Electrochemical mechanical polishing machine

Abstract

The utility model discloses an electrochemical mechanical polishing machine which comprises a base, an L-shaped supporting rod is fixedly arranged on the base, a feeding assembly is fixedly arranged on the L-shaped supporting rod, the feeding assembly comprises an electric telescopic rod fixedly arranged on the L-shaped supporting rod, a motor A is fixedly arranged at the end of the electric telescopic rod, and a motor B is fixedly arranged at the end of the motor A; the output end of the motor A is in threaded connection with a feeding plate through a connecting block, and a feeding table rotates on one side of the L-shaped supporting rod. A threaded groove in a connecting block at the end of a motor A is matched with a thread on a connecting rod on a feeding plate, so that the feeding plate placed on a feeding table can be grabbed, meanwhile, a product to be polished is placed on the feeding table, and after polishing is completed, the product is placed on a collecting box to be cooled and cleaned; and then the product is rotated to the feeding table to be grabbed, so that the time required for feeding the product is shortened, and the polishing efficiency of the product is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing machines, in particular to an electrochemical mechanical polishing machine. Background Art

[0002] Chemical mechanical polishing is an ultra-precision surface processing technology for global flattening.

[0003] Chinese patent CN212794514U discloses an electrochemical mechanical polishing machine, which contacts the conductive disk through the middle opening at the bottom of the protective cover, so that the polishing liquid inside the protective cover can contact the conductive disk. When the rotating polishing head with the workpiece is immersed in the polishing liquid for polishing, a current loop is formed, so that an electrolytic reaction occurs, causing electrochemical reaction on the surface of the workpiece, and electrochemical mechanical polishing is performed under the action of pressure and rotation speed.

[0004] However, after polishing is completed, a certain temperature and polishing liquid usually remain on the product. Usually, after it is cooled and cleaned, it is taken out of the polishing device and replaced with a new product, which leads to low feeding efficiency and affects the polishing efficiency. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides an electrochemical mechanical polishing machine, which solves the problem that the polished product needs to be cooled and cleaned and then replaced with a new product, resulting in low feeding efficiency and thus affecting the polishing efficiency.

[0006] To achieve the above objectives, the utility model is implemented through the following technical solutions: an electrochemical mechanical polishing machine, comprising a base, an L-shaped support rod is fixed on the base, a polishing device is fixed on the L-shaped support rod, and the polishing device comprises:

[0007] A feeding assembly is fixedly arranged on an L-shaped support rod for feeding products, the feeding assembly comprises an electric telescopic rod fixedly arranged on the L-shaped support rod, a motor A is fixedly arranged at the end of the electric telescopic rod, the output end of the motor A is threadedly connected to a feeding plate through a connecting block, a bidirectional threaded rod is rotatably arranged on the feeding plate, an arc-shaped fixing plate is threadedly sleeved on the bidirectional threaded rod, a driving shaft A is rotatably arranged on one side of the L-shaped support rod, a feeding platform is fixedly arranged at the end of the driving shaft A, a placement groove A matching the feeding plate is provided on the feeding platform, a threaded hole is provided on the connecting block, a connecting rod is fixedly arranged on the feeding plate, and a thread matching the threaded hole is provided on the connecting rod;

[0008] The polishing assembly is arranged on the base directly below the motor A and is used for polishing the product.

[0009] Preferably, the polishing assembly includes a polishing tank, a mounting frame is fixedly provided below the base, a motor B is fixedly provided inside the mounting frame, a polishing disk is rotatably provided inside the polishing tank, the output end of the motor B is fixedly connected to the polishing disk, a power supply is fixedly provided on one side of the polishing tank, the positive and negative wires of the power supply are arranged inside the polishing tank, and the polishing tank is filled with polishing liquid.

[0010] Preferably, a turntable is fixedly provided at the bottom of the L support rod, a drive shaft B is fixedly provided at the bottom of the turntable, a gear A is fixedly provided on the drive shaft B, a motor C is fixedly provided on the base, and a gear B meshing with the gear A is fixedly provided at the output end of the motor C.

[0011] Preferably, pulleys are fixedly provided on the driving shaft A and the driving shaft B, and the pulleys are connected via belt transmission.

[0012] Preferably, a collection box is fixedly provided on the other side of the L-shaped support rod, a placement groove B is opened on the collection box, a cleaning sponge is filled in the placement groove B, and a collection plate is fixedly provided between the placement groove B and the polishing groove.

[0013] Preferably, protective rubber pads are fixedly provided inside the placement groove A and the placement groove B.

[0014] Beneficial Effects

[0015] The utility model provides an electrochemical mechanical polishing machine. Compared with the prior art, it has the following beneficial effects:

[0016] (1) The electrochemical mechanical polishing machine drives the arc-shaped fixing plates to move toward each other through the bidirectional threaded rods on the loading plate, so that it can fix products of different sizes, thereby improving its applicability. At the same time, the threaded groove on the connecting block at the end of the motor A cooperates with the thread on the connecting rod on the loading plate, so that it can grab the loading plate placed on the loading table and place the product to be polished on the loading table. After polishing, the product is placed on a collection box to cool it down and clean it, thereby shortening the time required for loading the product and improving its polishing efficiency.

[0017] (2) The electrochemical mechanical polishing machine drives the drive shaft B to rotate through the gear B on the motor C, and drives the placement table to rotate through the pulley on the drive shaft B, thereby realizing the movement of the product and facilitating the user to place the product to be polished on the loading table, thereby improving its resource utilization. At the same time, the polishing liquid remaining on the product after polishing is cleaned by the cleaning sponge placed in the slot B on the collection box, thereby reducing the subsequent workload of cleaning the product after polishing, thereby improving its polishing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional diagram of the utility model;

[0019] Figure 2 It is a bottom view of the utility model;

[0020] Figure 3 It is a side view of the utility model;

[0021] Figure 4 It is a schematic diagram of the connection block of the utility model;

[0022] Figure 5 It is a schematic diagram of the polishing assembly of the utility model;

[0023] Figure 6 It is a schematic diagram of the feeding plate of the utility model.

[0024] In the figure: 1. Base; 2. L-shaped support rod; 3. Feeding assembly; 31. Electric telescopic rod; 32. Motor A; 33. Connecting block; 34. Feeding plate; 35. Bidirectional threaded rod; 36. Arc fixing plate; 37. Drive shaft A; 38. Feeding table; 39. Placement slot A; 310. Connecting rod; 4. Polishing assembly; 41. Polishing slot; 42. Motor B; 43. Polishing disc; 44. Power supply; 5. Turntable; 6. Drive shaft B; 7. Gear A; 8. Motor C; 9. Gear B; 10. Pulley; 11. Collection box; 12. Placement slot B. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] The utility model provides two technical solutions:

[0027] Figure 1-6The first embodiment is shown: an electrochemical mechanical polishing machine comprises a base 1, an L-shaped support rod 2 is fixedly provided on the base 1, a polishing device is fixedly provided on the L-shaped support rod 2, and the polishing device comprises: a loading assembly 3, fixedly provided on the L-shaped support rod 2 for loading products, the loading assembly 3 comprises an electric telescopic rod 31 fixedly provided on the L-shaped support rod 2, a motor A32 is fixedly provided at the end of the electric telescopic rod 31, a loading plate 34 is threadedly connected to the output end of the motor A32 through a connecting block 33, a bidirectional threaded rod 35 is rotatably provided on the loading plate 34, an arc-shaped fixed plate 36 is threadedly sleeved on the bidirectional threaded rod 35, a driving shaft A37 is rotatably provided on one side of the L-shaped support rod 2, a loading platform 38 is fixedly provided at the end of the driving shaft A37, and a loading platform 38 is provided on the loading platform 38 4 is a placement groove A39 matching with the motor A32, a threaded hole is provided on the connecting block 33, a connecting rod 310 is fixedly provided on the loading plate 34, and the connecting rod 310 is provided with a thread matching the threaded hole, a collecting box 11 is fixedly provided on the other side of the L-shaped support rod 2, and a placement groove B12 is provided on the collecting box 11, a polishing assembly 4 is arranged on the base 1 just below the motor A32 for polishing the product, the polishing assembly 4 includes a polishing groove 41, a mounting frame is fixedly provided below the base 1, a motor B42 is fixedly provided inside the mounting frame, a polishing disc 43 is rotatably provided inside the polishing groove 41, and the output end of the motor B42 is fixedly connected to the polishing disc 43, a power supply 44 is fixedly provided on one side of the polishing groove 41, and the positive and negative wires of the power supply 44 are arranged inside the polishing groove 41, and the polishing groove 41 is filled with polishing liquid.

[0028] The bidirectional threaded rod 35 on the loading plate 34 drives the arc-shaped fixing plate 36 to move toward each other, so that it can fix products of different sizes, thereby improving its applicability. At the same time, the threaded groove on the connecting block 33 at the end of the motor A32 cooperates with the thread on the connecting rod 310 on the loading plate 34, so that it can grab the loading plate 34 placed on the loading platform 38, and place the product to be polished on the loading platform 38. After polishing is completed, the product is placed on the collection box 11 to cool and clean it, thereby shortening the time required for loading the product and improving its polishing efficiency.

[0029] Figure 2-3A second embodiment is shown, and its main difference from the first embodiment is that a turntable 5 is fixedly provided at the bottom of the L-shaped support rod, a driving shaft B6 is fixedly provided at the bottom of the turntable 5, a gear A7 is fixedly provided on the driving shaft B6, a motor C8 is fixedly provided on the base 1, a gear B9 meshing with the gear A7 is fixedly provided at the output end of the motor C8, pulleys 10 are fixedly provided on the driving shaft A37 and the driving shaft B6, and the pulleys 10 are connected by belt transmission, a collecting box 11 is fixedly provided on the other side of the L-shaped support rod 2, a placement groove B12 is provided on the collecting box 11, a cleaning sponge is filled inside the placement groove B12, a collecting plate is fixedly provided between the placement groove B12 and the polishing groove 41, and the polishing liquid remaining on the product when the polished product is moved is collected by the collecting plate, thereby reducing the phenomenon of polishing liquid dripping on the ground during the movement, thereby reducing the waste of resources and reducing the workload of subsequent cleaning of the site, and protective rubber pads are fixedly provided inside the placement groove A39 and the placement groove B12.

[0030] The drive shaft B6 is driven to rotate by the gear B9 on the motor C8, and the placement table is driven to rotate by the pulley 10 on the drive shaft B6, so as to realize the movement of the product and facilitate the user to place the product to be polished on the loading table 38, thereby improving its resource utilization. At the same time, the polishing liquid remaining on the product after polishing is cleaned by the cleaning sponge placed in the groove B12 on the collection box 11, thereby reducing the subsequent workload of cleaning the polished product and improving its polishing efficiency.

[0031] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used.

[0032] When in use, the gear B9 at the end of the motor C8 drives the gear A7 on the drive shaft B6 to rotate, so that the L-shaped support rod 2 moves from just above the polishing groove 41 to just above the placement table, and then the electric telescopic rod 31 drives the motor A32 to move downward, so that the connecting block 33 at its end moves to just above the loading plate 34, and then the motor A32 rotates clockwise, so that the connecting rod 310 on the loading plate 34 is threadedly sleeved in the connecting block 33, and then the loading plate 34 is driven to move upward by the electric telescopic rod 31, and at the same time, the loading plate 34 is driven to move just above the polishing groove 41 by the motor C8, and then the loading plate 34 is driven to move into the polishing groove 41 by the electric telescopic rod 31, and the power supply 44 is turned on. The positive and negative electrodes provide electricity to the polishing liquid in the polishing tank 41 to cause a chemical reaction, and at the same time, the polishing disc 43 is driven to rotate by the motor B42, so as to polish the product on the loading plate 34. After polishing is completed, the loading plate 34 is driven to move out of the polishing tank 41 by the electric telescopic rod 31, and the L-shaped support rod 2 is driven by the motor C8 to move to the top of the collection box 11, and the loading plate 34 is driven to move to the inside of the discharge tank B by the electric telescopic rod 31, and then the motor A32 rotates counterclockwise to move the loading plate 34 out of the connecting block 33, and the polishing liquid remaining on the product is absorbed by the cleaning sponge in the discharge tank B, thereby reducing the workload of subsequent cleaning of the product and improving its polishing efficiency.

[0033] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0034] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An electrochemical mechanical polishing machine, comprising a base, characterized in that: An L-shaped support rod is fixed on the base, and a polishing device is fixed on the L-shaped support rod. The polishing device includes: A feeding assembly is fixedly arranged on an L-shaped support rod for feeding products, the feeding assembly comprises an electric telescopic rod fixedly arranged on the L-shaped support rod, a motor A is fixedly arranged at the end of the electric telescopic rod, the output end of the motor A is threadedly connected to a feeding plate through a connecting block, a bidirectional threaded rod is rotatably arranged on the feeding plate, an arc-shaped fixing plate is threadedly sleeved on the bidirectional threaded rod, a driving shaft A is rotatably arranged on one side of the L-shaped support rod, a feeding platform is fixedly arranged at the end of the driving shaft A, a placement groove A matching the feeding plate is provided on the feeding platform, a threaded hole is provided on the connecting block, a connecting rod is fixedly arranged on the feeding plate, and a thread matching the threaded hole is provided on the connecting rod; The polishing assembly is arranged on the base directly below the motor A and is used for polishing the product.

2. An electrochemical mechanical polishing machine according to claim 1, characterized in that: The polishing assembly includes a polishing tank, a mounting frame is fixedly provided below the base, a motor B is fixedly provided inside the mounting frame, a polishing disk is rotatably provided inside the polishing tank, the output end of the motor B is fixedly connected to the polishing disk, a power supply is fixedly provided on one side of the polishing tank, the positive and negative wires of the power supply are arranged inside the polishing tank, and the polishing tank is filled with polishing liquid.

3. An electrochemical mechanical polishing machine according to claim 1, characterized in that: A turntable is fixedly provided at the bottom of the L-shaped support rod, a driving shaft B is fixedly provided at the bottom of the turntable, a gear A is fixedly provided on the driving shaft B, a motor C is fixedly provided on the base, and a gear B meshing with the gear A is fixedly provided at the output end of the motor C.

4. The electrochemical mechanical polishing machine according to claim 1, characterized in that: The drive shaft A and the drive shaft B are both fixedly provided with pulleys, and the pulleys are connected via belt transmission.

5. The electrochemical mechanical polishing machine according to claim 1, characterized in that: A collecting box is fixedly provided on the other side of the L-shaped supporting rod. A placing groove B is opened on the collecting box. The placing groove B is filled with a cleaning sponge. A collecting plate is fixedly provided between the placing groove B and the polishing groove.

6. The electrochemical mechanical polishing machine according to claim 1, characterized in that: The placement groove A and the placement groove B are both fixedly provided with protective rubber pads.

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