Novel electromagnetic target

Abstract

The utility model relates to the technical field of magnetron sputtering, and discloses a novel electromagnetic target, which comprises a circuit board backboard, two surfaces of the circuit board backboard are respectively connected with a copper circuit board I and a copper circuit board II, the copper circuit board II is provided with an electric control element, and the electric control element is provided with an electromagnetic coil. The first copper circuit board is provided with a plurality of electromagnets, the frequency of the electromagnets is adjusted by a multi-path power controller, the first copper circuit board is provided with a first installation chamber, and the electromagnets are installed in the first installation chamber through plug connectors. The electromagnetic target is assembled on the circuit board through the plug-in, the power of each electromagnet is adjusted by adopting the multi-path power controller, the electrifying frequency of all the electromagnets is adjustable, the magnetic field of each electromagnet can be independently adjusted, the size of the magnetic field of the electromagnetic target is adjusted in a stepless manner, the uniformity of the magnetic field of the electromagnetic target is optimal, and the vacuum coating effect is good.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a novel electromagnetic target. Background Art

[0002] Magnetron sputtering is a type of physical vapor deposition. The general sputtering method can be used to prepare metals, semiconductors, insulators and other materials, and has the advantages of simple equipment, easy control, large coating area and strong adhesion. Magnetron sputtering introduces a magnetic field on the target cathode surface and uses the magnetic field to confine charged particles to increase the plasma density and increase the sputtering rate.

[0003] The working principle of magnetron sputtering is that electrons, under the action of the electric field E, collide with argon atoms in the process of flying toward the substrate, causing them to ionize and produce Ar positive ions and new electrons; the new electrons fly toward the substrate, and the Ar ions are accelerated to fly toward the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to sputter.

[0004] After searching, the patent with application number CN201320025752.4 discloses a rectangular plane multi-arc target and vacuum coating device. The rectangular plane multi-arc target includes a target seat, and a target material area for accommodating a fixed target material is provided on the top surface of the target seat. The rectangular plane multi-arc target also includes a group of electromagnetic coils and a permanent magnet. The group of electromagnetic coils is arranged at a position corresponding to the target material area below the target seat, and the permanent magnet is arranged in the middle of the group of electromagnetic coils. The rectangular plane multi-arc target and vacuum coating device of the utility model are provided with an adjustable electromagnetic coil and a magnetic steel to jointly generate a magnetic field. The magnetic field is adjusted by adjusting the current passing through the electromagnetic coil to obtain the best confinement effect, thereby improving production efficiency.

[0005] Currently, the magnets in the electromagnetic targets used for vacuum coating are mostly permanent magnets, and the magnetic field strength generated is not adjustable, that is, there may be a problem of different magnetic field strengths of multiple permanent magnets, resulting in poor magnetic field uniformity of the electromagnetic target, affecting the effect of vacuum coating. Therefore, we need to propose a new type of electromagnetic target. Utility Model Content

[0006] The purpose of the utility model is to provide a new type of electromagnetic target, by using a cylindrical or rectangular DC high-frequency electromagnet, assembled on a circuit board through a plug-in, and using a multi-channel power controller to adjust the power of each electromagnet, and the power-on frequency of all electromagnets is adjustable, and the magnetic field of each electromagnet can be adjusted individually, so as to achieve stepless adjustment of the magnetic field size of the electromagnetic target, so that the uniformity of the magnetic field of the electromagnetic target is optimized, and the vacuum coating effect is good, so as to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a new electromagnetic target, including a circuit board back plate, wherein the two sides of the circuit board back plate are respectively connected to a copper circuit board 1 and a copper circuit board 2, the copper circuit board 2 is installed with an electric control element, the copper circuit board 1 is installed with a plurality of electromagnets whose frequencies are adjusted by a multi-channel power controller, the copper circuit board 1 is provided with a first installation chamber, the electromagnets are installed inside the first installation chamber through a connector, and a cooling chamber for storing cooling water is provided in the inner cavity of the circuit board back plate near the copper circuit board 1.

[0008] Preferably, a first groove is formed on the inner side wall of the first installation chamber, and a second groove is formed on the inner bottom of the first installation chamber.

[0009] Preferably, the connector includes a limiting column movably installed inside the first groove, and a spring is connected between one end of the limiting column and the inner wall of the first groove.

[0010] Preferably, the other end of the limiting column is a spherical surface, a limiting groove is provided on the outer wall of the electromagnet, and one end of the limiting column is clamped in the limiting groove.

[0011] Preferably, the connector also includes a plug post connected to the bottom of the electromagnet, a rubber block with an elliptical cross-section is sleeved on the outer wall of the plug post, the diameter of the rubber block in the middle position is larger than the inner diameter of the second groove, and the rubber block is inserted into the inside of the second groove.

[0012] Preferably, a plurality of heat conducting plates are connected to one side of the circuit board back plate, one end of the heat conducting plate penetrates into the interior of the cooling cavity, a slot is provided on the copper circuit board 1, and the other end of the copper circuit board 1 is plugged into the slot.

[0013] Preferably, a drain port communicating with the cooling chamber is formed at one end of the circuit board back plate, and a sealing plug for preventing water leakage is inserted into the drain port.

[0014] Preferably, a second installation chamber is provided on the second copper circuit board, and the electric control element is installed inside the second installation chamber.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] The utility model uses a cylindrical or rectangular DC high-frequency electromagnet, which is assembled on a circuit board through a plug-in, and adopts a multi-channel power controller to adjust the power of each electromagnet. The power-on frequency of all electromagnets is adjustable, and the magnetic field of each electromagnet can be adjusted individually, so as to realize stepless adjustment of the magnetic field size of the electromagnetic target, so that the uniformity of the magnetic field of the electromagnetic target is optimized and the vacuum coating effect is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 It is an exploded view of the utility model;

[0019] Figure 3 This is a schematic diagram of the installation of a copper circuit board and a cylindrical electromagnet of the utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the cylindrical electromagnet of the utility model;

[0021] Figure 5 The utility model is a schematic diagram of the installation of a rectangular electromagnet and a copper circuit board.

[0022] In the figure: 1. Circuit board back plate; 11. Cooling chamber; 12. Heat conduction plate; 13. Drain port; 14. Sealing plug; 2. Copper circuit board one; 21. Card slot; 22. First installation chamber; 23. Cylindrical electromagnet; 24. First groove; 25. Second groove; 26. Limiting groove; 3. Copper circuit board two; 31. Second installation chamber; 32. Electric control element; 4. Limiting column; 5. Spring; 6. Insert column; 7. Third installation chamber; 8. Rectangular electromagnet. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1

[0025] See also Figure 1-4 The utility model provides a technical solution: a new electromagnetic target, including a circuit board back plate 1, the material of the circuit board back plate 1 is cast iron, the two sides of the circuit board back plate 1 are respectively connected with a copper circuit board 1 2 and a copper circuit board 2 3, the copper circuit board 2 3 is installed with an electric control element 32, and the copper circuit board 1 2 is installed with a plurality of electromagnets whose frequencies are adjusted by a multi-channel power controller. The electromagnet adopts a customized DC high-frequency 10mm*10mm electromagnet. The multi-channel power controller can realize power adjustment for each electromagnet and can adjust the power-on frequency of all electromagnets, thereby realizing the stepless adjustment of the magnetic field size of the electromagnetic target, so that the magnetic field uniformity of the electromagnetic target is optimized. Optionally, the electromagnet in this embodiment is a cylindrical electromagnet 23.

[0026] A plurality of first installation chambers 22 are provided on the copper circuit board 2, and the electromagnet is installed inside the first installation chamber 22 through a connector. A cooling chamber 11 for storing cooling water is provided in the inner cavity of the circuit board back plate 1 near the copper circuit board 2. The cooling water is used to cool the circuit board, thereby achieving cooling of the electromagnetic target during operation.

[0027] The inner side wall of the first installation chamber 22 is provided with a first groove 24 , and two first grooves 24 are coaxially arranged. The inner bottom of the first installation chamber 22 is provided with a second groove 25 , and two second grooves 25 are symmetrically arranged.

[0028] The connector includes a limit column 4 movably installed inside the first groove 24, and a spring 5 is connected between one end of the limit column 4 and the inner wall of the first groove 24. The limit column 4 is pushed into the limit groove 26 by the elastic force of the spring 5 to achieve the limit installation of the cylindrical electromagnet 23.

[0029] The other end of the limiting post 4 is spherical, and a limiting groove 26 is provided on the outer wall of the electromagnet. One end of the limiting post 4 is clamped in the limiting groove 26 to facilitate the insertion and removal of the cylindrical electromagnet 23.

[0030] The connector also includes two plug posts 6 connected to the bottom of the electromagnet. A rubber block with an elliptical cross section is sleeved on the outer wall of the plug posts 6. The diameter of the middle position of the rubber block is larger than the inner diameter of the second groove 25. The rubber block is inserted into the inside of the second groove 25.

[0031] When the plug post 6 is inserted into the second groove 25 , the rubber block is squeezed and deformed, and the cylindrical electromagnet 23 is further limited by the friction between the rubber block and the inner wall of the second groove 25 .

[0032] A plurality of heat conducting plates 12 are connected to one side of the circuit board back plate 1, one end of the heat conducting plate 12 penetrates into the interior of the cooling cavity 11, a slot 21 is provided on the copper circuit board 12, and the other end of the copper circuit board 1 is plugged into the slot 21 to achieve rapid heat conduction.

[0033] A drain port 13 communicating with the cooling chamber 11 is provided at one end of the circuit board back plate 1 to facilitate replacement of cooling water. A sealing plug 14 is inserted into the drain port 13 to prevent water leakage.

[0034] A second installation chamber 31 is provided on the copper circuit board 3 , and the electric control component 32 is installed inside the second installation chamber 31 .

[0035] When in use, the cylindrical electromagnet 23 is assembled into the first installation chamber 22 on the copper circuit board 2. The bottom edge of the cylindrical electromagnet 23 first contacts and squeezes the spherical surface of the limiting column 4. The limiting column 4 moves toward the inside of the first groove 24, and the spring 5 is compressed. When the limiting groove 26 on the cylindrical electromagnet 23 moves to a position equal to the first groove 24, the end of the limiting column 4 is pushed into the inside of the limiting groove 26 under the push of the elastic force of the spring 5, so as to achieve the initial limit of the cylindrical electromagnet 23.

[0036] At the same time, the plug 6 at the bottom of the cylindrical electromagnet 23 is inserted into the second groove 25, the rubber block is squeezed and deformed, and the friction between the rubber block and the inner wall of the second groove 25 further limits the cylindrical electromagnet 23;

[0037] In the process of vacuum coating using the electromagnetic target of the device, the multi-channel power controller adjusts the power of each cylindrical electromagnet 23, and the power-on frequency of all cylindrical electromagnets 23 is adjustable, and the magnetic field of each cylindrical electromagnet 23 can be adjusted individually, so as to realize stepless adjustment of the magnetic field size of the electromagnetic target, so that the uniformity of the magnetic field of the electromagnetic target is optimal, and the vacuum coating effect is good.

[0038] Example 2

[0039] The same as Example 1 is not repeated here, except that

[0040] See also Figure 5 A third installation chamber 7 is provided on the copper circuit board 2, and the electromagnet is installed inside the third installation chamber 7. The electromagnet of this embodiment is a rectangular electromagnet 8, that is, the rectangular electromagnet 8 is also assembled inside the third installation chamber 7 through a connector.

[0041] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A new type of electromagnetic target, characterized in that: The invention comprises a circuit board back plate (1), wherein two sides of the circuit board back plate (1) are respectively connected to a copper circuit board 1 (2) and a copper circuit board 2 (3), an electric control element (32) is installed on the copper circuit board 2 (3), a plurality of electromagnets whose frequencies are adjusted by a multi-channel power controller are installed on the copper circuit board 1 (2), a first installation chamber (22) is provided on the copper circuit board 1 (2), the electromagnets are installed inside the first installation chamber (22) through a connector, and a cooling chamber (11) for storing cooling water is provided in the inner cavity of the circuit board back plate (1) near the copper circuit board 1 (2).

2. A novel electromagnetic target according to claim 1, characterized in that: The inner side wall of the first installation chamber (22) is provided with a first groove (24), and the inner bottom of the first installation chamber (22) is provided with a second groove (25).

3. A novel electromagnetic target according to claim 2, characterized in that: The plug-in connector comprises a limiting column (4) movably mounted inside the first groove (24), and a spring (5) is connected between one end of the limiting column (4) and the inner wall of the first groove (24).

4. A novel electromagnetic target according to claim 3, characterized in that: The other end of the limiting column (4) is a spherical surface, a limiting groove (26) is provided on the outer wall of the electromagnet, and one end of the limiting column (4) is clamped inside the limiting groove (26).

5. A novel electromagnetic target according to claim 4, characterized in that: The plug-in connector also includes a plug post (6) connected to the bottom of the electromagnet, a rubber block with an elliptical cross section is sleeved on the outer wall of the plug post (6), the diameter of the middle position of the rubber block is larger than the inner diameter of the second groove (25), and the rubber block is inserted into the interior of the second groove (25).

6. A novel electromagnetic target according to claim 1, characterized in that: A plurality of heat-conducting plates (12) are connected to one side of the circuit board back plate (1), one end of the heat-conducting plate (12) penetrates into the interior of the cooling cavity (11), a slot (21) is provided on the copper circuit board (2), and the other end of the copper circuit board (2) is plugged into the interior of the slot (21).

7. A novel electromagnetic target according to claim 1, characterized in that: One end of the circuit board back plate (1) is provided with a drainage port (13) which is in communication with the cooling chamber (11), and a sealing plug (14) is inserted into the drainage port (13) to prevent water leakage.

8. A novel electromagnetic target according to claim 1, characterized in that: The copper circuit board (3) is provided with a second installation chamber (31), and the electric control element (32) is installed inside the second installation chamber (31).

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