arranged, and when the material control assembly is in the first control state, the material control assembly is used for stirring and mixing the adsorbent in the purification cavity, so that the adsorbent in the purification cavity is in uniform and full contact with helium, impurities in the helium are removed, and the purity of the helium is improved.

The invention discloses a metal ion modified molecular sieve for adsorbing and purifying electronic gas helium as well as a preparation method and application of the metal ion modified molecular sieve. The synthesis method comprises the following steps: adding SSZ-13 molecular sieve powder into a metal salt aqueous solution, stirring at a second preset temperature for a second preset time, filtering with water, and drying to obtain the metal ion modified SSZ-13 molecular sieve material. The SSZ-13 molecular sieve material with proper pore diameter and strong pore surface polarity is prepared by performing accurate metal ion exchange on the SSZ-13 molecular sieve, and the SSZ-13 molecular sieve material not only has relatively high adsorption capacity on neon, but also has very low adsorption capacity on helium. Therefore, the material can preferentially and selectively adsorb neon in helium, and the purpose of producing high-purity helium can be achieved.

The invention belongs to the technical field of gas membrane separation, and discloses a preparation method of a fluorinated MOFs (Metal-Organic Frameworks) mixed matrix membrane for efficiently extracting hydrogen / helium from natural gas. CF3 is introduced into an MOFs framework to prepare fluorinated MOFs, and introduction of CF3 reduces the aperture of MOFs, enhances the molecular sieving effect, and improves the diffusion selectivity of H2 (He) / CH4. In addition,-CF3 has an inhibition effect on CH4 adsorption, and the dissolution selectivity of H2 (He) / CH4 separation is improved. The existence of-CF3 in the fluorinated MOFs can induce the MOFs and the polymer to form dipole-dipole interaction (C-F... O = C), so that the filler and the polymer have good interfacial compatibility, the improvement of the filler loading capacity is facilitated, and meanwhile, the generation of non-selective defects at an interface is avoided. The mixed matrix membrane prepared by the method has important significance in the field of high-efficiency hydrogen / helium extraction of natural gas.

The invention discloses a porous carbon particle adsorption material capable of preparing ultra-pure helium through one-step purification as well as a preparation method and application of the porous carbon particle adsorption material. The method comprises the following steps: (1) carbonizing biomass particles; (2) dipping the carbonized biomass particles in a nitrogen source-containing aqueous solution; (3) carrying out CO2 activation pore-forming and nitrogen functional group doping on the nitrogen source impregnated carbonized biomass particles obtained in the step (2) at high temperature; and (4) fully activating the nitrogen source impregnated carbonized biomass particles, performing programmed cooling, and introducing water vapor to perform secondary pore forming and oxygen functional group doping to obtain the porous carbon material. According to the method, the porous carbon particle adsorbent is prepared from natural biomass, the pore size distribution is concentrated, nitrogen and oxygen containing functional groups are rich, the adsorbent has ultrahigh adsorption and capture capacity on various impurities in the crude helium under the low-temperature condition, the impurities in the crude helium can be removed in one step, the helium is purified to reach the 6N standard, and the method is suitable for industrial production. And the application requirement of high-efficiency removal of impurities in the production process of ultra-pure helium is met.

The invention provides application of a silver modified AFX molecular sieve in xenon and krypton gas separation, and belongs to the technical field of gas separation. According to the invention, silver ions with electronegativity are introduced into AFX molecular sieve pores through ion exchange, selective adsorption of xenon is realized through the AFX topological molecular sieve subjected to Ag exchange so as to enrich xenon, and excellent separation of xenon and krypton is finally realized. The xenon and krypton adsorption isotherm of the silver modified AFX molecular sieve under the condition of 25 DEG C is tested, and the IAST (ideal adsorption solution theoretical value) of the molecular sieve is analyzed to be 36.5 through a static adsorption curve; according to the method disclosed by the invention, a dynamic penetration test is carried out under trace Xe and Kr concentrations by simulating the waste gas subjected to UNF post-treatment, and the dynamic capacity of Xe is calculated to be 104 mmol kg <-1 >, which is superior to that of other reported materials.

The utility model discloses a BOG helium extraction device with self-circulation guarantee. The BOG helium extraction device comprises a catalytic dehydrogenation unit, a crude helium extraction unit, a low-temperature helium purifier and a helium filling device, the catalytic dehydrogenation unit comprises a raw material gas BOG storage tank, a circulating compressor and a catalytic dehydrogenation device, and the raw material gas BOG storage tank is connected with the circulating compressor and the catalytic dehydrogenation device; the circulating compressor is connected with the oil separator, the oil separator is connected with the heat exchanger, the heat exchanger is connected with the second electric heater, the second electric heater is connected with the catalytic dehydrogenation device, the catalytic dehydrogenation device is connected with the heat exchanger, the heat exchanger is connected with the cooling tower, the cooling tower is connected with the first electric heater, and the first electric heater is connected with the crude helium extraction unit. The crude helium extraction unit is connected with the low-temperature helium purifier, and the low-temperature helium purifier is connected with the helium filling device. The helium extraction device disclosed by the utility model can be used for producing helium by utilizing enriched helium-containing BOG during operation, and the technology is high in helium enrichment concentration, small in investment, quick in equipment installation and flexible in operation.

The utility model provides a BOG (Boil Off Gas) dehydrogenation system, which belongs to the technical field of gas separation and comprises a dehydrogenation device, the dehydrogenation device is connected with a mixed gas source unit and a circulating heat exchange medium unit, and one end, far away from the mixed gas source unit, of the dehydrogenation device is connected with a dehydrogenation mixed gas unit; the dehydrogenation device comprises a heat exchange box body, a plurality of hydrogen storage alloy tank bodies are arranged in the heat exchange box body, each hydrogen storage alloy tank body is connected with a mixed gas inlet and a mixed gas outlet, the mixed gas inlet is connected with a mixed gas source unit, and the mixed gas outlet is connected with a dehydrogenation mixed gas unit; the BOG gas dehydrogenation system further comprises a control system, and the control system is connected with the dehydrogenation device. According to the BOG dehydrogenation system disclosed by the utility model, the purpose of hydrogen separation is achieved by adopting reversible reaction of hydrogen storage alloy and hydrogen adsorption, the process is carried out under the conditions of normal temperature and low pressure, and compared with the existing methods of low-temperature separation, high-pressure adsorption and the like, the energy consumption is greatly reduced, and energy conservation and emission reduction are facilitated.

The invention discloses an argon recovery system for EIGA powder preparation, belongs to the technical field of gas recovery, and solves the problems that the step is added for further purification after argon recovery every time, so that excessive energy is consumed, the cost of recovered argon is forcibly increased, and the production cost is reduced. Therefore, whether low-concentration impurities such as CO and H2 are mixed in argon or not needs to be detected in the argon recovery process. Comprising a pretreatment module, a filtration and purification module, a deep purification module, a pressurized gas storage module and a low-concentration impurity detection module. According to the device, argon is sampled in a split-flow mode, impurity gathering is enhanced through a sound field, detection, signal processing and the like are carried out, errors are corrected through temperature and pressure compensation, alarm is triggered, emergency purification is controlled, real-time detection and closed-loop control of the CO / H2 in the argon as low as 0.5 ppm / 0.3 ppm are achieved, routes can be switched through an execution module, the argon is treated through a chemical looping combustion reactor, impurities are removed, and the device is suitable for industrial production. And purity of argon is ensured.

The application relates to the technical field of film materials, in particular to a mixed matrix membrane and a preparation method and application thereof. Toluene is added into a viscous polyamine acid solution, the temperature is increased to 200-250 DEG C, and stirring reaction is carried out for 5-8 hours, then the precipitate is obtained through centrifugation, the precipitate is washed with methanol for 3-5 times, and the product COOH-PI is obtained through drying; zinc nitrate hexahydrate and 2-methyl imidazole are dissolved in methanol, stirring reaction is carried out at room temperature for 3-8 hours, then the product is taken out and centrifuged, the product is washed with anhydrous methanol for 3-5 times, and ZIF-8 is obtained through drying; NH2-ZIF-8 is synthesized by using the same method; COOH-PI is added into DMF and stirred to obtain a PI solution, ZIF-8 and NH2-ZIF-8 are respectively added into DMF, and MOF suspension is obtained through ultrasonic treatment for 2-5 hours, then the MOF suspension is added into the PI solution, stirring is carried out at room temperature for 24-36 hours, the casting solution obtained is poured into a flat and clean glass plate, heating is carried out at 60-65 DEG C for 24-48 hours, then the formed membrane is dried to obtain the mixed matrix membrane. The preparation condition of the mixed matrix membrane is mild, the stability of the membrane is obviously improved, and the mixed matrix membrane has high selective permeability to helium.

A hydrogen production system for producing a hydrogen gas product includes a geologic hydrogen source configured to provide a feedstock comprising hydrogen, nitrogen, and helium and purification equipment comprising two or more of: a pressure swing adsorption (PSA) device; a guard bed; a separation membrane; a reactive membrane; or a cryogenic separation device. The purification equipment is configured to receive the feedstock from the geologic hydrogen source and produce a hydrogen gas product, and production of the hydrogen gas product exhibits a carbon intensity score less than 3.0 kg CO2 eq / kg H2.

The invention provides a synthetic ammonia gas comprehensive recycling system, and relates to the technical field of synthetic ammonia. Comprising a synthetic ammonia raw material system for providing hydrogen and nitrogen raw materials for a synthetic ammonia production system, the synthetic ammonia production system for producing liquid ammonia according to the hydrogen and nitrogen raw materials and generating cold energy, and a synthetic ammonia carbon emission reduction system for producing a liquid carbon dioxide product by using tail gas of the synthetic ammonia raw material system and the cold energy provided by the synthetic ammonia production system, the synthetic ammonia tail gas recovery system uses tail gas of the synthetic ammonia production system as a raw material to produce a helium product, provides hydrogen and nitrogen raw materials for the synthetic ammonia production system and provides the methane-rich gas for the synthetic ammonia raw material system; and the adsorption efficiency is improved by using cold energy provided by a synthetic ammonia production system. The problems of low gas utilization value, low economical efficiency, high carbon emission, helium waste, high energy consumption and the like in the existing ammonia synthesis process are solved.

The invention discloses an integrated device and method for extracting helium by adopting a membrane separation technology. The device comprises a multi-stage membrane treatment unit, a decarburization unit, a dehydration unit, a dehydrogenation unit, a purification unit and a helium storage unit, all the units are sequentially connected through pipelines according to the arrangement sequence; the membrane treatment unit comprises a membrane separation unit and a membrane pressurization unit; the membrane separation unit is used for concentrating helium in natural gas; the membrane pressurizing unit is used for pressurizing the permeation gas passing through the membrane separation unit; the decarburization unit is used for removing carbon dioxide in the natural gas; the purification unit comprises a pressure swing adsorption unit and a low-temperature refining unit; the pressure swing adsorption unit is used for removing impurity gas in the crude helium; the low-temperature refining unit is used for adsorbing residual impurity components after passing through the pressure swing adsorption unit. The method can reduce energy consumption and investment to a great extent, and can be matched with a cryogenic method to co-produce liquefied natural gas.

Provided is a waste gas treatment device including a waste gas inlet configured to introduce waste gas discharged from a semiconductor processing chamber and an adsorption unit configured to adsorb competitive adsorption gas from the waste gas flowing from the waste gas inlet, and configured to adsorb xenon (Xe) from the waste gas from which the competitive adsorption gas has been removed, and recover the adsorbed xenon. Also provided are waste gas treatment methods, and waste gas adsorption and recovery systems including the present waste gas treatment devices.

The utility model discloses a helium dehydrogenation and purification device taking air as regenerated gas. The helium dehydrogenation and purification device comprises a catalytic dehydrogenation reactor, a first adsorption reactor and a second adsorption reactor, a refrigerant of the heat exchanger is connected with a feed gas source and a compressed air source, a refrigerant outlet of the heat exchanger is connected with an inlet of the catalytic dehydrogenation reactor, an outlet of the catalytic dehydrogenation reactor is connected with a heating medium inlet of the heat exchanger, and a heating medium outlet of the heat exchanger is connected with an inlet of the steam-water separator; inlets of the first adsorption reactor and the second adsorption reactor are connected with an outlet of the steam-water separator and a regenerated waste gas outlet; outlets of the first adsorption reactor and the second adsorption reactor are connected with a product gas outlet and a compressed air source; a hydrogen analyzer and a flow meter are arranged on a pipeline for connecting a refrigerant inlet of the heat exchanger with the feed gas source, and a flow controller and a flow control valve are arranged on a pipeline for connecting the refrigerant inlet of the heat exchanger with the compressed air source; the flow controller is electrically connected with the hydrogen analyzer and the flow meter and can control the opening degree of the flow control valve. The problem that hydrogen-containing gas cannot be provided as regeneration gas in most helium catalytic dehydrogenation purification scenes is solved.

The invention relates to the technical field of dust removal and filtration, and particularly discloses a dust removal and filtration treatment device for argon recovery, the dust removal and filtration treatment device comprises a gas inlet pipe, the right end of the gas inlet pipe is fixedly provided with an H-shaped pipeline, the center of the right end of the H-shaped pipeline is fixedly provided with a gas outlet pipe, and the lower end of the gas outlet pipe is fixedly provided with an outer sleeve box; an upper partition plate is fixedly mounted at the upper end of the interior of the outer sleeve box; a through hole is formed from the upper end face to the lower end face of the upper partition plate, a circular ring is fixedly installed on the inner circumferential face of the through hole, and a gear ring is rotationally installed in the circular ring. In this way, argon in the outer sleeve box can penetrate through the vent holes to enter the sleeve and then be filtered by the HEPA filter. In the overhauling process, the single HEPA filter can be started to work according to the situation, and the other HEPA filters can be taken down in a rotating mode; in this way, it is guaranteed that the device can still work in the overhauling process.

A method of recycling helium from a waste gas generated in a semiconductor process includes forming a first treatment gas by treating helium-containing waste gas emitted from a semiconductor process facility by using a scrubber module, transporting the first treatment gas to a purification facility, forming a first helium gas with a first purity by fractionating the first treatment gas in the purification facility, forming a second helium gas with a second purity by treating the first helium gas by using a back-end purification module in the purification facility, and providing the second helium gas to the semiconductor process facility.

The invention relates to the technical field of helium extraction, in particular to a high-purity helium extraction method based on low-temperature adsorption. The method comprises the following steps: in a low-temperature environment, carrying out adsorption treatment on mixed gas by utilizing a low-temperature adsorption material through a dynamic adsorption scheduling optimization algorithm to obtain unadsorbed helium and the low-temperature adsorption material after adsorbing impurity gas; carrying out desorption treatment on the low-temperature adsorption material after adsorbing the impurity gas to obtain desorbed enriched helium; and carrying out low-temperature fractionation treatment on desorbed and enriched helium and unadsorbed helium to obtain high-purity helium. The technical problems that a traditional helium extraction method is low in helium extraction efficiency, purity and recovery rate are solved.

The invention discloses an argon recovery system and method based on nano-catalysis and membrane separation synergy, the system comprises an argon pretreatment module, a nano-catalysis reaction module, a membrane separation synergy module and a rectification system, the pretreatment module removes particulate matters, oil and hydrocarbon impurities through a cyclone separator, an activated carbon adsorption tower and a precision filter; the nano catalytic module adopts a multi-tube fixed bed reactor, a Pt-CeO2-loaded carbon nanotube and ZSM-5 molecular sieve composite catalyst is arranged in the nano catalytic module, and CO and O2 are catalytically removed at the temperature of 180-220 DEG C; the membrane separation module realizes argon-nitrogen separation through a hollow fiber membrane group and a pressure swing adsorption unit which are connected in parallel, argon-rich gas is rectified and purified at-180 to-190 DEG C through a low-temperature rectifying tower, and nitrogen-containing gas at the tower top is returned to the membrane separation for circular treatment; the rectification system is integrated with a condensation evaporator, and tower top gas condensation and tower kettle liquid argon evaporation are simultaneously driven by a liquid nitrogen refrigerant, so that cold and heat coupling is realized; the system is provided with an intelligent control module to adjust the catalytic temperature, the membrane separation parameters and the reflux ratio in real time.