Precisely tuned MPCVD device

Abstract

The utility model provides an accurately tuned MPCVD device which comprises a microwave transmission device, a cavity is arranged at the bottom of the microwave transmission device, an exhaust port is formed in the bottom of the cavity, and a quartz cover is arranged in the cavity; a coaxial antenna is arranged in the microwave transmission device in a penetrating mode, the bottom of the coaxial antenna is located in the cavity, and the top of the coaxial antenna is connected with the top transmission mechanism. A plurality of bottom antennas penetrate through the bottom of the cavity, the tops of the bottom antennas are located between the inner wall of the cavity and the outer wall of the quartz cover, and the bottoms of the bottom antennas are connected with a bottom transmission mechanism. According to the scheme, the MPCVD device is simple in structure, scientific and reasonable in design and convenient to use, by arranging the top transmission mechanism and the bottom transmission mechanism, the coaxial antenna and the bottom antenna can be precisely fed, precise tuning is achieved, the precision of equipment is improved, and therefore the diamond deposition efficiency and the surface quality can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition diamond, in particular to a precisely tuned MPCVD device. Background Art

[0002] Diamond has extremely high hardness, good chemical stability, high thermal conductivity, and high light transmittance, and is widely used in precision machining, cutting tools, heat sinks, infrared optical device windows, etc. Diamond is an ultra-wide bandgap semiconductor with a bandgap width of 5.5 eV. It has the advantages of high electron mobility, high electron saturation velocity, and high breakdown field strength, and is an ideal choice for manufacturing semiconductor devices.

[0003] Chemical vapor deposition (CVD) technology can deposit single crystal and polycrystalline diamond. Common methods include DC Arc Plasma Jet, hot filament chemical vapor deposition (HFCVD), and microwave plasma chemical vapor deposition (MPCVD). MPCVD has the advantages of no pollution and high plasma density during deposition, and can be used to deposit and prepare high-quality, large-sized diamonds.

[0004] Existing MPCVD devices mainly achieve tuning through the movement of coaxial antennas, deposition tables and other components. However, they have the disadvantages of too large a tuning amplitude and inability to accurately control the plasma electron density during the tuning process, which affects the surface quality of the diamond film. Utility Model Content

[0005] The utility model provides a precisely tuned MPCVD device to solve the technical problems that the traditional tuning device is affected by the accuracy of the thread or the motor, has too high sensitivity, has too large a tuning amplitude, and cannot accurately control the plasma electron density during the tuning process, thus affecting the surface quality of the diamond film.

[0006] In order to solve the above technical problems, the utility model provides the following technical solutions:

[0007] A precisely tuned MPCVD device comprises a microwave transmission device, wherein a chamber is arranged at the bottom of the microwave transmission device, an exhaust port is opened at the bottom of the chamber, and a quartz cover is arranged inside the chamber; a coaxial antenna is arranged through the microwave transmission device, the bottom of the coaxial antenna is located in the chamber, the top of the coaxial antenna is connected to a top transmission mechanism, and the top transmission mechanism is used to drive the coaxial antenna to perform lifting and lowering movements; a plurality of bottom antennas are arranged through the bottom of the chamber, the top of the bottom antenna is located between the inner wall of the chamber and the outer wall of the quartz cover, the bottom of the bottom antenna is connected to a bottom transmission mechanism, and the bottom transmission mechanism is used to drive the bottom antenna to perform lifting and lowering movements.

[0008] Optionally, the top transmission mechanism includes a top knob, a top knob gear is arranged at the bottom of the top knob, the top knob gear is meshed with the first gear in the top double-row gears, the second gear in the top double-row gears is meshed with the top intermediate wheel, the top intermediate wheel is meshed with the top coaxial gear, the top coaxial gear is arranged at one end of the top lead screw to drive the top lead screw to rotate, and a top slider is arranged at the top of the coaxial antenna, the top slider is sleeved on the outside of the top lead screw, and is threadedly connected to the top lead screw.

[0009] Optionally, the bottom transmission mechanism includes a bottom knob, a bottom knob gear is arranged at the bottom of the bottom knob, the bottom knob gear is meshed with the first gear in the bottom double-row gears, the second gear in the bottom double-row gears is meshed with the bottom intermediate wheel, a plurality of bottom coaxial gears are meshed on the circumference of the bottom intermediate wheel, the bottom coaxial gear is arranged at one end of the bottom lead screw to drive the bottom lead screw to rotate, and a bottom slider is arranged at the bottom of the bottom antenna, the bottom slider is sleeved on the outside of the bottom lead screw, and is threadedly connected to the bottom lead screw.

[0010] Optionally, the size of the first gear in the top double row of gears is larger than the size of the second gear in the top double row of gears.

[0011] Optionally, the size of the first gear in the bottom double-row gear is larger than the size of the second gear in the bottom double-row gear.

[0012] Optionally, the top transmission mechanism is arranged at the top of the microwave transmission device, and the bottom transmission mechanism is arranged at the bottom of the chamber.

[0013] Optionally, the bottom antennas are evenly distributed in a ring shape, and the number of the bottom antennas is an even number greater than 2.

[0014] Optionally, the quartz cover is an inverted cup-shaped structure, and a sealing ring is provided between the bottom edge of the quartz cover and the chamber.

[0015] The beneficial effects of the above technical solution of the utility model are as follows:

[0016] In the above scheme, the MPCVD device has a simple structure, scientific and reasonable design, and is easy to use. By setting up a top transmission mechanism and a bottom transmission mechanism, the coaxial antenna and the bottom antenna can be accurately fed, achieving precise tuning and improving the precision of the equipment. Therefore, it can improve the diamond deposition efficiency and surface quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the MPCVD device of the utility model;

[0018] Figure 2 It is a structural schematic diagram of the top transmission mechanism of the utility model;

[0019] Figure 3 It is a top view of the MPCVD device of the utility model;

[0020] Figure 4 It is a structural schematic diagram of the bottom transmission mechanism of the utility model;

[0021] Figure 5 It is a cross-sectional view of the MPCVD device of the utility model;

[0022] Figure 6 This is a bottom view of the MPCVD device of the present utility model.

[0023] [Reference Signs]

[0024] 1. Microwave transmission device;

[0025] 2. Chamber;

[0026] 3. Quartz cover;

[0027] 4. Sealing ring;

[0028] 5. Exhaust port;

[0029] 6. Bottom antenna;

[0030] 7. Coaxial antenna;

[0031] 8. Top transmission mechanism;

[0032] 81. Top knob gear;

[0033] 82. Double row of gears at the top;

[0034] 83, top middle wheel;

[0035] 84, top coaxial gear;

[0036] 85. Top lead screw;

[0037] 86. Top slider;

[0038] 9. Bottom transmission mechanism;

[0039] 91, bottom knob gear;

[0040] 92. Double row of gears at the bottom;

[0041] 93, bottom middle wheel;

[0042] 94, bottom coaxial gear;

[0043] 95. Bottom lead screw;

[0044] 96. Bottom slider. DETAILED DESCRIPTION

[0045] In order to make the technical problems to be solved, technical solutions and advantages of the present invention more clear, a detailed description will be given below in conjunction with the accompanying drawings and specific embodiments.

[0046] like Figure 1 to Figure 6 As shown, an embodiment of the utility model provides a precisely tuned MPCVD device, including a microwave transmission device 1 for transmitting microwaves, a chamber 2 is arranged at the bottom of the microwave transmission device 1, an exhaust port is opened at the bottom of the chamber 2, and a quartz cover 3 is arranged inside the chamber 2; wherein, a cylinder connected to the microwave transmission device 1 is arranged at the top of the chamber 2, a lower end cover is arranged at the bottom of the chamber 2, the exhaust port extends from the upper end surface of the lower end cover to the side surface of the lower end cover, and the position of the exhaust port on the upper end surface of the lower end cover is located on the inner side of the quartz cover 3.

[0047] A coaxial antenna 7 is vertically arranged through the microwave transmission device 1. The coaxial antenna 7 is coaxially arranged with the microwave transmission device 1 and the chamber 2. The bottom of the coaxial antenna 7 passes through the cylinder and is located in the chamber 2. The top of the coaxial antenna 7 is connected to the top transmission mechanism 8. The top transmission mechanism 8 is used to drive the coaxial antenna 7 to move up and down, so as to control the degree to which the coaxial antenna 7 enters the chamber 2.

[0048] A plurality of bottom antennas 6 are vertically arranged through the bottom of the chamber 2. The bottom antenna 6 is slidably connected to the lower end cover of the chamber 2. The top of the bottom antenna 6 is located between the inner wall of the chamber 2 and the outer wall of the quartz cover 3. The bottom of the bottom antenna 6 is connected to the bottom transmission mechanism 9. The bottom transmission mechanism 9 is used to drive the bottom antenna 6 to perform lifting and lowering movements, thereby controlling the degree to which the bottom antenna 6 enters the chamber 2.

[0049] like Figure 2 and Figure 3As shown, the top transmission mechanism 8 includes a top knob, a top knob gear 81 is provided at the bottom of the top knob, the top knob gear 81 is meshed with the first gear in the top double-row gear 82, the second gear in the top double-row gear 82 is meshed with the top intermediate wheel 83, the top intermediate wheel 83 is meshed with the top coaxial gear 84, the top coaxial gear 84 is provided at one end of the top lead screw 85, and is coaxially provided with the top lead screw 85 to drive the top lead screw 85 to rotate, and a top slider 86 is provided at the top of the coaxial antenna 7, the top slider 86 is sleeved on the outside of the top lead screw 85, and is connected to the top lead screw 85 by a thread. By rotating the top knob, the top knob gear 81 is driven to rotate, so that the first gear and the second gear in the top double-row gear 82 with a transmission ratio of 0.2 are rotated together, and the top intermediate wheel 83 and the top coaxial gear 84 are driven to rotate, so that the top lead screw 85 is rotated to control the displacement of the top slider 86 and the coaxial antenna 7, and achieve precise control.

[0050] like Figure 4 and Figure 6 As shown, the bottom transmission mechanism 9 includes a bottom knob, a bottom knob gear 91 is provided at the bottom of the bottom knob, the bottom knob gear 91 is meshed with the first gear in the bottom double-row gear 92, the second gear in the bottom double-row gear 92 is meshed with the bottom intermediate wheel 93, and a plurality of bottom coaxial gears 94 are meshed on the circumference of the bottom intermediate wheel 93, the bottom coaxial gear 94 is provided at one end of the bottom lead screw 95, and is coaxially provided with the bottom lead screw 95 to drive the bottom lead screw 95 to rotate, and a bottom slider 96 is provided at the bottom of the bottom antenna 6, the bottom slider 96 is sleeved on the outside of the bottom lead screw 95, and is connected to the bottom lead screw 95 by a thread. By rotating the bottom knob, the bottom knob gear 91 is driven to rotate, so that the first gear and the second gear in the bottom double-row gear 92 with a transmission ratio of 0.2 are rotated together, and the bottom intermediate wheel 93 and the plurality of bottom coaxial gears 94 are driven to rotate, so that each bottom lead screw 95 is rotated to control the displacement of each bottom slider 96 and the bottom antenna 6, and realize precise control.

[0051] In this embodiment, the size of the first gear in the top double-row gear 82 is larger than the size of the second gear in the top double-row gear 82. The size of the first gear in the bottom double-row gear 92 is larger than the size of the second gear in the bottom double-row gear 92.

[0052] like Figure 1 As shown, the top transmission mechanism 8 is arranged at the top of the microwave transmission device 1, the bottom transmission mechanism 9 is arranged at the bottom of the chamber 2, the lower end cover of the chamber 2 is provided with a convex edge protruding from the side wall of the chamber 2, and the bottom knob is installed on the convex edge and is rotatably connected to the convex edge.

[0053] like Figure 6As shown, a plurality of bottom coaxial gears 94 are evenly distributed in a ring shape around the bottom intermediate wheel 93, and the bottom antenna 6 is also evenly distributed in a ring shape and is located on the outside of the bottom coaxial gear 94. The number of the bottom antennas 6 is an even number greater than 2, so that the microwaves can be evenly distributed in the chamber 2. The number of the bottom lead screw 95 and the bottom slider 96 corresponds to the number of the bottom antennas 6.

[0054] like Figure 1 As shown, the quartz cover 3 is an inverted cup-shaped structure, and a sealing ring 4 is arranged between the bottom edge of the quartz cover 3 and the chamber 2 to enhance the sealing effect.

[0055] In the above scheme, the MPCVD device has a simple structure, scientific and reasonable design, and is easy to use. By turning the knob, the double-row gears with a transmission ratio of 0.2 rotate, and through the joint action of the coaxial gears and the screw slider mechanism, the coaxial antenna and the bottom antenna are precisely fed, thereby achieving precise control of the internal volume of the chamber, achieving precise tuning, and improving the precision of the equipment. Therefore, it can increase the diamond deposition efficiency and surface quality.

[0056] The above is a preferred embodiment of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A precisely tuned MPCVD device, comprising a microwave transmission device, characterized in that: A chamber is arranged at the bottom of the microwave transmission device, an exhaust port is opened at the bottom of the chamber, and a quartz cover is arranged inside the chamber; A coaxial antenna is disposed throughout the microwave transmission device, the bottom of the coaxial antenna is located in the chamber, the top of the coaxial antenna is connected to a top transmission mechanism, and the top transmission mechanism is used to drive the coaxial antenna to perform lifting motion; A plurality of bottom antennas are disposed through the bottom of the chamber, the top of the bottom antenna is located between the inner wall of the chamber and the outer wall of the quartz cover, the bottom of the bottom antenna is connected to a bottom transmission mechanism, and the bottom transmission mechanism is used to drive the bottom antenna to perform lifting motion.

2. The precisely tuned MPCVD device according to claim 1, characterized in that: The top transmission mechanism includes a top knob, a top knob gear is arranged at the bottom of the top knob, the top knob gear is meshed with the first gear in the top double-row gears, the second gear in the top double-row gears is meshed with the top intermediate wheel, the top intermediate wheel is meshed with the top coaxial gear, the top coaxial gear is arranged at one end of the top lead screw to drive the top lead screw to rotate, and a top slider is arranged at the top of the coaxial antenna, the top slider is sleeved on the outside of the top lead screw, and is threadedly connected to the top lead screw.

3. The precisely tuned MPCVD device according to claim 1, characterized in that: The bottom transmission mechanism includes a bottom knob, a bottom knob gear is arranged at the bottom of the bottom knob, the bottom knob gear is meshed with the first gear in the bottom double-row gears, the second gear in the bottom double-row gears is meshed with the bottom intermediate wheel, a plurality of bottom coaxial gears are meshed on the circumference of the bottom intermediate wheel, the bottom coaxial gear is arranged at one end of the bottom lead screw to drive the bottom lead screw to rotate, and a bottom slider is arranged at the bottom of the bottom antenna, the bottom slider is sleeved on the outside of the bottom lead screw, and is threadedly connected to the bottom lead screw.

4. The precisely tuned MPCVD device according to claim 2, characterized in that: The size of the first gear in the top double row of gears is greater than the size of the second gear in the top double row of gears.

5. The precisely tuned MPCVD device according to claim 3, characterized in that: The size of the first gear in the bottom double-row gear is greater than the size of the second gear in the bottom double-row gear.

6. The precisely tuned MPCVD device according to claim 1, characterized in that: The top transmission mechanism is arranged at the top of the microwave transmission device, and the bottom transmission mechanism is arranged at the bottom of the chamber.

7. The precisely tuned MPCVD device according to claim 1, characterized in that: The bottom antennas are evenly distributed in a ring shape, and the number of the bottom antennas is an even number greater than 2.

8. The precisely tuned MPCVD device according to claim 1, characterized in that: The quartz cover is an inverted cup-shaped structure, and a sealing ring is arranged between the bottom edge of the quartz cover and the chamber.

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