Magnetron sputtering equipment, rotating cathode and end head assembly

Abstract

The invention relates to the technical field of magnetron sputtering, and discloses magnetron sputtering equipment, a rotating cathode and an end head assembly, a target cylinder mounting flange is mounted at the mounting end of an end head body, and an opening corresponding to the water outlet end of a water inlet channel is formed in the middle of the target cylinder mounting flange; an annular cavity extending around the opening is formed in the middle of the target cylinder mounting flange, a first coolant opening communicated with the water inlet end of the water outlet channel is formed in the side, close to the end body, of the annular cavity, and a second coolant opening communicated with the inner space of the target cylinder is formed in the side, away from the end body, of the annular cavity. The second coolant port is located at the edge of the target cylinder mounting flange. The annular cavity is arranged in the flange, and the second coolant port communicated with the tail end of the flow channel in the target cylinder is arranged on the edge of the flange based on the annular cavity, so that the second coolant port is close to the inner wall of the target cylinder while the sealing effect of the edge of the flange is ensured, gas in the target cylinder can be thoroughly exhausted during water filling, and no exhaust dead angle exists.

Description

Technical Field

[0001] The invention relates to the technical field of magnetron sputtering, and in particular to a magnetron sputtering device, a rotating cathode and a terminal assembly. Background Art

[0002] The rotating cathode is the core component of the vacuum magnetron sputtering coating equipment for coating. Its working characteristic is that the target barrel is in a rotating state during the working process, so the target barrel utilization rate is high, the target surface is clean and the number of arcs is small. The existing vacuum dynamic sealing structure of the rotating cathode uses vacuum magnetic fluid seals or skeleton lip rubber dynamic seals. Under high power working and high temperature environment, there is a problem of heat causing vacuum dynamic seal failure or dynamic seal performance degradation. Therefore, water needs to be filled inside the cathode for water cooling during the working process.

[0003] In the existing cooling water channel structure design, refer to Figure 1 When the rotating cathode is filled with cooling water, the gas inside the target tube cannot be completely discharged due to the cooling water gravity and structural design reasons, that is, the target tube cannot be completely filled with water. As a result, when using high power, the target tube is prone to cracking, high-temperature indium flow in the bound indium layer, and other problems. This problem is particularly obvious in the case of upward sputtering, that is, when the plasma zone is at the top (the heat source is at the top). Figure 2 When the equipment is maintained and a new target barrel is replaced, the cooling water inside the target barrel cannot be completely drained, causing the cooling water to flow onto the on-site equipment or the floor, polluting the equipment or the on-site environment. The cooling water on the upper part of the target barrel cannot be filled when filling water, and the target barrel is not fully cooled under high-power processes. When draining, the cooling water in the target barrel cannot be completely discharged from the target barrel, polluting the on-site environment.

[0004] In addition, since the target barrel is in a rotating state, the vacuum coating equipment needs to have functions such as dynamic transmission of electric power, dynamic sealing of cooling water and dynamic sealing of vacuum. In the existing rotating cathode structure, in order to facilitate the design of water, electricity module and drive module, the water inlet and outlet, the electric transmission end and the drive input end are usually set at the ends of the magnetic rod respectively. The conventional rotating cathode structure is that the cooling water inlet and outlet function and the dynamic transmission and introduction function of electric power are set at one end of the target barrel, as a water and electricity functional unit block, the target barrel rotation driving function is set at the other end of the target barrel, as a driving function unit block, and the return water channel port is set on the magnetic rod at the other end of the target barrel. Or the water inlet and outlet function, the dynamic transmission and introduction function of electric power, and the target barrel rotation driving function are set at one end of the target barrel, as a water and electricity driving function unit block, and the return water channel port is set on the magnetic rod at the other end of the target barrel. Or the water inlet and outlet function, the dynamic transmission and introduction function of electric power, and the drive function are designed at one end of the target barrel, as a water and electricity driving function unit block, and the return water channel port is set at the other end of the target barrel. Although this arrangement simplifies the difficulty of arranging water and electricity at the end, it requires separate operations on both sides of the magnetic bar during connection and maintenance. At the same time, in high-power or high-temperature environments, the cooling of the vacuum dynamic seal lip rubber ring is not sufficient; the return water channel is set at the other end of the target barrel, and cannot be set at the end of the far-end magnetic bar. In some equipment upgrade and renovation projects, the ends of the target barrel must be replaced to achieve the function of filling the target barrel with water. Summary of the invention

[0005] In order to solve the technical problems existing in the background technology, the present invention proposes a magnetron sputtering device, a rotating cathode and a head assembly.

[0006] The present invention provides a tip assembly, comprising: a tip body and a target barrel mounting flange; A water inlet channel and a water outlet channel are provided in the terminal body, the water outlet end of the water inlet channel and the water inlet end of the water outlet channel are located at the mounting end of the terminal body, the target barrel mounting flange is installed on the mounting end of the terminal body, an opening corresponding to the water outlet end of the water inlet channel is provided in the middle of the target barrel mounting flange, an annular chamber extending around the opening is provided in the middle of the target barrel mounting flange, a first coolant port connected to the water inlet end of the water outlet channel is provided in the side of the annular chamber close to the terminal body, and a second coolant port connected to the inside of the target barrel is provided in the side of the annular chamber away from the terminal body, and the second coolant port is located at the edge of the target barrel mounting flange.

[0007] Preferably, the second coolant port includes a first inlet portion and a second inlet portion, the first inlet portion is located on an end surface of a target barrel mounting flange away from the end head body, and the second inlet portion is located on an outer peripheral surface of the target barrel mounting flange.

[0008] Preferably, the end head body includes an end head base, a central support, and a drive sleeve. The central support is installed on the end head base, the water inlet channel is located inside the central support, the drive sleeve is sleeved outside the central support and rotatably installed on the end head base, the water outlet channel is located outside the central support, and the target barrel mounting flange is installed on the drive sleeve.

[0009] Preferably, a rotating electric contact is provided on the central support, and the end base, the central support, the rotating electric contact and the target barrel mounting flange are electrically connected in sequence to form an electric transmission path of the target barrel.

[0010] Preferably, a spring is provided on the side of the rotating electric contact away from the target barrel mounting flange, the spring is sleeved outside the central support and connected to the central support, and the rotating electric contact is electrically connected to the central support via a conductive belt.

[0011] In the present invention, the proposed end head assembly, the target barrel mounting flange is mounted on the mounting end of the end head body, an opening corresponding to the water outlet end of the water inlet channel is provided in the middle of the target barrel mounting flange, an annular chamber extending around the opening is provided in the middle of the target barrel mounting flange, a first coolant port connected to the water inlet end of the water outlet channel is provided on the side of the annular chamber close to the end head body, a second coolant port connected to the internal space of the target barrel is provided on the side of the annular chamber away from the end head body, and the second coolant port is located at the edge of the target barrel mounting flange. Through the end head assembly with the above-mentioned optimized design, an annular chamber is provided inside the flange, and then based on the annular chamber, the second coolant port connected to the end of the internal flow channel of the target barrel is provided on the edge of the flange, so that the sealing effect of the flange edge is ensured, and the second coolant port is close to the inner wall of the target barrel, so that the gas in the target barrel can be completely discharged when filled with water, and there is no exhaust dead angle.

[0012] The present invention also provides a rotating cathode, comprising the above-mentioned end head assembly.

[0013] Preferably, it comprises: a driving end head, a supporting end head, a magnetic rod and a target barrel; the driving end head adopts an end head assembly, the supporting end head is provided with a rotatably mounted target barrel supporting flange, the magnetic rod is located between the driving end head and the supporting end head, one end of the magnetic rod is mounted on the central support and the other end is mounted on the target barrel supporting flange, the target barrel is sleeved outside the magnetic rod, and the two ends of the target barrel are respectively mounted on the target barrel mounting flange and the target barrel supporting flange; A first flow channel connected to the water inlet channel is arranged in the middle of the magnetic rod, a second flow channel is formed between the magnetic rod and the inner wall of the target tube, and the first flow channel is connected to the second flow channel.

[0014] Preferably, a reflux port connecting the first flow channel and the second flow channel is provided on the magnetic rod, and the reflux port is located on the side wall of the first flow channel at an end away from the driving end.

[0015] Preferably, a third flow channel connecting the first flow channel and the second flow channel is provided inside the target barrel supporting flange.

[0016] The present invention also provides a magnetron sputtering device, comprising the above-mentioned rotating cathode.

[0017] In the present invention, the proposed magnetron sputtering equipment and rotating cathode have technical effects similar to those of the above-mentioned end head assembly, so they are not described in detail. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of water filling of a rotating cathode in the prior art.

[0019] Figure 2 Schematic diagram of drainage of a rotating cathode in the prior art.

[0020] Figure 3 This is a schematic structural diagram of an implementation of a rotating cathode proposed by the present invention.

[0021] Figure 4 A schematic structural diagram of an implementation mode of a terminal assembly proposed by the present invention.

[0022] Figure 5 for Figure 4 Enlarged view of point A.

[0023] Figure 6 This is a schematic structural diagram of a target barrel mounting flange in an embodiment of a tip assembly proposed by the present invention.

[0024] Figure 7 A schematic diagram of the cooperation between a drive sleeve and a vacuum dynamic seal in an embodiment of an end head assembly proposed by the present invention.

[0025] Figure 8 A schematic diagram of filling water with a rotating cathode according to an embodiment of the present invention.

[0026] Fig. 9 This is a schematic diagram of drainage of an embodiment of a rotating cathode proposed in the present invention.

[0027] Fig.10 A schematic structural diagram of another embodiment of a rotating cathode proposed by the present invention.

[0028] Fig.11 A schematic structural diagram of an implementation mode of a magnetron sputtering device proposed in the present invention.

[0029] Reference numerals: 1 substrate to be coated; 101 central support; 102 end base; 104 insulating plate; 105 transition base; 106 water and electricity access block; 108 cooling liquid dynamic seal; 109 vacuum dynamic seal; 110 first bearing; 111 second bearing; 112 synchronous belt; 113 conductive belt; 114 spring; 115 rotating electric contact; 116 magnetic rod; 201 driving sleeve; 202 target barrel mounting flange; 2021 first coolant port; 2022 second coolant port; 20221 first inlet portion; 20222 second inlet portion; 203 bolt; 205 target barrel; 207 target barrel supporting flange; 301 supporting end; 4001 first flow channel; 4002 second flow channel; 4003 third flow channel. DETAILED DESCRIPTION

[0030] Reference Figure 4 and 5 , a tip assembly proposed by the present invention, a tip body and a target barrel mounting flange 202; A water inlet channel and a water outlet channel are provided in the terminal body, the water outlet end of the water inlet channel and the water inlet end of the water outlet channel are located at the mounting end of the terminal body, the target barrel mounting flange 202 is installed on the mounting end of the terminal body, the target barrel mounting flange 202 is provided with an opening corresponding to the water outlet end of the water inlet channel in the middle part, the target barrel mounting flange 202 is provided with an annular chamber extending around the opening in the middle part, the annular chamber is provided with a first coolant port 2021 connected to the water inlet end of the water outlet channel on the side close to the terminal body, and the annular chamber is provided with a second coolant port 2022 connected to the internal space of the target barrel 205 on the side away from the terminal body, and the second coolant port 2022 is located at the edge of the target barrel mounting flange 202.

[0031] In order to explain in detail the specific working mode of the end head assembly of this embodiment, this embodiment also proposes a rotating cathode, including the end head assembly.

[0032] Specifically, refer to Figure 3 The rotating cathode of this embodiment includes: a driving end head, a supporting end head 301, a magnetic rod 116 and a target barrel 205; the driving end head adopts the above-mentioned end head assembly, the supporting end head 301 is provided with a rotatably mounted target barrel supporting flange 207, the magnetic rod 116 is located between the driving end head and the supporting end head 301, one end of the magnetic rod 116 is mounted on the end head body and the other end is mounted on the target barrel supporting flange 207, the target barrel 205 is sleeved outside the magnetic rod 116, and the two ends of the target barrel 205 are respectively mounted on the target barrel mounting flange 202 and the target barrel supporting flange 207. A first flow channel 4001 communicating with the water inlet channel is provided in the middle of the magnetic rod 116, and a second flow channel 4002 is formed between the magnetic rod 116 and the inner wall of the target barrel 205.

[0033] Reference Figure 3 and 11 When the magnetron sputtering device using the rotating cathode of this embodiment is working, the magnetic bar in the middle generates plasma through the magnetic field, bombards the peripheral target barrel 205, so that the target particles are sputtered onto the substrate 1 to be coated, and at the same time, the drive sleeve 201 drives the proximal target barrel mounting flange, the target barrel and the distal target barrel support flange to rotate together to achieve coating. In order to cool down the components, the target barrel is filled with cooling water during operation.

[0034] Reference Figure 8 When the rotating cathode of this embodiment is filled with water, the coolant is sent into the water inlet channel in the driving end by the water and electricity access block 106, and then enters the first flow channel inside the magnetic bar 116, enters the second flow channel from the far end of the magnetic bar, and then returns to the water outlet channel in the end. Since the flange drives the target barrel to rotate together during operation, the second coolant port can be located at the upper edge of the flange by rotation when filling with water. At this time, after a period of water filling, the air above the target barrel 205 is discharged from the water outlet channel through the second coolant port at the top edge of the flange through the annular chamber in the flange. When the coolant port rotates to the uppermost part, the air is completely discharged.

[0035] Reference Fig. 9 During drainage, compressed air is sent into the water inlet channel by the water and electricity access block 106, then enters the first flow channel inside the magnetic bar 116, enters the second flow channel from the far end of the magnetic bar, and then returns to the water outlet channel in the end head. During drainage, the second coolant port of the target barrel mounting flange 202 rotates to the lower edge of the flange. After drainage for a period of time, the coolant in the lower part of the target barrel 205 is completely drained from the second coolant port at the bottom through the annular chamber.

[0036] Those skilled in the art should understand that the internal cooling of the cathode in the present application is not limited to water, and other liquid coolants may also be filled into the water inlet channel and the water outlet channel to achieve the cooling function.

[0037] When designing the rotating cathode, the power module of the target can be set at one end of the distal support end or at one end of the proximal drive end. In actual work, the power end, water inlet and outlet ends, and drive end of the rotating cathode are all set in the same end to facilitate equipment maintenance. At the same time, when upgrading the cathode without cooling function, only the proximal end needs to be replaced to achieve the upgrade of the cathode water cooling function, and the original distal end can continue to be used, which greatly reduces the cost of transformation.

[0038] In a specific design of the proximal drive end, the drive end includes an end base 102, a central support 101, and a drive sleeve 201. The central support 101 is mounted on the end base 102. The water inlet channel is located inside the central support 101. The drive sleeve 201 is sleeved outside the central support 101 and rotatably mounted on the end base 102. The water outlet channel is located outside the central support 101, and the target barrel mounting flange 202 is mounted on the drive sleeve 201. The water inlet channel is arranged inside the central support, and the water outlet channel is arranged inside the drive sleeve and between the drive sleeve 201 and the central support 101, so that the coolant fills the main components inside the end body, improves the cooling effect of the end body during operation, and ensures working reliability.

[0039] In actual design, the end base is set as a cylindrical structure, the central support and the drive sleeve 201 are installed inside the end base, the central support includes a mounting portion connected to the end base and a support portion for supporting the magnetic rod, the drive sleeve 201 is sleeved outside the support portion, and a bearing and a vacuum dynamic seal are provided between the drive sleeve 201 and the inner wall of the end base. In order to improve the cooling effect, in the specific design of the water outlet channel, the water outlet channel can be set between the drive sleeve 201 and the central support. Figure 7 The seal is installed on the drive sleeve 201, and the water inlet end of the water outlet channel is set in the drive sleeve 201. By improving the cooling effect of the drive sleeve 201, the cooling effect of the seal is greatly improved. In particular, the vacuum dynamic seal located between the end base and the drive sleeve 201 close to the target barrel is positioned to correspond to the water inlet end of the water outlet channel, which effectively enhances the cooling effect of the sealing structure of the vacuum dynamic seal.

[0040] Reference Figure 4 In the specific circuit design, a rotating electric contact 115 is provided on the central support 101, and the end base 102, the central support 101, the rotating electric contact 115 and the target barrel mounting flange 202 are electrically connected in sequence to form a target barrel electrical transmission path. The end base 102, the central support 101, the rotating electric contact 115 and the target barrel mounting flange 202 are electrical transmission components, located in the water outlet channel in the drive shaft sleeve 201, and immersed in the coolant during operation to ensure the cooling effect.

[0041] In a further specific design, a spring 114 is provided on the side of the rotating electric contact 115 away from the target barrel mounting flange 202, the spring 114 is sleeved outside the central support 101 and connected to the central support 101, and the rotating electric contact 115 is electrically connected to the central support 101 through a conductive tape. The electrical contact reliability between the rotating electric contact and the target barrel mounting flange is ensured by the spring support.

[0042] In addition, the first flow channel and the second flow channel can be connected to each other at the far end through a variety of design methods, and the present application does not limit the first flow channel and the second flow channel. Fig.10 As shown, in a specific connection design, a first flow channel 4001 connected to the water inlet channel is provided in the middle of the magnetic bar 116, and a second flow channel 4002 is formed between the magnetic bar 116 and the inner wall of the target tube 205; a reflux port connected to the second flow channel 4002 is provided on the side wall of the first flow channel 4001. Figure 3 As shown, in another specific connection design, a first flow channel 4001 connected to the water inlet channel is provided in the middle of the magnetic rod 116, a second flow channel 4002 is formed between the magnetic rod 116 and the inner wall of the target barrel 205, and a third flow channel 4003 connecting the first flow channel 4001 and the second flow channel 4002 is provided inside the target barrel support flange 207.

[0043] Reference Figure 6 In other specific embodiments, when the target barrel mounting flange is specifically designed, in order to ensure that the coolant and gas in the target barrel are completely discharged, in the specific setting mode of the second coolant port, the second coolant port 2022 includes a first inlet portion 20221 and a second inlet portion 20222, wherein the first inlet portion 20221 is located on the end face of the target barrel mounting flange 202 away from the end body, and the second inlet portion 20222 is located on the outer peripheral surface of the target barrel mounting flange 202. When filled with water, the gas in the upper part of the second flow channel in the target barrel can simultaneously enter the annular chamber from the first inlet portion located on the end face of the flange and the second inlet portion located on the side wall of the outer edge of the flange, forming an inlet area of ​​a three-dimensional structure, increasing the inlet area, improving the exhaust efficiency, and ensuring that the gas is completely discharged. Similarly, when draining water, the coolant can simultaneously enter the annular chamber in the flange from the first inlet portion and the second inlet portion, ensuring that the coolant is completely discharged.

[0044] Reference Fig.11 This embodiment also proposes a magnetron sputtering device, including the above-mentioned rotating cathode.

[0045] In this embodiment, the proposed magnetron sputtering equipment, rotating cathode and end head assembly, the target barrel mounting flange is installed on the mounting end of the end head body, the target barrel mounting flange is provided with an opening corresponding to the water outlet end of the water inlet channel in the middle, the target barrel mounting flange is provided with an annular chamber extending around the opening in the middle, the annular chamber is provided with a first coolant port connected to the water inlet end of the water outlet channel on the side close to the end head body, the annular chamber is provided with a second coolant port connected to the internal space of the target barrel on the side away from the end head body, and the second coolant port is located at the edge of the target barrel mounting flange. Through the end head assembly with the above-mentioned optimized design, an annular chamber is provided inside the flange, and then based on the annular chamber, the second coolant port connected to the end of the internal flow channel of the target barrel is set at the edge of the flange, while ensuring the sealing effect of the flange edge, the second coolant port is close to the inner wall of the target barrel, and the gas in the target barrel can be completely discharged when filling with water, without exhaust dead corners.

[0046] The rotating cathode and the end head assembly of this embodiment are described in detail below through specific examples.

[0047] The cooling water channel structure design of the prior art is that the cooling water on the upper part of the target barrel cannot be filled with water when filling with water, the target barrel is not cooled sufficiently under high-power processes, and the cooling water in the target barrel cannot be completely discharged from the target barrel when draining, polluting the on-site environment; in high-power or high-temperature environments, the cooling of the vacuum dynamic seal lip rubber ring is not sufficient; the return water channel is set at the other end of the target barrel and cannot be set at the end of the far-end magnetic rod. In some equipment upgrading and reconstruction projects, the ends of the target barrel must be completely replaced to realize the function of filling the target barrel with water.

[0048] The problem to be solved by this embodiment is that the target barrel can be completely filled with water, and the water in the target barrel can be completely drained when draining, thereby increasing the cooling effect of the vacuum dynamic sealing lip rubber ring. At the same time, all water inlet and outlet functions, dynamic transmission and introduction function of electric power, target barrel rotation drive function, and channel openings for filling water / draining water are all arranged at one end of the target barrel to form a unit integrating all functions. The return water outlet of the complete water channel formed by the magnetic rod and the target barrel can be arbitrarily designed at the other end of the target barrel, and can be on the magnetic rod, or on the functional block at the other end of the target barrel, or both.

[0049] The rotating cathode of this embodiment includes a proximal driving end, a distal supporting end, a magnetic rod and a target barrel.

[0050] The proximal end includes: a central support 101, an end base 102, a water and electricity access block 106, a coolant dynamic seal 108, a vacuum dynamic seal 109, a first bearing 110, a second bearing 111, a synchronous belt 112, a conductive belt 113, a spring 114, a rotating electric contact 115, a drive sleeve 201, a target barrel mounting flange 202, a target barrel 205, and a target barrel support flange 207. In the end power connection mode, the power source is connected to the water and electricity access block 106, and then transmitted to the end base 102, the central support 101, the conductive belt 113 and the rotating electric contact 115 in sequence. Then, the static rotating electric contact 115 is transmitted to the rotating target barrel mounting flange 202, and then transmitted to the target barrel 205.

[0051] The terminal base 102 and the central support 101 are made of conductive metal. In order to ensure the insulation performance, an insulating plate 104 and a transition base 105 can be arranged on the terminal base to achieve insulation and grounding. The insulating plate is made of insulating engineering plastic or other insulating materials. The transition base 105 is made of conductive metal or insulating material. The water and electricity access block 106 is made of conductive metal.

[0052] A coolant dynamic seal 108 is provided between the end base and the rotating shaft sleeve, which is used for dynamic sealing of the coolant at the water outlet end of the water outlet channel. The coolant dynamic seal 108 is made of a lip-shaped oil seal made of rubber or other materials.

[0053] The end base and the rotating sleeve are rotatably matched through the first bearing 110 and the second bearing 111, and a vacuum dynamic seal 109 is provided between the two to realize the vacuum-atmosphere dynamic seal of the rotating sleeve near the target barrel. The vacuum dynamic seal 109 is made of a lip oil seal made of rubber or other materials.

[0054] The synchronous belt 112 passes around the rotating sleeve and is used to drive the driving sleeve 201 to rotate. The conductive belt 113 realizes the electrical transmission between the central support 101 and the rotating electrical contact 115. The spring 114 is used to realize the compression between the static rotating electrical contact 115 and the dynamic target barrel mounting flange 202. In actual driving, gears or electromagnetic coupling can be used instead of the synchronous belt to realize the driving of the rotating sleeve.

[0055] The target barrel mounting flange 202 is fixed to the drive sleeve 201 by bolts 203, realizing the connection and sealing between the drive sleeve 201 and the target barrel 205, providing a circular sealing surface for dynamic vacuum sealing and dynamic coolant sealing in the target barrel, and providing a return channel for the coolant and an exhaust channel for the gas when filling with water, and providing a discharge channel for the coolant when draining water, and forming a gap close to the inner wall of the target barrel 205 at the connection with the target barrel 205. The target barrel mounting flange 202 is made of conductive metal. The ends of the target barrel can be fixed to the flanges at both ends by locking clamps.

[0056] The magnetic bar 116 realizes the magnetic field required for magnetron sputtering coating, and the hollow center provides a channel for coolant from one end of the target barrel to the other end. The target barrel 205 is made of sputtering material and is sleeved on the outside of the magnetic bar. The distal support end 301 is provided with a target barrel support flange 207 for distal support of the magnetic bar 116 and coolant sealing.

[0057] Water filling: The coolant enters the water inlet channel from the water and electricity access block 106, then enters the hollow center of the magnetic rod 116 through the coolant port in the flange, enters between the magnetic rod and the target barrel from several coolant ports on the distal target barrel support flange 207, enters the water outlet channel through the coolant port of the target barrel mounting flange 202, and returns to the water and electricity access block 106.

[0058] During operation, the target barrel 205 is in a rotating state, and the coolant port of the target barrel mounting flange 202 is in a rotating state. After being filled with water for a period of time, the air above the target barrel 205 is discharged when the second coolant port 2022 rotates to the uppermost part.

[0059] Drainage: Compressed air enters the coolant port of the flange through the water inlet channel from the water and electricity access block 106, then enters the hollow center of the magnetic rod 116, enters between the magnetic rod 116 and the target barrel 205 from several coolant ports on the distal target barrel support flange 207, enters the water outlet channel through the coolant port of the target barrel mounting flange 202, and returns to the water and electricity access block 106.

[0060] During operation, the target barrel 205 is in a rotating state, and the coolant port of the target barrel mounting flange 202 is in a rotating state. After draining for a period of time, the coolant at the bottom of the target barrel 205 is discharged and drained when the coolant port rotates to the bottom.

[0061] This application integrates the water inlet and outlet functions, the dynamic transmission and import function of electric power, the target material rotation drive function, and the water inlet and water outlet are all set at one end of the target material, forming a unit integrating all functions, improving the reliability of the equipment in high power and high temperature environments. The highly integrated functional design can reduce manufacturing costs. Reduce the transformation content of existing equipment upgrades and renovations, and greatly reduce the cost of equipment upgrades and renovations. When draining water, the cooling water in the target material can be completely discharged from the target material, and the equipment site is clean.

[0062] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A terminal assembly, characterized in that: include: The end body and the target barrel mounting flange (202); A water inlet channel and a water outlet channel are provided in the terminal body, the water outlet end of the water inlet channel and the water inlet end of the water outlet channel are located at the mounting end of the terminal body, a target barrel mounting flange (202) is mounted on the mounting end of the terminal body, an opening corresponding to the water outlet end of the water inlet channel is provided in the middle of the target barrel mounting flange (202), an annular chamber extending around the opening is provided in the middle of the target barrel mounting flange (202), a first coolant port (2021) connected to the water inlet end of the water outlet channel is provided on the side of the annular chamber close to the terminal body, a second coolant port (2022) connected to the inside of the target barrel (205) is provided on the side of the annular chamber away from the terminal body, and the second coolant port (2022) is located at the edge of the target barrel mounting flange (202).

2. The tip assembly according to claim 1, characterized in that: The second coolant port (2022) comprises a first inlet portion (20221) and a second inlet portion (20222), wherein the first inlet portion (20221) is located on an end surface of a target barrel mounting flange (202) away from the end head body, and the second inlet portion (20222) is located on an outer peripheral surface of the target barrel mounting flange (202).

3. The tip assembly according to claim 1, characterized in that: The end head body comprises an end head base (102), a central support (101), and a drive shaft sleeve (201); the central support (101) is mounted on the end head base (102); the water inlet channel is located inside the central support (101); the drive shaft sleeve (201) is sleeved outside the central support (101) and is rotatably mounted on the end head base (102); the water outlet channel is located outside the central support (101); and the target barrel mounting flange (202) is mounted on the drive shaft sleeve (201).

4. The tip assembly according to claim 3, characterized in that: A rotating electrical contact (115) is provided on the central support (101), and the end base (102), the central support (101), the rotating electrical contact (115) and the target barrel mounting flange (202) are electrically connected in sequence to form a target barrel electrical transmission path.

5. The tip assembly according to claim 4, characterized in that: A spring (114) is provided on the side of the rotating electric contact (115) away from the target barrel mounting flange (202); the spring (114) is sleeved outside the central support (101) and connected to the central support (101); the rotating electric contact (115) and the central support (101) are electrically connected via a conductive tape.

6. A rotating cathode, characterized in that: Comprising the tip assembly according to any one of claims 1-5.

7. The rotating cathode according to claim 6, characterized in that: include: A driving end head, a supporting end head (301), a magnetic rod (116) and a target barrel (205); the driving end head adopts an end head assembly, the supporting end head (301) is provided with a rotatably mounted target barrel supporting flange (207), the magnetic rod (116) is located between the driving end head and the supporting end head (301), one end of the magnetic rod (116) is mounted on the central support (101) and the other end is mounted on the target barrel supporting flange (207), the target barrel (205) is sleeved outside the magnetic rod (116), and the two ends of the target barrel (205) are respectively mounted on the target barrel mounting flange (202) and the target barrel supporting flange (207); A first flow channel (4001) communicating with the water inlet channel is provided in the middle of the magnetic bar (116), a second flow channel (4002) communicating with the water outlet channel is provided between the magnetic bar (116) and the inner wall of the target tube (205), and the first flow channel (4001) and the second flow channel (4002) are communicated.

8. The rotating cathode according to claim 7, characterized in that: The magnetic bar (116) is provided with a reflux port connecting the first flow channel (4001) and the second flow channel (4002), and the reflux port is located on the side wall of the first flow channel (4001) at an end away from the driving end.

9. The rotating cathode according to claim 7, characterized in that: A third flow channel (4003) communicating with the first flow channel (4001) and the second flow channel (4002) is provided inside the target barrel supporting flange (207).

10. A magnetron sputtering device, characterized in that: Comprising a rotating cathode according to any one of claims 6-9.

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